CN111910164A - Coating machine dust keeper - Google Patents
Coating machine dust keeper Download PDFInfo
- Publication number
- CN111910164A CN111910164A CN202010585993.9A CN202010585993A CN111910164A CN 111910164 A CN111910164 A CN 111910164A CN 202010585993 A CN202010585993 A CN 202010585993A CN 111910164 A CN111910164 A CN 111910164A
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- Prior art keywords
- coating machine
- air
- frame
- dust
- pipe
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- 239000000428 dust Substances 0.000 title claims abstract description 48
- 239000011248 coating agent Substances 0.000 title claims abstract description 37
- 238000000576 coating method Methods 0.000 title claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000007747 plating Methods 0.000 claims abstract description 23
- 229920000742 Cotton Polymers 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 13
- 238000000746 purification Methods 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims description 31
- 239000007888 film coating Substances 0.000 claims description 6
- 238000009501 film coating Methods 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 230000006978 adaptation Effects 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 4
- 238000009434 installation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention relates to the technical field of coating machines and discloses a dustproof device of a coating machine. The dust-proof device of the film plating machine is provided with the air pump, the air blower, the metal filter screen, the active carbon filter disc and the PP cotton filter disc, when in use, the power supply of the air blower is switched on after the shielding door is closed, the external air can be sent into the coating machine main body through the vent pipe, so that the air in the coating machine main body is circulated, the later dust collection treatment is convenient, the power supply is closed after a certain time, the control valve B is screwed to close the vent pipe, the power supply of the air pump is switched on, the air in the film plating machine can be pumped out and enters the dust collection and purification box through the air outlet pipe, the air passes through the metal filter screen, the active carbon filter and the PP cotton filter in sequence, so that the particle dust in the gas is adsorbed and then is discharged out of the box through the exhaust pipe, thereby being convenient and rapid, the dust in the coating machine is removed, and the dust is prevented from entering the coating machine to influence coating.
Description
Technical Field
The invention relates to the technical field of coating machines, in particular to a dustproof device of a coating machine.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.
When carrying out vacuum coating to the substrate, in the external dust particle entering device often can appear, the coating film suffers the pollution, makes vacuum coating can not have effectively going on, and current equipment vacuum coating machine is mostly taken out the inside dust particle of coating machine through the aspiration pump and is adsorbed and carry out dustproof processing on the filter element, but the filter element drops easily, influences dustproof use.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a dustproof device of a film plating machine, which has the advantages of dust prevention and the like and solves the problem of poor dust prevention.
(II) technical scheme
In order to achieve the dustproof purpose, the invention provides the following technical scheme: the utility model provides a coating machine dust keeper, includes the bottom plate, its characterized in that: the film coating machine comprises a base plate, a film coating machine body, an air pump, a dust collecting and purifying box, an air outlet pipe, a fan, an air blower, a filter screen A, a breather pipe, a filter screen A and a breather pipe, wherein the base is fixedly arranged on one side of the upper surface of the base plate, the film coating machine body is fixedly arranged on the upper surface of the base plate, a case is arranged on one side of the base, the air pump is arranged in the case, the dust collecting and purifying box is fixedly arranged on the other side of the upper surface of the base plate, the air outlet pipe is fixedly arranged at the input end of the air pump, one end of the air outlet pipe penetrates through one side of the case and is fixedly connected with the bottom of one side of the dust collecting and purifying box, the air blower is fixedly arranged on the upper surface of the dust, the one end of breather pipe and the middle part fixed connection of coating machine main part side, the last fixed surface of breather pipe installs the B control valve, the positive one side of collection dirt purifying box is provided with the blast pipe, the last fixed surface of blast pipe installs the C control valve, the one end fixed mounting of blast pipe has the B filter screen.
Preferably, the lower surface of the bottom plate is fixedly provided with six feet, and the number of the feet is six.
Preferably, a shielding door is fixedly installed on one side of the film plating machine main body, and an a sealing ring is arranged on the peripheral side of one side face of the shielding door.
Preferably, a box door is fixedly installed on one side of the case, and a handle is fixedly installed on one side of the front surface of the box door.
Preferably, the middle part of the front surface of the box door is provided with a heat dissipation through groove, and one side of the heat dissipation through groove is fixedly provided with a dust guard.
Preferably, a sealing door is fixedly installed on one side of the dust collection and purification box, and a pull handle is fixedly installed on one side of the front surface of the sealing door.
Preferably, the periphery of the back surface of the sealing door is provided with a B sealing ring, and the B sealing ring and the A sealing ring are both made of rubber.
Preferably, the inner diapire fixed mounting of collection dirt purifying box has the glide slope, the inner roof fixed mounting of collection dirt purifying box has the last slide corresponding with the glide slope, the quantity of glide slope and last slide is three groups, three groups the inside difference fixed mounting of glide slope and last slide has A sealed installing frame, B sealed installing frame and C sealed installing frame, one side joint of A sealed installing frame has the fixed frame that has metal filter mesh piece, one side joint of B sealed installing frame has the fixed frame that has the active carbon filter element, one side joint of C sealed installing frame has the fixed frame that has the cotton filter element of PP.
Preferably, the both sides of the fixed frame that has metal filter mesh piece, the fixed frame that has the active carbon filter element, the fixed frame upper surface that has the cotton filter element of PP and lower surface have all been seted up and have been receive and released the groove, the inner diapire fixed mounting who receives and releases the groove has the spring, the one end fixed mounting of spring has the fixture block, the both sides of fixture block all have oblique picture peg through hinge spring fixed mounting, the draw-in groove with fixture block looks adaptation is all seted up to the both sides of roof and interior diapire in A sealed mounting frame, B sealed mounting frame and the C sealed mounting frame.
(III) advantageous effects
Compared with the prior art, the invention provides a dustproof device of a film plating machine, which has the following beneficial effects:
the dust-proof device of the film plating machine is characterized in that through the arrangement of an air suction pump, an air blower, a fixing frame with a metal filter screen sheet, a fixing frame with an active carbon filter sheet and a fixing frame with a PP cotton filter sheet, when the dust-proof device is used, after a shielding door is closed, the power supply of the air blower is switched on to operate the air blower, external air can be sent into the interior of a film plating machine main body through a vent pipe to circulate the air in the film plating machine main body, so that later dust collection treatment is facilitated, after a certain time, the power supply is switched off, a control valve B is screwed to close the vent pipe, the power supply of the air suction pump is switched on to operate the vent pipe, gas in the film plating machine can be pumped out and enters a dust collection purification box through an air outlet pipe, the gas sequentially comprises the fixing frame with the metal filter screen sheet, the fixing frame with the active, in the discharge case, convenient and fast, simultaneously, the fixed frame that has metal filter screen piece, the fixed frame that has the active carbon filter element, the fixed frame that has the cotton filter element of PP all fix with the installing frame through fixture block and inserted plate to one side, have avoided taking place the obscission, influence dustproof use.
Drawings
FIG. 1 is a schematic perspective view of a coating machine dust-proof device according to the present invention;
FIG. 2 is a schematic view of a case structure of a dustproof device of a film plating machine according to the present invention;
FIG. 3 is a schematic view of a dust collecting and purifying box of a dustproof device of a film plating machine according to the present invention;
FIG. 4 is a schematic structural view of a fixing frame of a dustproof device of a film plating machine according to the present invention;
fig. 5 is an enlarged schematic view of a structure at a position a in fig. 5 of the dustproof device of the film plating machine according to the present invention.
In the figure: 1. a base plate; 2. a base; 3. a film plating machine main body; 4. a chassis; 5. an air pump; 6. a dust collection purification box; 7. an air exhaust pipe; 8. a, controlling a valve; 9. an air outlet pipe; 10. a blower; 11. a breather pipe; 12. b, controlling a valve; 13. a lower slideway; 14. an upper slideway; 15. a, sealing and installing a frame; 16. b, sealing and installing the frame; 17. c, sealing and installing the frame; 18. a fixing frame with a metal filter mesh sheet; 19. a fixing frame with an active carbon filter disc; 20. a fixing frame with a PP cotton filter disc; 21. an exhaust pipe; 22. c, controlling a valve; 23. ground feet; 24. a shield door; 25. a, sealing rings; 26. a box door; 27. a handle; 28. a heat dissipation through groove; 29. a dust-proof plate; 30. a sealing door; 31. pulling a handle; 32. b, sealing rings; 33. a retraction slot; 34. a spring; 35. a clamping block; 36. oblique inserting plates; 37. a clamping groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, a dustproof device of a film plating machine includes a bottom plate 1, and is characterized in that: a base 2 is fixedly arranged on one side of the upper surface of a bottom plate 1, a film plating machine main body 3 is fixedly arranged on the upper surface of the base 2, a case 4 is arranged on one side of the base 2, an air suction pump 5 is arranged inside the case 4, a dust collecting purification box 6 is fixedly arranged on the other side of the upper surface of the bottom plate 1, an air suction pipe 7 is fixedly arranged at the input end of the air suction pump 5, one end of the air suction pipe 7 penetrates through the top of the case 4 and is fixedly connected with the bottom of one side of the film plating machine main body 3, an A control valve 8 is fixedly arranged on the upper surface of the air suction pipe 7, an air outlet pipe 9 is fixedly arranged at the output end of the air suction pump 5, one end of the air outlet pipe 9 penetrates through one side of the case 4 and is fixedly connected with the bottom of one side of the dust collecting, one end of the vent pipe 11 is fixedly connected with the middle part of one side surface of the coating machine main body 3, the upper surface of the vent pipe 11 is fixedly provided with a B control valve 12, one side of the front surface of the dust collecting and purifying box 6 is provided with an exhaust pipe 21, the upper surface of the exhaust pipe 21 is fixedly provided with a C control valve 22, one end of the exhaust pipe 21 is fixedly provided with a B filter screen, the lower surface of the bottom plate 1 is fixedly provided with feet 23, the number of the feet 23 is six, one side of the coating machine main body 3 is fixedly provided with a shielding door 24, the peripheral side of one side surface of the shielding door 24 is provided with an A sealing ring 25, one side of the case 4 is fixedly provided with a case door 26, one side of the front surface of the case door 6 is fixedly provided with a handle 27, the middle part of the front surface of the case door 26 is provided with a heat, the periphery of the back of the sealing door 30 is provided with a B sealing ring 32, the B sealing ring 32 and the A sealing ring 25 are made of rubber, the inner bottom wall of the dust collecting and purifying box 6 is fixedly provided with a lower slideway 13, the inner top wall of the dust collecting and purifying box 6 is fixedly provided with an upper slideway 14 corresponding to the lower slideway 13, the number of the lower slideway 13 and the upper slideway 14 is three, the three groups of lower slideway 13 and the upper slideway 14 are respectively and fixedly provided with an A sealing installation frame 15, a B sealing installation frame 16 and a C sealing installation frame 17, one side of the A sealing installation frame 15 is clamped with a fixing frame 18 with a metal filter screen, one side of the B sealing installation frame 16 is clamped with a fixing frame 19 with an active carbon filter screen, one side of the C sealing installation frame 17 is clamped with a fixing frame 20 with a PP cotton filter screen, and the fixing frame 19 with the active carbon filter screen and the fixing frame 20 with the PP cotton filter screen are arranged through the air suction pump 5, the air, when in use, after the shielding door 24 is closed, the power supply of the air blower 10 is switched on to operate the air blower, external air can be sent into the coating machine main body 3 through the vent pipe 11, so that the air in the coating machine main body 3 is circulated, the later dust collection treatment is convenient, the power supply is switched off after a certain time, the control valve B12 is screwed to close the vent pipe 11, the power supply of the air suction pump 5 is switched on to operate the air suction pump, the air in the coating machine can be sucked out and enters the dust collection purification box 6 through the air outlet pipe 9, the air is sequentially provided with the fixing frame 18 with the metal filter screen, the fixing frame 19 with the activated carbon filter disc and the fixing frame 20 with the PP cotton filter disc, so that particle dust in the air is adsorbed and then discharged out of the box through the air outlet pipe 21, the convenience and quickness are realized, meanwhile, the fixing frame 18 with the metal filter screen, the fixing frame 19 with the activated carbon filter disc and the fixing frame 20 with the PP cotton filter disc are, avoided taking place the obscission, influence dustproof use, fixed frame 18 with metal filter mesh piece, fixed frame 19 with the active carbon filter piece, fixed frame 20 upper surface with the cotton filter piece of PP has all seted up and has received and release groove 33 with the both sides of lower surface, the interior diapire fixed mounting who receives and releases groove 33 has spring 34, the one end fixed mounting of spring 34 has fixture block 35, the both sides of fixture block 35 all have oblique picture peg 36 through hinge spring fixed mounting, the draw-in groove 37 with fixture block looks adaptation is all seted up to the both sides of roof and interior diapire in A sealed mounting frame 15, B sealed mounting frame 16 and the C sealed mounting frame 17.
The electrical components in the paper are all electrically connected with an external master controller and 380V industrial electricity, and the master controller can be a computer and other conventional known devices for controlling.
When in use, the substrate is firstly placed in the coating machine main body 3, then the shielding door 24 is closed, the power supply of the blower 10 is switched on to operate, the external air can be sent into the coating machine main body 3 through the vent pipe 11, so that the air in the coating machine main body 3 is circulated, the later dust collection treatment is convenient, the power supply is closed after a certain time, the control valve B12 is screwed to close the vent pipe 11, the power supply of the air suction pump 5 is switched on to operate, the air in the film plating machine can be pumped out and enters the dust collection and purification box 6 through the air outlet pipe 9, the air passes through the metal filter screen 18, the activated carbon filter 19 and the PP cotton filter 20 in sequence, make the granule dust in the gas obtain adsorbing, then through blast pipe 21, discharge incasement, the coating machine main part 3 is inside after the evacuation, closes A control valve 8, begins vacuum coating, and after the coating, it can to take out.
In conclusion, the dust-proof device of the film plating machine is characterized in that through the arrangement of the air suction pump 5, the air blower 10, the fixing frame 18 with the metal filter screen, the fixing frame 19 with the activated carbon filter sheet and the fixing frame 20 with the PP cotton filter sheet, when in use, after the shielding door 24 is closed, the power supply of the air blower 10 is switched on to operate, external air can be sent into the film plating machine main body 3 through the vent pipe 11 to circulate the air in the film plating machine main body 3, so that the later dust absorption treatment is convenient, the power supply is switched off after a certain time, the control valve B12 is screwed to close the vent pipe 11, the power supply of the air suction pump 5 is switched on to operate, the air in the film plating machine can be pumped out and enters the dust collection purification box 6 through the air outlet pipe 9, the air sequentially comprises the fixing frame 18 with the metal filter screen, the fixing frame 19 with the activated carbon filter sheet and, make the granule dust in the gas obtain adsorbing, then through blast pipe 21, discharge incasement, convenient and fast, simultaneously, fixed frame 18 that has metal filter mesh piece, fixed frame 19 that has the active carbon filter element, fixed frame 20 that has the cotton filter element of PP all are fixed with the installing frame through fixture block 35 and oblique picture peg 36, have avoided taking place the obscission, influence dustproof use.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the use of the verb "comprise a" to define an element does not exclude the presence of another, same element in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a coating machine dust keeper, includes bottom plate (1), its characterized in that: the film coating machine is characterized in that a base (2) is fixedly mounted on one side of the upper surface of the bottom plate (1), a film coating machine main body (3) is fixedly mounted on the upper surface of the base (2), a machine case (4) is arranged on one side of the base (2), an air suction pump (5) is arranged inside the machine case (4), a dust collection purification box (6) is fixedly mounted on the other side of the upper surface of the bottom plate (1), an air suction pipe (7) is fixedly mounted at the input end of the air suction pump (5), one end of the air suction pipe (7) penetrates through the top of the machine case (4) and is fixedly connected with the bottom of one side face of the film coating machine main body (3), an A control valve (8) is fixedly mounted on the upper surface of the air suction pipe (7), an air outlet pipe (9) is fixedly mounted at the output end of the air suction pump (5), one end of the air outlet, the last fixed surface of collection dirt purifying box (6) installs air-blower (10), the input of air-blower (10) is provided with the A filter screen, the output fixed mounting of air-blower (10) has breather pipe (11), the middle part fixed connection of the one end of breather pipe (11) and coating machine main part (3) side, the last fixed surface of breather pipe (11) installs B control valve (12), the positive one side of collection dirt purifying box (6) is provided with blast pipe (21), the last fixed surface of blast pipe (21) installs C control valve (22), the one end fixed mounting of blast pipe (21) has the B filter screen.
2. The coating machine dust keeper of claim 1, characterized in that: the lower surface fixed mounting of bottom plate (1) has lower margin (23), the quantity of lower margin (23) is six.
3. The coating machine dust keeper of claim 1, characterized in that: one side of the film plating machine main body (3) is fixedly provided with a shielding door (24), and the periphery of one side face of the shielding door (24) is provided with an A sealing ring (25).
4. The coating machine dust keeper of claim 1, characterized in that: a box door (26) is fixedly mounted on one side of the box (4), and a handle (27) is fixedly mounted on one side of the front face of the box door (6).
5. The coating machine dust keeper of claim 4, characterized by: a heat dissipation through groove (28) is formed in the middle of the front face of the box door (26), and a dust guard (29) is fixedly mounted on one side of the heat dissipation through groove (28).
6. The coating machine dust keeper of claim 1, characterized in that: one side of the dust collection and purification box (6) is fixedly provided with a sealing door (30), and one side of the front surface of the sealing door (30) is fixedly provided with a pull handle (31).
7. The coating machine dust keeper of claim 6, characterized by: the periphery of the back face of the sealing door (30) is provided with a B sealing ring (32), and the B sealing ring (32) and the A sealing ring (25) are both made of rubber.
8. The coating machine dust keeper of claim 1, characterized in that: the inner bottom wall fixed mounting of collection dirt purifying box (6) has glide slope (13), the inner roof fixed mounting of collection dirt purifying box (6) has last slide (14) corresponding with glide slope (13), the quantity of glide slope (13) and last slide (14) is three groups, three groups the inside difference fixed mounting of glide slope (13) and last slide (14) has A sealed installing frame (15), B sealed installing frame (16) and C sealed installing frame (17), one side joint of A sealed installing frame (15) has fixed frame (18) that have metallic filter net piece, one side joint of B sealed installing frame (16) has fixed frame (19) that have the active carbon filter piece, one side joint of C sealed installing frame (17) has fixed frame (20) that have the cotton filter piece of PP.
9. The coating machine dust keeper of claim 8, characterized by:
the utility model discloses a fixing frame, including fixing frame (18) with metal filter mesh piece, fixed frame (19) with the active carbon filter piece, fixed frame (20) upper surface that has the cotton filter piece of PP and the both sides of lower surface have all been seted up and have been receive and release groove (33), the interior diapire fixed mounting who receives and releases groove (33) has spring (34), the one end fixed mounting of spring (34) has fixture block (35), the both sides of fixture block (35) all have oblique picture peg (36) through hinge spring fixed mounting, draw-in groove (37) with fixture block looks adaptation are all seted up to the both sides of roof and interior diapire in A sealed mounting frame (15), B sealed mounting frame (16) and C sealed mounting frame (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010585993.9A CN111910164A (en) | 2020-06-24 | 2020-06-24 | Coating machine dust keeper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010585993.9A CN111910164A (en) | 2020-06-24 | 2020-06-24 | Coating machine dust keeper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111910164A true CN111910164A (en) | 2020-11-10 |
Family
ID=73226427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010585993.9A Pending CN111910164A (en) | 2020-06-24 | 2020-06-24 | Coating machine dust keeper |
Country Status (1)
| Country | Link |
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| CN (1) | CN111910164A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061868A (en) * | 2021-03-12 | 2021-07-02 | 斡兹真空科技(嘉兴)有限公司 | Flexible multifunctional film coating machine |
-
2020
- 2020-06-24 CN CN202010585993.9A patent/CN111910164A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061868A (en) * | 2021-03-12 | 2021-07-02 | 斡兹真空科技(嘉兴)有限公司 | Flexible multifunctional film coating machine |
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Application publication date: 20201110 |
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| WD01 | Invention patent application deemed withdrawn after publication |