CN111719127A - Preparation method of nickel-chromium-aluminum-yttrium-silicon alloy target material - Google Patents
Preparation method of nickel-chromium-aluminum-yttrium-silicon alloy target material Download PDFInfo
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- CN111719127A CN111719127A CN202010517407.7A CN202010517407A CN111719127A CN 111719127 A CN111719127 A CN 111719127A CN 202010517407 A CN202010517407 A CN 202010517407A CN 111719127 A CN111719127 A CN 111719127A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D13/00—Centrifugal casting; Casting by using centrifugal force
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
- C22C1/023—Alloys based on nickel
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
- C22C1/03—Making non-ferrous alloys by melting using master alloys
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/03—Alloys based on nickel or cobalt based on nickel
- C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
- C22C19/058—Alloys based on nickel or cobalt based on nickel with chromium without Mo and W
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/10—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
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Abstract
The invention discloses a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target material, which comprises the following steps of: mixing nickel and chromium, putting the mixture into a crucible in a first vacuum smelting furnace, and smelting to obtain nickel-chromium intermediate alloy melt; mixing aluminum and yttrium, putting the mixture into a crucible in a second vacuum melting furnace, and melting to obtain aluminum-yttrium intermediate alloy melt; mixing the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and silicon, putting the mixture into a crucible in a third vacuum smelting furnace, and smelting to obtain nickel-chromium aluminum-yttrium-silicon alloy melt; placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot; and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target. The preparation method of the nickel-chromium-aluminum-yttrium-silicon alloy target material provided by the invention adopts centrifugal casting, and can effectively solve the technical problems of a large amount of shrinkage cavities, looseness and the like in the gravity casting alloy preparation in the prior art.
Description
Technical Field
The invention relates to the technical field of alloy target preparation, in particular to a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target.
Background
The gas turbine is widely used in aviation, power generation, crude oil and natural gas transportation, metallurgy, chemical industry and other departments as a power machine. The gas turbine blade is damaged by high-temperature oxidation and hot corrosion in the service process, and in order to prolong the service life of the blade and ensure the safe and stable operation of the gas turbine, the protective coating is the most effective method at present. The nickel-chromium-aluminum-yttrium-silicon coating is a common high-temperature protective coating, has good adhesion with a matrix, lower mutual diffusivity, good high-temperature oxidation resistance, thermal corrosion resistance, high toughness and thermal fatigue resistance. The nickel-chromium-aluminum-yttrium-silicon alloy target is widely applied to hot end parts of various gas turbines such as aviation and the like, such as turbine working blades, guide hot fins, combustion chambers and the like, and the nickel-chromium-aluminum-yttrium-silicon alloy target is plated on the turbine working blades, the guide hot fins, the combustion chambers and the like through a multi-arc ion plating machine, so that the service lives of the turbine working blades, the guide hot fins, the combustion chambers and the like are effectively prolonged. In recent years, with the development of the aviation industry of China, the demand of nickel-chromium-aluminum-yttrium-silicon alloy targets is increased, and the method has important strategic significance.
The Ni-Cr-Al-Y-Si protective coating is prepared through spraying Ni-Cr-Al-Y-Si alloy target material on substrate by means of multi-arc ion plating, electron beam physical vapor deposition, sputtering and other spraying methods, and through applying very high negative bias to the substrate, partial ionization of gas or evaporated matter by means of gas discharge, and deposition of the evaporated matter or reactant of Ni-Cr-Al-Y-Si alloy target material on the substrate while the gas or evaporated matter is bombarded. Therefore, the preparation and quality assurance of the nickel-chromium-aluminum-yttrium-silicon alloy target are the basis for the use of the nickel-chromium-aluminum-yttrium-silicon protective coating and are the powerful guarantee of the stability of the nickel-chromium-aluminum-yttrium-silicon protective coating on the substrate. The preparation of the nickel-chromium-aluminum-yttrium-silicon alloy target material generally adopts vacuum melting and casting technologies, but the production efficiency is low in the preparation process.
And the density and melting point difference of each element such as Ni, Cr, Al, Y, Si and the like are very large, so that the preparation of the alloy with uniform components is very difficult, the components of the nickel-chromium-aluminum-yttrium-silicon alloy target material formed by gravity casting in the process of preparing the nickel-chromium-aluminum-yttrium-silicon alloy in the prior art are not uniform, the cost is too high, a large amount of shrinkage cavities, looseness and other defects exist in an alloy cast ingot, in addition, the alloy has large melting thermal expansion coefficient and very deep shrinkage cavities, and the material casting forming can be seriously influenced by the gravity casting forming. The defect of the nickel-chromium-aluminum-yttrium-silicon alloy prepared by the prior art still exists, and the defects of a large amount of shrinkage cavities, looseness and the like exist in an alloy cast ingot, so that the use and development of a nickel-chromium-aluminum-yttrium-silicon protective coating are seriously restricted, and the use and development of the nickel-chromium-aluminum-yttrium-silicon protective coating are seriously restricted.
In view of the defects of the prior art, a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target material, which can effectively solve the problems of uneven components and high cost of the alloy target material, is urgently needed in the industry.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target material.
In order to achieve the purpose, the invention adopts the following technical scheme.
The invention provides a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target material, which comprises the following steps:
mixing nickel and chromium, putting the mixture into a crucible in a first vacuum smelting furnace, and smelting to obtain nickel-chromium intermediate alloy melt; mixing aluminum and yttrium, putting the mixture into a crucible in a second vacuum melting furnace, and melting to obtain aluminum-yttrium intermediate alloy melt; mixing the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and silicon, and putting the mixture into a crucible in a third vacuum smelting furnace to be smelted to obtain nickel-chromium aluminum-yttrium-silicon alloy melt; placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot; and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
As a further improvement of the method, the nickel and chromium are mixed and placed in a crucible in a vacuum smelting furnace to be smelted to obtain the nickel-chromium intermediate alloy melt, and the mass ratio of the mixed nickel and chromium is 3: 1 to 5: 1.
as a further improvement of the method, the nickel and the chromium are mixed and put into a crucible in a vacuum smelting furnace to be smelted to obtain the nickel-chromium intermediate alloy melt, and the smelting heating temperature is 1700-1750 ℃.
As a further improvement of the invention, the step is that the aluminum and the yttrium are mixed and put into a crucible in a vacuum melting furnace to be melted to obtain the aluminum-yttrium intermediate alloy melt, and the mass ratio of the mixture of the aluminum and the yttrium is 10: 1 to 20: 1.
as a further improvement of the method, the aluminum and the yttrium are mixed and placed in a crucible in a vacuum melting furnace to be melted to obtain the aluminum-yttrium intermediate alloy melt, and the melting and heating temperature is 800-1200 ℃.
As a further improvement of the invention, the step of putting the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon into a crucible in a vacuum smelting furnace to be smelted to obtain the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid, wherein the mass ratio of the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon is 6: 1: 0.02 to 6.9: 1: 0.06.
as a further improvement of the method, the step of smelting the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon in a crucible in a vacuum smelting furnace to obtain the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid, wherein the smelting heating temperature is 1550-1700 ℃.
As a further improvement of the invention, in the centrifugal casting process, the graphite mold is kept to rotate 40-60 circles/minute along the axis of the graphite mold, and vibration of 2000-4000 times/minute is applied, so that the molten liquid is slowly cooled and molded in the rotating mold.
As a further improvement of the invention, the material of the crucible is one of magnesia, alumina or zirconia.
As a further improvement of the invention, the step of carrying out water immersion type ultrasonic scanning on the nickel-chromium-aluminum-yttrium-silicon alloy is also included between the deoxidation and the machining.
The preparation method of the nickel-chromium-aluminum-yttrium-silicon alloy target material provided by the invention adopts centrifugal casting, and can effectively solve the technical problems of a large amount of shrinkage cavities, looseness and the like in the gravity casting alloy preparation in the prior art.
Detailed Description
The technical solutions will be described clearly and completely in the following with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target material, which comprises the following steps:
mixing nickel and chromium, putting the mixture into a crucible in a first vacuum smelting furnace, and smelting to obtain nickel-chromium intermediate alloy melt; mixing aluminum and yttrium, putting the mixture into a crucible in a second vacuum melting furnace, and melting to obtain aluminum-yttrium intermediate alloy melt; and mixing the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and silicon, and putting the mixture into a crucible in a third vacuum smelting furnace to be smelted to obtain the nickel-chromium-aluminum-yttrium-silicon alloy melt.
In this embodiment, according to the melting point and density difference between the 5 metal elements of nickel, chromium, aluminum, yttrium and silicon, in order to avoid incomplete melting or component segregation, the melting is performed by a step-by-step melting method.
Mixing the mixed nickel and chromium in the mass ratio of 3: 1 to 5: 1, and putting the mixture in a vacuum degree of (6-8) × 10-2And (4) smelting in a crucible in a Pa smelting furnace, raising the temperature of the solution in the crucible to 1700-1750 ℃, and preserving the heat for 20-40 min to obtain the molten nickel-chromium intermediate alloy, wherein the density of the molten nickel-chromium intermediate alloy is 7-8 g/cm for carrying out the year.
Then mixing the aluminum and the yttrium in the mass ratio of 10: 1 to 20: 1, putting the mixture together in a vacuum degree of (6-8) × 10- 2And (2) smelting in a crucible in a Pa smelting furnace, raising the temperature of the solution in the crucible to 800-1200 ℃, and preserving the temperature for 30-40 min to obtain an aluminum-yttrium intermediate alloy melt, wherein the density of the obtained aluminum-yttrium intermediate alloy melt is 2-3 g/cm for carrying out thin film forging.
Finally mixing the materialsPutting the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon in a ratio of 6: 1: 0.02 to 6.9: 1: 0.06 in vacuum (6-8) × 10-2And (2) smelting in a crucible in a Pa smelting furnace, raising the temperature of the solution in the crucible to 1550-1700 ℃, and preserving the heat for 20-40 min to obtain a nickel-chromium-aluminum-yttrium-silicon alloy molten liquid, wherein the obtained nickel-chromium-aluminum-yttrium-silicon alloy molten liquid is uniform in components and has a density of 7-7.19 g/cm for thin film plantation.
And placing the molten liquid of the nickel-chromium-aluminum-yttrium-silicon alloy in a graphite mold for centrifugal casting to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot.
In the embodiment, the graphite mold is kept to rotate 40-60 circles per minute along the axis of the graphite mold in the centrifugal casting process, and vibration of 2000-4000 times per minute is applied, so that the molten liquid is slowly cooled and formed in the rotating mold, the centrifugal casting forming utilizes centrifugal force to enable the molten liquid to be tightly contracted, the gas in the molten liquid can be discharged by applying vibration, and the defects of large amount of shrinkage cavities, looseness and the like in the traditional gravity casting process are overcome.
And sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
In the embodiment, the smelted nickel-chromium-aluminum-yttrium-silicon alloy is placed in a heating furnace and subjected to high temperature annealing heat treatment, the temperature is raised to 950-1050 ℃ in the annealing process, heat preservation is carried out for 4 hours, the temperature is cooled to room temperature in an air environment, the annealing heat treatment can effectively promote large grains to be crushed, small grains to grow again, grain homogenization is achieved, alloy hardness can be reduced, and machining performance is improved.
The oxide layer of the nickel-chromium-aluminum-yttrium-silicon alloy contains yttrium oxide, the hardness can reach more than HV640, and water immersion type ultrasonic scanning is carried out after the oxide layer is removed, so that the defects of air holes, slag inclusion and the like in the alloy are avoided.
The components of the nickel-chromium-aluminum-yttrium-silicon alloy target material obtained after machining are as follows: 10.0 to 20.0wt% of Cr, 10.0 to 20.0wt% of Al, 0.1 to 2.0wt% of Y, 0.1 to 2.0wt% of Si, and the balance of Ni.
For further understanding of the present invention, the method and effects of the present invention will be described in further detail with reference to specific examples. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.
Example 1.
(1) The mixed nickel and chromium were brought to a vacuum of 6 × 10 with a mass ratio of 3: 1-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 20min after the temperature of the melt in the crucible is raised to 1700 ℃ to obtain nickel-chromium intermediate alloy melt;
(2) the mixed aluminum and yttrium were placed together in a vacuum of 6 × 10 with a mass ratio of 10: 1-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 30min after the temperature of the melt in the crucible is raised to 800 ℃ to obtain an aluminum-yttrium intermediate alloy melt;
(3) putting the mixed nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon in a mass ratio of 6: 1: 0.02 into a vacuum degree of 6 × 10-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 20min after the temperature of molten liquid in the crucible is raised to 1550 ℃ to obtain nickel-chromium-aluminum-yttrium-silicon alloy molten liquid;
(4) placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting, keeping the graphite mold to rotate for 40 circles/minute along the axis of the graphite mold in the centrifugal casting process, and applying 2000 times/minute of vibration to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot;
(5) and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
Example 2.
(1) The mixed nickel and chromium were brought to a vacuum of 8 × 10 with a mass ratio of 5: 1-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 30min after the temperature of the melt in the crucible is raised to 1750 ℃ to obtain a nickel-chromium intermediate alloy melt;
(2) the mixed aluminum and yttrium were placed together in a vacuum of 8 × 10 at a mass ratio of 20: 1-2Melting in a magnesium oxide crucible in a Pa smelting furnace untilKeeping the temperature of the melt in the crucible for 20min after the temperature is raised to 1200 ℃, and obtaining an aluminum-yttrium intermediate alloy melt;
(3) putting the mixed nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon with the mass ratio of 6.9: 1: 0.06 into a vacuum degree of 8 × 10-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 30min after the temperature of molten liquid in the crucible is raised to 1700 ℃ to obtain nickel-chromium-aluminum-yttrium-silicon alloy molten liquid;
(4) placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting, keeping the graphite mold to rotate for 60 circles/minute along the axis of the graphite mold in the centrifugal casting process, and applying vibration for 4000 times/minute to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot;
(5) and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
Example 3.
(1) The mixed nickel and chromium were brought to a vacuum of 7 × 10 with a mass ratio of 4: 1-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving heat for 40min after the temperature of the melt in the crucible is raised to 1720 ℃ to obtain nickel-chromium intermediate alloy melt;
(2) the mixed aluminum and yttrium were brought together in a mass ratio of 15: 1 to a vacuum of 7 × 10-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 30min after the temperature of the molten liquid in the crucible is raised to 1000 ℃ to obtain molten aluminum-yttrium intermediate alloy;
(3) putting the mixed nickel-chromium intermediate alloy melt, aluminum-yttrium intermediate alloy melt and silicon in a mass ratio of 6.5: 1: 0.04 into a vacuum degree of 7 × 10-2Smelting in a magnesium oxide crucible in a Pa smelting furnace, and preserving the temperature for 40min after the temperature of molten liquid in the crucible is raised to 1650 ℃ to obtain nickel-chromium-aluminum-yttrium-silicon alloy molten liquid;
(4) placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting, keeping the graphite mold to rotate for 50 circles/minute along the axis of the graphite mold in the centrifugal casting process, and applying vibration for 3000 times/minute to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot;
(5) and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
The preparation method of the nickel-chromium-aluminum-yttrium-silicon alloy target material provided by the invention adopts centrifugal casting, and can effectively solve the technical problems of a large amount of shrinkage cavities, looseness and the like in the gravity casting alloy preparation in the prior art.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
Claims (10)
1. A preparation method of a nickel-chromium-aluminum-yttrium-silicon alloy target is characterized by comprising the following steps:
s1: mixing nickel and chromium, putting the mixture into a crucible in a first vacuum smelting furnace, and smelting to obtain nickel-chromium intermediate alloy melt;
s2: mixing aluminum and yttrium, putting the mixture into a crucible in a second vacuum melting furnace, and melting to obtain aluminum-yttrium intermediate alloy melt;
s3: mixing the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and silicon, and putting the mixture into a crucible in a third vacuum smelting furnace to be smelted to obtain nickel-chromium aluminum-yttrium-silicon alloy melt;
s4: placing the nickel-chromium-aluminum-yttrium-silicon alloy molten liquid in a graphite mold for centrifugal casting to obtain a nickel-chromium-aluminum-yttrium-silicon alloy target cast ingot;
s5: and sequentially annealing, deoxidizing and machining the nickel-chromium-aluminum-yttrium-silicon alloy target ingot to obtain the nickel-chromium-aluminum-yttrium-silicon alloy target.
2. The method according to claim 1, wherein in step S1, the mass ratio of the mixture of nickel and chromium is 3: 1 to 5: 1.
3. the method of claim 1, wherein in the step S1, the temperature of the smelting heating is 1700-1750 ℃.
4. The method according to claim 1, wherein in the step S2, the aluminum and the yttrium are mixed at a mass ratio of 10: 1 to 20: 1.
5. the method of claim 1, wherein the temperature of the smelting heating in the step S2 is 800-1200 ℃.
6. The method according to claim 1, wherein in the step S3, the mixture of the nickel-chromium intermediate alloy melt, the aluminum-yttrium intermediate alloy melt and the silicon has a mass ratio of 6: 1: 0.02 to 6.9: 1: 0.06.
7. the method of claim 1, wherein the temperature of the smelting heating in the step S3 is 1550-1700 ℃.
8. The method according to claim 1, wherein the graphite mold is kept rotating 40-60 circles/minute along its own axis during the centrifugal casting process, and 2000-4000 times/minute of vibration is applied to slowly cool and mold the molten liquid in the rotating mold.
9. The method of claim 1, wherein the material of the crucible is one of magnesia, alumina, or zirconia.
10. The method of claim 1, further comprising the step of subjecting the nichrome aluminum yttrium silicon alloy to an underwater ultrasonic scan between the deoxidation and the machining.
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| CN113652526A (en) * | 2021-07-21 | 2021-11-16 | 先导薄膜材料有限公司 | Heat treatment quenching method for target material |
| CN113652526B (en) * | 2021-07-21 | 2023-02-17 | 先导薄膜材料有限公司 | Heat treatment quenching method for target material |
| CN113684456A (en) * | 2021-08-25 | 2021-11-23 | 湖南稀土金属材料研究院有限责任公司 | La-Ti alloy target and preparation method thereof |
| CN115094392A (en) * | 2022-07-06 | 2022-09-23 | 天津华瑞新材料科技有限公司 | Preparation method of fine-grain high-density nickel-chromium-aluminum-yttrium-silicon alloy target material |
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