CN111751971A - Microsphere lens side-looking super-resolution imaging device - Google Patents

Microsphere lens side-looking super-resolution imaging device Download PDF

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Publication number
CN111751971A
CN111751971A CN202010559839.4A CN202010559839A CN111751971A CN 111751971 A CN111751971 A CN 111751971A CN 202010559839 A CN202010559839 A CN 202010559839A CN 111751971 A CN111751971 A CN 111751971A
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China
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super
lens
microsphere lens
probe
immersion medium
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CN202010559839.4A
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Chinese (zh)
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陈涛
王凤霞
刘会聪
杨湛
孙立宁
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Suzhou University
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Suzhou University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58Optics for apodization or superresolution; Optical synthetic aperture systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/02Mechanical
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/068Optics, miscellaneous

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The invention discloses a side-viewing super-resolution imaging device of a microsphere lens, which comprises a microscope, a sample stage, a moving mechanism, a probe and a side-viewing composite lens, wherein the sample stage is positioned below the microscope, the probe is arranged on the moving mechanism, the side-viewing composite lens comprises an immersion medium, the microsphere lens and an optical reflector, the microsphere lens and the optical reflector are connected onto the immersion medium, and the immersion medium is connected with the probe. The invention bonds the microsphere lens and the optical reflector on the immersion medium to form a side-looking composite lens, reduces the volume of the side-looking composite lens, and enables the composite lens to enter the interior of the groove structure, the immersion medium is ultraviolet light curing glue or polydimethylsiloxane glue, which not only can improve the imaging quality of the microsphere lens, but also has very good light transmission performance, the optical reflector changes the light path of the microscope, the movement mechanism realizes the control of the side-looking composite lens and the movement of the sample platform driving the sample, and realizes the super-resolution imaging of any area of the inner side wall of the groove structure.

Description

Microsphere lens side-looking super-resolution imaging device
Technical Field
The invention relates to the technical field of imaging, in particular to a microsphere lens side-looking super-resolution imaging device.
Background
In the past three hundred years from the invention of the first microscope, various methods for improving imaging effect and system resolution are proposed, and various microscopes based on different mechanisms and principles are developed. For electron microscopes, scanning tunneling microscopes and atomic force microscopes with imaging resolution on the order of nanometers or even atomic scales, although the resolution is very high, there are severe limitations on the imaging conditions and samples, especially the inability to image living biological samples, which limits the application in biomedicine. Because the optical microscope can directly observe a sample in real time and is accompanied by the characteristics of rich functional imaging information (such as color, transparency and the like), the optical microscope still has irreplaceable effect in the field of microscopic imaging such as biomedicine and the like. With the development of modern biotechnology, biological samples that one needs to observe have been extended from biological individuals to the organ, tissue, cell, or even single molecule level. Particularly, with the further development of chemical analysis techniques for nucleic acids and proteins, life sciences have been gradually shifted to the fields of molecular biology, molecular immunology, molecular cytology, molecular genetics, and the like. The technical researches provide higher requirements for the resolution capability and the imaging conditions of the microscope, so that the exploration of an optical super-resolution imaging method which can fundamentally break through the diffraction limit and obtain higher resolution capability, particularly a far-field optical microscopic imaging method, is a very key technical problem in the field of biomedicine. In recent decades, with the continuous efforts of researchers, some novel optical super-resolution microscopy methods and techniques have been proposed and made a breakthrough progress, which brings about the observation and research of nanoscale biological samples.
A model for realizing super-resolution microscopic imaging by using transparent medium microspheres under white light is established by a Wangcheng group of the university of Manchester in Britain in 2011, the diameter of the silica medium microspheres capable of realizing super-resolution is required to be 2-9 micrometers, and the microspheres are directly placed on the surface of a sample to be tested, so that super-resolution imaging can be realized under a common optical microscope. The microscope works in a white light mode, and under a transmission mode, transparent medium microspheres with the diameter of 4.74um are adopted to successfully image a fishnet gold-plated anodic aluminum oxide film sample with the diameter of 50nm and spaced holes; under the reflection mode, the 100-nanometer wide lines on the surface of the protective film of the blue-ray DVD can be clearly seen through the silicon dioxide microspheres, and the limit of diffraction limit is successfully broken.
The microsphere lens can realize super-resolution imaging by combining with an optical microscope. However, the microsphere lens is generally immersed in liquid for imaging in the prior art, the imaging mode can pollute the surface of a sample, and the depth of the immersion liquid can also affect the imaging quality of the microsphere lens; in addition, for the observation of the super-resolution image on the inner side wall of the groove structure, the other side wall of the groove shields the light path of the microscope, so that the microsphere lens cannot carry out super-resolution imaging on the inner side wall of the groove structure.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a microsphere lens side-viewing super-resolution imaging device.
In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:
the utility model provides a microsphere lens looks sideways at super-resolution imaging device, includes microscope, sample platform, moving mechanism, probe and looks sideways at compound lens, the sample platform is located microscope's below, the probe is installed moving mechanism is last, look sideways at compound lens include immersion medium, connect microsphere lens and optical reflector on the immersion medium, the immersion medium with the probe is connected.
As a further improvement of the invention, the immersion medium is an ultraviolet light curing glue or a polydimethylsiloxane glue.
As a further improvement of the invention, the microsphere lenses are semi-immersed in the immersion medium.
As a further improvement of the invention, the microsphere lens is a barium titanate microsphere lens.
As a further improvement of the invention, the diameter of the microsphere lens is 50 μm.
As a further improvement of the invention, the angle between the optical reflector and the horizontal direction is 45 degrees.
As a further development of the invention, one end of the probe penetrates into the immersion medium.
As a further improvement of the present invention, the moving mechanism includes a first horizontal moving platform, a second horizontal moving platform installed on the first horizontal moving platform, a vertical moving platform installed on the second horizontal moving platform, and an angle adjusting mechanism installed on the vertical moving platform, and the other end of the probe is installed on the angle adjusting mechanism.
As a further improvement of the invention, the other end of the probe is connected with an extension bar which is arranged on the angle adjusting mechanism.
As a further improvement of the invention, the sample stage is a three-axis moving platform.
The invention has the beneficial effects that:
the optical reflector and the microsphere lens are integrated, the microsphere lens and the optical reflector are both bonded on the immersion medium to form the side-looking composite lens, the size of the side-looking composite lens is reduced, the composite lens can enter the interior of the groove structure, the immersion medium is ultraviolet light curing glue or polydimethylsiloxane glue, the imaging quality of the microsphere lens can be improved, the optical transmission performance is good, the optical path of a microscope is changed through the optical reflector, the operation and the control of the side-looking composite lens and the movement of a sample platform driving a sample are realized through a moving mechanism, the observation of super-resolution images on the inner side wall of the groove structure is realized, and the sample platform can be moved to realize the super-resolution imaging on any area of the inner side wall of the groove.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a preferred embodiment of the present invention;
FIG. 2 is a front view of the probe mounted on the movement mechanism of the preferred embodiment of the present invention;
FIG. 3 is a schematic structural view of an angle adjustment mechanism of a preferred embodiment of the present invention;
FIG. 4 is a schematic diagram of the structure of the probe and the side view compound lens according to the preferred embodiment of the present invention;
FIG. 5 is a schematic diagram of the side view compound lens imaging configuration of the preferred embodiment of the present invention;
in the figure: 10. microscope, 12, sample stage, 14, moving mechanism, 16, probe, 18, side view compound lens, 20, immersion medium, 22, microsphere lens, 24, optical mirror, 25, inclined plane, 26, first horizontal moving platform, 28, second horizontal moving platform, 30, vertical moving platform, 32, angle adjustment mechanism, 33, microscope beam, 34, base, 36, carrier bar, 38, angle adjustment knob, 40, extension bar, 42, connecting bar, 44, sample, 46, inside wall, 48, super-resolution image.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, 2, and 4, a microsphere lens side-view super-resolution imaging device includes a microscope 10, a sample stage 12, a moving mechanism 14, a probe 16, and a side-view compound lens 18, where the sample stage 12 is located below the microscope 10, the probe 16 is installed on the moving mechanism 14, the side-view compound lens 18 includes an immersion medium 20, a microsphere lens 22 and an optical reflector 24, the microsphere lens 22 and the optical reflector 24 are connected to the immersion medium 20, the immersion medium 20 is connected to the probe 16, the probe 16 is driven to move by the operation of the moving mechanism 14, and the probe 16 drives the immersion medium 20 to move so that the side-view compound lens 18 can move to the inside of a trench structure.
According to the invention, the immersion medium 20 is preferably ultraviolet light curing glue, so that the imaging quality of the microsphere lens 22 can be improved, and the optical transmission performance is very good. It will be appreciated that immersion medium 20 is not limited to uv curable glue, but may also be a polydimethylsiloxane glue.
According to the invention, the microsphere lens 22 is preferably half-immersed in the immersion medium 20, and the half-immersed imaging mode can not only improve the imaging quality of the microsphere lens 22, but also ensure the full contact between the microsphere lens 22 and the surface of a sample, so that the super-resolution imaging inside the groove structure can be observed conveniently, and the imaging quality is good.
In order to realize super-resolution imaging, the microsphere lens 22 is preferably a barium titanate microsphere lens. Furthermore, the diameter of the microsphere lens 22 is 50 μm, so that super-resolution imaging can be realized, and the imaging efficiency and the imaging quality can be improved.
According to the invention, the included angle between the optical reflector 24 and the horizontal direction is preferably 45 degrees, the vertically irradiated light beams can be reflected into horizontal light beams, the inner side wall of the groove structure can be observed, and the imaging quality is improved. In order to improve the stability of the connection of the optical mirror 24 to the immersion medium 20, the immersion medium 20 is preferably provided with an inclined surface 25, the inclined surface 25 being angled at 45 ° to the horizontal.
In order to improve the stability of the connection between the probe 16 and the immersion medium 20 and to achieve stable manipulation of the side view compound lens 18, it is preferred that one end of the probe 16 penetrate into the immersion medium 20. The depth of penetration of the probe 16 into the immersion medium 20 can be set according to actual conditions, and the probe 16 does not block the optical path of the microsphere lens.
The preferred moving mechanism 14 of the present invention comprises a first horizontal moving platform 26, a second horizontal moving platform 28 mounted on the first horizontal moving platform 26, a vertical moving platform 30 mounted on the second horizontal moving platform 28, and an angle adjusting mechanism 32 mounted on the vertical moving platform 30, wherein the other end of the probe 16 is mounted on the angle adjusting mechanism 32, and the probe 16 is tilted by the angle adjusting mechanism 32 to a proper angle, so as to ensure that the microscope light beam 33 can be reflected onto the microsphere lens 22 by the optical reflector 24 through changing the optical path. In this embodiment, the first horizontal moving platform 26 realizes movement along the X-axis direction, the second horizontal moving platform 28 realizes movement along the Y-axis direction, the vertical moving platform 30 realizes movement along the Z-axis direction, and the first horizontal moving platform 26, the second horizontal moving platform 28, and the vertical moving platform 30 all adopt common structures in the art, which are not described herein again. As shown in fig. 3, the angle adjusting mechanism 32 preferably includes a base 34, a carrying rod 36 hinged to the base 34, and an angle adjusting knob 38 screwed to the base 34, the base 34 is mounted on the vertical moving platform 30, a bearing (not shown) is disposed in the base 34, the bottom of the angle adjusting knob 38 is engaged with the inner ring of the bearing, the outer ring of the bearing is engaged with the base 34, and when the angle adjusting knob 38 is rotated, the angle adjusting knob 38 is lifted and lowered to make the carrying rod 36 change the tilting angle.
The other end of the probe 16 is preferably connected to an extension bar 40, and the extension bar 40 is mounted to the angle adjustment mechanism 32. Specifically, a connecting rod 42 is further provided, an upper portion of the connecting rod 42 is connected to the carrier bar 36, and a lower portion of the connecting rod 42 is connected to the extension bar 40, and the extension bar 40 is tilted at a proper angle by the rotation angle adjusting knob 38, thereby tilting the probe 16 at a proper angle. Of course, it will be appreciated that the probe 16 and extension bar 40 may be integrally formed.
In the invention, the preferred sample stage 12 is a three-axis moving platform, so that the movement of the sample along the X-axis, Y-axis and Z-axis directions can be realized, and the super-resolution imaging of any region of the inner side wall of the groove can be realized.
In use, the side view compound lens 18 is first mounted at the front end of the extension bar 40 through the probe 16, the angle adjusting knob 38 of the angle adjusting mechanism 32 is rotated to adjust the position of the side view compound lens 18 by using the first horizontal moving platform 26, the second horizontal moving platform 28 and the vertical moving platform 30, the microsphere lens 22 is moved to the center of the field of view of the microscope 10, meanwhile, the microscope light beam 33 can be reflected to the microsphere lens 22 by changing the light path through the optical reflector 24, the sample stage 12 is moved, the microsphere lens 22 in the side-looking compound lens 18 is contacted with the inner side wall 46 of the groove structure of the sample 44, the focal length of the microscope 10 is adjusted until the super-resolution image 48 on the inner side wall 46 of the groove structure of the sample 44 can be observed, as shown in fig. 5, by moving the sample stage 12, an image of any area on the inner sidewall 46 of the groove structure of the sample 44 can be observed.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. The utility model provides a microballon lens looks sideways at super-resolution imaging device, its characterized in that includes microscope, sample platform, moving mechanism, probe and looks sideways at compound lens, the sample platform is located microscope's below, the probe is installed moving mechanism is last, look sideways at compound lens include immersion medium, connect microballon lens and optical reflector on the immersion medium, immersion medium with the probe is connected.
2. The microsphere lens side-looking super-resolution imaging device according to claim 1, wherein the immersion medium is an ultraviolet light curing glue or a polydimethylsiloxane glue.
3. The microsphere lens side-looking super-resolution imaging device according to claim 1, wherein the microsphere lens is semi-immersed in the immersion medium.
4. The microsphere lens side-looking super-resolution imaging device according to claim 3, wherein the microsphere lens is a barium titanate microsphere lens.
5. The microsphere lens side-looking super-resolution imaging device according to claim 3 or 4, wherein the diameter of the microsphere lens is 50 μm.
6. The microsphere lens side-looking super-resolution imaging device according to claim 1, wherein the angle between the optical reflector and the horizontal direction is 45 °.
7. The microsphere lens side-looking super-resolution imaging device according to claim 2, wherein one end of the probe penetrates into the immersion medium.
8. The device as claimed in claim 7, wherein the moving mechanism comprises a first horizontal moving platform, a second horizontal moving platform mounted on the first horizontal moving platform, a vertical moving platform mounted on the second horizontal moving platform, and an angle adjusting mechanism mounted on the vertical moving platform, and the other end of the probe is mounted on the angle adjusting mechanism.
9. The device as claimed in claim 8, wherein an extension bar is connected to the other end of the probe, and the extension bar is mounted on the angle adjustment mechanism.
10. The microsphere lens side-looking super-resolution imaging device according to claim 1, wherein the sample stage is a three-axis moving platform.
CN202010559839.4A 2020-06-18 2020-06-18 Microsphere lens side-looking super-resolution imaging device Pending CN111751971A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102519976A (en) * 2011-12-26 2012-06-27 上海大学 Digital holographic detection device for subsurface defect of optical element
CN105988021A (en) * 2015-02-05 2016-10-05 中国科学院沈阳自动化研究所 Optical super-resolution dynamic imaging system and method based on microlens modified probe
CN106940470A (en) * 2017-05-04 2017-07-11 苏州大学 Optical ultra-discrimination fast imaging device and imaging method
CN110543003A (en) * 2019-09-05 2019-12-06 苏州大学 microsphere lens probe assembly and microsphere lens microscopic imaging system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102519976A (en) * 2011-12-26 2012-06-27 上海大学 Digital holographic detection device for subsurface defect of optical element
CN105988021A (en) * 2015-02-05 2016-10-05 中国科学院沈阳自动化研究所 Optical super-resolution dynamic imaging system and method based on microlens modified probe
CN106940470A (en) * 2017-05-04 2017-07-11 苏州大学 Optical ultra-discrimination fast imaging device and imaging method
CN110543003A (en) * 2019-09-05 2019-12-06 苏州大学 microsphere lens probe assembly and microsphere lens microscopic imaging system

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