CN111872843B - Drainage pipeline on chemical mechanical lapping machine - Google Patents
Drainage pipeline on chemical mechanical lapping machine Download PDFInfo
- Publication number
- CN111872843B CN111872843B CN202010787295.7A CN202010787295A CN111872843B CN 111872843 B CN111872843 B CN 111872843B CN 202010787295 A CN202010787295 A CN 202010787295A CN 111872843 B CN111872843 B CN 111872843B
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- Prior art keywords
- pipe
- half pipe
- sleeve
- wall
- drainage
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a drainage pipeline on a chemical mechanical grinding machine, which comprises a first drainage pipeline and a second drainage pipeline, wherein a U-shaped connecting pipe is arranged between the first drainage pipeline and the second drainage pipeline, the connecting pipe consists of a U-shaped upper connecting half pipe and a U-shaped lower connecting half pipe, two ends of the upper connecting half pipe and the lower connecting half pipe are respectively provided with a horizontal upper extending half pipe and a horizontal lower extending half pipe, and the outer end of the upper extending half pipe is provided with a circular inserting pipe; the lower end surfaces of two sides of the upper connecting half pipe and the upper extending half pipe are provided with inserting strips, the upper end surfaces of two sides of the lower connecting half pipe and the lower extending half pipe are provided with inserting slots, and the inserting strips on the upper connecting half pipe and the upper extending half pipe are respectively inserted into the inserting slots of the lower connecting half pipe and the lower extending half pipe; the inner wall of the insertion pipe is provided with a jack penetrating through the outer end face of the insertion pipe, and the first drainage pipe and the second drainage pipe are inserted into the jack of the insertion pipe.
Description
Technical Field
The invention relates to the technical field of chemical mechanical grinders, in particular to a drainage pipeline on a chemical mechanical grinder.
Background
The chemical mechanical polishing technology integrates the advantages of chemical polishing and mechanical polishing, can ensure the removal efficiency of materials, obtain a perfect surface, obtain the flatness which is 1-2 orders of magnitude higher than that of the flatness obtained by only using the two types of polishing, and can realize the surface roughness from nano level to atomic level. Taking a silicon wafer as an example, inverting the silicon wafer to enable the surface to be ground to be in contact with a grinding pad, and pressing a grinding head on the silicon wafer; and controlling the rotation of the grinding pad and the rotation of the grinding head, controlling the grinding liquid spray head to spray grinding liquid on the grinding pad, applying downward pressure on the silicon wafer by the grinding head, enabling the grinding liquid to flow into a gap between the surface to be ground of the silicon wafer and the grinding pad along with the rotation of the grinding pad, and grinding the surface to be ground of the silicon wafer in the movement of the silicon wafer. In the grinding process, grinding waste liquid can be generated, and the generated grinding waste liquid can be discharged through a drainage pipeline of the equipment. Because there can be a large amount of lapping liquid residues in the grinding waste liquid, the in-process of grinding waste liquid being discharged away, lapping liquid residue can be at drainage pipe inner deposition aggregation crystalline, along with the live time's lapse, lapping liquid residue and crystallization can be continuous aggregation on the inner wall of calandria way, finally lead to the pipeline to block up, the mediation operation of pipeline is comparatively inconvenient.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a drainage pipeline on a chemical mechanical grinder, which is convenient for clearing away crystals generated by the accumulation of grinding fluid residues in the drainage pipeline and reducing the blockage of the drainage pipeline.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a drainage pipe on a chemical mechanical grinder comprises a first drainage pipe and a second drainage pipe, wherein a U-shaped connecting pipe is arranged between the first drainage pipe and the second drainage pipe and consists of an upper connecting half pipe and a lower connecting half pipe which are U-shaped; the upper connecting half pipe and the upper extending half pipe are respectively inserted into the slots of the lower connecting half pipe and the lower extending half pipe; a jack penetrating through the outer end face of the insertion pipe is formed in the inner wall of the insertion pipe, and the first drainage pipe and the second drainage pipe are inserted into the jack of the insertion pipe; an external thread sleeve is fixed on the outer wall of the insertion pipe through an insertion sleeve, an internal thread sleeve is screwed on the external thread sleeve, a rubber sealing sleeve is fixedly adhered on the inner wall of one end of the internal thread sleeve, and the rubber sealing sleeve is pressed against the upper extending half pipe, the lower extending half pipe and the outer wall of the insertion pipe; the shaping has the guide way on the relative inner wall of internal thread cover other end, first drain pipe and second drain pipe on all the plug bush be fixed with the position sleeve, the shaping has the gib block on the outer wall of position sleeve, the gib block is pegged graft in the guide way of internal thread cover.
Preferably, the outer end face of the lower extension half pipe abuts against the side end face of the insertion pipe and is formed with sealing grooves communicated with the two sides of the slot of the lower extension half pipe, sealing grooves and slots on the lower extension half pipe and slots connected with the lower half pipe are internally inserted with sealing rings, and the sealing rings are clamped between the upper connection half pipe and the lower connection half pipe.
Preferably, the outer wall of the upper connecting half pipe and the outer wall of the lower connecting half pipe are in the same circle, and the outer wall of the lower extending half pipe and the outer wall of the upper extending half pipe are in the same circle; the lower end surfaces of the two sides of the upper connecting half pipe are abutted against the upper end surfaces of the two sides of the lower connecting half pipe.
Preferably, the length of the internal thread sleeve is greater than that of the external thread sleeve, and a gap is formed between the external thread sleeve and the rubber sealing sleeve.
Preferably, the outer end face of the external thread sleeve is flush with the outer end face of the insertion pipe, and the length of the external thread sleeve is smaller than that of the insertion pipe.
Preferably, the distance between the external thread sleeve and the rubber sealing sleeve is greater than the distance from the inner end surface of the rubber sealing sleeve to the outer end surface of the lower extension half pipe.
Preferably, a sealing washer is inserted into the insertion hole of the insertion pipe, and the sealing washer is clamped between the insertion pipe and the first drainage pipe or between the insertion pipe and the second drainage pipe.
Preferably, the inner diameter of the insertion pipe is equal to the inner diameter of the first drainage pipe or the second drainage pipe.
The invention has the beneficial effects that: the device is convenient to clean crystals generated by grinding fluid residue accumulation in the drainage pipeline, and reduces the blockage of the drainage pipeline.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of a half section of the present invention;
FIG. 3 is a front view of the present invention;
fig. 4 is a schematic sectional view at a-a in fig. 3.
In the figure: 1. a first drain pipe; 2. a second drain pipe; 3. a connecting pipe; 31. the upper connecting half pipe; 311. an upper extension half-pipe; 312. cutting; 313. inserting a tube; 314. a jack; 32. a lower connecting half pipe; 321. a lower extension half pipe; 322. a slot; 4. an external thread sleeve; 5. an internal thread sleeve; 51. a guide groove; 6. a positioning sleeve; 7. a rubber sealing sleeve; 8. a sealing gasket; 9. and (4) a sealing ring.
Detailed Description
Example (b): as shown in fig. 1 to 4, a drainage pipe on a chemical mechanical grinder comprises a first drainage pipe 1 and a second drainage pipe 2, a U-shaped connecting pipe 3 is arranged between the first drainage pipe 1 and the second drainage pipe 2, the connecting pipe 3 is composed of a U-shaped upper connecting half pipe 31 and a U-shaped lower connecting half pipe 32, two ends of the upper connecting half pipe 31 and the lower connecting half pipe 32 are respectively formed with a horizontal upper extending half pipe 311 and a horizontal lower extending half pipe 321, and an annular insertion pipe 313 is formed at the outer end of the upper extending half pipe 311; the lower end surfaces of two sides of the upper connecting half pipe 31 and the upper extending half pipe 311 are formed with inserting strips 312, the upper end surfaces of two sides of the lower connecting half pipe 32 and the lower extending half pipe 321 are formed with inserting slots 322, and the inserting strips 312 on the upper connecting half pipe 31 and the upper extending half pipe 311 are respectively inserted in the inserting slots 322 of the lower connecting half pipe 32 and the lower extending half pipe 321; an insertion hole 314 penetrating through the outer end face of the insertion pipe 313 is formed in the inner wall of the insertion pipe 313, and the first drainage pipe 1 and the second drainage pipe 2 are inserted into the insertion hole 314 of the insertion pipe 313; an external thread sleeve 4 is fixedly inserted on the outer wall of the insertion pipe 313, an internal thread sleeve 5 is screwed on the external thread sleeve 4, a rubber sealing sleeve 7 is fixedly adhered on the inner wall of one end of the internal thread sleeve 5, and the rubber sealing sleeve 7 is pressed against the outer walls of the upper extending half pipe 311, the lower extending half pipe 321 and the insertion pipe 313; the relative inner wall of the other end of the internal thread sleeve 5 is formed with a guide groove 51, the first drain pipe 1 and the second drain pipe 2 are fixed with a positioning sleeve 6 through inserting sleeves, the outer wall of the positioning sleeve 6 is formed with a guide strip 61, and the guide strip 61 is inserted in the guide groove 51 of the internal thread sleeve 5.
The outer end face of the lower extension half pipe 321 abuts against the side end face of the insertion pipe 313 and is formed with a sealing groove which is communicated with two sides of the slot 322 of the lower extension half pipe 321, a sealing ring 9 is inserted in the sealing groove and the slot 322 on the lower extension half pipe 321 and the slot 322 of the lower connection half pipe 32, and the sealing ring 9 is clamped between the upper connection half pipe 31 and the lower connection half pipe 32.
The outer wall of the upper connecting half pipe 31 and the outer wall of the lower connecting half pipe 32 are in the same circle, and the outer wall of the lower extending half pipe 321 and the outer wall of the upper extending half pipe 311 are in the same circle; the lower end surfaces of both sides of the upper connecting half pipe 31 abut on the upper end surfaces of both sides of the lower connecting half pipe 32.
The length of the internal thread sleeve 5 is larger than that of the external thread sleeve 4, and a gap is formed between the external thread sleeve 4 and the rubber sealing sleeve 7.
The outer end face of the external thread sleeve 4 is flush with the outer end face of the insertion pipe 313, and the length of the external thread sleeve 4 is smaller than that of the insertion pipe 313.
The distance between the external thread sleeve 4 and the rubber sealing sleeve 7 is larger than the distance from the inner end surface of the rubber sealing sleeve 7 to the outer end surface of the lower extension half pipe 321.
A sealing washer 8 is inserted into the insertion hole 314 of the insertion pipe 313, and the sealing washer 8 is clamped between the insertion pipe 313 and the first drainage pipe 1 or between the insertion pipe 313 and the second drainage pipe 2.
The inner diameter of the insertion pipe 313 is equal to the inner diameter of the first or second drainage pipe 1 or 2.
Discharge notches 414 are formed on the left and right side walls of the frame body 41.
The working principle is as follows: the invention relates to a drainage pipeline on a chemical mechanical grinder, wherein after the existing grinding waste liquid is preliminarily filtered, the waste liquid discharged into the drainage pipeline still has residues; a U-shaped connecting pipe 3 is arranged on a drainage pipeline, and grinding fluid residues are easily accumulated on the inner wall of the connecting pipe 3 to be crystallized due to the U-shaped structure of the connecting pipe 3; so that the residues are generally concentrated in the connecting tube 3; and this connecting pipe 3 designs into it and connects half a tub 31 and two half tubings of half tub of 32 down, through rotating connecting pipe 3, can drive external screw thread cover 4 and rotate, and external screw thread cover 4 can drive internal screw thread cover 5 and outwards remove, and then internal screw thread cover 5 breaks away from mutually with the structure of connecting half tub of 32 down to can take off and connect half tub of 32, conveniently connect half tub of 32 and the inner wall clearance of connecting half tub of 31 down.
The examples are intended to illustrate the invention, but not to limit it. The described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the present invention, and therefore, the scope of the appended claims should be accorded the full scope of the invention as set forth in the appended claims.
Claims (8)
1. A water discharge pipe on a chemical mechanical grinder comprises a first water discharge pipe (1) and a second water discharge pipe (2), and is characterized in that: a U-shaped connecting pipe (3) is arranged between the first drainage pipe (1) and the second drainage pipe (2), the connecting pipe (3) consists of a U-shaped upper connecting half pipe (31) and a U-shaped lower connecting half pipe (32), two ends of the upper connecting half pipe (31) and the lower connecting half pipe (32) are respectively provided with a horizontal upper extending half pipe (311) and a horizontal lower extending half pipe (321) in a forming mode, and the outer end of the upper extending half pipe (311) is provided with a circular inserting pipe (313) in a forming mode; the lower end faces of two sides of the upper connecting half pipe (31) and the upper extending half pipe (311) are provided with inserting strips (312), the upper end faces of two sides of the lower connecting half pipe (32) and the lower extending half pipe (321) are provided with inserting grooves (322), and the inserting strips (312) on the upper connecting half pipe (31) and the upper extending half pipe (311) are respectively inserted into the inserting grooves (322) of the lower connecting half pipe (32) and the lower extending half pipe (321); an insertion hole (314) penetrating through the outer end face of the insertion pipe (313) is formed in the inner wall of the insertion pipe (313), and the first drainage pipe (1) and the second drainage pipe (2) are inserted into the insertion hole (314) of the insertion pipe (313); an external thread sleeve (4) is fixedly sleeved on the outer wall of the insertion pipe (313), an internal thread sleeve (5) is screwed on the external thread sleeve (4), a rubber sealing sleeve (7) is fixedly adhered on the inner wall of one end of the internal thread sleeve (5), and the rubber sealing sleeve (7) is pressed against the outer walls of the upper extension half pipe (311), the lower extension half pipe (321) and the insertion pipe (313); the inner wall that the internal thread cover (5) other end is relative is gone up the shaping and is had guide way (51), first drain pipe (1) and second drain pipe (2) on all the plug bush be fixed with position sleeve (6), the shaping has guide strip (61) on the outer wall of position sleeve (6), guide strip (61) are pegged graft in guide way (51) of internal thread cover (5).
2. The drainpipe of the chemical mechanical polishing machine as claimed in claim 1, wherein: the outer end face of the lower extension half pipe (321) abuts against the side end face of the insertion pipe (313) and is formed with sealing grooves communicated with the two sides of the slot (322) of the lower extension half pipe (321), the sealing grooves and the slot (322) in the lower extension half pipe (321) and the slot (322) in the lower connection half pipe (32) are internally inserted with sealing rings (9), and the sealing rings (9) are clamped between the upper connection half pipe (31) and the lower connection half pipe (32).
3. The drainpipe of the chemical mechanical polishing machine as claimed in claim 2, wherein: the outer wall of the upper connecting half pipe (31) and the outer wall of the lower connecting half pipe (32) are in the same circle, and the outer wall of the lower extending half pipe (321) and the outer wall of the upper extending half pipe (311) are in the same circle; the lower end surfaces of two sides of the upper connecting half pipe (31) are abutted against the upper end surfaces of two sides of the lower connecting half pipe (32).
4. The drainpipe of the chemical mechanical polishing machine as claimed in claim 1, wherein: the length of the internal thread sleeve (5) is greater than that of the external thread sleeve (4), and a gap is arranged between the external thread sleeve (4) and the rubber sealing sleeve (7).
5. The drainpipe of the chemical mechanical polishing machine as claimed in claim 4, wherein: the outer end face of the external thread sleeve (4) is flush with the outer end face of the insertion pipe (313), and the length of the external thread sleeve (4) is smaller than that of the insertion pipe (313).
6. The drainpipe of the chemical mechanical polishing machine as claimed in claim 5, wherein: the distance between the external thread sleeve (4) and the rubber sealing sleeve (7) is larger than the distance from the inner end surface of the rubber sealing sleeve (7) to the outer end surface of the lower extension half pipe (321).
7. The drainpipe of the chemical mechanical polishing machine as claimed in claim 1, wherein: and a sealing gasket (8) is inserted into the insertion hole (314) of the insertion pipe (313), and the sealing gasket (8) is clamped between the insertion pipe (313) and the first drainage pipe (1) or between the insertion pipe (313) and the second drainage pipe (2).
8. The drainpipe of the chemical mechanical polishing machine as claimed in claim 7, wherein: the inner diameter of the insertion pipe (313) is equal to that of the first drainage pipe (1) or the second drainage pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010787295.7A CN111872843B (en) | 2020-08-07 | 2020-08-07 | Drainage pipeline on chemical mechanical lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010787295.7A CN111872843B (en) | 2020-08-07 | 2020-08-07 | Drainage pipeline on chemical mechanical lapping machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111872843A CN111872843A (en) | 2020-11-03 |
| CN111872843B true CN111872843B (en) | 2022-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010787295.7A Active CN111872843B (en) | 2020-08-07 | 2020-08-07 | Drainage pipeline on chemical mechanical lapping machine |
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| DE2963206D1 (en) * | 1978-03-30 | 1982-08-19 | Westinghouse Electric Corp | Ultra high vacuum seal arrangement |
| EP0231076B1 (en) * | 1986-01-15 | 1991-04-03 | Hiltap Fittings Ltd. | Pipe union assembly |
| JPH0769028B2 (en) * | 1990-05-07 | 1995-07-26 | 新日本製鐵株式会社 | Oil well fitting |
| JP3487444B2 (en) * | 1994-03-22 | 2004-01-19 | 積水ハウス株式会社 | Method of forming piping hole in substructure and sleeve |
| CN205001676U (en) * | 2015-09-18 | 2016-01-27 | 凌源利浩型材科技有限公司 | PVC (Polyvinyl chloride) building drainage pipe |
| CN206246868U (en) * | 2016-11-15 | 2017-06-13 | 广州松下空调器有限公司 | A kind of air-conditioner, Anti-detachable pipe connector device and component |
| CN109092809A (en) * | 2018-09-06 | 2018-12-28 | 四川川油工程技术勘察设计有限公司 | Petroleum transportation twin flue inner wall sediment method for cleaning |
| CN108825272A (en) * | 2018-09-07 | 2018-11-16 | 西南交通大学 | Lining construction seam infiltration drain structure and its implementation method |
| CN208978179U (en) * | 2018-11-01 | 2019-06-14 | 精利模塑科技（无锡）有限公司 | A kind of pipeline for hot-fluid in precise injection molding |
| CN209416136U (en) * | 2018-12-11 | 2019-09-20 | 四川同一热能设备有限公司 | A kind of heat exchanger tube and heat exchanger convenient for cleaning |
| CN210372383U (en) * | 2019-07-12 | 2020-04-21 | 徐州共进模具制造有限公司 | Detachable PE pipe |
| CN110425347B (en) * | 2019-08-20 | 2024-03-26 | 福建优净星环境科技有限公司 | Antibacterial and bactericidal composite pipe fitting and manufacturing method thereof |
| CN110566731A (en) * | 2019-09-27 | 2019-12-13 | 江苏林诚电仪设备有限公司 | pipeline loop joint |
| CN210770710U (en) * | 2019-10-31 | 2020-06-16 | 哈尔滨东安粮食机械有限公司 | Oil guide pipe |
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2020
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| CN111872843A (en) | 2020-11-03 |
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Effective date of registration: 20220424 Address after: 261000 No. 2222, Tangjing Road, Honghe Town, Changle County, Weifang City, Shandong Province Applicant after: Weifang Yutai polymer material Co.,Ltd. Address before: Room 1303, building B, Kangxin garden, 569 Wensan Road, Xihu District, Hangzhou City, Zhejiang Province Applicant before: HANGZHOU EZSOFT TECHNOLOGY Co.,Ltd. |
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