CN111906402A - Ceramic plate and metal cylinder part joint structure - Google Patents
Ceramic plate and metal cylinder part joint structure Download PDFInfo
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- CN111906402A CN111906402A CN202010649030.0A CN202010649030A CN111906402A CN 111906402 A CN111906402 A CN 111906402A CN 202010649030 A CN202010649030 A CN 202010649030A CN 111906402 A CN111906402 A CN 111906402A
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- fan
- ceramic plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/085—Cooling, heat sink or heat shielding means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ceramic Products (AREA)
Abstract
The invention discloses a joint structure of a ceramic plate and a metal cylinder part, which comprises a ceramic plate with a first through hole and a metal cylinder, wherein a bulge is arranged at the top of the ceramic plate above the first through hole, a joint groove, a conical positioning groove and a second through hole which are communicated with each other are sequentially arranged at the middle position of the bulge from top to bottom, the second through hole is communicated with the first through hole, the diameter of the joint groove gradually decreases from bottom to top, a welding seat is in threaded connection with the bottom end of the metal cylinder, the welding seat is arranged at the middle position of the joint groove, and the welding seat comprises a cylinder part, an annular positioning part, a fan-shaped transition part, a fan-shaped material stopping part and a ceramic nail. The invention transfers the welding flux welded in the prior art to the side edge, so that when the electrostatic chuck is used for thermal cycle, the temperature of the joint of the welding seat, the welding flux and the ceramic plate is from high to low, thereby reducing the expansion and contraction amount of the ceramic plate and the welding flux, avoiding the peeling of the welding part and further improving the welding strength.
Description
Technical Field
The invention relates to the technical field of joint structures, in particular to a joint structure of a ceramic plate and a metal cylindrical component.
Background
As such an electrostatic chuck, there is known an electrostatic chuck in which a metal gas introduction pipe is joined from the back side of a disk-shaped ceramic plate provided with a gas introduction hole, and He gas or the like is supplied to the adsorption surface of the wafer to improve heat conductivity.
Therefore, it is an important technical key how to integrate the metal gas introduction pipe and the ceramic plate, and as a method for joining the ceramic plate and the metal gas introduction pipe, in the prior art, the ceramic plate and the gas introduction pipe are welded by filling a solder therebetween, but in the brazing, the gas introduction pipe and the solder are more greatly contracted than the ceramic plate when cooled, so that stress due to a difference in thermal expansion occurs during the welding, which causes cracking of the ceramic plate, and even during the welding, cracking of the ceramic plate is prevented, and after the welding, the electrostatic chuck is repeatedly used to perform a thermal cycle, which causes peeling of the joined portion, and even cracking of the ceramic plate again, due to the same reason.
Disclosure of Invention
An object of the present invention is to provide a joining structure of a ceramic plate and a metal cylindrical member to solve the problems of the background art mentioned above.
In order to achieve the purpose, the invention provides the following technical scheme: a joint structure of a ceramic plate and a metal cylinder part comprises a ceramic plate with a first through hole and a metal cylinder, wherein a boss is arranged at the top of the ceramic plate above the first through hole, a joint groove, a conical positioning groove and a second through hole which are communicated are sequentially arranged at the middle position of the boss from top to bottom, the second through hole is communicated with the first through hole, the diameter of the joint groove gradually decreases from bottom to top, a plurality of annular grooves are arranged at the positions, close to the side edges, of the bottom of the joint groove, the cross sections of the annular grooves are in a barb shape, a welding seat is in threaded connection with the bottom end of the metal cylinder and is arranged at the middle position of the joint groove, the welding seat comprises a cylinder part, an annular positioning part, a fan-shaped transition part, a fan-shaped material blocking part and a ceramic nail, and the bottom end of the cylinder part is provided with the annular, annular location portion card is established inside the toper type constant head tank, the bottom in the cylindric portion outside evenly is provided with a plurality of fan-shaped transition portions along its circumferencial direction, the cross-section of fan-shaped transition portion is the arcuation, just the one end that cylindric portion was kept away from to fan-shaped transition portion extends to the inside bottom of annular groove, and is a plurality of fan-shaped transition portion closes to form annularly, fan-shaped transition portion keeps away from cylindric portion one end slope and is provided with fan-shaped portion of keeping off the material, and is a plurality of fan-shaped portion of keeping off the material closes to form the awl tube-shape, and is adjacent fan-shaped portion of keeping off the material with be provided with sliding seal subassembly between the fan-shaped transition portion, joint.
Preferably, the number of the fan-shaped transition parts is 4.
Preferably, the top end of the inner side of the cylindrical part is provided with a first mounting groove, an inner thread is arranged on the inner side wall of the first mounting groove, a second mounting groove is formed in the bottom end of the outer side of the metal cylindrical part, and an outer thread matched with the inner thread is arranged on the side wall of the second mounting groove.
Preferably, the sliding seal subassembly is including setting up fan-shaped material portion of keeping off with fan-shaped transition portion one side and with fan-shaped material portion of keeping off with fan-shaped transition portion shape assorted slot and setting are in fan-shaped material portion of keeping off with fan-shaped transition portion opposite side and with fan-shaped material portion of keeping off with fan-shaped transition portion shape assorted cutting, the cutting matches each other with the slot.
Preferably, the cylindrical portion, the annular positioning portion, the fan-shaped transition portion and the fan-shaped material blocking portion are integrally formed, and the material of the cylindrical portion, the annular positioning portion, the fan-shaped transition portion and the fan-shaped material blocking portion is 60Si2 Mn.
Preferably, the vertical height of the fan-shaped material blocking part is greater than the sum of the depth of the joint groove and the depth of the annular groove.
Preferably, the solder is a composition having good wettability with the composition contained in the ceramic plate.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, the top of the ceramic plate above the first through hole is provided with the bulge part, the middle position of the bulge part is sequentially provided with the joint groove, the conical positioning groove and the second through hole which are communicated from top to bottom, the position, close to the side edge, of the bottom of the joint groove is provided with the annular groove, the cross section of the annular groove is in the shape of a barb, the bottom end of the metal cylinder is in threaded connection with the welding seat, the welding seat is arranged at the middle position of the joint groove and comprises the cylinder part, the annular positioning part, the fan-shaped transition part, the fan-shaped material blocking part and the ceramic nail, during welding, the annular positioning part of the welding seat is positioned inside the conical positioning groove of the bulge part, so that the welding seat is positioned, the welding filling of welding materials is facilitated, one end of the fan-shaped transition part of the welding seat is positioned inside the annular groove, Annular location portion, the material of fan-shaped transition portion and fan-shaped fender portion is 60Si2Mn, 60Si2Mn has excellent elasticity and tempering nature, when the welding seat takes place the inflation, fan-shaped fender portion can inwards form certain crooked with fan-shaped transition portion, avoid the welding seat to form the extrusion to solder and pottery, cause ceramic fracture and solder to drop, when the welding seat shrink, fan-shaped fender portion can form certain crooked with fan-shaped transition portion in outer, avoid the welding part to take place to peel off, through the whole shape of welding seat and material promptly, reduce because of the welding or when electrostatic chuck carries out the thermal cycle, the influence of the stress that the inflation difference produced to the welding part.
(2) The welding flux adopts the component with better wettability with the component contained in the ceramic plate as the welding flux, so that the bonding strength between the welding flux and the ceramic plate, namely the welding strength, is obviously improved, the bonding strength between the welding flux and the welding seat, namely the welding strength, is improved through the ceramic nails inserted on the welding seat, and the welding quality is ensured.
(3) The invention transfers the welding flux welded in the prior art to the side edge, so that when the electrostatic chuck is used for thermal cycle, the temperature of the joint of the welding seat, the welding flux and the ceramic plate is from high to low, thereby reducing the expansion and contraction amount of the ceramic plate and the welding flux, avoiding the peeling of the welding part and further improving the welding strength.
(4) The diameter of the joint groove is gradually reduced from bottom to top, so that after welding is completed, one side of the welding flux abuts against the side wall of the joint groove, the other side of the welding flux abuts against the fan-shaped material blocking part of the welding seat, the side wall of the joint groove abuts against the fan-shaped material blocking part of the welding seat through the welding flux, and the welding strength is further improved in a barb mode.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a soldering nest according to the present invention;
FIG. 3 is a schematic view of a metal cylinder structure according to the present invention;
FIG. 4 is a schematic top view of the soldering socket of the present invention;
FIG. 5 is a schematic top view of the sectorial material blocking portion and the sectorial transition portion of the present invention;
fig. 6 is a side view structure schematic diagram of the fan-shaped material blocking part and the fan-shaped transition part of the invention.
In the figure: 1. a boss portion; 11. a second through hole; 12. an engaging groove; 13. a conical positioning groove; 14. an annular groove; 2. welding a base; 21. an internal thread; 22. a first mounting groove; 23. a cylindrical portion; 24. a fan-shaped material blocking part; 25. a ceramic nail; 26. an annular positioning portion; 27. a sector transition portion; 28. cutting; 29. a slot; 3. a metal cylinder; 31. a second mounting groove; 32. an external thread; 4. welding flux; 5. a ceramic plate; 51. and a first through hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, an embodiment of the present invention is shown: a joint structure of a ceramic plate and a metal cylinder part comprises a ceramic plate 5 with a first through hole 51 and a metal cylinder 3, wherein a boss 1 is arranged at the top of the ceramic plate 5 above the first through hole 51, a joint groove 12, a conical positioning groove 13 and a second through hole 11 which are communicated with each other are sequentially arranged at the middle position of the boss 1 from top to bottom, the diameter of the joint groove 12 is gradually reduced from bottom to top, a plurality of annular grooves 14 are arranged at the positions, close to the side edges, of the bottom of the joint groove 12, the cross sections of the annular grooves 14 are in a barb shape, a welding seat 2 is in threaded connection with the bottom end of the metal cylinder 3, the welding seat 2 is arranged at the middle position of the joint groove 12, the welding seat 2 comprises a cylinder part 23, an annular positioning part 26, a fan-shaped transition part 27, a fan-shaped material stopping part 24 and a ceramic nail 25, the annular positioning part 26 matched with the conical positioning groove 13 is arranged, the annular positioning part 26 is clamped inside the conical positioning groove 13, the bottom end outside the cylindrical part 23 is uniformly provided with 4 fan-shaped transition parts 27 along the circumferential direction, the cross section of each fan-shaped transition part 27 is arc-shaped, one end of each fan-shaped transition part 27 far away from the cylindrical part 23 extends to the bottom end inside the annular groove 14, the 4 fan-shaped transition parts 27 are combined to form a ring shape, one end of each fan-shaped transition part 27 far away from the cylindrical part 23 is obliquely provided with a fan-shaped material blocking part 24, the vertical height of each fan-shaped material blocking part 24 is greater than the sum of the depths of the joint groove 12 and the annular groove 14, the 4 fan-shaped material blocking parts 24 are combined to form a conical cylinder shape, the cylindrical part 23, the annular positioning part 26, the fan-shaped transition parts 27 and the fan-shaped material blocking parts 24 are integrally formed, the material of the cylindrical part 23, the annular positioning part 26, the fan-shaped transition parts 27 and the, the sliding seal assembly comprises a slot 29 which is arranged on one side of a fan-shaped material blocking portion 24 and a fan-shaped transition portion 27 and matched with the fan-shaped material blocking portion 24 and the fan-shaped transition portion 27 in shape and an inserting strip 28 which is arranged on the other side of the fan-shaped material blocking portion 24 and the fan-shaped transition portion 27 and matched with the fan-shaped material blocking portion 24 and the fan-shaped transition portion 27 in shape, the inserting strip 28 is matched with the slot 29, a joint groove 12 is formed in the joint groove, welding materials 4 are arranged between the outer sides of the annular groove 14 and the 4 fan-shaped material blocking portions 24, the welding materials 4 adopt components with good wettability of components contained in a ceramic plate 5 as the welding materials 4, a first mounting groove 22 is arranged at the top end of the inner side of a 23, an inner thread 21 is arranged on the inner side wall of the first mounting groove 22, a second mounting groove 31 is.
The working principle is as follows: during welding, the annular positioning part 26 of the welding seat 2 is positioned inside the conical positioning groove 13 of the boss 1, so that the welding seat 2 can be positioned, and welding filling and welding can be conveniently carried out, one end of the fan-shaped transition part of the welding seat 2 is positioned inside the annular groove 14, after welding and cooling, the welding flux entering the annular groove 14 can enhance the welding strength of the welding seat 2 and the ceramic plate 5, because the cylindrical part 23 of the welding seat 2, the annular positioning part 26, the fan-shaped transition part 27 and the fan-shaped material blocking part 24 are made of 60Si2Mn, and 60Si2Mn has excellent elasticity and tempering performance, when the welding seat 2 expands, the fan-shaped material blocking part 24 and the fan-shaped transition part 27 can be bent inwards to prevent the welding seat 2 from extruding the welding material 4 and the ceramic plate 5 to cause cracking of the welding material 4 and falling of the ceramic plate, and when the welding seat 2 contracts, the fan-shaped material blocking part 24 and the fan-shaped transition part 27 can be bent, the fan-shaped material blocking part 24 is tightly attached to the welding flux 4, the peeling of the welding part is avoided, namely, the influence of stress generated by expansion difference on the welding part during welding or during the thermal cycle of an electrostatic chuck is reduced through the integral shape and the material of the welding seat 2, the diameter of the joint groove 12 is gradually reduced from bottom to top, thus after the welding is finished, one side of the welding flux 4 is abutted against the side wall of the joint groove 12, the other side of the welding flux 4 is abutted against the fan-shaped material blocking part 24 of the welding seat 2, the side wall of the joint groove 12 is abutted against the fan-shaped material blocking part 24 of the welding seat 2 through the welding flux 4, and is in a barb form, the welding strength is further improved, and the used welding flux 4 adopts a component with better wettability with the component contained in the ceramic plate 5 as the welding flux, so that the bonding strength between the welding flux 4 and the ceramic plate 5, namely, the invention improves the bonding strength between the welding flux 4 and the welding seat 2, namely the welding strength, ensures the welding quality, and simultaneously transfers the welding flux 4 welded in the prior art to the side edge, so that the temperature of the joint of the welding seat 2, the welding flux 4 and the ceramic plate 5 is from high to low when an electrostatic chuck is used for thermal cycle, thereby reducing the expansion and contraction amount of the ceramic plate 5 and the welding flux, avoiding the peeling of the welding part and further improving the welding strength.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
Claims (7)
1. The utility model provides a joint structure of ceramic plate and metal system cylinder part, is including ceramic plate (5) and metal system drum (3) that have through-hole (51), its characterized in that, ceramic plate (5) top of through-hole (51) top is provided with bellying (1), the intermediate position department of bellying (1) has set gradually joint groove (12), tapered positioning groove (13) and through-hole two (11) that are linked together under from the top down, through-hole two (11) with through-hole (51) intercommunication, the diameter of joint groove (12) is followed supreme descending gradually, joint groove (12) bottom is close to side position department and is provided with a plurality of annular groove (14), and annular groove (14) cross-section is down hook-like, the bottom threaded connection of metal system drum (3) has welding seat (2), welding seat (2) set up in the intermediate position department of joint groove (12), the welding seat (2) comprises a cylindrical part (23), an annular positioning part (26), a fan-shaped transition part (27), a fan-shaped material blocking part (24) and ceramic nails (25), wherein the annular positioning part (26) matched with the conical positioning groove (13) is arranged at the bottom end of the cylindrical part (23), the annular positioning part (26) is clamped inside the conical positioning groove (13), a plurality of fan-shaped transition parts (27) are uniformly arranged at the bottom end of the outer side of the cylindrical part (23) along the circumferential direction of the cylindrical part, the cross section of each fan-shaped transition part (27) is arc-shaped, one end, far away from the cylindrical part (23), of each fan-shaped transition part (27) extends to the bottom end inside the annular groove (14), the plurality of fan-shaped transition parts (27) form an annular shape, the fan-shaped material blocking part (24) is obliquely arranged at one end, far away from the cylindrical part (23), of each fan-shaped transition part (27) forms a conical, adjacent fan-shaped material blocking portion (24) with be provided with sliding seal subassembly between fan-shaped transition portion (27), be provided with solder (4) between joint groove (12), annular groove (14) and a plurality of fan-shaped material blocking portion (24) the outside.
2. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the number of the fan-shaped transition parts (27) is 4.
3. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the top of the inboard of cylindric portion (23) is provided with mounting groove (22), and is provided with on the inside wall of mounting groove (22) internal thread (21), mounting groove two (31) have been seted up to the bottom in metal cylindric (3) outside, and the lateral wall of mounting groove two (31) is provided with external screw thread (32) that mutually match with internal thread (21).
4. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: sliding seal subassembly is including setting up fan-shaped material portion of keeping off (24) with fan-shaped transition portion (27) one side and with fan-shaped material portion of keeping off (24) with fan-shaped transition portion (27) shape assorted slot (29) and setting are in fan-shaped material portion of keeping off (24) with fan-shaped transition portion (27) opposite side and with fan-shaped material portion of keeping off (24) with fan-shaped transition portion (27) shape assorted cutting (28), cutting (28) and slot (29) match each other.
5. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the cylindrical part (23), the annular positioning part (26), the fan-shaped transition part (27) and the fan-shaped material blocking part (24) are integrally formed, and the cylindrical part (23), the annular positioning part (26), the fan-shaped transition part (27) and the fan-shaped material blocking part (24) are made of 60Si2 Mn.
6. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the vertical height of the fan-shaped material blocking part (24) is larger than the sum of the depths of the joint groove (12) and the annular groove (14).
7. A ceramic plate and metal cylinder member joint structure as set forth in claim 1, wherein: the solder (4) adopts a component having good wettability with the component contained in the ceramic plate (5) as the solder (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010649030.0A CN111906402B (en) | 2020-07-08 | 2020-07-08 | Ceramic plate and metal cylinder part joint structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010649030.0A CN111906402B (en) | 2020-07-08 | 2020-07-08 | Ceramic plate and metal cylinder part joint structure |
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| CN111906402A true CN111906402A (en) | 2020-11-10 |
| CN111906402B CN111906402B (en) | 2021-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010649030.0A Active CN111906402B (en) | 2020-07-08 | 2020-07-08 | Ceramic plate and metal cylinder part joint structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114589370A (en) * | 2022-03-14 | 2022-06-07 | 中国电子科技集团公司第三十八研究所 | Rapid assembling and welding method of electric connector |
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| JPH02248374A (en) * | 1989-03-22 | 1990-10-04 | Mitsubishi Heavy Ind Ltd | Bonding method for ceramics member and metallic member |
| JP2008069060A (en) * | 2006-09-15 | 2008-03-27 | Ihi Corp | Jointed article, method for manufacturing jointed article, and thruster |
| CN103972378A (en) * | 2014-05-29 | 2014-08-06 | 中山市秉一电子科技有限公司 | LED light-emitting device and packaging method thereof |
| CN203900683U (en) * | 2014-04-28 | 2014-10-29 | 安徽华东光电技术研究所 | Brazing tool suitable for barium-tungsten cathode for microwave tube |
| CN106255674A (en) * | 2014-04-30 | 2016-12-21 | 日本碍子株式会社 | The conjugant of ceramic component and metal parts and preparation method thereof |
| TW201927726A (en) * | 2017-11-29 | 2019-07-16 | 美商康波能再造工程公司 | Semiconductor processing equipment with high temperature resistant nickel alloy joints and methods for making same |
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2020
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02248374A (en) * | 1989-03-22 | 1990-10-04 | Mitsubishi Heavy Ind Ltd | Bonding method for ceramics member and metallic member |
| JP2008069060A (en) * | 2006-09-15 | 2008-03-27 | Ihi Corp | Jointed article, method for manufacturing jointed article, and thruster |
| CN203900683U (en) * | 2014-04-28 | 2014-10-29 | 安徽华东光电技术研究所 | Brazing tool suitable for barium-tungsten cathode for microwave tube |
| CN106255674A (en) * | 2014-04-30 | 2016-12-21 | 日本碍子株式会社 | The conjugant of ceramic component and metal parts and preparation method thereof |
| CN103972378A (en) * | 2014-05-29 | 2014-08-06 | 中山市秉一电子科技有限公司 | LED light-emitting device and packaging method thereof |
| TW201927726A (en) * | 2017-11-29 | 2019-07-16 | 美商康波能再造工程公司 | Semiconductor processing equipment with high temperature resistant nickel alloy joints and methods for making same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114589370A (en) * | 2022-03-14 | 2022-06-07 | 中国电子科技集团公司第三十八研究所 | Rapid assembling and welding method of electric connector |
| CN114589370B (en) * | 2022-03-14 | 2023-12-05 | 中国电子科技集团公司第三十八研究所 | Quick welding method for electric connector |
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| CN111906402B (en) | 2021-08-17 |
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