CN111927796B - Power-on self-test method and device for magnetic suspension molecular pump and electronic equipment - Google Patents
Power-on self-test method and device for magnetic suspension molecular pump and electronic equipment Download PDFInfo
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- CN111927796B CN111927796B CN202010984088.0A CN202010984088A CN111927796B CN 111927796 B CN111927796 B CN 111927796B CN 202010984088 A CN202010984088 A CN 202010984088A CN 111927796 B CN111927796 B CN 111927796B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
Abstract
The invention provides a power-on self-checking method and a power-on self-checking device of a magnetic suspension molecular pump and electronic equipment, which relate to the technical field of vacuum acquisition equipment and comprise the following steps: detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged or not; if not, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller; if not, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position; if the rotor is not suspended at the preset central position, self-checking is finished, and the suspension parameters are recalculated. The power-on self-checking method provided by the invention detects important parts of the magnetic suspension molecular pump, and can effectively avoid equipment damage caused by hardware faults when the magnetic suspension molecular pump operates.
Description
Technical Field
The invention relates to the technical field of vacuum obtaining equipment, in particular to a power-on self-checking method and device of a magnetic suspension molecular pump and electronic equipment.
Background
The magnetic suspension molecular pump is a novel high-performance molecular pump which utilizes a magnetic bearing to generate electromagnetic force to enable a rotor to be suspended in the air, so that the rotor and a stator are not in mechanical contact, and the position of the rotor can be actively controlled. Because the magnetic suspension molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, long service life and the like, the magnetic suspension molecular pump is widely applied to the field of vacuum obtaining with high vacuum degree and high cleanliness. Because the magnetic suspension molecular pump needs the rotor to be in a suspension state when in operation, if the controller or the pump body fails to find the failure after long-time use, the controller or the pump body is easy to cause irreversible damage to the whole molecular pump after operation, and the damage of the magnetic suspension molecular pump is seriously caused to cause property loss.
In the prior art, the power-on self-test technology of the magnetic suspension molecular pump only checks the voltage and the current when equipment is powered on, and when the conditions meet the requirements, the equipment can automatically enter a normal operation state, but the hardware of the magnetic suspension molecular pump is not checked in the self-test process, and the magnetic suspension molecular pump is damaged due to hardware faults. In the prior art, a method for performing power-on self-test on hardware of a magnetic suspension molecular pump is not available.
Disclosure of Invention
The invention aims to provide a power-on self-test method and device for a magnetic suspension molecular pump and electronic equipment, so that equipment damage caused by hardware faults when the magnetic suspension molecular pump operates is effectively avoided.
In a first aspect, an embodiment of the present invention provides a power-on self-test method for a magnetic suspension molecular pump, including: detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged or not; if not, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller; if not, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position; if the rotor is not suspended at the preset central position, self-checking is finished, and suspension parameters are recalculated.
In an alternative embodiment, the method further comprises: if the rotor is suspended at the preset central position, reading a target fault record, wherein the target fault record is a fault record caused by the falling of the rotor and the overlarge suspension track of the rotor; judging whether the protective bearing needs to be replaced or not based on the target fault record; if the self-checking is needed, the self-checking is finished, and the protective bearing is replaced.
In an alternative embodiment, the method further comprises: if the protective bearing does not need to be replaced, detecting whether the rotation of a motor coil of the magnetic suspension molecular pump is abnormal or not; if the motor coil rotates abnormally, the self-checking is finished, and the motor coil is replaced; if the motor coil rotates normally, the self-checking is finished, and the magnetic suspension molecular pump is controlled to enter a normal operation state.
In an alternative embodiment, before the step of detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic molecular pump are damaged, the method further includes: detecting whether all power supply voltages of the magnetic suspension molecular pump are normal or not; if all the power supply voltages are normal, detecting whether the temperature value of a preset position in the magnetic suspension molecular pump is normal or not; if the temperature value of the preset position in the magnetic suspension molecular pump is normal, detecting whether the temperature value in the magnetic suspension molecular pump controller is normal or not; if the temperature value in the magnetic suspension molecular pump controller is normal, detecting the humidity value in the magnetic suspension molecular pump controller, and judging whether the interior of the magnetic suspension molecular pump controller has a dewing phenomenon or not by combining the temperature value in the magnetic suspension molecular pump controller; and if not, executing the step of detecting whether all upper and lower bridge arm switching tubes in the driving circuit of the magnetic suspension molecular pump are damaged.
In an alternative embodiment, the method further comprises: if the temperature value of the preset position in the magnetic suspension molecular pump is abnormal, the self-checking is finished, and the abnormal supply of the cooling water in the pump is determined.
In an optional embodiment, determining whether to recalculate the levitation parameter of the magnetic levitation molecular pump based on the pump body installation angle, the pump body usage time and the idle time of the magnetic levitation molecular pump controller comprises: judging whether the installation angle of the pump body is a preset angle or not; if yes, judging whether the service time of the pump body exceeds a first preset time; if the service time of the pump body does not exceed the first preset time, judging whether the idle time of the magnetic suspension molecular pump controller exceeds a second preset time; and if the idle time of the magnetic suspension molecular pump controller does not exceed the second preset time, the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated.
In an alternative embodiment, the method further comprises: if the installation angle of the pump body is not the preset angle, recalculating the suspension parameters of the magnetic suspension molecular pump; or if the service time of the pump body exceeds the first preset time, recalculating the suspension parameters of the magnetic suspension molecular pump; or if the idle time of the magnetic suspension molecular pump controller exceeds the second preset time, recalculating the suspension parameters of the magnetic suspension molecular pump.
In a second aspect, an embodiment of the present invention provides a power-on self-test apparatus for a magnetic suspension molecular pump, including: the first detection module is used for detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged; the first determination module is used for determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated or not based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller if the magnetic suspension molecular pump is not damaged; the second detection module starts the magnetic suspension molecular pump and detects whether the rotor is suspended at a preset central position if the magnetic suspension molecular pump is not needed; and the second determination module is used for finishing self-checking and recalculating the suspension parameters if the rotor is not suspended at the preset central position.
In a third aspect, an embodiment of the present invention provides an electronic device, including a memory and a processor, where the memory stores a computer program operable on the processor, and the processor executes the computer program to implement the steps of the method in any one of the foregoing embodiments.
In a fourth aspect, an embodiment of the present invention provides a computer-readable medium having non-volatile program code executable by a processor, the program code causing the processor to perform the method of any one of the foregoing embodiments.
In the prior art, the power-on self-test technology of the magnetic suspension molecular pump only checks the voltage and the current when equipment is powered on, and does not check the hardware of the magnetic suspension molecular pump. The embodiment of the invention provides a starting-up self-detection method of a magnetic suspension molecular pump, which comprises the steps of firstly detecting whether all upper and lower bridge arm switch tubes in a driving circuit of the magnetic suspension molecular pump are damaged; if not, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller; if not, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position; if the rotor is not suspended at the preset central position, self-checking is finished, and the suspension parameters are recalculated. The power-on self-checking method provided by the invention detects important parts of the magnetic suspension molecular pump, and can effectively avoid equipment damage caused by hardware faults when the magnetic suspension molecular pump operates.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a flowchart of a power-on self-test method for a magnetic suspension molecular pump according to an embodiment of the present invention;
fig. 2 is a schematic circuit connection diagram of an alternative upper and lower bridge arm switching tube according to an embodiment of the present invention;
fig. 3 is a flowchart of an alternative power-on self-test method for a magnetic suspension molecular pump according to an embodiment of the present invention;
fig. 4 is a schematic circuit connection diagram of an alternative voltage division sampling circuit according to an embodiment of the present invention;
fig. 5 is a functional block diagram of a power-on self-test apparatus of a magnetic suspension molecular pump according to an embodiment of the present invention;
fig. 6 is a schematic diagram of an electronic device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the steps illustrated in the flowcharts of the figures may be performed in a computer system such as a set of computer-executable instructions and that, although a logical order is illustrated in the flowcharts, in some cases, the steps illustrated or described may be performed in an order different than presented herein.
Some embodiments of the invention are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
In the prior art, the power-on self-test technology of the magnetic suspension molecular pump only checks the voltage and the current when equipment is powered on, and when the conditions meet the requirements, the equipment can automatically enter a normal operation state, but the hardware of the magnetic suspension molecular pump is not checked in the self-test process, and the magnetic suspension molecular pump is damaged due to hardware faults. In view of this, the embodiment of the present invention provides a power-on self-test method for a magnetic suspension molecular pump, which is used for performing power-on self-test on hardware of the magnetic suspension molecular pump.
Example one
Fig. 1 is a flowchart of a power-on self-test method for a magnetic suspension molecular pump according to an embodiment of the present invention, as shown in fig. 1, the method specifically includes the following steps:
and S102, detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged.
If not, executing step S104; if the switch tube is damaged, the self-checking is finished, and the damaged switch tube is replaced.
Specifically, a driving circuit of the magnetic suspension molecular pump includes a plurality of sets of upper and lower bridge arm switching tubes, and main vulnerable devices of the driving circuit are also switching tubes, such as Metal Oxide Semiconductor (MOS) tubes, and fig. 2 shows a schematic circuit connection diagram of an optional upper and lower bridge arm switching tube, so that it is necessary to detect whether the upper and lower bridge arm switching tubes are damaged before the magnetic suspension molecular pump operates in order to avoid a short-circuit fault caused by damage of the MOS tubes or damage of a motor and a magnetic bearing.
Taking fig. 2 as an example, firstly, an MCU (Microcontroller Unit) gives a high level to an OUT1 pin to turn on an optocoupler U1, a voltage at an IN1 pin after U1 is turned on is a divided voltage of Vin, and the MCU determines a received level of the IN1 pin, at this time, since both switching tubes Q1 and Q2 should be IN an off state, that is, the IN1 pin should be a low level, if the IN1 pin is a high level, it indicates that the switching tube Q1 is short-circuited and damaged; then, the MCU gives a high level to the PWM1 pin and a low level to the PWM2 pin, at which time the switching tube Q1 is turned on and the switching tube Q2 is turned off, the Vin position level is VCC, and at the same time the MCU gives a high level to the OUT1 pin to turn on the optocoupler U1, at which time the IN1 pin should be at a high level, and if the IN1 pin is at a low level, it indicates that the switching tube Q1 is open-circuited or the switching tube Q2 is short-circuited and damaged; finally, if Vin is at high level, the MCU provides low level to the PWM1 pin and high level to the PWM2 pin, at this time, the switch Q1 is turned off and the switch Q2 is turned on, the Vin level should be converted from VCC to GND, and at the same time, the MCU provides high level to the OUT1 pin to turn on the optocoupler U1, at this time, the IN1 pin should be at low level, and if the IN1 pin is at high level, it indicates that the switch Q2 is broken and damaged.
After all the upper and lower bridge arm switching tubes in the driving circuit of the magnetic suspension molecular pump are detected by the method, if the upper and lower bridge arm switching tubes are determined not to be damaged, the following step S104 can be continuously executed, otherwise, the self-checking step is stopped, the damaged switching tubes are replaced, and after the replacement is finished, the power-on self-checking step of the magnetic suspension molecular pump is executed again.
And step S104, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated or not based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller.
Specifically, the suspension control forces required by different pump body installation angles are different, the pump body service time is too long, so that the magnetism is degenerated, the magnetic levitation molecular pump controller idle time is too long, so that components are aged, the problem that the rotor cannot be controlled to suspend to a preset central position by adopting default suspension parameters is solved, therefore, whether the suspension parameters of the magnetic levitation molecular pump need to be recalculated is judged according to the pump body installation angles, the pump body service time and the idle time of the magnetic levitation molecular pump controller, and if the suspension parameters of the magnetic levitation molecular pump do not need to be recalculated, the following step S106 is executed.
If the suspension parameters of the magnetic suspension molecular pump need to be recalculated, firstly, the MCU controls the current direction and the magnitude of the power amplifier board to realize the magnetic bearing suction and repulsion of the rotor at a plurality of preset points; then, whether the position of the rotor reaches an expected position is collected through a position sensor and fed back to the MCU; next, the MCU readjusts the parameters to control the direction and magnitude of the current of the power amplifier board to achieve the magnetic bearing sucking and repelling the rotor at the preset position, and repeats the steps of the closed-loop adjustment for a plurality of times until the position of the rotor collected by the position sensor reaches the expected position, and uses the set of parameters that the rotor can reach the expected position as the suspension parameters of the magnetic molecular pump, in the embodiment of the present invention, the suspension parameters of the magnetic molecular pump include: the direction and magnitude of the power amplifier board current.
And step S106, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position.
If the rotor is not suspended at the preset central position, step S108 is executed.
And S108, finishing self-checking and recalculating the suspension parameters.
In the embodiment of the present invention, if it is determined that the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated according to the installation angle of the pump body, the usage time of the pump body, and the idle time of the magnetic suspension molecular pump controller, the magnetic suspension molecular pump can be started, it should be noted that the operation here is limited to starting the magnetic suspension molecular pump, but the rotation of the magnetic suspension molecular pump is not controlled, at this time, it is detected whether the rotor is suspended at the preset central position, if the rotor is not suspended at the preset central position, the self-checking step is ended, and the suspension parameters are recalculated. The detection steps of step S104 and step S106 can avoid the faults such as an excessively large levitation trajectory, abnormal acceleration and the like and further loss caused by the fact that the rotor is not levitated at the preset central position after the operation.
For example, if it is determined that the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated according to the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller, but the suspension parameters are not good, the suspension position cannot be guaranteed if the rotor is forcibly suspended, and the protective bearing is abraded in an extreme case, such as the case that the pump body is horizontally installed at 0 degrees, because all the magnetic bearings below the gravity should provide larger upward force to balance, if the pump body is horizontally installed at 180 degrees, the magnetic bearings below originally become upper, at the moment, suspension according to the original parameters becomes upper and downward force which is given to the upper part, and because of the gravity of the rotor, the rotor is attached to the protective bearing downwards, and the rotor always moves slightly, the protective bearing is then worn away, which does not occur if the levitation parameters are readjusted due to a change in angle.
In the prior art, the power-on self-test technology of the magnetic suspension molecular pump only checks the voltage and the current when the equipment is powered on, and does not check the hardware of the magnetic suspension molecular pump. The embodiment of the invention provides a starting-up self-detection method of a magnetic suspension molecular pump, which comprises the steps of firstly detecting whether all upper and lower bridge arm switch tubes in a driving circuit of the magnetic suspension molecular pump are damaged; if not, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller; if not, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position; if the rotor is not suspended at the preset central position, self-checking is finished, and the suspension parameters are recalculated. The power-on self-checking method provided by the invention detects important parts of the magnetic suspension molecular pump, and can effectively avoid equipment damage caused by hardware faults when the magnetic suspension molecular pump operates.
In an alternative embodiment, as shown in fig. 3, the method of the present invention further comprises the steps of:
if the rotor is suspended at the preset central position, step S109 is executed.
Step S109, reads the target failure record.
And step S110, judging whether the protective bearing needs to be replaced or not based on the target fault record.
If yes, executing step S111; if the protection bearing does not need to be replaced, step S112 is executed.
And step S111, finishing self-checking and replacing the protective bearing.
Specifically, a power failure or sudden power failure can cause suspension failure of the magnetic bearing, the rotor falls off, the rotor is stopped by the protective bearing, and the protective bearing is abraded in the stopping process. Failure of excessive levitation trajectory due to strong interference or other unexpected conditions, which are also stopped by the protective bearing or until re-levitated, can also wear the protective bearing. Therefore, even if the rotor can be suspended at the preset central position after the magnetic suspension molecular pump is started, in order to avoid the damage of the pump body caused by the damage of the protection bearing, the target fault record needs to be further read, and whether the protection bearing needs to be replaced is judged according to the target fault record.
When judging whether the protection bearing needs to be replaced, specific analysis needs to be carried out by combining specific conditions, because the wear state of the protection bearing is related to parameters such as the material used by the protection bearing, relevant destructive tests are determined after the protection bearing is used, the fact that the protection bearing is damaged due to the fact that the rotor drops for many times and the track is too large is determined, then an experience value of the protection bearing damage is obtained through multiple tests, different weights can be given to different fault states through determination of the experience value, the weights of all faults are weighted, and the experience value of the protection bearing damage is obtained. In actual use, if the accumulated times and duration of falling of the rotor and the times and duration of overlarge suspension track of the rotor reach the damaged empirical value after weighting, an alarm is given, namely, a user is warned to replace the protective bearing after the empirical value of damage of the protective bearing is reached.
And step S112, detecting whether the motor coil of the magnetic suspension molecular pump rotates abnormally.
If the motor coil is abnormal in rotation, executing step S113; if the motor coil rotates normally, step S114 is executed.
And step S113, finishing self-checking and replacing the motor coil.
And step S114, finishing self-checking and controlling the magnetic suspension molecular pump to enter a normal operation state.
If the motor coil of the magnetic suspension molecular pump runs in a short-circuit state, the magnetic suspension molecular pump is also in fault and loss, so that after the fact that the protective bearing does not need to be replaced is determined, whether the motor coil of the magnetic suspension molecular pump rotates abnormally or not needs to be further detected, when the motor coil state is detected, the rotor can be driven at a low voltage and a low rotating speed to detect the motor coil state, for example, when the bus voltage is 120V, the motor coil can be driven to rotate by using 24V voltage as the low voltage, if the motor coil rotates abnormally (cannot rotate), the self-detection is finished, the motor coil is replaced, and the rest of self-detection steps are executed after replacement and correctness are determined; if the motor coil rotates normally, the self-checking is finished, and the magnetic suspension molecular pump is controlled to enter a normal operation state.
In an alternative embodiment, before the step of detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic molecular pump are damaged, the method of the invention further comprises the following steps:
step S1011, detecting whether all power supply voltages of the magnetic suspension molecular pump are normal.
If all the power supply voltages are normal, step S1012 is executed; if the power supply voltage is abnormal, self-checking is finished, and the circuit related to the abnormal voltage is checked.
In order to avoid the damage to equipment caused by the problem of magnetic suspension molecular pump control due to voltage abnormality, when the magnetic suspension molecular pump performs self-detection, all power supply voltages of the magnetic suspension molecular pump are firstly detected, generally, the MCU stores the normal voltage value of each power supply voltage, and when the voltage detection is performed, each power supply voltage value can be detected through a plurality of voltage division sampling circuits, so that whether each power supply voltage is normal or not and whether the protective tube is normal or not can be judged.
Fig. 4 shows a schematic circuit connection diagram of an optional voltage division sampling circuit, taking as an example to detect whether the power supply of the detected voltage 1-3 in fig. 4 is normal, because the detected voltage 1-3 is provided with a voltage division circuit connected thereto, and each voltage division circuit is provided with a pin connected to the MCU, the MCU can read the divided voltage of each detected voltage, and the actual voltage value of each detected voltage can be reversely derived according to the divided voltage value by combining the specific voltage division ratio of the voltage division circuit, so as to determine whether the power supply of the detected voltage 1-3 in the magnetic suspension molecular pump is normal, if all the power supply voltages are normal, the following step S1012 is executed; if the power supply voltage is abnormal, the self-checking is finished, the circuit related to the abnormal voltage is checked, and the rest self-checking steps are executed after the abnormality disappears.
Step S1012, detecting whether the temperature value of the preset position inside the magnetic suspension molecular pump is normal.
If the temperature value is normal, executing step S1013; if the temperature value is abnormal, step S1016 is executed.
And step S1013, detecting whether the temperature value in the magnetic suspension molecular pump controller is normal.
If the temperature value is normal, execute step S1014; if the temperature value is abnormal, the self-checking is finished, and the heating device in the magnetic suspension molecular pump controller is checked.
And step S1014, detecting the humidity value in the magnetic suspension molecular pump controller, and judging whether the interior of the magnetic suspension molecular pump controller has the condensation phenomenon or not by combining the temperature value in the magnetic suspension molecular pump controller.
If not, go to step S1015.
And step S1015, executing the step of detecting whether all the upper and lower bridge arm switch tubes in the drive circuit of the magnetic suspension molecular pump are damaged.
In step S1016, the self-check is finished, and it is determined that the cooling water supply in the pump is abnormal.
After the fact that the power supply voltage inside the magnetic suspension molecular pump is normal is determined, whether the temperature value of a preset position inside the magnetic suspension molecular pump is normal or not needs to be further detected in order to avoid equipment damage caused by overheating or short circuit of the equipment, wherein the preset position is a temperature detection position set by a user according to an actual situation.
If the temperature value of the preset position in the magnetic suspension molecular pump is normal, whether the temperature value in the magnetic suspension molecular pump controller is normal needs to be detected again, if the temperature value is normal, the humidity value in the magnetic suspension molecular pump controller needs to be further detected, whether the dewing phenomenon exists in the magnetic suspension molecular pump controller is judged by combining the temperature value in the magnetic suspension molecular pump controller, and if the dewing phenomenon does not exist, the step S102 can be executed; if the condensation phenomenon exists, whether the heat dissipation of the fan is normal or not and whether the operating environment meets the requirements or not need to be detected.
In an optional embodiment, the step S104 of determining whether to recalculate the suspension parameter of the magnetic levitation molecular pump based on the pump body installation angle, the pump body usage time and the idle time of the magnetic levitation molecular pump controller specifically includes the following steps:
and S1041, judging whether the installation angle of the pump body is a preset angle.
If yes, go to step S1042; if not, step S1045 is executed.
Step S1042, judging whether the service time of the pump body exceeds a first preset time.
If the pump body use time does not exceed the first preset time, step S1043; and if the service life of the pump body exceeds the first preset time, executing the step S1045.
And step S1043, judging whether the idle time of the magnetic suspension molecular pump controller exceeds a second preset time.
If the idle time of the magnetic suspension molecular pump controller does not exceed the second preset time, executing the step S1044; and if the idle time of the magnetic suspension molecular pump controller exceeds a second preset time, executing the step S1045.
In step S1044, the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated.
And step S1045, recalculating the suspension parameters of the magnetic suspension molecular pump.
Specifically, it can be known from the above description that the different required suspension control forces of pump body installation angle are different, the pump body live time overlength can lead to magnetism decline, magnetic levitation molecular pump controller idle time overlength can lead to components and parts ageing, above-mentioned problem all can lead to adopting the problem that default suspension parameter can not control the rotor and suspend to predetermine central point and put, consequently need judge the suspension parameter that whether need recalculate the magnetic levitation molecular pump according to pump body installation angle, the length of pump body use and the length of time of idling of magnetic levitation molecular pump controller, wherein, the installation angle of the pump body includes any one of following: the vertical installation angle, the horizontal installation angle and the acquisition of the installation angle can be obtained by installing an angle sensor in the pump body. In the embodiment of the invention, one of the following three conditions is satisfied, namely that the suspension parameters of the magnetic molecular pump need to be recalculated: the installation angle of the pump body is not a preset angle; the service time of the pump body exceeds a first preset time; the idle time of the magnetic suspension molecular pump controller exceeds a second preset time.
In the embodiment of the invention, in the starting self-inspection process of the magnetic suspension molecular pump, all power supply voltage value detection and magnetic suspension molecular pump controller of the magnetic suspension molecular pump and temperature and humidity value detection in the pump body are executed at the beginning of the self-inspection, all upper and lower bridge arm switch tubes, the installation angle of the pump body, the use time of the pump body, the idle time of the magnetic suspension molecular pump controller and whether the rotor is suspended at a preset central position in a driving circuit of the magnetic suspension molecular pump are sequentially executed, and users can sequentially adjust the self-inspection steps of other components according to actual requirements.
In summary, the power-on self-test method for the magnetic suspension molecular pump provided by the embodiment of the invention can perform the self-test from full to detail on the magnetic suspension molecular pump controller of the magnetic suspension molecular pump and the inside of the pump body by executing the self-test steps, thereby avoiding the failure and loss of the magnetic suspension molecular pump caused by the abnormal hardware, and controlling the magnetic suspension molecular pump to enter the normal operation state after the self-test is finished and the hardware is determined to be abnormal.
Example two
The embodiment of the invention also provides a power-on self-test device of the magnetic suspension molecular pump, which is mainly used for executing the power-on self-test method of the magnetic suspension molecular pump provided by the embodiment of the invention.
Fig. 5 is a functional block diagram of a power-on self-test apparatus for a magnetic suspension molecular pump according to an embodiment of the present invention, as shown in fig. 5, the apparatus mainly includes: a first detection module 10, a first determination module 20, a second detection module 30, a second determination module 40, wherein:
the first detection module 10 is used for detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged.
If the magnetic suspension molecular pump is not damaged, the first determination module 20 determines whether to recalculate the suspension parameters of the magnetic suspension molecular pump based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller.
And if the second detection module 30 is not needed, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at the preset central position.
And the second determining module 40 is used for finishing self-checking if the rotor is not suspended at the preset central position, and recalculating the suspension parameters.
In the prior art, the power-on self-test technology of the magnetic suspension molecular pump only checks the voltage and the current when equipment is powered on, and does not check the hardware of the magnetic suspension molecular pump. The power-on self-test device of the magnetic suspension molecular pump provided by the embodiment of the invention comprises: the first detection module 10 is used for detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged; the first determining module 20 determines whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller if the pump body is not damaged; the second detection module 30 starts the magnetic suspension molecular pump if the rotor does not need to be suspended at the preset central position; and the second determining module 40 is used for finishing self-checking if the rotor is not suspended at the preset central position, and recalculating the suspension parameters. The power-on self-checking device provided by the invention detects important parts of the magnetic suspension molecular pump, and can effectively avoid equipment damage caused by hardware faults when the magnetic suspension molecular pump operates.
Optionally, the apparatus further comprises:
and the reading module is used for reading a target fault record if the rotor is suspended at the preset central position, wherein the target fault record is a fault record caused by the falling of the rotor and the overlarge suspension track of the rotor.
And the first judgment module is used for judging whether the protective bearing needs to be replaced or not based on the target fault record.
And the first replacement module finishes self-checking if needed and replaces the protection bearing.
Optionally, the apparatus further comprises:
and the third detection module is used for detecting whether the rotation of the motor coil of the magnetic suspension molecular pump is abnormal or not if the protection bearing does not need to be replaced.
And the second replacement module finishes self-checking if the motor coil rotates abnormally and replaces the motor coil.
And the control module finishes self-checking if the motor coil rotates normally and controls the magnetic suspension molecular pump to enter a normal running state.
Optionally, the apparatus further comprises:
and the fourth detection module is used for detecting whether all the power supply voltages of the magnetic suspension molecular pump are normal or not.
And the fifth detection module is used for detecting whether the temperature value of the preset position in the magnetic suspension molecular pump is normal or not if all the power supply voltages are normal.
The sixth detection module is used for detecting whether the temperature value in the controller of the magnetic suspension molecular pump is normal or not if the temperature value at the preset position in the magnetic suspension molecular pump is normal;
and the second judgment module is used for detecting the humidity value in the magnetic suspension molecular pump controller if the temperature value in the magnetic suspension molecular pump controller is normal, and judging whether the interior of the magnetic suspension molecular pump controller has the condensation phenomenon or not by combining the temperature value in the magnetic suspension molecular pump controller.
And if the execution module does not exist, executing the step of detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged.
Optionally, the apparatus further comprises:
and the third determining module is used for finishing self-checking and determining that the cooling water supply in the pump is abnormal if the temperature value of the preset position in the magnetic suspension molecular pump is abnormal.
Optionally, the first determining module 20 includes:
the first judging unit is used for judging whether the installation angle of the pump body is a preset angle or not.
And if so, judging whether the service time of the pump body exceeds the first preset time.
And the third judgment unit judges whether the idle time of the magnetic suspension molecular pump controller exceeds a second preset time if the service time of the pump body does not exceed the first preset time.
And the first determination unit does not need to recalculate the suspension parameters of the magnetic suspension molecular pump if the idle time of the magnetic suspension molecular pump controller does not exceed the second preset time.
Optionally, the first determining module 20 further includes:
the second determining unit is used for recalculating the suspension parameters of the magnetic suspension molecular pump if the installation angle of the pump body is not the preset angle; or
The third determining unit is used for recalculating the suspension parameters of the magnetic suspension molecular pump if the service life of the pump body exceeds the first preset time; or
And the fourth determining unit is used for recalculating the suspension parameters of the magnetic suspension molecular pump if the idle time of the magnetic suspension molecular pump controller exceeds the second preset time.
EXAMPLE III
Referring to fig. 6, an embodiment of the present invention provides an electronic device, including: a processor 60, a memory 61, a bus 62 and a communication interface 63, wherein the processor 60, the communication interface 63 and the memory 61 are connected through the bus 62; the processor 60 is arranged to execute executable modules, such as computer programs, stored in the memory 61.
The memory 61 may include a high-speed Random Access Memory (RAM) and may also include a non-volatile memory (non-volatile memory), such as at least one disk memory. The communication connection between the network element of the system and at least one other network element is realized through at least one communication interface 63 (which may be wired or wireless), and the internet, a wide area network, a local network, a metropolitan area network, and the like can be used.
The bus 62 may be an ISA bus, PCI bus, EISA bus, or the like. The bus may be divided into an address bus, a data bus, a control bus, etc. For ease of illustration, only one double-headed arrow is shown in FIG. 6, but that does not indicate only one bus or one type of bus.
The memory 61 is used for storing a program, the processor 60 executes the program after receiving an execution instruction, and the method executed by the apparatus defined by the flow process disclosed in any of the foregoing embodiments of the present invention may be applied to the processor 60, or implemented by the processor 60.
The processor 60 may be an integrated circuit chip having signal processing capabilities. In implementation, the steps of the above method may be performed by integrated logic circuits of hardware or instructions in the form of software in the processor 60. The Processor 60 may be a general-purpose Processor, and includes a Central Processing Unit (CPU), a Network Processor (NP), and the like; the device can also be a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other Programmable logic devices, discrete Gate or transistor logic devices, discrete hardware components. The various methods, steps and logic blocks disclosed in the embodiments of the present invention may be implemented or performed. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like. The steps of the method disclosed in connection with the embodiments of the present invention may be directly implemented by a hardware decoding processor, or implemented by a combination of hardware and software modules in the decoding processor. The software module may be located in ram, flash memory, rom, prom, or eprom, registers, etc. storage media as is well known in the art. The storage medium is located in a memory 61, and the processor 60 reads the information in the memory 61 and, in combination with its hardware, performs the steps of the above method.
The method and the device for power-on self-test of the magnetic suspension molecular pump and the computer program product of the electronic device provided by the embodiments of the present invention include a computer readable storage medium storing a non-volatile program code executable by a processor, where instructions included in the program code may be used to execute the method described in the foregoing method embodiments, and specific implementation may refer to the method embodiments, and details are not repeated herein.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer-readable storage medium executable by a processor. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A starting-up self-inspection method of a magnetic suspension molecular pump is characterized by comprising the following steps:
detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged or not;
if not, determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller;
if not, starting the magnetic suspension molecular pump, and detecting whether the rotor is suspended at a preset central position;
if the rotor is not suspended at the preset central position, self-checking is finished, and suspension parameters are recalculated.
2. The method of claim 1, further comprising:
if the rotor is suspended at the preset central position, reading a target fault record, wherein the target fault record is a fault record caused by the falling of the rotor or the overlarge suspension track of the rotor; the fact that the rotor suspension track is too large indicates that the rotor suspension is not in a preset central position;
judging whether the protective bearing needs to be replaced or not based on the target fault record;
if the self-checking is needed, the self-checking is finished, and the protective bearing is replaced.
3. The method of claim 2, further comprising:
if the protective bearing does not need to be replaced, detecting whether the rotation of a motor coil of the magnetic suspension molecular pump is abnormal or not;
if the motor coil rotates abnormally, the self-checking is finished, and the motor coil is replaced;
if the motor coil rotates normally, the self-checking is finished, and the magnetic suspension molecular pump is controlled to enter a normal operation state.
4. The method of claim 1, wherein before the step of detecting whether all upper and lower bridge arm switch tubes in a drive circuit of the magnetic molecular pump are damaged, the method further comprises:
detecting whether all power supply voltages of the magnetic suspension molecular pump are normal or not;
if all the power supply voltages are normal, detecting whether the temperature value of a preset position in the magnetic suspension molecular pump is normal or not;
if the temperature value of the preset position in the magnetic suspension molecular pump is normal, detecting whether the temperature value in the magnetic suspension molecular pump controller is normal or not;
if the temperature value in the magnetic suspension molecular pump controller is normal, detecting the humidity value in the magnetic suspension molecular pump controller, and judging whether the interior of the magnetic suspension molecular pump controller has a dewing phenomenon or not by combining the temperature value in the magnetic suspension molecular pump controller;
and if not, executing the step of detecting whether all upper and lower bridge arm switching tubes in the driving circuit of the magnetic suspension molecular pump are damaged.
5. The method of claim 4, further comprising:
if the temperature value of the preset position in the magnetic suspension molecular pump is abnormal, the self-checking is finished, and the abnormal supply of the cooling water in the pump is determined.
6. The method of claim 1, wherein determining whether the levitation parameters of the magnetic levitation molecular pump need to be recalculated based on a pump body installation angle, a pump body usage time, and a length of time that a magnetic levitation molecular pump controller is idle comprises:
judging whether the installation angle of the pump body is a preset angle or not;
if yes, judging whether the service time of the pump body exceeds a first preset time;
if the service time of the pump body does not exceed the first preset time, judging whether the idle time of the magnetic suspension molecular pump controller exceeds a second preset time;
and if the idle time of the magnetic suspension molecular pump controller does not exceed the second preset time, the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated.
7. The method of claim 6, further comprising:
if the installation angle of the pump body is not the preset angle, recalculating the suspension parameters of the magnetic suspension molecular pump; or
If the service time of the pump body exceeds the first preset time, recalculating the suspension parameters of the magnetic suspension molecular pump; or
And if the idle time of the magnetic suspension molecular pump controller exceeds the second preset time, recalculating the suspension parameters of the magnetic suspension molecular pump.
8. The utility model provides a magnetic suspension molecular pump's power-on self-checking device which characterized in that includes:
the first detection module is used for detecting whether all upper and lower bridge arm switching tubes in a driving circuit of the magnetic suspension molecular pump are damaged;
the first determination module is used for determining whether the suspension parameters of the magnetic suspension molecular pump need to be recalculated or not based on the installation angle of the pump body, the service life of the pump body and the idle time of the magnetic suspension molecular pump controller if all upper and lower bridge arm switch tubes in the driving circuit are not damaged;
the second detection module starts the magnetic suspension molecular pump and detects whether the rotor is suspended at a preset central position if the suspension parameters of the magnetic suspension molecular pump do not need to be recalculated;
and the second determination module is used for recalculating the suspension parameters after the self-checking is finished if the rotor is not suspended at the preset central position.
9. An electronic device comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, wherein the processor implements the steps of the method of any of claims 1 to 7 when executing the computer program.
10. A computer-readable medium having non-volatile program code executable by a processor, the program code causing the processor to perform the method of any of claims 1 to 7.
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| CN113530873B (en) * | 2021-09-16 | 2022-01-28 | 天津飞旋科技股份有限公司 | Magnetic suspension molecular pump and control method and device thereof |
| CN113915157B (en) * | 2021-12-13 | 2022-02-22 | 天津飞旋科技股份有限公司 | Power-off testing method and device for magnetic suspension molecular pump and master control equipment |
| CN116838635B (en) * | 2023-08-31 | 2023-11-14 | 山东豪迈机械制造有限公司 | Compressor valve self-checking method, device and equipment |
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| US10371152B2 (en) * | 2015-02-12 | 2019-08-06 | Tc1 Llc | Alternating pump gaps |
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| CN102233546A (en) * | 2010-04-29 | 2011-11-09 | 武汉新芯集成电路制造有限公司 | Slurry supplying system in chemical mechanical polishing |
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