CN111785685B - Display panel manufacturing method, display panel and display device - Google Patents

Display panel manufacturing method, display panel and display device Download PDF

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CN111785685B
CN111785685B CN202010686531.6A CN202010686531A CN111785685B CN 111785685 B CN111785685 B CN 111785685B CN 202010686531 A CN202010686531 A CN 202010686531A CN 111785685 B CN111785685 B CN 111785685B
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plasma
pixel
layer
pixel defining
defining layer
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CN111785685A (en
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夏曾强
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Yungu Guan Technology Co Ltd
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Yungu Guan Technology Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14—Carrier transporting layers
    • H10K50/15—Hole transporting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17—Carrier injection layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H10K59/351—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels comprising more than three subpixels, e.g. red-green-blue-white [RGBW]

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The embodiment of the invention provides a manufacturing method of a display panel, the display panel and a display device, wherein the manufacturing method of the display panel comprises the following steps: forming a pixel definition layer on a substrate, wherein the pixel definition layer comprises a body part and a plurality of pixel openings distributed in an array; forming functional groups on the surface of the pixel defining layer, and treating the pixel defining layer by using plasma, wherein the plasma at least comprises one redox gas so as to form the functional groups capable of inducing the aggregation of organic molecules on the surface of the pixel defining layer; and forming a current carrier layer on the side of the pixel defining layer, which faces away from the substrate. The embodiment of the invention can reduce the transverse current, avoid the low gray scale color cast of the display picture caused by current crosstalk and improve the display effect of the display panel.

Description

Display panel manufacturing method, display panel and display device
Technical Field
The invention relates to the technical field of display equipment, in particular to a display panel, a manufacturing method of the display panel and a display device.
Background
Flat Display panels, such as Liquid Crystal Display (LCD) panels, Organic Light Emitting Diode (OLED) panels, and Display panels using Light Emitting Diode (LED) devices, have advantages of high image quality, power saving, thin body, and wide application range, and are widely used in various consumer electronics products, such as mobile phones, televisions, personal digital assistants, digital cameras, notebook computers, and desktop computers, and become the mainstream of Display devices.
In the display panel, because the lighting voltages of the red sub-pixel, the green sub-pixel and the blue sub-pixel are different, when the sub-pixel with high lighting voltage is lighted, current flows transversely through the current carrier layer, so that the sub-pixel with low lighting voltage is lightly lighted, a display picture has low gray scale color cast, and display abnormity occurs.
Therefore, a method for manufacturing a display panel, a display panel and a display device are needed.
Disclosure of Invention
The embodiment of the invention provides a manufacturing method of a display panel, the display panel and a display device, and aims to improve the display effect of the display panel.
An embodiment of the present invention provides a method for manufacturing a display panel, including:
forming a pixel definition layer on a substrate, wherein the pixel definition layer comprises a body part and a plurality of pixel openings distributed in an array;
forming functional groups on the surface of the pixel defining layer, and treating the pixel defining layer by using plasma, wherein the plasma at least comprises one redox gas so as to form the functional groups capable of inducing the aggregation of organic molecules on the surface of the pixel defining layer;
and forming a current carrier layer on the side of the pixel defining layer, which faces away from the substrate.
According to an aspect of the present invention, in the step of forming the charge carrier layer on a side of the pixel defining layer facing away from the substrate: the carrier layer comprises a blocking part and a flow guide part, the blocking part is arranged on the surface of the body part, the flow guide part is positioned in the pixel opening, and molecules in at least part of the blocking part are bonded with the functional groups to form a molecular cluster, so that the transverse conductivity of the blocking part is smaller than that of the flow guide part.
According to an aspect of the present invention, the forming of the functional group on the surface of the pixel defining layer further comprises, before the step:
a pretreatment step, selecting plasma to treat the pixel definition layer;
and the power of the plasma treatment in the pre-treatment step is larger than that in the step of forming the functional group on the surface of the pixel defining layer.
According to an aspect of the present invention, in the pre-treatment step, the power of the plasma treatment is 500W to 10000W, and the time of the plasma treatment is 1s to 10 min;
in the step of forming the functional group on the surface of the pixel definition layer, the power of the plasma treatment is 100W-1000W, and the time of the plasma treatment is 1 s-10 min;
according to an aspect of the present invention, the power of the plasma treatment is 1000W to 5000W in the pre-treatment step.
According to an aspect of the present invention, the step of forming the functional group on the surface of the pixel defining layer further includes: and placing the substrate provided with the pixel defining layer in a plasma processing cavity, and introducing plasma into the plasma processing cavity, wherein the flow speed of the introduced plasma is 5L/s-50L/s.
According to an aspect of the present invention, in the step of forming the functional group on the surface of the pixel defining layer, after the step of treating the pixel defining layer with the plasma, the method further includes:
and in the stage of continuously injecting the plasma, continuously introducing the plasma into the plasma processing cavity at the flow speed of 5-50L/s for 1-10 min.
According to an aspect of the invention, after the continuous injection plasma phase, further comprising:
and standing for 1-55 min in the standing reaction stage.
According to one aspect of the invention, the redox gas comprises: o is2、O3、NH3、CO2And C2H4One or more of (a).
According to one aspect of the invention, the functional groups include-OH, -OOH, NH2-CO-and C2H4One or more of the chains.
According to an aspect of the present invention, the substrate further includes a first electrode exposed by the pixel opening, and before the step of forming the functional group on the surface of the pixel defining layer, the substrate further includes:
a mask plate is arranged on one side of the pixel defining layer, which is far away from the substrate, the mask plate is provided with a plurality of openings which are distributed in an array manner, and the body part is exposed from the openings;
in the step of selectively plasma-treating the pixel defining layer, the body portion exposed from the opening is selectively plasma-treated.
On the other hand, an embodiment of the present invention further provides a display panel, including: a substrate; the pixel definition layer comprises a body part and a plurality of pixel openings distributed in an array; and the current carrier layer is positioned on one side of the pixel definition layer, which is deviated from the substrate, and comprises a blocking part and a flow guiding part, wherein the blocking part is arranged on the surface of the body part, the flow guiding part is positioned in the pixel opening, and a molecular cluster is formed in at least part of the blocking part, so that the transverse conductivity of the blocking part is smaller than that of the flow guiding part.
In another aspect, an embodiment of the present invention further provides a display device, including the display panel described above.
In the method for manufacturing a display panel according to the embodiment of the invention, a pixel definition layer is first formed on a substrate, and the pixel definition layer includes a body portion and a pixel opening. The light emitting material of the display panel can be formed in the pixel openings, and the body portion can prevent crosstalk between adjacent pixel openings. And then, treating the pixel defining layer by using plasma, wherein the plasma comprises redox gas, and the redox gas can be activated by the plasma treatment, so that the redox gas forms functional groups and is grafted on the pixel defining layer. And finally, forming a current carrier layer on the pixel defining layer, wherein organic molecules in the current carrier layer can be bonded with the functional groups to form a molecular cluster. The molecular clusters can affect the orientation of the charge carrier layer, thereby reducing the lateral conductivity of the charge carrier layer. The molecular clusters are formed on the body part, namely the transverse conductivity of the part of the current carrier layer on the body part is smaller, so that the transverse current can be effectively reduced, the low gray scale color cast of a display picture caused by current crosstalk is avoided, and the display effect of the display panel is improved.
Drawings
Other features, objects and advantages of the invention will become apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings in which like or similar reference characters refer to the same or similar parts.
Fig. 1 is a schematic flow chart illustrating a method for manufacturing a display panel according to an embodiment of the present invention;
fig. 2 is a process diagram of a method for manufacturing a display panel according to an embodiment of the present invention;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is another process diagram of a method for manufacturing a display panel according to an embodiment of the present invention;
fig. 5 is a diagram illustrating a further process of a method for manufacturing a display panel according to an embodiment of the present invention;
FIG. 6 is a schematic view of a portion of the enlarged structure at I in FIG. 5;
FIG. 7 is a diagram illustrating a further process of a method for manufacturing a display panel according to an embodiment of the present invention;
FIG. 8 is an enlarged partial view of FIG. 7 at II;
fig. 9 is a process diagram of another display panel manufacturing method;
FIG. 10 is a further process diagram of a method for manufacturing a display panel according to another embodiment of the present invention;
FIG. 11 is a schematic flow chart illustrating a method for manufacturing a display panel according to another embodiment of the present invention;
FIG. 12 is a schematic flow chart illustrating a method for manufacturing a display panel according to another embodiment of the present invention;
fig. 13 is a process diagram of a method of manufacturing a display panel according to still another embodiment of the present invention;
fig. 14 is a schematic structural diagram of a display panel according to an embodiment of the present invention.
Description of reference numerals:
10. a substrate;
20. a first electrode;
30. a pixel defining layer; 31. a body portion; 311. a top surface; 312. a side surface; 313. a functional group; 32. a pixel opening;
40. a charge carrier layer; 41. a hole injection layer; 42. a hole transport layer; 401. a blocking section; 401a, molecular clusters; 402. a flow guide part;
50. and (5) masking the film plate.
Detailed Description
Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present invention by illustrating examples of the present invention. In the drawings and the following description, at least some well-known structures and techniques have not been shown in detail in order to avoid unnecessarily obscuring the present invention; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the description of the present invention, it is to be noted that, unless otherwise specified, "a plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated for convenience in describing the invention and to simplify description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The directional terms appearing in the following description are intended to be illustrative in all directions, and are not intended to limit the specific construction of embodiments of the present invention. In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, e.g., as either a fixed connection, a removable connection, or an integral connection; can be directly connected or indirectly connected. The specific meaning of the above terms in the present invention can be understood as appropriate to those of ordinary skill in the art.
For better understanding of the present invention, a method for manufacturing a display panel, and a display device according to an embodiment of the present invention will be described in detail below with reference to fig. 1 to 14.
Referring to fig. 1, fig. 1 is a flowchart illustrating a method for manufacturing a display panel according to an embodiment of the invention.
According to the manufacturing method of the display panel provided by the embodiment of the invention, the manufacturing method of the display panel comprises the following steps:
step S01: a pixel defining layer is formed on a substrate.
Referring to fig. 2 and 3 together, fig. 2 is a cross-sectional view of a display panel manufactured by the manufacturing method of the present invention, and fig. 3 is a top view of the display panel. The pixel defining layer 30 includes a body portion 31 and a plurality of pixel openings 32 distributed in an array.
Step S02: and forming a functional group on the surface of the pixel definition layer.
Referring to fig. 4, the pixel defining layer 30 is optionally treated with a plasma including at least one redox gas to form functional groups 313 on the surface of the pixel defining layer 30, which can induce aggregation of organic molecules. Referring to fig. 5 and 6 together, fig. 6 is a partial enlarged structural diagram of fig. 5. After the pixel defining layer 30 is plasma-treated, a functional group 313 is formed on the surface of the pixel defining layer 30. It is to be understood that the arrangement of the functional groups 313 is not limited to the arrangement shown in fig. 6, and the functional groups 313 may be arranged on the surface of the pixel defining layer 30 in other manners.
The functional group 313 capable of inducing aggregation of organic molecules means: organic molecules can be bonded to each other with functional groups 313 to aggregate to form molecular clusters 401 a. The organic molecule and the functional group 313 may be bonded to each other using at least one of van der waals forces, molecular forces, atomic forces, hydrogen bonding, pi-pi interactions, or surface free energy.
Step S03: and forming a current carrier layer on the side of the pixel defining layer, which faces away from the substrate.
Referring to fig. 7 and 8 together, fig. 8 is a schematic view of a partial enlarged structure of fig. 7. At least a portion of the molecules within carrier layer 40 are bonded to functional groups 313 to form molecular clusters 401 a.
In the method for manufacturing a display panel according to the embodiment of the present invention, the pixel defining layer 30 is first formed on the substrate 10, and the pixel defining layer 30 includes the body portion 31 and the pixel opening 32. The light emitting material of the display panel can be formed in the pixel opening 32, and the body part 31 can prevent the cross talk between the adjacent pixel openings 32. Then, the pixel defining layer 30 is treated with plasma including a redox gas, and the redox gas can be activated by the plasma treatment, so that the redox gas forms the functional group 313 and is grafted on the pixel defining layer 30. Finally, a carrier layer 40 is formed on the pixel defining layer 30, and organic molecules in the carrier layer 40 can be bonded with the functional groups 313 to form molecular clusters 401 a. Molecular clusters 401a can affect the orientation of carrier layer 40, thereby reducing the lateral conductivity of carrier layer 40. The molecular clusters 401a are formed on the body 31, that is, the lateral conductivity of the carrier layer 40 on the body 31 is relatively small, so that the lateral current can be effectively reduced, the low gray level color shift of the display screen caused by current crosstalk is avoided, and the display effect of the display panel is improved.
The horizontal current is opposite to the vertical current, which is a current flowing in the thickness direction of the display panel and capable of driving the display panel to emit light. Lateral current refers to current flowing within carrier layer 40. Lateral conductivity refers to how easily current flows laterally within carrier layer 40, with greater lateral conductivity facilitating current flow laterally within carrier layer 40, whereas less lateral conductivity making current flow laterally within carrier layer 40 more difficult. A longitudinal direction is, for example, the Z direction in fig. 2 and a lateral direction is, for example, the X direction in fig. 2, it being understood that a direction perpendicular to the Z direction within charge carrier layer 40 may be considered a lateral direction.
In some alternative embodiments, the charge carrier layer 40 includes a blocking portion 401 and a flow guiding portion 402, the blocking portion 401 is disposed on the surface of the body portion 31, the flow guiding portion 402 is located in the pixel opening 32, and at least a portion of molecules in the blocking portion 401 are bonded with the functional group 313 to form a molecular cluster 401a, so that the lateral conductivity of the blocking portion 401 is smaller than that of the flow guiding portion 402.
The material of the barrier portion 401 includes an organic material in which organic molecules can be bonded to each other with the functional group 313 to form a molecular cluster 401 a. A single molecule or a plurality of molecules in the organic material and the same functional group 313 are bonded to each other to form a molecular cluster 401 a.
In these alternative embodiments, the blocking portion 401 in the carrier layer 40 is located on the surface of the body portion 31, so that a single molecule or multiple molecules in the blocking portion 401 can be bonded with the functional group 313 to form a molecular cluster 401a, the molecular cluster 401a is usually formed along a longitudinal extension preset distance, which can block the flow of carriers to a certain extent, reduce the mobility of the blocking portion 401 in the transverse direction, make it difficult for the carriers to flow through the blocking portion 401, effectively reduce the transverse current, avoid the low gray scale color cast of the display screen caused by the current crosstalk, and improve the display effect of the display panel.
In some alternative embodiments, the body portion 31 includes a top surface 311 on a side facing away from the substrate 10 and a side surface 312 enclosing the pixel opening 32, and the blocking portion 401 may be formed on the top surface 311 and/or the side surface 312.
Referring to fig. 9, fig. 9 shows the molecular arrangement structure in the charge carrier layer 40 when the functional group 313 is not formed on the pixel defining layer 30. Only the molecular arrangement within a portion of carrier layer 40 located on top surface 311 of body portion 31 is shown in fig. 9. When the functional group 313 is not formed on the pixel defining layer 30, molecules within the carrier layer 40 are discretely and uniformly distributed. Lateral mobility of portions within carrier layer 40 remains substantially uniform.
With continued reference to fig. 7 and 8, fig. 7 and 8 show the arrangement of molecular structures in charge carrier layer 40 when a single molecule or a plurality of molecules in charge carrier layer 40 are bonded to functional group 313 to form molecular cluster 401a when functional group 313 is disposed on pixel defining layer 30. Fig. 7 and 8 show schematic structural views of molecular clusters 401a in carrier layer 40 when barrier portion 401 is disposed on top surface 311. When functional group 313 is formed on pixel defining layer 30, organic molecules in charge carrier layer 40 are induced by functional group 313 to aggregate and form molecular cluster 401a, the molecules are no longer discretely and uniformly distributed, the molecules are no longer in an initial arrangement state, and the changed molecular state causes lateral conductivity of charge carrier layer 40 to decrease. The molecular clusters 401a grow in the direction crossing the transverse direction, so that the carrier layer 40 has the orientation crossing the transverse direction, the mobility of the carrier layer 40 in the transverse direction is reduced, the transverse current is further effectively reduced, the low gray scale color cast of a display picture caused by current crosstalk is avoided, and the display effect of the display panel is improved.
The extending direction of the molecular cluster 401a is not limited, and for example, the molecular cluster 401a may be formed to extend along the longitudinal direction by adjusting the parameters of the plasma treatment, or the molecular cluster 401a may form a predetermined angle with the transverse direction. When molecular clusters 401a are formed in carrier layer 40, molecular clusters 401a extend a predetermined distance in the longitudinal direction, and the extension distance of molecular clusters 401a in the longitudinal direction is greater than the extension distance of a single molecule in the longitudinal direction, so that molecular clusters 401a can increase the mobility of carrier layer 40 in the longitudinal direction and decrease the mobility of carrier layer 40 in the transverse direction.
Referring to fig. 10, carrier layer 40 may be disposed in various ways, and in some alternative embodiments, carrier layer 40 includes, for example, a hole injection layer 41, and hole injection layer 41 is located on the surface of pixel defining layer 30. The blocking portion 401 and the flow guide portion 402 are provided in the hole injection layer 41. Molecules in the hole injection layer 41 and the functional group 313 are bonded to each other to form a molecular cluster 401a, so that the molecular cluster 401a is oriented to grow in the hole injection layer 41.
In other alternative embodiments, charge carrier layer 40 further includes hole transport layer 42, hole transport layer 42 being located on a side of hole injection layer 41 facing away from pixel defining layer 30. When molecules in the hole injection layer 41 and the functional group 313 are bonded to each other to form the molecular cluster 401a, the molecular cluster 401a in the hole injection layer 41 serves as a seed crystal, so that the material in the hole transport layer 42 is oriented on the molecular cluster 401 a.
Charge carrier layer 40, for example, also includes an electron transport layer and an electron injection layer that may be seeded with molecular clusters 401a within hole transport layer 42, with the materials within the electron transport layer and the electron injection layer continuing to grow epitaxially on molecular clusters 401 a.
Referring to fig. 11, fig. 11 is a flowchart illustrating a method for manufacturing a display panel according to another embodiment of the invention. According to another embodiment of the present invention, before step S02, the method for manufacturing a display panel further includes:
step S02': and a pretreatment step, wherein plasma is selected to treat the pixel definition layer.
Wherein the power of the plasma treatment in the pre-treatment step is greater than the power of the plasma treatment in the step of forming the functional group 313 on the surface of the pixel defining layer 30. That is, the power of the plasma treatment in step S02' is greater than the power of the plasma treatment in step S02.
In these alternative embodiments, the surface of the pixel defining layer 30 can be sufficiently cleaned by the pretreatment step to avoid impurities from affecting the grafting of the functional groups 313. And the pixel defining layer 30 is processed with higher power, so that a radical site can be formed on the surface of the pixel defining layer 30, and the subsequent plasma grafting is convenient for forming the functional group 313. Using a lower processing power in step S02 facilitates the generation of redox gas sites, so that redox gas can be better grafted to the surface of the pixel defining layer 30.
Alternatively, in step S02', the plasma may be provided in various ways, and the plasma may be an inert gas.
Or, in other alternative embodiments, the plasma in step S02' has the same composition as the plasma in step S02, and the plasma does not need to be changed in the manufacturing method of the display panel, so that the manufacturing method of the display panel can be simplified, and the forming efficiency of the display panel can be improved.
In some optional embodiments, in step S02', the power of the plasma treatment is 500W-10000W, and the time of the plasma treatment is 1S-10 min. Further, in step S02', the power of the plasma treatment is 1000W to 5000W. When the power and time of the plasma treatment are within the above ranges, the cleanliness of the surface of the pixel defining layer 30 after the pretreatment can be ensured, the plasma treatment can be prevented from causing serious damage to the main body 31, and the cross talk between the adjacent pixel openings 32 caused by the insufficient longitudinal extension distance of the main body 31 can be avoided.
In some alternative embodiments, in step S02, the power of the plasma treatment is 100W-1000W, and the time of the plasma treatment is 1S-10 min. When the power and time of the plasma treatment are within the above ranges, it is possible to prevent the redox gas of the plasma from directly penetrating the body 31 and failing to react with the body 31 to form the functional group 313, and also to prevent the redox gas from failing to generate a site and failing to graft with the body 31 due to insufficient power or insufficient duration of the plasma treatment.
In step S02, for example, the substrate 10 provided with the pixel defining layer 30 is placed in a plasma processing chamber, and plasma is supplied into the plasma processing chamber at a flow rate of 5L/S to 50L/S. In these alternative embodiments, when the flow rate of the plasma is within the above range, it is possible to avoid both the difficulty in forming sufficient functional groups 313 due to too slow flow rate of the plasma and the waste of energy due to too fast flow rate of the plasma.
Referring to fig. 12, fig. 12 is a schematic flow chart illustrating a manufacturing method of a display panel according to another embodiment of the invention. According to another embodiment of the present invention, in a manufacturing method of a display panel, step S02 includes:
step S021: and in the plasma processing stage, the pixel defining layer is processed by using plasma.
Step S022: and in the stage of continuously injecting the plasma, continuously introducing the plasma into the plasma processing cavity at the flow speed of 5-50L/s.
The duration time of the continuous injection plasma stage is 1 s-10 min.
In the above embodiment, the plasma is continuously injected after the pixel defining layer 30 is processed by the plasma, so that the redox gas of the plasma can be sufficiently grafted with the body portion 31 to form more functional groups 313.
Optionally, after step S022, the method further includes:
step S023: and standing for 1-55 min in the standing reaction stage. So that the redox gas is sufficiently grafted to the pixel defining layer 30. By providing a static reaction stage, the redox gas can be further sufficiently grafted to the pixel defining layer 30, and more functional groups 313 are grafted on the surface of the pixel defining layer 30.
In some alternative embodiments, the redox gas comprises: o is2、O3、NH3、CO2And C2H4One or more of (a). When the pixel defining layer 30 is treated with the redox gases as plasma, the redox gases can be activated to form the functional groups 313. Optionally, functional group 313 includes-OH, -OOH, NH2-CO-and C2H4One or more of the chains.
In these alternative embodiments, O2、O3、NH3、CO2And C2H4These redox gases act as a plasma, have a small molecular character, and are easily grafted on the surface of the pixel defining layer 30. And these gases have the activating property of plasma, the formed functional groups 313 can induce the aggregation of organic molecules.
The plasma is generated, for example, from the redox gas O2、O3、NH3、CO2And C2H4Mixed with other inert gases. Alternatively, the plasma is formed from the redox gas O2、O3、NH3、CO2And C2H4One or more of them. The user may select O according to actual usage requirements and the material of charge carrier layer 402、O3、NH3、CO2And C2H4One or more of (a).
The charge carrier layer 40 includes, for example, a hole injection layer 41, and in some alternative embodiments, the material of the hole injection layer 41 includes one or more of 4, 4', 4 ″ -tris (N-3-methylphenyl-N-phenylamino) triphenylamine, copper phthalocyanine, poly (3, 4-ethylenedioxythiophene), poly (styrenesulfonic acid).
For example, when the plasma includes O2, O2 is activated to form-OH when the pixel defining layer 30 is treated. OH is grafted to the surface of pixel defining layer 30, and when carrier layer 40 is formed on pixel defining layer 30, nitrogen-containing, oxygen-containing groups within carrier layer 40 bond with OH to form molecular clusters 401 a.
When the plasma includes O3, pixel-defining layer 30 is treated such that O3 is activated to form-OOH. OOH is grafted to the surface of pixel defining layer 30, and when charge carrier layer 40 is formed on pixel defining layer 30, nitrogen-containing, oxygen-containing groups in charge carrier layer 40 bond with-OH to form molecular clusters 401 a.
When the plasma includes NH3, the pixel definition layer 30 is treated such that NH3 is activated to form NH 2. NH2 is grafted to the surface of pixel defining layer 30, and when carrier layer 40 is formed on pixel defining layer 30, the amino groups in carrier layer 40 and the electron pairs in the Cu atoms bond with NH2 to form molecular cluster 401 a.
When the plasma includes CO2, pixel-defining layer 30 is treated so that CO2 is activated to form CO-. CO-grafts to the surface of pixel defining layer 30, and when carrier layer 40 is formed on pixel defining layer 30, sulfonic acid groups within carrier layer 40 bond with CO to form molecular clusters 401 a.
When the plasma includes C2H4, the pixel defining layer 30 is treated such that the C2H4 is activated to form a C2H4 chain. The C2H4 chains are grafted to the surface of pixel defining layer 30, and when carrier layer 40 is formed on pixel defining layer 30, the organic material C backbone alkyl chains within carrier layer 40 bond with the C2H4 chains to form molecular cluster 401a due to the fact that the surface free energies are similarly compatible.
Referring to fig. 13, in some alternative embodiments, the substrate 10 is generally provided with the first electrodes 20, the first electrodes 20 are distributed in an array, the first electrodes 20 are disposed corresponding to the pixel openings 32, the first electrodes 20 are exposed from the pixel openings 32, and the step S02 further includes: a mask plate 50 is disposed on a side of the pixel defining layer 30 away from the substrate 10, the mask plate 50 has a plurality of openings distributed in an array, and the body 31 is exposed through the openings. In step S02, a plasma process is selected for the body 31 exposed through the opening.
In these alternative embodiments, the pixel opening 32 may be shielded by using the mask 50, that is, the first electrode 20 may be shielded by the mask 50, and the body 31 can be processed by the plasma without processing the first electrode 20, and the normal operation of the first electrode 20 is not affected by the damage to the first electrode 20.
The size of the opening of the mask 50 is not limited, and the opening of the mask 50 exposes, for example, a part of the top surface 311 of the main body 31, or the opening of the mask 50 exposes the whole top surface 311 of the main body 31, that is, the functional group 313 is grafted to the top surface 311 of the main body 31, and the blocking portion 401 is formed on the top surface 311 of the main body 31. Or the opening of the mask plate 50 exposes the top surface 311 and at least part of the side surface 312 of the body portion 31, that is, the functional group 313 is grafted to the top surface 311 and the side surface 312 of the body portion 31, and the blocking portion 401 is formed on the top surface 311 and the side surface 312 of the body portion 31.
Fig. 14 is a schematic view illustrating a structure of a display panel according to a second embodiment of the present invention.
According to the display panel shown in the embodiment of the present invention, the display panel includes: a substrate 10; a pixel defining layer 30 including a body portion 31 and a plurality of pixel openings 32 distributed in an array; and the carrier layer 40 is positioned on one side of the pixel defining layer 30, which is far away from the substrate 10, the carrier layer 40 comprises a blocking part 401 and a flow guiding part 402, the blocking part 401 is arranged on the surface of the body part 31, the flow guiding part 402 is positioned in the pixel opening 32, and a molecular cluster 401a is formed in at least part of the blocking part 401, so that the transverse conductivity of the blocking part 401 is smaller than that of the flow guiding part 402.
For example, the molecular cluster 401a is formed by the functional group 313 on the surface of the body portion 31 and the single molecule or a plurality of molecules in the blocking portion 401 being aggregated.
In the display panel according to the embodiment of the present invention, molecular clusters 401a are formed in the barrier portion 401 of the carrier layer 40. The molecular clusters 401a can affect the orientation of the carrier layer 40, so that the transverse conductivity of the blocking portion 401 is reduced, the transverse conductivity of the blocking portion 401 is smaller, the transverse mobility of the blocking portion 401 is reduced, transverse current is effectively reduced, low gray scale color cast of a display screen caused by current crosstalk is avoided, and the display effect of the display panel is improved.
The relative positions of the barrier portion 401 and the body portion 31 are various, the body portion 31 includes a top surface 311 facing away from the substrate 10 and a side surface 312 facing the pixel opening 32, that is, the top surface 311 and the substrate 10 are spaced apart in the thickness direction, and the side surface 312 is connected between the top surface 311 and the substrate 10. The barrier section 401 may be provided to the top surface 311 and/or the side surface 312 as long as the barrier section 401 is provided around the circumference of at least part of the pixel opening 32. The barrier portions 401 may surround the entire outer circumference of the pixel opening 32, i.e., the barrier portions 401 are continuously distributed on the outer circumference of the same pixel opening 32. Or the barrier section 401 may be provided around part of the circumference of the pixel opening 32.
In some alternative embodiments, the display panel includes a plurality of sub-pixels distributed in an array, and the plurality of sub-pixels includes, for example, a red sub-pixel, a green sub-pixel, and a blue sub-pixel. In other embodiments, the plurality of sub-pixels further includes, for example, a yellow sub-pixel. The pixel opening 32 of the pixel defining layer 30 is disposed corresponding to a plurality of sub-pixels, and each pixel opening 32 is disposed corresponding to each sub-pixel.
The substrate 10 is provided with a plurality of first electrodes 20, for example, and each first electrode 20 is provided corresponding to each pixel opening 32. So that one of the sub-pixels can be driven to emit light when one of the first electrodes 20 is energized.
The carrier layer 40 may be disposed in various ways, and in some alternative embodiments, the carrier layer 40 includes a hole injection layer 41, the hole injection layer 41 is located on the surface of the pixel defining layer 30, and the blocking portion 401 and the guiding portion 402 are disposed on the hole injection layer 41. That is, a single molecule or a plurality of molecules within the hole injection layer 41 are bonded to the functional group 313 on the surface of the pixel defining layer 30 to form a molecular cluster 401 a.
As described above, the material of the hole injection layer 41 includes, for example, one or more of 4, 4', 4 ″ -tris (N-3-methylphenyl-N-phenylamino) triphenylamine, copper phthalocyanine, poly (3, 4-ethylenedioxythiophene), and poly (styrenesulfonic acid), which can make the lateral conductivity of the hole injection layer 41 low and prevent an excessive lateral current. One or more materials selected from 4, 4', 4 ″ -tris (N-3-methylphenyl-N-phenylamino) triphenylamine, copper phthalocyanine, poly (3, 4-ethylenedioxythiophene), and poly (styrenesulfonic acid) may be implanted into the hole injection layer 41 corresponding to the portion of the body portion 31 by means of ion implantation or the like.
In some alternative embodiments, the hole injection layer 4131 has a thickness of 80-100 a. The hole injection layer 4131 is thin, and lateral current can be further reduced.
In other alternative embodiments, charge carrier layer 40 includes hole transport layer 42. The hole transport layer 42 is located on the side of the hole injection layer 41 facing away from the pixel defining layer 30. When molecules in the hole injection layer 41 and the functional group 313 are bonded to each other to form the molecular cluster 401a, the molecular cluster 401a in the hole injection layer 41 serves as a seed crystal, so that the material in the hole transport layer 42 is oriented on the molecular cluster 401 a.
In some alternative embodiments, the material of the hole transport layer 42 includes one or more of N, N '-diphenyl-N, N' -bis (3-methylphenyl) -1, 1 '-biphenyl-4, 4' -diamine, N '-bis (naphthalen-1-yl) -N, N' -diphenyl-benzidine, which can make the lateral conductivity of the hole transport layer 4232 low and avoid lateral current flow. One or more materials selected from N, N '-diphenyl-N, N' -bis (3-methylphenyl) -1, 1 '-biphenyl-4, 4' -diamine, and N, N '-bis (naphthalen-1-yl) -N, N' -diphenyl-benzidine may be implanted into the hole transport layer 42 corresponding to the portion of the body portion 31 by ion implantation or the like.
In some alternative embodiments, the hole transport layer 42 has a thickness of 900-. The hole transport layer 42 is thin and can reduce lateral current.
Optionally, carrier layer 40 further includes a light emitting layer, an electron transport layer, and an electron injection layer on hole transport layer 42.
Next, a method for manufacturing the display panel will be described by taking the display panel structure shown in fig. 14 as an example. The manufacturing method of the display panel comprises the following steps:
the method comprises the following steps: a pixel defining layer 30 is formed on the substrate 10. The pixel defining layer 30 includes a body portion 31 and a plurality of pixel openings 32 distributed in an array.
The substrate 10 is further provided with a plurality of first electrodes 20 distributed in an array, for example, and each first electrode 20 is provided corresponding to each pixel opening 32. The substrate 10 is provided with a drive circuit, for example.
Step two: the substrate 10 with the pixel defining layer 30 is placed in a plasma processing chamber, and plasma is introduced into the plasma processing chamber, wherein the flow rate of the introduced plasma is 5L/s-50L/s. The plasma comprises O2、O3、NH3、CO2And C2H4One or more of (a).
Step three: the pixel defining layer 30 is pre-treated, the pixel defining layer 30 is treated by plasma, the power of the plasma treatment is 1000W-5000W, and the time of the plasma treatment is 1 s-10 min.
Through the third step, the surface of the pixel defining layer 30 can be cleaned, radical sites can be formed on the surface of the pixel defining layer 30, and the redox gas in part of the plasma can be activated.
In some optional embodiments, before the third step, a mask plate 50 may be further disposed on a side of the pixel defining layer 30 away from the substrate 10, where the mask plate 50 has a plurality of openings distributed in an array, and the body portion 31 is exposed from the openings.
Step four: the power of the plasma treatment is reduced so that the power of the plasma treatment is kept between 100W and 1000W. The redox gas in the plasma is sufficiently activated such that the redox gas has reactive sites to form functional groups 313, and such that the functional groups 313 react with free radical sites on the pixel defining layer 30 to be grafted on the pixel defining layer 30.
Step five: and in the stage of continuously injecting the plasma, continuously introducing the plasma into the plasma processing cavity at the flow speed of 5-50L/s for 1-10 min.
Step six: and standing for 1-55 min in the standing reaction stage.
Step seven: a charge carrier layer 40 is formed on the side of the pixel defining layer 30 facing away from the substrate 10.
The carrier layer 40 includes, for example, a hole injection layer 41 and a hole transport layer 42. Organic molecules in the current carrier layer 40 are bonded with the functional groups 313 to form molecular clusters 401a, so that the lateral mobility of the current carrier layer 40 is reduced, lateral current can be effectively reduced, low gray scale color cast of a display picture caused by current crosstalk is avoided, and the display effect of the display panel is improved.
The third embodiment of the present invention further provides a display device, including the display panel. The display device in the embodiment of the present invention includes, but is not limited to, a mobile phone, a Personal Digital Assistant (PDA), a tablet computer, an electronic book, a television, a door lock, a smart phone, a console, and other devices having a display function. Since the display device of the present invention includes the display panel, the display device of the present embodiment has the beneficial effects of the display panel, and is not described herein again.
The present invention may be embodied in other specific forms without departing from its spirit or essential characteristics. For example, the algorithms described in the specific embodiments may be modified without departing from the basic spirit of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (13)

1. A method of manufacturing a display panel, comprising:
forming a pixel definition layer on a substrate, wherein the pixel definition layer comprises a body part and a plurality of pixel openings distributed in an array;
forming functional groups on the surface of the pixel definition layer, and treating the pixel definition layer by using plasma, wherein the plasma at least comprises one redox gas so as to form the functional groups capable of inducing organic molecules to aggregate on the surface of the pixel definition layer;
and forming a current carrier layer on one side of the pixel defining layer, which faces away from the substrate.
2. A method according to claim 1, wherein in the step of forming a charge carrier layer on a side of the pixel defining layer facing away from the substrate: the carrier layer comprises a blocking part and a flow guiding part, the blocking part is arranged on the surface of the body part, the flow guiding part is positioned in the pixel opening, and at least part of molecules in the blocking part are bonded with the functional groups to form a molecular cluster, so that the transverse conductivity of the blocking part is smaller than that of the flow guiding part.
3. The method of claim 1, wherein the step of forming a functional group on the surface of the pixel defining layer further comprises, prior to the step of:
a pretreatment step of treating the pixel defining layer with plasma;
and the power of the plasma treatment in the pre-treatment step is larger than that in the step of forming the functional group on the surface of the pixel defining layer.
4. The method of claim 3,
in the pretreatment step, the power of plasma treatment is 500W-10000W, and the time of plasma treatment is 1 s-10 min;
in the step of forming the functional group on the surface of the pixel definition layer, the power of the plasma treatment is 100W-1000W, and the time of the plasma treatment is 1 s-10 min.
5. The method according to claim 4, wherein the power of the plasma treatment in the pretreatment step is 1000W to 5000W.
6. The method according to claim 1, wherein the step of forming a functional group on the surface of the pixel defining layer further comprises: and placing the substrate provided with the pixel defining layer in a plasma processing cavity, introducing the plasma into the plasma processing cavity, wherein the flow speed of the introduced plasma is 5L/s-50L/s.
7. The method of claim 6, wherein the step of forming the functional group on the surface of the pixel defining layer further comprises, after the step of treating the pixel defining layer with plasma:
and in the stage of continuously injecting the plasma, continuously introducing the plasma into the plasma processing cavity at the flow speed of 5-50L/s for 1-10 min.
8. The method of claim 7, further comprising, after the continuous implant plasma phase:
and standing for 1-55 min in the standing reaction stage.
9. The method of claim 1, wherein the redox gas comprises: o is2、O3、NH3、CO2And C2H4One or more of (a).
10. The method of claim 9, wherein the functional group comprises-OH, -OOH, NH2-CO-and C2H4One or more of the chains.
11. The method of claim 1, wherein the substrate further comprises a first electrode exposed by the pixel opening, and further comprising, before the step of forming a functional group on the surface of the pixel defining layer:
arranging a mask plate on one side of the pixel defining layer, which is far away from the substrate, wherein the mask plate is provided with a plurality of openings distributed in an array manner, and the body part is exposed out of the openings;
in the step of selectively plasma-treating the pixel defining layer, the body portion exposed by the opening is selectively plasma-treated.
12. A display panel, comprising:
a substrate;
the pixel definition layer comprises a body part and a plurality of pixel openings distributed in an array;
the current carrier layer is positioned on one side, away from the substrate, of the pixel defining layer and comprises a blocking portion and a flow guiding portion, the blocking portion is arranged on the surface of the body portion, the flow guiding portion is positioned in the pixel opening, and molecular clusters are formed in at least part of the blocking portion, so that the transverse electric conductivity of the blocking portion is smaller than that of the flow guiding portion.
13. A display device comprising the display panel of claim 12.
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