CN111786650A - 体声波谐振器及其制造方法和滤波器、射频通信系统 - Google Patents

体声波谐振器及其制造方法和滤波器、射频通信系统 Download PDF

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Publication number
CN111786650A
CN111786650A CN201910272282.3A CN201910272282A CN111786650A CN 111786650 A CN111786650 A CN 111786650A CN 201910272282 A CN201910272282 A CN 201910272282A CN 111786650 A CN111786650 A CN 111786650A
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CN
China
Prior art keywords
layer
top electrode
resonance
bottom electrode
electrode
Prior art date
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Pending
Application number
CN201910272282.3A
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English (en)
Chinese (zh)
Inventor
罗海龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smic Ningbo Co ltd Shanghai Branch
Ningbo Semiconductor International Corp Shanghai Branch
Original Assignee
Smic Ningbo Co ltd Shanghai Branch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Smic Ningbo Co ltd Shanghai Branch filed Critical Smic Ningbo Co ltd Shanghai Branch
Priority to CN201910272282.3A priority Critical patent/CN111786650A/zh
Priority to JP2021525825A priority patent/JP7138988B2/ja
Priority to PCT/CN2019/105091 priority patent/WO2020199507A1/zh
Publication of CN111786650A publication Critical patent/CN111786650A/zh
Priority to US17/449,836 priority patent/US12009803B2/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201910272282.3A 2019-04-04 2019-04-04 体声波谐振器及其制造方法和滤波器、射频通信系统 Pending CN111786650A (zh)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201910272282.3A CN111786650A (zh) 2019-04-04 2019-04-04 体声波谐振器及其制造方法和滤波器、射频通信系统
JP2021525825A JP7138988B2 (ja) 2019-04-04 2019-09-10 バルク音響波共振器及びその製造方法並びにフィルタ、無線周波数通信システム
PCT/CN2019/105091 WO2020199507A1 (zh) 2019-04-04 2019-09-10 体声波谐振器及其制造方法和滤波器、射频通信系统
US17/449,836 US12009803B2 (en) 2019-04-04 2021-10-04 Bulk acoustic wave resonator, filter and radio frequency communication system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910272282.3A CN111786650A (zh) 2019-04-04 2019-04-04 体声波谐振器及其制造方法和滤波器、射频通信系统

Publications (1)

Publication Number Publication Date
CN111786650A true CN111786650A (zh) 2020-10-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910272282.3A Pending CN111786650A (zh) 2019-04-04 2019-04-04 体声波谐振器及其制造方法和滤波器、射频通信系统

Country Status (3)

Country Link
JP (1) JP7138988B2 (ja)
CN (1) CN111786650A (ja)
WO (1) WO2020199507A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115241622A (zh) * 2021-04-23 2022-10-25 诺思(天津)微系统有限责任公司 谐振器、滤波器及电子设备
CN115498975A (zh) * 2022-11-16 2022-12-20 迈感微电子(上海)有限公司 一种薄膜体声波谐振器以及滤波器
WO2024067087A1 (zh) * 2022-09-29 2024-04-04 常州承芯半导体有限公司 体声波谐振装置的形成方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113839640A (zh) * 2021-07-16 2021-12-24 常州承芯半导体有限公司 体声波谐振装置及其形成方法、滤波装置及射频前端装置
WO2023157798A1 (ja) * 2022-02-15 2023-08-24 株式会社村田製作所 弾性波装置
CN115996038B (zh) * 2022-12-26 2023-08-22 北京芯溪半导体科技有限公司 一种滤波器、多工器以及通信设备
CN116111966B (zh) * 2023-02-09 2024-03-29 上海集成电路材料研究院有限公司 一种滤波器、体声波谐振器结构及其制作方法
CN116032236B (zh) * 2023-02-15 2023-06-06 成都频岢微电子有限公司 一种体声波耳形通道谐振器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108123695A (zh) * 2016-11-30 2018-06-05 三星电机株式会社 体声波谐振器
CN108336982A (zh) * 2017-01-17 2018-07-27 三星电机株式会社 体声波谐振器

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JP2006340256A (ja) * 2005-06-06 2006-12-14 Toshiba Corp 薄膜圧電共振器及びその製造方法
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
JP2009290367A (ja) * 2008-05-27 2009-12-10 Panasonic Electric Works Co Ltd Ｂａｗ共振装置およびその製造方法
US9035538B2 (en) * 2011-11-02 2015-05-19 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
KR101856060B1 (ko) * 2011-12-01 2018-05-10 삼성전자주식회사 체적 음향 공진기
CN103532516B (zh) * 2013-08-05 2017-10-24 天津大学 体波谐振器及其制造方法
CN105680813B (zh) * 2016-02-25 2018-12-07 锐迪科微电子（上海）有限公司 一种薄膜体声波谐振器及其制造方法
US10256788B2 (en) * 2017-03-31 2019-04-09 Avago Technologies International Sales Pte. Limited Acoustic resonator including extended cavity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108123695A (zh) * 2016-11-30 2018-06-05 三星电机株式会社 体声波谐振器
CN108336982A (zh) * 2017-01-17 2018-07-27 三星电机株式会社 体声波谐振器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115241622A (zh) * 2021-04-23 2022-10-25 诺思(天津)微系统有限责任公司 谐振器、滤波器及电子设备
CN115241622B (zh) * 2021-04-23 2024-05-03 诺思(天津)微系统有限责任公司 谐振器、滤波器及电子设备
WO2024067087A1 (zh) * 2022-09-29 2024-04-04 常州承芯半导体有限公司 体声波谐振装置的形成方法
CN115498975A (zh) * 2022-11-16 2022-12-20 迈感微电子(上海)有限公司 一种薄膜体声波谐振器以及滤波器

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Publication number Publication date
JP7138988B2 (ja) 2022-09-20
WO2020199507A1 (zh) 2020-10-08
JP2022507325A (ja) 2022-01-18

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