CN111719180A

CN111719180A - Growth equipment suitable for gallium oxide crystal

Info

Publication number: CN111719180A
Application number: CN202010703748.3A
Authority: CN
Inventors: 肖迪
Original assignee: Jiangsu Lilong Semiconductor Technology Co ltd
Current assignee: Jiangsu Lilong Semiconductor Technology Co ltd
Priority date: 2020-07-21
Filing date: 2020-07-21
Publication date: 2020-09-29

Abstract

The application discloses growth equipment suitable for gallium oxide crystal, including furnace body, drum, bottom plate, connecting rod, gas discharge port, motor, cylinder, fixed cover, apron, through-hole, lifting rod, seed crystal, crucible, layer board, square pole, square hole cover, carrier bar, bear and hold in the palm ball, spheroid, ball cover, spacing ring, coil spring, push rod, fixed bolster, heater and heat conduction slat. The crucible heating device has the advantages that the crucible heating effect is good, pressure can be provided for the heater and the heat conducting strip plate through the arrangement of the elastic pressing mechanism, the contact with the crucible is kept, heat transfer is directly carried out, the contact surface is guaranteed through the arrangement of the heat conducting strip plate, and the heat conducting effect is improved; the telescopic rod piece is arranged at the joint of the crucible and the motor, the distance between the telescopic rod piece and the motor is adjustable, and the height of the crucible can be changed by matching with the arrangement of the air cylinder, so that the crucible can be conveniently used integrally.

Description

Growth equipment suitable for gallium oxide crystal

Technical Field

The application relates to growth equipment, in particular to growth equipment suitable for gallium oxide crystals.

Background

Gallium oxide is also called as gallium sesquioxide, is a wide bandgap semiconductor, and has long attracted attention for its conductivity and luminescence properties; the gallium oxide crystal is generally formed by growth processing with growth equipment.

The existing growth equipment adopts a growth furnace to grow, a crucible at the bottom is connected with a driven motor to drive rotation, heaters are arranged around the crucible to heat the crucible, but the heat transfer is realized by heating air, so that the heat transfer effect is poor, and the crucible is not convenient to heat. Therefore, a growth apparatus suitable for gallium oxide crystals is proposed to address the above problems.

Disclosure of Invention

A growth device suitable for gallium oxide crystals comprises a furnace body, a lifting rod and a motor, wherein a cylinder is fixedly connected to the center of the top of the furnace body so that the furnace body and the cylinder are communicated and mounted, the lifting rod penetrates through the cylinder, seed crystals are arranged at the bottom end of the lifting rod, and crystals are arranged at the bottom of the seed crystals;

an output shaft of the motor is fixedly provided with a telescopic rod piece, the top end of the telescopic rod piece is fixedly provided with a supporting plate, the top of the supporting plate is fixedly provided with a crucible, a plurality of cylinders are uniformly arranged around the motor and distributed in an annular array, the top end of a piston rod of each cylinder is fixedly connected with a bearing rod, the top end of each bearing rod is fixedly provided with a bearing support ball, and the top of each bearing support ball is contacted with the bottom of the supporting plate;

the crucible is all around to be annular array and distribute and has a plurality of heat conduction slat, the outer wall contact of heat conduction slat and crucible, the middle part fixed mounting of heat conduction slat has the heater, the equal fixed mounting in the top of heater and the bottom of heater has the fixed bolster, install elasticity hold-down mechanism between the lateral wall of fixed bolster and furnace body.

Further, the top end of the cylinder is fixedly provided with a cover plate through a bolt, and the middle part of the cover plate is provided with a through hole.

Furthermore, the telescopic rod piece is composed of a square rod and a square hole sleeve, the square rod is connected with the square hole sleeve in a clearance fit mode, the end portion of the square rod is fixedly connected with the bottom of the supporting plate, and the bottom end of the square hole sleeve is fixedly connected with an output shaft of the motor.

Furthermore, the bearing support ball is composed of a ball body, a ball cover and a limiting ring, the limiting ring is fixedly installed at the top of the ball cover, the ball body is embedded between the ball cover and the limiting ring in a clearance mode, the ball body is in contact with the bottom of the supporting plate, and the ball cover is fixedly connected with the end portion of the bearing rod.

Further, the bottom of the furnace body is fixedly communicated with a gas outlet, and the gas outlet is of a circular tube structure.

Furthermore, the connecting rods are fixedly mounted on two sides of the bottom of the furnace body, a bottom plate is fixedly connected to the bottom ends of the connecting rods, and the bottom plate is fixedly connected to the bottom of the cylinder and the bottom of the motor.

Furthermore, elasticity hold-down mechanism comprises fixed cover, coil spring and push rod, clearance fit is connected between fixed cover and the push rod, pass through coil spring elastic connection between fixed cover and the push rod, push rod one end and fixed bolster rigid coupling, fixed cover and furnace body fixed connection.

Furthermore, one end of the spiral spring is fixedly connected with one end of the push rod, and the other end of the spiral spring is fixedly connected with the fixed sleeve.

Further, one side of the heat conduction slat is provided with an embedded pipe groove, the embedded pipe groove is fixedly embedded and connected with the heater, and the other side of the heat conduction slat is of an arc-shaped structure.

Further, the inner diameter of the top of the limiting ring is smaller than the sphere diameter of the sphere.

The beneficial effect of this application is: the application provides gallium oxide crystal growth equipment with a crucible surface heated in direct contact.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.

FIG. 1 is a schematic overall perspective view of an embodiment of the present application;

FIG. 2 is a schematic diagram of the overall internal structure of an embodiment of the present application;

fig. 3 is a schematic perspective view illustrating a heater and a heat-conducting strip plate according to an embodiment of the present application.

FIG. 4 is a cross-sectional view of a load-bearing pellet according to an embodiment of the present disclosure;

FIG. 5 is a schematic cross-sectional view of a square rod and square sleeve according to an embodiment of the present application;

fig. 6 is a schematic structural diagram of an elastic pressing mechanism according to an embodiment of the present application.

In the figure: 1. the device comprises a furnace body, 2, a cylinder, 3, a bottom plate, 4, a connecting rod, 5, a gas outlet, 6, a motor, 7, a cylinder, 8, a fixing sleeve, 9, a cover plate, 10, a through hole, 11, a lifting rod, 12, a seed crystal, 13, a crystal, 14, a crucible, 15, a supporting plate, 16, a square rod, 17, a square hole sleeve, 18, a bearing rod, 19, a bearing ball, 1901, a sphere, 1902, a ball cover, 1903, a limiting ring, 20, a spiral spring, 21, a push rod, 22, a fixing support, 23, a heater, 24 and a heat conducting strip plate.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "mounted," "disposed," "provided," "connected," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.

Referring to fig. 1-6, the growth apparatus suitable for gallium oxide crystals includes a furnace body 1, a lifting rod 11 and a motor 6, wherein a cylinder 2 is fixedly connected to a top center position of the furnace body 1 to connect and mount the furnace body 1 and the cylinder 2, the cylinder 2 provides a lifting space, the lifting rod 11 penetrates through the cylinder 2, a seed crystal 12 is disposed at a bottom end of the lifting rod 11, a crystal 13 is disposed at a bottom of the seed crystal 12, wherein the lifting rod 11 is connected to an external rotary lifting device, and can perform rotary driving of the lifting rod 11 and lifting of the lifting rod 11, and the lifting rod 11 is used for lifting the crystal 13 for growth;

the crucible lifting device is characterized in that a telescopic rod piece is fixedly mounted on an output shaft of the motor 6 and can be stretched, when the motor 6 is driven, the telescopic rod piece, a supporting plate 15 and a crucible 14 are driven to rotate together, so that the crucible 14 is uniformly heated, the supporting plate 15 is fixedly mounted at the top end of the telescopic rod piece, the crucible 14 is provided with an installation position for the crucible 14, the crucible 14 is fixedly mounted at the top of the supporting plate 15, a plurality of air cylinders 7 are uniformly arranged around the motor 6, the air cylinders 7 are stretched and retracted to drive a bearing rod 18 and a bearing supporting ball 19 to move together, so that the crucible 14 is lifted, the height of the crucible 14 is adjusted, different requirements are met, meanwhile, the crucible 14 and the supporting plate 15 are not fixedly mounted with the motor 6, the disassembly, the separation and the replacement are convenient, the air cylinders 7 are distributed in an annular array, and the bearing rod 18 is fixedly, the top end of the bearing rod 18 is fixedly provided with a bearing support ball 19, and the top of the bearing support ball 19 is contacted with the bottom of the supporting plate 15;

it has a plurality of heat conduction slat 24 to be annular array distribution around crucible 14, the outer wall contact of heat conduction slat 24 and crucible 14, heat conduction slat 24 play the effect of heat conduction, when crucible 14 rotates, can be with the even transmission of heat to crucible 14 on, realize the heating of crucible 14, the middle part fixed mounting of heat conduction slat 24 has heater 23, the equal fixed mounting in top of heater 23 and the bottom of heater 23 has fixed bolster 22, install elasticity hold-down mechanism between the lateral wall of fixed bolster 22 and furnace body 1, elasticity hold-down mechanism provides elasticity, makes heat conduction slat 24 and crucible 14 contact.

A cover plate 9 is fixedly arranged at the top end of the cylinder 2 through a bolt, a through hole 10 is formed in the middle of the cover plate 9, and the cover plate 9 is arranged through the bolt and can be detached; the telescopic rod piece comprises a square rod 16 and a square hole sleeve 17, the square rod 16 is in clearance fit connection with the square hole sleeve 17, the end part of the square rod 16 is fixedly connected with the bottom of the supporting plate 15, the bottom end of the square hole sleeve 17 is fixedly connected with an output shaft of the motor 6, the square rod 16 and the square hole sleeve 17 slide and can be telescopic to adjust the length, and meanwhile, the square rod and the square hole sleeve 17 can rotate together by adopting a square structure; the bearing ball 19 is composed of a ball body 1901, a ball cover 1902 and a limit ring 1903, the limit ring 1903 is fixedly installed on the top of the ball cover 1902, the ball body 1901 is embedded between the ball cover 1902 and the limit ring 1903 with a gap, the ball body 1901 contacts with the bottom of the supporting plate 15, the ball cover 1902 is fixedly connected with the end of the bearing rod 18, the ball cover 1902 and the limit ring 190 provide an installation position for the ball body 1901, provide a limit installation, and the ball body 1901 can rotate in the ball cover 1902; the bottom of the furnace body 1 is fixedly communicated with a gas outlet 5, the gas outlet 5 is of a circular tube type structure, and the gas outlet 5 is used for exhausting gas; the connecting rods 4 are fixedly mounted on two sides of the bottom of the furnace body 1, the bottom end of each connecting rod 4 is fixedly connected with the bottom plate 3, the bottom plates 3 are fixedly connected with the bottoms of the cylinders 7 and the bottoms of the motors 6, the connecting rods 4 are used for fixedly mounting the bottom plates 3, and the bottom plates 3 are used for fixedly mounting the cylinders 7 and the motors 6; the elastic pressing mechanism is composed of a fixed sleeve 8, a spiral spring 20 and a push rod 21, the fixed sleeve 8 is in clearance fit connection with the push rod 21, the fixed sleeve 8 is in elastic connection with the push rod 21 through the spiral spring 20, one end of the push rod 21 is fixedly connected with a fixed support 22, the fixed sleeve 8 is fixedly connected with the furnace body 1, the spiral spring 20 provides elastic force, and the spiral spring 20 is in a compression state and provides pressure for the push rod 21, so that the heat conducting strip plate 24 is in contact with the crucible 14 to conduct heat transfer; one end of the spiral spring 20 is fixedly connected with one end of the push rod 21, the other end of the spiral spring 20 is fixedly connected with the fixed sleeve 8, and the elastic connection between the fixed sleeve 8 and the push rod 21 is realized through the arrangement of the spiral spring 20; one side of the heat conducting strip plate 24 is provided with a tabling pipe groove which is fixedly tabling connected with the heater 23, the other side of the heat conducting strip plate 24 is of an arc structure, the tabling pipe groove provides an installation position for the heater 23, and heat is transferred to the heat conducting strip plate 24 and further transferred to the crucible 14 through the heat conducting strip plate 24; the top inner diameter of the limit ring 1903 is smaller than the sphere diameter of the sphere 1901, and the limit ring 1903 provides a limit for the sphere 1901, so as to prevent the sphere 1901 from separating.

When the crucible heating device is used, electrical elements appearing in the crucible heating device are externally connected with a power supply and a control switch when the crucible heating device is used, the motor 6 drives the telescopic rod to rotate, the crucible 14 and the supporting plate 15 arranged at the top of the telescopic rod rotate, the periphery of the crucible 14 is in a contact state with the heat conducting strip plates 24 when the crucible is rotated, the heater 23 generates heat, the heat is directly transmitted to the heat conducting strip plates 24 through the heat conducting strip plates 24 and then transmitted to the crucible 14 to provide heating, and the heating effect is good;

the bottom of the crucible 14 is supported by a plurality of bearing support balls 19 while rotating, and the crucible 14 is in friction with the ball 1901, so that rolling friction is realized, the friction resistance is reduced, the abrasion is reduced, and the crucible 14 is fixedly installed, so that the crucible is convenient to detach, separate, maintain and replace;

when the height of the crucible 14 is adjusted, the cylinder 7 can extend, so that the bearing rod 18 and the bearing support ball 19 are driven to move upwards together, the crucible 14 is lifted, the height of the crucible 14 is adjusted, and the growth is facilitated;

in the growth process, the crystal 13 is pulled up by the pulling rod 11, and the pulling rod 11 is driven by the outside to rotate, so that the crystal 13 grows.

The application has the advantages that:

whole device is applicable to pulling and drawing of gallium oxide crystal 13 and grows, compares with traditional growth furnace equipment, and it is better to the heating effect of crucible 14, through elasticity hold-down mechanism's setting, can provide pressure for heater 23 and heat conduction slat 24, keeps the contact with crucible 14, directly carries out the heat transfer, has ensured the contact surface through setting up of heat conduction slat 24, has improved the heat conduction effect.

Crucible 14 receives the motor 6 drive of bottom to rotate, and crucible 14 has set up flexible member with motor 6's junction, and the distance between is adjustable, and cooperation cylinder 7's setting, cylinder 7 stretch out and draw back to can change crucible 14's height, it is convenient to provide for holistic use, the holistic use of being convenient for.

Wherein crucible 14's bearing effect is better, crucible 14 supports except that the telescopic link at middle part, still supports through a plurality of weight-bearing support balls 19 all around, thereby very high supporting effect, share weight, thereby avoid local atress too big, and influence life, adopt simultaneously to bear support balls 19 and support, when crucible 14 rotates, can carry out rolling friction between, thereby reduce frictional resistance, reduce wearing and tearing, crucible 14 of being convenient for simultaneously demolishs, separates, be convenient for maintain the change.

It is well within the skill of those in the art to implement, without undue experimentation, the present application is not directed to software and process improvements, as they relate to circuits and electronic components and modules.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. Growth equipment suitable for gallium oxide crystals, characterized by: the furnace comprises a furnace body (1), a lifting rod (11) and a motor (6), wherein a cylinder (2) is fixedly connected to the center of the top of the furnace body (1) so that the furnace body (1) and the cylinder (2) are installed in a communicated manner, the lifting rod (11) penetrates through the cylinder (2), seed crystals (12) are arranged at the bottom end of the lifting rod (11), and crystals (13) are arranged at the bottom of the seed crystals (12);

an output shaft of the motor (6) is fixedly provided with a telescopic rod piece, the top end of the telescopic rod piece is fixedly provided with a supporting plate (15), the top of the supporting plate (15) is fixedly provided with a crucible (14), the periphery of the motor (6) is uniformly provided with a plurality of cylinders (7), the plurality of cylinders (7) are distributed in an annular array, the top end of a piston rod of each cylinder (7) is fixedly connected with a bearing rod (18), the top end of each bearing rod (18) is fixedly provided with a bearing support ball (19), and the top of each bearing support ball (19) is contacted with the bottom of the supporting plate (15);

the utility model discloses a crucible, it has a plurality of heat conduction slat (24) to be annular array distribution around crucible (14), the outer wall contact of heat conduction slat (24) and crucible (14), the middle part fixed mounting of heat conduction slat (24) has heater (23), the equal fixed mounting in top of heater (23) and the bottom of heater (23) has fixed bolster (22), install elasticity hold-down mechanism between the lateral wall of fixed bolster (22) and furnace body (1).

2. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: the top end of the cylinder (2) is fixedly provided with a cover plate (9) through a bolt, and the middle part of the cover plate (9) is provided with a through hole (10).

3. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: the telescopic rod piece is composed of a square rod (16) and a square hole sleeve (17), the square rod (16) and the square hole sleeve (17) are connected in a clearance fit mode, the end portion of the square rod (16) is fixedly connected with the bottom of the supporting plate (15), and the bottom end of the square hole sleeve (17) is fixedly connected with an output shaft of the motor (6).

4. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: the bearing support ball (19) is composed of a ball body (1901), a ball cover (1902) and a limiting ring (1903), the limiting ring (1903) is fixedly installed at the top of the ball cover (1902), the ball body (1901) is embedded between the ball cover (1902) and the limiting ring (1903) in a clearance mode, the ball body (1901) is in contact with the bottom of the supporting plate (15), and the ball cover (1902) is fixedly connected with the end of the bearing rod (18).

5. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: the bottom of the furnace body (1) is fixedly communicated with a gas outlet (5), and the gas outlet (5) is of a circular tube type structure.

6. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: the furnace body (1) is characterized in that connecting rods (4) are fixedly mounted on two sides of the bottom of the furnace body (1), a bottom fixedly connected with base plate (3) of the connecting rods (4), and the base plate (3) is fixedly connected with the bottoms of the cylinders (7) and the bottom of the motor (6).

7. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: elasticity hold-down mechanism comprises fixed cover (8), coil spring (20) and push rod (21), clearance fit is connected between fixed cover (8) and push rod (21), through coil spring (20) elastic connection between fixed cover (8) and push rod (21), push rod (21) one end and fixed bolster (22) rigid coupling, fixed cover (8) and furnace body (1) fixed connection.

8. A growth apparatus suitable for use with a gallium oxide crystal according to claim 7, wherein: one end of the spiral spring (20) is fixedly connected with one end of the push rod (21), and the other end of the spiral spring (20) is fixedly connected with the fixed sleeve (8).

9. A growth apparatus suitable for use with a gallium oxide crystal according to claim 1, wherein: one side of the heat conduction lath (24) is provided with a tabling pipe groove, the tabling pipe groove is fixedly tabling connected with the heater (23), and the other side of the heat conduction lath (24) is of an arc structure.

10. The growth apparatus for gallium oxide crystal according to claim 4, wherein: the top inner diameter of the limiting ring (1903) is smaller than the sphere diameter of the sphere (1901).