CN111751985A - Optical scanners, 3D measuring devices and robotic systems - Google Patents

Optical scanners, 3D measuring devices and robotic systems Download PDF

Info

Publication number
CN111751985A
CN111751985A CN202010224338.0A CN202010224338A CN111751985A CN 111751985 A CN111751985 A CN 111751985A CN 202010224338 A CN202010224338 A CN 202010224338A CN 111751985 A CN111751985 A CN 111751985A
Authority
CN
China
Prior art keywords
mirror
back surface
optical scanner
support portion
swing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010224338.0A
Other languages
Chinese (zh)
Other versions
CN111751985B (en
Inventor
儿嵨长子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN111751985A publication Critical patent/CN111751985A/en
Application granted granted Critical
Publication of CN111751985B publication Critical patent/CN111751985B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1679Programme controls characterised by the tasks executed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1694Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697Vision controlled systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Manipulator (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

本发明提供光学扫描仪、三维测量装置及具备该三维测量装置的机器人系统。该光学扫描仪的特征在于包括:反射镜,具有反射光的反射面和位于所述反射面的相反侧的第一背面;永久磁铁,配置在所述反射镜的所述第一背面;支撑部,支撑所述反射镜,具有位于与所述第一背面同一侧的第二背面;轴部,将所述反射镜与所述支撑部连接,使所述反射镜能够绕摆动轴摆动;第一部件,配置在所述支撑部的所述第二背面;第二部件,与所述摆动轴正交,在沿着所述第二背面的方向上悬臂支撑所述第一部件;第三部件,隔着所述第二部件与所述第一部件相对配置,并且与所述第二部件连接;以及电磁线圈,配置在所述第一部件与所述第三部件之间。

Figure 202010224338

The present invention provides an optical scanner, a three-dimensional measuring device, and a robot system equipped with the three-dimensional measuring device. The optical scanner is characterized by comprising: a reflecting mirror having a reflecting surface for reflecting light and a first back surface located on the opposite side of the reflecting surface; a permanent magnet arranged on the first back surface of the reflecting mirror; a support portion , which supports the mirror and has a second back on the same side as the first back; a shaft part connects the mirror with the support so that the mirror can swing around the swing axis; the first a member arranged on the second back surface of the support portion; a second member, which is orthogonal to the swing axis and supports the first member in a cantilever direction along the second back surface; and a third member, The second member is arranged opposite to the first member and is connected to the second member, and the electromagnetic coil is arranged between the first member and the third member.

Figure 202010224338

Description

光学扫描仪、三维测量装置及机器人系统Optical scanners, 3D measuring devices and robotic systems

技术领域technical field

本发明涉及一种光学扫描仪、三维测量装置及机器人系统。The invention relates to an optical scanner, a three-dimensional measuring device and a robot system.

背景技术Background technique

在专利文献1中,公开了一种光学扫描装置,其使入射光偏转而进行光学扫描。专利文献1中记载的光学扫描装置具有:矩形板状的反射镜部件,形成有镜面;框架部件,通过一对扭杆支撑反射镜部件;以及永久磁铁,粘合在反射镜部件的镜面的相反侧的面上。另外,专利文献1中还公开了:框架部件处于被上盖及下盖夹持的状态,反射镜部件及永久磁铁被密封在收纳空间内。而且,该光学扫描装置具有电磁铁,该电磁铁具备设置在永久磁铁附近的磁轭及卷绕在磁轭上的线圈。并且,专利文献1中还公开了:通过磁轭的间隙附近产生的磁场与永久磁铁的相互作用,使扭杆扭转而作为旋转轴并使反射镜部件往复运动。此外,下盖位于电磁铁与永久磁铁之间,并且电磁铁与永久磁铁之间的间隙难以减小,所以为了增大作用在永久磁铁上的洛伦兹力,需要增大流过电磁铁的电流。Patent Document 1 discloses an optical scanning device that deflects incident light to perform optical scanning. The optical scanning device described in Patent Document 1 includes: a rectangular plate-shaped mirror member formed with a mirror surface; a frame member supporting the mirror member via a pair of torsion bars; and a permanent magnet bonded to the opposite side of the mirror surface of the mirror member side surface. In addition, Patent Document 1 discloses that the frame member is held between the upper cover and the lower cover, and the mirror member and the permanent magnet are sealed in the storage space. Furthermore, the optical scanning device includes an electromagnet including a yoke provided in the vicinity of the permanent magnet and a coil wound around the yoke. Furthermore, Patent Document 1 discloses that the torsion bar is twisted as a rotation axis by the interaction of the magnetic field generated in the vicinity of the gap of the yoke and the permanent magnet, and the mirror member is reciprocated. In addition, the lower cover is located between the electromagnet and the permanent magnet, and it is difficult to reduce the gap between the electromagnet and the permanent magnet, so in order to increase the Lorentz force acting on the permanent magnet, it is necessary to increase the amount of flow through the electromagnet. current.

专利文献1:日本特开2009-69676号公报Patent Document 1: Japanese Patent Laid-Open No. 2009-69676

发明内容SUMMARY OF THE INVENTION

但是,专利文献1所记载的光学扫描装置中,如果流过电磁铁的电流增大,则电磁铁的发热量变大,使得框架部件产生热应力,从而导致框架部件变形。其结果产生镜面偏转光的方向的精度下降的问题。However, in the optical scanning device described in Patent Document 1, when the current flowing through the electromagnet increases, the amount of heat generated by the electromagnet increases, and thermal stress is generated in the frame member, which causes deformation of the frame member. As a result, there is a problem that the accuracy of the direction of the mirror-deflected light is lowered.

本发明的光学扫描仪的特征在于,具有:反射镜,具有反射光的反射面及位于所述反射面的相反侧的第一背面;永久磁铁,配置在所述反射镜的所述第一背面;支撑部,支撑所述反射镜,具有位于与所述第一背面同一侧的第二背面;轴部,将所述反射镜与所述支撑部连接,使所述反射镜能够绕摆动轴摆动;第一部件,配置在所述支撑部的所述第二背面上;第二部件,与所述摆动轴正交,在沿着所述第二背面的方向上悬臂支撑所述第一部件;第三部件,隔着所述第二部件与所述第一部件相对配置,并且与所述第二部件连接;以及电磁线圈,配置在所述第一部件与所述第三部件之间。The optical scanner of the present invention is characterized by comprising: a reflecting mirror having a reflecting surface for reflecting light and a first back surface located on the opposite side of the reflecting surface; and a permanent magnet arranged on the first back surface of the reflecting mirror a support part, supporting the reflector, and having a second back surface located on the same side as the first back surface; a shaft part, connecting the reflector with the support part, so that the reflector can swing around the swing axis a first member, disposed on the second back surface of the support portion; a second member, orthogonal to the swing axis, cantilevered to support the first member in a direction along the second back surface; A third member is arranged opposite to the first member via the second member and is connected to the second member; and an electromagnetic coil is arranged between the first member and the third member.

附图说明Description of drawings

图1是表示第一实施方式所涉及的机器人系统的整体构成的图。FIG. 1 is a diagram showing the overall configuration of a robot system according to the first embodiment.

图2是表示图1所示的机器人系统所具备的三维测量装置的整体构成的图。FIG. 2 is a diagram showing the overall configuration of a three-dimensional measurement device included in the robot system shown in FIG. 1 .

图3是表示图2所示的三维测量装置的立体图。FIG. 3 is a perspective view showing the three-dimensional measuring apparatus shown in FIG. 2 .

图4是表示图3所示的三维测量装置的内部的立体图。FIG. 4 is a perspective view showing the inside of the three-dimensional measuring apparatus shown in FIG. 3 .

图5是表示图4所示的投影部所投影的图案光的一个例子的俯视图。FIG. 5 is a plan view showing an example of pattern light projected by the projection unit shown in FIG. 4 .

图6是表示图4所示的三维测量装置所具有的光学扫描部的俯视图。FIG. 6 is a plan view showing an optical scanning unit included in the three-dimensional measurement apparatus shown in FIG. 4 .

图7是图6所示的光学扫描部的剖视图。FIG. 7 is a cross-sectional view of the optical scanning unit shown in FIG. 6 .

图8是图7所示的光学扫描部的立体图。FIG. 8 is a perspective view of the optical scanning unit shown in FIG. 7 .

图9是表示图7所示的光学扫描部的温度上升而产生热应力导致第一部件产生翘曲的状态的图。FIG. 9 is a view showing a state in which the temperature of the optical scanning unit shown in FIG. 7 rises and thermal stress is generated to cause warpage of the first member.

图10是表示图7所示的光学扫描部的温度上升而产生热应力导致第一部件产生翘曲的状态的图。FIG. 10 is a diagram showing a state in which the temperature of the optical scanning unit shown in FIG. 7 rises and thermal stress is generated to cause warpage of the first member.

图11是表示作为第二实施方式所涉及的光学扫描仪的光学扫描部的剖视图。11 is a cross-sectional view showing an optical scanning unit as an optical scanner according to a second embodiment.

附图标记说明Description of reference numerals

1:机器人系统;2:机器人;4:三维测量装置;5:机器人控制装置;6:主计算机;21:基座;22:机械臂;24:末端执行器;40:壳体;41:投影部;42:激光光源;44:光学系统;45:光学扫描部;45A:光学扫描部;47:拍摄部;48:控制部;49:测量部;221:第一臂;222:第二臂;223:第三臂;224:第四臂;225:第五臂;226:第六臂;251:第一驱动装置;252:第二驱动装置;253:第三驱动装置;254:第四驱动装置;255:第五驱动装置;256:第六驱动装置;401:底面;402:顶面;403:前表面;403a:窗部;404:背面;405:侧面;406:侧面;441:会聚透镜;442:棒状透镜;450:反射面;451:反射镜;451a:背面;452:支撑部;452a:背面;453:轴部;455:永久磁铁;456:电磁线圈;457:第一部件;458:第二部件;459:第三部件;471:相机;472:拍摄元件;473:会聚透镜;4562:绕组;4564:第一磁芯;4566:第二磁芯;4571:开口部;4572:支撑面;4592:支撑面;J:摆动轴;L:激光光束;O:中心;O1:第一轴;O2:第二轴;O3:第三轴;O4:第四轴;O5:第五轴;O6:第六轴;P0:基准面;P1:平面;PL:图案光;W:对象物;θ:角度。1: Robot system; 2: Robot; 4: 3D measuring device; 5: Robot control device; 6: Main computer; 21: Base; 22: Robot arm; 24: End effector; 40: Housing; 41: Projection part; 42: laser light source; 44: optical system; 45: optical scanning part; 45A: optical scanning part; 47: imaging part; 48: control part; 49: measuring part; 221: first arm; 222: second arm ;223:third arm;224:fourth arm;225:fifth arm;226:sixth arm;251:first drive;252:second drive;253:third drive;254:fourth 255: fifth drive; 256: sixth drive; 401: bottom; 402: top; 403: front; 403a: window; 404: back; 405: side; 406: side; 441: 442: Rod lens; 450: Reflective surface; 451: Reflector; 451a: Back surface; 452: Support part; 452a: Back surface; 453: Shaft part; 455: Permanent magnet; parts; 458: second part; 459: third part; 471: camera; 472: photographing element; 473: condenser lens; 4562: winding; 4564: first core; 4566: second core; 4571: opening ;4572: Support surface; 4592: Support surface; J: Swing axis; L: Laser beam; O: Center; O1: First axis; O2: Second axis; O3: Third axis; O4: Fourth axis; O5 : Fifth axis; O6: Sixth axis; P0: Reference plane; P1: Plane; PL: Pattern light; W: Object; θ: Angle.

具体实施方式Detailed ways

下面,基于附图所示的实施方式详细地说明本发明的光学扫描仪、三维测量装置及机器人系统。Hereinafter, the optical scanner, the three-dimensional measurement device, and the robot system of the present invention will be described in detail based on the embodiments shown in the drawings.

第一实施方式first embodiment

图1是表示第一实施方式所涉及的机器人系统的整体构成的图。图2是表示图1所示的机器人系统所具备的三维测量装置的整体构成的图。图3是表示图2所示的三维测量装置的立体图。图4是表示图3所示的三维测量装置的内部的立体图。图5是表示图4所示的投影部所投影的图案光的一个例子的俯视图。图6是表示图4所示的三维测量装置所具有的光学扫描部的俯视图。FIG. 1 is a diagram showing the overall configuration of a robot system according to the first embodiment. FIG. 2 is a diagram showing the overall configuration of a three-dimensional measurement device included in the robot system shown in FIG. 1 . FIG. 3 is a perspective view showing the three-dimensional measuring apparatus shown in FIG. 2 . FIG. 4 is a perspective view showing the inside of the three-dimensional measuring apparatus shown in FIG. 3 . FIG. 5 is a plan view showing an example of pattern light projected by the projection unit shown in FIG. 4 . FIG. 6 is a plan view showing an optical scanning unit included in the three-dimensional measurement apparatus shown in FIG. 4 .

图1所示的机器人系统1包括:机器人2;三维测量装置4,使用激光光束L进行对象物W的三维测量;机器人控制装置5,基于三维测量装置4的测量结果来控制机器人2的驱动;以及主计算机6,能够与机器人控制装置5通信。另外,这些各个部分可以有线或无线通信,也可以通过因特网等网络进行通信。The robot system 1 shown in FIG. 1 includes: a robot 2; a three-dimensional measuring device 4, which uses a laser beam L to perform three-dimensional measurement of an object W; a robot control device 5, which controls the driving of the robot 2 based on the measurement results of the three-dimensional measuring device 4; And the host computer 6 can communicate with the robot controller 5 . In addition, these various parts can communicate by wire or wirelessly, and can also communicate through a network such as the Internet.

1.机器人1. Robots

机器人2例如是进行精密仪器或构成精密仪器的组件的材料供给、材料去除、输送及组装等作业的机器人。但是,机器人2的用途并无特别限定。本实施方式所涉及的机器人2是六轴机器人,如图1所示,具有固定于地板或天花板的基座21以及连接于基座21的机械臂22。The robot 2 is, for example, a robot that performs operations such as material supply, material removal, conveyance, and assembly of precision instruments or components constituting the precision instruments. However, the use of the robot 2 is not particularly limited. The robot 2 according to the present embodiment is a six-axis robot, and as shown in FIG. 1 , has a base 21 fixed to the floor or ceiling, and a robot arm 22 connected to the base 21 .

机械臂22具有:第一臂221,绕着第一轴O1转动自如地连结于基座21;第二臂222,绕着第二轴O2转动自如地连结于第一臂221;第三臂223,绕着第三轴O3转动自如地连结于第二臂222;第四臂224,绕着第四轴O4转动自如地连结于第三臂223;第五臂225,绕着第五轴O5转动自如地连结于第四臂224;以及第六臂226,绕着第六轴O6转动自如地连结于第五臂225。另外,在第六臂226上安装有末端执行器24,用于供机器人2执行作业。此外,以下也将第一臂221到第六臂226的末端执行器24侧称为“前端”或“前端侧”,将基座21侧称为“基端”或“基端侧”。The robotic arm 22 has: a first arm 221, which is rotatably connected to the base 21 around a first axis O1; a second arm 222, which is rotatably connected to the first arm 221 around a second axis O2; a third arm 223 , is rotatably connected to the second arm 222 around the third axis O3; the fourth arm 224 is rotatably connected to the third arm 223 around the fourth axis O4; the fifth arm 225 is rotatable around the fifth axis O5 The fourth arm 224 is freely connected to the sixth arm 226, and the fifth arm 225 is rotatably connected to the sixth arm 226 around the sixth axis O6. In addition, an end effector 24 is mounted on the sixth arm 226 for the robot 2 to perform work. In addition, the end effector 24 side of the first arm 221 to the sixth arm 226 is also referred to as a "front end" or "front end side", and the base 21 side is also referred to as a "basal end" or "basal end side".

另外,机器人2具有:第一驱动装置251,使第一臂221相对于基座21转动;第二驱动装置252,使第二臂222相对于第一臂221转动;第三驱动装置253,使第三臂223相对于第二臂222转动;第四驱动装置254,使第四臂224相对于第三臂223转动;第五驱动装置255,使第五臂225相对于第四臂224转动;以及第六驱动装置256,使第六臂226相对于第五臂225转动。第一驱动装置251~第六驱动装置256分别具有例如作为驱动源的电机、控制电机驱动的控制器和检测电机旋转量的编码器。并且,第一驱动装置251~第六驱动装置256分别由机器人控制装置5独立地控制。In addition, the robot 2 has: a first driving device 251 to rotate the first arm 221 relative to the base 21; a second driving device 252 to rotate the second arm 222 relative to the first arm 221; and a third driving device 253 to rotate The third arm 223 rotates relative to the second arm 222; the fourth driving device 254 rotates the fourth arm 224 relative to the third arm 223; the fifth driving device 255 rotates the fifth arm 225 relative to the fourth arm 224; and the sixth driving device 256 to rotate the sixth arm 226 relative to the fifth arm 225 . Each of the first driving device 251 to the sixth driving device 256 includes, for example, a motor as a driving source, a controller for controlling driving of the motor, and an encoder for detecting the amount of rotation of the motor. In addition, the first drive device 251 to the sixth drive device 256 are independently controlled by the robot control device 5 .

此外,机器人2并不限定于本实施方式的构成,例如机械臂22具有的臂数量也可以是1~5个,还可以是7个以上。另外,例如机器人2的种类也可以是SCARA机器人或具有两个机械臂22的双臂机器人。In addition, the robot 2 is not limited to the structure of this embodiment, For example, the number of arms included in the robot arm 22 may be 1 to 5, or 7 or more. In addition, for example, the type of the robot 2 may be a SCARA robot or a dual-arm robot having two robot arms 22 .

2.机器人控制装置2. Robot control device

机器人控制装置5从主计算机6接收机器人2的位置指令,以第一臂221~第六臂226到达与接收的位置指令相应的位置的方式分别独立地控制第一驱动装置251~第六驱动装置256的驱动。机器人控制装置5例如由计算机构成,并具有:处理信息的处理器(CPU)、与处理器以可通信的方式连接的存储器、以及外部接口。存储器中保存处理器可执行的各种程序,处理器可读取存储器中存储的各种程序等并执行该各种程序。The robot control device 5 receives the position command of the robot 2 from the host computer 6, and independently controls the first drive device 251 to the sixth drive device so that the first arm 221 to the sixth arm 226 reach the position corresponding to the received position command. 256 drive. The robot controller 5 is constituted by, for example, a computer, and includes a processor (CPU) that processes information, a memory communicably connected to the processor, and an external interface. Various programs executable by the processor are stored in the memory, and the processor can read and execute various programs and the like stored in the memory.

3.三维测量装置3. Three-dimensional measuring device

接下来,说明第一实施方式所涉及的三维测量装置4。Next, the three-dimensional measurement device 4 according to the first embodiment will be described.

三维测量装置4使用相移法来进行对象物W的三维测量。如图2所示,三维测量装置4具备:投影部41,将激光光束L形成的三维测量用的图案光PL投影至包含对象物W的区域;拍摄部47,对投影了图案光PL的包含对象物W的区域进行拍摄而获取图像数据;控制部48,控制投影部41及拍摄部47的驱动;测量部49,基于图像数据来测量对象物W的三维形状;以及壳体40,收纳这些各个部分。The three-dimensional measurement device 4 performs three-dimensional measurement of the object W using the phase shift method. As shown in FIG. 2 , the three-dimensional measurement device 4 includes a projection unit 41 that projects pattern light PL for three-dimensional measurement formed by the laser beam L onto a region including the object W, and an imaging unit 47 that projects the pattern light PL on which the pattern light PL is projected. The area of the object W is captured to acquire image data; the control unit 48 controls the driving of the projection unit 41 and the imaging unit 47; the measurement unit 49 measures the three-dimensional shape of the object W based on the image data; and the casing 40 accommodates these various parts.

本实施方式中,如图3所示,壳体40固定在机器人2的第五臂225上。另外,壳体40形成为箱状,并具有:固定在第五臂225的底面401、与底面401相对的顶面402、位于第五臂225的前端侧的前表面403、位于第五臂225的基端侧的背面404、以及一对侧面405、406。并且,如图4所示,在这种壳体40内收纳投影部41、拍摄部47、控制部48及测量部49。但是,壳体40的形状并无特别限定。In this embodiment, as shown in FIG. 3 , the casing 40 is fixed on the fifth arm 225 of the robot 2 . In addition, the case 40 is formed in a box shape, and includes a bottom surface 401 fixed to the fifth arm 225 , a top surface 402 facing the bottom surface 401 , a front surface 403 located on the front end side of the fifth arm 225 , and a fifth arm 225 The rear surface 404 on the base end side, and a pair of side surfaces 405 and 406. Furthermore, as shown in FIG. 4 , the projection unit 41 , the imaging unit 47 , the control unit 48 , and the measurement unit 49 are accommodated in the casing 40 . However, the shape of the casing 40 is not particularly limited.

另外,作为壳体40的构成材料,并无特别限定,例如可使用各种树脂、各种金属、各种陶瓷。但是,从散热性的观点出发,优选使用例如铝、不锈钢等热导率优异的材料。另外,壳体40的底面401也可以通过未图示的接合部而固定在机器人2的第五臂225上。In addition, it does not specifically limit as a constituent material of the case 40, For example, various resins, various metals, and various ceramics can be used. However, from the viewpoint of heat dissipation, it is preferable to use materials having excellent thermal conductivity such as aluminum and stainless steel. In addition, the bottom surface 401 of the casing 40 may be fixed to the fifth arm 225 of the robot 2 by a joint part not shown.

投影部41以向第五臂225的前端侧照射激光光束L的方式配置在壳体40内,拍摄部47以朝向第五臂225的前端侧并拍摄包含激光光束L的照射范围的区域的方式配置在壳体40内。此外,如图3所示,在壳体40的前表面403,设置有供激光光束L射出的窗部403a。The projection unit 41 is arranged in the casing 40 so as to irradiate the front end side of the fifth arm 225 with the laser beam L, and the imaging unit 47 is directed to the front end side of the fifth arm 225 to photograph an area including the irradiation range of the laser beam L It is arranged in the casing 40 . Further, as shown in FIG. 3 , on the front surface 403 of the casing 40 , a window portion 403 a through which the laser beam L is emitted is provided.

此外,三维测量装置4的配置并无特别限定,可以配置在第一臂221~第四臂224中的任一者或者第六臂226上。另外,投影部41及拍摄部47也可以固定在不同的臂上。另外,控制部48、测量部49也可以配置在壳体40的外部,例如也可以被机器人控制装置5或主计算机6包括。In addition, the arrangement of the three-dimensional measurement device 4 is not particularly limited, and may be arranged on any one of the first arm 221 to the fourth arm 224 or the sixth arm 226 . In addition, the projection unit 41 and the imaging unit 47 may be fixed to different arms. In addition, the control part 48 and the measurement part 49 may be arrange|positioned outside the housing|casing 40, and may be included in the robot control apparatus 5 or the host computer 6, for example.

投影部41具有如下功能:通过向对象物W照射激光光束L,将图5所示的图案光PL投影至对象物W。如图2及图4所示,这种投影部41具有:射出激光光束L的激光光源42;光学系统44,包括供激光光束L通过的多个透镜;以及光学扫描部45(光学扫描仪),向对象物W扫描通过光学系统44后的激光光束L。激光光源42并无特别限定,例如可使用垂直腔面发射激光器(VCSEL)、垂直外腔面发射激光器(VECSEL)等半导体激光器。The projection unit 41 has a function of projecting the pattern light PL shown in FIG. 5 on the object W by irradiating the object W with the laser beam L. As shown in FIG. As shown in FIGS. 2 and 4 , such a projection unit 41 includes: a laser light source 42 that emits a laser beam L; an optical system 44 including a plurality of lenses through which the laser beam L passes; and an optical scanning unit 45 (optical scanner) , the laser beam L after passing through the optical system 44 is scanned toward the object W. The laser light source 42 is not particularly limited, and for example, a semiconductor laser such as a vertical cavity surface emitting laser (VCSEL) and a vertical external cavity surface emitting laser (VECSEL) can be used.

光学系统44具有:会聚透镜441,使激光光源42射出的激光光束L在对象物W附近会聚;以及棒状透镜442,使会聚透镜441所会聚的激光光束L沿后述摆动轴J的平行方向、即图2的图纸深度方向延伸成线状。The optical system 44 includes a condenser lens 441 for condensing the laser beam L emitted by the laser light source 42 in the vicinity of the object W, and a rod lens 442 for causing the laser beam L condensed by the condenser lens 441 to be parallel to the swing axis J, which will be described later. That is, the depth direction of the drawing of FIG. 2 extends linearly.

光学扫描部45具有扫描由棒状透镜442形成为线状的激光光束L的功能。光学扫描部45并无特别限定,例如可使用MEMS(Micro Electro Mechanical Systems,微电机系统)、检流计镜、多角镜等。The optical scanning unit 45 has a function of scanning the laser beam L formed in a linear shape by the rod lens 442 . The optical scanning unit 45 is not particularly limited, and for example, a MEMS (Micro Electro Mechanical Systems, micro-electromechanical system), a galvanometer mirror, a polygon mirror, or the like can be used.

本实施方式所涉及的光学扫描部45由MEMS构成。如图6所示,光学扫描部45具有:具有反射面450的反射镜451;配置在反射镜451的永久磁铁455;支撑反射镜451的支撑部452;将反射镜451与支撑部452连接的轴部453;配置在支撑部452的第一部件457;与第一部件457连接的第二部件458;与第二部件458连接的第三部件459;以及与永久磁铁455定向配置的电磁线圈456。The optical scanning unit 45 according to the present embodiment is formed of MEMS. As shown in FIG. 6 , the optical scanning unit 45 includes: a mirror 451 having a reflective surface 450; a permanent magnet 455 arranged on the mirror 451; a support part 452 for supporting the mirror 451; Shaft portion 453 ; first member 457 arranged on support portion 452 ; second member 458 connected to first member 457 ; third member 459 connected to second member 458 ; .

此外,在图6中,在处于静止状态的反射面450的法线的延伸方向上,将图纸近前侧设为+Z轴方向,将图纸里侧设为-Z轴方向。另外,将轴部453的延伸方向设为与Z轴方向正交的X轴方向。并且,将与Z轴方向及X轴方向均正交的方向设为Y轴方向。In addition, in FIG. 6 , in the extending direction of the normal line of the reflection surface 450 in the stationary state, the drawing near side is the +Z axis direction, and the drawing back side is the −Z axis direction. In addition, the extending direction of the shaft portion 453 is the X-axis direction orthogonal to the Z-axis direction. In addition, let the direction orthogonal to both the Z-axis direction and the X-axis direction be the Y-axis direction.

在这种光学扫描部45中,摆动轴J与线状的激光光束L的延伸方向、即由棒状透镜442扩展后的激光光束L的扩宽方向一致。并且,若对电磁线圈456施加驱动信号,则反射镜451绕着摆动轴J以预定周期正反交替地摆动,由此将线状的激光光束L扫描为面状。此外,光学扫描部45将在下文详细描述。In such an optical scanning unit 45 , the swing axis J matches the extending direction of the linear laser beam L, that is, the expanding direction of the laser beam L expanded by the rod lens 442 . Then, when a drive signal is applied to the electromagnetic coil 456, the mirror 451 swings around the swing axis J alternately forward and reverse at a predetermined cycle, thereby scanning the linear laser beam L into a planar shape. In addition, the optical scanning section 45 will be described in detail below.

上面说明了投影部41,但其构成并无特别限定,只要能向对象物W投影预定的图案光PL即可。例如,在本实施方式中,是利用光学系统44将激光光束L呈线状扩展的,但并不限定于此,例如,也可以使用MEMS或检流计镜使其扩展为线状。即,也可以使用两个光学扫描部45二维扫描激光光束L。另外,例如也可以使用具有两个轴自由度的万向节型MEMS二维扫描激光光束L。The projection unit 41 has been described above, but its configuration is not particularly limited as long as it can project the predetermined pattern light PL on the object W. As shown in FIG. For example, in the present embodiment, the optical system 44 is used to expand the laser beam L in a linear shape, but the present invention is not limited to this. For example, a MEMS or a galvanometer mirror may be used to expand the laser beam L into a linear shape. That is, the laser beam L may be scanned two-dimensionally using the two optical scanning units 45 . In addition, for example, a gimbal-type MEMS two-dimensional scanning laser beam L having two axial degrees of freedom can also be used.

拍摄部47拍摄对至少一个对象物W投影图案光PL的状态。如图2所示,拍摄部47例如由具备CMOS图像传感器、CCD图像传感器等拍摄元件472和会聚透镜473的相机471构成。相机471连接于测量部49,并将图像数据发送至测量部49。The imaging unit 47 images a state in which the pattern light PL is projected on at least one object W. As shown in FIG. 2 , the imaging unit 47 includes, for example, a camera 471 including an imaging element 472 such as a CMOS image sensor and a CCD image sensor, and a condenser lens 473 . The camera 471 is connected to the measurement unit 49 and transmits image data to the measurement unit 49 .

控制部48通过向电磁线圈456施加驱动信号来控制光学扫描部45的驱动,并且通过向激光光源42施加驱动信号来控制激光光源42的驱动。控制部48与反射镜451的摆动同步地使激光光源42射出激光光束L,例如将图5所示的以亮度值的明暗表现的条纹状图案光PL投影至对象物W上。但是,图案光PL只要可用于后述相移法则并无特别限定。另外,控制部48控制相机471的驱动,以预定的定时拍摄包含对象物W的区域。The control section 48 controls the driving of the optical scanning section 45 by applying the driving signal to the electromagnetic coil 456 , and controls the driving of the laser light source 42 by applying the driving signal to the laser light source 42 . The control unit 48 causes the laser light source 42 to emit the laser beam L in synchronization with the oscillation of the mirror 451 , for example, to project the striped pattern light PL represented by the brightness and darkness of the luminance value shown in FIG. 5 onto the object W. However, the pattern light PL is not particularly limited as long as it can be used for the phase shift law described later. In addition, the control unit 48 controls the driving of the camera 471 to capture an image of an area including the object W at a predetermined timing.

例如,控制部48将相位每次偏移π/2而向对象物W投影四次图案光PL,并且每次均利用拍摄部47拍摄投影了图案光PL的对象物W。但是,图案光PL的投影次数并无特别限定,只要是能够根据拍摄结果计算相位的次数即可。另外,也可以使用间距较大的图案或反之较小的图案进行同样的投影和拍摄而进行相位展开。间距种类越多,测量范围与分辨率越高,但拍摄次数增加,获取图像数据所需的时间会相应地增加,导致机器人2的运行效率降低。因此,兼顾三维测量的精度及测量范围与机器人2的运行效率而适当地设定图案光PL的投影次数即可。For example, the control unit 48 projects the pattern light PL on the object W four times by shifting the phase by π/2, and images the object W on which the pattern light PL is projected by the imaging unit 47 each time. However, the number of times of projection of the pattern light PL is not particularly limited, as long as it is the number of times that the phase can be calculated from the imaging result. In addition, it is also possible to perform phase unwrapping by performing the same projection and imaging using patterns with larger pitches or conversely with smaller patterns. The more types of spacing, the higher the measurement range and resolution, but the increase in the number of shots, the time required to acquire image data will increase accordingly, resulting in a decrease in the operating efficiency of the robot 2. Therefore, the number of projections of the pattern light PL may be appropriately set in consideration of the accuracy and measurement range of the three-dimensional measurement and the operation efficiency of the robot 2 .

测量部49基于拍摄部47获取的多个图像数据,进行对象物W的三维测量。具体来说,计算包含对象物W的姿态、空间坐标等的三维信息。然后,测量部49将计算出的对象物W的三维信息发送至主计算机6。The measurement unit 49 performs three-dimensional measurement of the object W based on the plurality of image data acquired by the imaging unit 47 . Specifically, three-dimensional information including the posture, spatial coordinates, and the like of the object W is calculated. Then, the measurement unit 49 transmits the calculated three-dimensional information of the object W to the host computer 6 .

这种控制部48及测量部49例如由计算机构成,并具有:处理信息的处理器(CPU)、与处理器以能够通信的方式连接的存储器、以及外部接口。存储器中存储处理器可执行的各种程序,处理器可读取存储器中存储的各种程序等并执行该各种程序。The control unit 48 and the measurement unit 49 are constituted by, for example, a computer, and include a processor (CPU) for processing information, a memory communicably connected to the processor, and an external interface. Various programs executable by the processor are stored in the memory, and the processor can read and execute various programs and the like stored in the memory.

4.主计算机4. Main computer

主计算机6根据测量部49算出的对象物W的三维信息来生成机器人2的位置指令,并将生成的位置指令发送至机器人控制装置5。机器人控制装置5基于主计算机6接收的位置指令分别独立地驱动第一驱动装置251~第六驱动装置256,使第一臂221~第六臂226移动至指示位置。此外,在本实施方式中,主计算机6与测量部49彼此为独立部件,但并不限定于此,主计算机6也可以具有作为测量部49的功能。The host computer 6 generates a position command for the robot 2 based on the three-dimensional information of the object W calculated by the measurement unit 49 , and transmits the generated position command to the robot controller 5 . The robot control device 5 independently drives the first drive device 251 to the sixth drive device 256 based on the position command received by the host computer 6 to move the first arm 221 to the sixth arm 226 to the commanded position. In addition, in this embodiment, although the host computer 6 and the measurement part 49 are mutually independent parts, it is not limited to this, and the host computer 6 may function as the measurement part 49.

5.光学扫描部(光学扫描仪)5. Optical scanning section (optical scanner)

接下来,说明作为第一实施方式所涉及的光学扫描仪的光学扫描部45。Next, the optical scanning unit 45 as the optical scanner according to the first embodiment will be described.

图7是图6所示的光学扫描部的剖视图。图8是图7所示的光学扫描部的立体图。FIG. 7 is a cross-sectional view of the optical scanning unit shown in FIG. 6 . FIG. 8 is a perspective view of the optical scanning unit shown in FIG. 7 .

如上所述,图7及图8所示的光学扫描部45具有反射镜451、支撑部452、轴部453、永久磁铁455、电磁线圈456、第一部件457、第二部件458、第三部件459。以下说明各个部分。As described above, the optical scanning unit 45 shown in FIGS. 7 and 8 includes the mirror 451, the support portion 452, the shaft portion 453, the permanent magnet 455, the electromagnetic coil 456, the first member 457, the second member 458, and the third member 459. Each part is described below.

反射镜451具有反射光的反射面450以及位于反射面450的相反侧的背面451a(第一背面)。反射面450反射激光光束L。此外,反射面450上形成有未图示的反射膜。反射膜例如可以使用铝等金属膜。The reflection mirror 451 has a reflection surface 450 that reflects light, and a back surface 451 a (first back surface) located on the opposite side of the reflection surface 450 . The reflection surface 450 reflects the laser beam L. In addition, a reflection film (not shown) is formed on the reflection surface 450 . As the reflection film, for example, a metal film such as aluminum can be used.

背面451a上粘合并配置有永久磁铁455,永久磁铁455与反射镜451一同摆动。永久磁铁455在与摆动轴J正交的Y轴方向上磁化。永久磁铁455例如列举钕磁铁、铁氧体磁铁、钐钴磁铁、铝镍钴磁铁、粘结磁铁等。A permanent magnet 455 is attached to the back surface 451 a and arranged thereon, and the permanent magnet 455 swings together with the mirror 451 . The permanent magnet 455 is magnetized in the Y-axis direction orthogonal to the swing axis J. Examples of the permanent magnets 455 include neodymium magnets, ferrite magnets, samarium cobalt magnets, alnico magnets, bonded magnets, and the like.

轴部453将反射镜451与支撑部452连接,将反射镜451支撑为能够绕摆动轴J摆动。光学扫描部45具有沿X轴方向延伸的两个轴部453、453,两个轴部453、453隔着反射镜451而配置在彼此相反侧,以在X轴方向上从两侧支撑反射镜451。随着反射镜451绕摆动轴J摆动,轴部453、453扭曲变形。此外,轴部453、453的形状并不限定于图示的形状,只要能将反射镜451支撑为能够绕摆动轴J摆动即可。例如,轴部453、453可以分别由多个梁构成,也可以在延伸方向中途的至少一处具有弯折或弯曲部分、分支部分、宽度不同的部分等。The shaft portion 453 connects the mirror 451 to the support portion 452 and supports the mirror 451 so as to be able to swing about the swing axis J. The optical scanning portion 45 has two shaft portions 453 and 453 extending in the X-axis direction, and the two shaft portions 453 and 453 are arranged on opposite sides of each other with the mirror 451 interposed therebetween so as to support the mirror from both sides in the X-axis direction. 451. As the mirror 451 swings around the swing axis J, the shaft portions 453 and 453 are twisted and deformed. In addition, the shape of the shaft parts 453 and 453 is not limited to the shape shown in the figure, as long as the mirror 451 can be supported so as to be able to swing about the swing axis J. For example, each of the shaft portions 453 and 453 may be constituted by a plurality of beams, or may have a bent or bent portion, a branched portion, a portion with different widths, or the like at at least one part in the extending direction.

支撑部452如图6所示从Z轴方向俯视时呈框状,以包围反射镜451的方式配置。并且,支撑部452通过两个轴部453、453将反射镜451支撑为能够摆动。此外,支撑部452的形状并无特别限定,只要能够支撑反射镜451即可,例如也可以被分成支撑一个轴部453的部分与支撑另一个轴部453的部分。As shown in FIG. 6 , the support portion 452 has a frame shape in a plan view from the Z-axis direction, and is arranged so as to surround the mirror 451 . In addition, the support portion 452 supports the mirror 451 so as to be able to swing by the two shaft portions 453 and 453 . In addition, the shape of the support portion 452 is not particularly limited as long as it can support the mirror 451 . For example, it may be divided into a portion supporting one shaft portion 453 and a portion supporting the other shaft portion 453 .

支撑部452的背面452a(第二背面)上粘合配置有第一部件457。第一部件457具有作为加强支撑部452的机械强度的加强部的功能。这种第一部件457呈沿着XY面扩展的板状。另外,从Z轴方向俯视时第一部件457也呈框状,如图7所示,具有贯通与反射镜451对应的区域而成的开口部4571。通过该开口部4571来确保用于配置永久磁铁455的空间及用于供反射镜451摆动的空间。The first member 457 is adhesively arranged on the back surface 452a (second back surface) of the support portion 452 . The first member 457 functions as a reinforcing portion that reinforces the mechanical strength of the support portion 452 . Such a first member 457 has a plate shape extending along the XY plane. In addition, the first member 457 also has a frame shape in plan view from the Z-axis direction, and as shown in FIG. The opening 4571 secures a space for arranging the permanent magnet 455 and a space for the mirror 451 to swing.

而且,第一部件457在-Y轴方向上延伸得比支撑部452长。并且,-Y轴方向的端部与第二部件458连接。具体来说,第一部件457的-Z轴方向的面中的-Y轴方向的端部为被第二部件458支撑的支撑面4572。Also, the first member 457 extends longer than the support portion 452 in the −Y axis direction. Furthermore, the end in the −Y axis direction is connected to the second member 458 . Specifically, the end in the -Y-axis direction of the surface in the -Z-axis direction of the first member 457 is a support surface 4572 supported by the second member 458 .

另外,第二部件458具有在Z轴方向上具有长轴的形状。第二部件458的+Z轴方向的端面连接于第一部件457,-Z轴方向的端面连接于第三部件459。因此,第二部件458介于第一部件457与第三部件459之间。并且,由此在第一部件457与第三部件459之间形成与第二部件458的长轴的长度相等的空间。In addition, the second member 458 has a shape having a long axis in the Z-axis direction. The end surface in the +Z axis direction of the second member 458 is connected to the first member 457 , and the end surface in the −Z axis direction is connected to the third member 459 . Therefore, the second part 458 is interposed between the first part 457 and the third part 459 . Then, a space equal to the length of the long axis of the second member 458 is formed between the first member 457 and the third member 459 .

第三部件459呈沿着XY面扩展的板状。并且,-Y轴方向的端部与第二部件458连接。具体来说,第三部件459的+Z轴方向的面中的-Y轴方向的端部为支撑第二部件458的支撑面4592。The third member 459 has a plate shape extending along the XY plane. Furthermore, the end in the −Y axis direction is connected to the second member 458 . Specifically, the end portion in the −Y axis direction among the surfaces in the +Z axis direction of the third member 459 is a support surface 4592 that supports the second member 458 .

在第一部件457与第三部件459之间配置有电磁线圈456。电磁线圈456在永久磁铁455所形成的静磁场中通过交流电流的通电而产生洛伦兹力,使配置有永久磁铁455的反射镜451摆动。根据这种电磁驱动方式,能够产生较大的驱动力,因此能够在实现驱动电压降低的同时增大反射镜451的摆动角。An electromagnetic coil 456 is arranged between the first member 457 and the third member 459 . The electromagnetic coil 456 generates a Lorentz force by energizing an alternating current in the static magnetic field formed by the permanent magnets 455 , and swings the mirror 451 on which the permanent magnets 455 are arranged. According to such an electromagnetic driving method, since a large driving force can be generated, the swing angle of the mirror 451 can be increased while reducing the driving voltage.

如上所述的光学扫描部45中,第二部件458悬臂支撑第一部件457。例如,如图7所示,悬臂支撑是指如下结构:第一部件457中,+Y轴方向的端部未被支撑而成为所谓的自由端,而-Y轴方向的端部被第二部件458支撑。根据这种悬臂支撑结构,例如即使第一部件457或第二部件458的温度上升而产生热应力,导致第一部件457产生翘曲,也能修正因翘曲带来的影响。In the optical scanning section 45 as described above, the second member 458 supports the first member 457 in a cantilever. For example, as shown in FIG. 7 , the cantilever support refers to a structure in which the end in the +Y-axis direction of the first member 457 is not supported as a so-called free end, and the end in the −Y-axis direction is supported by the second member 457 . 458 support. According to such a cantilever support structure, for example, even if the temperature of the first member 457 or the second member 458 rises to generate thermal stress and the first member 457 warps, the influence of warpage can be corrected.

具体来说,图9及图10分别表示图7所示的光学扫描部45的温度上升而产生热应力导致第一部件457产生翘曲的状态。此外,图9及图10中,为了便于说明而简化了图示。Specifically, FIGS. 9 and 10 respectively show a state in which the temperature of the optical scanning unit 45 shown in FIG. 7 rises and thermal stress is generated to cause warpage of the first member 457 . In addition, in FIG.9 and FIG.10, illustration is simplified for convenience of description.

若光学扫描部45的温度上升,则第一部件457、第二部件458及第三部件459各部件的边界附近产生热应力。该热应力很容易表现为第一部件457的翘曲。并且,如图9所示,第一部件457中,配置有反射镜451的端部产生在+Z轴方向上移位的翘曲。这样一来,随着翘曲产生,反射面450的中心O向-Y轴方向移动。When the temperature of the optical scanning unit 45 rises, thermal stress occurs in the vicinity of the boundary of each of the first member 457 , the second member 458 , and the third member 459 . This thermal stress can easily manifest itself as warpage of the first part 457 . Further, as shown in FIG. 9 , in the first member 457 , the end portion where the mirror 451 is arranged is warped which is displaced in the +Z axis direction. In this way, the center O of the reflection surface 450 moves in the −Y axis direction as the warp occurs.

另外,相比不产生翘曲的情况,该翘曲还会导致反射面450计划外倾斜的问题。具体来说,不产生翘曲的状态下反射镜451不摆动时,将包含反射面450的平面设为基准面P0。若产生翘曲,则轴部453、453扭曲变形,导致反射面450相对于基准面P0意外倾斜。由此,如图10所示,产生翘曲的状态下包含反射面450的平面P1与基准面P0形成角度θ的倾斜。In addition, compared with the case where no warping occurs, the warping also causes a problem that the reflection surface 450 is tilted unplanned. Specifically, when the mirror 451 does not swing in a state where no warping occurs, the plane including the reflection surface 450 is set as the reference plane P0. When warping occurs, the shaft portions 453 and 453 are twisted and deformed, and the reflection surface 450 is unexpectedly inclined with respect to the reference plane P0. As a result, as shown in FIG. 10 , the plane P1 including the reflection surface 450 and the reference plane P0 form an inclination of the angle θ in a state where the warp has occurred.

如上所述产生反射面450的中心O的移动、反射面450的倾斜,会导致上述的对象物W上投影的条纹状的图案光PL的中心从预期位置偏离。其结果产生三维测量的精度降低的问题。The movement of the center O of the reflection surface 450 and the inclination of the reflection surface 450 as described above cause the center of the striped pattern light PL projected on the object W described above to be deviated from the intended position. As a result, there is a problem that the accuracy of the three-dimensional measurement is lowered.

因此,在本实施方式中,如上所述第二部件458悬臂支撑第一部件457。并且,悬臂支撑的支撑方向、即第一部件457中未被支撑的端部与被第二部件458支撑的端部相连的方向被设定为与摆动轴J交叉的方向。该交叉角度可以小于90°,在本实施方式中为特殊情况,支撑方向与Y轴方向平行,且摆动轴J与X轴方向平行。因此,支撑方向与摆动轴J呈90°交叉。Therefore, in the present embodiment, the second member 458 supports the first member 457 in a cantilever manner as described above. In addition, the support direction of the cantilever support, that is, the direction in which the unsupported end of the first member 457 and the end supported by the second member 458 are connected is set as the direction intersecting the swing axis J. The intersection angle may be less than 90°, which is a special case in this embodiment, the support direction is parallel to the Y-axis direction, and the swing axis J is parallel to the X-axis direction. Therefore, the support direction intersects the swing axis J at 90°.

根据这种悬臂支撑结构,即使第一部件457产生如图9及图10所示的翘曲,且图案光PL的中心随之偏离,也能使其偏离方向与随着反射镜451摆动产生的图案光PL的扫描方向一致。由此,即使图案光PL的中心发生了偏离,也能通过调整反射镜451的摆动角来修正其偏离。其结果为,能够使图案光PL的中心回到预期位置,从而能够抑制三维测量的精度降低。According to this cantilever support structure, even if the first member 457 is warped as shown in FIGS. 9 and 10 , and the center of the pattern light PL is deviated accordingly, the deviating direction can be the same as that caused by the swing of the mirror 451 . The scanning directions of the pattern light PL are the same. Accordingly, even if the center of the pattern light PL is deviated, the deviation can be corrected by adjusting the swing angle of the mirror 451 . As a result, the center of the pattern light PL can be returned to a desired position, and it is possible to suppress a decrease in the accuracy of the three-dimensional measurement.

具体来说,在扫描图案光PL并投影时,通常是对电磁线圈456施加交流电流,并使反射镜451以一定周期摆动。由此,图案光PL以一定振幅往复扫描,描绘出条纹图案。并且,在修正图案光PL的中心位置时,在交流电流上叠加直流电流。通过该直流电流的叠加,能够使反射镜451的摆动角的幅度的中间值根据直流电流的电压值而偏移,即能够执行所谓的直流偏移(DC offset)操作。其结果为,能够修正图案光PL的描绘中心位置,从而能够抑制三维测量的精度降低。Specifically, when the pattern light PL is scanned and projected, an alternating current is usually applied to the electromagnetic coil 456, and the mirror 451 is oscillated at a certain period. Thereby, the pattern light PL is reciprocally scanned with a constant amplitude, and a fringe pattern is drawn. Then, when correcting the center position of the pattern light PL, a direct current is superimposed on the alternating current. By the superposition of the DC current, the middle value of the amplitude of the swing angle of the mirror 451 can be shifted according to the voltage value of the DC current, that is, a so-called DC offset operation can be performed. As a result, the drawing center position of the pattern light PL can be corrected, and it is possible to suppress a decrease in the accuracy of the three-dimensional measurement.

如上所述,作为本实施方式所涉及的光学扫描仪的光学扫描部45具有:反射镜451,具有反射光的反射面450及位于反射面450的相反侧的背面451a(第一背面);永久磁铁455,配置在反射镜451的背面451a上;支撑部452,支撑反射镜451,具有位于与背面451a(第一背面)同一侧的背面452a(第二背面);轴部453、453,将反射镜451与支撑部452连接,使反射镜451能够绕着摆动轴J摆动;第一部件457,配置在支撑部452的背面452a(第二背面)上;第二部件458,与摆动轴J正交,在沿着背面452a(第二背面)的方向上悬臂支撑第一部件457;第三部件459,隔着第二部件458与第一部件457相对配置,并且与第二部件458连接;以及电磁线圈456,配置在第一部件457与第三部件459之间。As described above, the optical scanning unit 45 as the optical scanner according to the present embodiment includes: the mirror 451; The magnet 455 is arranged on the back surface 451a of the mirror 451; the support part 452 supports the mirror 451 and has a back surface 452a (second back surface) located on the same side as the back surface 451a (first back surface); The mirror 451 is connected to the support part 452, so that the mirror 451 can swing around the swing axis J; the first part 457 is arranged on the back surface 452a (second back surface) of the support part 452; the second part 458 is connected to the swing axis J At right angles, the first member 457 is cantilevered in the direction along the back face 452a (second back face); the third member 459 is arranged opposite the first member 457 across the second member 458 and is connected to the second member 458; The electromagnetic coil 456 is arranged between the first member 457 and the third member 459 .

在这种光学扫描部45中,第二部件458悬臂支撑第一部件457,且其支撑方向与摆动轴J交叉。因此,即使随着热应力的产生而导致第一部件457产生翘曲,也能通过调整反射镜451的摆动角来修正因翘曲引起的图案光PL的描绘位置偏离。因此,根据本实施方式所涉及的光学扫描部45,即使光学扫描部45发生温度变化,也能实现反射面450所带来的光扫描位置的精度高的光学扫描部45。In such an optical scanning unit 45, the second member 458 supports the first member 457 in a cantilever direction, and the support direction thereof intersects the swing axis J. Therefore, even if the first member 457 is warped due to the generation of thermal stress, the deviation of the drawing position of the pattern light PL due to warpage can be corrected by adjusting the swing angle of the mirror 451 . Therefore, according to the optical scanning unit 45 according to the present embodiment, even if the temperature of the optical scanning unit 45 changes, the optical scanning unit 45 with high accuracy of the optical scanning position by the reflection surface 450 can be realized.

此外,光学扫描部45的温度与图案光PL的位置的偏离量之间存在一定的相关性。因此,在上述的直流偏移操作中,可以基于预先获取的相关性来设定直流偏移中的直流电压的电压值,以抵消根据光学扫描部45的温度推断的偏离量。In addition, there is a certain correlation between the temperature of the optical scanning unit 45 and the amount of deviation of the position of the pattern light PL. Therefore, in the above-described DC offset operation, the voltage value of the DC voltage in the DC offset can be set based on the correlation acquired in advance so as to cancel the deviation amount estimated from the temperature of the optical scanning section 45 .

另外,光学扫描部45优选具备未图示的温度传感器。由此,能够更准确地检测光学扫描部45的温度,因此能够更准确地进行直流偏移修正。此外,温度传感器可以设置在与光学扫描部45接触的位置上,也可以设置在壳体40内的任意位置。另外,考虑环境温度的影响时,也可以设置在壳体40的外部。In addition, it is preferable that the optical scanning part 45 is provided with the temperature sensor which is not shown in figure. Thereby, since the temperature of the optical scanning part 45 can be detected more accurately, DC offset correction can be performed more accurately. In addition, the temperature sensor may be provided at a position in contact with the optical scanning unit 45 , or may be provided at an arbitrary position within the casing 40 . In addition, when the influence of the ambient temperature is considered, it may be provided outside the casing 40 .

另外,在本实施方式中,从Z轴方向(垂直方向)俯视反射面450时,通过第二部件458支撑第一部件457的支撑面4572与反射镜451及轴部453错开。而且,在本实施方式中,该支撑面4572还与支撑部452错开。In the present embodiment, when the reflection surface 450 is viewed in plan from the Z-axis direction (vertical direction), the support surface 4572 supporting the first member 457 by the second member 458 is displaced from the reflection mirror 451 and the shaft portion 453 . Moreover, in this embodiment, the support surface 4572 is also offset from the support portion 452 .

根据这种构成,上述的悬臂支撑结构带来的效果更加显著。即,以上述方式错开能够确保容易产生热应力的支撑面4572与反射镜451之间的距离。由此,即使支撑面4572产生了热应力,也能将反射镜451附近的第一部件457产生的翘曲等变形抑制得较少。此外,所述“错开”是指不存在重叠部分。According to this configuration, the effect of the above-described cantilever support structure is more remarkable. That is, the distance between the support surface 4572 where thermal stress is easily generated and the mirror 451 can be ensured by staggering as described above. Accordingly, even if thermal stress occurs in the support surface 4572, deformation such as warpage of the first member 457 in the vicinity of the mirror 451 can be suppressed to a small extent. Further, the "staggered" means that there is no overlapping portion.

另外,在本实施方式中,被第二部件458支撑的第一部件457的支撑面4572如图6所示呈具有与摆动轴J平行的长轴的长方形。因此,支撑面4572与摆动轴J的距离均匀。其结果为,例如即使第一部件457产生了翘曲,也能通过调整反射镜451的摆动角以更高精度修正图案光PL的描绘位置偏离。In addition, in the present embodiment, the support surface 4572 of the first member 457 supported by the second member 458 has a rectangular shape having a long axis parallel to the swing axis J as shown in FIG. 6 . Therefore, the distance between the support surface 4572 and the swing axis J is uniform. As a result, for example, even if the first member 457 is warped, the deviation of the drawing position of the pattern light PL can be corrected with higher accuracy by adjusting the swing angle of the mirror 451 .

此外,本说明书中,“平行”是指允许有制造误差所造成的偏差的概念。制造误差所造成的偏差量例如约为±5°。同样地,本说明书中,“正交”是指允许有制造误差所造成的偏差的概念。制造误差所造成的偏差量例如约为±5°。In addition, in this specification, "parallel" means a concept that allows for variations due to manufacturing errors. The amount of deviation due to manufacturing errors is, for example, about ±5°. Likewise, in this specification, "orthogonal" refers to a concept that allows for variations due to manufacturing errors. The amount of deviation due to manufacturing errors is, for example, about ±5°.

此外,支撑面4572的X轴方向的长度X1、即长轴的长度并无特别限定,但优选为5mm以上且30mm以下,更优选为7mm以上且15mm以下。In addition, the length X1 of the X-axis direction of the support surface 4572, that is, the length of the long axis is not particularly limited, but is preferably 5 mm or more and 30 mm or less, and more preferably 7 mm or more and 15 mm or less.

另外,支撑面4572的Y轴方向的长度Y1并无特别限定,但优选为2mm以上且5mm以下。In addition, the length Y1 of the Y-axis direction of the support surface 4572 is not particularly limited, but is preferably 2 mm or more and 5 mm or less.

而且,第一部件457中,将未被支撑面4572支撑的部分在Y轴方向的长度设为Y2[mm]时,Y2/Y1的比值优选为1.2以上且3.0以下,更优选为1.5以上且2.5以下。通过将Y2/Y1的比值设定在上述范围内,能够充分地确保在未被支撑面4572支撑的部分设置的反射镜451的面积,并且能够确保支撑面4572的支撑强度。Furthermore, in the first member 457, when the length in the Y-axis direction of the portion not supported by the support surface 4572 is Y2 [mm], the ratio of Y2/Y1 is preferably 1.2 or more and 3.0 or less, and more preferably 1.5 or more and 2.5 or less. By setting the ratio of Y2/Y1 within the above range, the area of the mirror 451 provided in the portion not supported by the support surface 4572 can be sufficiently ensured, and the support strength of the support surface 4572 can be ensured.

此外,支撑部452的Y轴方向的长度Y3优选比长度Y2短,作为一个例子,优选为3mm以上且10mm以下。Moreover, it is preferable that the length Y3 of the Y-axis direction of the support part 452 is shorter than the length Y2, and it is preferable that it is 3 mm or more and 10 mm or less as an example.

另一方面,第一部件457的Z轴方向的长度Z1、即第一部件457的厚度并无特别限定,但优选为0.2mm以上且2.0mm以下,更优选为0.3mm以上且1.0mm以下。由此,能够抑制第一部件457的变形,同时能够避免永久磁铁455与电磁线圈456被第一部件457阻碍而无法充分靠近的情况。On the other hand, the length Z1 of the first member 457 in the Z-axis direction, that is, the thickness of the first member 457 is not particularly limited, but is preferably 0.2 mm or more and 2.0 mm or less, and more preferably 0.3 mm or more and 1.0 mm or less. Thereby, deformation of the first member 457 can be suppressed, and a situation in which the permanent magnet 455 and the electromagnetic coil 456 are blocked by the first member 457 and cannot be sufficiently approached can be avoided.

另外,第二部件458的Z轴方向的长度Z2、即第二部件458的高度并无特别限定,但优选为2.5mm以上且8.0mm以下,更优选为3.0mm以上且6.0mm以下。由此,能够充分确保第一部件457与第三部件459之间的间隔,从而能够配置足够大的电磁线圈456。另外,由于能够确保第二部件458在Z轴方向上的导热路径足够长,所以传递至第三部件459的热不容易传递到第一部件457。其结果为,第一部件457更不容易变形。The length Z2 of the second member 458 in the Z-axis direction, that is, the height of the second member 458 is not particularly limited, but is preferably 2.5 mm or more and 8.0 mm or less, and more preferably 3.0 mm or more and 6.0 mm or less. Thereby, the space|interval between the 1st member 457 and the 3rd member 459 can be fully ensured, and the electromagnetic coil 456 of sufficient size can be arrange|positioned. In addition, since the heat transfer path of the second member 458 in the Z-axis direction can be ensured to be sufficiently long, the heat transferred to the third member 459 is not easily transferred to the first member 457 . As a result, the first member 457 is less likely to deform.

第三部件459的热导率优选大于第二部件458的热导率。由此,能够减小第三部件459与配置在其上表面的电磁线圈456之间的热阻。其结果为,电磁线圈456产生的热容易传递至第三部件459。由此,能够抑制电磁线圈456的温度上升,并且能够抑制第一部件457或反射镜451因热辐射而温度上升导致的应变。另一方面,由于第三部件459与第二部件458之间的热阻变大,所以传递至第三部件459的热不容易传递到第二部件458。由此,能够抑制第二部件458的温度上升,例如能够抑制第二部件458与第三部件459的界面、第二部件458与第一部件457的界面产生热应力。其结果为,能够抑制第一部件457产生翘曲等变形。The thermal conductivity of the third member 459 is preferably greater than the thermal conductivity of the second member 458 . Thereby, the thermal resistance between the 3rd member 459 and the electromagnetic coil 456 arrange|positioned on the upper surface can be reduced. As a result, the heat generated by the electromagnetic coil 456 is easily transferred to the third member 459 . Accordingly, the temperature rise of the electromagnetic coil 456 can be suppressed, and the strain caused by the temperature rise of the first member 457 or the mirror 451 due to thermal radiation can be suppressed. On the other hand, since the thermal resistance between the third member 459 and the second member 458 increases, the heat transferred to the third member 459 is not easily transferred to the second member 458 . Thereby, the temperature rise of the second member 458 can be suppressed, for example, thermal stress can be suppressed from occurring at the interface between the second member 458 and the third member 459 and at the interface between the second member 458 and the first member 457 . As a result, deformation such as warpage of the first member 457 can be suppressed.

此外,第三部件459的热导率与第二部件458的热导率的差优选为10W/m·K以上,更优选为20W/m·K以上。另外,第三部件459的热导率优选为50W/m·K以上,更优选为100W/m·K以上。Further, the difference between the thermal conductivity of the third member 459 and the thermal conductivity of the second member 458 is preferably 10 W/m·K or more, and more preferably 20 W/m·K or more. In addition, the thermal conductivity of the third member 459 is preferably 50 W/m·K or more, and more preferably 100 W/m·K or more.

另一方面,第一部件457的热膨胀系数优选与第二部件458的热膨胀系数相同。由此,在第一部件457与第二部件458之间几乎不产生因温度变化导致的热膨胀差异。因此,支撑面4572不容易产生热应力,能够将第一部件457的变形抑制得特别小。另外,第一部件457的热膨胀系数优选与支撑部452的热膨胀系数相同。由此,在第一部件457与支撑部452之间,几乎不产生因温度变化导致的热膨胀差异。因此,支撑部452的背面452a不容易产生热应力,能够将支撑部452的变形抑制得特别小。另外,第一部件457的热膨胀系数优选与轴部453的热膨胀系数相同。由此,第一部件457与轴部453之间,几乎不产生因温度变化导致的热膨胀差异。因此,即使第一部件457、轴部453周围的气氛温度发生了变化,也能将轴部453的变形抑制得特别小。另外,第一部件457的热膨胀系数优选与反射镜451的热膨胀系数相同。由此,第一部件457与反射镜451之间,几乎不产生因温度变化导致的热膨胀差异。因此,即使第一部件457、反射镜451周围的气氛温度发生了变化,也能将反射镜451的变形抑制得特别小。此外,热膨胀系数相同是指线膨胀系数的差为1.0×10-6/K以下。On the other hand, the thermal expansion coefficient of the first member 457 is preferably the same as the thermal expansion coefficient of the second member 458 . As a result, almost no difference in thermal expansion due to temperature change occurs between the first member 457 and the second member 458 . Therefore, thermal stress is not easily generated on the support surface 4572, and the deformation of the first member 457 can be suppressed to a particularly small value. In addition, the thermal expansion coefficient of the first member 457 is preferably the same as the thermal expansion coefficient of the support portion 452 . As a result, a difference in thermal expansion due to temperature change hardly occurs between the first member 457 and the support portion 452 . Therefore, thermal stress is less likely to be generated on the back surface 452a of the support portion 452, and the deformation of the support portion 452 can be suppressed to be particularly small. In addition, the thermal expansion coefficient of the first member 457 is preferably the same as the thermal expansion coefficient of the shaft portion 453 . Thereby, a difference in thermal expansion due to a temperature change hardly occurs between the first member 457 and the shaft portion 453 . Therefore, even if the temperature of the atmosphere around the first member 457 and the shaft portion 453 changes, the deformation of the shaft portion 453 can be suppressed to be particularly small. In addition, the thermal expansion coefficient of the first member 457 is preferably the same as the thermal expansion coefficient of the mirror 451 . As a result, almost no difference in thermal expansion due to temperature change occurs between the first member 457 and the mirror 451 . Therefore, even if the temperature of the atmosphere around the first member 457 and the reflection mirror 451 changes, the deformation of the reflection mirror 451 can be suppressed to be particularly small. In addition, the same thermal expansion coefficient means that the difference in linear expansion coefficient is 1.0×10 −6 /K or less.

此外,第一部件457的构成材料及第二部件458的构成材料分别可列举例如派热克斯玻璃(注册商标)、Tempax玻璃(注册商标)等硼硅酸玻璃、石英玻璃等玻璃材料外,还可列举硅、陶瓷、金属等。其中,优选使用玻璃材料。玻璃材料的热导率相对较小,因此抑制了第一部件457、第二部件458的温度上升。因此,能够更有效地抑制第一部件457的变形。另外,硼硅酸玻璃的线膨胀系数与硅相近,因此例如优选在支撑部452的构成材料为硅系材料时使用。In addition, the constituent material of the first member 457 and the constituent material of the second member 458 include, for example, borosilicate glass such as Pyrex glass (registered trademark) and Tempax glass (registered trademark), and glass materials such as quartz glass, respectively. Silicon, ceramics, metals, and the like can also be cited. Among them, glass materials are preferably used. Since the thermal conductivity of the glass material is relatively small, the temperature rise of the first member 457 and the second member 458 is suppressed. Therefore, deformation of the first member 457 can be suppressed more effectively. In addition, since the linear expansion coefficient of borosilicate glass is close to that of silicon, it is preferably used when, for example, the constituent material of the support portion 452 is a silicon-based material.

另一方面,第三部件459的构成材料例如可列举铝、铝合金、不锈钢、铜、铜合金、镍、镍合金等金属材料。其中,优选使用铝或铝合金。由于它们的热导率相对较大,所以能够更有效地传递电磁线圈456产生的热。On the other hand, the constituent material of the third member 459 includes, for example, metal materials such as aluminum, aluminum alloy, stainless steel, copper, copper alloy, nickel, and nickel alloy. Among them, aluminum or an aluminum alloy is preferably used. Because of their relatively high thermal conductivity, the heat generated by the electromagnetic coils 456 can be transferred more efficiently.

另外,第一部件457与第二部件458之间被粘合或接合。进而,第二部件458与第三部件459之间也被粘合或接合。粘合使用例如环氧系粘合剂、硅酮系粘合剂、丙烯酸系粘合剂等各种粘合剂。接合例如使用直接接合。In addition, the first member 457 and the second member 458 are bonded or joined. Furthermore, the second member 458 and the third member 459 are also bonded or joined together. For adhesion, various adhesives such as epoxy-based adhesives, silicone-based adhesives, and acrylic-based adhesives are used. Bonding, for example, uses direct bonding.

此外,第二部件458与第三部件459的边界面并不限定于图示的位置。例如,也可以是比图7所示的边界面更向+Z轴方向偏移的位置。但在这种情况下,第二部件458的高度降低,第二部件458的热阻相应减少,并且从X轴方向俯视时第三部件459的形状呈L字形状导致制造成本增加,因此优选为图7所示的位置。In addition, the boundary surface of the 2nd member 458 and the 3rd member 459 is not limited to the position shown in figure. For example, the position may be shifted in the +Z-axis direction from the boundary surface shown in FIG. 7 . However, in this case, the height of the second member 458 is reduced, the thermal resistance of the second member 458 is correspondingly reduced, and the shape of the third member 459 is L-shaped when viewed from the X-axis direction, which increases the manufacturing cost. position shown in Figure 7.

支撑部452的构成材料例如使用硅、氧化硅、氮化硅等硅系材料。具体来说,例如可通过对SOI(Silicon on Insulator,绝缘衬底上的硅)基板实施图案化加工,形成支撑部452和与其连接的轴部453、453及反射镜451。As the constituent material of the support portion 452 , silicon-based materials such as silicon, silicon oxide, and silicon nitride are used, for example. Specifically, for example, the support portion 452 , the shaft portions 453 and 453 connected thereto, and the reflection mirror 451 can be formed by patterning a SOI (Silicon on Insulator, silicon on insulating substrate) substrate.

另一方面,第一部件457与支撑部452之间及反射镜451与永久磁铁455之间例如使用上述粘合剂等进行粘合。On the other hand, between the first member 457 and the support portion 452 and between the mirror 451 and the permanent magnet 455, for example, the above-mentioned adhesive or the like is used for bonding.

另外,图1所示的三维测量装置4具有收纳投影部41的壳体40,光学扫描部45(光学扫描仪)的第三部件459如图1及图8所示连接于壳体40。例如,第三部件459与壳体40之间通过粘合、金属接合、拧紧或其它方法而紧密接触。通过将第三部件459连接于壳体40,传递至第三部件459的热能够进一步向壳体40侧散发。由此,能够抑制热滞留在第三部件459并且能够抑制热传递到第二部件458。其结果为,能够进一步抑制第一部件457的变形。The three-dimensional measurement apparatus 4 shown in FIG. 1 has a casing 40 that accommodates the projection unit 41 , and the third member 459 of the optical scanning unit 45 (optical scanner) is connected to the casing 40 as shown in FIGS. 1 and 8 . For example, the third member 459 is in close contact with the housing 40 by bonding, metal bonding, screwing, or other methods. By connecting the third member 459 to the casing 40 , the heat transferred to the third member 459 can be further dissipated to the casing 40 side. Thereby, heat retention in the third member 459 can be suppressed, and heat transfer to the second member 458 can be suppressed. As a result, deformation of the first member 457 can be further suppressed.

图7所示的电磁线圈456包括绕组4562、插通在绕组4562内侧的第一磁芯4564、及支撑第一磁芯4564的第二磁芯4566。第二磁芯4566呈板状,配置在第三部件459的+Z轴方向的面上。另外,第一磁芯4564呈圆柱状,连接于第二磁芯4566。The electromagnetic coil 456 shown in FIG. 7 includes a winding 4562 , a first magnetic core 4564 inserted inside the winding 4562 , and a second magnetic core 4566 supporting the first magnetic core 4564 . The second magnetic core 4566 has a plate shape, and is arranged on the surface of the third member 459 in the +Z axis direction. In addition, the first magnetic core 4564 has a cylindrical shape and is connected to the second magnetic core 4566 .

从控制部48通过未图示的布线而对绕组4562施加交流电流及直流电流。另外,第一磁芯4564及第二磁芯4566分别为磁路调整用芯。通过设置这种第一磁芯4564及第二磁芯4566,能够调整磁路并增加使反射镜451摆动的转矩。因此,能够减小电磁线圈456的耗电。An alternating current and a direct current are applied to the winding 4562 from the control unit 48 through wiring not shown. In addition, the first magnetic core 4564 and the second magnetic core 4566 are cores for adjusting the magnetic circuit, respectively. By providing the first magnetic core 4564 and the second magnetic core 4566, it is possible to adjust the magnetic circuit and increase the torque for swinging the mirror 451. Therefore, the power consumption of the electromagnetic coil 456 can be reduced.

另外,通过将第二磁芯4566连接于第三部件459,绕组4562产生的热容易传递至第三部件459侧。其结果为,能够进一步缓和电磁线圈456的温度上升。In addition, by connecting the second magnetic core 4566 to the third member 459, the heat generated by the winding 4562 is easily transferred to the third member 459 side. As a result, the temperature rise of the electromagnetic coil 456 can be further moderated.

第一磁芯4564的构成材料及第二磁芯4566的构成材料分别可列举例如Mn-Zn系铁氧体、Ni-Zn系铁氧体等各种软铁氧体材料。As the constituent material of the first magnetic core 4564 and the constituent material of the second magnetic core 4566, various soft ferrite materials such as Mn-Zn-based ferrite and Ni-Zn-based ferrite can be exemplified, respectively.

如上所述,本实施方式所涉及的三维测量装置4使用激光光束L进行对象物W的三维测量,并具有:投影部41,具备光学扫描部45,光学扫描部45是向包含对象物W的区域投影激光光束L形成的图案光PL的光学扫描仪;拍摄部47,对照射了激光光束L的包含对象物W的区域进行拍摄而获取图像数据;控制部48,控制投影部41及拍摄部47的驱动;以及测量部49,基于图像数据进行包含对象物W的区域的三维测量。并且,光学扫描部45具有:反射镜451,具有反射光的反射面450和位于反射面450的相反侧的背面451a(第一背面);永久磁铁455,配置在反射镜451的背面451a;支撑部452,支撑反射镜451,具有位于与背面451a(第一背面)同一侧的背面452a(第二背面);轴部453、453,将反射镜451与支撑部452连接,使反射镜451能够绕着摆动轴J摆动;第一部件457,配置在支撑部452的背面452a(第二背面);第二部件458,与摆动轴J正交,在沿着背面452a(第二背面)的方向上悬臂支撑第一部件457;第三部件459,隔着第二部件458与第一部件457相对配置,并且与第二部件458连接;以及电磁线圈456,配置在第一部件457与第三部件459之间。As described above, the three-dimensional measurement device 4 according to the present embodiment performs three-dimensional measurement of the object W using the laser beam L, and includes the projection unit 41 and the optical scanning unit 45 for measuring the object W including the object W. An optical scanner for projecting pattern light PL formed by the laser beam L in an area; an imaging unit 47 , which acquires image data by photographing an area including the object W irradiated with the laser beam L; a control unit 48 , which controls the projection unit 41 and the imaging unit 47 is driven; and a measurement unit 49 performs three-dimensional measurement of an area including the object W based on the image data. Further, the optical scanning unit 45 includes a mirror 451 having a reflection surface 450 for reflecting light and a back surface 451a (first back surface) located on the opposite side of the reflection surface 450; a permanent magnet 455 arranged on the back surface 451a of the reflection mirror 451; a support The part 452 supports the mirror 451 and has a back surface 452a (second back surface) located on the same side as the back surface 451a (the first back surface); the shaft parts 453 and 453 connect the mirror 451 to the supporting part 452 so that the mirror 451 can be It swings around the swing axis J; the first member 457 is arranged on the back surface 452a (second back surface) of the support portion 452; the second member 458 is orthogonal to the swing axis J, in the direction along the back surface 452a (second back surface) The upper cantilever supports the first member 457; the third member 459 is arranged opposite the first member 457 across the second member 458 and is connected to the second member 458; and the electromagnetic coil 456 is arranged between the first member 457 and the third member between 459.

这种三维测量装置4的光学扫描部45中,第二部件458悬臂支撑第一部件457,并且其支撑方向与摆动轴J交叉。因此,即使第一部件457随着热应力的产生而产生了翘曲,也能通过调整反射镜451的摆动角来修正该翘曲引起的图案光PL的描绘位置偏离。因此,即使光学扫描部45发生了温度变化,也能实现反射面450所带来的光扫描位置的精度高的光学扫描部45。其结果为,能够实现三维测量的精度高的三维测量装置4。In the optical scanning unit 45 of the three-dimensional measuring apparatus 4 of this type, the second member 458 supports the first member 457 in a cantilever direction, and the support direction thereof intersects the swing axis J. Therefore, even if the first member 457 is warped due to thermal stress, the deviation of the drawing position of the pattern light PL caused by the warping can be corrected by adjusting the swing angle of the mirror 451 . Therefore, even if the temperature of the optical scanning section 45 changes, the optical scanning section 45 with high accuracy of the optical scanning position by the reflection surface 450 can be realized. As a result, it is possible to realize the three-dimensional measurement device 4 with high accuracy in three-dimensional measurement.

另外,本实施方式所涉及的机器人系统1具有:具备机械臂22的机器人2;三维测量装置4,设置在机械臂22上,使用激光光束L来进行对象物W的三维测量;机器人控制装置5,基于三维测量装置4的测量结果来控制机器人2的驱动。In addition, the robot system 1 according to the present embodiment includes a robot 2 including a robot arm 22 ; a three-dimensional measurement device 4 installed on the robot arm 22 to perform three-dimensional measurement of an object W using a laser beam L; and a robot control device 5 , and the driving of the robot 2 is controlled based on the measurement results of the three-dimensional measurement device 4 .

这种机器人系统1中,如上所述,三维测量装置4的三维测量的精度高。因此,能够更准确地掌握对象物W的三维信息,从而能够提高机器人2针对对象物W执行的各种作业的准确性。In the robot system 1 of this type, as described above, the three-dimensional measurement device 4 has high accuracy in three-dimensional measurement. Therefore, the three-dimensional information of the object W can be grasped more accurately, and the accuracy of various operations performed by the robot 2 with respect to the object W can be improved.

6.应力解析6. Stress Analysis

以下的表1表示比较结果,具体为对于图7所示的光学扫描部45的第二部件458的不同构成材料的两个模型,当使光学扫描部45的温度变化时,通过应力解析求出反射面450的中心的移动量及反射面450的倾斜角度并进行比较而得到结果,该结果为上述比较结果。Table 1 below shows the comparison results, which are obtained by stress analysis when the temperature of the optical scanning unit 45 is changed for two models of different constituent materials of the second member 458 of the optical scanning unit 45 shown in FIG. 7 . The result of comparing the movement amount of the center of the reflection surface 450 and the inclination angle of the reflection surface 450 is the above-mentioned comparison result.

光学扫描部45的第一模型中,反射镜451的构成材料及支撑部452的构成材料均为硅,第一部件457的构成材料为Tempax玻璃(注册商标),第二部件458的构成材料及第三部件459的构成材料均为铝。第一模型中,支撑部452与第一部件457的界面、第一部件457与第二部件458的界面通过粘合剂接合,第二部件458与第三部件459的界面是一体形成的。In the first model of the optical scanning portion 45, the constituent material of the mirror 451 and the constituent material of the support portion 452 are both silicon, the constituent material of the first member 457 is Tempax glass (registered trademark), and the constituent material of the second member 458 is Tempax glass (registered trademark). The constituent materials of the third member 459 are all aluminum. In the first model, the interface between the support part 452 and the first part 457 and the interface between the first part 457 and the second part 458 are bonded by adhesive, and the interface between the second part 458 and the third part 459 is formed integrally.

光学扫描部45的第二模型中,第二部件458与第三部件459彼此独立设置,第二部件458的构成材料为Tempax玻璃(注册商标),第三部件459的构成材料为铝,除此以外与第一模型相同。另外,第二模型中,第二部件458与第三部件459的界面通过粘合剂接合。In the second model of the optical scanning unit 45, the second member 458 and the third member 459 are provided independently of each other, the constituent material of the second member 458 is Tempax glass (registered trademark), and the constituent material of the third member 459 is aluminum. Others are the same as the first model. In addition, in the second mold, the interface between the second member 458 and the third member 459 is bonded by an adhesive.

关于这两个模型,通过FEM(Finite Element Method,有限单元法)解析来计算温度从5℃上升至60℃时的行为。Regarding these two models, the behavior when the temperature is increased from 5°C to 60°C is calculated by FEM (Finite Element Method) analysis.

表1Table 1

Figure BDA0002427143820000191
Figure BDA0002427143820000191

结果如表1所示,可知相比采用铝的第一模型,第二部件458的构成材料采用玻璃材料的第二模型在温度变化时,也能将反射面450的中心移动量及反射面450的倾斜角度分别抑制得较小。这些结果表明,分别优选为:第三部件459的热导率大于第二部件458的热导率,第一部件457的热膨胀系数与第二部件458的热膨胀系数相同,第一部件457的构成材料及第二部件458的构成材料分别为玻璃材料。The results are shown in Table 1. It can be seen that compared with the first model using aluminum, the second model using glass material as the constituent material of the second member 458 can also change the amount of center movement of the reflective surface 450 and the amount of the reflective surface 450 when the temperature changes. The inclination angles of , respectively, are suppressed to be smaller. These results show that it is preferable that the thermal conductivity of the third member 459 is greater than that of the second member 458 , the thermal expansion coefficient of the first member 457 is the same as that of the second member 458 , and the constituent material of the first member 457 and the constituent materials of the second member 458 are glass materials, respectively.

第二实施方式Second Embodiment

接下来,说明作为第二实施方式所涉及的光学扫描仪的光学扫描部45A。Next, the optical scanning unit 45A as the optical scanner according to the second embodiment will be described.

图11是表示作为第二实施方式所涉及的光学扫描仪的光学扫描部45A的剖视图。11 is a cross-sectional view showing an optical scanning unit 45A as an optical scanner according to the second embodiment.

下面说明第二实施方式,以下说明中,以与第一实施方式不同的方面为中心进行说明,相同事项则省略说明。另外,图11中省略了一部分构成的图示。Next, the second embodiment will be described. In the following description, the difference from the first embodiment will be mainly described, and the description of the same matters will be omitted. In addition, in FIG. 11, illustration of a part of a structure is abbreviate|omitted.

图11所示的光学扫描部45A中,第一部件457与第二部件458形成为一体,除此以外与第一实施方式相同。The optical scanning unit 45A shown in FIG. 11 is the same as the first embodiment except that the first member 457 and the second member 458 are formed integrally.

具体来说,第一实施方式所涉及的光学扫描部45中,第一部件457与第二部件458分别独立设置,相对于此本实施方式中形成为一体。根据这种构成,第一部件457与第二部件458之间不存在边界面。因此,能够消除部件之间的边界面容易产生的粘合应力,从而能够更可靠地抑制第一部件457的变形。其结果为,能够将图案光PL投影至预期位置,从而能够提高三维测量的精度。另外,由于不需要第一部件457与第二部件458的粘合工序,所以能够减少光学扫描部45A的组装步骤数。如上所述的第二实施方式也获得与第一实施方式相同的效果。Specifically, in the optical scanning unit 45 according to the first embodiment, the first member 457 and the second member 458 are provided independently, respectively, but are integrally formed in this embodiment. According to this configuration, there is no boundary surface between the first member 457 and the second member 458 . Therefore, the adhesive stress that is easily generated at the boundary surface between the members can be eliminated, and the deformation of the first member 457 can be suppressed more reliably. As a result, the pattern light PL can be projected to a desired position, and the accuracy of the three-dimensional measurement can be improved. In addition, since the bonding process of the first member 457 and the second member 458 is unnecessary, the number of assembly steps of the optical scanning unit 45A can be reduced. The second embodiment as described above also achieves the same effects as the first embodiment.

以上,基于图示的实施方式对本发明的光学扫描仪、三维测量装置及机器人系统进行了说明,但本发明并不限定于此,各部分的构成也可以替换成具有相同功能的任意构成。另外,本发明也可以附加其它任意的构成物。The optical scanner, the three-dimensional measurement device, and the robot system of the present invention have been described above based on the illustrated embodiments, but the present invention is not limited thereto, and the configuration of each part may be replaced with any configuration having the same function. In addition, other arbitrary components may be added to the present invention.

此外,本发明的光学扫描仪也可以用于三维测量装置以外的用途,例如可以用于头戴式显示器、平视显示器、投影仪等图像显示装置。In addition, the optical scanner of the present invention can also be used in applications other than three-dimensional measurement devices, and can be used in image display devices such as head-mounted displays, head-up displays, and projectors, for example.

Claims (10)

1. An optical scanner, comprising:
a mirror having a reflection surface that reflects light and a first back surface located on the opposite side of the reflection surface;
a permanent magnet disposed on the first rear surface of the mirror;
a support portion supporting the mirror and having a second back surface located on the same side as the first back surface;
a shaft portion that connects the mirror to the support portion and allows the mirror to swing about a swing shaft;
a first member disposed on the second rear surface of the support portion;
a second member orthogonal to the swing axis, the first member being cantilever-supported in a direction along the second back surface;
a third member that is disposed opposite to the first member with the second member interposed therebetween and is connected to the second member; and
an electromagnetic coil disposed between the first member and the third member.
2. The optical scanner of claim 1,
the support surface for supporting the first member by the second member is offset from the shaft portion when viewed from above in a vertical direction of the reflection surface.
3. The optical scanner according to claim 1 or 2,
the electromagnetic coil includes a magnetic core.
4. The optical scanner of claim 3,
the magnetic core is connected to the third member.
5. The optical scanner according to claim 1 or 2,
the third member has a thermal conductivity greater than a thermal conductivity of the second member.
6. The optical scanner according to claim 1 or 2,
the coefficient of thermal expansion of the first component is the same as the coefficient of thermal expansion of the second component.
7. The optical scanner of claim 6,
the first part and the second part are integral.
8. A three-dimensional measuring device is characterized in that,
the three-dimensional measurement of an object is performed using a laser beam, and the three-dimensional measurement apparatus includes:
a projection unit including an optical scanner that projects pattern light of the laser beam onto a region including the object;
an imaging unit that acquires image data by imaging a region including the object irradiated with the laser beam; and
a measurement unit that performs three-dimensional measurement of a region including the object based on the image data,
the optical scanner has:
a mirror having a reflection surface that reflects light and a first back surface located on the opposite side of the reflection surface;
a permanent magnet disposed on the first rear surface of the mirror;
a support portion supporting the mirror and having a second back surface located on the same side as the first back surface;
a shaft portion that connects the mirror to the support portion and allows the mirror to swing about a swing shaft;
a first member disposed on the second rear surface of the support portion;
a second member orthogonal to the swing axis, the first member being cantilever-supported in a direction along the second back surface;
a third member that is disposed opposite to the first member with the second member interposed therebetween and is connected to the second member; and
an electromagnetic coil disposed between the first member and the third member.
9. The three-dimensional measuring device of claim 8,
the three-dimensional measuring device has a housing for housing the projecting section,
the third component of the optical scanner is connected to the housing.
10. A robot system, characterized in that,
the robot system includes: a robot having an arm; a three-dimensional measuring device which is provided in the robot arm and performs three-dimensional measurement of an object using a laser beam; and a robot control device that controls driving of the robot based on a measurement result of the three-dimensional measurement device,
the three-dimensional measuring apparatus has:
a projection unit including an optical scanner that projects pattern light of the laser beam onto a region including the object;
an imaging unit that acquires image data by imaging a region including the object irradiated with the laser beam; and
a measurement unit that performs three-dimensional measurement of a region including the object based on the image data,
the optical scanner has:
a mirror having a reflection surface that reflects light and a first back surface located on the opposite side of the reflection surface;
a permanent magnet disposed on the first rear surface of the mirror;
a support portion supporting the mirror and having a second back surface located on the same side as the first back surface;
a shaft portion that connects the mirror to the support portion and allows the mirror to swing about a swing shaft;
a first member disposed on the second rear surface of the support portion;
a second member orthogonal to the swing axis, the first member being cantilever-supported in a direction along the second back surface;
a third member that is disposed opposite to the first member with the second member interposed therebetween and is connected to the second member; and
an electromagnetic coil disposed between the first member and the third member.
CN202010224338.0A 2019-03-27 2020-03-26 Optical scanners, 3D measuring devices and robotic systems Active CN111751985B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-060482 2019-03-27
JP2019060482A JP7263878B2 (en) 2019-03-27 2019-03-27 Optical scanner, three-dimensional measuring device and robot system

Publications (2)

Publication Number Publication Date
CN111751985A true CN111751985A (en) 2020-10-09
CN111751985B CN111751985B (en) 2022-07-12

Family

ID=72605550

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010224338.0A Active CN111751985B (en) 2019-03-27 2020-03-26 Optical scanners, 3D measuring devices and robotic systems

Country Status (3)

Country Link
US (1) US11422361B2 (en)
JP (1) JP7263878B2 (en)
CN (1) CN111751985B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11022792B2 (en) * 2016-12-27 2021-06-01 Intel Corporation Coupling a magnet with a MEMS device
JP2020166371A (en) * 2019-03-28 2020-10-08 セイコーエプソン株式会社 Information processing method, information processing device, object detection device and robot system
JP2021089405A (en) * 2019-12-06 2021-06-10 セイコーエプソン株式会社 Optical scanner, three-dimensional measuring device, and robot system
JP7630947B2 (en) * 2020-10-05 2025-02-18 キヤノン株式会社 Three-dimensional measurement device, system, and production method
JP7537386B2 (en) 2021-07-06 2024-08-21 横河電機株式会社 Optical resonator and surface-emitting laser
CN115793256B (en) * 2022-12-01 2024-12-10 业成光电(深圳)有限公司 Optical path adjustment component, optical system and vehicle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102736244A (en) * 2011-04-06 2012-10-17 精工爱普生株式会社 Actuator, optical scanner, and image forming apparatus
CN104865698A (en) * 2014-02-26 2015-08-26 北阳电机株式会社 Metal elastic member and miniature machine
US20180088336A1 (en) * 2016-09-29 2018-03-29 Seiko Epson Corporation Optical scanner, image display device, head-mounted display, and heads-up display

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6445483B2 (en) * 1996-07-01 2002-09-03 Seiko Epson Corporation Optical scanning apparatus
JP2001004952A (en) * 1999-06-24 2001-01-12 Victor Co Of Japan Ltd Optical deflector
US20060119925A1 (en) * 2004-12-03 2006-06-08 Orcutt John W Single torsional hinge mirror package
JP2009069676A (en) 2007-09-14 2009-04-02 Ricoh Co Ltd Optical scanner
US9024992B2 (en) * 2011-01-07 2015-05-05 Canon Denshi Kabushiki Kaisha Vibrating element, optical scanning device, and image forming device and image projection device using same
JP6018926B2 (en) * 2013-01-09 2016-11-02 富士フイルム株式会社 Micromirror device and manufacturing method thereof
JP6148057B2 (en) 2013-03-29 2017-06-14 日本信号株式会社 Planar actuator
JP6569329B2 (en) * 2015-06-29 2019-09-04 セイコーエプソン株式会社 Optical device and image display apparatus
JP2017049436A (en) * 2015-09-02 2017-03-09 セイコーエプソン株式会社 Electronic device, image display device, and head mounted display
JP2017110991A (en) * 2015-12-16 2017-06-22 セイコーエプソン株式会社 Measurement system, measurement method, robot control method, robot, robot system, and picking device
JP2017181748A (en) * 2016-03-30 2017-10-05 セイコーエプソン株式会社 Optical scanner, image display device, and head mounted display
US10620447B2 (en) * 2017-01-19 2020-04-14 Cognex Corporation System and method for reduced-speckle laser line generation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102736244A (en) * 2011-04-06 2012-10-17 精工爱普生株式会社 Actuator, optical scanner, and image forming apparatus
CN104865698A (en) * 2014-02-26 2015-08-26 北阳电机株式会社 Metal elastic member and miniature machine
US20180088336A1 (en) * 2016-09-29 2018-03-29 Seiko Epson Corporation Optical scanner, image display device, head-mounted display, and heads-up display

Also Published As

Publication number Publication date
CN111751985B (en) 2022-07-12
US11422361B2 (en) 2022-08-23
US20200310107A1 (en) 2020-10-01
JP2020160312A (en) 2020-10-01
JP7263878B2 (en) 2023-04-25

Similar Documents

Publication Publication Date Title
CN111751985B (en) Optical scanners, 3D measuring devices and robotic systems
JP5913726B2 (en) Gimbal scanning mirror array
JP5614167B2 (en) Optical deflector, optical scanning device, image forming apparatus, and image projecting apparatus
US11312029B2 (en) Three-dimensional measuring apparatus, robot, and robot system
JP7321688B2 (en) Oscillating wave actuator and imaging device and stage device using the same
JP2015518977A (en) Shape memory alloy actuator
CN112917473B (en) Optical scanning device, three-dimensional measuring device, and robot system
CN103994728A (en) Object detector and robot system
JP6452338B2 (en) Stage device and driving method thereof
US20170307364A1 (en) Holding apparatus, measurement apparatus, and article manufacturing method
CN211955984U (en) Driving mechanism
US11693097B2 (en) Optical scanning device, optical measuring apparatus, and robot
JP2021032798A (en) Optical measuring device and robot
JP4789456B2 (en) Planar actuator
US20160320609A1 (en) Driving apparatus
JP6854638B2 (en) Manufacturing methods for optics, exposure equipment, and articles
JP5787084B2 (en) Optical scanning device
JP5314553B2 (en) Light irradiation apparatus and imaging system
JP2017203871A (en) Retainer, measuring device, and article manufacturing method
JP2004295029A (en) Optical scanning device
TWM664942U (en) Positioner
WO2023188533A1 (en) Optical path changing device and projection-type image display device provided with same
WO2023188532A1 (en) Optical path changing device and projection image display device provided with same
CN117308824A (en) 3-dimensional measuring device, component mounting device, and 3-dimensional measuring method
JP2023020404A (en) Camera module and electronic product

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant