CN111730769A - Integrated pulley of multi-wire cutting machine and using method thereof - Google Patents
Integrated pulley of multi-wire cutting machine and using method thereof Download PDFInfo
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- CN111730769A CN111730769A CN202010613012.7A CN202010613012A CN111730769A CN 111730769 A CN111730769 A CN 111730769A CN 202010613012 A CN202010613012 A CN 202010613012A CN 111730769 A CN111730769 A CN 111730769A
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- rubber ring
- wheel
- annular groove
- pulley
- layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention provides an integrated pulley of a multi-wire cutting machine and a using method thereof, wherein the integrated pulley comprises a wheel frame and a rubber ring; the wheel rib comprises an outer wheel, an annular groove and a porous support frame, the annular groove is located in the outer wheel, the outer wheel surrounds the porous support frame, the outer wheel and the porous support frame are integrally formed, and the rubber ring is embedded in the annular groove. The invention has the beneficial effects that: compared with the traditional pulley, the pulley frame has the advantages that the used materials of the wheel frame are reduced on the basis of ensuring the strength of the pulley, the used materials of the traditional rubber ring are greatly reduced, the resources are saved, and the structure is simple.
Description
Technical Field
The invention relates to the field of multi-wire cutting, in particular to an integrated pulley of a multi-wire cutting machine and a using method thereof.
Background
The multi-line cutting is a novel cutting processing method which carries grinding materials into a semiconductor processing area for grinding through the high-speed reciprocating motion of a metal wire and simultaneously cuts hard and brittle materials such as semiconductors into hundreds of thin slices at one time. The numerical control multi-wire cutting machine has gradually replaced the traditional internal circle cutting and becomes the main mode of silicon wafer cutting processing.
In the technical field of semiconductor cutting devices, the multi-wire saw technology is adopted by most of current silicon wafer manufacturers as a relatively advanced silicon wafer processing technology. As a core component of the multi-wire cutting machine, the performance of the guide wheel plays an important role in the precision and quality of cutting, so that the technology of wrapping the guide wheel by a high-strength polymer rubber ring is adopted in the market, but the technology has some defects, such as overhigh production cost, incapability of ensuring the precision of the cutting wire during rotation and the like.
Disclosure of Invention
In order to solve the technical problem, the invention discloses an integrated pulley of a multi-wire cutting machine and a using method thereof, and the technical scheme of the invention is implemented as follows:
an integrated pulley of a multi-wire cutting machine comprises a wheel frame and a rubber ring; the wheel rib comprises an outer wheel, an annular groove and a porous support frame, the annular groove is located in the outer wheel, the outer wheel surrounds the porous support frame, the outer wheel and the porous support frame are integrally formed, and the rubber ring is embedded in the annular groove.
Preferably, the outer wheel is further provided with a reinforcing layer.
Preferably, the rubber ring comprises an external cutting steel wire layer and an internal connecting pulley layer, the external cutting steel wire layer is made of an imported TPU material, and the internal connecting pulley layer is made of a common TPU material.
Preferably, the wheel bone is made of nylon material.
A multi-wire saw comprising at least two multi-wire saw integrated pulleys as claimed in claim 1 and a cutting wire wound around the rubber ring.
Preferably, the surface of the cutting wire is provided with a diamond plating layer.
A method of producing the multi-wire saw integrated pulley of claim 1, comprising the steps of:
s1: molding the wheel bone: adopting a die to extrude and form the wheel ribs;
s2: surface treatment: grinding the surface of the wheel bone, and then cleaning;
s3: grooving by a lathe: opening an annular groove on the surface of the wheel skeleton by using a lathe;
s4: cleaning and polishing: cleaning and polishing the annular groove;
s5: molding a rubber ring: extruding and forming the rubber ring by adopting a die;
s6: high-temperature integration: under the high-temperature environment, the rubber ring expands and is sleeved in the annular groove;
s7: and (3) cooling and forming: and after cooling the rubber ring, the rubber ring is shrunk and fastened in the annular groove.
Preferably, the S5 includes S51: and (3) molding an outer layer: injecting an inlet high-wear-resistance TPU material into a die and then performing hydraulic forming;
s52: and (3) molding the inner layer: injecting common TPU material into a mould and then performing hydraulic forming.
Preferably, the S52 step injects the TPU waste into the mold and then hydroforms.
By implementing the technical scheme of the invention, the technical problem of overhigh cost of producing the integrated pulley in the prior art can be solved; by implementing the technical scheme of the invention, the annular groove is formed in the wheel bone, so that the technical effects of saving cost and improving stability can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a front view of a wheel bone;
FIG. 2 is a left side view of the wheel bones;
FIG. 3 is a top view of the wheel bones;
FIG. 4 is a front view of the rubber ring;
FIG. 5 is a left side view of the rubber ring;
fig. 6 is a top view of the rubber ring.
In the above drawings, the reference numerals denote:
1, the wheel bone
1-1 part of outer wheel 1-2 parts of annular groove 1-3 parts of porous support frame 1-4 parts of reinforcing layer
2, rubber ring
2-1, external cutting steel wire layer 2-1, internal connecting pulley layer
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
In a specific embodiment 1, as shown in fig. 1, 2, 3 and 4, the integrated pulley of the multi-wire cutting machine comprises a wheel frame 1 and a rubber ring 2; the wheel frame 1 comprises an outer wheel 1-1, an annular groove 1-2 and a porous support frame 1-3, the annular groove 1-2 is located on the outer wheel 1-1, the outer wheel 1-1 surrounds the porous support frame 1-3 and is integrally formed with the porous support frame 1-3, and the rubber ring 2 is embedded in the annular groove 1-2.
In this embodiment, different from the traditional integrated pulley, the porous support frame 1-3 of this embodiment uses less material, and the cost is lower, and structural strength does not reduce, and the rubber ring 2 of this embodiment inlays inside annular groove 1-2 in addition, and this is less than the required material of traditional cover mode of production, and owing to there is annular groove 1-2, when carrying out the cutting operation, the line of cut can be fine stabilize inside annular groove, this embodiment simple structure, the cutting is stable, and very big reduction manufacturing cost.
In a preferred embodiment the outer wheel 1-1 is further provided with a reinforcement layer 1-4.
The reinforcing layer 1-4 is used for improving the structural strength of the outer wheel 1-1 and preventing the problems of insufficient structural strength and the like caused by the arrangement of the annular groove 1-2.
In a preferred embodiment, as shown in fig. 4, 5 and 6, the rubber ring 2 comprises an external cutting steel wire layer and an internal connecting pulley layer, wherein the external cutting steel wire layer 2-1 is made of imported TPU material, and the internal connecting pulley layer 2-2 is made of ordinary TPU material.
Compared with the traditional rubber ring, the rubber ring 2 produced in the embodiment needs less imported TPU materials with high price, and is lower in cost.
In a preferred embodiment, the wheel frame 1 is a nylon material.
The nylon material has the advantages of no toxicity, light weight, excellent mechanical strength, wear resistance and better corrosion resistance, and can be well suitable for the working environment of the wheel frame 1.
Example 2
In a particular embodiment 2, a multi-wire saw comprising at least two multi-wire saw integrated pulleys and a cutting wire according to claim 1, the cutting wire being wound around the rubber ring 2.
The multi-wire saw is more stable and lower in cost than a traditional multi-wire saw.
In a preferred embodiment, the surface of the cutter wire is provided with a diamond plating.
The diamond hardness is higher, and the cutting object of this embodiment after electroplating diamond is wider, and the cutting can be performed only by the material with hardness lower than that of diamond.
Example 3
In a specific embodiment 3, a method of producing the multi-wire saw integrated pulley of claim 1, comprising the steps of:
s1: molding the wheel bone: adopting a die to extrude and form the wheel frame 1;
s2: surface treatment: grinding the surface of the wheel bone 1, and then cleaning;
s3: grooving by a lathe: forming an annular groove 1-2 on the surface of the wheel frame 1 by using a lathe;
s4: cleaning and polishing: cleaning and polishing the annular groove 1-2;
s5: molding a rubber ring: adopting a die to extrude and form the rubber ring 2;
s6: high-temperature integration: under the high-temperature environment, the rubber ring 2 expands and is sleeved in the annular groove 1-2;
s7: and (3) cooling and forming: after cooling the rubber ring 2, the rubber ring 2 is shrunk and fastened in the annular groove 1-2.
The finished product stability of this embodiment production is good, through expend with heat and contract with cold's effect with rubber ring 2 be fixed in annular groove 1-2 in, can not produce the crackle to rubber ring 2 is difficult for droing, and through the washing step of polishing improve mutual frictional force, stability further strengthens.
In a preferred embodiment, S5 includes S51: and (3) molding an outer layer: injecting an inlet high-wear-resistance TPU material into a die and then performing hydraulic forming;
s52: and (3) molding the inner layer: injecting common TPU material into a mould and then performing hydraulic forming.
This embodiment reduces the manufacturing cost of this embodiment, and does not influence its intensity.
Example 4
In a preferred embodiment 4, the step S52 injects the TPU waste into the mold and then hydroforms.
In the embodiment, the inner connecting pulley layer 2-2 can be produced by using waste materials, so that the cost is further reduced, the resource utilization efficiency is improved, and the environmental pollution is reduced.
By implementing the technical scheme of the invention, the technical problem of overhigh cost of producing the integrated pulley in the prior art can be solved; by implementing the technical scheme of the invention, the annular groove is formed in the wheel bone, so that the technical effects of saving cost and improving stability can be realized.
It should be understood that the above-described embodiments are merely exemplary of the present invention, and are not intended to limit the present invention, and that any modification, equivalent replacement, or improvement made without departing from the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (9)
1. The utility model provides a multi-wire saw integration pulley which characterized in that: comprises a wheel bone and a rubber ring; wherein the wheel bone comprises an outer wheel, an annular groove and a porous support frame; the annular groove is positioned on the outer wheel, and the outer wheel surrounds the porous support frame and is integrally formed with the porous support frame; the rubber ring is embedded in the annular groove.
2. The integrated pulley of a multi-wire saw as claimed in claim 1, wherein: the outer wheel is also provided with a reinforcing layer.
3. The integrated pulley of a multi-wire saw as claimed in claim 1, wherein: the rubber ring comprises an external cutting steel wire layer and an internal connecting pulley layer; the external cutting steel wire layer is made of imported TPU materials, and the internal connecting pulley layer is made of common TPU materials.
4. The integrated pulley of a multi-wire saw as claimed in claim 1, wherein: the wheel bone is made of nylon materials.
5. A multi-wire saw, characterized in that: comprising at least two integrated pulleys of a multi-wire saw and a cutting wire wound around said rubber ring according to claim 1.
6. The multi-wire saw of claim wherein: and a diamond electroplated layer is arranged on the surface of the cutting steel wire.
7. A method of producing an integrated pulley for a multi-wire saw according to claim 1, characterized in that: the method comprises the following steps:
s1: molding the wheel bone: adopting a die to extrude and form the wheel ribs;
s2: surface treatment: grinding the surface of the wheel bone, and then cleaning;
s3: grooving by a lathe: opening an annular groove on the surface of the wheel skeleton by using a lathe;
s4: cleaning and polishing: cleaning and polishing the annular groove;
s5: molding a rubber ring: extruding and forming the rubber ring by adopting a die;
s6: high-temperature integration: under the high-temperature environment, the rubber ring expands and is sleeved in the annular groove;
s7: and (3) cooling and forming: and after cooling the rubber ring, the rubber ring is shrunk and fastened in the annular groove.
8. The method of claim 7, wherein the method comprises the steps of: the S5 includes S51: and (3) molding an outer layer: injecting an inlet high-wear-resistance TPU material into a die and then performing hydraulic forming;
s52: and (3) molding the inner layer: injecting common TPU material into a mould and then performing hydraulic forming.
9. The method of claim 8, wherein the method comprises the steps of: the S52 step injects TPU waste into the mold and then hydroforms.
Priority Applications (1)
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CN202010613012.7A CN111730769A (en) | 2020-06-30 | 2020-06-30 | Integrated pulley of multi-wire cutting machine and using method thereof |
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CN202010613012.7A CN111730769A (en) | 2020-06-30 | 2020-06-30 | Integrated pulley of multi-wire cutting machine and using method thereof |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000247667A (en) * | 1999-03-03 | 2000-09-12 | Mitsuboshi Diamond Kogyo Kk | Tip holder |
CN102476406A (en) * | 2010-11-23 | 2012-05-30 | 汤子仁 | Novel high-wear-resistant driving wheel |
CN104118067A (en) * | 2014-07-08 | 2014-10-29 | 天津英利新能源有限公司 | Wire saw cutting machine tool guide wheel and manufacturing method of guide wheel wire grooves |
CN104251088A (en) * | 2013-06-25 | 2014-12-31 | 成都市鑫木益居家具有限公司 | Sliding door roller device |
CN205634550U (en) * | 2016-05-10 | 2016-10-12 | 日立电梯(中国)有限公司 | Rope sheave |
CN108357000A (en) * | 2018-03-22 | 2018-08-03 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | A kind of wire cutting guide wheel and multi-line cutting machine Cable Assembly system |
CN209533892U (en) * | 2018-12-13 | 2019-10-25 | 郑州元素工具技术有限公司 | A kind of diamond wire glue coating wheel |
CN110549225A (en) * | 2019-09-26 | 2019-12-10 | 克拉玛依市昂科能源科技有限公司 | Yarn guide wheel for diamond wire cutting lathe |
-
2020
- 2020-06-30 CN CN202010613012.7A patent/CN111730769A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000247667A (en) * | 1999-03-03 | 2000-09-12 | Mitsuboshi Diamond Kogyo Kk | Tip holder |
CN102476406A (en) * | 2010-11-23 | 2012-05-30 | 汤子仁 | Novel high-wear-resistant driving wheel |
CN104251088A (en) * | 2013-06-25 | 2014-12-31 | 成都市鑫木益居家具有限公司 | Sliding door roller device |
CN104118067A (en) * | 2014-07-08 | 2014-10-29 | 天津英利新能源有限公司 | Wire saw cutting machine tool guide wheel and manufacturing method of guide wheel wire grooves |
CN205634550U (en) * | 2016-05-10 | 2016-10-12 | 日立电梯(中国)有限公司 | Rope sheave |
CN108357000A (en) * | 2018-03-22 | 2018-08-03 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | A kind of wire cutting guide wheel and multi-line cutting machine Cable Assembly system |
CN209533892U (en) * | 2018-12-13 | 2019-10-25 | 郑州元素工具技术有限公司 | A kind of diamond wire glue coating wheel |
CN110549225A (en) * | 2019-09-26 | 2019-12-10 | 克拉玛依市昂科能源科技有限公司 | Yarn guide wheel for diamond wire cutting lathe |
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Application publication date: 20201002 |