CN111822216A

CN111822216A - Ultrasonic atomizer

Info

Publication number: CN111822216A
Application number: CN202010702798.XA
Authority: CN
Inventors: 钟术光
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-07-18
Filing date: 2020-07-18
Publication date: 2020-10-27

Abstract

The invention relates to an ultrasonic atomizer, comprising an ultrasonic atomizing sheet and a porous body which has conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and basically stably maintains the original shape in the atomizing process and the atomized liquid, wherein the ultrasonic atomizing sheet comprises a piezoelectric ceramic plate, opposite electrodes are arranged on two opposite surfaces of the piezoelectric ceramic plate or/and between the two opposite surfaces of the piezoelectric ceramic plate to be used as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate or/and in a surface lower layer to be used as the piezoelectric active regions, (the ultrasonic atomizing sheet can vibrate in the thickness direction by applying alternating current between the electrodes, and the liquid in the porous body can be atomized by the vibration). The atomizer has high atomization efficiency; the atomization performance is stable and basically not influenced by body position; the temperature rise amplitude is reduced during atomization, the noise is reduced, the damage is not easy to occur, and the safety is improved.

Description

Ultrasonic atomizer

[ technical field ] A method for producing a semiconductor device

The present invention relates to an ultrasonic atomizer. More particularly, the present invention relates to a multi-purpose ultrasonic atomizer with improved performance.

[ technical background ] A method for producing a semiconductor device

The present ultrasonic atomizer or ultrasonic atomizing plate typically has a structure in which a vibrating plate is formed by bonding a circular metal plate to one surface of a circular piezoelectric ceramic plate, wherein the peripheral portion of the piezoelectric ceramic plate is supported in the circular wall of the metal plate, wherein the piezoelectric ceramic plate has a through hole at the center thereof, and wherein the metal plate has a atomizing area having a plurality of micro holes formed therethrough up and down at the center thereof, the micro hole area being opposite to the through hole. However, such an ultrasonic atomizer or an ultrasonic atomizing sheet has many disadvantages such as a small effective vibration displacement, difficulty in obtaining strong vibration, low effective energy conversion efficiency, a small area occupation ratio of an atomizing area, and a low atomizing capability, and is difficult to be used particularly for a miniaturized portable device.

Other atomizing devices such as chinese patent CN102219511A disclose in example thereof fig. 2 (paragraph 0069) a rectangular or bar-shaped "piezoelectric element 10 (test piece)" comprising "piezoelectric substrate 11" of "7 mm × 4.5 mm" and "

vibration electrodes

12, 13" on the surface thereof, and in paragraph 0058 indicates "piezoelectric ceramic composition (piezoelectric element) of the present invention, vibrator … … for … … atomizer can be used in addition to oscillator".

Thereafter, chinese patent CN209002936U discloses a similar ultrasonic atomizing sheet, which "comprises a sheet-shaped piezoelectric substrate (101), a surface electrode (102) attached to one side surface of the piezoelectric substrate (101), and a driving electrode (103) attached to the other side surface of the piezoelectric substrate (101), wherein the piezoelectric substrate (101) is in a strip shape".

In addition, chinese patents CN206079025U and CN107752129A also disclose an ultrasonic atomizing sheet or an ultrasonic atomizer, "including an ultrasonic atomizing sheet, the upper surface of the ultrasonic atomizing sheet is provided with a tobacco tar adsorbing layer to form a piezoelectric ceramic component (10), the ultrasonic atomizing sheet and the tobacco tar adsorbing layer form an integrated structure, the tobacco tar adsorbing layer is used for adsorbing and transporting tobacco tar", and the tobacco tar adsorbing layer has a ceramic pulp layer, cotton, and non-woven fabric.

In addition, chinese patent CN2611051Y utilizes two piezoelectric sheets to drive the vibration diaphragm and the atomization diaphragm which form the liquid supply chamber, respectively, and the circular piezoelectric sheet and the vibration diaphragm are bonded to form a piezoelectric transducer, which provides high-speed longitudinal pressure wave in the liquid ejection direction to make the liquid ejected through the micro-orifice at high speed.

Similarly, chinese patent CN1359733A discloses a method and apparatus for delivering atomized liquid into human body, the apparatus includes an elastic cavity mold with micro-orifices on one surface, a piezoelectric ceramic plate mounted on the other surface of the elastic cavity mold, and a liquid supply tube connected to the elastic cavity mold and providing liquid for the elastic cavity mold, the elastic cavity mold is driven by electric signals to vibrate, and the formed pressure wave extrudes the liquid from the micro-orifices to form atomized liquid drops for administration.

The above listed ultrasonic nebulizing devices or ultrasonic nebulizers are also deficient:

1) the piezoelectric ceramic used by the prior atomizing sheet basically adopts a driving mode in the length-width direction or the radial non-thickness direction, and the telescopic vibration in the length-width direction or the radial non-thickness direction causes the atomizing efficiency of the ultrasonic atomizing sheet or the ultrasonic atomizer to be very low, and causes the center of the ultrasonic atomizing sheet to vibrate too much, generate heat seriously, generate noise greatly and possibly damage the ultrasonic atomizing sheet; in addition, the telescopic vibration in the length-width direction and the non-thickness direction may cause the tobacco tar adsorbing layer on the ultrasonic atomizing sheet in CN206079025U and CN107752129A to be extruded and damaged, such as cracking and dropping, due to passive telescopic motion (the two do not move synchronously), and the pores in the porous structure are easy to block and not easy to replace;

2) And/or the particle size of the droplets (atomized particles) after atomization of the liquid is not controlled, the porous body is not used, or the porous body is used but it is difficult to stably maintain the original form during atomization and in the atomized liquid, such as when the porous body which cannot maintain the original form in the liquid is used, such as cotton is deformed (shrinkage, form instability), or the porous body is broken and disintegrated such as a ceramic slurry layer (too high porosity and too low mechanical strength due to high moisture content during the manufacture thereof) due to ultrasonic vibration after a period of use, the particle size of the droplets (atomized particles) is not controlled any more, so that the particle size of the droplets (atomized particles) is too large or too wide in distribution, wherein larger particles are more, and further, the disintegrated particles or fragments may injure the user, so that the use thereof is limited, such as being unsuitable for medical use, particularly for inhalation into the lung, such as e-cigarette;

3) and/or porous body in ultrasonic atomizer, such as porous plate or non-woven fabric (wherein micropore is basically through hole) obtained by laser, machinery, chemical corrosion, hot melt, interweaving first and then hot melt or hot pressing, etc., basically it is the conductivity of thickness direction, basically there is no conductivity of length direction or/and width direction or radial direction, make its liquid-guiding or transfusion ability not strong, especially the liquid-guiding or transfusion ability not strong of length direction or/and width direction or radial direction, and there is no ability to store liquid, thus make its atomization efficiency not strong, need a bigger reservoir, the liquid must be communicated with micropore directly;

4) When the liquid in the liquid supply cavity of the device is not full, the device is upright, flat, inclined at different angles, even when the surface of the porous plate faces upwards or downwards, the contact area of the porous plate and the liquid is different, part of the through holes cannot be contacted with the liquid, so that partial atomization is lost, and the atomization performance becomes unstable and is influenced by the position (such as CN2611051Y and CN 1359733A).

Therefore, in reality, there is a need for further improvement of the ultrasonic atomizing sheet or the ultrasonic atomizer in the above invention.

[ summary of the invention ]

The present invention has an object to provide an ultrasonic atomizing sheet or an ultrasonic atomizer which can be used for a miniaturized portable device, is reduced in size, is light and thin, and is portable.

The invention aims to provide an ultrasonic atomization sheet or an ultrasonic atomizer, which has high atomization efficiency.

The invention aims to provide an ultrasonic atomization sheet or an ultrasonic atomizer, which has stable atomization performance and is basically not influenced by body positions.

It is another object of the present invention to provide an ultrasonic atomizing plate or an ultrasonic atomizer, in which the temperature rise is reduced during atomization.

It is another object of the present invention to provide an ultrasonic atomizing sheet or an ultrasonic atomizer, which is reduced in noise upon atomization.

It is another object of the present invention to provide an ultrasonic atomization sheet or an ultrasonic atomizer which is less likely to be damaged or/and improved in safety when atomized.

It is another object of the present invention to provide an ultrasonic atomization sheet or an ultrasonic atomizer which atomizes a mist (atomized particles) having a narrow particle size distribution range with fewer larger particles.

It is another object of the present invention to provide an ultrasonic atomizing sheet or an ultrasonic atomizer in which a porous structure which is easily clogged is easily replaced after the pores thereof are clogged.

Another object of the present invention is to provide an ultrasonic atomizing sheet or an ultrasonic atomizer, which has many uses, is particularly suitable for medical use, and improves clinical effects.

It is another object of the present invention to provide an ultrasonic nebulization patch or ultrasonic nebulizer suitable for pulmonary inhalation, in particular for electronic cigarettes.

The inventor surprisingly finds that the ultrasonic atomizer is assisted by the porous body with the conducting capacity in the thickness direction and the length direction or/and the width direction or the thickness direction and the radial direction, has better functions of liquid storage, liquid guiding or liquid transfusion, can remarkably improve the atomizing capacity and the atomizing efficiency, improves the atomizing effect, can ensure that the particle size distribution range of fog drops (atomized particles) is narrower, has fewer larger particles, is beneficial to reducing the size of the ultrasonic atomizer, and can be used for various purposes.

The present inventors have also surprisingly found that an ultrasonic atomizer employs an ultrasonic atomizing sheet (particularly, a square shape) comprising a (particularly, square, through-hole-free) piezoelectric ceramic plate (or piezoelectric element) and a (particularly, square) vibrating plate (e.g., a metal plate) to which the piezoelectric ceramic plate (or piezoelectric element) is fixedly attached, electrodes are provided on front and back surfaces of the piezoelectric ceramic plate (or piezoelectric element), and an alternating signal applied between the electrodes can be bent and vibrated in a thickness direction, which is advantageous for reducing a size, particularly a size in a width and/or thickness, and is suitable for a miniaturized portable device, which is advantageous for increasing an effective vibration displacement amount, obtaining a strong effective vibration, increasing an effective energy conversion efficiency, increasing an atomizing area, greatly improving an atomizing ability, an atomizing efficiency, and improving an atomizing effect, and the ultrasonic atomization sheet can generate heat lightly, the temperature rise amplitude is not high, the noise is reduced, and the ultrasonic atomization sheet is not easy to damage.

The present invention has been accomplished based on the above findings, by attaining some or all of the above objects of the present invention.

The present invention relates to an ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a conducting (i.e., communicating and guiding a fluid flow) ability in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially stably maintaining its form during atomization and in a liquid to be atomized, the ultrasonic atomizing sheet comprising a piezoelectric ceramic plate (or piezoelectric element) (without through-holes), opposed electrodes provided on opposed surfaces of the piezoelectric ceramic plate (or piezoelectric element) or between opposed surfaces (e.g., in a surface layer) as piezoelectric active regions, or adjacent (next to/adjacent to) interdigital electrodes provided on the surface of the piezoelectric ceramic plate (or piezoelectric element) or in a subsurface layer as piezoelectric active regions, (application of an alternating current (or/and alternating) electric (signal) between the electrodes can vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting), (the porous body may be sensitive to the vibration of the ultrasonic atomization sheet), (the vibration may atomize the liquid in (the pores of) the porous body)).

The term "substantially stably maintains its form" means that the form can be substantially maintained by accumulating (atomizing) operation for 1 hour or more, preferably 10 hours or more, more preferably 50 hours or more, more preferably 100 hours or more, more preferably 500 hours or more, more preferably 1000 hours or more, more preferably 2000 hours or more, most preferably 5000 hours or more.

The term "substantially retaining its form" as used above means that the form is substantially free of irreversible changes (e.g., substantially insoluble (dissolved), substantially non-molten, irreversibly deformed, substantially free of breakage such as cracking, splitting, etc.), and does not undergo a dimensional change of more than 10%, preferably not more than 5%, more preferably not more than 2%, more preferably not more than 1%, more preferably not more than 0.5%, and most preferably not more than 0.1%; or/and (original) function is substantially maintained without substantial change, such as a change in the atomization amount of the ultrasonic atomizer, or/and the average particle size of the atomized particles, or/and the particle size distribution of the atomized particles, or the like, of the important performance index, which is usually not more than 20%, preferably not more than 10%, more preferably not more than 5%, more preferably not more than 2%, more preferably not more than 1%, more preferably not more than 0.5%, and most preferably not more than 0.1%.

Preferably, the piezoelectric ceramic plate is not provided with through holes, and the through holes are not provided, so that the atomization performance is improved compared with the through holes (in the central area), the atomization area is reduced due to the through holes, and the central area has the strongest atomization capability, and the closer to the central area, the stronger atomization capability is.

Preferably, the porous body is disposed on the surface of the ultrasonic atomization sheet or within a vertical distance of 0 to 10mm, more preferably within 0 to 6mm, still more preferably within 0 to 3m, most preferably within 0 to 1mm from the surface.

Preferably, the porous body is provided on the surface of the ultrasonic atomization sheet (preferably, when viewed in the thickness direction, at least a partial area (e.g., 30% or more, preferably 50% or more, more preferably 70% or more, and most preferably 90% or more) of the area of the pores of the porous body coincides with the piezoelectric active region of the ultrasonic atomization sheet), or at least a partial area (e.g., 30% or more, preferably 50% or more, more preferably 70% or more, and most preferably 90% or more) of the piezoelectric active region of the ultrasonic atomization sheet coincides with the area of the pores of the porous body (the more the overlapping area is, the more the atomization performance is improved).

Preferably, the ultrasonic atomizer further comprises a container, the porous body is arranged to be a part or all of the wall body of the container or arranged on the outer surface of the container, and the ultrasonic atomization sheet is arranged in the container or arranged on the surface of the container or arranged to be a part of the wall body of the container.

Preferably, the ultrasonic atomization sheet further includes a vibration plate, the piezoelectric ceramic plate (or piezoelectric element) is disposed (mounted or fixed) on (a surface of) the vibration plate, and preferably, an overlapping area between the piezoelectric ceramic plate (or piezoelectric element) and the vibration plate, as viewed in a thickness direction, preferably, the area of the overlapping area occupies at least 20% or more (more preferably, 30% or more, more preferably, 50% or more, more preferably, 70% or more, and most preferably, 90% or more) of an entire area of a face of the piezoelectric ceramic plate (or piezoelectric element) or the vibration plate including the overlapping area (the larger the area ratio is, the larger the vibration in the thickness direction is, the smaller the plane contraction-expansion vibration is, and the higher the atomization performance is improved). Preferably, opposing electrodes are provided as the piezoelectric active regions on or/and between (e.g., in) opposing surfaces of at least the piezoelectric ceramic plate (or piezoelectric element) in the above-mentioned overlapping region.

Preferably, the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomization sheet is substantially or generally a square body, at least one pair of opposite sides of which are fixed to the vibration plate, more preferably, at least two relatively short sides of which are fixed to the vibration plate, and most preferably, at least four corners (corners) of which are fixed to the vibration plate, so as to facilitate the maximum range of thickness direction vibration.

The piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomization sheet is positioned on one side (with a single-sided structure) of the vibrating plate, or two sides (with a double-sided structure, namely a sandwich structure) of the vibrating plate, so that the ultrasonic atomization sheet is formed; or the piezoelectric ceramic plate (or the piezoelectric element) is sandwiched or wrapped by the vibrating plate.

The ultrasonic atomizing plate is preferably of a sandwich structure which is basically (or mainly) formed by attaching and fixing two piezoelectric ceramic plates (or piezoelectric elements) and a vibrating plate which is fixedly clamped between the two piezoelectric ceramic plates (or piezoelectric elements). The two piezoelectric ceramic plates (or the electrodes on the piezoelectric elements) are connected in series, and the polarities of the electrodes on the opposite surfaces of the two piezoelectric ceramic plates (or the piezoelectric elements) are the same (the two piezoelectric ceramic plates are polarized in opposite directions), or the two piezoelectric ceramic plates (or the electrodes on the piezoelectric elements) are connected in parallel, and the polarities of the electrodes on the opposite surfaces of the two piezoelectric ceramic plates (or the piezoelectric elements) are opposite (the two piezoelectric ceramic plates are polarized in the same direction), so that bending vibration is realized. Preferably, the edge of the vibrating plate extends out of the periphery of the two piezoelectric ceramic plates (or the piezoelectric elements); preferably, the ultrasonic atomization plate is provided with a bonding pad outside the peripheries of the two piezoelectric ceramic plates (or piezoelectric elements), and more preferably, the bonding pad is connected to the vibration plate.

Preferably, the above piezoelectric ceramic plate (or piezoelectric element) or/and the above vibration plate or/and the above porous body is substantially (or generally) square (as opposed to a round flat body) is advantageous in improving atomization performance or/and reducing a space occupation ratio).

The width (a) of the interdigital electrode or the distance (b) between adjacent interdigital electrodes (fingers) is generally 10nm to 1mm, preferably 20nm to 500 μm, more preferably 40nm to 200 μm, and most preferably 80nm to 100 μm, respectively. The effective length (w) of the interdigital electrodes (fingers) (or the aperture of the interdigital transducer formed by the adjacent interdigital electrode pairs) is not limited, and is generally 0.5mm to 30mm, preferably 1mm to 20mm, and preferably 3mm to 15 mm. The width (a) of the interdigital electrode and the distance (b) between the adjacent interdigital electrodes (fingers) are preferably substantially equal, and the excited surface acoustic wave wavelength is substantially four times the width (a) of the finger. The period length of an interdigital transducer formed by adjacent interdigital electrode pairs can be represented by p, and p is 2a +2 b. The interdigital electrode is preferably a fence electrode. When the two bus bars are respectively connected or communicated with two ends (positive pole or negative pole) of alternating current, the surface wave is generated on the surface of the piezoelectric ceramic plate (or piezoelectric element) arranged on the two bus bars, and the surface wave can vibrate in the thickness direction (bending or/and twisting), and the vibration can be strengthened by a vibrating plate fixed on the piezoelectric ceramic plate.

Preferably, the above-mentioned finger electrodes are disposed on the opposite surfaces of the above-mentioned piezoelectric ceramic plate (or piezoelectric element) or/and in the lower layer of the opposite surfaces. Preferably, the polarity of the first interdigital electrode on the upper surface is opposite to the polarity of the first interdigital electrode on the lower surface, and the number of the finger electrodes on the upper and lower surfaces is counted from the same end of the piezoelectric ceramic plate. More preferably, the interdigital electrodes are substantially symmetrically disposed on or/and in the lower layer on the opposite surfaces of the piezoelectric ceramic plate (or the piezoelectric element).

Detailed Description

Piezoelectric ceramic plate (or piezoelectric element)

The present invention relates to an ultrasonic atomizing sheet or a piezoelectric ceramic plate (or piezoelectric element) in an ultrasonic atomizer, which may be a single piezoelectric ceramic plate, or a laminated body formed substantially (or mainly) of two or three or more piezoelectric ceramic plates/layers, wherein opposing electrodes are disposed on opposing surfaces or/and between opposing surfaces (e.g., in the surface layers), and an alternating current (or alternating current) electricity (signal) is applied between the electrodes to vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting).

The ultrasonic atomizing sheet or the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomizer according to the present invention is preferably a laminated body formed substantially (or mainly) of two piezoelectric ceramic sheets/layers, an inner electrode is provided between the two piezoelectric ceramic sheets/layers, two outer side surfaces are provided with and communicate with two outer side electrodes, the inner electrode is insulated from the two outer side electrodes, and application of an alternating (/ or alternating) electric (signal) between the inner electrode and the outer side electrodes can vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting). Preferably, the inner electrode is led out to the outer side surface and arranged in parallel with the outer electrode (with a predetermined space therebetween).

Another preferable example of the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or the piezoelectric element) in the ultrasonic atomizer according to the present invention comprises a laminate in which two or three piezoelectric ceramic layers are laminated; main surface electrodes formed on the upper and lower surfaces of the laminate; and internal electrodes formed between the adjacent two piezoelectric ceramic layers, wherein all of the ceramic layers are polarized in the same direction with respect to the thickness direction; and by applying an alternating current (signal) across the main surface electrodes and the internal electrodes, the laminate body generates (bends or/and twists) vibration in its thickness direction in its entirety. Preferably, the piezoelectric ceramic plate (or piezoelectric element) includes three laminated piezoelectric ceramic layers, and the thickness of the intermediate ceramic layer is between 50 percent and 80 percent of the entire thickness of the laminated body. In the three laminated stacks, since there is no potential difference between the two internal electrodes, the intermediate layer does not contribute to the bending vibration, but its thick thickness increases the mechanical strength of the piezoelectric ceramic plate (or piezoelectric element), and the two thin outer layers increase the amount of displacement and increase the amount of atomization (the thinner the piezoelectric ceramic plate (or piezoelectric element), the greater the amount of displacement, the stronger the atomization ability).

Still another preferable example of the above-mentioned laminated type piezoelectric ceramic plate (or piezoelectric element) includes a laminated body in which at least two piezoelectric ceramic layers are laminated, main surface electrodes provided on front and back surfaces of the laminated body, and internal electrodes located between each of the ceramic layers, where all the ceramic layers are polarized in the same direction in a thickness direction, the laminated body vibrating entirely in a bending mode in response to an alternating current (/ or alternating) electric (signal) applied between the main surface electrodes and the internal electrodes.

Still another preferable example of the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or the piezoelectric element) in the ultrasonic atomizer according to the present invention comprises a plurality of piezoelectric ceramic layers laminated to define a laminate; main surface electrodes provided on the front and rear main surfaces of the laminate; internal electrodes provided between the respective ceramic layers, and all the ceramic layers are polarized in the same direction in the thickness direction thereof; the above-mentioned piezoelectric ceramic plate (or piezoelectric element) generates flexural vibration in response to an alternating current (/ or alternating) electricity (signal) applied between the main surface electrode and the internal electrode; and a resin layer provided so as to cover substantially all of the front and rear surfaces of the laminate (to protect the electrodes thereon and to improve crushing strength and fogging resistance).

Still another specific example of the laminated piezoelectric ceramic plate (or piezoelectric element) includes:

at least three sheet-like piezoelectric ceramic sintered bodies having an upper surface, a lower surface, and opposing 1 st and 2 nd end surfaces;

an upper surface electrode formed on an upper surface of the ceramic sintered body located at the uppermost portion;

a lower surface electrode formed on a lower surface of the ceramic sintered body located at the lowermost portion;

a 1 st external electrode formed on a 1 st end surface of the ceramic sintered body;

a 2 nd external electrode formed on a 2 nd end face of the ceramic sintered body;

at least one 1 st internal electrode formed between adjacent ceramic sintered bodies and led out to the 1 st external electrode;

and at least one 2 nd internal electrode formed between the adjacent ceramic sintered bodies and drawn out to the 2 nd external electrode;

the ceramic sintered body is laminated together with the 1 st internal electrode and the 2 nd internal electrode;

the 1 st internal electrode is insulated from the 2 nd external electrode, and the 2 nd internal electrode is insulated from the 1 st external electrode;

the upper surface electrode and the uppermost 1 st internal electrode, the 1 st internal electrode and the 2 nd internal electrode, and the lower surface electrode and the lowermost 2 nd internal electrode are opposed to each other with the ceramic sintered body interposed therebetween, and a part of the ceramic layer is interposed between the upper surface electrode and the uppermost 1 st internal electrode, between the 1 st internal electrode and the 2 nd internal electrode, and between the lower surface electrode and the lowermost 2 nd internal electrode as an active layer, and has at least three active layers;

When the total number of the ceramic sintered bodies is an odd number, the 1 st external electrode lead-out is communicated with the lower surface electrode, the 2 nd external electrode lead-out is communicated with the upper surface electrode, and the upper surface electrode and the lower surface electrode are insulated (preferably, the surface electrodes are led out to the same surface and arranged in parallel with the surface electrode formed thereon, but are insulated with the surface electrode (a preset interval is reserved between the surface electrodes));

when the total number of the above-mentioned ceramic sintered bodies is an even number, the 1 st external electrode is insulated from the upper surface electrode and the lower surface electrode (but preferably the 1 st external electrode is led out to the upper surface and/or the lower surface, juxtaposed with the surface electrode formed thereon, but insulated from the surface electrode (with a predetermined interval therebetween)), and the 2 nd external electrode is led out to communicate with the upper surface electrode and the lower surface electrode;

the atomizing sheet can be caused to flexurally vibrate in the thickness direction by applying (alternating signal) alternating current (/ or alternating) electricity (signal) to the 1 st and 2 nd external electrodes.

Another specific example of the above laminated piezoelectric ceramic plate (or piezoelectric element) comprises

A ceramic sintered body made of piezoelectric ceramic and having an upper surface, a lower surface, and opposing 1 st and 2 nd end surfaces;

An upper surface electrode formed on an upper surface of the ceramic sintered body;

a lower surface electrode formed on a lower surface of the ceramic sintered body;

at least one 1 st internal electrode formed in the ceramic sintered body and drawn out to the 1 st end face;

at least one 2 nd internal electrode formed in the ceramic sintered body and drawn out to the 2 nd end face;

and at least three ceramic layers formed in the ceramic sintered body and laminated together with the 1 st internal electrode and the 2 nd internal electrode;

the top surface electrode and the uppermost 1 st internal electrode, the 1 st internal electrode and the 2 nd internal electrode, and the bottom surface electrode and the lowermost 2 nd internal electrode are opposed to each other via the ceramic layers in the ceramic sintered body, and a part of the ceramic layers are interposed between the top surface electrode and the uppermost 1 st internal electrode, between the 1 st internal electrode and the 2 nd internal electrode, and between the bottom surface electrode and the lowermost 2 nd internal electrode as active layers, and have at least three active layers;

When the number of the ceramic layers is odd, the 1 st external electrode lead-out is communicated with the lower surface electrode, the 2 nd external electrode lead-out is communicated with the upper surface electrode, and the upper surface electrode and the lower surface electrode are insulated (preferably, the surface electrodes are led out to the same surface and arranged in parallel with the surface electrode formed thereon, but are insulated from the surface electrode (a preset interval is reserved between the surface electrodes));

when the number of the ceramic layers is even, the 1 st external electrode is insulated from the upper surface electrode and the lower surface electrode (but preferably, the 1 st external electrode is led out to the upper surface and/or the lower surface, is arranged in parallel with the surface electrode formed thereon, but is insulated from the surface electrode (with a preset interval therebetween)), and the 2 nd external electrode is led out to be communicated with the upper surface electrode and the lower surface electrode;

Preferably, in the ceramic sintered body, ceramic layers between the uppermost internal electrode of the 1 st internal electrode and the 2 nd internal electrode and an upper surface of the ceramic sintered body are made to be a 1 st inactive layer (that is, no upper surface electrode is provided, or the upper surface electrode and the uppermost internal electrode are not opposed to each other with the ceramic layers interposed therebetween in the ceramic sintered body, and no ceramic layer is interposed between the upper surface electrode and the uppermost internal electrode as an active layer), and ceramic layers between the lowermost internal electrode of the 1 st internal electrode and the 2 nd internal electrode and a lower surface of the ceramic sintered body are made to be a 2 nd inactive layer (that is, no lower surface electrode is provided, or the lower surface electrode and the lowermost internal electrode are opposed to each other with the ceramic layers interposed therebetween in the ceramic sintered body, wherein no ceramic layer is interposed between the lower surface electrode and the internal electrode positioned at the lowermost portion as an active layer), the thickness of the ceramic layer as the inactive layer is thinner than the thickness of the ceramic layer as the active layer,

And the length of the 1 st internal electrode or the 2 nd internal electrode is set to be the distance from the 1 st end face or the 2 nd end face of the 1 st internal electrode or the 2 nd internal electrode to the top end of the 1 st internal electrode or the 2 nd internal electrode, at least one of the lengths of the internal electrode positioned at the uppermost part and the internal electrode positioned at the lowermost part is shorter than the lengths of the other internal electrodes,

the 1 st and 2 nd external electrodes are formed so as not to overlap internal electrodes connected to different potentials among the uppermost and lowermost internal electrodes with an inactive layer interposed therebetween when viewed in a plan view in a stacking direction of the ceramic sintered bodies.

Thus, it is possible to provide a multilayer piezoelectric actuator and a piezoelectric vibration device including the same, in which even if the outermost ceramic layer is an inactive layer, the amount of displacement is increased by reducing the thickness of the inactive layer, and thus, breakage in the ceramic sintered body is less likely to occur.

The shape of the electrode on the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomizer according to the present invention may be substantially rectangular, or circular, or any other shape without limitation.

The (natural) vibration frequency of the piezoelectrically active region of the above piezoelectric ceramic plate (or piezoelectric element) or/and the above alternating (/ or alternating) electric (signal) frequency range is usually 10kHz-500MHz, preferably 20kHz-100MHz, more preferably 80 k-200 kHz or 160 k-260 kHz or 1 MHz-3 MHz, or 3.5 MHz-50 MHz. Preferably, the vibration frequency of the piezoelectric ceramic plate (or the piezoelectric element) is substantially the same as the frequency of the alternating current (/ or alternating) electricity (signal).

The piezoelectric ceramic plate (or piezoelectric element) is in the form of a substantially flat square (e.g., square, rectangle, strip), diamond, triangle, trapezoid, polygon, circle, ellipse, or other flat body, preferably a square (e.g., square, rectangle, strip). Preferably, the center or middle portion of the piezoelectric ceramic plate (or the piezoelectric element) is solid, preferably, the center or middle portion is solid made of any elastic solid material for buffering the central mechanical energy and reducing the central damage, especially, the elastic solid material is solid and can rebound the potential energy accumulated in the center or middle portion to reduce the energy loss and improve the energy utilization rate, the elastic solid material can be a solid polymer material (polymer) which is elastic at a temperature higher than the glass transition temperature thereof, examples of the elastic solid material include, but are not limited to, rubber, vulcanized rubber, silicone rubber, foamed (or porous) plastic, polyurethane elastomer (TPU) material, PE (polyethylene), PP (polypropylene), PS (polystyrene), PVC, PU (polyurethane, foamed polyurethane), EVA (ethylene-vinyl acetate copolymer rubber product), CR (chloroprene rubber), PEF (polyethylene chemically crosslinked high foaming material), EPS (expanded polystyrene), EPE (expanded polyethylene), EPP (expanded polypropylene), phenol foam, EPDM (ethylene propylene diene elastomer, commonly known as cellular rubber), and the like.

The above-mentioned piezoelectric ceramic plate (or piezoelectric element) material, i.e., piezoelectric ceramic, is not particularly limited in its composition or otherwise. Any and every piezoelectric ceramic may be used herein. As long as ceramics exhibiting piezoelectricity can be used in the present invention, specifically, examples of ceramics that can be used include a Bi layered compound, a tungsten bronze structure material, a perovskite structure compound of Nb acid-base compounds, lead magnesium niobate (PMN system), lead nickel niobate (PNN system), lead zirconate titanate containing Pb (PZT system), a material containing lead titanate, barium, or the like (see CN 1502469A).

Among these, a perovskite-type compound containing at least Pb is preferable for higher piezoelectric performance. Examples of the perovskite-type compound containing Pb include lead magnesium niobate (PMN-based), lead nickel niobate (PNN-based), lead zirconate titanate containing Pb (PZT-based), lead titanate-containing materials, and the like. By adopting such a composition, a piezoelectric ceramic sheet having piezoelectric vibration with a high piezoelectric constant can be obtained. Among these, lead zirconate titanate or lead titanate containing Pb is more suitable because of having a larger displacement.

For environmental protection and improvement of safety, a perovskite-type compound of niobic acid, zirconic acid or titanic acid is more preferable.

As one preferable example of the perovskite-type crystal, PbZrTiO3 containing Pb as an a-site constituent element and Zr and Ti as a B-site constituent element can be used. Further, other oxides may be mixed, or the a-site and/or the B-site may be replaced with other elements as a subcomponent insofar as the characteristics are not adversely affected. For example, Zn, Sb, Ni and Tc may be added as subcomponents to form a solid solution of Pb (Zn1/3Sb2/3)03 and Pb (Ni1/2Te1/2) 03.

According to the present invention, the perovskite-type crystal preferably further contains an alkaline earth element as an a-site constituent element. Examples of the alkaline earth element include Ba, Sr, Ca, and the like, and particularly, Ba and Sr are more preferable because a high displacement can be obtained. Thus, as a result of increasing the dielectric constant, a higher piezoelectric constant can be obtained.

Specifically, compounds represented by Pb1-x-ySrxBay (Zn1/3Sb2/3) a (Ni1/2Te1/2) bZr1-a-b-cTiCO3+ α mass% Pb1/2NbO3 (0. ltoreq. x.ltoreq.0.14, 0. ltoreq. y.ltoreq.0.14, 0.05. ltoreq. a.ltoreq.0.1, 0.002. ltoreq. b.ltoreq.0.01, 0.44. ltoreq. c.ltoreq.0.50, α. 0.1 to 1.0) are included.

Other specific examples are: single component systems such as BaTiO3, PbTiO3, KxW03, PbNb206 and the like; two-component systems such as PbTi03-PbZrO3, PbTiO3-Pb (Mg1/3Nb2/3)03 and the like; and three-component systems such as PbTiO3-PbZrO3-Pb (Mg1/3Nb2/3)03, PbTiO3-PbZrO3-Pb (Co1/3Nb2/3)03, K1-X-zNaxLizNO3 (e.g., { LiX (K1-YNaY)1-X } (Nb1-Z-WTaZSBW)03, etc.), etc. Specific examples of complex oxides and compounds useful in the present invention are found in CN 1206700A. Derivatives obtained by partially replacing Pb with any of Ba, Sr, Ca, etc., or partially replacing Ti with Sn, Hf, etc., may also be used.

The piezoelectric ceramic plate material can also be mixed with a polymer material to form a sheet with piezoelectricity. Examples of the polymer material include fluoroplastics (e.g., polyvinylidene fluoride and polytetrafluoroethylene), polylactic acid, and silica gel.

The piezoelectric ceramic preferably contains 0.1 mass% or less, and particularly preferably contains 0.07 mass% or less of carbon. Since carbon causes poor insulation in polarization due to the insulation of the piezoelectric body, the carbon can be suppressed within the above range to suppress the flow of current in polarization, thereby enabling polarization to a saturated polarization state. Therefore, a displacement failure due to a polarization failure can be prevented.

The porosity of the piezoelectric ceramic is preferably 5% or less, more preferably 1% or less, and particularly preferably 0.5% or less. By reducing the porosity, the strength of the piezoelectric ceramic can be improved, and breakage can be suppressed even when the thickness is small.

In the case where the piezoelectric ceramic of the present invention is used as an atomizer, the piezoelectric strain constant can be, for example, d31 mode. In order to fully exert the atomization capacity, d31 should be 50pm/V or more, preferably 100pm/V or more, more preferably 150pm/V or more, particularly preferably 200pm/V or more, and particularly preferably 250pm/V or more.

The electrode of the piezoelectric ceramic sheet may be an internal electrode or a surface electrode, and the material thereof may be conductive, and for example, a good conductor such as Au, Ag, Pd, Pt, Cu, Sn, Al, Ni, or an alloy thereof may be used, and preferably at least Ag is contained. Among them, Ag is preferable in terms of improving sinterability, and is excellent in conductivity and low in cost, while Pd is preferable in terms of conductivity and heat resistance. In addition, the use of the internal electrode, preferably Ag or Ni, promotes the lowering of the firing temperature (for example, in the case where the piezoelectric ceramic contains a volatile oxide such as Pb, K, Na, or Li).

The electrodes of the piezoelectric ceramic sheet are required to have a thickness such that they have conductivity and do not interfere with displacement, and the thickness is preferably 0.1 to 500 μm, more preferably 0.5 to 50 μm, and most preferably 1 to 5 μm. Particularly, the thickness of the internal electrode is preferably about 1 to 3 μm, and the thickness of the surface electrode is preferably 0.2 to 0.5 μm.

Vibrating plate

The ultrasonic atomization sheet or the vibration plate in the ultrasonic atomizer can convert the fixed piezoelectric ceramic plate (or the piezoelectric element) from the original straight telescopic vibration (such as the expansion-contraction vibration in the length direction and the expansion-contraction vibration in the area direction) into the (bending or/and torsion) vibration in the thickness direction, thereby increasing the effective vibration displacement, obtaining stronger effective vibration, increasing the effective energy conversion efficiency, increasing the area of an atomization area, greatly improving the atomization capacity and the atomization efficiency, improving the atomization effect, enabling the ultrasonic atomization sheet to generate heat less and enabling the ultrasonic atomization sheet not to be easily damaged.

At least one end or one side of the ultrasonic atomizing sheet or the vibration plate of the ultrasonic atomizer is fixed, preferably, substantially or generally square, at least two relatively short sides thereof are fixed, and more preferably, at least four corners (corners) thereof are fixed.

When two adjacent piezoelectric ceramic plates (or piezoelectric elements) with opposite expansion and contraction vibration in the straight direction are fixed together, one of the piezoelectric ceramic plates (or piezoelectric elements) can be mutually regarded as a vibration plate of the other piezoelectric ceramic plate (or piezoelectric element), so that the effect is stronger.

Examples of the vibrating plate that can be used in the present invention include, but are not limited to, a (square) metal plate, a ceramic plate (including a piezoelectric ceramic plate), a glass plate, a resin or plastic plate, and a composite plate thereof, and a wood plate, a bamboo plate can also be used in the present invention.

Examples of the metal and ceramic raw materials listed below as the "porous body" can be used for the metal plate and the ceramic plate (including the glass plate), and are not described herein.

The raw material of the resin or plastic plate may be one of non-metallic materials such as epoxy resin, acryl resin, Polyimide, polyamideimide, etc. having an elastic modulus of 500MPa to 1500MPa in a cured state, such as acrylic resin such as polymethyl methacrylate (PMMA), Polyimide, Polyethylene (PE), Polyethylene terephthalate (PET), polypropylene (PP), poly (cyclohexane dimethanol terephthalate) (PCT), polybutylene terephthalate (PBT), Polytetrafluoroethylene (PTFE), expanded polytetrafluoroethylene (ePTFE), and polyether ether ketone (PEEK), or any high-order engineering plastic.

The vibrating plate and the piezoelectric ceramic plate (or piezoelectric element) are substantially square bodies (e.g., square, rectangle, strip), rhombus, triangle, trapezoid, polygon, circle, ellipse, or other flat bodies, preferably rectangular bodies (circle or other shapes can also be used in the present invention), and the length and/or width and/or thickness thereof are substantially the same or different. The size of the vibrating plate is larger than, equal to, or smaller than the size of the piezoelectric ceramic plate (or piezoelectric element), and preferably larger than the size of the piezoelectric ceramic plate (or piezoelectric element).

The vibrating plate has certain rigidity and elasticity. The Young's modulus, thermal expansion coefficient and other favorable parameters of the vibration plate are substantially the same as or within + -50% (preferably + -30%) of the Young's modulus of the piezoelectric plate.

In order to increase the effective vibration displacement amount and obtain strong effective vibration, the weight and thickness of the vibrating plate are reduced as much as possible (30% or more) without greatly (30% or less) lowering the advantageous parameters such as the coefficient of thermal expansion of rigidity. The lighter the vibrating plate is, the higher the atomization ability per unit energy is. It is necessary that the piezoelectric ceramic plate (or piezoelectric element) has a thickness of about 5 to 2000 μm (preferably 10 to 1000 μm, more preferably 10 to 500 μm, still more preferably 10 to 200 μm, most preferably 20 to 100 μm), and the vibrating plate (e.g., 42# alloy) has a thickness of about 10 to 2000 μm (preferably 20 to 1000 μm, still more preferably 20 to 500 μm, still more preferably 20 to 200 μm, most preferably 50 to 100 μm). Too thin, the rigidity of the vibration plate becomes low, which makes it difficult to reliably support the piezoelectric element, or makes it difficult to sufficiently convert the shape distortion of the piezoelectric element into amplitude motion. If the thickness is too large, the rigidity of the vibration plate will be significantly increased, which will result in that deformation due to distortion of the shape of the piezoelectric element is difficult to transmit to the vibration plate, the vibration amplitude of the vibration plate is not obtained, and the atomization ability is reduced.

The frequency of the natural vibration mode of the piezoelectric ceramic plate (or the piezoelectric element) and the frequency of the natural vibration mode of the vibration plate are set to be different from each other, but preferably, substantially the same.

The mechanical quality factor Qm of the ultrasonic atomization sheet formed by integrally combining the piezoelectric ceramic plate (or piezoelectric element) and the vibration plate satisfies: qm is less than or equal to 5.0.

Preferably, the vibration plate is a metal plate having a length greater than that of the piezoelectric ceramic plate (or the piezoelectric element) and electrically connected to the back surface electrode of the piezoelectric plate. The vibrating plate is a metal plate having a thickness of 10 to 300 μm.

Preferably, the piezoelectric ceramic plate (or the piezoelectric element) is fixed to the first surface of the vibrating plate at a position deviated from the longitudinal direction of the vibrating plate, and the vibrating plate has an exposed portion at the second surface of the vibrating plate (not more than 50%, preferably 30%, which is slightly more than the original length of the vibrating plate to reduce a part of noise, but is excessively more than the original length, mainly extends and contracts in the straight direction, is greatly reduced or disappears in the thickness direction (bending or/and twisting), and the function of the vibration is greatly reduced or disappears).

Preferably, a relationship between an area Ap of the piezoelectric ceramic plate (or the piezoelectric element) and an area Am of the vibration plate satisfies: Am/Ap is more than or equal to 1.1 and less than or equal to 10.

Preferably, the outer shape of the vibrating plate is larger than the piezoelectric ceramic plate (or the piezoelectric element), and the piezoelectric ceramic plate (or the piezoelectric element) is bonded to a substantially central portion of the surface thereof. Preferably, the vibrating plate is a resin film. Preferably, the area of the piezoelectric ceramic plate (or the piezoelectric element) is 40 to 70% of the area of the vibration plate (preferably, a resin film), and the vibration plate (preferably, the resin film) is thinner than the piezoelectric ceramic plate (or the piezoelectric element). Preferably, the vibrating plate (preferably, the resin sheet) is formed of a material having an elastic modulus of 500MPa to 1500 MPa.

Preferably, the vibrating plate is made of a metal (outer) clad material in which different materials are bonded to each other in a layered form and a sandwich structure is formed in a cross section thereof, so that the weight of the vibrating plate is not reduced by lowering the rigidity of the vibrating plate and the thermal expansion coefficient of the surface of the vibrating plate of the piezoelectric atomization sheet, and the vibrating plate is supported and fixed by the frame portion so as to form a damper portion having a linear amplitude, thereby obtaining a piezoelectric atomizer having improved atomization characteristics (amount).

A specific example of the diaphragm includes 2 surface layers constituting both surfaces of a clad material made of a 1 st raw material, and an elastic material layer having elasticity stronger than that of the clad material, which is formed by bonding both surfaces of the 2 surface layers made of a 2 nd raw material different from the 1 st raw material to the surface layers, respectively. The 1 st material has a thermal expansion coefficient which is close to the thermal expansion coefficient of the piezoelectric element (the piezoelectric ceramic plate) mounted and fixed thereto (in the range of ± 50% (preferably ± 30%, most preferably ± 10%), and the density of the 2 nd material is lower than the density of the 1 st material. The thickness of the surface layer is thinner than that of the elastic material layer (core layer). The 1 st and 2 nd materials are each composed of a metal and a polymer resin sheet. The 1 st material is a metal sheet made of 42# alloy stainless steel, and the 2 nd material is one of a metal and a polymer resin sheet selected from the group consisting of 42# alloy stainless steel and the like. The 2 nd material is a metal thin plate of a material made of aluminum as a basic component (material). As the polymer resin sheet, for example, a rubber-based polymer resin sheet made of rubber such as Styrene Butadiene Rubber (SBR), Butadiene Rubber (BR), acrylonitrile butadiene rubber (NBR), ethylene propylene rubber (EPM), ethylene propylene diene rubber (EPDM), or a compound thereof can be used. As a raw material of the woven fabric or the nonwoven fabric, for example, a polyurethane fiber can be used. As an example, when the diaphragm material is made of 42# alloy or 304 stainless steel having a thickness of 10 μm as a surface material and a light soft metal such as aluminum, magnesium or titanium having a thickness of 30 μm as an elastic (magnetic core) material, and the total thickness is 50 μm, the flexural rigidity of the entire material made of 42# alloy or 304 stainless steel having a thickness of 50 μm can be approximated. The thickness of the elastic (magnetic core) material is 30-60 μm. In another example, the elastic (core) material may be made of aluminum, and the elastic (core) material may be made of a manganese-copper alloy having a good internal loss or a lightweight metallic film of magnesium, titanium, or the like. For example, as the elastic (magnetic core) material, a plastic material such as polyethylene terephthalate, polyethylene, polypropylene, polyurethane, polyamide, polyimide, or the like, or a rubber polymer resin such as styrene-butadiene rubber, butyl rubber, ethylene-propylene rubber, or a compound thereof, or a polymer resin film such as synthetic rubber, may be used.

Generally, when the frequency of the operating alternating current is lower or higher than the frequency of the natural vibration mode, the atomizing ability of the piezoelectric element is greatly reduced, and the more the deviation is, the more the reduction is, but in the following preferred embodiment, the frequency of the operating alternating current is lower or higher than the frequency of the natural vibration mode of the piezoelectric ceramic plate (or piezoelectric element) mounted (fixed) on the above-mentioned membrane body, particularly, at an ultra high frequency exceeding 100KHz, the atomizing ability can be maintained high, and the generation of large peaks and valleys (lower atomizing ability) can be reduced.

Therefore, it is preferable that the diaphragm is a film-shaped body, the piezoelectric ceramic plate (or the piezoelectric element) is attached (fixed), and the film-shaped body is fixed to a frame member provided on an outer peripheral portion of the film-shaped body in a state where tension is applied.

Alternatively, the diaphragm is a film-like body that is provided around the piezoelectric ceramic plate (or piezoelectric element) and elastically holds the piezoelectric ceramic plate (or piezoelectric element); the vibrating plate is larger in size than the piezoelectric ceramic plate (or the piezoelectric element), and the piezoelectric ceramic plate (or the piezoelectric element) is attached (fixed) to a substantially central portion thereof.

Preferably, the film-like body has a dense-sparse portion having a physically sparse portion capable of forming a peak and/or a trough in the outer circumferential direction, and the film-like body is disposed so as to correspond to a natural frequency of a same-phase mode in which the abdomen portion and the node portion are formed in a concentric ring shape.

Preferably, the film-like body has a bellows structure which is provided around the piezoelectric ceramic plate (or the piezoelectric element) to hold the piezoelectric ceramic plate (or the piezoelectric element) and has ridges and/or valleys in an outer circumferential direction to elastically hold the piezoelectric ceramic plate (or the piezoelectric element).

Preferably, the bellows structure of the membrane body is configured as follows: the abdomen of the bellows coincides with the apex of the abdomen of the vibration mode of the same phase mode of the natural frequency.

Preferably, there are no bellows, i.e., crests and troughs, at the positions of the nodes of the above-described vibration modes.

Preferably, in the bellows structure of the membrane body, the bellows and the abdomen in the vibration mode correspond to each other in a one-to-one manner, and an apex of the abdomen in the bellows and an apex of the abdomen in the vibration mode coincide with each other.

Preferably, the edge of the membrane body is held by an elastic body.

Preferably, the elastomer is polyurethane foam or thermoplastic elastomer.

The plate-like body is a metal plate.

Preferably, the film-like body is a resin film.

Preferably, the natural frequency is a resonance point between 20kHz and 400kHz

Preferably, the metal plate and the piezoelectric body have a substantially rectangular plate shape, and a length-width ratio of the metal plate to the piezoelectric body is substantially 10: 4.

Porous body

The porous body of the present invention can obviously improve atomization capacity and atomization efficiency, improve atomization effect, and make the particle size distribution range of fog drops (atomized particles) narrower, wherein, the larger particles are less, and the porous body has balanced auxiliary atomization performance, liquid guiding and absorbing performance, liquid storage capacity and mechanical performance, and has the conductivity in the thickness direction and length direction or/and width direction or/and radial direction, and basically and stably keeps the original form in the atomization process and in the atomized liquid, such as insolubilization (dissolution), infusibility, non-deformation (such as shrinkage), non-breakage, such as crushing, cracking, etc.

The average pore diameter of the porous body of the present invention is usually less than 100 or 50 μm, but for the purpose of balancing the auxiliary atomization performance, the liquid guiding and absorbing performance, the liquid storing capability and the mechanical performance, the average pore diameter is 0.05 to 30 μm, preferably 0.1 to 20 μm, more preferably 0.5 to 10 μm, still more preferably 0.5 to 5 μm, and most preferably 1 to 3 μm. The aperture is too large, the atomization effect is not good, and particularly, when the aperture is too small, the aerosol is easy to be blocked by insoluble substances when being used for pulmonary administration such as electronic cigarettes. The porous body should comprise a solid porous support material having a porosity of at least 10% (by volume, the same applies hereinafter), preferably, the solid porous support material has a porosity of about 20% to about 80%, more preferably, about 30% to about 60%, and most preferably, about 35% to about 50%. Too high porosity, reduced functional performance of the porous body, susceptibility to damage, and too low, greatly reduced atomization efficiency and liquid storage capacity.

The porous body of the present invention is generally located on or outside the surface of the ultrasonic atomization sheet in the above vibration range of the ultrasonic atomization sheet, and the vertical distance between the two is generally 0 to 500 times the thickness of the ultrasonic atomization sheet, preferably 0 to 200 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 100 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 50 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 20 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 10 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 5 times the thickness of the ultrasonic atomization sheet, and most preferably 0 to 2 times the thickness of the ultrasonic atomization sheet.

The form of the porous body is generally, but not limited to, any shape of a substantially flat shape, including a substantially square shape (e.g., square, rectangle, elongated shape), rhomboid shape, triangle, trapezoid, polygon, circle, ellipse or other flat shape, preferably a square shape, and the form of the substantially flat porous body is generally not larger than the maximum cross-sectional area of the ultrasonic atomization sheet, and the projection area thereof does not usually exceed the ultrasonic atomization sheet, but in some embodiments, the maximum cross-sectional area thereof may be larger than the maximum cross-sectional area of the ultrasonic atomization sheet, and the projection area thereof may exceed the ultrasonic atomization sheet.

The thickness of the porous body is usually 0.01 to 5mm, preferably 0.05 to 2mm, more preferably 0.05 to 1mm, and most preferably 0.1 to 0.5 mm.

The surface of the porous body and the ultrasonic atomization sheet form an integrated or split structure, the whole surface of the porous body can be attached to the surface of the ultrasonic atomization sheet, part of the surface can also be attached to the surface peripheral region of the ultrasonic atomization sheet, the central or middle region is not attached, preferably, part of the surface peripheral region of the ultrasonic atomization sheet is not attached, the central or middle region is not attached, and other surface peripheral regions are attached, and the non-integrated or integrated structure is favorable for easy replacement of the porous body after being blocked.

Part of the surface of the porous body may be attached to the surface of the container wall, so that the porous body, the container wall and the ultrasonic atomization sheet together form one or more containers having a volume. Also, the structure in which such a porous body is not integrated or integrated with the above-described ultrasonic atomizing sheet is advantageous in that the porous body can be easily replaced after clogging.

One specific example of the porous body is a microporous ultrasonic atomization sheet with multiple pores, which generally includes, but is not limited to, a metal sheet with micropores in the middle region, and an annular piezoelectric ceramic sheet with a through hole in the center, which is attached and fixed on the metal sheet, wherein the opposite sides of the annular piezoelectric ceramic sheet have two opposite electrodes, and the middle region with micropores of the metal sheet is opposite to the through hole of the annular piezoelectric ceramic sheet, so as to form an atomization functional region.

The porous body may contain one or more support materials, or support materials in which different regions have different average pore sizes, which are insoluble in the liquid to be atomized by the ultrasonic atomizer (/ ultrasonic atomization sheet) described above.

In a preferred embodiment, the porous body support material is based on, but not limited to, one or more of ceramics, geopolymer materials (inorganic polymer materials), metals, glasses, insoluble silicates, zeolites, carbon and other small soluble inorganic materials, or one or more plastics (i.e., insoluble solid (organic) polymer materials (polymers)), and particularly, plastics (i.e., insoluble solid (organic) polymer materials (polymers)) are preferred because they have better properties such as elasticity and toughness than other materials, are less susceptible to damage during vibration, and more importantly, can rebound the aggregation potential energy, reduce energy loss, and improve energy utilization. The above-mentioned "insolubility" means insolubility in the liquid to be atomized by the above-mentioned ultrasonic atomizer (/ ultrasonic atomizing sheet).

The container wall material should be non-porous.

The porous body support material described above may be based on one or more sintered ceramic materials.

The term "ceramic" is understood to include compounds formed between metallic and non-metallic elements, often oxides, nitrides and carbides formed and/or processable by some form of solidification process, typically involving the action of heat. In this regard, clay materials, cements, and glasses are included in the definition of ceramics (calister, "materials science and engineering," john wiley & Sons, 7 th edition (2007)).

The ceramic may comprise a sintered ceramic (e.g., kaolin, metakaolin, ceria, zirconia, scandia, aluminum oxide (/ combination), aluminum nitride (/ combination), titanium oxide (/ combination), titanium nitride (/ combination), silicon oxide (/ combination), silicon carbide (/ combination), silicon nitride (/ combination), boron nitride (/ combination), and combinations thereof).

Preferably, the ceramic material employed is based on metal oxides (such as alumina or zirconia), or on ceramics based on metal (or metalloid or non-metal) oxides, which are particularly useful because they cannot undergo further oxidation and therefore exhibit good stability at high temperatures.

The ceramic material may also be an oxide and/or double oxide, and/or a nitride and/or carbide of the elements scandium, cerium, yttrium, boron, silicon, aluminum, carbon, titanium, zirconium or tantalum or preferably any one of silicon, aluminum, carbon, titanium, zirconium or tantalum or combinations thereof.

In a preferred embodiment, the ceramic material is an oxide, nitride and/or carbide of any of the elements silicon, aluminum, carbon, titanium, zirconium or tantalum or a combination thereof. Specific materials that may be mentioned include ceria, zirconia, scandia, aluminum oxide (/ alloy), aluminum nitride (/ alloy), titanium oxide (/ alloy), silicon carbide (/ alloy) layer, silicon nitride (/ alloy), boron nitride (/ alloy), and combinations thereof.

Sintered ceramics (including materials formed from ceria, zirconia, scandia, aluminum oxide (/ alloys), aluminum nitride (/ alloys), titanium oxide (/ alloys), titanium nitride (/ alloys), silicon oxide (/ alloys), silicon carbide (/ alloys, silicon nitride (/ alloys), boron nitride (/ alloys), and combinations thereof) are well known to the skilled artisan. Such sintered ceramics are particularly suitable as carrier materials in which liquids can be stored.

After sintering has occurred and the ceramic has formed, the porous sintered ceramic may store a liquid, i.e. using a method of draining liquid drawn into the pores of the carrier material by capillary forces.

The pore size in the support material can be controlled by various techniques known to the skilled person. For ceramics (and geopolymers), control of pore size is typically achieved during the manufacture of the network structure of the support material. Examples of known methods of manufacturing porous scaffolds are disclosed in Subiab et al (2010) biomaterial scaffold manufacturing techniques for potential tissue engineering applications, tissue engineering, Daniel Eberli (eds.).

Alternatively, the porous body support material described above may be based on one or more chemically bonded ceramic materials. One or both of these may be provided in the form of pellets.

Suitable chemically bonded ceramics include non-hydrated, partially hydrated, or fully hydrated ceramics, or combinations thereof.

Non-limiting examples of chemically bonded ceramic systems include calcium phosphate, calcium sulfate, calcium carbonate, calcium silicate, calcium aluminate, magnesium carbonate, and combinations thereof. Preferred chemical compositions include those based on chemically bonded ceramics that consume a controlled amount of water to form a network after hydration of one or more suitable precursor species.

Other specific systems available are those based on aluminates and silicates, both of which consume large amounts of water. Phases such as CA2, CA3 and C12a7, and C2S and C3S (according to common cement terminology, C ═ CaO, a ═ Al203, SiO2 ═ S) in crystalline or amorphous states can be used, which are readily available. The calcium aluminate and/or calcium silicate phases may be used as separate phases or as a mixture of phases. The phases described above, both in non-hydrated form, act as a binder phase (cement) in the carrier material when hydrated. The weight ratio of liquid (water) to cement is generally in the range of 0.2 to 0.5, preferably in the range of 0.3 to 0.4.

Further materials which may be mentioned in this connection include clay minerals, such as aluminium silicate and/or aluminium silicate hydrate (crystalline or amorphous). Non-limiting examples include kaolin, dickite, halloysite, nacrite, zeolite, illite, or combinations thereof, preferably halloysite.

In a further embodiment of the invention, the porous body is based on a ceramic material formed from a self-setting ceramic. Non-limiting examples of self-setting ceramics include calcium sulfate, calcium phosphate, calcium silicate, and calcium aluminate-based materials. Specific ceramics that may be mentioned in this connection include alpha-tricalcium phosphate, calcium sulfate hemihydrate, CaOAl2O3, CaO (SiO2)3, CaO (SiO2)2 and the like.

Other ceramic materials which may be used include those based on sulfates such as calcium sulfate or phosphates such as calcium phosphate. Specific examples of such materials include alpha or beta phase calcium sulfate hemihydrate (finished calcium sulfate dihydrate), basic or neutral calcium phosphate (apatite), and acidic calcium phosphate (brushite).

For the avoidance of doubt, the porous body material may comprise more than one ceramic material, for example a mixture comprising sintered and chemically bonded ceramics.

Alternatively, the porous body support material described above may be based on one or more geopolymer materials.

The skilled person will understand that the term "geopolymer" includes or means any material selected from the class of synthetic or natural aluminosilicate materials, which can be formed by reaction of an aluminosilicate precursor material, preferably in powder form, with an aqueous alkaline liquid (e.g. a solution), preferably in the presence of a silica source.

The term "silica source" will be understood to include any form of silicon oxide, such as SiO2, including silicates. The skilled artisan understands that silica can be made in several forms, including glass, crystals, gels, aerogels, fumed silica (or fumed silica), and colloidal silica (e.g., Aerosil).

Suitable aluminosilicate precursor materials typically (but not necessarily) crystallize in their native form and include kaolin, dickite, halloysite, nacrite, zeolite, illite, preferably dehydroxylated zeolite, halloysite, or kaolin, and more preferably metakaolin (i.e., dehydroxylated kaolin). Dehydroxylation (e.g. kaolin) is preferably carried out by calcining (i.e. heating) the hydroxylated aluminosilicate at a temperature above 400 ℃. For example, metakaolin can be prepared as described in Stevenson and Sagoe-huntsil, journal of materials science (j.mater.sci.), 40, 2023(2005), and zuulgami et al, physics of europe (eur.physj.ap), 19, 173(2002) and/or as described below. Dehydroxylated aluminosilicates may also be produced by condensing a silica source and a vapor containing a source of alumina (e.g., Al2O 3).

Thus, in a further embodiment, the support material may be a material obtainable by a process in which an aluminosilicate precursor material (such as a material selected from the group consisting of kaolin, dickite, halloysite, nacrite, zeolite, illite, dehydroxylated zeolite, dehydroxylated halloysite, and metakaolin) is reacted with an aqueous alkaline liquid, optionally in the presence of a silica source.

Precursor materials can also be made using sol-gel methods, typically resulting in nanoscale aluminosilicate amorphous powder (or partially crystalline) precursors, as described by Zheng et al in journal of materials science, 44, 3991-3996 (2009). This results in a finer microstructure of the hardened material. (e.g., sol-gel routes may also be used to make the precursor materials for the chemically bonded ceramic materials described above.)

If provided in powder form, the aluminosilicate precursor particles have an average grain size of less than about 500 μm, preferably less than about 100 μm, more preferably less than about 20 (or 30) μm.

In the formation of geopolymer materials, such precursor materials may be dissolved in an aqueous alkaline solution, for example, wherein the pH is at least about 12, such as at least about 13. Suitable hydroxide ion sources include strong inorganic bases such as alkali or alkaline earth metal (e.g. Ba, Mg or more preferably Ca or especially Na or K, or combinations thereof) hydroxides (e.g. sodium hydroxide). The molar ratio of metal cation to water can vary between about 1: 100 and about 10: 1, preferably between about 1: 20 and about 1: 2.

Preferably, a silica source (e.g., a silicate such as SiO2) is added to the reaction mixture by some means. For example, the aqueous alkaline liquid may comprise SiO2, forming what is commonly referred to as water glass, i.e., a sodium silicate solution. In such cases, the amount of SiO2 and water in the liquid is preferably at most about 2: 1, more preferably at most about 1: 1, and most preferably at most about 1: 2. The aqueous liquid may also optionally contain sodium aluminate.

Alternatively, the silicate (and/or alumina) may be added to an optionally powdered aluminosilicate precursor, preferably as a fumed silica (AEROSIL @ silica). The amount that can be added is preferably up to about 30 wt%, more preferably up to about 5 wt% of the aluminosilicate precursor.

Free hydroxide ions are present in this intermediate alkaline mixture, causing aluminum and silicon atoms from the source material to dissolve. The geopolymer material may then be formed by allowing the resulting mixture to solidify (cure or harden), during which process the aluminum and silicon atoms from the source material are reoriented to form a hard (and at least largely) amorphous polymer material. Curing may be carried out at room temperature, at elevated temperatures, or at reduced temperatures, such as at about or slightly above ambient temperature (e.g., between about 20 ℃ and about 90 ℃, such as about 40 ℃). Hardening may also be performed under any atmosphere, humidity or pressure (e.g., under vacuum or other conditions). The resulting inorganic polymer network is typically a highly coordinated 3-dimensional aluminosilicate gel in which the negative charge on the tetrahedral aluminium Al3+ sites is balanced by the alkali metal cation charge.

In this regard, the geopolymer-based carrier material may be formed by mixing a powder comprising an aluminosilicate precursor and an aqueous liquid (e.g., solution) comprising water, a source of hydroxide ions as described above, and a source of silica (e.g., a silicate) to form a paste. The ratio of liquid to powder is preferably between about 0.2 and about 20 (weight/weight), more preferably between about 0.3 and about 10 (weight/weight). Calcium silicate and calcium aluminate may also be added to the aluminosilicate precursor component.

Such pores may thus be essentially "secondary pores" formed by chemical interactions (e.g. "bonding") between the surfaces of primary particles of a support material (which may be itself porous (i.e. "primary" pores containing) such as a ceramic or geopolymer.) such pores may for example result from exposure of such material to one or more chemical agents which cause a physical and/or chemical transformation (such as partial dissolution) at that surface (which may itself result from some other physicochemical process such as drying, curing, etc.) and then the surfaces are physically and/or chemically bonded together, creating the pores/voids.

For geopolymers, control of pore size is typically achieved during the manufacture of the network structure of the support material. Examples of known methods of manufacturing porous scaffolds are disclosed in SubiaB et al (2010) biomaterial scaffold manufacturing techniques for potential tissue engineering applications, tissue engineering, DanielEberli (eds.).

In yet another alternative, the porous body support material described above may be based on one or more metals.

By using the term "metal" we include both pure metals and alloys (i.e. mixtures or two or more metals). Suitable metals that can be used as support materials include those that remain solid up to or above the heating temperature used in the device of the invention, e.g. above 400 ℃ or preferably above 500 ℃. Specific metal support materials include those based on titanium, nickel, chromium, copper, iron, aluminum, zinc, manganese, molybdenum, platinum, and alloys containing the metals. So-called refractory metals may also be used in view of their high heat resistance and wear resistance.

In this case, specific pure metals and alloys that may be used include brass, manganese, molybdenum, nickel, platinum, zinc, and in particular include titanium, titanium alloys, nickel-chromium alloys, copper-nickel alloys, iron, steel (e.g., stainless steel), aluminum, iron-chromium-aluminum alloys.

The pore size in the metal support material can be controlled by various techniques known to the skilled person. Examples of suitable methods that can be used to form the metal substrate with the desired porosity include three-dimensional printing and drilling. 3D printing of porous bodies can be achieved using conventional 3D printing equipment, and pore sizes as low as 10 μm or less can be achieved using this fabrication technique. Drilling methods to introduce porosity or increase the level of porosity in a material are known to the skilled person. Such a method may be particularly advantageous as it provides a greater degree of control over the pore size and overall porosity level in the material. Such drilling methods can be used to form pores down to an average size of about 20 (or 30) μm and possibly lower.

Internal porosity can also be developed in metallic structures (particularly in the case where the metallic structure is present as an electrically conductive part of an induction heating system) by a gas expansion (or foaming) process based on hot isostatic pressing (hip). Porous bodies with isolated porosities typically in the range of 20-40% are obtained by these processes. When foaming is carried out in a highly reactive multicomponent powder system, such as a system subjected to self-propagating high temperature synthesis (SHS), porosity can develop more rapidly. The highly exothermic reaction initiated by local or global heating of the compacted powder mixture to the reaction ignition temperature results in the vaporization of the hydrous oxides on the powder surface and the release of gases dissolved in the powder. The reaction powder mixture is rapidly heated to form a liquid containing (primarily hydrogen) gas bubbles and, when the reaction is complete, rapidly cooled, trapping the gas to form a foam. Gas formation and foam expansion can be enhanced by adding a vapor forming phase such as carbon (which burns in air to produce CO) or blowing agents that react together to raise the reaction temperature and produce fine particles that stabilize the foam. Other suitable methods known to the skilled person are disclosed in AndrewKennedy (2012), porous metals and metal foams made from powders (porousmetals and metal foams madefrom powders), powder metallurgy (powdermallargy), doctor KatsuyoshiKondoh (ed.).

In a further alternative, the porous support material may be based on one or more plastics (i.e. (water/alcohol) insoluble solid (organic) polymeric materials (polymers)), preferably (water/alcohol) insoluble heat resistant plastics, the term "heat resistant plastics" referring herein to plastics (e.g. silica gels, fluoroplastics) that can withstand temperatures of at least 150 ℃, preferably 200 ℃, more preferably 250 ℃ without deforming, softening or liquefying. Examples of the above porous plastic support material include polysulfones (PS, such as bisphenol a type Polysulfone (PSF), polyether sulfone (PES) polysulfone amide (PSA), phenolphthalein type polyether sulfone (PES-C), polyether ketone (PEK-C)), cellulose ester, cellulose ether, polyamide (such as nylon 6, nylon 66), silica gel, fluoroplastic, polyolefins (such as Polyethylene (PE), polypropylene, Polyacrylonitrile (PAN)), polyvinyl chloride (PVC), PC (polycarbonate), PAC, Chitosan (CS), polyvinyl alcohol (PVA), polyvinyl butyral (PVB), polyethylene terephthalate (PET), poly (cyclohexanedimethanol terephthalate) (PCT), polybutylene terephthalate (PBT), Polytetrafluoroethylene (PTFE), expanded polytetrafluoroethylene (ePTFE), and the like. Such fluoroplastics include, but are not limited to, Polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA) (polytetrafluoroethylene-perfluoropropyl vinyl ether PFA-P, polytetrafluoroethylene-perfluoromethyl vinyl ether PFA-M), vinylidene fluoride-hexafluoropropylene copolymer (viton. RTM., F26), fluorinated ethylene propylene copolymer (FEP), vinylidene fluoride-chlorotrifluoroethylene copolymer (Kel-F, F23), Polychlorotrifluoroethylene (PCTFF), one or more of tetrafluoroethylene-ethylene copolymer (ETFE), polyvinylidene fluoride (PVDF), poly (ethylene-co-chlorotrifluoroethylene) (ECTFE), polytetrafluoroethylene-hexafluoropropylene-vinylidene fluoride (THV), and vinylidene fluoride-tetrafluoroethylene copolymer (F24).

The above-mentioned plastic (i.e., the (water/alcohol) insoluble solid (organic) polymeric material (polymer)) porous body preparation method may be well known, and includes, but is not limited to: melt-blowing, immersion precipitation phase inversion, melt extrusion-stretching, Thermally Induced Phase Separation (TIPS), and alternating deposition self-assembly. The immersion precipitation phase inversion method is a phase inversion method, and comprises preparing homogeneous polymer solution with certain composition, changing thermodynamic state of the solution by certain physical method, allowing the solution to undergo phase separation from the homogeneous polymer solution, and finally converting into a three-dimensional macromolecular network type gel structure. The melt extrusion-stretching method comprises the steps of carrying out melt extrusion on pure high polymers in the melt extrusion-stretching process, pulling apart platelet structures which are arranged in parallel and are vertical to the extrusion direction of hard elastic materials in the stretching process to form micropores, and then fixing the pore structures through a heat setting process. Wherein the Thermal Induced Phase Separation (TIPS) comprises forming a homogeneous solution of a polymer and a diluent with a high boiling point and a low molecular weight at a high temperature, reducing the temperature to perform solid-liquid or liquid-liquid phase separation, and then removing the diluent to obtain the microporous polymer body. Wherein, the alternative deposition self-assembly method is to prepare the polyelectrolyte separation layer on the porous ceramic membrane support body by electrostatic self-assembly, which is an effective method for preparing the organic-inorganic composite membrane body. The method comprises the steps of alternately depositing oppositely charged polyelectrolytes at a liquid/solid interface through electrostatic interaction to form a multi-layer membrane body; the research on the number of self-assembled layers, the material and the time, the pH value of a polyelectrolyte solution and the like shows that the pore diameter and the thickness of the composite membrane body are adjusted in a nanometer range.

The pore size of the porous bodies is controlled during the manufacture of the network structure of the support material by various known techniques. A particular method suitable for use in the porous body support materials conveniently used in the present invention is porogen leaching, which involves the use of a sacrificial phase during the shaping of the support material. During shaping of the support material, a porogen material may be included as part of the reaction mixture to aid in shaping of pores within the final support material network. The pore-forming material includes, for example, volatile oil (e.g., perfume), volatile liquid (e.g., water, alcohol), organic solid material with high volatility (e.g., benzyl alcohol, menthol, borneol, camphor, salicylic acid, caproic acid, caffeine), organic or inorganic solid material (e.g., ammonium carbonate, ammonium bicarbonate, ammonium acetate) which can be thermally degraded into gas, etc., and has an average particle size of 0.05 to 20 (or 30) μm, preferably 0.1 to 10 μm, more preferably 0.5 to 5 μm, and most preferably 0.5 to 3 μm, and is used in a ratio of at least 10% (by volume, the same applies hereinafter), preferably about 20% to about 80%, more preferably about 30% to about 70%, and most preferably about 40% to about 60%, based on the total volume of the carrier material and the pore-forming material. The porogen material may then be removed from the support material, for example by volatilizing, subliming or thermally degrading the porogen material as it is heated during the curing process, or by dissolving the porogen material away using a suitable solvent. Dissolution is usually achieved with water in order to avoid leaving a residual amount of material which may have a detrimental effect on the operation of the device or on the user.

Foaming methods may also be used to increase the pore size of the support materials mentioned herein. Such methods will be known to the skilled person and are particularly suitable for forming support materials having larger pore sizes.

Any of the carrier materials described herein can be used in the device of the present invention. The above-mentioned support materials are preferably based on one or more chemically bonded ceramic materials, one or more geopolymer materials or one or more metals or one or more heat-resistant plastics. In a further embodiment, the present invention relates to a device as described above, wherein the carrier material is selected from the list consisting of:

(i) oxides, nitrides and/or carbides of any of the elements silicon, aluminum, carbon, titanium, zirconium, yttrium, titanium, zirconium, cerium, scandium, boron or tantalum and combinations thereof;

(ii) a material obtainable by a process in which an aluminosilicate precursor material is reacted with an aqueous alkaline liquid;

(iii) calcium phosphate, calcium sulfate, calcium carbonate, calcium silicate, calcium aluminate, magnesium carbonate, aluminum silicate, and combinations thereof;

(iv) brass, manganese, molybdenum, nickel, platinum, zinc, titanium alloys, nickel-chromium alloys, copper-nickel alloys, iron, steel, aluminum, and iron-chromium-aluminum alloys; and

(v) heat resistant plastics such as silica gel, fluoroplastics, and the like.

The materials listed above under (i), (ii) and (iii) are particularly preferred.

The preferred preparation method of the porous reservoir device comprises the following steps:

3D printing ceramic, geopolymer, metal or heat-resistant plastic printing material (such as paste or powder) to obtain a ceramic, geopolymer, metal or heat-resistant plastic precursor, wherein the ceramic, geopolymer, metal or heat-resistant plastic printing material (such as paste or powder) contains a pore-forming agent with an average particle size of 0.05-20 (or 30) μm, preferably 0.1-10 μm, more preferably 0.5-5 μm, and most preferably 0.5-3 μm, (by volume, at least 10% (by volume, the same below), preferably about 20-80%, more preferably about 30-70%, and most preferably about 40-60%), the above-mentioned ratio is based on the sum of the volume of the whole carrier material and the volume of the pore-forming material); the ceramic, geopolymer, metal or heat-resistant plastic precursors described above are treated by heat treatment or other known techniques to solidify or integrate them to form a porous body, i.e., a porous reservoir.

Container wall and container

The ultrasonic atomizer to which the present invention relates may not comprise a container (wall body), but preferably also comprises a container (wall body). The container wall body forms one or more containers with volume by itself or together with the ultrasonic atomization sheet or/and the porous body, the containers are communicated with the porous body, and the containers can contain liquid and/or a liquid absorber. The container comprises (comprises) 4 or 3 side walls, a top wall and a bottom wall, wherein the side walls are mainly formed by the container wall, and the top wall or the bottom wall is mainly formed by the container wall, or is mainly formed by the container wall and the ultrasonic atomization sheet or/and the porous body together or is respectively mainly formed by the ultrasonic atomization sheet or the porous body separately. When the container has (comprises) 4 side walls (6 closed on the sides), the container (on its side walls or/and top wall or/and bottom wall) also has one or more openings, for example for adding or transferring liquid, or for communicating with air, which can be connected to a pipe or closed by an openable lid; when the container has (includes) 3 side walls (5 side closed and one side not closed), the container preferably contains a liquid absorbent for absorbing and transporting liquid. The container wall surface is preferably an insulator. Preferably, the container is substantially (or generally) square, and more preferably, the porous body is substantially (or generally) square.

Some preferred embodiments of the above ultrasonic atomizer are as follows:

the ultrasonic atomizer I does not comprise a container wall body, and the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet; or

The ultrasonic atomizer II further comprises a container wall body, the container wall body is basically (or generally) formed with a container with a volume by itself, the ultrasonic atomization sheet and the porous body are not basically (or generally) formed between the container, the ultrasonic atomization sheet is partially or completely arranged outside the container, the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet facing the outside of the container, the porous body is communicated with the container, and the ultrasonic atomization sheet and/or the porous body are/is not clamped by the container wall body; or

The ultrasonic atomizer III further comprises a container wall, the container wall substantially (or generally) forms a container with a volume together with the ultrasonic atomization sheet, the ultrasonic atomization sheet is a part of the container wall, the porous body is not substantially (or generally) formed between the container, the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet facing the outside of the container, and the porous body is communicated with the container (for example, through the holes on the vibration plate and the container wall of the ultrasonic atomization sheet or a part of the porous body extends into the container); or

The ultrasonic atomizer iv further comprises a container wall, the container wall substantially (or entirely) forms a container with a volume together with the porous body, the porous body is a part of the container wall, the ultrasonic atomizing sheet is not substantially (or entirely) formed between the container, the ultrasonic atomizing sheet is partially or entirely disposed in the container and not disposed on the surface of the porous body, and a distance is provided therebetween, when viewed from the thickness direction, a part or an entire area of the porous body overlaps with the ultrasonic atomizing sheet, or the ultrasonic atomizing sheet is partially or entirely disposed in the container and on the surface of the porous body facing the inside of the container, and the porous body is communicated with the container; or

The ultrasonic atomizer V further comprises a container wall body which basically (or generally) forms a container with a volume together with the ultrasonic atomizing sheet and the porous body, the ultrasonic atomizing sheet is partially disposed on the surface of the porous body or the porous body is partially disposed on the surface of the ultrasonic atomizing sheet, partial surfaces of the ultrasonic atomizing sheet and the porous body are not overlapped together, the ultrasonic atomizing sheet and the porous body together form a part of the container wall, the part of the ultrasonic atomizing sheet overlapped with the surface of the porous body is the inner side surface of the container, the part of the porous body overlapped with the surface of the ultrasonic atomizing sheet is the outer side surface of the container, or the ultrasonic atomizing sheet and the porous body are respectively a part of the container wall, the ultrasonic atomizing sheet is not disposed on the surface of the porous body, and a distance is formed between the ultrasonic atomizing sheet and the porous body, the ultrasonic atomization sheet is provided with a porous body, and the porous body is partially or totally overlapped with the ultrasonic atomization sheet when viewed from the thickness direction.

In order to realize stable atomization performance, the ultrasonic atomization sheet or the piezoelectric ceramic plate (or the piezoelectric element) and the container are structured so as to satisfy the relation fcav < fo in which fo is a resonance frequency of the ultrasonic atomization sheet (piezoelectric vibration element) and fcav is a resonance frequency of the resonance cavity of the container, even if the atomization performance changes little under high temperature conditions.

The container wall (side wall or/and top wall or/and bottom wall) is provided with a support member for supporting the ultrasonic atomization sheet or/and the porous body. The container wall body includes a support portion disposed on an inner periphery of the wall body or the support member is provided inside between the wall bodies facing each other, the support portion supporting the outer periphery or peripheral portion of the ultrasonic atomization sheet or/and the porous body; or the ultrasonic atomization sheet and/or the porous body may be supported on both surfaces by being sandwiched between the support members.

The support member is fixed or reinforced with the ultrasonic atomization sheet and/or the porous body supported by the support member or a portion of the porous body or a peripheral portion thereof by an elastic adhesive (elastic bonding member) arranged.

The support member includes an elastic material such as glass epoxy (FR-4), composite material (CEM-3), polyetherimide, polyimide, polyester, urethane, polypropylene, silicone, polyurethane, rubber, or the like, and preferably urethane having a young's modulus of 3.7 × 106Pa after curing.

As the elastic adhesive (elastic adhesive/adhesive) body, a known adhesive such as an epoxy resin, a silicone resin, or a polyester resin can be used. As a method of curing the resin used as the adhesive, any of thermosetting, photo-curing, anaerobic curing, and the like can be used to manufacture the vibrator.

The above-mentioned container walls (side walls or/and top wall or/and bottom wall) provided with support (bearing) members are preferably embodied as follows:

the wall body of the container includes a plurality of supporting members for supporting the ultrasonic atomization sheet and/or the porous body on at least two opposite sides of the ultrasonic atomization sheet and/or the porous body or at corners of the ultrasonic atomization sheet and/or the porous body.

The inner circumferential surface of the container wall body is formed with a stepped portion at a middle position in the height direction thereof, and the ultrasonic atomization sheet and/or the porous body are/is contacted with the stepped portion from the lower surface thereof so as to be supported.

As described above, the container wall body includes the support portions for supporting the ultrasonic atomization sheet or/and the outer edge portion on the back (lower) side of the porous body, and the support portions are provided at four positions in the inner edge portion of the container wall body so as to support the four corner portions of the ultrasonic atomization sheet or/and the porous body. The support members provided in the wall body of the container are protrusions arranged to support the ultrasonic atomization sheet or/and the porous body at points near four corners thereof.

Preferably, the container wall includes a platform provided in the vicinity of the support portion, the platform being disposed lower than the upper surface of the support portion so that a gap is formed between the upper surface of the platform and the back (lower) side surface of the ultrasonic atomization sheet or/and the porous body. An elastic adhesive (elastic bonding (/ close) body) is provided between the upper surface of the platform and the back (lower) side surface.

More preferably, the container includes four side walls and steps provided on inner circumferences of the four side walls in a ring-shaped layout. The vessel further includes inner ends and an inner connection for each inner end. The inner connection of each inner end part has a branched structure located in the corner of the ultrasonic atomization sheet. The support members are located at four corners of the ultrasonic atomizing sheet in the steps and are provided at positions lower than the steps. The upper surface of the ultrasonic atomization sheet is substantially in height correspondence with the inner-connected upper surface of each inner end portion. The support members are substantially triangular in plan view and are arranged on the same circumference.

Further, as described above, a plurality of bases are provided at four corners of the container, and a protrusion is provided on an upper surface of each base so as to protrude therefrom. The ultrasonic atomization sheet and/or the bottom surface of the corner of the porous body are substantially supported by the respective protrusions.

Still further, the container may comprise a support portion arranged to support the peripheral portion of the ultrasonic atomization sheet or/and the porous body so that the peripheral portion thereof is fixed to the support portion, and a support surface provided on the support portion, the support surface having an arcuate cross section, the center of curvature of the support surface being located in the vicinity of the lower surface of the peripheral portion of the ultrasonic atomization sheet or/and the porous body.

Further, the ultrasonic atomization sheet and/or the porous body are supported so as to be inserted between the support portion and the wall body and held, as projecting from the side of the container wall body facing inward.

Further, the wall body of the container may include an annular projection, and the ultrasonic atomization sheet and/or the support portion of the porous body may include an outwardly projecting mounting flange having an outer diameter larger than an inner diameter of the annular projection, so that when the ultrasonic atomization sheet and/or the porous body is inserted into the wall body, the mounting flange of the ultrasonic atomization sheet and/or the porous body is forced against the annular projection, and the mounting flange is positioned within the wall body.

The above arrangements can minimize the disturbance of the vibration of the ultrasonic atomization sheet, prevent the deterioration of the atomization ability of the atomizer, improve the fixing strength and the damage resistance to the ultrasonic atomization sheet and/or the porous body, improve the impact resistance of the atomizer, and contribute to the miniaturization.

The following examples of particularly preferred ultrasonic atomizers not only have the advantages of the above examples, but also greatly improve their atomizing capabilities.

Particularly preferred ultrasonic atomizer example 1 has: a membrane body; a frame-type container wall body provided on an outer peripheral portion of the film body; the piezoelectric ceramic plate is arranged on the membrane body in the frame of the wall body of the frame type container and forms an ultrasonic atomization sheet together with the membrane body; and a porous body provided in a frame of the frame member so as to cover the piezoelectric element, wherein the film body is fixed to the frame member in a state in which tension is applied thereto. The frame member is made of a material that is less deformable than the porous body, and the porous body is joined to the frame member. The porous body is made of a resin having a Young's modulus of 1MPa to 1 GPa. The porous body is made of an acrylic resin. The film body is made of resin. The frame member includes a first frame member and a second frame member, and the outer peripheral portion of the film body is sandwiched between the first frame member and the second frame member. As the resin, for example, an acrylic resin, a silicone resin, a rubber or the like can be used, and the Young's modulus is preferably in the range of 1MPa to 1GPa, and more preferably 1MPa to 850 MPa.

Particularly preferred is an ultrasonic atomizer example 2 which comprises an ultrasonic atomizing sheet having a vibrating plate (preferably a metal foil, more preferably a resin film) having a larger outer shape than the piezoelectric vibrating plate (piezoelectric ceramic plate) and having the piezoelectric vibrating plate (piezoelectric ceramic plate) bonded to an approximately central portion of the surface thereof; the above porous body; and a frame-type container wall for accommodating the ultrasonic atomization sheet; the ultrasonic atomization sheet is provided with a piezoelectric vibrating plate having a piezoelectric active region, a porous body capable of sensing the vibration of the ultrasonic atomization sheet, and a piezoelectric vibrating plate having a piezoelectric active region and a liquid atomizing device having a piezoelectric vibrating plate, wherein at least 30% of the area of the porous body having pores coincides with the piezoelectric active region of the piezoelectric vibrating plate or at least 30% of the area of the piezoelectric active region of the piezoelectric vibrating plate coincides with the area of the porous body having pores, as viewed in the thickness direction, and the vibration atomizes the liquid in the pores of. Preferably, the area of the piezoelectric vibrating plate (piezoelectric ceramic plate) is 40 to 70% of the area of the resin film, a frame-shaped support portion larger than the outer shape of the piezoelectric vibrating plate (piezoelectric ceramic plate) is provided on the inner peripheral portion of the container wall, and the outer peripheral portion of the resin film, to which the piezoelectric vibrating plate (piezoelectric ceramic plate) is not bonded, is supported by the support portion of the container wall. The resin film is thinner than the piezoelectric vibrating plate and is formed of a material having an elastic modulus of 500MPa to 1500 MPa. The resin film has heat resistance of 300 ℃ or higher.

Other preferred ultrasonic atomizer example embodiments are shown in fig. 3 to 5.

Fig. 3 shows an ultrasonic atomizer arranged such that a backside surface node portion of an ultrasonic atomizing sheet 1 (whose side is spaced from the container side wall as viewed in the thickness direction, and whose front and back sides are secured to each other) is fixed to a support portion 2a (whose length is determined by the distance between the side walls, and whose front and back sides or left and right sides are secured to each other) projecting from the container wall 2 by an elastic adhesive (elastic bonding (e.g., silicon adhesive) 3. The porous body 4 (in the figure, the pores 2 having different diameters are exemplified, the smaller pores are more numerous and are used for assisting the atomization, and the larger pores are less numerous and are used for discharging bubbles that may be generated during the atomization) closes the container wall 2 (on which there is a small opening communicating with the outside, and this opening is also opened on the side wall).

Fig. 4 shows an ultrasonic atomizer arranged such that both short side portions of the ultrasonic atomization sheet 1 (the longer side of which is spaced from the side wall of the container as viewed in the thickness direction to ensure communication between the front and rear sides thereof) are fixed to the support portion 2b of the wall body 2 by an elastic adhesive (elastic bonding (e.g., silicone adhesive) 3. The porous body 4 (in the figure, the pores 2 having different diameters are exemplified, the smaller pores are more numerous and are used for assisting the atomization, and the larger pores are less numerous and are used for discharging bubbles that may be generated during the atomization) closes the container wall 2 (on which there is a small opening communicating with the outside, and this opening is also opened on the side wall).

Fig. 5 shows an ultrasonic atomizer arranged such that

tapered groove portions

2c and 4a are provided in a wall body 2, and both short-side peripheral portions of the above-mentioned ultrasonic atomizing sheet 1 (the longer side thereof is spaced from the container side wall as viewed in the thickness direction to ensure that both sides of the front and rear thereof are communicated) are inserted into the

groove portions

2c and 4a and fixed with an elastic adhesive (elastic bonding (e.g., silicon adhesive) 3. The film-like porous body 5 is fixed to the container wall 4 to close the container wall 2 (which has a small opening communicating with the outside, the opening also being opened in the side wall).

The ultrasonic atomizer according to the present invention further comprises an elastic sealing agent, wherein the gap between the outer periphery of the ultrasonic atomization sheet or/and the porous body and the inner periphery of the wall body of the container is sealed with the elastic sealing agent, and the elastic sealing agent may be made of the elastic adhesive (elastic bonding (or/and) body) material.

The liquid storage container may be formed from a substantially transparent material such as medical resins Polymethylmethacrylate (PMMA), Chevron Phillips styrene-butadiene copolymer (SBC), Arkema specialty polymers and Clear, DOW (Health + TM) Low Density Polyethylene (LDPE), DOW LDPE91003, DOW LDPE91020(MFI 2.0; density 923), ExxonMobil polypropylene (PP) PP1013H1, PP1014H1 and PP9074MED, TrinseoCALRE Polycarbonate (PC)2060 series.

The liquid storage container may be molded, for example, by an injection molding process. Preferably, the liquid storage container comprises an outlet in the liquid storage container for delivering the liquid aerosol-forming substrate from the liquid storage container. The outlet may be provided at an end of the liquid storage container.

The container wall material is generally not particularly limited, except that the container wall material should be non-porous and insoluble in the liquid contained. The material of the container wall may be similar to that of the porous body support, and in a preferred embodiment, the material of the container wall includes, but is not limited to, one or more of ceramics, geopolymer materials (inorganic polymer materials), inorganic materials such as metals, glasses, silicates, zeolites, and carbons, or one or more of plastics (i.e., water/alcohol-insoluble solid (organic) polymer materials (polymers)), and particularly, metals and plastics (i.e., water/alcohol-insoluble solid (organic) polymer materials (polymers)) are preferred because they have better mechanical properties than other materials and are less likely to be damaged during vibration or the like.

Elastic bonded (/ combined) body

Preferably, the ultrasonic atomizer according to the present invention further includes an elastic bonding element interposed between a 1 st surface, which is one surface on which the piezoelectric element (or piezoelectric ceramic plate) of the ultrasonic atomizing sheet is bent, and one main surface of the vibrating plate, the elastic bonding element bonding the 1 st surface of the piezoelectric element (or piezoelectric ceramic plate) to the one main surface of the vibrating plate, and at least a part of the elastic bonding element being formed of a deformable viscoelastic body; and/or between the ultrasonic atomization sheet and the porous body; and/or between them and the container walls and container.

The elastic bonded (or bonded) body is softer and more easily deformed than the vibrating plate, and has a smaller elastic modulus and rigidity, such as Young's modulus, rigidity, and bulk modulus, than the vibrating plate. That is, the elastic adhesive (/ synthetic) body is deformable, and when the same force is applied, it is deformed more than the vibration plate.

The thickness of the elastic adhesive (/ synthetic) body is larger than the amplitude of the bending vibration of the piezoelectric element (or piezoelectric ceramic plate).

The elastic adhesive (/ synthetic) body has at least a base layer and an adhesive layer composed of the viscoelastic body.

The elastic adhesive (/ synthetic) body has a 3-layer structure composed of 2 adhesive layers and the base layer disposed between the 2 adhesive layers. The base layer is composed of a nonwoven fabric and the viscoelastic body interposed between fibers of the nonwoven fabric.

The elastic adhesive (/ or elastomer) has the viscoelastic body in all cross sections between the surface on the piezoelectric element (or piezoelectric ceramic plate) side and the surface on the vibrating plate side.

The vibrating plate is fixed to the support via a 2 nd elastic bonding element at least a part of which is composed of a viscoelastic body.

The elastic adhesive/bonding material is made of a resin such as glass epoxy (FR-4), composite material (CEM-3), polyetherimide, polyimide, polyester, acryl, silicon, urethane, or rubber, a metal such as stainless steel, aluminum, or an alloy thereof, and has a thickness of 50 to 200 μm.

The adhesive layer is composed of a viscoelastic body, and the thickness thereof is set to be, for example, about 10 to 30 μm. As the viscoelastic material constituting the adhesive layer, for example, known viscoelastic materials formed of polymer materials such as acryl, silicon, urethane, and rubber can be suitably used. The base layer has a higher rigidity than the adhesive layer, and the thickness thereof is set to be, for example, about 50 to 200 μm. The base layer is preferably composed of a viscoelastic material and a nonwoven fabric which constitute the adhesive layer. That is, the base layer is preferably formed of a nonwoven fabric impregnated with the viscoelastic material constituting the adhesive layer (the viscoelastic material constituting the adhesive layer penetrates between fibers of the nonwoven fabric). As a result, the elastic bonded (/ bonded) body including a viscoelastic body over at least a part of the entire thickness direction, that is, the elastic bonded (/ bonded) body including a viscoelastic body in all cross sections between the surface on the piezoelectric element (or piezoelectric ceramic plate) side and the surface on the vibrating plate side can be obtained. Examples of the fibers used for the nonwoven fabric include natural fibers, chemical fibers, glass fibers, and metal fibers. The base layer 132 may be formed using a resin, for example. Examples of the resin include polyester, polyethylene, polyurethane, and propylene. Further, a foam made of these resins may be used.

Liquid absorber

The present invention relates to a container which can contain a liquid and/or a liquid absorbent. The liquid absorbent is used for storing and transporting liquid, and also for adsorbing or filtering insoluble particles in liquid, and preventing the porous body from being blocked or clogged, and includes, but is not limited to, fibers (e.g., natural or artificial fibers, organic or inorganic fibers), porous materials (e.g., soft or hard porous materials, organic or inorganic porous materials, and may be the same as the porous body materials, and preferably the pore size in the liquid absorbent is larger than that of the porous body, which facilitates the liquid to be rapidly transported to the porous body).

Protective coating (protective film)

The protective coating (protective film) may be used in combination with the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer disclosed in the present invention.

Protective coatings (protective films) can be used to help control the rate of atomization of the stored liquid during use. One or more coatings may be applied to the outer surface of the above-described carrier material. This may assist in controlling the delivery/drainage of the stored liquid, for example by ensuring that the user receives the aerosolized material/stored liquid within a short period of time, and thereby reducing the likelihood that the user may stop inhaling before receiving the entire intended dose.

The protective coating (protective film) may also be used to improve the stability of the atomized liquid and the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer, to prevent or slow down thermal degradation or oxidation of the atomized liquid, to prevent or slow down chemical corrosion of the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer, and the like. For example, the coating may shield or may act as a barrier to the atomized liquid or the above-mentioned ultrasonic atomization sheet in the ultrasonic atomizer and/or the above-mentioned porous body and/or the above-mentioned container wall and/or the above-mentioned liquid absorber from its external environment.

The protective coating materials used in the present invention can be designed to be inert in the following manner:

(a) general physicochemical stability under normal storage conditions, including a temperature of between about negative 80 and about positive 50 ℃ (preferably between about 0 and about 40 ℃, and more preferably room temperature, such as from about 15 to about 30 ℃), a pressure of between about 0.1 and about 2 bar (preferably at atmospheric pressure), a relative humidity of between about 5 and about 95% (preferably about 10 to about 75%), and/or prolonged (i.e., greater than or equal to six months) exposure to about 460 lux uv/visible light. Under such conditions, as above, a chemical degradation/decomposition of less than about 5%, such as less than about 1%, of the carrier material network as described herein may be found; and

(b) General physicochemical stability under acidic, basic, and/or alcoholic (e.g., ethanol) conditions at room temperature and/or at elevated temperatures (e.g., up to about 200 ℃), which may result in less than about 15% degradation.

(c) It is preferred in this respect that the network exhibits a compressive strength at the micro-and nano-structural level of greater than about 1MPa, such as greater than about 5MPa, for example about 10MPa, which is high enough to withstand damage to the material at the micro-structural level, i.e. less than about 200 μm.

The protective coating described above comprises: aluminum oxide Al2O3 thin film, silicon dioxide SiO2 thin film, titanium dioxide TiO2 thin film, zinc oxide ZnO thin film, hafnium dioxide HfO2 thin film, magnesium oxide MgO thin film, zirconium dioxide ZrO2 thin film, nickel oxide NiO thin film, cobalt oxide CoO thin film, iron oxide thin film FeOx thin film, copper oxide thin film CuOx thin film, boron oxide B2O3 thin film, indium oxide In2O3 thin film, TiN oxide SnO2 thin film, gallium oxide Ga2O3 thin film, niobium pentoxide Nb2O5 thin film, gadolinium oxide Gd2O3 thin film, tantalum pentoxide Ta2O5 thin film, boron nitride BN thin film, aluminum nitride AlN thin film, titanium nitride TiN thin film, silicon carbide SiC thin film, zinc sulfide ZnS thin film, zirconium sulfide ZrS thin film, hyaluronic acid thin film HA, tungsten thin film, molybdenum Pt thin film, ruthenium thin film, palladium thin film, pyromellitic dianhydride-diaminodiphenyl ether-DADA-diaminodiphenyl oxide thin film, pyromellitic dianhydride-HMDA-hexamethylenediamine thin film, PMDA-HMA-HMD-HMA thin film, Pyromellitic dianhydride-ethylenediamine PMDA-EDA film, pyromellitic dianhydride-p-phenylenediamine PMDA-PDA film, silica gel film and fluoroplastic film.

When the coating material is a layer, the coating material is any one of the films; when the coating material is a multilayer, the coating material is a multilayer film formed by overlapping any one of the films, or a multilayer film formed by alternately overlapping any two of the films, or a combined multilayer film of the multilayer film formed by overlapping any one of the films and the multilayer film formed by alternately overlapping any two of the films.

One embodiment of a protective coating (protective film):

the protective film is preferably formed by applying a paste resin in a thin film shape and curing the resin, or by bonding an adhesive sheet and curing the adhesive sheet, and has a fracture at a corner portion of the piezoelectric vibrating piece to expose the main surface electrode.

The resin layer should have a thickness covering the piezoelectric element and be provided so as to cover substantially the entire front and rear surfaces of the piezoelectric vibrating piece (e.g., laminate). Preferably, the resin layer is a hardened coating layer.

Terminal

The ultrasonic atomizer according to the present invention further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing plate and/or a conductive adhesive (conductive adhesive) for fixing and electrical connection of the internal electrical connection and/or the external electrical connection.

Preferably, the interconnection has a bifurcated structure located in a corner of the piezoelectric vibrating piece.

Preferably, the terminal includes a conductive member electrically connected to both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing sheet by conductive paste, respectively.

More preferably, the terminal is provided at a position at or near a support member included in a wall body of the ultrasonic atomizer container.

In a preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals having an inner connection exposed to the vicinity of the supporting member of the container wall and an outer connection exposed to the outer surface of the container wall and electrically connected to the inner connection; and a conductive adhesive; wherein, the two electrodes of the piezoelectric vibrating piece in the ultrasonic atomization piece are respectively and electrically connected with the internal connection of the terminal by conductive adhesive.

As another preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals provided in the wall body of the ultrasonic atomizer container such that a first end of each terminal is inserted into the wall body of the container at a position close to the support portion and a second end of each terminal is provided outside the wall body of the container; wherein the first end portion of each terminal comprises: a main body portion fixed to the wall of the container; wing parts extending from two sides of the main body part to the corner of the container wall body and not fixed on the container wall body; and a stress relief portion disposed between the body portion and the wing portion to enable the wing portion to move toward the interior of the container wall; each electrode of the piezoelectric vibrating piece in the ultrasonic atomizing sheet is connected to at least one wing portion of the terminal.

As another preferred embodiment, the ultrasonic atomizer comprises a pair of terminals having an internal connection exposed in the vicinity of the supporting member of the wall body of the container of the ultrasonic atomizer and an external connection exposed on the outer surface of the wall body of the container and electrically connected to the internal connection; a first adhesive layer which is provided on a shortest path connecting the piezoelectric vibrating piece and the inner connection in the ultrasonic atomization sheet, the shortest path being located between the outer periphery and the inner connection in the ultrasonic atomization sheet, thereby fixing the ultrasonic atomization sheet to the container; a conductive adhesive layer for electrically connecting the electrodes of the piezoelectric vibrating reed in the ultrasonic atomization sheet and the internal connection of the terminal, the conductive adhesive layer being interposed between the electrodes of the piezoelectric vibrating reed in the ultrasonic atomization sheet and the internal connection through the upper surface of the first adhesive layer by bypassing the shortest connection path between the piezoelectric vibrating reed and the internal connection in the ultrasonic atomization sheet; and a second adhesive layer for sealing a gap between the outer periphery of the ultrasonic atomization sheet and the inner periphery of the container, wherein the Young's modulus of the first and second adhesive layers after curing is smaller than that of the conductive adhesive. Preferably, the viscosity of the first adhesive layer before curing is higher than that of the second adhesive layer, so that it is difficult to spread. Preferably, the first adhesive layer is partially applied to the vicinity of four corners of the ultrasonic atomization sheet. Preferably, the conductive paste is applied to the vicinity of at least two of the four corners of the piezoelectric diaphragm.

In accordance with yet another preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals fixed to said container wall so that the internal connection portion is exposed at the inner periphery of said container wall; and a conductive paste applied and solidified between an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection portion of a terminal so that the conductive paste electrically connects the lead conductive piece to the internal connection portion of the terminal, wherein one of the conductive pastes is applied and solidified between the internal connection portion of the first end of the terminal and one of the electrodes in the vicinity of one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and another conductive paste is applied and solidified between the internal connection portion of the second end of the terminal and another electrode in the vicinity of another corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, the another corner being adjacent to one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet. The application position of the conductive paste faces the application position of the other conductive paste with the piezoelectric vibrating piece of the ultrasonic atomizing sheet interposed therebetween. The application position of one of the above-mentioned conductive pastes and the application position of the other conductive paste are on one side of the piezoelectric vibrating piece in the above-mentioned ultrasonic atomization sheet and are close to both corners on both ends of the above-mentioned one side. Preferably, an elastic adhesive is also included. The elastic adhesive is coated between the piezoelectric vibrating piece and the end in the ultrasonic atomization sheet, and the conductive adhesive is coated on the elastic adhesive.

The above-mentioned structures and arrangements can minimize the obstacle of the vibration of the ultrasonic atomization sheet, prevent the degradation of the atomization ability of the atomizer, improve the fixing strength and the damage resistance to the ultrasonic atomization sheet and/or the porous body, and improve the impact resistance of the atomizer, and contribute to the miniaturization.

The invention also relates to an electronic cigarette device which is characterized by comprising the ultrasonic atomizer. Preferably, the device further comprises a heating component, and the heating component heats the smoke atomized by the ultrasonic atomizer so as to overcome the defects that the temperature of the smoke atomized by the ultrasonic atomizer is low and cold stimulation is caused to a smoke inhalator. Preferably, the mist atomized by the ultrasonic atomizer is heated to 40 to 100 ℃, more preferably to 40 to 80 ℃, and most preferably to 50 to 70 ℃. Preferably, the heating element is located in or adjacent to a mouthpiece of the appliance, and more preferably in or adjacent to a smoke outlet in the mouthpiece of the appliance.

The preferable technical scheme is as follows:

1. an ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a conducting capacity in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially stably maintaining its form during atomization and in an atomized liquid,

The ultrasonic atomization sheet comprises a piezoelectric ceramic plate, wherein opposite electrodes are arranged on the opposite surfaces of the piezoelectric ceramic plate (I) or/and between the opposite surfaces to serve as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate (II) or/and in a lower layer of the surface to serve as piezoelectric active regions (an alternating current is applied between the electrodes to vibrate the ultrasonic atomization sheet in the thickness direction thereof, and the vibration atomizes the liquid in the porous body).

2. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 10 hours.

3. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 50 hours.

4. The ultrasonic atomizer according to claim 1, wherein said porous body substantially stably maintains its original form during atomization and accumulated in the liquid being atomized for more than 100 hours.

5. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the liquid being atomized for more than 500 hours.

6. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 1000 hours.

7. The ultrasonic atomizer according to claim 1, wherein the porous body has a morphology that does not undergo substantially irreversible changes during atomization and in the liquid being atomized, the dimensional change being no more than 10%; or/and the function of the ultrasonic atomizer is basically maintained without radical change, and the performance index of the ultrasonic atomizer does not change more than 20%.

8. The ultrasonic atomizer according to claim 7, wherein the performance index includes an atomizing amount, or/and an average particle diameter of the atomized particles, or/and a particle diameter distribution state of the atomized particles.

9. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate is free of through holes.

10. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) is a single piezoelectric ceramic plate, or a laminated body substantially or mainly formed of two or three or more piezoelectric ceramic plates/layers.

11. The ultrasonic atomizer according to claim 1, characterized in that the piezoelectric ceramic plate (I) comprises a laminated body in which at least two piezoelectric ceramic layers are laminated, main surface electrodes provided on front and back surfaces of the laminated body, and internal electrodes located between each of the ceramic layers, wherein all the ceramic layers are polarized in the same direction in a thickness direction, the laminated body vibrating entirely in a bending mode in response to an alternating current applied between the main surface electrodes and the internal electrodes.

12. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate (I) is a laminated body formed substantially or mainly of two piezoelectric ceramic plates/layers, an inner electrode is provided between the two piezoelectric ceramic plates/layers, two outer side surfaces are provided with two outer side electrodes and communicated, the inner electrode is insulated from the two outer side electrodes, and an alternating current is applied between the inner electrode and the outer side electrodes to vibrate the inner electrode in a thickness direction thereof.

13. The ultrasonic atomizer according to claim 12, wherein the inner electrode is led out to the outer side surface and arranged in parallel with the outer electrode.

14. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) comprises a laminated body formed by laminating two or three piezoelectric ceramic layers; main surface electrodes each formed on an upper surface and a lower surface of the laminate; and internal electrodes formed between the adjacent two piezoelectric ceramic layers, wherein all the ceramic layers are polarized in the same direction with respect to the thickness direction; and the laminated body is vibrated in its thickness direction in its entirety by applying an alternating current across the main surface electrodes and the internal electrodes.

15. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) comprises three laminated piezoelectric ceramic layers, and the thickness of the intermediate ceramic layer is between 50 percent and 80 percent of the entire thickness of said laminated body.

16. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate (I) comprises a plurality of piezoelectric ceramic layers, which are laminated to define a laminate; main surface electrodes provided on front and rear main surfaces of the laminate; internal electrodes disposed between the respective ceramic layers, and all the ceramic layers are polarized in the same direction in the thickness direction thereof; the piezoelectric ceramic plate (I) generates flexural vibration in response to an alternating current applied between the main surface electrode and the internal electrode.

17. The ultrasonic atomizer according to claim 1, characterized in that the porous body is provided on the surface of the ultrasonic atomizing sheet.

18. The ultrasonic atomizer according to claim 17, wherein at least a partial area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or at least a partial area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores, as viewed in the thickness direction.

19. The ultrasonic atomizer according to claim 18, wherein 30% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 30% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

20. The ultrasonic atomizer according to claim 18, wherein 50% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 50% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

21. The ultrasonic atomizer according to claim 18, wherein 70% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 70% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

22. The ultrasonic atomizer according to claim 18, wherein 90% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 90% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

23. The ultrasonic atomizer according to claim 1, characterized in that the porous body is disposed within a vertical distance of 0 to 10mm from the surface of the ultrasonic atomization sheet.

24. The ultrasonic atomizer according to claim 1, wherein said porous body is disposed within a vertical distance of 0 to 6mm from the surface of said ultrasonic atomization sheet.

25. The ultrasonic atomizer according to claim 1, characterized in that the porous body is disposed within a vertical distance of 0 to 3mm from the surface of the ultrasonic atomization sheet.

26. The ultrasonic atomizer according to claim 1, characterized in that it further comprises a container, said porous body is provided as a part or all of the wall body of said container or on the outer surface of the container, and said ultrasonic atomizing sheet is provided in said container or on the surface of the container or as a part of the wall body of said container.

27. The ultrasonic atomizer according to claim 1, wherein said porous body is located on the surface of said ultrasonic atomizing sheet or outside the surface thereof within said vibration range of said ultrasonic atomizing sheet, and the vertical distance therebetween is 0 to 50 times the thickness of said ultrasonic atomizing sheet.

28. The ultrasonic atomizer according to claim 1, wherein said porous body is located on the surface of said ultrasonic atomizing sheet or outside the surface thereof within said vibration range of said ultrasonic atomizing sheet, and the vertical distance therebetween is 0 to 10 times the thickness of said ultrasonic atomizing sheet.

29. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is less than 100 μm.

30. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is 0.05 μm to 30 μm.

31. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is 0.5 μm to 10 μm.

32. The ultrasonic atomizer according to claim 1, wherein the porosity of the porous body is 20% to 80%.

33. The ultrasonic atomizer according to claim 1, wherein the porous body has a thickness of 0.01mm to 5 mm.

34. The ultrasonic atomizer according to claim 1, characterized in that the porous body material is selected from one or more ceramic, geopolymer, metal, glass, zeolite, carbon or plastic materials, and composite materials thereof.

35. The ultrasonic atomizer according to claim 1, wherein the porous body and the ultrasonic atomizing plate form an integrated or split structure.

36. The ultrasonic atomizer according to claim 1, characterized in that the porous body is substantially or generally a square, rhomboid, triangular, trapezoidal, polygonal, circular, elliptical or other flat body.

37. The ultrasonic atomizer according to claim 1, characterized in that said ultrasonic atomizing sheet further comprises a vibrating plate, and said piezoelectric ceramic plate is disposed on this vibrating plate.

38. The ultrasonic atomizer according to claim 37, wherein there is an overlapping area between said piezoelectric ceramic plate and said vibrating plate as viewed in a thickness direction.

39. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 30% or more of the entire area of one surface of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

40. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 50% or more of the entire area of a face of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

41. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 70% or more of the entire area of one surface of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

42. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 90% or more of the entire area of the piezoelectric ceramic plate or the one surface of the vibrating plate including the overlapped region.

43. The ultrasonic atomizer according to claim 38, characterized in that opposing electrodes are provided as piezoelectrically active regions on or/and between opposing surfaces at least in said overlapping area of said piezoceramic plate (I).

44. The ultrasonic atomizer according to claim 37, characterized in that the piezoelectric ceramic plate in the ultrasonic atomizing plate is substantially or generally a square body, at least one pair of opposite sides of which are fixed to the vibrating plate.

45. The ultrasonic atomizer according to claim 37, characterized in that the piezoceramic plate in the ultrasonic atomization plate is substantially or generally a square body, at least two relatively short sides of which are fixed to the vibration plate.

46. The ultrasonic atomizer according to claim 37, characterized in that the piezoceramic plate in the ultrasonic atomization sheet is substantially or generally a square body, at least four corners of which are fixed to the vibration plate.

47. The ultrasonic atomizer according to claim 37, wherein the piezoelectric ceramic plate in the ultrasonic atomization sheet is located on one side of the vibration plate, or on both sides thereof; or the piezoelectric ceramic plate is clamped or wrapped by the vibrating plate.

48. The ultrasonic atomizer according to claim 37, wherein said ultrasonic atomizing plate is of a sandwich structure, and is basically or mainly formed by attaching and fixing two piezoelectric ceramic plates and a vibrating plate, and said vibrating plate is fixedly held between said two piezoelectric ceramic plates, said two piezoelectric ceramic plates are connected in series, and said two piezoelectric ceramic plates are polarized in opposite directions, or said two piezoelectric ceramic plates are connected in parallel, and said two piezoelectric ceramic plates are polarized in the same direction, so as to realize flexural vibration.

49. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than half the thickness of said vibrating plate.

50. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one tenth of the thickness of said vibrating plate.

51. The ultrasonic atomizer according to claim 37, wherein the distance between opposing electrodes in the piezoelectrically active area of said piezoelectric ceramic plate (I) is less than one percent of the thickness of said vibrating plate.

52. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one thousand times the thickness of said vibrating plate.

53. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.1 to 500 μm.

54. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.5 μm to 50 μm.

55. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.5 μm to 5 μm.

56. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region of the inner electrode in the piezoelectric ceramic plate (I) is 1 μm to 3 μm, and the thickness of the surface electrode is 0.2 μm to 0.5 μm.

57. The ultrasonic atomizer according to claim 37, wherein at least one end or one side of the vibrating plate of the ultrasonic atomization plate is fixed.

58. The ultrasonic atomizer according to claim 37, characterized in that the vibrating plate of the ultrasonic atomizing plate is substantially or generally a square body in which at least two relatively short sides are fixed.

59. The ultrasonic atomizer according to claim 37, characterized in that the vibrating plate of the ultrasonic atomization plate is substantially or generally a square body, at least four corners of which are fixed.

60. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is selected from the group consisting of a metal plate, a resin or plastic plate, and a composite plate thereof.

61. The ultrasonic atomizer according to claim 37, wherein the vibrating plate is selected from a resin or a plastic plate having an elastic modulus of 500MPa to 1500MPa in a cured state.

62. The ultrasonic atomizer according to claim 37, wherein the thickness of the vibrating plate is 10 to 2000 μm.

63. The ultrasonic atomizer according to claim 37, wherein a mechanical quality factor Qm of the ultrasonic atomizing sheet formed by integrating the piezoelectric ceramic plate and the vibrating plate satisfies: qm is less than or equal to 5.0.

64. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a metal plate having a length longer than that of said piezoelectric ceramic plate and electrically connected to a back surface electrode of the piezoelectric plate.

65. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a metal plate having a thickness of 10 μm to 300 μm.

66. The ultrasonic atomizer according to claim 37, wherein said piezoelectric ceramic plate is fixed to a first surface of a vibrating plate at a position offset from a longitudinal direction of the vibrating plate, and the vibrating plate has an exposed portion at a second surface of the vibrating plate.

67. The ultrasonic atomizer according to claim 37, wherein a relationship between an area Am of said vibration plate and an area Ap of said piezoelectric ceramic plate satisfies: Am/Ap is more than or equal to 1.1 and less than or equal to 10.

68. The ultrasonic atomizer according to claim 37, wherein the vibrating plate has a larger outer shape than the piezoelectric ceramic plate, and the piezoelectric ceramic plate is bonded to a substantially central portion of a surface thereof.

69. An ultrasonic atomizer according to claim 37, wherein said vibrating plate has a larger outer shape than said piezoelectric ceramic plate, and is bonded to a substantially central portion of a surface thereof, said vibrating plate is a resin film, an area of said piezoelectric ceramic plate is 40 to 70% of an area of said vibrating plate, and said vibrating plate is thinner than a total thickness of said piezoelectric ceramic plate.

70. An ultrasonic atomizer according to claim 37, wherein said vibrating plate is made of a clad material having a cross section formed in a sandwich structure by bonding different materials to each other in a layer shape.

71. An ultrasonic atomizer according to claim 37, wherein said vibrating plate includes 2 surface layers constituting both surfaces of a clad material using a 1 st raw material, and an elastic material layer having a higher elasticity than said clad material, which is formed by bonding both surfaces thereof to said surface layers, respectively, between said 2 surface layers using a 2 nd raw material different from said 1 st raw material.

72. The ultrasonic atomizer according to claim 71, wherein said 1 st starting material has a thermal expansion coefficient within ± 50% of a thermal expansion coefficient of a piezoelectric ceramic plate to which said starting material is attached, and said 2 nd starting material has a density lower than that of said 1 st starting material.

73. The ultrasonic atomizer of claim 71, wherein the thickness of the surface layer is thinner than the thickness of the elastic material layer.

74. The ultrasonic atomizer according to claim 71, wherein the 1 st and 2 nd raw materials are respectively formed by one of a metal and a polymer resin or a light soft metal or an alloy sheet thereof.

75. An ultrasonic atomizer according to claim 37, wherein said vibrating plate is a membrane-like body to which said piezoelectric ceramic plate is attached, and said membrane-like body is fixed to a frame member provided at an outer peripheral portion of said membrane-like body in a state in which tension is applied thereto.

76. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a membrane-like body that is provided around said piezoelectric ceramic plate and elastically holds said piezoelectric ceramic plate; the vibrating plate is larger in size than the piezoelectric ceramics plate, and the piezoelectric ceramics plate is installed at a substantially central portion thereof.

77. The ultrasonic atomizer according to claim 1, characterized in that the piezoelectric ceramic plate or/and the porous body is substantially or generally a square body.

78. The ultrasonic atomizer according to claim 37, wherein the vibrating plate is substantially or generally square.

79. The ultrasonic atomizer according to claim 1, characterized in that the ultrasonic atomizing sheet is a generally elongated body.

80. The ultrasonic atomizer of claim 79, wherein said ultrasonic atomization sheet is a generally elongated body having a length to width ratio of not less than 1.5 but not more than 8.

81. The ultrasonic atomizer of claim 79, wherein said ultrasonic atomization sheet is generally elongated and has a length to width ratio of not less than 2 but not more than 6.

82. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, wherein the container wall substantially or generally forms a container with a volume by itself, the ultrasonic atomization sheet and the porous body are substantially or generally not formed between the container, the ultrasonic atomization sheet is partially or completely disposed outside the container, the porous body is partially or completely disposed on a surface of the ultrasonic atomization sheet facing outside the container, the porous body is in communication with the container, and the ultrasonic atomization sheet and/or the porous body are or are not sandwiched by the container wall.

83. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, the container wall substantially or generally forms a container having a volume together with the ultrasonic atomization sheet, the ultrasonic atomization sheet is a part of the container wall, the porous body is substantially or generally not formed between the containers, the porous body is partially or entirely disposed on the surface of the ultrasonic atomization sheet facing the outside of the container, and the porous body is communicated with the container.

84. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, the container wall substantially or generally forms a container having a volume together with the porous body, the porous body is a part of a container wall, the ultrasonic atomizing sheet is substantially or generally not formed between the container, the ultrasonic atomizing sheet is partially or entirely disposed in the container and not disposed on a surface of the porous body, a distance is provided therebetween, a partial or entire area of the porous body coincides with the ultrasonic atomizing sheet as viewed in a thickness direction, or the ultrasonic atomizing sheet is partially or entirely disposed in the container and on a surface of the porous body facing an inside of the container, and the porous body communicates with the container.

85. The ultrasonic atomizer according to claim 1, further comprising a container wall, wherein the container wall substantially or generally forms a container with a volume together with the ultrasonic atomizing sheet and the porous body, the ultrasonic atomizing sheet is partially disposed on the surface of the porous body or the porous body is partially disposed on the surface of the ultrasonic atomizing sheet, a part of the surface of the ultrasonic atomizing sheet and a part of the surface of the porous body are not overlapped together, the ultrasonic atomizing sheet and the porous body jointly form a part of the container wall, the part of the ultrasonic atomizing sheet overlapped with the surface of the porous body is a surface inside the container, the part of the porous body overlapped with the surface of the ultrasonic atomizing sheet is a surface inside the container, or the ultrasonic atomizing sheet and the porous body are respectively a part of the container wall, and the ultrasonic atomizing sheet is not disposed on the surface of the porous body, a distance exists between the two, and a part or the whole area of the porous body is coincided with the ultrasonic atomization sheet when viewed from the thickness direction.

86. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein said ultrasonic atomizing plate or said piezoelectric ceramic plate and said container are constructed so as to satisfy the relationship fcav < fo, where fo is a resonance frequency of said ultrasonic atomizing plate or said piezoelectric ceramic plate and fcav is a resonance frequency of said container resonance cavity.

87. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein the container wall is provided with a support member for supporting the ultrasonic atomization sheet or/and the porous body.

88. The ultrasonic atomizer according to claim 87, characterized in that the container wall comprises a support portion placed on an inner ring of the wall or the support member is provided inside between walls facing each other, the support portion supporting the ultrasonic atomization sheet or/and an outer ring or a peripheral portion of the porous body; or the ultrasonic atomization sheet and/or the porous body may be supported on both sides by being sandwiched by the support member.

89. The ultrasonic atomizer according to claim 87, wherein said support member is further fixed or reinforced with said ultrasonic atomizing plate and/or said porous body portion or its peripheral portion supported thereby by an elastic adhesive.

90. The ultrasonic atomizer according to claim 87, characterized in that the container wall comprises a plurality of support members to support the ultrasonic atomization sheet or/and the porous body on at least two opposite sides of the ultrasonic atomization sheet or/and the porous body or at corners of the ultrasonic atomization sheet or/and the porous body.

91. The ultrasonic atomizer according to claim 87, wherein the inner circumferential surface of the container wall main body is formed with a stepped portion at a position intermediate in the height direction thereof, and the ultrasonic atomizing plate or/and the porous body are supported by contacting the stepped portion from below thereof.

92. The ultrasonic atomizer according to claim 87, wherein the container wall comprises a support portion for supporting the ultrasonic atomizing sheet or/and the porous body at the outer edge portion on the back side, the support portion being provided at four positions in the inner edge portion of the container wall so as to support four corner portions of the ultrasonic atomizing sheet or/and the porous body.

93. The ultrasonic atomizer according to claim 87, characterized in that the support members provided in the wall of the container are protrusions arranged to support the ultrasonic atomization sheet or/and the porous body at points near four corners.

94. The ultrasonic atomizer of claim 87, wherein said container wall comprises a platform disposed adjacent to said support portion, said platform being disposed below an upper surface of said support portion such that a gap is formed between said upper surface of said platform and a backside surface of said ultrasonic atomization sheet or/and said porous body, and an elastic adhesive is provided between said upper surface of said platform and said backside surface.

95. The ultrasonic atomizer according to claim 87, wherein the container comprises four side walls and steps provided in an annular arrangement on the inner peripheries of the four side walls, the container further comprises inner ends and inner connections for the respective inner ends, the inner connections of the respective inner ends having a bifurcated structure located in corners of the ultrasonic atomizing sheet, the respective support members are located at the four corners of the ultrasonic atomizing sheet in the respective steps and provided at positions lower than the respective steps, and upper surfaces of the ultrasonic atomizing sheet are substantially in height with upper surfaces of the inner connections of the respective inner ends.

96. The ultrasonic atomizer of claim 95, wherein said support members are substantially triangular in plan view and said support members are disposed on a common circumference.

97. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein a plurality of pedestals are provided at four corners of the container, and protrusions are provided on an upper surface of each pedestal so as to protrude therefrom, and bottom surfaces of the corners of the ultrasonic atomizing sheet or/and the porous body are substantially supported by the respective protrusions.

98. The ultrasonic atomizer according to claim 11, 82 to 85, characterized in that the container comprises a support portion arranged to support the ultrasonic atomizing sheet or/and the peripheral portion of the porous body so that the peripheral portion thereof is fixed to the support portion, and a support surface provided on the support portion, the support surface having an arcuate cross section with a center of curvature located in the vicinity of a lower surface of the ultrasonic atomizing sheet or/and the peripheral portion of the porous body.

99. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the ultrasonic atomization sheet and/or the porous body is supported so as to be inserted between the support portion and the wall body and held, projecting from the side of the container wall body facing inward.

100. The ultrasonic atomizer according to claim 11, 82 to 85, characterized in that the container wall comprises an annular projection, and the ultrasonic atomization sheet or/and the support portion of the porous body comprise an outwardly projecting mounting flange and have an outer diameter larger than an inner diameter of the annular projection, whereby when the ultrasonic atomization sheet or/and the porous body is inserted into the wall body, the mounting flange of the ultrasonic atomization sheet or/and the porous body is forced over the annular projection so that it is positioned within the wall body.

101. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the protrusion of the container is substantially or generally square.

102. The ultrasonic atomizer according to any one of claims 1 to 101, wherein the ultrasonic atomization sheet further includes an elastic adhesive body interposed between a 1 st surface, which is one surface of the ultrasonic atomization sheet on which the piezoelectric ceramic plate is bent, and one main surface of the vibration plate, and joining the 1 st surface of the piezoelectric ceramic plate and the one main surface of the vibration plate, and at least a part of the elastic adhesive body is composed of a deformable viscoelastic body.

103. The ultrasonic atomizer according to claim 102, wherein said elastic bonded body is softer and more deformable than said vibration plate, and has a smaller elastic modulus and rigidity than said vibration plate.

104. The ultrasonic atomizer of claim 102, wherein said elastic bonding body has a thickness greater than an amplitude of bending vibration of said piezoceramic sheet.

105. The ultrasonic atomizer of claim 102, wherein said elastic bonding body comprises at least a base layer and an adhesive layer comprising said viscoelastic body.

106. The ultrasonic atomizer according to claim 102, wherein said elastic adhesive body has a 3-layer structure comprising 2 adhesive layers and said base layer disposed between said 2 adhesive layers.

107. The ultrasonic atomizer according to claim 105, wherein the base layer is composed of a nonwoven fabric and the viscoelastic body interposed between fibers of the nonwoven fabric.

108. The ultrasonic atomizer according to claim 102, characterized in that the viscoelastic body is present in all cross sections of the elastic bonding body between the surface on the piezoelectric ceramic plate side and the surface on the vibrating plate side.

109. The ultrasonic atomizer according to claim 102, wherein the vibrating plate is fixed to the support body via a 2 nd elastic bonding body at least a part of which is composed of a viscoelastic body.

110. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises an elastic adhesive body interposed between a 1 st surface, which is one surface of the ultrasonic atomizing sheet on which the piezoelectric ceramic plate is bent, and one main surface of the vibrating plate, and joining the 1 st surface of the piezoelectric ceramic plate to the one main surface of the vibrating plate, and at least a part of the elastic adhesive body is composed of a deformable viscoelastic body; and/or, between the ultrasonic atomization sheet and the porous body; and/or between them and the container walls and container.

111. The ultrasonic atomizer according to claims 1 to 101, characterized in that the ultrasonic atomizing plate is further used in combination with a protective coating.

112. The ultrasonic atomizer according to any one of claims 1 to 101, wherein the ultrasonic atomization sheet further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and/or a conductive adhesive for fixing and electrical connection of the internal electrical connection and/or the external electrical connection.

113. The ultrasonic atomizer according to claim 112, wherein said interconnector has a bifurcated structure located in a corner of said piezoelectric vibrating piece.

114. The ultrasonic atomizer according to claim 112, wherein said terminal comprises a conductive member electrically connected to both electrodes of a piezoelectric vibrating piece in said ultrasonic atomizing plate by conductive paste, respectively.

115. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein the ultrasonic atomizing plate further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing plate, and/or a conductive adhesive for fixing and electrical connection of the internal electrical connection and/or the external electrical connection, and the terminals are provided at a position of or near a support member included in a wall body of the ultrasonic atomizer container.

116. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises a pair of terminals having an inner connection exposed in the vicinity of the supporting member of the container wall and an outer connection exposed on the outer surface of the container wall and electrically connected to the inner connection; and a conductive adhesive; wherein two electrodes of the piezoelectric vibrating piece in the ultrasonic atomization piece are respectively and electrically connected with the internal connection of the terminal by conductive adhesive.

117. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the ultrasonic atomizer comprises a pair of terminals having an inner connection exposed near the support member of the container wall of the ultrasonic atomizer and an outer connection exposed on the outer surface of the container wall and electrically connected to the inner connection; a first adhesive layer applied on a shortest path connecting a piezoelectric vibrating piece and an inner connection in the ultrasonic atomization sheet, the shortest path being located between the outer periphery and the inner connection in the ultrasonic atomization sheet, thereby fixing the ultrasonic atomization sheet with a container; a conductive adhesive layer for electrically connecting an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection of a terminal, the conductive adhesive layer being interposed between the electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and the internal connection by bypassing a shortest connection path between the piezoelectric vibrating piece in the ultrasonic atomization sheet and the internal connection via an upper surface of the first adhesive layer; and a second adhesive layer for sealing a gap between the outer periphery of the ultrasonic atomization sheet and the inner periphery of the container, wherein the Young's modulus of the first and second adhesive layers after curing is smaller than that of the conductive adhesive.

118. The ultrasonic atomizer of claim 117, wherein the viscosity of the first layer of glue is higher than the viscosity of the second layer of glue before curing.

119. The ultrasonic atomizer of claim 117, wherein the first layer of adhesive is applied partially around the four corners of the ultrasonic atomization sheet.

120. The ultrasonic atomizer of claim 119, wherein the conductive paste is applied proximate at least two of the four corners of the piezoelectric diaphragm.

121. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises a pair of terminals fixed to said container wall so that the internal connection part is exposed on the inner ring of said container wall; and a conductive paste applied and solidified between an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection portion of a terminal so that the conductive paste electrically connects the lead electrode to the internal connection portion of the terminal, wherein one of the conductive pastes is applied and solidified between the internal connection portion of the first end of the terminal and one of the electrodes in the vicinity of one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and another conductive paste is applied and solidified between the internal connection portion of the second end of the terminal and another electrode in the vicinity of another corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, the another corner being adjacent to one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet.

122. The ultrasonic atomizer according to claim 121, wherein a position of application of the conductive paste faces a position of application of another conductive paste with a piezoelectric vibrating piece of the ultrasonic atomizing sheet interposed therebetween.

123. The ultrasonic atomizer according to claim 121, wherein a position of application of one of said conductive pastes and a position of application of the other conductive paste are on one side of a piezoelectric vibrating piece in said ultrasonic atomizing sheet and are close to both corners on both ends of said one side.

124. The ultrasonic atomizer according to claim 121, further comprising an elastic adhesive applied between said piezoelectric vibrating piece and said terminal in said ultrasonic atomizing sheet, and said conductive paste is applied on said elastic adhesive.

125. An ultrasonic atomizer comprising an ultrasonic atomizing plate having a vibrating plate which is larger in outer shape than a piezoelectric ceramic plate and to which the piezoelectric ceramic plate is bonded at a substantially central portion of a surface thereof, wherein opposed electrodes are provided as piezoelectric active regions on opposed surfaces of the piezoelectric ceramic plate or between the opposed surfaces, or adjacent interdigital electrodes are provided as piezoelectric active regions on the surface of the piezoelectric ceramic plate or in a layer below the surface thereof (application of an alternating current between the electrodes causes the ultrasonic atomizing plate to vibrate in a thickness direction thereof, and the vibration causes atomization of a liquid in a porous body to be described below); a porous body having a thickness direction and a length or/and a width direction or/and a radial direction conductivity and substantially stably maintaining its form during atomization and in an atomized liquid; and a frame-type container wall for accommodating the ultrasonic atomization sheet; at least 30% of the area of the porous body having the pores coincides with the piezoelectric active region of the piezoelectric vibrating plate or at least 30% of the area of the piezoelectric active region of the piezoelectric vibrating plate coincides with the area of the porous body having the pores, as viewed in the thickness direction.

126. The ultrasonic atomizer according to claim 125, wherein an area of said piezoelectric ceramic plate is 40 to 70% of an area of said vibrating plate.

127. The ultrasonic atomizer according to claim 125, wherein a frame-shaped support portion having a larger outer shape than the piezoelectric ceramic plate is provided on an inner peripheral portion of the wall of the frame container, and an outer peripheral portion of the vibrating plate, to which the piezoelectric ceramic plate is not bonded, is supported by the support portion of the wall of the frame container.

128. The ultrasonic atomizer according to claim 125, wherein said vibrating plate is a metal foil.

129. The ultrasonic atomizer according to claim 125, wherein said vibrating plate is a resin film.

130. An ultrasonic atomizer characterized by having: a membrane body; a frame-type container wall body provided on an outer peripheral portion of the film body; a piezoelectric ceramic plate which is provided on the membrane body within the frame of the wall body of the frame-type container and forms an ultrasonic atomization sheet together with the membrane body, wherein opposing electrodes are provided as piezoelectric active regions on opposing surfaces of the piezoelectric ceramic plate or between the opposing surfaces, or adjacent interdigital electrodes are provided on the surface of the piezoelectric ceramic plate or in a layer below the surface of the piezoelectric ceramic plate as piezoelectric active regions (application of an alternating current between the electrodes causes the ultrasonic atomization sheet to vibrate in its thickness direction, and the vibration causes atomization of a liquid in a porous body described below); and a porous body which has a conductivity in a thickness direction and a length direction or/and a width direction or/and a radial direction and which substantially stably maintains its form during atomization and in a liquid to be atomized, the porous body being provided in a frame of the frame member so as to cover the piezoelectric ceramic plate, the porous body being fixed to the frame member in a state in which tension is applied to the porous body.

131. The ultrasonic atomizer of claim 130, wherein said frame member is formed of a material that is less deformable than said porous body, said porous body being bonded to said frame member.

132. The ultrasonic atomizer of claim 130, wherein the porous body comprises a resin having a young's modulus of 1MPa to 1 GPa.

133. The ultrasonic atomizer of claim 130, wherein the membrane is comprised of a resin.

134. The ultrasonic atomizer of claim 133, wherein the young's modulus of said resin is in the range of 1MPa to 1 GPa.

135. The ultrasonic atomizer according to claim 130, wherein said frame member has a first frame member and a second frame member, and wherein an outer peripheral portion of said membrane body is sandwiched between said first frame member and said second frame member.

136. The ultrasonic atomizer according to claim 25, wherein said piezoelectric ceramic plate further comprises resin layers provided so as to cover substantially all of the front and rear surfaces of the laminated body.

137. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one ten thousandth of the thickness of said vibrating plate.

138. The ultrasonic atomizer according to claim 1, characterized in that the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 10nm to 1mm, respectively.

139. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 20nm to 500 μm, respectively.

140. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 40nm to 200 μm, respectively.

141. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 80nm to 100 μm, respectively.

142. The ultrasonic atomizer according to claim 1, wherein the effective length of piezoelectric activity of the interdigital electrode finger is 0.5mm to 30 mm.

143. The ultrasonic atomizer according to claim 1, wherein the finger width of said interdigital electrode is substantially equal to the distance between the adjacent interdigital electrode fingers.

144. The ultrasonic atomizer according to claim 1, wherein said interdigital electrodes are selected from the group consisting of fence electrodes.

145. The ultrasonic atomizer according to claim 1, wherein the interdigital electrode fingers of the same polarity are connected or communicated with the same bus bar, and the interdigital electrode (finger) of the other polarity is connected or communicated with the other bus bar.

146. The ultrasonic atomizer according to claim 1, wherein said interdigital electrodes are provided on or/and in a lower layer of the opposite surfaces of said piezoelectric ceramic plate.

147. The ultrasonic atomizer according to claim 149, wherein the polarity of said first interdigital electrode on the upper surface is opposite to the polarity of said first interdigital electrode on the lower surface, and said interdigital electrodes on both said upper and lower surfaces are counted from the same end of said piezoelectric ceramic plate.

148. The ultrasonic atomizer according to claim 149, wherein said interdigital electrodes are substantially symmetrically disposed on or/and in a lower layer on opposite surfaces of said piezoceramic plate.

149. The ultrasonic atomizer according to claim 1, wherein the frequency range of the alternating current is 10kHz to 500 MHz.

150. The ultrasonic atomizer according to claim 1, wherein the frequency range of the alternating current is 20kHz to 100 MHz.

151. The ultrasonic atomizer according to claim 1, wherein the natural frequency of the piezoelectric active region of the piezoelectric ceramic plate is substantially the same as the frequency of the alternating current.

152. An electronic cigarette device characterized by comprising the ultrasonic atomizer according to claims 1 to 151.

153. An electronic vaping device according to claim 152, further comprising a heating element configured to heat the aerosol atomized by the ultrasonic atomizer.

Drawings

Fig. 1 is a schematic diagram of bending vibration when two piezoelectric ceramic plates (reverse polarization) are connected in series.

Fig. 2 is a schematic diagram of bending vibration when two piezoelectric ceramic plates (with same polarization) are connected in parallel.

FIG. 3 shows a cross-sectional view of an ultrasonic atomizer according to example 1 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length or/and width directions; example porous body having micropores capable of conducting not only in the thickness direction but also in the length or/and width directions).

FIG. 4 is a sectional view showing an example of an ultrasonic atomizer according to example 2 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length direction and/or width direction; example porous body having micropores capable of conducting not only in the thickness direction but also in the length direction and/or width direction).

FIG. 5 is a sectional view showing an example of an ultrasonic atomizer according to example 3 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length direction and/or width direction; example porous body having micropores capable of conducting not only in the thickness direction but also in the length direction and/or width direction).

FIG. 6 is a sectional view showing an example of an ultrasonic atomizer according to example 4 (comparative example porous body having only micropores capable of conducting in the radial direction in the thickness direction; example porous body having micropores capable of conducting in the radial direction in addition to the thickness direction).

Fig. 7 shows an exploded perspective view of the ultrasonic atomizer of example 5.

Fig. 8 shows a sectional view along the line (v-v) of fig. 7, illustrating an assembled state of the ultrasonic atomizer.

Fig. 9 is a sectional view taken along line VI-VI in fig. 7.

Fig. 10 is an enlarged cross-sectional view of a portion of the ultrasonic atomizer shown in fig. 7.

Fig. 11 is a graph of atomization amount versus time for the ultrasonic atomizer shown in fig. 7.

Fig. 12 shows an exploded perspective view of an ultrasonic atomizer of example 6.

Fig. 13 is a plan view of the ultrasonic atomizer shown in fig. 12 with the porous body and the sealing adhesive removed.

Fig. 14 is a partial cross-sectional view taken along line a-a of fig. 13.

Fig. 15 is a perspective view of an ultrasonic atomizing sheet to which a vibration plate (resin film) is attached in example 6.

Fig. 16 is an exploded perspective view of an ultrasonic atomizing sheet to which a vibration plate (resin film) is attached in example 6.

Fig. 17 is an enlarged perspective view of a piezoelectric element in example 6.

Fig. 18 is a partial sectional view taken along line B-B in fig. 17.

FIG. 19 is a front cross-sectional view of a piezoelectric ceramic plate 11 (laminated piezoelectric actuator) according to example 7-1.

FIG. 20 is a perspective view of a piezoelectric ceramic plate 11 (multilayer piezoelectric actuator) according to example 7-2.

FIG. 21 is a sectional side view of a piezoelectric ceramic plate 11 (laminated piezoelectric actuator) according to example 7-2.

FIG. 22 is an exploded perspective view of the electrode arrangement in a piezoelectric ceramic plate 11 (multilayer piezoelectric actuator) according to example 7-2.

Fig. 23 is a side (v-v) sectional view of an ultrasonic atomizing sheet 10 relating to example 9.

FIG. 24 is a perspective view of a piezoelectric element according to embodiment 10-1.

FIG. 25 is a side sectional view of a piezoelectric element according to example 10-1.

FIG. 26 is a side sectional view of a piezoelectric element according to example 11-1.

FIG. 27 is a side sectional view of a piezoelectric element according to example 10-2.

FIG. 28 is a side sectional view of a piezoelectric element according to example 11-2.

Fig. 29 is a side sectional view of a piezoelectric element according to example 10.

Fig. 30 is a perspective view of a piezoelectric vibrating piece used in the piezoelectric atomizer in embodiment 12.

Fig. 31 is a sectional view taken along line C-C in fig. 30.

Fig. 32A is a sectional view taken along line B-B in fig. 33, and B is an enlarged view of a circled portion in fig. a.

FIG. 33 is a plan view of the piezoelectric atomizer used in example 12 (FIG. 35) with the porous body and the elastic sealing material removed.

Fig. 34A is a sectional view taken along line a-a in fig. 33, and B and C are enlarged views of the circled portion in fig. a.

Fig. 35 is an exploded perspective view of a piezoelectric atomizer in example 12.

Fig. 36A and B are perspective views of the terminal in embodiment 12.

Fig. 37 is a plan view showing the manner in which one of the terminals is moved relative to the housing in embodiment 12.

Fig. 38 is a plan view showing another example of the terminal in example 12.

Fig. 39 is a perspective view showing the manner in which one of the terminals is moved relative to the housing in embodiment 12.

Fig. 40A-C show the procedure of forming the bent terminals in the container by insert molding in example 12.

Fig. 41 is a perspective view of a piezoelectric vibrating piece used in the piezoelectric atomizer in example 13.

Fig. 42 is a sectional view taken along a line a-a of the piezoelectric vibrating piece in fig. 41.

Fig. 43 is an exploded perspective view of the piezoelectric atomizer used in example 13.

Fig. 44 is a sectional view showing a bend of a piezoelectric vibrating piece used in the piezoelectric atomizer in example 13.

Fig. 45 is a plan view of the piezoelectric vibrating piece supported in the housing of the piezoelectric atomizer in the case of example 13 before application of a second elastic adhesive (elastic bonding (/ alloy) body).

Fig. 46 is an enlarged perspective view of a corner portion of a housing of a piezoelectric atomizer in accordance with embodiment 13.

Fig. 47 is an enlarged sectional view of the piezoelectric vibrating piece supported in the case taken along a line B-B in fig. 45.

Fig. 48 is an enlarged sectional view of the piezoelectric vibrating piece supported in the case taken along a line C-C in fig. 45.

Fig. 49 is a structural view of a piezoelectric atomizer using a flexural piezoelectric vibrating piece in example 13.

FIG. 50 shows the positions of nodes of the bending modes of the surface of the piezoelectric vibrating piece in example 13.

Fig. 51 shows a comparison of example 14 with respect to vibration nodes between a piezoelectric vibrating piece (piezoelectric element) supported on four sides and a diaphragm supported at corners thereof.

Fig. 52 is a perspective view of the housing of the piezoelectric atomizer in embodiment 14-1.

Fig. 53 is a plan view of the piezoelectric atomizer of fig. 52, with the porous body and the elastic sealant removed.

Fig. 54 is a cross-sectional view taken along line a-a of fig. 53.

FIG. 55 is a plan view of a piezoelectric atomizer according to example 14-2, from which a porous body and an elastic sealing agent have been removed.

Fig. 56 is a sectional view taken along line C-C of fig. 55.

Fig. 57 is a perspective view of a housing included in the piezo aerosol of fig. 55.

FIG. 58 is a perspective view of the piezoelectric atomizer of example 14-3, from which the porous body has been removed.

Fig. 59 is an assembly view of the container and the piezoelectric vibrating piece (piezoelectric element) shown in fig. 58.

Fig. 60 is a perspective view of a piezoelectric vibrating piece (piezoelectric element) used in the piezoelectric atomizer in example 14.

Fig. 61 is a stepped sectional view taken along line B-B of fig. 60.

Fig. 62 is an exploded perspective view showing a piezoelectric atomizer in embodiment 15.

Fig. 63 is a plan view showing the piezoelectric atomization sheet 1 supported on the cartridge body (before the elastic adhesive is applied) in the piezoelectric atomizer in example 15.

Fig. 64 is an enlarged cross-sectional view taken along line III-III of fig. 63.

FIG. 65 is an enlarged cross-sectional view taken along line IV-IV of FIG. 63.

Fig. 66 is a plan view showing the cartridge 10 used in the piezoelectric atomizer in embodiment 15 shown in fig. 62.

FIG. 67A is a cross-sectional view taken along line VI-VI of FIG. 66, and B is a cross-sectional view taken along line VII-VII of FIG. 66.

Fig. 68 is an enlarged perspective view showing the lower left corner of the case shown in fig. 66.

Fig. 69 is a perspective view showing the piezoelectric element 3 in the piezoelectric atomization sheet 1 in the piezoelectric atomizer in embodiment 15.

FIG. 70 is a cross-sectional view taken along line X-X of FIG. 69.

FIG. 71 shows a perspective view of the ultrasonic atomizer/sheet of example 16-1.

FIG. 72 is a cross-sectional view in the width direction (A) and the length direction (B) of the ultrasonic atomizer/sheet according to example 16-1.

FIG. 73A is a cross-sectional view in the length-width direction of the ultrasonic atomizer of example 16-2; b shows a cross-sectional view along the length-height direction of the ultrasonic atomizer of examples 1-2.

Fig. 74 shows a cross-sectional view in the height-width direction of the ultrasonic atomizer of example 16-2.

Fig. 75 shows a cross-sectional view in the width direction (a) and the length direction (B) of an ultrasonic atomization sheet of example 17.

Fig. 76 shows a cross-sectional view in the height-width direction of the lower part of the ultrasonic atomizer of example 17.

Fig. 77 is a cross-sectional view in the height-width direction of the upper part of an ultrasonic atomizer according to example 17.

Fig. 78 shows a cross-sectional view in the length-width direction of the ultrasonic atomizer of example 17.

Fig. 79 shows a cross-sectional view in the length-height direction of an ultrasonic atomizer of example 17.

Fig. 80 shows a cross-sectional view in the length-height direction of the ultrasonic atomizer of example 18.

Fig. 81 is a cross-sectional view in the height-width direction of the lower part of the ultrasonic atomizer of example 18.

Fig. 82 is a cross-sectional view in the height-width direction of the upper part of the ultrasonic atomizer of example 18.

Fig. 83 is a cross-sectional view in the height-width direction of an ultrasonic atomizer (containing no porous body) of example 20.

Fig. 84 is a projection view of an ultrasonic atomizer (containing no porous body) of example 20, which is projected from the height direction on the length-width plane.

Fig. 85 is a schematic plan view showing interdigital electrodes in the ultrasonic atomizer of examples 21 and 22, wherein a denotes the (finger) width of the interdigital electrode, b denotes the distance between adjacent interdigital electrodes (fingers), p denotes the period length of an interdigital transducer composed of adjacent pairs of interdigital electrodes, and w denotes the piezoelectric active effective length of the interdigital electrode (finger) (or the aperture of the interdigital transducer described above).

[ examples ] A method for producing a compound

Example 1 and comparative example thereof

The preparation method comprises the following steps:

in the device fabrication shown in fig. 3, the ultrasonic atomization sheet 1 (whose sides are spaced apart from the side wall of the container as viewed in the thickness direction to ensure communication between the front and rear sides, see fig. 9) is fixed at its rear-side surface node portions by an elastic adhesive (e.g., silicone adhesive) 3 to 4 tapered support portions 2a (whose length is smaller than the distance between the side walls to ensure communication between the front and rear or left and right sides) projecting from the container wall 2. The porous body 4 closes the container wall 2 (with a small opening to the outside, which also opens in the side wall).

Example porous bodies are porous bodies having a thickness direction and a length or/and width direction or/and radial direction conductivity and substantially retaining their original form during atomization and in the atomized liquid (fluoroplastic sponges having an average pore size of 2.0 μm, a surface porosity of 50%, cumulatively stable retention of their (original) form for greater than 2000 hours, with a dimensional change of less than 5%).

Example 2 and comparative example thereof

The preparation method comprises the following steps:

the device shown in fig. 4 is constructed in such a manner that the two short side portions of the ultrasonic atomization sheet 1 (the longer side of which is spaced from the side wall of the container as viewed in the thickness direction to ensure communication between the front and rear sides thereof, see fig. 9) are fixed to the support portion 2b of the wall body 2 by an elastic adhesive (e.g., silicone adhesive) 3. The porous body 4 closes the container wall 2 (with a small opening to the outside, which also opens in the side wall).

The example porous bodies were porous bodies having conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and substantially retaining their original form during atomization and in the atomized liquid (geopolymer sponge, average pore diameter 25.0 μm, surface porosity 30%, accumulated stable retention of their (original) form for more than 600 hours, dimensional change less than 1%).

Example 3 and comparative example thereof

In the case of the device shown in fig. 5 in which

tapered groove portions

2c and 4a are provided in a wall body 2, the two short-side peripheral portions of the ultrasonic atomization sheet 1 (the longer side of which is spaced apart from the side wall of the container as viewed in the thickness direction to ensure that the front and rear sides thereof are communicated, see fig. 9) are inserted into the

groove portions

2c and 4a and fixed with an elastic adhesive (e.g., silicon adhesive) 3. The film-like porous body 5 is fixed to the container wall 4 to close the container wall 2 (which has a small opening communicating with the outside, the opening also being opened in the side wall).

The example porous bodies were porous bodies having conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and substantially maintaining their original form during atomization and in the atomized liquid (titanium alloy sponge, average pore diameter 15.0 μm, surface porosity 80%, cumulative stable maintenance of their (original) form for longer than 5000 hours, dimensional change less than 0.1%).

Comparative examples 1 to 3-1 the same as the corresponding examples except for the following differences:

the comparative porous body is a porous body having conductivity only in the thickness direction and not in the longitudinal direction, the width direction, or the radial direction (that is, the pores are through-holes in the thickness direction (as shown by 11b in fig. 6), and the material, the size, the average (surface) pore diameter, the surface porosity, and the like are the same as those of the comparative examples).

Comparative examples 1 to 3-2 are the same as those of the corresponding examples except for the following differences:

the ultrasonic atomizing sheet 1 comprises only the piezoelectric ceramic plate 11 and does not comprise the vibrating plate 12, and the piezoelectric ceramic plate 11 of comparative examples 2 to 3 has the same length as the vibrating plate 12 of the corresponding example (slightly longer for fixation, slightly higher performance than the original piezoelectric ceramic plate 11), and has the same width and thickness as the piezoelectric ceramic plate 11 of the corresponding example.

Note:

the preparation method of the ultrasonic atomization sheet 1 in the embodiments 1 to 3 comprises the following steps:

1) manufacturing a piezoelectric ceramic plate 11 (such as lead zirconate titanate with the length of 25mm, the width of 15mm and the thickness of 1mm or other arbitrary piezoelectric materials), coating metal silver on two opposite surfaces with the largest area as surface electrodes 112, and respectively welding wires/leads 111 on the two electrodes to obtain an element 1;

2) the piezoelectric element 1 thus fabricated is mounted (fixed) on a substantially central portion of a vibrating plate 12 (bonded by an adhesive) to obtain an element 2, such as a plate made of a metal sheet (e.g., 304 stainless steel or other metal material) having a length of 30mm and a width of 20mm and a thickness of 1mm or a plastic plate;

the bonding wires/leads 111 on the ultrasonic atomization sheet 1 in examples 1 to 3 were connected to the outside of the container wall 2 by means of the inner connection 51, the outer connection 52 as shown in fig. 77 and 79 or by means of the inner connection shown in fig. 7 and 8.

Description of the drawings:

(surface) pore size meaning: the pore size of the micropores on the surface of the porous body in contact with the outside is the same as that defined herein.

Surface porosity means: the ratio of the total area of pores on the surface of the porous body in contact with the outside to the total area of the surface is the same as that defined herein.

Example 4 and comparative example thereof

Example 4-1 preparation method:

the device shown in fig. 6 is manufactured, wherein the elastic cavity mold is composed of a left circular elastic cavity mold silicon wafer and a right circular elastic cavity mold, wherein 8 represents a left circular elastic cavity mold silicon wafer, 9 represents a circular piezoelectric ceramic wafer (fixed by four points which can be connected into a square at the circumference), 10 represents a right circular elastic cavity mold silicon wafer, 11 represents a circular silicon rubber spongy porous body (the average pore diameter is 1 μm and the surface porosity is 50%, the silicon rubber spongy porous body has the thickness direction and the radial direction conductivity, basically keeps the original shape in the atomization process and the atomization liquid, and is larger than 2000 hours when the (original) shape is kept in an accumulated and stable manner, the size change amplitude is smaller than 5%), 12 represents a circular elastic cavity formed by the left circular elastic cavity mold silicon wafer 8 and the stone circular elastic cavity

mold silicon wafer

10, 13 is a liquid supply pipe, and 14 is an electrode lead.

Example 4-2 preparation method:

the device shown in fig. 6 is manufactured, wherein the elastic cavity mold is composed of a left square elastic cavity mold and a right square elastic cavity mold, wherein 8 represents a left square elastic cavity mold silicon wafer, 9 represents a square piezoelectric ceramic wafer (four corners are fixed), 10 represents a right square elastic cavity mold silicon wafer, 11 represents a square silicon rubber sponge porous body (the average pore diameter is 1 μm and the surface porosity is 50%, the silicon rubber sponge porous body not only has the thickness direction, but also has the radial direction conductivity, and basically keeps the original shape in the atomization process and in the atomization liquid, the accumulated and stable keeping of the original shape is longer than 2000 hours, the size change range is less than 5%), 12 represents a square elastic cavity formed by the left square elastic cavity mold silicon wafer 8 and the right square elastic cavity

mold silicon wafer

10, 13 represents a liquid supply tube, and 14 represents an electrode lead.

The above numbered square modules were squares, the side lengths thereof were equal to the diameters of the corresponding numbered (same numbered) circular modules in example 4-1, and the sizes of the other mutually corresponding parts were equal.

Comparative example preparation method:

the device shown in fig. 6 is manufactured, wherein the elastic cavity mold is composed of a left circular elastic cavity mold and a right circular elastic cavity mold, wherein 8 represents a left circular elastic cavity mold silicon wafer, 9 represents a circular piezoelectric ceramic wafer, 10 represents a right circular elastic cavity mold silicon wafer, 11b represents a micro-circular through hole processed in the right circular elastic cavity mold silicon wafer 10 (the surface porosity and the average (surface) pore diameter thereof are the same as those in example 4-1, only have the thickness direction, and do not have the conduction capability in the radial direction or the length direction or/and the width direction or/and the radial direction), 12 is a circular elastic cavity formed by the left elastic cavity mold silicon wafer 8 and the right elastic cavity

mold silicon wafer

10, 13 is a liquid supply tube, and 14 is an electrode lead.

The diameter of the components numbered correspondingly is equal to that of the embodiment 4-1, and the sizes of the other parts corresponding to each other are equal.

Example 5 and comparative example thereof

Examples preparation methods: according to the preparation shown in fig. 7, 8, 9 and 10, an ultrasonic atomizing sheet 10 is (preferably) constituted by bonding a substantially rectangular piezoelectric ceramic plate 11 to the surface of a substantially rectangular metal plate 12.

Electrodes

11a and 11b are provided on the front and back surfaces of the piezoelectric ceramic plate 11, respectively, polarized in the thickness direction, and the metal plate 12 is (preferably) substantially rectangular in shape having a width substantially the same as the width of the piezoelectric ceramic plate 11 (but less than the width of the inside of the case so that the front and back surfaces of the ultrasonic atomizing sheet 10 define

liquid reservoir spaces

25 and 26 in communication), and a length slightly longer than the length of the piezoelectric ceramic plate 11, electrically connected to the back electrode 11b of the piezoelectric plate 11, and for the metal plate 12, a material having excellent electrical conductivity and spring elasticity, specifically, a Young's modulus (preferably) close to that of the piezoelectric ceramic plate 11 is (preferably) used. Therefore, the metal plate 12 is preferably made of phosphor copper 42Ni or 304 stainless steel or other suitable material, and incidentally, if the metal plate 12 is made of 42Ni or 304 stainless steel, the thermal expansion coefficient is close to that of ceramics (such as PZT), the metal plate 12 can achieve higher reliability. In this embodiment, the piezoelectric ceramic plate 11 is bonded to one surface at a position offset in the longitudinal direction of the metal plate 12, and the metal plate 12 has an exposed portion 12a defined by exposing the metal plate 12 to the other surface in the longitudinal direction thereof.

One or more liquid guide holes 21 are formed in the bottom wall of the housing 20, and a porous body 30 (a geopolymer-based sponge body having a thickness direction and a length direction or/and a width direction or/and a radial direction conductivity and substantially retaining its original form during atomization and in an atomized liquid) is sealed and attached to the opening on the upper surface of the housing 20 with a cumulative stable retention time of its (original) form for more than 200 hours and a dimensional change width of less than 0.5%, with an average pore diameter of 5.0 μm in example 5-1, an average pore diameter of 25.0 μm in example 5-2, and a porosity of 50%). A plurality of micropores 31 for atomization are formed in the porous body 30. Stepped

support portions

22a and 22b facing each other are provided on the inner surfaces of both short sides of the housing 20. The ultrasonic atomization sheet 10 is placed on the

support portions

22a and 22b such that the metal plate 12 faces downward, and both short sides of the metal plate 12 are fixed by an elastic binder 23 such as a silicon adhesive. The two long sides of the ultrasonic atomization sheet 10 are not sealed with the space 24 between the housing 20, and as a result,

liquid storage spaces

25 and 26 that are communicated up and down are defined on the front and back sides of the ultrasonic atomization sheet 10 (in order to better exert the power or performance of the ultrasonic atomization sheet 10, the distance between the porous body 30 and the ultrasonic atomization sheet 10 is within 1mm to 2mm, and the distance between the ultrasonic atomization sheet 10 and the inner wall of the housing 20 is 2mm to 8mm, for a large liquid storage space (26).

The leads 13 and 14 are connected to the exposed portion 12a of the metal plate 12 and the front surface electrode 11a of the piezoelectric ceramic plate 11, respectively, by welding or other suitable methods, and are led to the outside through the space between the case 20 and the porous body 30. When an alternating voltage is applied between the

leads

13 and 14, by positioning both end portions in the length direction of the ultrasonic atomizing sheet 10 on the support portions, the ultrasonic atomizing sheet 10 is bent and oscillated in a thickness bending mode, the bending oscillation causing the

liquid storage spaces

25 and 26 on the front and rear surfaces to resonate, thereby atomizing the liquid from the atomizing micropores 31.

Fig. 10 shows the support portion 22b as one support portion of the housing 20 in detail. Note that the support portion 22a defining the other support portion of the housing 20 preferably has the same structure as the support portion 22b, and thus description thereof is omitted.

The support surface 27 is substantially arcuate in cross section at the top of the support portion 22b such that the center of curvature 0 of the support surface 27 is located near the lower surface of the periphery of the ultrasonic atomization plate 10. Referring to fig. 10, reference symbol a denotes a support width (coating width of an adhesive to coat the ultrasonic atomizing sheet), and reference symbol B denotes a gap between the housing 20 and the ultrasonic atomizing sheet 10.

Preferably, the radius of curvature r of the support surface 27 is set in accordance with the following relational expression

Suitable atomization results are achieved with oscillating characteristics and support if r is in the range of about 0.3mm < r < 1.0 mm.

Fig. 11 shows the atomization amount of the atomizer when a sine wave signal of 1Vrms is inputted between the metal plate 12 and the front electrode 11a in the case of using a flat surface as the supporting surface (according to the conventional example: comparative example 5-5/embodiment 5-4) and in the case of using a curved surface as the supporting surface (according to the preferred embodiment of the present invention).

Comparative example the same as example 5-1 was conducted except that the following differences were used:

comparative example 5-1/example 5-3, the average pore diameters of the porous bodies were 50 μm, respectively;

comparative example 5-2, the porous body was a ceramic sponge (porosity was about 80-85%, cracks occurred by breakage in ultrasonic vibration, morphology was unstable, time for maintaining its (original) morphology accumulatively and stably was less than 1 hour), and the dimensional change amplitude was more than 50%;

comparative examples 5 to 3, the ultrasonic atomizing sheet 10 did not contain the metal plate 12 (the piezoelectric ceramic plate 11 had a length substantially equal to the metal plate 12 in the examples (slightly longer for fixation, slightly more increased in performance than the original piezoelectric ceramic plate 11), and had a width and thickness substantially equal to the piezoelectric ceramic plate 11 in the examples);

Comparative examples 5 to 4, in which the porous body was a porous body having only the thickness direction and no conductivity in the length direction or/and width direction or/and radial direction (i.e., the pores were through-holes in the thickness direction (as shown by 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, and the like were the same as in the examples);

comparative example 5-5/example 5-4, the support surface was planar.

Example 6 and comparative example thereof

Examples preparation methods: as shown in fig. 12 to 18, the piezoelectric element 1 and the resin film (vibrating plate) 10 having a laminated structure, the case body 20 and the porous body 30 (a ceramic sponge having the same conductivity in thickness and length and/or width and/or diameter and maintaining the original form during atomization and in the atomized liquid, the ceramic sponge maintaining the original form stably for a cumulative time of more than 200 hours, the dimensional change width of less than 1%, the average pore diameter of 4.0 μm, and the surface porosity of 50%). The housing body 20 and the porous body 30 constitute a frame body.

As shown in fig. 15 to 18, the piezoelectric element 1 is formed by stacking 2 piezoelectric

ceramic layers

1a and 1b, and

main surface electrodes

2 and 3 are formed on the front and rear main surfaces of the piezoelectric element 1, and an internal electrode 4 is formed between the

ceramic layers

1a and 1 b. The two

ceramic layers

1a and 1b are polarized in the same direction in the thickness direction as indicated by thick line arrows. The front-side main surface electrode 2 and the rear-side main surface electrode 3 are slightly shorter than the piezoelectric element 1 in length, and one end thereof is connected to an end surface electrode 5 formed on one end surface of the piezoelectric element 1. Therefore, the front and rear

main surface electrodes

2 and 3 are connected to each other. The internal electrode 4 is formed in a substantially symmetrical shape with the

main surface electrodes

2 and 3, and one end of the internal electrode 4 is separated from the end surface electrode 5, and the other end is connected to an end surface electrode 6 formed on the other end surface of the piezoelectric element 1. An auxiliary electrode 7 is formed on the front and rear surfaces of the other end of the piezoelectric element 1 so as to be electrically connected to the end surface electrode 6. The auxiliary electrode 7 of this embodiment is only an electrode at a portion corresponding to the

notch portions

8b and 9b of the resin layers 8 and 9 described later, but may be a strip-shaped electrode extending along the other end of the piezoelectric element 1 by a predetermined width.

Resin layers 8 and 9 covering the

main surface electrodes

2 and 3 are formed on the front and back surfaces of the piezoelectric element 1. The resin layers 8 and 9 have a function of a protective layer for preventing the piezoelectric element 1 from being broken by a drop impact, and are designed as necessary. The resin layers 8 and 9 on the front and back surfaces have

cutouts

8a and 9a for exposing the

main surface electrodes

2 and 3 and

cutouts

8b and 9b for exposing the auxiliary electrode 7, respectively, in the vicinity of the diagonal portions of the piezoelectric element 1. In this embodiment, the electrode lead-out portion is constituted by a portion of the main surface electrode 2 exposed from the

cutouts

8a and 8b of the resin layer 8 on the front surface side and the auxiliary electrode 7. The

notches

8a, 8b, 9a, and 9b may be provided only on one of the front and rear surfaces, but in this example, are provided on the front and rear surfaces.

Here, the

ceramic layers

1a and 1b are made of PZT-based ceramics having a square shape with a side length of about 3 to 8mm and a thickness of 15 μm, and the resin layers 8 and 9 are made of polyamideimine-based resins having a thickness of 5 to 10 μm.

The piezoelectric element 1 is bonded to a substantially central portion of a surface of a resin film 10 having a larger outer shape than the piezoelectric element 1 by an epoxy resin adhesive.

The resin film 10 is thinner than the piezoelectric element 1, has 2 liquid-permeable holes 10-1 formed therein, and is formed of a resin material having an elastic modulus of 500MPa to 1500 MPa. The resin preferably has heat resistance of 300 ℃ or higher. Specifically, epoxy resin, acryl resin, polyimide resin, or polyamideimide resin can be used. Here, a square-shaped polyamideimide sheet having a side of 10mm, a thickness of 7.5 μm and an elastic modulus of 3400MPa was used. In order to obtain good fogging characteristics, the piezoelectric element 1 is formed (surface area is appropriately adjusted) to have an area of 40 to 70% of the resin film 10 (the area ratio of the piezoelectric element 1 to the resin film 10 in example 6-1 is 50%, and the ratio is 25% and 70% in examples 6-2 and 3, respectively).

The case 20 is formed of an insulating material such as ceramic, resin, or glass epoxy resin into a rectangular (preferably rectangular) box shape having a

bottom wall portion

20a and 4 side wall portions 20b to 20 e. When the case 20 is made of resin, heat-resistant resin such as LCP (liquid crystal polymer), SPS (syndiotactic polystyrene), PPS (polyphenylene sulfide), and epoxy resin is preferable in order to allow heat-resistant fusion welding. An annular support portion 20f larger than the outer shape of the piezoelectric element 1 is provided on the inner peripheral portion of the 4 side wall portions 20b to 20e, and the

inner connection portions

21a and 22a of the pair of

terminals

21 and 22 are exposed in the vicinity of the inner support portion 20f of the 2

side wall portions

20b and 20d facing each other.

Terminals

21 and 22 are inserted into housing 20, and

external connection portions

21b and 22b protruding outside housing 20 are bent and folded along outer surfaces of

side wall portions

20b and 20d toward the bottom surface of housing 20. In this embodiment, the

internal connection portions

21a, 22a of the

terminals

21, 22 are divided into two-strand shapes, and these two-strand shaped

internal connection portions

21a, 22a are located at positions near the right-angled portions of the housing 20.

A guide 20g for guiding the outer periphery of the resin film 10 is provided on the outer side of the support 20f and the inner side of the 4 side wall portions 20b to 20 e. The inner surface of the guide portion 20g is formed with an inclined surface that is inclined inward gradually toward the lower side, and the resin film 10 is accurately placed on the support portion 20f by the guidance of the inclined surface. Since the support portion 20f is formed to be slightly lower than the inner connecting

portions

21a and 22a of the

terminals

21 and 22, the top surface of the piezoelectric element 1 and the upper surfaces of the inner connecting

portions

21a and 22a of the

terminals

21 and 22 are set to be substantially the same height after the resin film 10 is placed on the support portion 20 f.

Further, a filling hole 20h is formed in the bottom portion 20a on the side of the side wall portion 20c, and the liquid enters the case 20 through the filling hole and further reaches the inside of the porous body 30 through the liquid permeable hole 10-1 of the resin film 10.

The piezoelectric element 1 with the resin film 10 attached thereto is housed in a case 20, and the periphery of the resin film 10 is placed on a support portion 20f of the case 20. The conductive adhesive 13 is applied in a strip shape between the main surface electrode 2 exposed in the cutout portion 8a at the diagonal position and the internal connection portion 21a of the terminal 21, and between the auxiliary electrode 7 exposed in the cutout portion 8b and the internal connection portion 22a of the terminal 22. As the conductive adhesive 13, a conductive adhesive having a high elastic modulus in a cured state can be used, but since the displacement of the resin film 10 is not restricted, for example, a conductive paste having a low elastic modulus after curing may be used. Here, a urethane conductive paste having an elastic modulus of 0.3 × 109Pa after curing was used. After the conductive adhesive 13 is applied and cured by heating, the internal connection portions 21a of the main surface electrode 2 and the terminal 21 and the internal connection portions 22a of the auxiliary electrode 7 and the terminal 22 are electrically connected to each other.

The resin film 10 located between the main surface electrode 2 and the internal connection portion 21a and between the auxiliary electrode 7 and the internal connection portion 22a may be coated with a coating agent having a lower elastic modulus than the conductive adhesive 13, cured, and then coated thereon so as to straddle the conductive adhesive 13. In this way, the binding force of the conductive adhesive 13 to the resin film 10 can be weakened.

After the piezoelectric element 1 is connected to the

internal connection electrodes

21a and 22a of the

terminals

21 and 22, the entire circumference of the resin film 10 is bonded to the support portion 20f by the adhesive 14, and the resin film 10 is firmly bonded to the case 20. As the adhesive 14, a conductive adhesive such as epoxy resin having a high elastic modulus in a cured state can be used, but an elastic adhesive 14 having a low elastic modulus may be used because displacement of the resin film 10 is allowed. Here, a silicone-based adhesive having an elastic modulus of 0.3 × 105Pa after curing was used.

After the piezoelectric element 1 to which the resin film 10 is attached is supported by the case 20 as described above, the piezoelectric element 1 is bonded to the upper surface opening of the case 20 by the adhesive 31 and the porous body 30 (in order to more effectively exhibit the performance of the piezoelectric element 1 (or the ultrasonic atomizing sheet configured together with the resin film 10), the distance between the porous body 30 and the piezoelectric element 1 is within 2mm, preferably within 1 mm). The porous body 30 and the case 20 are formed of different (or the same) materials, and after the porous body 30 is bonded, a certain space is formed between the porous body 30 and the piezoelectric element 1. A plurality of atomization pores 32 are formed in the porous body 30.

Comparative example the same as example 6-1 was conducted except that the following differences were used:

Comparative example 6-1, the porous body was a polyester sponge (average pore diameter of 4.0 μm, porosity of about 96-98%, deformation in liquid at once, breakage during atomization, dimensional change of more than 30%, difficulty in retaining original form);

comparative example 6-2, (ultrasonic atomization sheet) does not contain resin film 10, only piezoelectric element 1, piezoelectric element 1 has substantially the same length and width as resin film 10 in example (for fixation, slightly longer, slightly more performance than the original piezoelectric ceramic plate), thickness and width as piezoelectric element 1/piezoelectric ceramic plate in example);

comparative example 6-3, in which the porous body is a porous body having only the thickness direction and no conductivity in the length direction or/and width direction or/and radial direction (i.e., the pores are through-holes in the thickness direction (as shown by 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, and the like are the same as those in the example);

comparative examples 6 to 4 and 6 to 5, in which the area ratio of the piezoelectric element 1 to the resin film 10 was 10% and 90%.

Example 7 and comparative example thereof

Examples 7-1 and 2 the same procedures and modes as in example 5-1 were followed, except that in example 7-1, the piezoelectric ceramic plate 11 in the ultrasonic atomizing sheet 10 in example 5-1 was replaced with the piezoelectric ceramic plate 11 (laminated piezoelectric actuator) in FIG. 19, and in example 7-2, the piezoelectric ceramic plate 11 (laminated piezoelectric actuator) in FIGS. 20 to 22 was replaced, and the length and width thereof were the same as in example 5-1, and the thickness thereof was three times as large as in example 5-1, and the other procedures and modes were the same as in example 5-1.

In the piezoelectric ceramic plate 11 in example 7-1, the 1 st and 2 nd

external electrodes

5 and 6 have only end

surface portions

5a and 6 a. The 1 st and 2 nd

external electrodes

5 and 6 can be formed by an appropriate method such as coating and baking of a conductive paste, vapor deposition, plating, or sputtering.

The ceramic sintered body 2 has a rectangular parallelepiped shape, and has an upper surface 2a, a lower surface 2b, a 1 st end surface 2c, and a 2 nd end surface 2 d. In the ceramic sintered body 2, a plurality of ceramic layers including ceramic layers 2e, 2f, and 2g are arranged. In the ceramic sintered body 2, a plurality of 1 st internal electrodes 3a to 3d and a plurality of 2 nd internal electrodes 4a to 4d are arranged in parallel with the upper surface 2a and the lower surface 2 b. The 1 st internal electrodes 3a to 3d are drawn out to the 1 st end face 2c of the ceramic sintered body 2. The plurality of 2 nd internal electrodes 4a to 4d are drawn out to the 2 nd end face 2d of the ceramic sintered body 2 facing the 1 st end face 2 c. In the ceramic sintered body 2, a plurality of ceramic layers, a plurality of 1 st internal electrodes 3a to 3d, and a plurality of 2 nd internal electrodes 4a to 4d are laminated. In the ceramic

sintered body

2, 1 st internal electrodes 3a to 3d and 2 nd internal electrodes 4a to 4d are alternately arranged in the lamination direction, that is, in the direction connecting the upper surface 2a and the lower surface 2 b.

The 1 st external electrode 5 is formed at the 1 st end face 2 c. The 2 nd external electrode 6 is formed at the 2 nd end face 2 d. In the present embodiment, the 1 st external electrode 5 has an end surface portion 5a located at the 1 st end surface 2 c. The 2 nd external electrode 6 has an end surface portion 6a located at the 2 nd end surface 2 d.

The 1 st and 2 nd internal electrodes 3a to 3d and 4a to 4d are formed of AgPd. Of course, the 1 st and 2 nd internal electrodes 3a to 3d and 4a to 4d may be formed of an appropriate metal material such as Ag, Au, Cu, Ni or an alloy thereof.

The ceramic sintered body 2 having the 1 st and 2 nd internal electrodes 3a to 3d and 4a to 4d is a multilayer ceramic sintered body obtainable by a known ceramic monolithic firing technique.

The 1 st and 2 nd

external electrodes

5 and 6 are formed by applying and baking a conductive paste. Of course, the film can be formed by an evaporation method, a sputtering method, a plating method, or the like. In this embodiment, the 1 st and 2 nd

external electrodes

5 and 6 are formed by a sputtering method. The 1 st and 2 nd

external electrodes

5 and 6 can be formed of an appropriate metal or alloy. In the ceramic sintered body 2, a portion sandwiched between any one of the 1 st internal electrodes 3a to 3d and any one of the 2 nd internal electrodes 4a to 4d functions as an active layer. Here, the active layer refers to a portion that expands and contracts by a piezoelectric effect when an electric field is applied. In the ceramic sintered body 2, adjacent active layers are polarized in opposite directions in the stacking direction.

When the multilayer piezoelectric actuator 1 is driven, a voltage is applied between the 1 st and 2 nd

external electrodes

5 and 6. As a result, an electric field is applied to the plurality of ceramic layers 2e sandwiched between the 1 st internal electrodes 3a to 3d and the 2 nd internal electrodes 4a to 4 d. Therefore, when the electric field is applied, the multilayer piezoelectric actuator 1 assumes a posture in which the center thereof protrudes upward and a posture in which the center thereof protrudes downward at the center in the direction connecting the 1 st and 2 nd end faces 2c and 2 d. I.e. displacement in bending mode.

In example 7-1, it was difficult to apply a further high electric field to the ceramic layers 2f and 2 g. Therefore, dielectric breakdown is difficult to occur.

As shown in fig. 20 to 22, the piezoelectric ceramic plate 11 (laminated piezoelectric actuator) in example 7-2 includes a laminated body 3 having a plurality of laminated piezoelectric ceramic layers 1, and a plurality of first effective internal electrodes 2a and a plurality of second effective internal electrodes 2b that are provided so as to face each other with the piezoelectric ceramic layers 1 interposed therebetween and contribute to finding piezoelectric characteristics.

The regions where the first effective internal electrodes 2a and the second effective internal electrodes 2b face each other with the piezoelectric ceramic layers 1 interposed therebetween constitute an actual drive region Q.

In fig. 20 to 22, arrows attached to the piezoelectric ceramic layer 1 indicate the polarization direction of the piezoelectric ceramic layer 1. This representation is the same for the other figures showing the piezoelectric stack of the present embodiment.

The first effective internal electrodes 2a are led out to the first side surface 3a of the laminated green body 3, and the second effective internal electrodes 2b are led out to the second side surface 3 b.

The first side surface 3a and the second side surface 3b of the laminated green body 3 are provided with a first side surface electrode 4a electrically connected to the first effective internal electrode 2a led out to the first side surface 3a and a second side surface electrode 4b electrically connected to the second effective internal electrode 2b led out to the second side surface 3 b.

Of the upper (front) main surface 3c and the lower (reverse) main surface 3d of the laminated green body 3, the upper main surface 3c is provided with a first main surface electrode 5a1 electrically connected to the first side surface electrode 4a and a second main surface electrode 5b1 electrically connected to the second side surface electrode 4b, and the lower main surface 3d is provided with a first reverse main surface electrode 5a2 electrically connected to the first side surface electrode 4a and a second reverse main surface electrode 5b2 electrically connected to the second side surface electrode 4 b.

The first main surface electrode 5al has a region (stress application region) Ra to which stress is applied in any one of the polarization step, the characteristic confirmation step, the laminated green body conveying step, and the connection processing step for applying a driving voltage, and the second main surface electrode 5b1 also has a region (stress application region) Rb to which stress is applied in any one of the steps.

Further, when viewed from the lamination direction, the first dummy electrodes 6a that do not contribute to the discovery of piezoelectric characteristics are provided in the regions 3Ra of the laminated green body 3 corresponding to the regions Ra to which the first main surface electrodes 5a1 are stressed, and the second dummy electrodes 6b that do not contribute to the discovery of piezoelectric characteristics are provided in the regions 3Rb of the laminated green body 3 corresponding to the regions Rb to which the second main surface electrodes 5b1 are stressed.

The first dummy electrodes 6a and the second effective internal electrodes 2b are formed on the same plane, and the number of layers of the first dummy electrodes 6a is the same as the number of layers of the second effective internal electrodes 2 b. And the second dummy electrodes 6b are formed on the same plane as the first effective internal electrodes 2a, and the number of layers of the second dummy electrodes 6b is the same as that of the first effective internal electrodes 2 a.

In example 7-2, the first side electrode and the second side electrode are provided on a pair of sides of the laminated green body facing each other, but a structure in which the first side electrode and the second side electrode are provided on adjacent sides or on the same side may be employed.

A known technique is used for a method of manufacturing the piezoelectric ceramic plate 11 (laminated piezoelectric actuator).

Comparative example 7 was the same as in example 5-1.

Example 8 and comparative example thereof

According to the method and mode of example 6-1, the resin film (vibration plate) 10 in the ultrasonic atomization sheet was replaced with the film body 10 described below, the piezoelectric element 1 was fixed to the substantially central portion of the film body 10, and the surface area of the piezoelectric element 1 was appropriately adjusted to 25% (example 8-1), 45% (example 8-2), or 70% (example 8-3) of the surface area of the film body 10 and fixed as described below, and the other steps were the same as in example 6-1.

The film body is a film body made of a polyimide resin having a thickness of 25 μm, and is fixed to the case 20 (frame member) in a state where tension is applied thereto, the piezoelectric element 1 is bonded by applying an adhesive to a part of the center of the main surface of the fixed film body, and the adhesive is cured in air at 120 ℃ for 1 hour. The size of the membrane body in the housing 20 (frame member) was set to 38mm in the longitudinal direction and 31mm in the transverse direction, which was adapted to the size of the housing.

Comparative examples 8-1 and 2 were similar to example 8-1 except that the surface area of the piezoelectric element 1 was appropriately adjusted to 10% and 90% of the surface area of the film body 10, respectively.

Example 9 and comparative example thereof

Examples 9-1, 2 the method and mode of example 5-2 were followed, wherein the ultrasonic atomization sheet 10 was replaced with the ultrasonic atomization sheet 10 of fig. 23, wherein only the structure layer of the vibration plate 12 was changed as shown in the drawing, i.e., the middle layer of the vibration plate 12 was replaced with an elastic material to form an elastic material interlayer 12-2 and two surface layers 12-1, the size and the entire thickness of the vibration plate 12 were the same as those of example 5-2, and the surface layer (metal plate) 12-1 was made of phosphor copper 42Ni or 304 stainless steel material, and the others were the same as those of example 5-2.

In FIG. 23, example 9-1: the interlayer elastic material layer 12-2 is a rubber elastic resin sheet, and as the film sheet, for example, a rubber-based polymer resin sheet made of rubber such as Styrene Butadiene Rubber (SBR), Butadiene Rubber (BR), acrylonitrile butadiene rubber (NBR), ethylene propylene rubber (EPM), ethylene propylene diene rubber (EPDM), or a compound thereof; example 9-2: the interlayer elastic material layer 12-2 is a metal thin plate made of aluminum, magnesium, titanium or an alloy thereof.

Comparative example 9 was the same as in example 5-2.

Example 10 and comparative example thereof

Examples 10-1 to 2 the procedure and mode of example 2 were followed, in which example 10-1 was a piezoelectric element in which the piezoelectric element in the ultrasonic atomization sheet 1 was replaced with a piezoelectric element 30 (the length, width and thickness thereof were the same as those in example 2) shown in FIGS. 24 to 25 and described below, and example 10-2 was a piezoelectric element 50 (the length, width and thickness thereof were the same as those in example 2) shown in FIG. 27 and described below, and the other points were the same as those in example 2.

Comparative example 10 was the same as example 2.

Example 11 and comparative example thereof

Examples 11-1 and 2 were conducted in the same manner and manner as in example 3 except that in example 11-1, the piezoelectric element 30 '(the same length, width and thickness as in example 3) as shown in FIG. 26 and described below was replaced, and in example 11-2, the piezoelectric element 50' (the same length, width and thickness as in example 3) as shown in FIG. 28 and described below was replaced, and the other examples were the same as in example 3.

Comparative example 11 was the same as example 3.

As shown in fig. 24 and 25, the piezoelectric element 30 in example 10-1 is obtained by laminating two piezoelectric

ceramic layers

31 and 32. The

main surface electrodes

33 and 34 are formed on the upper surface and the lower surface of the piezoelectric element 30, respectively, and the internal electrode 35 is formed between the

ceramic layers

31 and 32. The two

ceramic layers

31 and 32 are polarized in the same direction with respect to the thickness direction shown by the bold arrows in fig. 25. In this embodiment, the upper main surface electrode 33 and the bottom main surface electrode 34 are formed so that their widths are both equal to the shorter sides of the piezoelectric element 30 and their lengths are both slightly shorter than the long sides of the piezoelectric element 30. One end of each of the upper and lower

main surface electrodes

33 and 34 is connected to a terminal electrode 36 formed on an end face of one shorter side of the piezoelectric element 30. Thereby, the upper and lower

main surface electrodes

33 and 34 are connected. The internal electrode 35 is formed so as to have a substantially symmetrical shape to the

main surface electrodes

33 and 34. One end of the internal electrode 35 is separated from the terminal electrode 36, and the other end is connected to a terminal electrode 37 formed on an end face of the other shorter side of the piezoelectric element 30. Narrow auxiliary electrodes 38 connected to the end face electrodes 37 are formed on the upper and lower surfaces of the end portions on the other shorter side of the piezoelectric element 30.

Fig. 26 shows a piezoelectric element in embodiment 11-1, which is a modification shown in fig. 25. In fig. 25, the internal electrode 35 is a partial electrode, but in fig. 26, the internal electrode 35 is an entire electrode. In this case, since the entire electrode 35 extends to the end face electrode 36, there is a risk that the internal electrode is connected to the end face electrode 36. To avoid this risk, an insulating layer 39 is formed on the end face of the piezoelectric element 30', and then, an end face electrode 36 connecting the

main surface electrodes

33 and 34 is formed on the insulating layer 39. Thereby, even when the internal electrode 35 is the entire electrode, the internal electrode 35 can be reliably insulated from the

main surface electrodes

33 and 34.

Fig. 27 shows a piezoelectric element in embodiment 10-2. The piezoelectric element 50 in the present embodiment is obtained by laminating three piezoelectric ceramic layers 51 to 53. In this piezoelectric element 50, main surface electrodes 54 and 55 are formed on the upper surface and the lower surface of the piezoelectric element 50, respectively, and

internal electrodes

56 and 57 are formed between the

ceramic layers

51 and 52, and between the

ceramic layers

52 and 53, respectively. The three ceramic layers are polarized in the same direction along the thickness direction shown by the bold arrows in fig. 27. In this embodiment, the main surface electrodes 54 and 55 are formed by the same method as shown in fig. 25 so that both of them have a width equal to the width of the shorter side of the piezoelectric element 50 and both of them have a length shorter than the longer side of the piezoelectric element 50. One ends of the respective upper and lower main surface electrodes 54 and 55 are connected to an end face formed on one shorter side of the piezoelectric element 50. Thereby, the upper and lower main surface electrodes 54 and 55 are connected to each other. One end of each of the

internal electrodes

56 and 57 is separated from the terminal electrode 58, and the other end thereof is connected to an end-face electrode 59 formed on the end face on the other shorter side of the piezoelectric element 50. Thereby, the

internal electrodes

56 and 57 are also connected to each other. Narrow auxiliary electrodes 59a connected to the end face electrodes 59 are formed on the upper and lower surfaces of the end portions on the other shorter side of the piezoelectric element 50.

For example, when a negative voltage and a positive voltage are applied to the

end face electrodes

58 and 59, respectively, an electric field is generated in a direction shown by an arrow of a thin body in fig. 27. At this time, since the

internal electrodes

56 and 57 located on opposite sides of the intermediate ceramic layer 52 have equal potentials, they do not generate an electric field. Since the polarization direction is the same as the electric field direction of the upper ceramic layer 51, the ceramic upper layer 51 contracts in the planar direction, and since the polarization direction is opposite to the electric field direction of the ceramic lower layer 53, the lower ceramic layer 53 expands in the planar direction. The intermediate ceramic layer 52 neither expands nor contracts. Accordingly, the piezoelectric element 50 is bent so as to protrude downward. Applying an alternating voltage between the

end face electrodes

58 and 59 can periodically vibrate the piezoelectric element in a bending mode and thereby generate a high amount of fogging.

In fig. 27, partial electrodes are used as the

internal electrodes

56 and 57, but the entire electrodes may be used as shown in fig. 26.

The method of manufacturing the above-described piezoelectric element 50 having a three-layer structure is the same as the two-layer piezoelectric element 1 shown in fig. 29. That is, three ceramic green sheets are laminated and pressure-bonded by forming an electrode film in a predetermined pattern by printing on the surface of the ceramic green sheet in a mother substrate state or the like. Next, the laminated body is stamped or cut into a shape corresponding to the piezoelectric element 50. The already embossed or cut laminate is then simultaneously fired to a sintered laminate. Next, main surface electrodes 54 and 55 are formed on the upper and lower main surfaces of the sintered laminate, and all of the ceramic layers 52 to 53 constituting the laminate are polarized in the same direction with respect to the thickness direction by applying a polarizing voltage across these main surface electrodes. After that, the

end face electrodes

58 and 59 and the like are formed, thereby realizing the piezoelectric element 50. Also in this case, when polarization is performed, connection between the

internal electrodes

56 and 57, and between the main surface electrodes 54 and 55 is not necessary. Polarization may be performed by applying a voltage across only the major surface electrodes 54 and 55. This makes the polarization process simple.

Fig. 28 shows a piezoelectric element in embodiment 11-2. The embodiment shown in fig. 27 is a piezoelectric element having such a structure in which the thicknesses of all the ceramic layers 51 to 53 are substantially the same. On the other hand, the embodiment shown in fig. 28 is a piezoelectric element having such a structure that the intermediate ceramic layer 52 is thicker than the

ceramic layers

51 and 53. Preferably, the thickness of the intermediate ceramic layer 52 is between 50 and 80 percent of the overall thickness of the piezoelectric element 50'. Here, since the structure of the piezoelectric element 50' is the same as the thickness of the piezoelectric element 50 as shown in fig. 27, a description thereof will be omitted.

Example 12 and comparative example thereof

Examples preparation methods:

according to the preparation shown in fig. 30 to 40, the piezoelectric atomizer in the embodiment comprises a piezoelectric vibrating piece 1 having a laminated structure, a container 10, and a porous body 20 (a chemically bonded ceramic-based sponge body having a conductivity in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially retaining its original form during atomization and in an atomized liquid, and the accumulated stable retention of its (original) form for more than 200 hours, a dimensional change width of less than 0.5%, an average pore diameter of 2.5 μm, and a porosity of 50% are all included). The combination of the container 10 and the porous body 20 gives a housing of the piezoelectric atomizer.

As shown in fig. 30 and 31, the vibrating piece 1 is preferably formed by laminating two piezoelectric

ceramic layers

1a and 1 b. At the top and bottom surfaces of the vibrating piece 1, two principal-

surface electrodes

2 and 3 are provided on the principal surface thereof, and an internal electrode 4 is further provided between the

ceramic layers

1a and 1 b. As shown by thick arrows in fig. 30 and 31, the two piezoelectric

ceramic layers

1a and 1b are polarized in the same direction in the thickness direction thereof. The length of the principal surface electrode 2 of the top surface and the principal surface electrode 3 of the bottom surface is slightly shorter than the length of the side surface of the vibrating piece 1, and they are connected to an end surface electrode 5 provided at one end surface of the vibrating piece 1. Then, the main-

face electrodes

2 and 3 of the top and bottom surfaces are connected to each other. The shape of the inner electrode 4 is substantially symmetrical to the main-

face electrodes

2 and 3. One end of the internal electrode 4 is separated from the end face electrode 5, and the other end thereof is connected to an end face electrode 6 provided at an end portion opposite to the end face electrode 5. The auxiliary electrodes 7 are provided on the top and bottom surfaces of the vibrating piece 1 so that the auxiliary electrodes 7 are electrically connected to the end face electrodes 6. A liquid guide hole 16 is formed in a substantially central portion (or near an edge portion) of the vibrating reed 1 so that spaces of the container partitioned by the vibrating reed 1 communicate with each other.

In addition,

resin layers

8 and 9 are provided at the top and bottom surfaces of the vibrating piece 1 to cover the principal-

side electrodes

2 and 3. The resin layers 8 and 9 are provided to prevent cracking due to impact force at the time of sudden drop.

Notches

8a and 8b are provided at positions of the resin layer 8 of the top surface near two opposite corners of the vibrating piece 1, and

notches

9a and 9b are provided at positions of the resin layer 9 of the bottom surface near the other two opposite corners of the vibrating piece 1. The

main surface electrodes

2 and 3 face outward through the

notches

8a and 9a, respectively, and the auxiliary electrode 7 faces outward through the

notches

8b and 9 b.

Such a structure may also be such that the notch is formed only on one of the top surface or the bottom surface of the vibrating piece 1. However, in the present preferred embodiment, notches are formed on both the top surface and the bottom surface of the vibrating piece 1 to avoid directionality.

In addition, the auxiliary electrode 7 does not have to be a strip shape having a constant width, and the shape of the auxiliary electrode 7 may be such that the auxiliary electrode 7 extends only over the regions corresponding to the

notches

8b and 9 b.

In the present embodiment, the

ceramic layers

1a and 1b are preferably formed of PZT ceramic having a size of, for example, approximately 10mm × 10mm × 40 μm, and the resin layers 8 and 9 are preferably formed of polyamideimide resin having a thickness of preferably about 3 to 10 μm.

The container 10 is preferably made of a resin material, and is preferably substantially rectangular box-shaped having a bottom wall 10a and four side walls 10b to 10 e. The resin material used to form the container 10 is preferably a heat-resistant resin such as Liquid Crystal Polymer (LCP), Syndiotactic Polystyrene (SPS), polyphenylene sulfide (PPS), and epoxy resin. The container 10 is provided with a stepped portion 10f extending along the four side walls 10b to 10e, and

inner portions

11a and 12a of a pair of

terminals

11 and 12 are provided on the stepped portion 10f at positions inside the two

opposite side walls

10b and 10 d. The

terminals

11 and 12 are preferably formed in the container 10 by insert molding;

outer portions

11b and 12b are provided, respectively, which are curved toward the bottom surface of the container 10 along the outer surfaces of the sidewalls 10b and 10 d.

As shown in fig. 36, 37, and 39, the

inner portions

11a and 12a of the

terminals

11 and 12, respectively, include:

body portions

11c and 12c substantially the same width as

outer portions

11b and 12 b;

wing portions

11d and 12d extending from both sides of the

main body portions

11c and 12c to positions near corners of the container 10. Although the

body portions

11c and 12c are fixed to the inside of the

side walls

10b and 10d of the container 10, holes 11e and 12e may be formed in the

body portions

11c and 12c for allowing resin to flow in to secure fixing strength. As shown in fig. 39, the inner surfaces of the

wing portions

11d and 12d face the inside of the container 10, and

stress relieving portions

11f and 12f are provided between the

body portions

11c and 12c and the

wing portions

11d and 12 d. Thus,

wing portions

11d and 12d are able to move in the direction indicated by the arrows in FIG. 36A, B. As shown in fig. 36A, the end faces 11g of the wing portions 11d are inclined so that the distance between the end faces 11g increases toward the inside of the container 10. As also shown in fig. 36B, the end faces 12g of the wing portions 12d are inclined so that the distance between the end faces 12g increases toward the inside of the container 10. The resin-formed container 10 does not interfere with the movement of the

wing portions

11d and 12 d.

As shown in fig. 35, a supporting portion 10g for supporting the vibrating piece at both opposite sides thereof is provided in a step portion 10f provided with

terminals

11 and 12. The supporting portion 10g is lower in height than the step portion 10f so that the top surface of the vibrating piece 1 and the top surfaces of the

inner portions

11a and 12a of the

terminals

11 and 12 are flush when the vibrating piece 1 is disposed on the supporting portion 10 g.

A filling hole 10h communicating with the outside is formed in the bottom wall 10 a.

When the

terminals

11 and 12 are formed by insert molding, the

outer portions

11b and 12b extend horizontally outside the container 10, as shown in fig. 40A. As shown in fig. 40B, the outer portions 11B and 12B of the

terminals

11 and 12 are bent downward at a position near the center thereof. At this time, the bending of the

outer portions

11b and 12b is preferably greater than 90 °. As shown in fig. 40C, the

outer portions

11b and 12b of the

terminals

11 and 12 are bent again so that the

respective terminals

11 and 12 extend along the side surface of the container 10. In this case, the ends of the

outer portions

11b and 12b are fitted in grooves 10I formed in the bottom surface of the container 10. Since the outer portions 11B and 12B are bent more than 90 ° in fig. 40B, the ends of the outer portions 11B and 12B are prevented from being lifted from the bottom surface of the container 10.

The vibrating piece 1 is mounted in the case 10 and fixed to the

wing portions

11d and 12d of the

terminals

11 and 12 at four positions with the elastic suppressing material 13. Specifically, the elastic suppressing material 13 is applied between the main surface electrode 2 facing outward through the notch 8a and one wing portion 11d of the terminal 11, and also between the auxiliary electrode 7 facing outward through the notch 8b and one wing portion 12d of the terminal 12. In addition, an elastic restraining material 13 is also added at the remaining two corners opposite to each other. Although it is preferable that the elasticity suppressing material 13 has an elliptical shape in the present preferred embodiment, the shape of the elasticity suppressing material 13 is not limited thereto. For example, urethane paste having a young's modulus of approximately 3.7 × 106Pa after curing is preferably used as the elasticity suppressing material 13. Since the elasticity suppressing material 13 is high in viscosity (e.g., 50-120 dpas) before curing and high in impermeability, it does not flow down to the supporting portion 10g between the vibrating piece 1 and the container 10. After the addition of the elasticity-suppressing material 13, it is heated and cured.

Said elastic inhibiting material 13 can be applied by means of a dispenser or other suitable device after the membrane 1 has been mounted in the container 10, or the membrane 1 can be mounted in the container 10 after the application of the elastic inhibiting material 13.

After the elastic suppressing material 13 is cured, the main surface electrode 2 is connected to one wing portion 11d of the terminal 11 and the auxiliary electrode 7 is connected to one wing portion 12d of the terminal 11 by applying the conductive paste 14 in a substantially elliptical manner so as to intersect the elastic suppressing material 13, wherein the elastic suppressing material 13 is also applied in a substantially elliptical manner. For example, a urethane adhesive having a young's modulus of approximately 0.3 × 109Pa after curing is preferably used as the conductive adhesive 14. After the conductive paste 14 is applied, it is heated and cured. The shape added to the conductive paste 14 is not limited to the substantially elliptical form as long as the main-surface electrode 2 can be connected to one wing portion 11d of the terminal 11 and the auxiliary electrode 7 can be connected to one wing portion 12d of the terminal 11 over the elasticity suppressing material 13.

After the conductive paste 14 is applied and cured, an elastic sealing material 15 is applied between the outer peripheral surface of the vibrating piece 1 and the inner surface of the container 10 and further strengthened. After the elastic sealing material 15 is applied, it is heated and cured. For example, a silicone adhesive having a young's modulus of approximately 3.0 × 105Pa after curing is preferably used as the elastic sealing material 15.

As shown in fig. 32B, a flow preventing groove 10j may be formed at a position lower than the support portion 10g on the inner side of the

side walls

10c and 10e to prevent the flow of the elastic sealing material 15. In this case, the elastic sealing material 15 can be prevented from flowing down to the bottom wall 10 a.

After the vibrating piece 1 is fixed to the case 10, the porous body 20 is fixed to the case 10 with the adhesive 21 to close the opening surface at the upper surface of the case 10. It is preferable to form the container 10 and the porous body 20 of the same material. By means of the connecting porous body 20, a liquid storing space is defined between the vibrating piece 1 and the porous body 20. The porous body 20 has a plurality of atomization pores 22 formed therein. Thereby completing a surface-mounted piezoelectric atomizer.

According to the piezoelectric atomizer of the present embodiment, when a predetermined alternating current is applied between the

terminals

11 and 12, the vibrating piece 1 starts vibrating in a flexural vibration mode. Since one piezoelectric ceramic layer polarized in the same direction as the electric field contracts, the piezoelectric ceramic layer polarized in the opposite direction to the electric field expands, thereby bending the laminate in the thickness direction.

In the present preferred embodiment, the vibrating piece 1 has a laminated structure and is formed of ceramics, and two vibrating regions (ceramic layers) aligned in the thickness direction vibrate in opposite directions. Therefore, such a vibrating piece is bent by a large amount as compared with a unimorph type vibrating piece, thereby obtaining a large atomizing force.

When the piezoelectric atomizer of the present embodiment is surface-mounted on a printing plate or the like, the container 10 expands due to heating during reflow soldering. Since the vibrating piece 1 made of ceramic has a lower coefficient of thermal expansion than the case 10 formed of resin, the vibrating piece 1 is subjected to tensile stress. Then, there is a risk that the characteristics of the vibrating piece 1 are changed or the vibrating piece 1 is broken.

However, since the

wing portions

11d and 12d of the

terminals

11 and 12 formed by insert molding in the case 10 can move toward the inside of the case 10 as shown in fig. 37, the tensile stress applied to the vibrating piece 1 is relieved. Therefore, the characteristics of the vibrating piece 1 are not changed, and the breakage of the vibrating piece 1 is prevented.

Fig. 38 shows a modification of the terminal of another preferred embodiment of the present invention. Since it is preferred that the

terminals

11 and 12 have the same structure, only the end portion 11 is shown in fig. 38.

In the

terminals

11 and 12 of this preferred embodiment, crank-shaped portions 11h and 12h, which define the stress relief portions, are provided between the

main body portions

11c and 12c and the

wing portions

11d and 12 d. In this case, the

wing portions

11d and 12d can be moved more easily than in the case where the stress relieving portion is defined by one

narrow portion

11f and 12f in the first embodiment of the present invention.

Comparative example the same as example 12 was used except that the following differences were used:

comparative example 12-1

The same as the embodiment except that the vibrating piece 1 is removed from the internal electrode 4 (even if the

ceramic layers

1a and 1b are combined into a single layer of ceramic layer 1), and the two

main surface electrodes

2 and 3 are disconnected and connected to the end surface electrode 5 and the end surface electrode 6 provided at the end portion opposite to the end surface electrode 5, respectively (the

end surface electrodes

5 and 6 are also disconnected from each other);

comparative example 12-2

Wherein the porous body is a porous body having only thickness direction and no conductivity in length direction or/and width direction or/and radial direction (i.e. the pores are through-holes in thickness direction (as shown in 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, etc. are the same as those in the examples);

in comparative example 12-3, the average pore diameter of the porous body was 50 μm.

Example 13 and comparative example thereof

Examples preparation methods:

according to the preparation shown in fig. 41 to 50, the piezoelectric atomizer suitable for a wide operating frequency range in the embodiments, particularly, still having a high atomizing ability at a low frequency, has a piezoelectric vibrating piece 1, a case 10 and a porous body 20 (a metal sponge having a conducting ability in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially maintaining an original form during atomization and in an atomized liquid, and accumulatively and stably maintains the (original) form for more than 2000 hours, a dimensional change width of less than 0.1%, an average pore diameter of 2.0 μm (embodiment 13-1) or 30.0 μm (embodiment 13-2), and a surface porosity of about 75%). The cartridge body 10 and the porous body 20 define a cartridge.

As shown in fig. 41 and 42, the vibrating piece 1 is preferably made by overlapping two piezoelectric

ceramic layers

1a and 1b with each other. On the front and rear main surfaces of the vibrating piece 1,

main surface electrodes

2 and 3 are provided, respectively. The internal electrode 4 is provided between the

ceramic layers

1a and 1 b. As shown by the thick lines in fig. 41, the two

ceramic layers

1a and 1b are polarized in the same thickness direction of the board 1. The side length of the main surface electrode 2 provided on the front side and the side length of the main surface electrode 3 provided on the rear side are slightly smaller than the side length of the vibrating piece 1, respectively, and the ends on the

main surface electrodes

2 and 3 side are connected to the end surface electrode 5 provided on the end surface on the vibrating piece 1 side. Thereby, the

main surface electrodes

2 and 3 are connected to each other. The inner electrode 4 is disposed such that the

main surface electrodes

2 and 3 are substantially symmetrical with respect to the inner electrode 4. One end of the internal electrode 4 is spaced apart from the end face electrode 5. The other end of the internal electrode 4 is connected to an end face electrode 6 provided on the other end face of the vibrating piece 1. Further, an auxiliary electrode 7 is provided on the other end portions of the front side and the rear side of the vibrating piece 1, and is connected to the end face electrode 6. A liquid guide hole 16 is formed in a substantially central portion (or near an edge portion) of the vibrating reed 1 so that spaces of the container partitioned by the vibrating reed 1 communicate with each other.

The vibrating piece 1 is substantially square, and one side of each of the

ceramic layers

1a and 1b is preferably, for example, about 10mm, and the layer thickness is preferably, for example, about 20 μm (about 40 μm in total) and made of PZT type ceramics.

Protective films

8 and 9 are provided on the front and rear side surfaces of the vibrating piece 1 so as to cover substantially the entire respective

principal surface electrodes

2 and 3. The

protective films

8 and 9 are used to prevent the breakage of the vibrating piece 1 when dropped. By applying a polyamideimide type paste resin, a film is formed, and the resin is thermally cured, the

protective films

8 and 9 are formed. It is preferable that the protective film 9 covering the rear main surface upper main surface electrode 3 of the vibrating reed 1 is thicker than the protective film 8 covering the front main surface electrode 2. Thus, as shown in fig. 44, the vibrating piece 1 is bent to be convex in an upward direction, that is, bent upward due to a difference in shrinkage stress of the

protective films

8 and 9 on the front and rear side surfaces generated at the time of thermal curing. For example, for the vibrating piece 1 in which the thickness of the front side protective film 8 is about 7 μm, the thickness of the rear side protective film 9 is about 15 μm, and the length of one side is about 10mm, the bending amount Δ C is about 0.1 mm.

As the

protective films

8 and 9, a known heat-curable adhesive sheet or film may also be used.

The

protective films

8 and 9 on the front and rear side surfaces preferably have the

fractures

8a and 9a and 8b and 9b in the vicinity of the center of the vibrating piece 1 in the diagonal direction. The main-

surface electrodes

2 and 3 are exposed through the

interruptions

8a and 9 a. The auxiliary electrode 7 is exposed through the

interruptions

8b and 9 b. The

interruptions

8a, 8b, 9a and 9b are provided on one of the front and rear sides of the vibrating piece 1. In this example, the

fractures

8a, 8b, 9a and 9b are formed on the front and rear sides of the vibrating piece 1, so that the front and rear sides of the vibrating piece 1 exhibit the same property.

Further, the auxiliary electrodes 7 are not necessarily designed to have a stripe pattern of the same width, and may be provided only at portions corresponding to the

interruptions

8b and 9b, respectively.

The box body 10 is preferably substantially rectangular box-shaped and includes a bottom wall 10a and four side walls 10b to 10e made of a resin material, as shown in fig. 45 to 48. As the resin material, a heat-resistant resin such as LCP (liquid crystal polymer), SPS (syndiotactic polystyrene), PPS (polyphenylene sulfide-polystyrene), epoxy resin, or other suitable resin material is preferably used. Inside two

opposite side walls

10b and 10d of the four side walls 10b to 10e, bifurcated

inner connection portions

11a and 11a of the terminals 11 and bifurcated

inner connection portions

12a and 12a of the terminals 12 are formed, respectively. The

terminals

11 and 12 are formed in the case body 10 by insert molding. The

external connection portions

11b and 12b of the

terminals

11 and 12 are exposed to the outside of the case body 10, extend along the outer surfaces of the

side walls

10b and 10d, and are bent to the bottom surface of the case body 10, respectively.

Four corners inside the case 10 are provided with support portions 10f for supporting the vibrating piece 1 by supporting the respective corners of the lower surface of the vibrating piece 1. The support portions 10f are disposed lower than the exposed surfaces of the

inner connection portions

11a and 12a of the

terminals

11 and 12, respectively. Thus, when the vibrating piece 1 is placed on the supporting portion 11f, the upper surface of the vibrating piece 1 is made slightly lower than the upper surfaces of the inner connecting

portions

11a and 12a of the

terminals

11 and 12, respectively.

A platform 10g is provided near the support portion 10 f. The terrace 10g is lower than the upper surface of the supporting portion 10f so that a desired gap D1 is formed between the upper surface of the terrace and the lower surface of the vibrating piece 1, respectively. Specifically, the gap D1 between the upper surface of each of the stages 10g and the lower surface of the vibrating piece 1 (i.e., the upper surface of each of the supporting portions 10 f) is set to a size capable of preventing the first elastic adhesive 13 from flowing out through the gap due to a surface tension action of the first elastic adhesive as will be described later. In the preferred embodiment, the clearance D1 is preferably set to, for example, about 0.15 mm.

Further, a groove 10h is formed around the bottom wall 10a of the case 10, and the groove 10h is filled with a second elastic adhesive 15. Along the groove 10h, on the inner side thereof, a choke wall 10i is formed. The flow-obstructing wall 10i prevents the second elastic adhesive 15 from flowing onto the bottom surface 10 a. The gap D2 between the upper surface of each flow blocking wall 10i and the lower surface of the vibrating piece 1 (the upper surface of the supporting portion 10 f) is sized so that the second elastic adhesive 15 can be prevented from flowing out due to the surface tension of the second elastic adhesive 15. In the present preferred embodiment, the clearance D2 is set to about 0.20mm, for example.

In the present embodiment, the bottom surface of each groove 10h is lower than the upper surface of the bottom wall 10 a. The depth of the groove 10h is sufficiently small, the groove 10h can be filled with a relatively small amount of the second elastic adhesive 15, and the resin 15 can be rapidly spread to the periphery of the vibrating piece 1. Specifically, the height D3 from the bottom surface of the recess 10h to the lower surface of the vibrating piece 1 (i.e., the upper surface of the supporting portion 10 f) is, for example, about 0.30 mm. The groove 10h and the wall 10i are provided in the outer edge portion of the bottom wall 10a except for the land 10 g. The groove 10h and the wall 10i are preferably formed continuously in the entire outer edge portion of the bottom wall 10a and extend along the periphery of the platform 10g on the inner side.

A plurality of tapered protrusions 10j are formed on the inner surfaces of the sidewalls 10b to 10e of the case body 10. These projections 10j guide the four sides of the piezoelectric vibrating piece 1. Two projections 10j are provided for each of the side walls 10b to 10 e.

In the upper edges of the inner surfaces of the side walls 10b to 10e of the box body 10, a recess portion 10k is formed. The recessed portion 10k prevents the second elastic adhesive from climbing up along the wall surface.

Further, it is preferable that a filling hole 101 communicating with the outside is formed in the bottom wall 10a at a position close to the side wall 10 e.

Positioning projections 10m substantially in an L shape are provided on top surfaces of corners of the side walls 10b to 10e of the box body 10. These protrusions 10m are fitted to corner portions of the porous body 20 to fix the porous body 20. Tapered surfaces 10n are formed on the inner surfaces of the protrusions 10m, respectively, for guiding the porous body 20.

The vibrating piece 1 is put in the case 10, and the corner portion of the vibrating piece 1 is supported by the supporting portion 10 f. As described above, the vibrating piece 1 is bent in the upward direction to be protruded. Therefore, when the vibrating piece 1 is placed on the supporting portion 10f, the outer edge of each corner portion of the vibrating piece 1 is in contact with the supporting portion 10 f. Thus, the distance between the support points increases. The diameter of the circle representing the surface bending mode node increases. Thus, the resonance frequency is reduced, and the atomization capability in the low frequency range is greatly improved. After the vibrating piece 1 is put in the case 10, the first elastic adhesive 13 is coated at four positions shown in fig. 45. Thus, the vibrating piece 1 is fixed to the inner connecting portion 11a of the terminal 11 and the inner connecting portion 12a of the terminal 12. Specifically, the first elastic adhesive 13 is applied at a position between the main surface electrode 2 exposed to the outside through the break 8a and one inner connection portion 11a of the terminal 11, and between the auxiliary electrode 7 exposed to the outside through the break 8b and one inner connection portion 12a of the terminal 12, wherein the

breaks

8a and 8b are on one diagonal line of the vibrating piece 1. Likewise, the first elastic adhesive 13 is also applied at the remaining two opposite positions in the other diagonal direction. In this case, the first elastic adhesive 13 is applied in an elliptical pattern extending along the

sides

10b and 10d of the case body 10, respectively. However, the pattern of the coating is not limited to the above-described oval shape. For the first elastic adhesive 13, for example, a small adhesive having a low Young's modulus after curing, such as a urethane-based adhesive having a Young's modulus of about 3.7 × 106Pa, may be used. After coating, the first elastic adhesive 13 is heated to be cured.

After the first elastic adhesive 13 is cured, the conductive adhesive 14 is coated in an oval pattern or an elongated pattern on the first elastic adhesive 13, crossing the pattern of the first elastic adhesive, respectively. The type of the conductive adhesive 14 is not particularly limited. In the preferred embodiment, a urethane conductive paste having a Young's modulus of about 0.3X 109Pa after curing is preferably used. After coating, the conductive adhesive 14 is heated to cure it. Thus, the main surface electrode 2 is connected to the internal connection portion 11a of the terminal 11, and the auxiliary electrode 7 is connected to the internal connection electrode 12a of the terminal 12. The coating pattern of the conductive adhesive 14 is not limited to the above-described oval shape. The coating pattern may have any suitable distribution as long as the pattern can connect the main surface electrode 2 with the inner connection portion 11a through the upper surface of the first adhesive 13 and also connect the auxiliary electrode 7 with the inner connection portion 12a through the upper surface of the first elastic adhesive 13. The first elastic adhesive forms an arcuate pattern. Thus, the conductive adhesive 14 has an arch shape. Therefore, the conductive adhesive 4 avoids the path between the main surface electrode 2 and the inner connecting portion 11a from being excessively short (see fig. 47). Therefore, the presence of the first elastic adhesive 13 relaxes the shrinkage stress generated when the conductive adhesive 14 is cured. Thereby, the influence of the contraction stress on the piezoelectric vibrating piece 1 is reduced.

After the conductive adhesive 14 is coated and cured, a second elastic adhesive 15 may be coated to fill a gap between the outer edge of the vibrating piece 1 and the inner edge of the case 10 and further strengthen. The second elastic adhesive 15 is applied in an annular pattern and cured by heating. It is preferable to use a thermosetting adhesive having a small young's modulus after curing (for example, about 3.0 × 105Pa) as the second elastic adhesive 15. In this embodiment, a silicone adhesive is preferably used.

When the second elastic adhesive 15 is applied, a part of the adhesive may climb up along the side walls 10b to 10e of the housing 19, bonding the top surfaces of the side walls. In the case where the second elastic adhesive 15 is a sealant having a releasing (releasing) property, such as a silicone-based adhesive, the bonding strength generated between the porous body 20 and the top surfaces of the side walls 10b to 10e is reduced when the porous body 20 is bonded to the top surfaces in the subsequent step. However, in the present embodiment, a recessed portion 10k that prevents the second elastic adhesive 15 from rising upward is provided on the inner surface upper edges of the side walls 10b to 10 c. Thus, the second elastic adhesive 15 is prevented from adhering to the top surfaces of the sidewalls 10b to 10 e.

As described above, after the vibrating piece 1 is fixed to the case 10, the porous body 20 is adhered to the top surface of the side wall of the case 10 by the adhesive 21. The porous body 20 is substantially flat plate-shaped and is made of the same material as the case 10. The outer edge of the porous body 20 is engaged with the tapered inner surface 10n of the positioning projection 10m provided on the top surface of the side wall of the case body 10. Therefore, the porous body 20 is accurately positioned. By bonding the porous body 20 and the case 10, a liquid storage space is formed between the porous body 20 and the vibrating piece 1. A plurality of atomized pores 22 are formed in the porous body 20.

Thus, a surface-mounted piezoelectric atomizer was produced.

In the piezoelectric atomizer of the present embodiment, an alternating voltage (AC signal or rectangular wave signal) is applied between the

terminals

11 and 12 to cause the vibration plate 1 to undergo surface bending vibration. The piezoelectric ceramic layer having the same polarization direction as the electric field direction contracts in the planar direction. The piezoelectric ceramic layer having a polarization direction and an electric field direction opposite to each other expands in a planar direction. In short, the vibrating piece 1 is bent in the thickness direction.

In the present embodiment, the vibrating piece 1 is a laminated structure made of ceramics. Two kinds of mode regions (ceramic layers) arranged in series in the thickness direction vibrate in opposite directions. Therefore, the displacement is increased, that is, the atomizing ability is increased, as compared with the unimorph type vibrating piece.

As described above, the vibrating piece 1 is bent upward with respect to the supporting portion 20f due to the

protective films

8 and 9 on the front and rear side surfaces. Thus, the outer edge of the vibrating piece 1 is in contact with the supporting portion 20 f. Thus, an area (a diameter of a circle representing a node of the surface bending mode) where the vibrating piece 1 freely moves during the surface bending mode remains unchanged. Furthermore, the distance between the support points remains relatively large. Thus, the resonance frequency is reduced, and the atomization ability in the low frequency range is greatly increased. Therefore, the dispersion of the atomizing ability (characteristic) can be greatly reduced.

The invention is not limited to the preferred embodiments described above. Many changes and modifications may be made to the invention without departing from the spirit and scope thereof.

In the above preferred embodiment, the

protective films

8 and 9 are provided on the front and rear side surfaces of the vibrating piece 1, and the thickness of the rear side protective film 9 is larger than the thickness of the front side protective film 8. Therefore, the vibrating piece 1 is bent upward. Only the protective film 9 of the back-side surface may be provided without including the protective film 8 of the front-side surface.

Further,

protective films

8 and 9 may be provided on the front and rear side surfaces of the vibrating piece 1, wherein the curing shrinkage stress of the rear side protective film 9 is larger than that of the front side protective film 8. Thereby, the vibrating piece 1 is bent upward. For example, materials different from each other may be used as the

protective films

8 and 9 on the front and rear side surfaces. That is, a material having a linear expansion coefficient of about 1.0X 10-5[1/K ] may be used as the front side protective film 8, and a material having a linear expansion coefficient of about 1.0X 10-4[1/K ] may be used as the rear side protective film 9. Further, for example, the curing temperature of the front side protective film 8 may be about 60 ℃ and the curing temperature of the rear side protective film 9 may be about 110 ℃.

The piezoelectric vibrating piece 1 of the above preferred embodiment is formed by laminating two piezoelectric ceramic layers. The vibrating piece 1 may be formed by stacking three or more piezoelectric ceramic layers.

The cartridge of the present invention is not limited to one including a cartridge 10 having a recessed cross section, and a porous body 20 bonded to the cartridge 10 for covering an opening on the upper surface of the cartridge 10. The case of the preferred embodiment of the present invention may include a cap-shaped case having an opening on a bottom surface and a bottom plate adhered to a lower surface of the case. The vibrating piece 1 is arranged inside said housing.

Comparative example the same as example 13-1 was conducted except that the following differences were used:

comparative example 13-1

Except that the vibrating piece 1 is formed by removing the internal electrode 4 (i.e., the

ceramic layers

1a and 1b are combined into a single layer of ceramic layer 1), and the two

main surface electrodes

2 and 3 are disconnected and connected to the end surface electrode 5 and the end surface electrode 6 provided at the end opposite to the end surface electrode 5 (the

end surface electrodes

5 and 6 are disconnected from each other), respectively, the same as in the embodiment:

comparative example 13-2

Comparative example 13-3

Wherein the porous body is ceramic porous body (porosity is about 75%, breakage, crack, unstable form, accumulated stable keeping of its (original) form time is less than 2 hours, size change amplitude is more than 30%).

Example 14 and comparative example thereof

Examples preparation methods:

based on the embodiment 13-1, only the case (container) 10, the piezoelectric vibrating piece (piezoelectric element) 1 and the fixing method thereof are changed as shown in fig. 52 to 54 (embodiment 14-1), 55 to 57 (embodiment 14-2), 58 to 59 (embodiment 14-3) and 60 to 61, and the others are not changed.

As shown in fig. 60 and 61, the piezoelectric vibrating piece (piezoelectric element) 1 is preferably made by depositing two piezoelectric

ceramic layers

1a and 1b, and includes

principal plane electrodes

2 and 3 provided on two principal planes, and an internal electrode 4 provided between the

ceramic layers

1a and 1 b. As shown by the thick lines in the figure, the two

ceramic layers

1a and 1b are polarized in one thickness direction. It is preferable that the upper main surface electrode 2 and the bottom main surface electrode 3 are slightly shorter than the length of the side surface of the piezoelectric vibrating piece (piezoelectric element) 1, and one end portions thereof are connected to an end surface electrode 5 provided on one end surface of the piezoelectric vibrating piece (piezoelectric element) 1. Thereby connecting the two main

planar electrodes

2 and 3 to each other. The internal electrode 4 is substantially symmetrical to the

principal plane electrodes

2 and 3, and one end of the internal electrode 4 is separated from the end face electrode 5, and the other end thereof is connected to an end face electrode 6 provided on the other end face of the piezoelectric vibrating piece (piezoelectric element) 1. In addition, on both surfaces of the other end of the piezoelectric vibrating piece (piezoelectric element) 1, auxiliary electrodes 7 having a small width are provided for electrical connection to the end face electrodes 6. A liquid guide hole 16 is formed in a substantially central portion (or near an edge portion) of the piezoelectric vibrating reed 1 so that spaces of the container partitioned by the vibrating reed 1 communicate with each other.

On the upper and bottom surfaces of the piezoelectric vibrating piece (piezoelectric element) 1,

resin layers

8 and 9 are provided to cover the principal

planar electrodes

2 and 3, respectively. Resin layers 8 and 9 are provided to improve the strength of breakage. On the upper and

bottom resin layers

8 and 9, in the vicinity of the corners of the piezoelectric vibrating piece (piezoelectric element) 1 diagonally opposed to each other, there are provided the

discontinuities

8a and 9a exposing the

principal plane electrodes

2 and 3 and the

discontinuities

8b and 9b exposing the auxiliary electrode 7.

In addition, the

interruptions

8a, 8b, 9a, and 9b may be provided only on one of the upper and lower surfaces. However, in order to avoid the directionality of the top and bottom, according to the present embodiment, the

interruptions

8a, 8b, 9a, and 9b are provided on both surfaces.

The auxiliary electrode 7 is not necessarily a strip electrode having a predetermined width, and it may be provided only at positions corresponding to the

interruptions

8b and 9 b.

According to this embodiment, PZT ceramic layers having a size of about 10mm × 10mm × 20 μm are preferably used as the

ceramic layers

1a and 1b, and polyamideimide resins having a thickness of about 5 μm to 10 μm are preferably used as the resin layers 8 and 9.

It is preferable that the container 10 made of an insulating material such as ceramics and resin is formed in a substantially rectangular box shape having a bottom wall 10a and four side walls 10b to 10 e. In forming the resin container 10, it is preferable to use heat-resistant resin such as LCP (liquid crystal polymer), SPS (syndiotactic polystyrene), PPS (polyphenylene sulfide), and epoxy resin. In the inner peripheries of the four side walls 10b-10e, a pattern ring layout forms a step 10 f. On the step 10f in the two opposing

side walls

10b and 10d, the

inner connections

11a and 12a of the pair of

end portions

11 and 12 are exposed. The

end portions

11 and 12 are given in the container 10 by insert molding in which the

external connections

11b and 12b protruding outside the container 10 are bent along the outer surfaces of the

side walls

10b and 10d toward the bottom wall 10a of the container 10. According to this embodiment, the

inner connections

11a and 12a of the

ends

11 and 12, respectively, are preferably bifurcated. These bifurcated

inner connections

11a and 12a are located near the corners of the container 10.

(embodiment 14-1) as shown in fig. 53 and 54, four corners in the step 10f are provided with support members 10g provided at a position lower by one step than the step 10f for supporting the four corners of the piezoelectric vibrating piece (piezoelectric element) 1. Therefore, when the piezoelectric vibrating piece (piezoelectric element) 1 is placed on the support member 10g, the upper surface of the piezoelectric vibrating piece (piezoelectric element) 1 substantially coincides in height with the upper surfaces of the

internal connections

11a and 12a of the

end portions

11 and 12. Wherein the support member 10g is substantially triangular in plan view, and four support members 10g are provided on the same ring.

In addition, the bottom wall 10a is provided with a charging hole 10h disposed therein which communicates with the outside.

The piezoelectric vibrating piece (piezoelectric element) 1 is housed in the container 10 so as to be fixed to the support member 10g or its vicinity at four positions with the elastic support material 13. Namely, an elastic supporting material 13 is added between the main electrode 2 exposed in the discontinuity 8a and the inner connection 11a of the tip portion 11, and between the auxiliary electrode 7 exposed in the discontinuity 8b diagonally opposite to the discontinuity 8a and the inner connection 12a of the tip portion 12. The remaining two positions diagonally opposite to each other are also coated with the elastic support material 13. In addition, the resilient support material 13 is applied in a longitudinally aligned substantially elliptical shape. The coating shape is not limited to a substantially elliptical shape. As the elastic support material 13, for example, urethane adhesive having a young's modulus of 3.7 × 106Pa after curing can be used. Since the viscosity of the elastic supporting material 13 before curing is high (for example, 50 to 120dPa · s), the elastic supporting material 13 is made very difficult to spread, and also, after it is applied, the elastic supporting material 13 is made difficult to flow down to the bottom wall 10a through the gap between the piezoelectric vibrating piece (piezoelectric element) 1 and the container 10. After the elastic support material 13 is added, it is heated and cured.

In addition, as a method of fixing the piezoelectric vibrating piece (piezoelectric element) 1, the elastic support material 13 may be added by a dispenser or the like after the piezoelectric vibrating piece (piezoelectric element) 1 is loaded in the container 10, or the piezoelectric vibrating piece (piezoelectric element) 1 may be loaded in the container 10 in a state where the piezoelectric vibrating piece (piezoelectric element) 1 has been previously coated with the elastic support material 13.

The position of application of the elastic supporting material 13 may preferably be as close as possible to the supporting member 10 g. The elastic supporting material 13 in fig. 53 is added at a position slightly separated from the supporting member 10 g. This is because the conductive glue 14 is positioned against the elastic support material 13. Therefore, when the electrodes of the piezoelectric vibrating piece (piezoelectric element) 1 and the

internal connections

11a and 12a are provided at the corners of the container 10, the application position of the elastic support material 13 can also be made at the support member 10 g.

After the elastic supporting material 13 is cured, the conductive paste 14 is preferably applied in a substantially elliptical shape on the elastic supporting material 13 applied in a substantially elliptical shape so as to intersect the elastic supporting material 13 to connect the main planar electrode 2 and the inner connection 11a of the terminal portion 11 together and also to connect the auxiliary electrode 7 and the inner connection 12a of the terminal portion 12 together. As the conductive paste 14, for example, urethane conductive paste having a young's modulus of about 0.3 × 109Pa after curing can be used. After being applied to the conductive paste 14, it is heated and cured. The shape of the conductive paste 14 is not limited to the substantially elliptical shape. The coating shape may be any shape that can sufficiently make connection between the main planar electrode 2 and the internal connection 11a, and the auxiliary electrode 7 and the internal connection 12a by being located alongside the elastic supporting material 13.

After the conductive paste 14 is applied and cured, an elastic sealing agent 15 is applied to the entire periphery of the piezoelectric vibrating piece (piezoelectric element) 1 and the gap between the inner periphery of the container 10, and further strengthened. After the elastomeric sealant 15 is applied in a circular arrangement, it is heated and cured. As the elastic sealing agent 15, for example, a silicone adhesive having a young's modulus of 3.0 × 105Pa after curing is used.

After the piezoelectric vibrating reed (piezoelectric element) 1 is fixed to the case 10 as described above, the porous body 20 is bonded to the upper opening of the case 10 with the adhesive 21. The porous body 20 is preferably made of the same material as the container 10. By bonding the porous body 20, a liquid storage space is formed between the porous body 20 and the piezoelectric vibrating piece (piezoelectric element) 1. The porous body 20 has a plurality of atomization holes 22 formed therein.

In the above manner, the surface-mount type piezoelectric atomizer is completed.

In the piezoelectric atomizer of the present embodiment, when a predetermined alternating voltage is applied between the

end portions

11 and 12, the piezoelectric vibrating piece (piezoelectric element) 1 vibrates in an area bending mode. The piezoelectric ceramic layer polarized in the same direction as the electric field contracts in the planar direction, and the piezoelectric ceramic layer polarized in the opposite direction to the electric field expands in the planar direction, so that the entire structure is bent in the thickness direction.

According to the present embodiment, since the piezoelectric atomization sheet 30 is a deposited ceramic structure, and the two vibration regions (ceramic layers) sequentially arranged in the thickness direction vibrate in the opposite directions to each other, a larger displacement, i.e., a larger atomization amount can be obtained as compared with a single-piezoelectric wafer type piezoelectric vibrating piece (piezoelectric element).

FIGS. 56 to 57 show a piezoelectric atomizer according to example 14-2. According to this embodiment, the bases 10i are provided at four corners of the case, and the projections 10j projected therefrom are provided on the upper surface of the bases 10i, so that the bottom surfaces of the corners of the piezoelectric vibrating piece (piezoelectric element) 1 are substantially supported by the projections 10 j.

In this case, the contact area between the piezoelectric vibrating piece (piezoelectric element) 1 and the protrusion 10j is greatly reduced, so that the vibration is not damped, and the fogging characteristic (amount) is improved.

In addition, the steps 10f in the

side walls

10c and 10e are omitted in fig. 57.

According to embodiment 14-2, the porous body 20 may be provided with projections on the bottom surface and opposed to the projections 10j of the container 10 so as to sandwich the piezoelectric vibrating piece (piezoelectric element) between the projections from the upper and lower directions.

FIGS. 58 and 59 show a piezoelectric atomizer according to example 14-3 (the porous body 20 above the container mouth is not shown in order to show the internal structure well).

According to the present embodiment, although the step 10k is provided along the entire circumference of the inside of the case, inwardly extending support members 101 are provided at the four corners of the step 10 k. The step 10k and the support member 101 have the same height. The piezoelectric vibrating reed (piezoelectric element) 1 is bonded to a film 30 (piezoelectric vibrating reed (piezoelectric element) 1+ film) having a size larger than that of the piezoelectric vibrating reed (piezoelectric element) 1. Four corners of the piezoelectric vibrating piece (piezoelectric element) 1 are placed on the supporting member 101 while four sides thereof are not provided to be mounted on the step 10 k. The film body 30 may be made of an elastic film that does not interfere with the flexural vibration of the piezoelectric vibrating piece (piezoelectric element) 1, and for example, polyimide may be used. The entire periphery of the film body 30 is bonded or fused to the step 10k and the support member 101 of the container 10.

In this case, since the film body 30 functions to fix the piezoelectric vibrating piece (piezoelectric element) 1 to the case 10 and hermetically fix the case 10, the elastic support material 13 or the conductive paste 14 can be omitted. Further, the vibration of the piezoelectric vibrating reed (piezoelectric element) 1 is not damped by the application of the elastic sealing agent 15 in an excessive amount, and the amount of fogging is not increased.

In addition, the film body 30 is not limited to a substantially rectangular shape bonded to the entire surface of the piezoelectric vibrating piece (piezoelectric element) 1, and may be a frame shape bonded only to the periphery of the piezoelectric vibrating piece (piezoelectric element) 1. The film body 30 is not limited to being adhered only to the bottom surface of the piezoelectric vibrating piece (piezoelectric element) 1, and it may be adhered to the upper surface or both surfaces.

According to the present embodiment, in order to stably and reliably support the four corners of the piezoelectric vibrating piece (piezoelectric element) 1, convex parts may be formed on the bottom surface of the porous body 20 so that the corners of the piezoelectric vibrating piece (piezoelectric element) 1 may be pushed against the respective supporting parts 101 by this convex part.

Although the end portions provided in the container 10 are omitted in fig. 58 and 59, they are substantially the same as fig. 52 or 57. In this case, it may be necessary to connect the interconnection of the end portions and the electrodes of the piezoelectric vibrating piece (piezoelectric element) 1 only by the conductive paste.

The present invention is not limited to the above-described embodiments, and can be modified within the spirit and scope of the invention.

The piezoelectric atomization sheet 30 of each preferred embodiment is manufactured by depositing two piezoelectric ceramic layers; or each piezoelectric vibrating piece (piezoelectric element) may be fabricated by depositing three or more piezoelectric ceramic layers.

Further, the piezoelectric vibrating piece (piezoelectric element) is not limited to the deposition structure of the multilayer piezoelectric ceramic layer. A piezoelectric vibrating piece (piezoelectric element) in which a piezoelectric plate is bonded to one surface or both surfaces of a metal plate may be used.

When the four sides of the electric vibration plate (piezoelectric element) 1 are supported on the case, and when the four corners of the electric vibration plate (piezoelectric element) 1 are supported thereon according to the present embodiment, in both cases, the electric vibration plate (piezoelectric element) 1 vibrates in the area bending mode. However, as shown in fig. 51a and 1b, the vibration nodes are different. That is, when the four sides of the electric vibration plate (piezoelectric element) 1 are supported as shown in fig. 51a, the electric vibration plate (piezoelectric element) 1 vibrates with the inscribed circle as a node, and when the four corners of the electric vibration plate (piezoelectric element) 1 are supported as shown in fig. 51B, the electric vibration plate (piezoelectric element) 1 vibrates with the circle substantially circumscribing the electric vibration plate (piezoelectric element) 1 as a node. Therefore, the latter is the largest in displacement at the center of the circle as compared with the former, and a larger atomization amount (capability) can be obtained. Further, the latter electric vibrating reed (piezoelectric element) 1 has a larger displacement area and thus a lower vibration frequency than the former, and thus, even in the electric vibrating reed (piezoelectric element) 1 having the same external dimensions, it is possible to realize light heat generation, a lower temperature (rise), a lower noise, and less susceptibility to damage.

Fig. 51a and 51b show a comparison of four sides supporting the electric vibration piece (piezoelectric element) 1 in the above-described different manners. Even in comparison with the case of supporting both sides of the electric vibration piece (piezoelectric element) 1, in the supporting structure of the present preferred embodiment, the restraining force to the electric vibration piece (piezoelectric element) 1 is extremely reduced, so that the above-described many advantages can be achieved.

Comparative example the same as example 14-1 was conducted except that the following differences were used:

comparative example 14-1

ceramic layers

1a and 1b are combined into a single layer of ceramic layer 1), and the two

main surface electrodes

end surface electrodes

5 and 6 are disconnected from each other);

comparative example 14-2

comparative example 14-3, the porous body was a polyester sponge (average pore diameter 2.0 μm, porosity about 90-95%, deformation in liquid at once, breakage during atomization, dimensional change greater than 30%, difficulty in retaining the original form);

Comparative example 14-4

The fixing manner of the piezoelectric vibrating piece (piezoelectric element) 1 in the case (container) 10 is changed from four corner fixing (support) to four whole edge fixing (support).

Example 15 and comparative example thereof

Examples preparation methods:

the preparation shown in FIGS. 62-70 is suitable for use in the examples: a piezoelectric atomizer whose atomizing ability is little affected by temperature change. The atomizer mainly comprises a piezoelectric atomizer 1, a box body 10 and a porous body 20 (a ceramic sponge body which has conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and basically keeps the original shape in the atomizing process and the atomized liquid, the accumulated and stable time for keeping the original shape is more than 50 hours, the size change range is less than 1 percent, the average pore diameter is 0.5 mu m, and the surface porosity is 70 percent). Here, the housing includes a case 10 and a porous body 20.

Referring to fig. 63, a piezoelectric atomization sheet 1 according to embodiment 15 includes a square metal plate 2 (a liquid guide hole 16 is formed in the metal plate 2 to communicate with a space partitioned by the piezoelectric atomization sheet 1) and a piezoelectric element 3 adhered to a position near a corner of a top surface of the metal plate 2. The piezoelectric element 3 is formed in a rectangular shape. However, the piezoelectric element 3 may be square.

The piezoelectric element 3 is made of piezoelectric ceramics such as PZT. The front and rear surfaces of the piezoelectric element 3 are integrally provided with

electrodes

3a and 3b (the electrode 3b on the rear surface is not shown). The alternating signal is applied to both of the

electrodes

3a and 3b on the front and rear surfaces, so that the piezoelectric element 3 expands or contracts in the planar direction. Preferably, the metal disc 2 has good conductivity and elasticity. For example, the metal disc 2 may be made of phosphor bronze or 42Ni or 304 stainless steel. Here, the metal disc 2 is made of 42Ni, and has a thermal expansion coefficient similar to that of ceramics (for example, PZT) having dimensions of 7.6mm, 7.6mm, and 0.03mm in the vertical, horizontal, and thickness directions, respectively. Further, the piezoelectric element 3 is made of a PZT disc having dimensions of 6.8mm, 5.6mm, and 0.04mm in the vertical, horizontal, and thickness directions, respectively.

The box body 10 is in a square box shape having a bottom wall 10a, four side walls 10b to 10e, and is made of a resin material, as shown in fig. 66 to 68. Preferably, the resin material is a heat-resistant resin such as LCP (liquid crystal polymer), SPS (syndiotactic polystyrene), PPS (vulcanized polyphenylene ether), or epoxy. Of the four side walls 10b to 10e, at two places near the corners in the

opposite side walls

10b and 10d, the bifurcated inner connecting

portions

11a and 12a of the

ends

11 and 12 are exposed. The ends 11 and 12 are inserted and molded in the case 10. The

external connection parts

11b and 12b exposed to the outside of the case body 10 are bent to the bottom surface of the case body 10 along the outer surfaces of the sidewalls 10b and 10d of the

ends

11 and 12. (refer to FIG. 67-B).

In the four inner corners of the case 10, support portions 10f for supporting the bottom surfaces of the corners are formed. The supporting portion 10f is formed lower by one step than the exposed portions of the

internal connection portions

11a and 12a of the

ends

11 and 12. Therefore, when the piezoelectric atomization sheet 1 is placed on the support portion 10f, the top surface of the piezoelectric atomization sheet 1 has the same height as the internal connection surfaces 11a and 12a of the

ends

11 and 12, or the top surface of the piezoelectric atomization sheet 1 has a height slightly lower than the internal connection surfaces 11a and 12a of the

ends

11 and 12.

A urethane receiving step 10g having a height lower than the supporting portion 10f is formed on the inner periphery of the inner connecting

portions

11a and 12a of the

ends

11 and 12 in the vicinity of the supporting portion 10f at a predetermined interval from the bottom surface of the piezoelectric atomization sheet 1. The interval between the top surface of the urethane receiving step 10g and the bottom surface of the piezoelectric atomization sheet 1 (the top surface of the support portion 10 f) may be set to a size that suppresses the outflow of the elastic adhesive 13 by the surface tension of the elastic adhesive 13, which will be described later.

Further, around the bottom wall 10a of the case 10, a groove 10h for filling an elastic sealing material 15, which will be described later, is placed. In the groove 10h, a wall 10i for placing outflow is placed lower than the support portion 10 f. The outflow preventing wall 10i restricts the outflow of the elastic sealing material 15 onto the bottom wall 10 a. The interval between the top surface of the wall 10i and the bottom surface of the piezoelectric atomization sheet 1 (the top surface of the support portion 10 f) is set to a size that prevents the outflow thereof by the surface tension of the elastic sealing material 15.

According to embodiment 15, the groove 10h is formed to have a shallow depth such that the bottom surface of the groove 10h is at a position higher than the constant surface of the bottom wall 10a, and the groove 10h may be filled with a small amount of the sealing material 15 to firmly enclose the outer ring. The groove 10h and the wall 10i are disposed around the bottom wall 10a excluding the polyurethane receiving step 10 g. Alternatively, the groove 10h and the wall 10i may be continuously disposed on the entire bottom wall 10a by an inner circle of the urethane receiving step 10 g. Further, end portions (four corners) of the groove 10h which are in contact with the supporting portion 10f and the urethane receiving step 10g may be formed wider than other portions. Therefore, the excess adhesive 15 is accommodated by the wide portion, and the adhesive 15 is prevented from flowing onto the piezo aerosol sheet 1.

At two positions of two adjacent corners near the center of the piezoelectric atomization sheet 1 (not the support portion 10f), a receiving base 10p for preventing excessive vibration of the piezoelectric atomization sheet within a predetermined amount is integrally protruded from the bottom wall 10a of the case.

In the inner surfaces of the side walls 10b to 10d of the case body, strip-like projecting portions 10j for guiding the four sides of the piezoelectric atomization sheet 1 are placed. Two projecting portions 10j are respectively disposed on the side walls 10b to 10 e.

In the inner surface of the top edge of the side walls 10b to 10e of the case 10, there are formed opening portions 10k for placing the elastic adhesive material 15 to rise.

Further, on the bottom wall 10a in the vicinity of the side wall 10e, a filling hole 10l communicating with the outside is provided.

On the fixing surfaces of the corners of the side walls 10b to 10e of the case body 10, L-shaped positioning projections for supporting and fixing the four corners of the porous body 20 are formed. On the inner surface of the convex portion 10m, a strip-like surface 10n for guiding the porous body 20 is formed.

Here, an assembling method of the piezoelectric atomizer having the above-described structure is described.

First, the piezoelectric atomization sheet 1 is placed in the case 10 such that the metal disk 2 faces the bottom wall, and the four corners of the piezoelectric atomization sheet 1 are supported by the support portions 10 f. In this case, the periphery of the piezoelectric atomization sheet 1 is guided by the strip-like convex portions 10j placed on the inner surfaces of the side walls 10b to 10e of the case body 10. Therefore, the corners of the piezoelectric atomization sheet 1 are accurately placed on the support portions 10 f.

After the piezoelectric atomization sheet 1 is placed in the case 10, an elastic adhesive 13 is applied to both portions of the piezoelectric atomization sheet 1 near the adjacent corners, thereby temporarily fixing the piezoelectric atomization sheet 1 (the metal disk 2) to the case 10. Specifically, the metal disc 2 is coated with an elastic adhesive 13, as shown in fig. 64. The conductive adhesive coated on the elastic adhesive 13 prevents a contact state with the metal disc 2. When it is necessary to enhance the strength of temporarily fixing the piezoelectric atomization sheet 1, the elastic adhesive 13 may be applied to the two remaining portions in the vicinity of the adjacent corners of the piezoelectric atomization sheet 1. Here, the elastic adhesive 13 is linearly applied to the outer side surface of the piezoelectric atomization sheet 1. But the coating shape is not limited thereto. As the elastic adhesive 13, preferably, an adhesive having a young's modulus equal to or less than 500 × 106Pa after setting can be used. According to a preferred embodiment, a polyurethane-based adhesive with a Young's modulus of 3.7X 106Pa is used. After the elastic adhesive 13 is applied, heating and setting processes are performed.

After the elastic adhesive 13 is applied, the elastic adhesive 13 may flow through the space between the piezoelectric atomization sheet 1 and the

end

11 or 12 and fall onto the bottom wall 10 a. However, as shown in fig. 64, a urethane receiving step 10g is placed on the lower portion of the piezoelectric atomization sheet 1 in the area where the elastic adhesive 13 is coated. The distance between the polyurethane receiving step 10g and the piezoelectric atomization sheet 1 is set narrow. Therefore, the flow of the elastic adhesive 13 is prevented by the surface tension of the elastic adhesive 13, thereby preventing the outflow onto the bottom wall portion 10 a. In addition, since the space is firmly filled, the surplus elastic adhesive 13 is formed as a convex portion between the piezo aerosol sheet 1 and the

end

11 or 12. A layer of elastic adhesive 13 is present between the polyurethane receiving step 10g and the piezoelectric atomization sheet 1. Therefore, the piezo aerosol sheet 1 is not limited to an unnecessary level.

After the elastic adhesive 13 is set, the conductive adhesive 14 is applied to the upper portion of the elastic adhesive 13. Various conductive adhesives may be used. According to a preferred embodiment, a polyurethane-based conductive paste having a young's modulus of 0.3 × 109Pa is used after solidification. After the conductive adhesive 14 is applied, the conductive adhesive 14 is heated and solidified, thereby electrically connecting the metal disc 2 to the internal connection portion 11a of the terminal 11 and electrically connecting the surface electrode 3a of the piezoelectric element 3 to the internal connection portion 12a of the terminal 12. Specifically, since the piezoelectric element 3 is located at a position near one corner of the metal disc 2, the application length of the conductive adhesive 14 electrically connecting the surface electrode 3a of the piezoelectric element 3 to the internal connection portion 12a of the terminal 12 can be made shorter. Then, under the conductive adhesive 14, there is an elastic adhesive 13 coating the metal disc 2, thereby preventing the conductive adhesive 14 from directly contacting the metal disc 2. The application shape of the conductive adhesive 14 is not limited, and the surface electrode 3a of the metal disc 2 or the piezoelectric element 3 is connected to the internal connection portion 11a of the terminal 11 or the internal connection portion 12a of the terminal 12 through the fixed surface of the elastic adhesive 13. The elastic adhesive 13 is protruded and thus the conductive adhesive 14 is coated on the top surface of the elastic adhesive 13 like an arc, i.e., the coated conductive adhesive 14 is not the shortest route. Therefore, the setting shrinkage stress of the conductive adhesive 14 is reduced by the elastic adhesive 13, thereby suppressing its influence on the piezoelectric atomization sheet 1.

After the conductive adhesive 14 is applied and set, an elastic sealing material 15 is applied to the entire periphery of the piezoelectric atomization sheet 1 and the space between the inner rings of the case 10. After the elastic sealing material 15 is circumferentially applied, the elastic sealing material 15 is heated and solidified. A heat-set adhesive having a young's modulus equal to or less than 30 x 106Pa after setting and having a low degree of viscosity before setting can be used. Here, a silicon-based adhesive is used as the elastic sealing material 15. In the case where the inner ring of the case 10 faces the periphery of the piezoelectric atomization sheet 1, the groove 10h is placed to be filled with the elastic sealing material 15. In the storage groove 10h, a wall 10i for preventing flow with dryness is placed. The elastic member sealing material 15 enters the groove 10h and spreads all around. Between the piezoelectric atomization sheet 1 and the wall for preventing flow 10i, a space is formed which prevents the flow thereof by the surface tension of the elastic sealing material. The elastic sealing material 15 is prevented from flowing onto the bottom wall 10 a. Between the wall 10i and the piezo aerosol 1, a layer of elastic sealing material 15 is present. Therefore, suppression of vibration of the piezoelectric atomization sheet 1 can be prevented.

As described above, after the piezoelectric atomization sheet 1 is attached to the case 10, the porous body 20 is bonded to the top surface of the side wall of the case 10 with the adhesive 21. The plane-like porous body 20 is formed of the same material as the cartridge body. The periphery of the porous body 20 is engaged with the inner strip-like surface 10n of the positioning projection 10m projecting on the top surface of the side wall of the case body 10, whereby accurate positioning is achieved. The porous body 20 is bonded to the case 10, so that a liquid space is formed between the porous body 20 and the piezoelectric atomization sheet 1. The porous body 20 has a plurality of atomization holes 22.

As described above, a surface mount piezoelectric atomizer can be assembled.

According to embodiment 15, a predetermined alternating signal (AC signal or square wave signal) is applied between the

terminals

11 and 12, thereby expanding and contracting the piezoelectric element 3 in the planar direction without expanding and contracting the metal disc 2. Therefore, the piezoelectric atomization sheet 1 as a whole vibrates in bending. The elastic sealing material 15 seals the gap between the front side and the rear side of the piezoelectric atomization sheet 1. Thus, atomization of the liquid may occur through the atomization holes 22.

In examples 15-1, 2, 3, and 4, 10%, 30%, 50%, and 80% of the area of the porous body 20 having the micropores coincides with the piezoelectric active region on the ultrasonic atomization sheet 1 (the surface area of the middle piezoelectric element 3 is adjusted) as viewed in the thickness direction and as viewed in the thickness direction.

Comparative example the same as example 15-2 was conducted except that the following differences were used:

comparative example 15, in which the porous body is a porous body having only a thickness direction and no conductivity in a length direction or/and a width direction or/and a radial direction (i.e., the pores are through-holes in the thickness direction (as shown by 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, and the like are the same as those in the example);

example 16 and comparative example thereof

Example 16-1 (shown in FIGS. 71-1 and 2) preparation method:

1) manufacturing a piezoelectric ceramic plate 1 (such as lead zirconate titanate with the length of 20mm, the width of 10mm and the thickness of 1mm or other arbitrary piezoelectric materials), coating metal silver on two opposite surfaces with the largest area as surface electrodes 11 (not marked in the figure and positioned below the porous body 3), and respectively welding wires/leads 4 on the two electrodes to obtain an element 1;

2) the piezoelectric element 1 thus fabricated is mounted (fixed) on a vibrating plate 2 (bonded by an adhesive, the distance of three sides of the piezoelectric ceramic plate from the edge of the vibrating plate is, for example, 1mm) to obtain an element 2, such as a plate made of a metal sheet (e.g., 304 stainless steel or other metal material) having a length of 60mm, a width of 12mm and a thickness of 1 mm;

3) a porous body 3 (for example, a ceramic sponge having a length of 20mm and a width of 10mm and a thickness of 0.5 mm) having conductivity in the thickness direction and the width direction and/or the radial direction and substantially retaining its original form during atomization and in an atomized liquid, which is cumulatively and stably retained in its (original) form for a period of time longer than 100 hours, has a dimensional change width of less than 5%, an average pore diameter of 4.5 μm and a porosity of 60%) is mounted (fixed) on the surface of a piezoelectric element 1 in the above element 2 (by bonding with an adhesive, the distance between each side of the porous body and the edge of the piezoelectric element is about 0mm, to obtain an element 3, that is, example 16-1;

Example 16-2 (as shown in FIGS. 71-3 and 4, 50 of the drawings indicates a wall of a

case

5, and 51 indicates an elastic adhesive for fixation):

4) in the above-mentioned element 3, a groove 21 (for example, 2mm wide, which allows the space between two sides of the case separated by the vibrating plate to communicate with each other) is formed in the middle of about half of the portion of the vibrating plate not covered with the piezoelectric ceramic plate, the element is mounted (fixed) in the longitudinal direction (by means of a slit and an adhesive on both long lateral sides, as exemplified in fig. 4 or 5) in the middle of a square case 5 (for example, 55mm in outer length, 15mm in outer width, and 15mm in outer height, and 2mm in wall thickness), a large portion (for example, 15mm in length) of the porous body is exposed (for example), a small portion (for example, 3mm in length) is hermetically held in the case, one side (for example, 15mm × 15mm) of the case holding the porous body is a bottom, the opposite other side (for example, 15mm × 15mm) is a top having an opening through which a liquid can be added from the opening, and the bottom and the side, application of an alternating current (or alternating) electric (signal) between the electrodes causes the ultrasonic atomization sheet to vibrate in bending and/or torsion in its thickness direction, thereby obtaining example 16-2.

Examples 16-3 to 5 and comparative examples preparation methods:

the same as in example 16-2 except for the following differences,

Examples 16-3 the average pore diameter of the porous body was 0.5. mu.m;

examples 16-4 the average pore diameter of the porous body was 2.5. mu.m;

examples 16-5 the average pore diameter of the porous body was 15. mu.mL;

examples 16-6 the average pore diameter of the porous bodies was 25 μm;

examples 16-7 the average pore diameter of the porous bodies was 50 μm;

comparative example 16-1

The ultrasonic atomization sheet is not provided with a vibration plate, the porous body is directly bonded on the piezoelectric element, and the application of alternating current (or alternating current) electricity (signal) between the two electrodes basically does not cause the ultrasonic atomization sheet to bend or/and twist and vibrate in the thickness direction;

comparative example 16-2

The porous body was a porous body having conductivity only in the thickness direction and not in the longitudinal direction or/and the width direction or/and the radial direction (i.e., the pores were through-holes in the thickness direction (as shown by 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, and the like were the same as in example 16-2);

comparative example 16-3

The porous body is a ceramic porous body having only the longitudinal direction or/and the width direction or/and the radial direction but no conductivity in the thickness direction (the surface of the ceramic body has grooves with concave and convex parts parallel to the surface, the size and the material are the same as those of the porous body of example 16-2, and the width of the groove is the same as the average pore diameter of the porous body);

comparative example 16-4

The porous body was a ceramic slurry layer ((surface) porosity about 85-95%, breakage, fragmentation, morphology instability during ultrasonic vibration, cumulative stable retention of its (original) morphology for less than 0.5 hour, dimensional change width greater than 50%) (the porous body size, average (surface) pore diameter, etc. were the same as in example 16-2);

Comparative examples 16 to 5

The porous body was a nonwoven fabric (basically, conductivity in the thickness direction) (the size, average (surface) pore diameter, surface porosity, and the like of the porous body were the same as in example 16-2);

comparative examples 16 to 6

The porous body is cotton (deformation in liquid at once, difficult to maintain the original shape, size change range greater than 20%, extremely unstable shape).

Example 17 and comparative example thereof

Example 17-1 (shown in FIGS. 75-79) preparation method:

1) manufacturing 2 pieces of piezoelectric ceramic plate 1 (such as lithium potassium sodium niobate (titanate) with the length of 30mm, the width of 10mm and the thickness of 0.2mm or other arbitrary piezoelectric materials), coating metal silver on two opposite surfaces with the largest area to serve as surface electrodes 12 (not marked in the figure), and respectively welding wires/leads 11 on the two electrodes to obtain an element 1;

2) mounting (fixing) the above-mentioned 2 elements 1 on two sides and one side 1 of a vibrating plate 2 (bonded by an adhesive, three sides of the piezoelectric ceramic plate are spaced from the edge of the vibrating plate by 0.5mm, for example), (two piezoelectric ceramic plates are polarized in the same direction) to obtain a rectangular element 2, for example, the plate is a resin plate (rigid plastic plate) with a length of 38mm, a width of 11mm and a thickness of 1mm, wherein two inner electrodes (solid marking electrodes) are connected to one electrode 1, two outer electrodes (hollow marking electrodes) are connected to the other electrode 2, and applying an alternating current (or alternating current) electric (signal) between the

electrodes

1, 2 can make the element 2 bend in the thickness direction or/and vibrate torsionally (as shown in fig. 75A, B);

3) The above-mentioned fabricated element 2 is mounted (fixed) in the middle of a square case 3 (e.g. having a width of 12mm and a thickness of 12mm and a wall thickness of 1mm, the outside length of which is 40mm, the outside width of which is 12mm) in the longitudinal direction (by means of a slit means as illustrated in fig. 4 or 5), the case is divided into two chambers which are not communicated with each other, the bottom side (e.g. 12mm x 12mm) of the case is a bottom, the other side (e.g. 12mm x 12mm) of the case has an opening for a top, a liquid can be added from the opening, the two long and transverse sides (e.g. 40mm x 12mm) of the case, which are parallel to and opposite to the above-mentioned piezoelectric element, are porous bodies 31 (e.g. polyamide-type or polyester-type or polyethylene-type polyamide-type or polyester-type or sponge-type body having a thickness of 2mm and a width of a length of a width of, the time for keeping the original shape is more than 1000 hours, the size change amplitude is less than 5%, the average aperture is 5.0 μm, the surface porosity is 40%, the other two long transverse sides (such as 40mm multiplied by 12mm) of the box are solid without holes, and the bottom and the side do not leak liquid; the welding wire/lead 11 is connected to the outside of the case 3 through an internal connection 51 and an external connection 52, and an alternating current (or alternating current) electric (signal) is applied between the two electrodes to cause the ultrasonic atomization sheet to bend or/and vibrate in a torsional mode in the thickness direction (as shown in fig. 76, 77, 78 and 79); thus, two ultrasonic atomizers which can atomize two different liquids and operate in parallel are obtained.

Examples 17-2 to 7 and comparative examples thereof preparation methods:

the same as in example 17-1 except for the following differences,

example 17-2 the average pore diameter of the porous body was 0.5. mu.m;

examples 17-3 the average pore diameter of the porous body was 2.5. mu.m;

examples 17-4 the average pore diameter of the porous bodies was 25 μm;

examples 17-5 the average pore diameter of the porous body was 50 μm;

examples 17-6 the average pore diameter of the porous bodies was 100. mu.m;

examples 17 to 7

The two piezoelectric ceramic plates 1 are polarized in opposite directions (opposite-surface electrodes have the same polarity), two inner-side electrodes are connected together, and two outer-side electrodes are respectively connected with two ends of alternating current (or alternating current) electricity (signals) (as shown in fig. 1);

comparative example 17-1

The porous body was a nonwoven fabric porous body having no conductivity only in the thickness direction and not in the longitudinal direction, the width direction, or the radial direction (i.e., the pores were through-holes in the thickness direction (as shown by 11b in fig. 6), and the dimensions, the material, the average (surface) pore diameter, the surface porosity, and the like were the same as those of example 17-1).

Comparative example 17-2

Only the polarization of the two piezoelectric ceramic plates in opposite directions is changed (the polarities of the electrodes on the opposite surfaces are the same, and the electrodes are connected in parallel);

comparative example 17-3

Only the electrodes are connected in series (from the original parallel connection) (namely two inner electrodes are connected together, and two outer electrodes are respectively connected with two ends of alternating current (/ or alternating current) electricity (signal)) (the two piezoelectric ceramic plates are polarized in the same direction, or the polarities of the electrodes on the opposite surfaces are opposite).

Example 18 and comparative example thereof

Example (as shown in FIGS. 80-82) preparation method:

1) manufacturing a piezoelectric element 1 (such as one with the length of 25mm, the width of 12mm and the thickness of 0.3mm, wherein two layers of piezoelectric ceramic plates (perovskite structural compounds of Nb acid-base compounds or other arbitrary piezoelectric materials) are polarized in the same direction), wherein the piezoelectric element is internally provided with 1 inner electrode 11 (such as 70% silver and 30% palladium alloy) and two opposite surfaces with the largest area are coated with metal silver to be used as outer electrodes 12, the inner electrode and the outer electrode are respectively welded with leads 13 (wherein the two outer electrodes are connected together and respectively connected with the inner electrode at two ends of alternating current (or alternating current) electricity (signals)), and the leads are provided with insulating sheaths;

2) punching a metal sheet 2 (e.g., about 80mm long by about 15mm wide by about 0.2mm thick) into a sheet-like case 3 (e.g., about 40mm long by about 12.5mm wide by about 12mm wide by about 0.7mm thick by about 0.3mm high by about 12mm wide by about 0.3mm wide), wherein one side of the case having the smallest surface area is open 31 and the other five sides are closed, mounting (fixing) the element 1 (by an elastic adhesive 4) in the sheet-like case (the element 1 is connected to the unopened side of the case having the smallest surface area), and leading a lead 13 out from the opening 31 of the case (the lead body is outside the case, applying an alternating current (or alternating) electric (signal) between the internal and external electrodes can bend or/and torsionally vibrate the ultrasonic atomization sheet in the thickness direction thereof), and the excess space in the case 3 is filled with the elastic adhesive 4, thereby obtaining an element 2;

3) A porous body 5 (e.g., an epoxy resin or acrylic or polyimide sponge having a length of 25mm, a width of 10mm, a thickness of 2mm, a length of 15mm, a width of 10mm, and a thickness of 6 mm) having a conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and substantially retaining its original shape during atomization and in an atomized liquid is stably retained (retained) for a cumulative time of more than 500 hours, and has a dimensional change width of less than 5%, an average pore diameter of 2.5 μm, and a porosity of 70%), and is mounted (fixed) on opposite surfaces (central portions) of the element 2 having the largest surface area (bonded by an elastic adhesive 4) to obtain a desired element.

Comparative examples 18-1 and 18-2

The same as in the examples except that the average pore diameters of the porous bodies were 50 μm and 100 μm, respectively;

comparative example 18-3

The same as the embodiment except that the piezoelectric element 1 does not include an internal electrode, and the two opposite surfaces having the largest area are coated with metallic silver as two electrodes, respectively;

comparative example 18-4

The same applies to the embodiment except that the sheet-like case is not included, and the porous body is mounted (fixed) on the surfaces of the two opposing electrodes having the largest area of the piezoelectric element 1 (bonded by an adhesive);

comparative examples 18 to 5

The porous body is a porous body having only a thickness direction and no conductivity in a length direction, a width direction, or a radial direction (that is, the pores are through-holes in the thickness direction (as shown by 11b in fig. 6), and the size, material, average (surface) pore diameter, surface porosity, and the like are the same as those in the example), and the others are the same as those in the example.

Example 19

Based on example 16-2, where the various components (as indicated in the dimensions) were reduced by half in equal proportion, a smaller ultrasonic atomizer was constructed, which, in addition to the above-mentioned variations, had the following modifications, but otherwise unchanged:

example 19-1

The porous body 3 is moved from the surface of the piezoelectric element 1 to the back surface of the vibrating plate 2 (i.e., the surface without the piezoelectric element 1), and the porous body 3 is substantially overlapped with the piezoelectric element 1 as viewed in the thickness direction;

example 19-2

Moving the porous body 3 from the surface of the piezoelectric element 1 to the other end of the vibrating plate 2 on one side of the piezoelectric element 1, wherein the porous body 3 and the piezoelectric element 1 are bilaterally symmetrical on the vibrating plate 2 about the central axis thereof, the piezoelectric element 1 is fixed in the square box 5 except the original position of the porous body 3 instead of the piezoelectric element 1 when assembling the box (namely, the position of the ultrasonic atomization sheet is rotated 180 mansion by taking the center thereof as the origin), and the open groove 21 on the vibrating plate 2 is appropriately shortened to the edge of the porous body 3 and the piezoelectric element 1 (for example, the opening is 1mm away from the edge) and is completely positioned in the square box 5 (no liquid leakage is required), and the other parts are;

examples 19 to 3

On the back surface of the vibrating plate 2 (i.e. the surface without the piezoelectric element 1), another identical piezoelectric element 1 (the same polarization direction, or the opposite electrodes of the piezoelectric element are opposite in polarity) and a porous body 3 (two outer electrodes are connected together, two inner electrodes are connected together, and the outer electrode and the inner electrode are respectively connected to the two ends of the alternating current (/ or alternating current) electricity (signal) as in example 17-1 or as shown in fig. 2) are symmetrically arranged in the left-right direction by the same method, so that the ultrasonic atomizer of the bimorph element double porous body is formed, and the vibrating plate 2 is assembled without forming a groove, the vibrating plate 2 is properly extended to the opening of the square box 5 (which is flush with the edge of the box shell at the position), so that the two side spaces of the box separated by the vibrating plate are not communicated to form two independent liquid storage containers, and thus two ultrasonic atomizers which can operate in parallel and atomize two different liquids simultaneously are obtained;

Examples 19 to 4

On the back surface of the vibrating plate 2 (i.e., the surface without the piezoelectric element 1), the piezoelectric element 1' having the opposite polarization direction to the original piezoelectric element 1 (i.e., the electrodes on the opposite surfaces of the piezoelectric element have the same polarity, wherein the two inner electrodes are connected together, and the two outer electrodes are connected to the two ends of the alternating current (/ or alternating current) electricity (signal), respectively, as shown in fig. 1) and the porous body 3 are disposed in bilateral symmetry in the same manner, so that the ultrasonic atomizer having the double piezoelectric element and the double porous body is obtained, and the others are similar to those in example 19-3;

examples 19 to 5

An ultrasonic atomizer constructed in which various components (as shown in the dimensions) were reduced in equal proportion by half based on example 16-2.

Comparative example 19-1

Only the polarization of the two piezoelectric ceramic plates is changed in opposite directions (the polarities of the electrodes on the opposite surfaces are the same, and the electrode connections are still parallel), and the others are similar to those of example 19-3;

comparative example 19-2

Only the two piezoelectric ceramic plates have the same polarization direction (or the opposite electrodes have opposite polarities), and the electrodes are connected in series (i.e., two inner electrodes are connected together, and two outer electrodes are respectively connected to both ends of an alternating current (/ or alternating current) power (signal)), and the other is the same as that of example 19-4.

Example 20

Based on example 18, a smaller ultrasonic atomizer was constructed in which the various components (as indicated in the dimension list) were reduced in equal proportion by half, in addition to the above-mentioned changes, the following changes including the fixing means, and others were made:

According to the figures 83 and 84, a new element 2' is made on the basis of the original element 2, namely 4U-shaped clamping groove assemblies 6 are bonded on the upper, middle and lower parts and the bottom parts of two sides of the original element 2 by elastic bonding agents 4, an elastic body 7 is adhered on the surface of the element 2 combined with the porous body, the elastic body 7 is also adhered on the inner side of the U-shaped clamping groove, the difference between the width d1 in the clamping groove and the thickness sum of the elastic body 7 on the element 2 and two porous bodies 5 is larger than 0 but slightly smaller than the thickness sum of the elastic body 7 on the element 2 and the elastic body 7 on the inner side of the U-shaped clamping groove, the difference between the inner width d2 between the clamping groove and the element 2 and the thickness of the porous body 5 is larger than 0 but slightly smaller than the thickness sum of the elastic body 7 on the element 2 and the elastic body 7 on the inner side of the U-shaped clamping groove, so that the porous body 2 and the porous body 5 can be stably fixed but not strongly restrained (beneficial to One fourth of the groove, the depth d3 of the groove is less than one tenth of the width of the element 2 and more than one twentieth of the groove (the surface of the porous body 5 is not covered too much to avoid affecting the atomization function, and the porous body 5 can be fixed stably);

a rectangular parallelepiped porous body 5 (a porous polypropylene melt-blown body having conductivity in the thickness direction and the length direction and/or the width direction and/or the radial direction and substantially retaining the original form during atomization and in an atomized liquid, the accumulated stable retention time of the original form is longer than 1000 hours, the dimensional change range is less than 9%, the average pore diameter of example 20-1 is 4.5 μm, the average pore diameter of example 20-2 is 15 μm, the porosity is 50%, and the length, the width and the thickness are substantially the same as those of the element 2 ') is inserted into the above-mentioned slot of the element 2' and fixed (the porous body 5 can be conveniently inserted into or taken out of the above-mentioned slot, thereby conveniently replacing the porous body 5, if damaged, when other pore diameters need to be replaced).

Comparative example the same as example 20-2 except for the following differences,

comparative example 20-1

The porous body was a ceramic slurry layer (porosity about 90-98%, breakage, fragmentation, morphology instability during ultrasonic vibration, cumulative stable retention of its (original) morphology for less than 0.5 hours, dimensional change width greater than 50%) (the porous body size, average (surface) pore diameter, etc. were the same as in example 20-2);

comparative example 20-2

The porous body was a nonwoven fabric (polypropylene type, basically, conductivity in the thickness direction) (the size, average (surface) pore diameter, surface porosity, and the like of the porous body were the same as in example 20-2);

comparative example 20-3

The porous body is cotton (different products in the same batch are counted respectively) (the size change amplitude is larger than 20 percent due to instant deformation in liquid, the original shape is difficult to keep, and the shape is extremely unstable).

Example 21

The preparation method comprises the following steps:

1) manufacturing an ultrasonic atomization sheet 1: coating a piezoelectric ceramic plate 11 (such as lead zirconate titanate with the length of 25mm, the width of 15mm and the thickness of 1mm or any other piezoelectric material) with metal silver (the thickness is about 2 μm), engraving interdigital electrodes in a central area (the length is about 20mm and the width is about 10mm) by using laser according to the mode in fig. 85, respectively welding a lead/lead 111 on each of four sides with a reserved edge area with the width of 2.5mm, wherein a is 200 μm, w is 8mm, p is 2a +2b is 4a, welding two busbars respectively, and finally spraying polyester paint on the surface of the element to form a dense protective film to wrap the whole element to obtain an element 1;

2) The element 1 thus produced was attached (fixed) to the substantially central portion of the vibrating plate 12 (by bonding with an adhesive) without the interdigital electrode on one surface thereof to obtain an element 2, such as a hard resin plate having a length of 30mm, a width of 20mm and a thickness of 1 mm;

3) a rectangular parallelepiped porous body 5 (a porous body polyester meltblown having conductivity in the thickness direction and the length direction and/or the width direction and/or the radial direction and substantially retaining its original form during atomization and in an atomized liquid, and having a cumulative stable retention time of its original form for more than 1000 hours, a dimensional change width of less than 5%, an average pore diameter of 15 μm, a porosity of 50%, and a length, a width and a thickness substantially equal to those of the piezoelectric ceramic plate 11) was respectively bonded (fixed) to the surface of the

element

1 or 2 having the interdigital electrode, thereby obtaining examples 21-1 or 21-2.

Comparative example the same as example 21-2 (including the vibrating plate) was conducted except that the following differences,

comparative example 21-1

The porous body is polyester alkene sponge (the porosity is about 96-98%, the liquid is immediately deformed, the size change range is more than 30%, and the original form is difficult to maintain);

comparative example 21-2

The porous body was a nonwoven fabric (polypropylene type, having an average pore diameter of 15 μm and basically having conductivity in the thickness direction);

Comparative examples 21 to 3

The porous body is a ceramic slurry layer (porosity is about 85-95%, breakage and fragmentation in ultrasonic vibration, unstable form, accumulated stable retention of its (original) form time is less than 0.5 hour, and size variation amplitude is more than 50%).

Example 22

The preparation method comprises the following steps:

1) manufacturing an ultrasonic atomization sheet 1: coating a piezoelectric ceramic plate 11 (such as nickel lead niobate with a length of 25mm, a width of 15mm and a thickness of 15 μm or any other piezoelectric material) with silver metal (with a thickness of about 1 μm), etching an interdigital electrode in a central area (with a length of about 20mm and a width of about 10mm) thereof by using a photoetching machine in a manner shown in fig. 85, leaving a remaining edge area with a width of 2.5mm on each of four sides, wherein a is 50nm, w is 8mm, p is 2a +2b is 4a, welding wires/leads 111 to the two busbars, and finally spraying polytetrafluoroethylene paint on the surface of the element to form a dense protective film to wrap the whole element to obtain an element 1;

2) one surface of the element 1 formed as described above, which has no interdigital electrode, is attached (fixed) to a substantially central portion of the vibration plate 12 (by bonding with an adhesive) to obtain an element 2, such as a metal plate (e.g., 304 stainless steel or other metal material) having a length of 30mm, a width of 20mm, and a thickness of 200 μm;

3) a rectangular parallelepiped porous body 5 (a porous polytetrafluoroethylene sponge having conductivity in the thickness direction and the length direction and/or the width direction and/or the radial direction and substantially retaining its original form during atomization and in an atomized liquid, which was cumulatively and stably retained for a period of time longer than 1000 hours, had a dimensional change width of less than 5%, an average pore diameter of 5 μm, a porosity of 50%, and a length, a width, and a thickness substantially equal to those of the piezoelectric ceramic plate 11) was respectively attached (fixed) to the surface of the

element

1 or 2 having the interdigital electrode, thereby obtaining example 22-1 or 22-2.

Comparative example the same as example 22-2 (including the vibrating plate) was conducted except that the following differences,

comparative example 22-1

The porous body is a polytetrafluoroethylene sponge body (the porosity is about 97-99%, the liquid is immediately deformed, the size change range is more than 30%, and the original form is difficult to keep);

comparative example 22-2

Comparative example 22-3

The porous body was a nonwoven fabric (polytetrafluoroethylene, average pore diameter 5 μm, conductivity in the thickness direction).

Example 23 and comparative example thereof

The method and the mode of example 6-1 were modified in such a manner that the distance between the porous body 30 and the piezoelectric element 1 was not more than 0.5mm, and the others were the same as those in example 6-1.

The piezoelectric element 1 is: a piezoelectric ceramic plate (a square PZT-based ceramic having a side length of about 7mm and a thickness of about 30 μm) was coated with silver (having a thickness of about 2 μm) on one of the largest surfaces, and in the manner shown in fig. 85, an interdigital electrode was formed on the center region (having a side length of about 5mm) by a photolithography machine, and four sides were each provided with a margin having a width of about 1mm, wherein a was 20 μm, b was 10 μm, w was 4mm, and p was 2a +2b was 60 μm, and both bus bars were coated with a conductive adhesive 13 in a band-like shape, and finally, a polyamide-based resin having a thickness of 5 to 10 μm was sprayed on the surface of the piezoelectric ceramic plate, thereby forming a dense protective film to wrap the entire piezoelectric ceramic plate (excluding the region for coating the band-like conductive adhesive 13).

Comparative example the same as example 23 (including the vibrating plate) except for the following differences,

comparative example 23-1

Comparative example 23-2

The porous body was a nonwoven fabric (average pore diameter was 4 μm, and conductivity in the thickness direction was almost the same).

Comparative example 23-3

The porous body is cotton (immediately deformed in the liquid, the size change range is more than 20%, the original shape is difficult to keep, and the shape is extremely unstable).

Example 24

The preparation method comprises the following steps:

1) manufacturing an ultrasonic atomization sheet 1: metallic silver (thickness about 2 μm) is coated on opposite surfaces of a piezoelectric ceramic plate 11 (e.g., lead zirconate titanate having a length of 25mm, a width of 15mm and a thickness of 0.5mm or any other piezoelectric material) having the largest area, interdigital electrodes are laser-engraved in a central area thereof (length about 20mm, width about 10mm) in the manner shown in fig. 85, four sides each leaving a margin region having a width of 2.5mm, where a is 20 μm, w is 8mm, and p is 2a +2b is 4a, wires/leads 111 are respectively welded to the two bus bars, the wires/leads are respectively connected to both ends of alternating current, and the polarity of the first interdigital electrode on the upper surface is opposite to the polarity of the first interdigital electrode on the lower surface (the interdigital electrodes on the upper and lower surfaces are counted from the same end) (e.g., in series mode, that the two bus bars on the upper and lower surfaces are electrically connected together at one end of the piezoelectric ceramic plate 11, the two bus bars on the upper surface and the lower surface of the other end of the element are respectively and electrically connected with two ends of alternating current (or alternating) electricity (signals), and finally polyester paint is sprayed on the surface of the element to form a compact protective film to wrap the whole piece to obtain a piece 1;

2) A rectangular parallelepiped porous body 5 (a porous polyester meltblown having conductivity in the thickness direction and the length direction and/or the width direction and/or the radial direction and substantially retaining its original form during atomization and in an atomized liquid, and having a cumulative stable retention time of its original form for more than 1000 hours, a dimensional change width of less than 5%, an average pore diameter of 15 μm, a porosity of 50%, and a length, a width and a thickness substantially equal to those of the piezoelectric ceramic plate 11) was respectively bonded (fixed) to both surfaces of the element 1 having interdigital electrodes to obtain example 24.

Comparative example

The above-mentioned wires/leads in the comparative example were connected to both ends of alternating current, respectively, and the polarity of the first interdigital electrode on the upper surface was made the same as that of the first interdigital electrode on the lower surface (the interdigital electrodes on the upper and lower surfaces were counted from the same end) (e.g., parallel mode), except that otherwise, they were the same as in example 24.

Example 25 and comparative example thereof

Examples preparation methods:

the device shown in fig. 6 is manufactured, wherein the elastic cavity mold is composed of a left rectangular elastic cavity mold silicon wafer and a right rectangular elastic cavity mold, wherein 8 represents a left rectangular elastic cavity mold silicon wafer, 9 represents a rectangular piezoelectric ceramic wafer (four corners are fixed), 10 represents a right rectangular elastic cavity mold silicon wafer, 11 represents a rectangular silicon rubber sponge porous body (the average pore diameter is 1 μm and the surface porosity is 50%, the silicon rubber sponge porous body not only has the thickness direction, but also has the conductivity in the radial direction, and basically keeps the original shape in the atomization process and in the atomization liquid, the accumulated and stable keeping time of the original shape is more than 2000 hours, the size change range is less than 5%), 12 is a rectangular elastic cavity formed by the left rectangular elastic cavity mold silicon wafer 8 and the right rectangular elastic cavity

mold silicon wafer

10, 13 is a liquid supply tube, and 14 is an electrode lead.

Comparative example preparation method:

the device shown in fig. 6 is manufactured, wherein the elastic cavity mold is composed of a left circular elastic cavity mold and a right circular elastic cavity mold, wherein 8 represents a left circular elastic cavity mold silicon wafer, 9 represents a circular piezoelectric ceramic wafer (four points of the circumference can be connected into a square for fixation), 10 represents a right circular elastic cavity mold silicon wafer, 11 represents a circular silicon rubber spongy porous body (the average pore diameter is 1 μm and the surface porosity is 50%, the silicon rubber spongy porous body has the thickness direction and the radial direction conductivity, basically keeps the original shape in the atomization process and in the atomized liquid, accumulatively and stably keeps the (original) shape for more than 2000 hours, the size change amplitude is less than 5%), 12 is a circular elastic cavity formed by the left circular elastic cavity mold silicon wafer 8 and the right circular elastic cavity

mold silicon wafer

10, 13 is a liquid supply pipe, and 14 is an electrode lead.

In the rectangular cell with the same number as that in the comparative example, the diameter of the long side of the rectangular cell with the same number is equal to that of the circular cell with the same number as that in the comparative example, but the width of the rectangular cell with the same number is half of that of the circular cell with the same number as that in the comparative example, the dimensions of the other corresponding portions are equal to each other, and the porous body material, the average (surface) pore diameter, the surface porosity, and the like in the examples and the comparative example are the same.

Example 26 and comparative example thereof

(as shown in FIG. 71) preparation method:

1) manufacturing a piezoelectric ceramic plate 1 (such as lead nickel niobate or any other piezoelectric material with the length of 25mm, the width of 15mm and the thickness of 0.05 mm), coating metal silver on two opposite surfaces with the largest area to be used as surface electrodes 12 (not marked in the figure), and respectively welding wires/leads 4 on the two electrodes to obtain an element 1;

2) the piezoelectric element 1 thus fabricated is mounted (fixed) on a vibrating plate 2 (bonded by an adhesive, the distance of three sides of the piezoelectric ceramic plate from the edge of the vibrating plate is, for example, 1mm) to obtain an element 2, such as a plate made of a metal sheet (e.g., 304 stainless steel or other material) having a length of 60mm, a width of 17mm and a thickness of 0.3 mm;

3) a porous body 3 (e.g., an insoluble silicate having a length of 25mm and a width of 15mm and a thickness of 0.5mm, an average pore diameter of 0.5 μm, a porosity of 65%, a conductivity in the thickness direction and the length direction and/or the width direction and/or the radial direction, and a substantially original form during atomization and in an atomized liquid, and a cumulative stable maintenance of its (original) form for a time period of more than 50 hours, a dimensional change width of less than 10%) was mounted (fixed) on a surface of the vibrating plate 2 on the side not including the piezoelectric element 1 in the above-mentioned element 2 (bonded by an adhesive, and three sides of the porous body were spaced from the edge of the vibrating plate by a distance of 1mm, to thereby obtain an element 3, i.e..

Comparative example 26 preparation method:

the same procedure as in example 26 was repeated except that the piezoelectric ceramic plate 1 was provided at the geometric center thereof with a rectangular through-hole having a side length of 20% of that of the piezoelectric ceramic plate 1.

Test example

Test example 1 atomization Performance test

In each of the examples or comparative examples of ultrasonic atomizers obliquely (45 ° from the horizontal, with the side having the porous body facing upward) the container (the example without the container and the comparative example thereof were fixed in the container in advance in the manner of example 16-2, and the upper part of the atomizer (the part without the piezoelectric ceramic) and about 10% of the porous body were immersed in the container) was charged with a certain amount of liquid to be atomized (e.g., water or an aqueous solution), and an alternating current (or alternating current) electric (signal) was applied under a constant temperature and humidity environment (e.g., 25 ℃ C., 75% relative humidity) to atomize the liquid for a certain period of time (e.g., 30 seconds) (if a large non-atomized liquid droplet fell from the atomizer, the test was stopped, and the atomization amount was not counted). Precisely measuring the weight (including liquid) of the atomizer before and after atomization, and calculating the difference between the weight and the weight to obtain the amount of atomized liquid in unit time;

measuring the noise at a distance of 10cm (same direction or angle) from the atomizer

And (3) measuring the temperature difference between the surface temperature of the atomizer (at the same position) after the atomization in the same running time (such as 0.5-1 hour) and the temperature rise value before the atomization.

The atomizer was used 1360 of the example or control atomizer and the above method was repeated 1000 times or until the atomizer was damaged (1000 times before), and the damage rate of the atomizer was counted and calculated 1000 times before the repetition.

The results of the above experiments are shown in Table 1 (in the comparative examples 5-2, 6-1, 13-3, 14-3, 16-4, 20-1, 21-3, 22-1, 22-2, and 23-1, large un-atomized droplets fell from the atomizer due to breakage, shrinkage, and the like during atomization of the porous material, and the experiments were stopped without calculating the atomization amount).

Immediately introducing the atomized mist into a closed low container at a temperature of not higher than-40 deg.C, quickly freezing to obtain solid particles, measuring the particle diameter r of the solid particles in a low temperature environment at a temperature below-5 deg.C, calculating the average particle diameter (average r') and counting the particle diameter distribution. The results are shown in Table 2.

TABLE 1-1 test results of Performance of examples and comparative examples thereof

	Example 1	Comparative example 1 to 1	Comparative examples 1 to 2	Example 2	Comparative example 2-1	Comparative examples 2 to 2
							Atomization amount g/min	3.56	2.08	1.65	2.85	1.63	1.27
Noise db	29		36	29		35
							Temperature rise value of DEG C	4		9	5		10
The damage ratio%	0.92		4.3	1.2		5.6

Description of the drawings: the above examples refer to embodiments, the above examples refer to comparative examples, and the following is the same.

Tables 1-2 test results of the Performance of examples and comparative examples thereof

	Example 3	Comparative example 3-1	Comparative examples 3 to 2	Example 4-1	Example 4-2	Comparative example 4
							Atomization amount g/min	3.85	2.31	1.68	2.63	3.70	1.25
Noise db	28		35
							Temperature rise value of DEG C	5		11
The damage ratio%	1.4		6.3

Tables 1-3 test results of the Performance of examples and comparative examples thereof

	Example 5-1	Comparative examples 5 to 3	Comparative examples 5 to 4	Comparative examples 5 to 5	Example 6-1	Example 6-2
							Atomization amount g/min	4.83	1.22	2.20	2.82	4.12	2.42
Noise db	30	36		33	29
							Temperature rise value of DEG C	5	12		8	6
The damage ratio%	1.1	13.1		3.7	1.3

Description of the drawings: comparative examples 5 to 5 were also conducted as examples 5 to 4.

Tables 1-4 test results of the Performance of examples and comparative examples thereof

	Examples 6 to 3	Comparative example 6 to 2	Comparative examples 6 to 3	Comparative examples 6 to 4	Comparative examples 6 to 5	Example 7-1
							Atomization amount g/min	2.63	1.02	1.56	1.35	1.95	25.3
Noise db		35
							Temperature rise value of DEG C		13
The damage ratio%		8.5

Tables 1-5 examples and comparative examples thereof

	Example 7-2	Comparative example 7	Example 8-1	Example 8-2	Examples 8 to 3	Comparative example 8-1
							Atomization amount g/min	23.8	3.52	2.52	5.21	3.63	1.03

Tables 1-6 examples and comparative examples thereof

Tables 1 to 7 examples and comparative examples thereof

	Comparative example 10	Example 11-1	Example 11-2	Comparative example 11	Example 12	Comparative example 12-1
							Atomization amount g/min	2.68	7.24	13.5	3.37	4.52	1.47

Tables 1-8 examples and comparative examples thereof

Comparative example 12-2

Example 13-1

Comparative example 13-1

Comparative example 13-2

Comparative examples 13 to 3

Example 14-1

Atomization amount g/min

1.93

6.73

1.87

4.08

Drip stop

8.69

Tables 1 to 9 results of performance test of examples and comparative examples thereof

	Example 14-2	Examples 14 to 3	Comparative example 14-1	Comparative example 14-2	Comparative examples 14 to 4	Example 15-1
							Atomization amount g/min	7.17	6.43	2.31	4.04	3.85	2.35

Tables 1-10 examples and comparative examples thereof

	Example 15-2	Examples 15 to 3	Examples 15 to 4	Comparative example 15	Example 16-2	Comparative example 16-1
							Atomization amount g/min	3.32	5.05	3.79	1.45	3.63	1.17
Temperature rise value of DEG C					6	12
							The damage ratio%					1.3	9.7

Tables 1-11 examples and comparative examples thereof

Comparative example 16-2

Comparative examples 16 to 3

Comparative examples 16 to 4

Comparative examples 16 to 5

Comparative examples 16 to 6

Example 17-1

Atomization amount g/min

0.35

2.13

Drip stop

0.72

2.41

10.2

Tables 1-12 examples and comparative examples thereof

	Examples 17 to 7	Comparative example 17-1	Comparative example 17-2	Comparative examples 17 to 3	Example 18	Comparative example 18 to 3
							Atomization amount g/min	8.23	3.63	0.56	0.82	8.46	0.85
The damage ratio%					1.2

Tables 1-13 examples and comparative examples thereof

	Comparative examples 18 to 4	Comparative examples 18 to 5	Example 19-1	Example 19-2	Examples 19 to 3	Examples 19 to 4
							Atomization amount g/min	3.89	0.33	4.56	2.02	11.1	8.46
The damage ratio%	4.6

Tables 1-14 examples and comparative examples thereof

Examples 19 to 5

Comparative example 19-1

Comparative example 19-2

Example 20-2

Comparative example 20-1

Comparative example 20-2

Atomization amount g/min

3.23

0.61

0.82

5.73

Drip stop

0.96

Tables 1-15 examples and comparative examples thereof

	Example 21-1	Example 21-2	Comparative example 21-2	Example 22-1	Example 22-2	Comparative example 22-3
							Atomization amount g/min	1.25	2.08	0.31	13.6	21.5	3.82
The damage ratio%	11.8	3.22		18.6	5.23

Tables 1-16 examples and their comparative examples Performance test results

	Example 23	Comparative example 23-2	Example 24	Comparative example 24	Example 25	Comparative example 25
							Atomization amount g/min	6.76	1.27	20.6	2.12	1.85	1.53

Tables 1 to 17 results of performance test of examples and comparative examples thereof

	Example 26	Comparative example 26
							Atomization amount g/min	13.5	8.95

TABLE 2-1 test results of Performance (II) of examples and their comparative examples

	Examples of the invention5-2	Comparative example 5-1	Comparative example 5 to 2	Example 6-1	Comparative example 6-1	Example 12
							Average r' (μm)	27.5	57.9	95.6	4.7	96.3	3.6
r≤5μm	11.3	6.8	4.6	72.3	2.4	80.1
							5＜r≤10μm	15.7	8.1	8.4	12.6	6.4	9.3
10＜r≤30μm	36.8	16.3	13.9	8.4	13.7	5.4
							30＜r≤50μm	19.3	32.8	21.6	3.1	20.8	2.6
50＜r≤100μm	11.6	22.7	34.3	2.2	23.9	1.8
							r＞100μm	5.3	13.3	17.2	1.4	32.8	0.8

Table 2-2 examples and their comparative examples Performance (ii) test results

	Comparative examples 12 to 3	Example 13-1	Example 13-2	Comparative examples 13 to 3	Example 14-1	Comparative examples 14 to 3
							Average r' (μm)	47.8	3.1	36.7	69.3	2.8	83.6
r≤5μm	7.5	85.4	11.6	7.2	81.7	7.7
							5＜r≤10μm	10.2	7.6	18.5	8.4	8.8	8.6
10＜r≤30μm	16.4	3.1	34.2	18.5	4.7	10.9
							30＜r≤50μm	34.6	1.8	20.7	34.3	2.5	20.2
50＜r≤100μm	19.2	1.2	11.6	20.4	1.6	33.8
							r＞100μm	12.1	0.9	3.4	11.2	0.7	18.8

Tables 2-3 test results of Performance (II) of examples and their comparative examples

Tables 2-4 test results of the examples and comparative examples for performance (II)

	Comparative examples 16 to 6	Examples 17 to 4	Examples 17 to 5	Examples 17 to 6	Example 20-1
						Average r' (μm)	89.6	28.7	56.3	108.9	5.1
r≤5μm	2.7	9.7	4.5	2.6	56.6
						5＜r≤10μm	6.4	18.3	9.4	5.2	26.2
10＜r≤30μm	11.6	36.7	20.5	14.7	10.9
						30＜r≤50μm	23.9	21.6	31.8	23.8	3.8
50＜r≤100μm	37.8	9.6	23.6	32.8	1.8
						r＞100μm	17.6	4.1	10.2	20.9	0.7

	Comparative example 20-3-1	Comparative example 20-3-2	Comparative examples 20-3	Comparative examples 20-3 to 4	Comparative examples 20-3 to 5
						Average r' (μm)	71.7	114.9	92.3	104.6	86.5
r≤5μm	4.1	3.1	3.2	2.8	3.8
						5＜r≤10μm	7.4	7.4	8.1	6.7	8.7
10＜r≤30μm	18.2	13.3	15.7	11.7	17.8
						30＜r≤50μm	33.2	21.5	23.2	21.6	26.3
50＜r≤100μm	25.7	30.8	33.7	38.0	28.5
						r＞100μm	11.4	23.9	16.1	19.2	14.9

Tables 2-5 test results of the examples and comparative examples for performance (II)

	Example 21-2	Comparative example 21-1	Comparative examples 21 to 3	Example 22-2
					Average r' (μm)	18.9	53.7	116.2	8.2

Tables 2-6 test results of the examples and comparative examples with performance (II)

	Comparative example 22-1	Comparative example 22-2	Example 23	Comparative example 23-1	Comparative examples 23 to 3
						Average r' (μm)	42.8	108.3	6.3	113.8	92.5

。

Claims

1. An ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a thickness direction and a length or/and a wide reading direction or/and a radial direction conductivity and substantially stably maintaining its form during atomization and in an atomized liquid,

The ultrasonic atomization sheet comprises a piezoelectric ceramic plate, wherein opposing electrodes are arranged on opposing surfaces of the piezoelectric ceramic plate (I) or/and between the opposing surfaces to serve as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate (II) or/and below the surface to serve as piezoelectric active regions (an alternating current is applied between the electrodes to vibrate the ultrasonic atomization sheet in the thickness direction thereof, and the vibration atomizes the liquid in the porous body).

2. The ultrasonic atomizer of claim 1, characterized in that said porous body is disposed on the surface of said ultrasonic atomization sheet.

3. The ultrasonic atomizer of claim 1, characterized in that said porous body is disposed within a perpendicular distance of 0 to 10mm from the surface of said ultrasonic atomization sheet.

4. The ultrasonic atomizer of claim 1, further comprising a container, said porous body being disposed as a portion or all of a wall of said container or on an outer surface of said container, said ultrasonic atomization sheet being disposed within said container or on a surface of said container or as a portion of a wall of said container.

5. An ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate is free of through holes.

6. An ultrasonic nebulizer according to claim 1, characterized in that the piezoceramic plate (I) is a single piezoceramic plate, or a stack substantially or mainly formed by two or three or more piezoceramic plates/layers.

7. The ultrasonic atomizer of claim 1, wherein said ultrasonic atomization sheet further comprises a vibration plate on which said piezoelectric ceramic plate is disposed.

8. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is made of a clad material having a cross section formed in a sandwich structure by joining different raw materials to each other in a layer shape.

9. An ultrasonic atomizer according to claim 1, characterized in that said piezoceramic plate or/and said porous body is substantially or generally square.

10. The ultrasonic atomizer of claim 1, wherein said interdigitated electrodes are selected from the group consisting of fence electrodes.