CN111896811B - Method for inhibiting influence of video leakage on scattering measurement - Google Patents
Method for inhibiting influence of video leakage on scattering measurement Download PDFInfo
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Abstract
The invention relates to a method for inhibiting influence of video leakage on scatterometry, which is applied to a target scatterometry system based on a hardware gate, and comprises the following steps: setting a first sampling frequency and a second sampling frequency according to the sampling frequency to be detected and the video leakage interference frequency; setting the sampling frequency of the transmitting module as the first sampling frequency and the second sampling frequency respectively, and acquiring first sampling data and second sampling data through the receiving module; and interpolating the first sampling data and the second sampling data to obtain required sampling data. According to the invention, two offset sampling frequencies are set according to the sampling frequency to be detected, scattering measurement is respectively carried out, and the required sampling data can be obtained by combining interpolation operation, so that the problem that the scattering measurement result is influenced because the video leakage signal interferes the target scattering test result can be solved, and the effective inhibition of the video leakage in a hardware door on the interference of the test signal can be realized.
Description
Technical Field
The invention relates to the technical field of target scatterometry, in particular to a method for inhibiting influence of video leakage on scatterometry and a target scatterometry system based on a hardware gate.
Background
In the low-frequency electromagnetic scattering/radiation measurement of spatial filtering by adopting a hardware gate technology, a clock control signal of a high-speed switch in a hardware gate leaks to a measurement signal link, so that interference is caused on the measurement signal, and the interference is called video leakage interference. Video leakage interferes mainly at the clock control signal frequency of the high-speed switches and its harmonic frequencies.
The hardware gate is a technical method for modulating a test signal by a signal transmitting end in a pulse mode, carrying out gating adjustment on a receiving end in a pulse time delay mode, and realizing a filtering effect in a space by adjusting the time delay between a transmitting pulse and a receiving pulse so as to reduce the influence of environmental clutter on measurement.
The test signal of the antenna to be tested can fall into the receiving pulse passband range by adjusting the pulse width transmitted/received by the hardware gate, the time delay and the repetition period between the transmitted/received pulses, so that a normal test signal is obtained, and the echo signal passing through the environmental interference falls out of the receiving pulse passband range, so that the effect of filtering the environmental interference signal is realized, and the influence of the environmental interference signal on the test result is reduced.
Video leakage interference refers to a high-speed switch used for generating pulses in a hardware gate, wherein a level signal for control is coupled into a test link to form an interference signal, and the interference frequency is a level signal repetition period frequency and harmonic frequencies thereof. Video leakage interference signals generally range from a level signal repetition period frequency (generally, a frequency of several MHz) to about 1GHz, and the signal level is high, which causes serious interference to the test. For weak/small signal testing, the interference can be about 8GHz generally.
At present, no feasible method exists in engineering application aiming at the suppression of video leakage interference. Therefore, in view of the above disadvantages, it is desirable to provide a method for suppressing the influence of video leakage interference on target scatterometry.
Disclosure of Invention
The invention aims to solve the technical problem that in the process of measuring the target scattering based on the hardware gate technology, the video leakage interference seriously affects the test result, and provides a method for inhibiting the influence of the video leakage interference on the target scattering measurement aiming at the defects in the prior art.
In order to solve the above technical problem, the present invention provides a method for suppressing influence of video leakage on scatterometry, the method is applied to a target scatterometry system based on a hardware gate, the system comprises a transmitting module and a receiving module, the method comprises the following steps:
setting a first sampling frequency and a second sampling frequency according to the sampling frequency to be detected and the video leakage interference frequency;
setting the sampling frequency of the transmitting module as the first sampling frequency and the second sampling frequency respectively, and acquiring first sampling data and second sampling data through the receiving module;
and interpolating the first sampling data and the second sampling data to obtain required sampling data.
Preferably, the first sampling frequency is less than the sampling frequency to be measured, and the second sampling frequency is greater than the sampling frequency to be measured.
Preferably, the interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
Preferably, the first sampling frequency is greater than the sampling frequency to be tested, and the second sampling frequency is less than the sampling frequency to be tested.
Preferably, the interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency, f, to be measured 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
The invention also provides a target scattering measurement system based on the hardware door, which comprises a transmitting module and a receiving module;
the system also includes a control module; the control module further comprises:
the device comprises a setting unit, a processing unit and a control unit, wherein the setting unit is used for setting a first sampling frequency and a second sampling frequency according to a sampling frequency to be detected and a video leakage interference frequency;
the measuring unit is used for setting the sampling frequency of the transmitting module to be the first sampling frequency and the second sampling frequency respectively and acquiring first sampling data and second sampling data through the receiving module;
and the computing unit is used for interpolating the first sampling data and the second sampling data to obtain required sampling data.
Preferably, the first sampling frequency is smaller than the sampling frequency to be tested, and the second sampling frequency is greater than the sampling frequency to be tested.
Preferably, the interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
Preferably, the first sampling frequency is greater than the sampling frequency to be tested, and the second sampling frequency is less than the sampling frequency to be tested.
Preferably, the interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
The method for inhibiting the influence of video leakage on the scattering measurement and the target scattering measurement system have the following beneficial effects: according to the method, two offset sampling frequencies, namely a first sampling frequency and a second sampling frequency are set according to the sampling frequency to be tested, and scattering measurement is respectively carried out by taking the two offset sampling frequencies as the sampling frequencies to obtain the first sampling data and the second sampling data, and the required sampling data can be obtained by combining interpolation operation, so that the situation that the frequency difference between the sampling frequency to be tested and the level signal repetition period frequency of a high-speed switch of a hardware gate and part of the frequency difference between the level signal repetition period frequency and the harmonic frequency of the level signal repetition period frequency is smaller than the sampling receiving bandwidth can be avoided, the problem that in the process of carrying out target scattering measurement based on a hardware gate technology, the scattering measurement result is influenced due to the interference of video leakage signals on the test result is solved, and the effective suppression of the interference of the video leakage in the hardware gate on the test signal can be realized.
Drawings
Fig. 1 is a schematic flowchart of a method for suppressing influence of video leakage on scatterometry according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a target scatterometry system based on a hardware gate according to a second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Example one
As shown in fig. 1, the method for suppressing influence of video leakage on scatterometry, provided by the embodiment of the present invention, is applied to a target scatterometry system based on a hardware gate technology, where the measurement system includes a transmitting module and a receiving module, and the method includes the following steps:
firstly, step S1, according to the sampling frequency f to be measured 0 Setting a first sampling frequency f with a video leakage interference frequency 1 And a second sampling frequency f 2 。
In a target scatterometry system employing hardware gating techniques, the pulses are controlled due to high speed switching in the hardware gatingThe level signal of the high-speed switch is coupled into the test link to become an interference signal, namely video leakage interference. The video leakage interference frequency is the repetition period frequency and the n times frequency of the level signal for controlling the high-speed switch of the hardware gate, and when the sampling frequency f to be detected 0 The frequency difference from these interference frequencies is less than the sampled reception bandwidth, which may cause interference to the measurement results. Therefore, when the sampling frequency f to be measured 0 When the frequency difference between the high-speed switch and one of the repetition period frequency of the level signal and the n times frequency of the repetition period frequency is less than the sampling receiving bandwidth, according to the sampling frequency f to be measured 0 Setting the shifted sampling frequency, specifically, setting the frequency difference between the actual measurement sampling frequency and the repetition period frequency of the level signal of the high-speed switch and the n times of the repetition frequency of the level signal to be measured to be greater than a certain frequency of the sampled receiving bandwidth, optionally, the frequency difference between the aforementioned sampling frequency and the video leakage interference frequency should exceed 2 times of the sampled receiving bandwidth, that is, according to the sampling frequency f to be measured 0 Selecting two offset sampling frequencies, a first sampling frequency f 1 And a second sampling frequency f 2 And performing actual measurement sampling, for example, the sampling frequency interval is 10MHz, the sampling frequency to be measured is 1GHz, the video leakage interference frequency is 1GHz, the receiving bandwidth is 1KHz, the first sampling frequency is 0.99GHz, and then the second sampling frequency can be set to 1.000002GHz.
In some preferred embodiments, the two offset sampling frequencies are further defined, wherein the first sampling frequency f 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 。
Alternatively, in some other preferred embodiments, the two offset sampling frequencies may be defined as follows: the first sampling frequency f 1 Greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 。
According to the sampling frequency f to be measured 0 Defining the first sampling frequency f when setting two offset sampling frequencies 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 Or, the first sampling frequency f 1 Greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 . I.e. setting the first sampling frequency f 1 And a second sampling frequency f 2 Includes the sampling frequency f to be measured in the value range 0 That is, it is necessary to satisfy:
f 1 <f 0 <f 2
or
f 2 <f 0 <f 1
The values of the first sampling frequency and the second sampling frequency are limited, so that the subsequent calculation of the required sampling data is facilitated.
Then in step S2, the sampling frequency of the transmitting module is set to the first sampling frequency and the second sampling frequency, the target scatterometry system is used to perform the target scatterometry, and the receiving module is used to obtain first sampling data and second sampling data, where the obtained sampling data is echo data of the scattering characteristics obtained by the target scatterometry system.
After a first offset sampling frequency and a second offset sampling frequency are set according to a sampling frequency to be measured, actual measurement sampling is carried out by utilizing the two offset sampling frequencies, specifically, the sampling frequency is set as the first sampling frequency, the target scattering measurement system is utilized for measurement to obtain first sampling data, then the sampling frequency is set as the second sampling frequency, and the target scattering measurement system is utilized for measurement to obtain second sampling data.
It should be noted that, the target scatterometry system mentioned in the present invention may adopt a target scatterometry system based on a hardware gate technology in the prior art. Generally, the target scatterometry system comprises a transmitting module and a receiving module, wherein the transmitting module comprises a signal source, a pulse generator, a first pulse modulator, a directional coupler, a power amplifier and a transmitting antenna, and the receiving module comprises a receiving antenna, a low noise amplifier, a second pulse modulator and a multi-channel amplitude-phase receiver. When the multi-channel amplitude phase receiver works, a signal source generates a test signal according to a set sampling frequency and sends the test signal to a first pulse modulator, a pulse baseband signal generated by a pulse generator is modulated onto a microwave signal by the first pulse modulator to form a microwave pulse modulation signal, the microwave pulse modulation signal is transmitted out through a transmitting antenna, an echo signal received by a receiving antenna of a receiving end enters a second pulse modulator after passing through a low noise amplifier, and the multi-channel amplitude phase receiver receives a target echo signal by controlling the on-off of the second pulse modulator.
And finally, in step S3, performing interpolation operation on the first sampling data and the second sampling data obtained by measurement in step S2 to obtain required sampling data corresponding to the sampling frequency to be measured.
After target scattering measurement is carried out at the first sampling frequency and the second sampling frequency respectively to obtain first sampling data and second sampling data, required sampling data corresponding to the sampling frequency to be measured can be calculated according to the obtained first sampling data and the second sampling data through interpolation operation. The interpolation algorithm may be a general algorithm in the prior art, for example, a linear interpolation method may be used. And performing interpolation operation on the first sampling data and the second sampling data to obtain the required sampling data.
In some preferred embodiments, when the first sampling frequency f 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 Then, interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Denotes the firstTwo sampling frequencies.
In some other preferred embodiments, the first sampling frequency f 1 Greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 Then, interpolation is performed according to another formula:
and according to the numerical relationship among the set first sampling frequency, the set second sampling frequency and the set sampling frequency to be detected, selecting the formula, and obtaining the required sampling data through simple calculation.
The method for inhibiting the influence of video leakage on scattering measurement is suitable for a low-frequency electromagnetic scattering/radiation test system which adopts a hardware gate technology to carry out spatial filtering, and can realize the inhibition of test signal interference caused by the leakage of a clock control signal of a high-speed switch in a hardware gate to a test signal link. The invention solves the problem of target measurement data interference caused by video leakage interference in the past by the offset of sampling frequency and the combination of an interpolation algorithm.
Example two
As shown in fig. 2, the target scatterometry system based on a hardware gate according to the second embodiment of the present invention includes a transmitting module 100, a receiving module 200, and a control module 300, wherein the control module 300 further includes a setting unit 301, a measuring unit 302, and a calculating unit 303.
The setting unit 301 is configured to set a first sampling frequency and a second sampling frequency according to a sampling frequency to be measured and a video leakage interference frequency.
In a target scatterometry system using a hardware gate technology, due to a high-speed switch for generating a pulse in a hardware gate, a level signal for controlling the high-speed switch is coupled into a test link to become an interference signal, that is, video leakage interference. The video leakage interference frequency is the repetition period frequency of the level signal and the frequency multiplied by n times of the repetition period frequency, and when the sampling frequency f to be detected 0 With these interference frequenciesWhen the frequency difference of the rates is smaller than the reception bandwidth of the sample, interference occurs to the measurement result. Therefore, when the sampling frequency f to be measured 0 When the frequency difference between the high-speed switch and one of the repetition period frequency of the level signal and the n times frequency of the repetition period frequency is less than the sampling receiving bandwidth, according to the sampling frequency f to be measured 0 Setting the offset sampling frequency, specifically, setting the frequency difference between the actual measurement sampling frequency and the repetition period frequency of the level signal of the high-speed switch and the n times of the repetition frequency of the level signal to be measured to be larger than a certain frequency of the sampled receiving bandwidth, wherein the frequency difference between the aforementioned sampling frequency and the video leakage interference frequency should exceed 2 times of the sampled receiving bandwidth, that is, according to the sampling frequency f to be measured 0 Selecting two offset sampling frequencies, a first sampling frequency f 1 And a second sampling frequency f 2 The actual measurement sampling is performed.
In some preferred embodiments, the two offset sampling frequencies are further defined, wherein the first sampling frequency f 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 。
Alternatively, in some other preferred embodiments, the two offset sampling frequencies may be defined as follows: the first sampling frequency f 1 Is greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 。
According to the sampling frequency f to be measured 0 Defining the first sampling frequency f when setting two offset sampling frequencies 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 Or, the first sampling frequency f 1 Greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 . I.e. setting the first sampling frequency f 1 And a first sampling frequency f 2 Includes the sampling frequency f to be measured in the value range 0 That is, it is necessary to satisfy:
f 1 <f 0 <f 2
or
f 2 <f 0 <f 1
The values of the first sampling frequency and the second sampling frequency are limited, so that the subsequent calculation of the required sampling data is facilitated.
A measuring unit 302, configured to set the sampling frequency of the transmitting module to the first sampling frequency and the second sampling frequency, respectively, and obtain first sampling data and second sampling data through the receiving module.
After a first offset sampling frequency and a second offset sampling frequency are set according to a sampling frequency to be measured, actual measurement sampling is carried out by utilizing the two offset sampling frequencies, specifically, the sampling frequency is set as the first sampling frequency, the target scattering measurement system is utilized for measurement to obtain first sampling data, then the sampling frequency is set as the second sampling frequency, and the target scattering measurement system is utilized for measurement to obtain second sampling data.
It should be understood that the method of the present invention for suppressing the effects of video leakage on scatterometry is the same principle as a hardware gate based target scatterometry system, and therefore, the detailed description of the method also applies to the system.
It should be noted that, the target scatterometry system mentioned in the present invention may adopt a target scatterometry system based on a hardware gate technology in the prior art. In general, in the target scatterometry system, a transmitting module comprises a signal source, a pulse generator, a first pulse modulator, a directional coupler, a power amplifier and a transmitting antenna, and a receiving module comprises a receiving antenna, a low noise amplifier, a second pulse modulator and a multi-channel amplitude-phase receiver. When the multi-channel amplitude phase receiver works, a signal source generates a test signal according to the set sampling frequency and sends the test signal into the first pulse modulator, the first pulse modulator is used for modulating a pulse baseband signal generated by the pulse generator onto a microwave signal to form a microwave pulse modulation signal, the microwave pulse modulation signal is transmitted out through the transmitting antenna, an echo signal received by the receiving antenna of the receiving end enters the second pulse modulator after passing through the low-noise amplifier, and the multi-channel amplitude phase receiver receives a target echo signal through the on-off control of the second pulse modulator.
A calculating unit 303, configured to interpolate the first sample data and the second sample data to obtain required sample data.
After target scattering measurement is carried out at the first sampling frequency and the second sampling frequency respectively to obtain first sampling data and second sampling data, required sampling data corresponding to the sampling frequency to be measured can be calculated according to the obtained first sampling data and the second sampling data through interpolation operation. The interpolation algorithm may be a general algorithm in the prior art, for example, a linear interpolation method may be used. And performing interpolation operation on the first sampling data and the second sampling data to obtain the required sampling data.
In some preferred embodiments, when the first sampling frequency f 1 Less than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Greater than the sampling frequency f to be measured 0 Then, interpolation is performed according to the following formula:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
In some other preferred embodiments, the first sampling frequency f 1 Greater than the sampling frequency f to be measured 0 And the second sampling frequency f 2 Less than the sampling frequency f to be measured 0 Then, interpolation is performed according to another formula:
and according to the numerical relationship among the set first sampling frequency, the set second sampling frequency and the set sampling frequency to be detected, selecting the formula, and obtaining the required sampling data through simple calculation.
In summary, in the invention, aiming at the problem that the scattering measurement result is affected due to interference of a video leakage signal on the test result in the process of performing target scattering measurement based on a hardware gate technology, two offset sampling frequencies are set according to the sampling frequency to be measured, and scattering measurement is performed on the two offset sampling frequencies, so that the situation that the frequency difference between the sampling frequency to be measured and the level signal repetition period frequency of a high-speed switch of the hardware gate and part of the frequency difference between the level signal repetition period frequency and the harmonic frequency of the level signal repetition period frequency is smaller than the sampling receiving bandwidth can be avoided, and the required sampling data can be obtained by performing interpolation operation on the acquired first sampling data and the second sampling data, thereby effectively suppressing the interference of the video leakage in the hardware gate on the test signal can be realized.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A method for suppressing the effect of video leakage on scatterometry, said method being applied to a hardware gate based target scatterometry system comprising a transmit module and a receive module, said method comprising the steps of:
setting a first sampling frequency and a second sampling frequency according to the sampling frequency to be detected and the video leakage interference frequency; the first sampling frequency and the second sampling frequency are offset sampling frequencies relative to the sampling frequency to be detected;
setting the sampling frequency of the transmitting module as the first sampling frequency and the second sampling frequency respectively, and acquiring first sampling data and second sampling data through the receiving module;
and interpolating the first sampling data and the second sampling data to obtain required sampling data.
2. The method of suppressing the effects of video leakage on scatterometry according to claim 1, wherein:
the first sampling frequency is less than the sampling frequency to be detected, and the second sampling frequency is greater than the sampling frequency to be detected.
3. The method of suppressing the effect of video leakage on scatterometry measurements according to claim 2, wherein interpolating is performed according to the following equation:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
4. The method of suppressing the effects of video leakage on scatterometry according to claim 1, wherein:
the first sampling frequency is greater than the sampling frequency to be detected, and the second sampling frequency is less than the sampling frequency to be detected.
5. The method of suppressing the effect of video leakage on scatterometry measurements according to claim 4, wherein interpolating is performed according to the following equation:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency, f, to be measured 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
6. A target scatterometry system based on a hardware gate comprises a transmitting module and a receiving module, and is characterized by further comprising a control module; the control module further comprises:
the device comprises a setting unit, a processing unit and a control unit, wherein the setting unit is used for setting a first sampling frequency and a second sampling frequency according to a sampling frequency to be detected and a video leakage interference frequency; the first sampling frequency and the second sampling frequency are offset sampling frequencies relative to the sampling frequency to be detected;
the measuring unit is used for setting the sampling frequency of the transmitting module to be the first sampling frequency and the second sampling frequency respectively and acquiring first sampling data and second sampling data through the receiving module;
and the computing unit is used for interpolating the first sampling data and the second sampling data to obtain required sampling data.
7. The target scatterometry system of claim 6, wherein:
the first sampling frequency is less than the sampling frequency to be detected, and the second sampling frequency is greater than the sampling frequency to be detected.
8. The target scatterometry system of claim 7, wherein the interpolation is performed according to the following equation:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency to be measured, f 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
9. The target scatterometry system of claim 6, wherein:
the first sampling frequency is greater than the sampling frequency to be detected, and the second sampling frequency is less than the sampling frequency to be detected.
10. The target scatterometry system of claim 9, wherein the interpolation is performed according to the following equation:
wherein d is 0 Representing the required sample data, d 1 Representing first sample data, d 2 Representing second sampled data, f 0 Representing the sampling frequency, f, to be measured 1 Representing a first sampling frequency, f 2 Representing the second sampling frequency.
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