CN111707231A - Inclination angle measurement sensitive element integrated unit and working method thereof - Google Patents
Inclination angle measurement sensitive element integrated unit and working method thereof Download PDFInfo
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- CN111707231A CN111707231A CN202010507241.0A CN202010507241A CN111707231A CN 111707231 A CN111707231 A CN 111707231A CN 202010507241 A CN202010507241 A CN 202010507241A CN 111707231 A CN111707231 A CN 111707231A
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- integrated unit
- measured
- mems accelerometer
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- gravity acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C5/00—Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Mechanical Engineering (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
Abstract
The invention discloses an inclination angle measurement sensitive element integrated unit and a working method thereof, wherein the inclination angle measurement sensitive element integrated unit comprises a packaging shell, a base, an MEMS accelerometer, a communication data line and a secondary power supply module; the integrated unit comprises a base, an MEMS accelerometer, a plurality of mounting holes, a plurality of attitude calculation chips, a secondary power supply module and an extruder, wherein the base is fixed on the base, the MEMS accelerometer is fixed in the packaging shell, the packaging shell is provided with a through hole, the base is provided with a plurality of mounting holes, one end of a communication data line is connected with the MEMS accelerometer, the other end of the communication data line penetrates through the through hole to be connected with the attitude calculation chips, the secondary power supply module is connected with a power supply interface of the MEMS accelerometer, the base is fixed on equipment to be measured through the mounting holes when the integrated unit is used, and the.
Description
Technical Field
The invention belongs to the technical field of inclination angle measurement, and relates to a design of an inclination angle measurement sensitive element integrated unit and a working method thereof.
Background
With the development of transportation, aerospace and other industries, the position of heavy machinery equipment in industrial production is increasing day by day, and the specification of an extruder tends to be large-scale. Due to the particularity of the body structure and the working environment of the large-sized extruder, after long-time operation, the friction and the abrasion between the guide rail and the supporting pad are serious, the centers of the extrusion cylinder, the die and the extrusion shaft are not aligned, and in addition, the influence of severe vibration and impact in the working process generates settlement to cause the deviation of the extrusion center. The settling state of the extruder not only directly affects the quality of the produced extruded material, but also directly relates to the service life of the equipment. Therefore, the settlement state of the extruder must be monitored in real time in the processing process, the processing quality of products can be ensured, and the safety and stability of equipment operation can be effectively ensured.
In recent years, intelligent equipment based on advanced state monitoring instruments and a production line of an equipment intelligent control system for state monitoring and adjustment based on the actual running state of mechanical equipment appear in advanced industrial countries, and great social and economic benefits are brought.
Based on the problems, a device and a working method thereof need to be designed to solve the problem that the settlement condition cannot be timely measured and repaired in the running process of the extruder.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an inclination angle measurement sensitive element integrated unit and a working method thereof, and the integrated unit and the working method thereof can effectively solve the problem that the settlement condition cannot be measured and repaired in time in the running process of an extruder.
In order to achieve the purpose, the inclination angle measurement sensitive element integrated unit comprises a packaging shell, a base, an MEMS accelerometer, a communication data line and a secondary power supply module;
the packaging shell is fixed on the base, the MEMS accelerometer is fixed in the packaging shell, a through hole is formed in the packaging shell, a plurality of mounting holes are formed in the base, and when the MEMS accelerometer is used, the base is fixed on the equipment to be measured through the mounting holes.
The MEMS accelerometer is internally provided with a flexible beam-mass block structure, and detection electrodes are positioned on the upper side and the lower side of the mass block.
The secondary power supply module supplies power, so that interference caused by power supply of an external power supply is prevented, and the stability of the system is improved.
The attitude resolving chip is connected with an external upper computer.
The attitude resolving chip is connected with an external upper computer through a communication module and a data line.
The number of the mounting holes is four, wherein the four mounting holes are respectively positioned at the four corners of the base.
When in work, the inclination angle measurement sensitive element integrated unit inclines due to sedimentation, the mass block in the MEMS accelerometer generates displacement due to the change of acceleration along the direction of the measurement axis, so that the capacitance value between the upper and lower polar plates of the mass block is increased and decreased, detecting the capacitance difference through an internal circuit, then calculating a corresponding gravity acceleration value, comparing the gravity acceleration measured by the MEMS accelerometer with the local gravity acceleration, determining the relationship between the measured gravity acceleration and the local gravity acceleration, to determine the included angle of the sensitive axis, and then to map the measured gravity acceleration to the coordinate axis of the coordinate system of the device to be measured, and comparing the component of the gravity acceleration in the coordinate system of the equipment to be measured with the local gravity acceleration to determine the changes of the roll angle and the pitch angle of the equipment to be measured.
The working method of the inclination angle measurement sensitive element integrated unit comprises the following steps:
the MEMS accelerometer measures an inclination angle signal of the equipment to be measured, then the inclination angle signal of the equipment to be measured is sent to the attitude resolving chip through the communication data line, the attitude resolving chip amplifies the inclination angle signal of the equipment to be measured and resolves the attitude, and then the resolved result is sent to an external upper computer.
The invention has the following beneficial effects:
when the inclination angle measurement sensitive element integrated unit and the working method thereof are specifically operated, the MEMS accelerometer is fixed on the extruder, the acceleration information and the direction of the extruder are obtained through the MEMS accelerometer and the attitude calculation chip, so that the sedimentation condition in the operation process of the extruder is obtained and timely fed back to an external upper computer, the problem that the sedimentation condition cannot be timely measured and repaired in the operation process of the extruder is solved, the raw material and time loss caused by sedimentation is reduced, the raw material and time loss can be found and checked before the sedimentation becomes remarkable, the production safety is improved, and meanwhile, the MEMS accelerometer is powered through the secondary power supply module, the interference caused by the power supply of an external power supply is prevented, and the stability of a system is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of an extruder;
figure 3 is a schematic cross-sectional view of a method of mounting the MEMS accelerometer 7;
fig. 4 is a schematic structural diagram of the inside of the MEMS accelerometer 7.
Wherein, 1 is a through hole, 2 is a packaging shell, 3 is a base, 4 is a mounting hole, 5 is an extruder equipment model, 6 is an extruder base, 7 is an MEMS accelerometer, 8 is a base, 9 is a flexible beam-mass block structure, and 10 is an electrode.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, the tilt measurement sensing element integrated unit of the present invention includes a package housing 2, a base 3, a MEMS accelerometer 7, a communication data line, and a secondary power supply module; on encapsulation shell 2 was fixed in base 3, in MEMS accelerometer 7 was fixed in encapsulation shell 2, through-hole 1 had been seted up on encapsulation shell 2, a plurality of mounting holes 4 had been seted up on the base 3, the one end of communication data line was connected with MEMS accelerometer 7, the other end of communication data line passed through-hole 1 and is solved the chip with the gesture and be connected, secondary power module is connected with MEMS accelerometer 7's power source, when using, base 3 is fixed in on the volume to be measured equipment through each mounting hole 4.
The attitude resolving chip is connected with an external upper computer; the attitude resolving chip is connected with an external upper computer through a communication module and a data line; the number of the mounting holes 4 is four, wherein the four mounting holes 4 are respectively located at four corners of the base 3.
Referring to fig. 2, the extruder apparatus mold 5 is mounted on an extruder base 6, and the base 3 is fixed to the extruder base 6 through the mounting hole 4.
Referring to figure 3, a MEMS accelerometer 7 is mounted on the side wall of the package housing 2.
Referring to fig. 4, the internal structure of the MEMS accelerometer includes a base 8, a flexible beam-mass structure 9, and electrodes 10, where the detection electrodes 10 are located on the upper and lower sides of the mass.
When in work, the inclination angle measurement sensitive element integrated unit inclines due to sedimentation, the mass block in the MEMS accelerometer 7 generates displacement due to the change of acceleration along the measuring axis direction, so that the capacitance value between the upper and lower polar plates of the mass block is increased and decreased, the capacitance difference is detected by an internal circuit, then a corresponding gravity acceleration value is calculated, the gravity acceleration measured by the MEMS accelerometer 7 is compared with the local gravity acceleration, the relation between the measured gravity acceleration and the local gravity acceleration is determined, to determine the included angle of the sensitive axis, and then to map the measured gravity acceleration to the coordinate axis of the coordinate system of the device to be measured, and comparing the component of the gravity acceleration in the coordinate system of the equipment to be measured with the local gravity acceleration to determine the changes of the roll angle and the pitch angle of the equipment to be measured.
The working method of the inclination angle measurement sensitive element integrated unit comprises the following steps:
the MEMS accelerometer 7 measures an inclination angle signal of the equipment to be measured, then the inclination angle signal of the equipment to be measured is sent to the attitude calculation chip through the communication data line, the attitude calculation chip amplifies the inclination angle signal of the equipment to be measured and calculates the attitude, and then the calculation result is sent to an external upper computer.
The invention has very high optimization effect on the reaction time of monitoring the sedimentation state of the extruder, and compared with the existing mode of stopping detection after encountering problems, the invention not only reduces the loss of raw materials and time caused by sedimentation, but also can discover and investigate before the sedimentation becomes remarkable, thereby improving the production safety.
Claims (8)
1. An inclination measurement sensitive element integrated unit is characterized by comprising a packaging shell (2), a base (3), an MEMS accelerometer (7), a communication data line and a secondary power supply module;
encapsulation shell (2) are fixed in on base (3), and in MEMS accelerometer (7) were fixed in encapsulation shell (2), seted up through-hole (1) on encapsulation shell (2), seted up a plurality of mounting hole (4) on base (3), when using, base (3) are fixed in on the equipment of measurationing through each mounting hole (4).
2. The inclination measurement sensitive element integrated unit according to claim 1, wherein the attitude calculation chip is connected with an external host computer.
3. The inclination measurement sensitive element integrated unit according to claim 1, wherein the attitude calculation chip is connected with an external upper computer through a communication module and a data line.
4. The inclinometer sensing element integrated unit according to claim 1, characterized in that the number of mounting holes (4) is four, wherein the four mounting holes (4) are located at the four corners of the base (3), respectively.
5. The tilt measurement sensor integrated unit of claim 1, wherein the secondary power module has a TPS62150A chip built therein.
6. The inclinometer sensor integrated unit according to claim 1, characterized in that the MEMS accelerometer (4) comprises a flexible beam-mass structure 9 and electrodes 10 inside, the detection electrodes 10 being located on the upper and lower sides of the mass.
7. The tilt measurement sensor integrated unit according to claim 1, wherein, during operation, the entire tilt measurement sensor integrated unit is tilted due to settling, the mass of the MEMS accelerometer (7) is displaced due to acceleration change along the measurement axis, resulting in capacitance between the upper and lower plates of the mass being increased and decreased, the capacitance being detected by an internal circuit, the corresponding gravity acceleration value being calculated, the gravity acceleration measured by the MEMS accelerometer (7) being compared with the local gravity acceleration, the relationship between the measured gravity acceleration and the local gravity acceleration being determined, so as to determine the angle of the sensing axis, the measured gravity acceleration being mapped onto the coordinate axes of the device coordinate system to be measured, and the component of the gravity acceleration in the device coordinate system to be measured being compared with the local gravity acceleration, and determining the changes of the roll angle and the pitch angle of the equipment to be measured.
8. A method of operating the integrated tilt measurement sensor unit of claim 1, comprising the steps of:
the MEMS accelerometer (7) measures an inclination angle signal of the equipment to be measured, then the inclination angle signal of the equipment to be measured is sent to the attitude calculation chip through the communication data line, the attitude calculation chip amplifies and calculates the attitude of the inclination angle signal of the equipment to be measured, and then the calculation result is sent to an external upper computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010507241.0A CN111707231A (en) | 2020-06-05 | 2020-06-05 | Inclination angle measurement sensitive element integrated unit and working method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010507241.0A CN111707231A (en) | 2020-06-05 | 2020-06-05 | Inclination angle measurement sensitive element integrated unit and working method thereof |
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| CN111707231A true CN111707231A (en) | 2020-09-25 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202814393U (en) * | 2012-09-24 | 2013-03-20 | 昆山科致瑞斯传感技术有限公司 | Tilt angle sensor |
| CN205175391U (en) * | 2015-09-09 | 2016-04-20 | 江西中船航海仪器有限公司 | Integral type boats and ships heave campaign measuring apparatu |
| CN107966481A (en) * | 2017-11-20 | 2018-04-27 | 西安交通大学 | A kind of Material Identification sensor based on composite capacitive structure and preparation method thereof |
| CN109613302A (en) * | 2018-12-25 | 2019-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Capacitor MEMS acceleration meter mechanical beams stiffness measurement methods, devices and systems |
| CN209166414U (en) * | 2019-01-18 | 2019-07-26 | 中国地震局工程力学研究所 | A kind of inclination angle detection device based on mems accelerometer |
-
2020
- 2020-06-05 CN CN202010507241.0A patent/CN111707231A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202814393U (en) * | 2012-09-24 | 2013-03-20 | 昆山科致瑞斯传感技术有限公司 | Tilt angle sensor |
| CN205175391U (en) * | 2015-09-09 | 2016-04-20 | 江西中船航海仪器有限公司 | Integral type boats and ships heave campaign measuring apparatu |
| CN107966481A (en) * | 2017-11-20 | 2018-04-27 | 西安交通大学 | A kind of Material Identification sensor based on composite capacitive structure and preparation method thereof |
| CN109613302A (en) * | 2018-12-25 | 2019-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Capacitor MEMS acceleration meter mechanical beams stiffness measurement methods, devices and systems |
| CN209166414U (en) * | 2019-01-18 | 2019-07-26 | 中国地震局工程力学研究所 | A kind of inclination angle detection device based on mems accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| 张佳东: "基于MEMS传感器的无线人体姿态识别系统设计及应用", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
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Application publication date: 20200925 |