CN111702750A - Vacuum coating machine workpiece jig rotating cabin mechanical arm - Google Patents
Vacuum coating machine workpiece jig rotating cabin mechanical arm Download PDFInfo
- Publication number
- CN111702750A CN111702750A CN202010501906.7A CN202010501906A CN111702750A CN 111702750 A CN111702750 A CN 111702750A CN 202010501906 A CN202010501906 A CN 202010501906A CN 111702750 A CN111702750 A CN 111702750A
- Authority
- CN
- China
- Prior art keywords
- transverse
- main frame
- plate
- fixing seat
- fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Robotics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a vacuum coating machine workpiece fixture rotary cabin manipulator, which is characterized in that the manipulator provides powerful support and the bearing of a main frame and a base thereof through the self motion functions of back and forth stretching, up and down lifting, rotation and translation along a guide rail, bayonets of an upper claw hand and a lower claw hand, fixture design corresponding to a fixture block on an inserted link, and a support plate between the upper claw hand and the lower claw hand, so that the clamping of a single large fixture is realized, the fixture can be accurately transferred to a functional cabin for installation and then returned for clamping of a next fixture, the manipulator of the vacuum coating machine is suitable for the fixture with larger volume or weight, and the coating machine does not need to integrally convey the whole workpiece rack, so that a cabin door with an overlarge size is not needed to be specially designed, the manufacturing cost is reduced, the cabin rotating method of the fixture effectively reduces the times of vacuum breaking, and the coating of different film systems is simultaneously carried out by heating the fixture in a heating cabin and then distributing the coating cabins of different film systems, the processing efficiency is greatly improved.
Description
Technical Field
The invention relates to a manipulator, in particular to a multi-cabin type vacuum coating machine workpiece jig rotating cabin manipulator.
Background
In the traditional single-plating-cabin vertical vacuum coating machine, a workpiece to be coated needs to be manually hung on a jig (or a hanging plate or a hanging rod of a workpiece rack) outside a furnace, and then the jig is manually hung on the workpiece rack in the furnace one by one to carry out coating.
In recent years, in order to improve the coating efficiency, a multi-chamber vacuum coating machine has appeared, and the chamber layout thereof includes the following two types: the first is that the center is a linear transfer rail guide cabin, the front end and the rear end are respectively a feeding cabin and a discharging cabin, and the left side and the right side of the linear transfer rail guide cabin are provided with a plurality of functional cabins; the other type is a central symmetrical satellite type layout, and a plurality of functional cabins are distributed in a radial annular mode around a central turnover cabin. Each cabin of the multi-cabin type film plating machine can simultaneously implement the functions of different stages of the film plating process, the productivity is improved, the auxiliary time of vacuum breaking and vacuumizing is saved, the film plating cabin is always in a vacuum state, the influence of impurity gas filling during vacuum breaking is reduced, and the film plating quality and stability are improved.
In order to improve the coating efficiency of the multi-cabin type vacuum coating machine, the diameter of a workpiece frame of a coating cabin is larger and reaches more than 1500mm, more than 20 jigs are required to be accommodated, each jig is as high as more than one meter and has a width of nearly 150 mm-200 mm, the weight of one jig after being charged is dozens of kg, and the diameter of the whole workpiece frame reaches more than 1500 mm. The smelting tool of the multi-cabin type coating machine is required to be cabin-rotating in a vacuum state. The rotary cabin conveying mode has two types: one is to convey the whole jig of the whole workpiece rack together, and the other is to convey the jig on the workpiece rack one by one. In the former mode, the whole workpiece frame is transferred in a whole vehicle, the speed is high, the work efficiency is high, but the structural design requirement is high for a large workpiece frame due to large volume and heavy weight; the biggest difficulty is that the vacuum cabin door of each cabin requires larger size, and the design and manufacture of the vacuum cabin door are difficult and the manufacturing cost is high. The former method can avoid the problem of large-size vacuum chamber door, but must be equipped with a manipulator device for hanging and transferring the chamber one by one.
Disclosure of Invention
The invention aims to solve the technical problem of providing a workpiece fixture rotary cabin manipulator of a vacuum coating machine, which can adapt to various coating production lines, has a simple and compact structure, and can correspond to a smaller coating cabin door so as to reduce the cost.
The technical scheme for solving the technical problems is as follows:
a rotating cabin manipulator of a workpiece jig of a vacuum coating machine is provided with an upper inserted rod positioned on the upper end surface of the jig and a lower inserted rod positioned on the lower end surface of the jig, and is characterized in that,
including being used for the centre gripping fixture of tool, and control respectively fixture is flexible, telescopic machanism, the elevating system who goes up and down, and control fixture changes the rotary mechanism and the translation mechanism in cabin, wherein:
the clamping mechanism comprises a supporting plate and claws, and the claws comprise an upper claw arranged at the top end of the supporting plate and used for clamping the upper inserted link and a lower claw arranged at the bottom end of the supporting plate and used for clamping the lower inserted link and parallel to the upper claw; the front ends of the upper claw hand and the lower claw hand are both provided with bayonets for clamping the upper and lower inserted rods of the clamping jig.
The telescopic mechanism comprises a transverse cylinder parallel to a horizontal plane, a transverse cylinder fixing seat used for fixing the transverse cylinder, a transverse rail fixing plate arranged on the upper end and the lower end of the transverse cylinder fixing seat and extending in the same direction as the claw, a transverse rail arranged on one side of the transverse rail fixing plate facing the claw, and a transverse rail sliding block used for connecting the transverse rail and the claw, wherein the tail end of a transverse piston push rod of the transverse cylinder is fixedly connected with the supporting plate;
the lifting mechanism comprises a main frame fixing seat, a main frame fixed on the main frame fixing seat, a longitudinal cylinder fixing seat arranged on the upper end surface of the main frame fixing seat, a longitudinal cylinder arranged on the upper end surface of the longitudinal cylinder fixing seat, a longitudinal rail arranged on the inner side wall of the main frame, and a longitudinal rail sliding block used for connecting the longitudinal rail and the telescopic mechanism, wherein a longitudinal piston push rod of the longitudinal cylinder vertically extends upwards, and the tail end of the longitudinal piston push rod is fixedly connected with the bottom of the telescopic mechanism;
the rotating mechanism comprises a moving bottom plate arranged below the main frame fixing seat, a crossed roller bearing used for connecting the main frame fixing seat with the moving bottom plate, and a rotating device arranged on the lower end surface of the moving bottom plate, wherein a rotating shaft of the rotating device penetrates through the moving bottom plate and is fixedly connected with the main frame fixing seat, so that the main frame fixing seat can rotate along with the rotation of the rotating shaft;
the translation mechanism comprises a pair of translation guide rails arranged on the lower end face of the movable bottom plate, a sliding table fixing plate arranged on the outer side of the translation guide rails, a sliding table assembly fixed on the sliding table fixing plate and parallel to the translation guide rails, and a connecting block used for connecting the movable bottom plate and the sliding table fixing plate.
Furthermore, the supporting plate is a T-shaped plate, and the web of the T-shaped supporting plate faces the same direction as the extending direction of the upper paw hand and the lower paw hand and is positioned on the central axis of the extending direction of the upper paw hand and the lower paw hand.
Furthermore, the tail end of a transverse piston push rod of the transverse cylinder is fixedly connected with the support plate through a bolt, and a gap used for accommodating the head of the bolt is dug in the position of the bolt by a web plate of the support plate.
Furthermore, the number of the transverse rail fixing plates is two, the transverse rail fixing plates are respectively arranged at the top and the bottom of the transverse cylinder fixing seat and respectively comprise an upper transverse rail fixing plate and a lower transverse rail fixing plate, vertical plates used for being connected with the longitudinal rail sliding block are respectively arranged on the side walls of the transverse rail fixing plates in the direction of the two sides of the supporting plate, and a groove used for allowing the upper insertion rod and the lower insertion rod to pass through is dug in the side walls of the upper transverse rail fixing plate and the lower transverse rail fixing plate at the direction ends towards the upper claw hand and the lower claw hand; the transverse rails comprise upper transverse rails arranged on the lower end surfaces of the upper transverse rail fixing plates and lower transverse rails arranged on the upper end surfaces of the lower transverse rail fixing plates; the transverse rail sliding block comprises an upper transverse rail sliding block used for connecting the upper transverse rail and the upper claw hand, and a lower transverse rail sliding block used for connecting the lower transverse rail and the lower claw hand.
Further, a stepped through hole is dug in the center of the upper end face of the main frame fixing seat, the rotating shaft is fixedly connected with the main frame fixing seat through a connecting seat, the connecting seat is a sleeve with convex shoulders on two sides of the upper end of the connecting seat, the connecting seat is connected with the rotating shaft in a sleeved mode through a flat key, the convex shoulders correspond to the steps of the stepped through hole, and the step is connected with the main frame fixing seat through fastening bolts.
Furthermore, the main frame includes the curb plate that is located backup pad both sides, is located two the roof of curb plate top and connection both sides board, at least one is located the connecting plate that is used for connecting both sides board of horizontal cylinder place one side, curb plate, roof and connecting plate all open at least one round hole.
The invention has the following technical effects:
(1) the workpiece jig rotating cabin mechanical arm of the vacuum coating machine has the advantages that the clamping openings of the upper claw and the lower claw and the fixture design correspond to the clamping blocks on the inserting rods through the self-contained motion function of stretching back and forth and lifting up and down, the supporting plates between the upper claw and the lower claw provide powerful support and the bearing of the main frame and the base thereof, and the clamping of a single large-scale fixture is realized;
(2) the workpiece fixtures distributed in all cabins can be clamped one by one and one can be rotated one by combining the functions of front and back expansion and up and down lifting of the manipulator and the functions of integral rotation and translation of a support system of an expansion and lifting mechanism, and the whole workpiece frame is not required to be integrally conveyed, so that the requirement on the size of a cabin door of a vacuum coating machine is not high, the technical process requirement caused by designing and manufacturing a large-size vacuum cabin door is avoided, the processing difficulty is reduced, the manufacturing cost is reduced, the operation reliability of the multi-cabin type vacuum coating machine is improved, and the operation cost is reduced.
(3) The claw hand of manipulator all realizes through the guide rail at X, Y and the ascending removal in Z axle direction for work piece tool can steady motion at the commentaries on classics cabin in-process, has avoided rocking or colliding to work piece in the tool, and its simple structure is compact, and the maintenance cost is lower, and its reliability is higher.
(4) The mechanical arm scheme is suitable for the film plating machines with a plurality of functional cabins distributed at the front end, the rear end, the left side and the right side of the central translation guide rail, and is also suitable for the film plating machines with a plurality of cabin layouts radially distributed from the center to the periphery.
Drawings
FIG. 1 is a top view of a robot;
FIG. 2 is a sectional view taken along line A-A in FIG. 1;
FIG. 3 is a side view in the direction B of FIG. 1;
FIG. 4 is an enlarged view of the area C in FIG. 2;
FIG. 5 is an enlarged view of the area D in FIG. 3;
FIG. 6 is an enlarged view of the area E in FIG. 3;
FIG. 7 is an isometric view of one of the angles of the robot;
FIG. 8 is an isometric view of another angle of the robot;
wherein: a jig 1; an upper insertion rod 1-2; 1-3 of a lower inserted link; 1-4 of a chuck; 2-1 supporting plate; 2-11 webs; 2-12 gaps; 2-21, upper paw hands; 2-22 lower paw hands; 2-23 bayonet; 2-3 transverse cylinders; 2-31 transverse piston push rods; 2-4 transverse cylinder fixing seats; 2-51 upper transverse rail fixing plates; 2-52 lower transverse rail fixing plates; 2-53U-shaped grooves; 2-54 risers; 2-61 upper transverse rails; 2-62 lower transverse rails; 2-71 upper transverse rail sliding blocks; 2-72 lower transverse rail sliding blocks; 3-1, fixing a main frame; 3-21 side plates; 3-22 top plates; 3-23 connecting plates; 3-3, round holes; 3-4 longitudinal cylinder fixing seats; 3-5 longitudinal cylinders; 3-51 longitudinal piston push rods; 3-6 longitudinal rails; 3-7 longitudinal rail sliding blocks; 4-1 moving the bottom plate; 4-2 crossed roller bearings; 4-3, a rotating device; 4-31 rotating shafts; 4-4 connecting seats; 4-41 convex shoulder; 4-5 flat keys, 4-6 fastening bolts; 5-1 translation guide rail; 5-2, fixing a guide rail plate; 5-3 sliding table fixing plates; 5-4, a sliding table assembly; 5-5 connecting blocks.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
It should be noted that if directional indications (such as … …, which is up, down, left, right, front, back, top, bottom, inner, outer, vertical, transverse, longitudinal, counterclockwise, clockwise, circumferential, radial, axial) are provided in the embodiments of the present invention, the directional indications are only used for explaining the relative position relationship, motion condition, etc. of the components at a specific posture (as shown in the attached drawings), and if the specific posture is changed, the directional indications are changed accordingly.
The invention provides a workpiece jig rotating cabin manipulator of a vacuum coating machine.
As shown in fig. 1 to 8, the manipulator for rotating a workpiece fixture to a cabin comprises a clamping mechanism for clamping a fixture 1, a telescopic mechanism and a lifting mechanism for respectively controlling the clamping mechanism to stretch, lift and rotate, and a rotating mechanism and a translating mechanism for controlling the clamping mechanism to rotate to the cabin, wherein the fixture 1 clamped by the manipulator is provided with an upper inserted link 1-2 positioned on the upper end surface of the fixture 1 and a lower inserted link 1-3 positioned on the lower end surface of the fixture 1, and the middle positions of the upper inserted link 1-2 and the lower inserted link 1-3 are respectively provided with a chuck 1-4.
The clamping mechanism comprises a supporting plate 2-1 and claws arranged on the supporting plate 2-1, the claws comprise upper claws 2-21 used for clamping an upper inserted link 1-2 and lower claws 2-22 used for clamping a lower inserted link 1-3, the upper claws 2-21 and the lower claws 2-22 are respectively arranged at the top end and the bottom end of the supporting plate 2-1, the upper claws 2-21 and the lower claws 2-22 are correspondingly provided with bayonets 2-23 corresponding to the chucks 1-4, the supporting plate 2-1 is a T-shaped plate, the orientation of webs 2-11 of the supporting plate is the same as the extending direction of the upper claws 2-21 and the lower claws 2-22, and the webs 2-11 are positioned on the central axis of the extending direction of the upper claws 2-21 and the lower claws 2-22.
The telescopic mechanism comprises a transverse cylinder 2-3 parallel to the horizontal plane, a transverse cylinder fixing seat 2-4 for fixing the transverse cylinder 2-3, and transverse rail fixing plates arranged on the transverse cylinder fixing seat 2-4 and extending in the same direction with the claws, the transverse rail fixing plates are two and are respectively arranged at the top and the bottom of the transverse cylinder fixing seat 2-4 and are respectively an upper transverse rail fixing plate 2-51 and a lower transverse rail fixing plate 2-52, the transverse rail fixing plates are arranged on the side walls of the transverse rail fixing plates in the direction of the two sides of the supporting plate 2-1 and are respectively provided with a vertical plate 2-54 for connecting with a longitudinal rail sliding block 3-7, the side walls of the upper and lower transverse rail fixing plates 2-51 and 2-52 at the ends of the upper and lower claws 2-21 and 2-22 are provided with a U-shaped groove 2-53 for accommodating an inserted bar, the upper and lower claws 2-21, 2-22 are allowed to enter when the upper and lower inserting rods 1-2, 1-1 of the clamping tool are retreated, and the extension and retraction strokes of the upper and lower claws 2-21, 2-22 are increased, so that the manipulator can work deeper in each cabin, thereby being suitable for the vacuum coating machine with large-capacity cabins.
The telescopic mechanism further comprises transverse rails arranged on two side edges of the direction end, close to the claw, of the transverse rail fixing plate surface, and the transverse rails comprise a pair of upper transverse rails 2-61 arranged on the lower end surfaces of the upper transverse rail fixing plates 2-51 and a pair of lower transverse rails 2-62 arranged on the upper end surfaces of the lower transverse rail fixing plates 2-52.
The telescopic mechanism further comprises a transverse rail sliding block used for connecting the transverse rail and the clamping device, the transverse rail sliding block comprises an upper transverse rail sliding block 2-71 used for connecting an upper transverse rail 2-61 and an upper claw 2-21 and a lower transverse rail sliding block 2-72 used for connecting a lower transverse rail 2-62 and a lower claw 2-22, the tail end of a transverse piston push rod 2-31 of a transverse cylinder 2-3 is fixedly connected with the supporting plate 2-1 through a bolt, and a gap 2-12 used for accommodating the head of the bolt is excavated at the position of the bolt by a web plate 2-11 of the supporting plate 2-1, so that the transverse piston push rod 2-31 and the supporting plate 2-1 are conveniently connected through the bolt, and the tightness of the bolt is conveniently adjusted.
The lifting mechanism comprises a main frame fixing seat 3-1, a main frame fixed on the main frame fixing seat 3-1, a longitudinal cylinder fixing seat 3-4 arranged on the upper end face of the main frame fixing seat 3-1, a longitudinal cylinder 3-5 arranged on the upper end face of the longitudinal cylinder fixing seat 3-4, a longitudinal rail 3-6 arranged on the inner side wall of the main frame, a longitudinal rail sliding block 3-7 used for connecting the longitudinal rail 3-6 with a telescopic mechanism, a vertical plate 2-54 outer side wall fixed on a transverse rail fixing plate, a longitudinal piston push rod 3-51 of the longitudinal cylinder 3-5 vertically and upwardly extending, and the tail end of the longitudinal piston push rod 3-51 is fixedly connected with a lower transverse rail fixing plate 2-52.
The main frame is fixed on a main frame fixing seat 3-1 and specifically comprises side plates 3-21 positioned on two sides of a supporting plate 2-1, top plates 3-22 positioned at the top ends of the side plates 3-21 and connected with two side plates, five connecting plates 3-23 positioned on one side of the transverse cylinder 2-3 and used for connecting the two side plates 3-21, and the side plates 3-21, the top plates 3-22 and the connecting plates 3-23 are all provided with large-area round holes 3-3 so as to reduce the dead weight of the whole manipulator.
The number of the longitudinal rails 3-6 arranged on the inner side wall of the main frame is eight, and the bottom and the top of the inner side wall of the two side plates 3-21 of the main frame are respectively provided with one pair.
The rotating mechanism further comprises a moving bottom plate 4-1 arranged below the main frame fixing seat 3-1, a crossed roller bearing 4-2 used for connecting the main frame fixing seat 3-1 with the moving bottom plate 4-1, and a rotating device 4-3 arranged on the lower end face of the moving bottom plate 4-1, wherein a rotating shaft 4-31 of the rotating device 4-3 penetrates through the moving bottom plate 4-1 and is fixedly connected with the main frame fixing seat 3-1, so that the main frame fixing seat 3-1 can rotate along with the rotation of the rotating shaft 4-31.
The rotating shaft 4-31 of the rotating device 4-3 is fixedly connected with the main frame fixing seat 3-1, specifically, a step-type through hole is dug in the center of the upper end face of the main frame fixing seat 3-1, the rotating shaft 4-31 is fixedly connected with the main frame fixing seat 3-1 through a connecting seat 4-4, the connecting seat 4-4 is a sleeve with a convex shoulder 4-41 on two sides of the upper end, the connecting seat 4-4 is connected with the rotating shaft 4-31 in a sleeved mode through a flat key 4-5, the convex shoulder 4-41 corresponds to the step of the step-type through hole, the connecting seat 4-4 is connected with the main frame fixing seat 3-1 through a fastening bolt 4-6 at the step, and the rotating device 4-3 can adopt a rotary cylinder or a motor.
The translation mechanism comprises a pair of translation guide rails 5-1 (two translation guide rails 5-1 are positioned at two sides of the rotating device 4-3) arranged on the lower end surface of the moving bottom plate 4-1, a sliding table fixing plate 5-3 arranged at the outer side of the pair of translation guide rails 5-1, a sliding table assembly 5-4 fixed on the sliding table fixing plate 5-3 and parallel to the translation guide rails 5-1, and a connecting block 5-5 for connecting the moving bottom plate 4-1 and the sliding table fixing plate 5-3;
the sliding table component 5-4 which is fixed on the sliding table fixing plate 5-3 and is parallel to the translation guide rail 5-1 can adopt a rodless cylinder sliding table which is a shaped outsourcing part; alternatively, the slipway assembly 5-4 may be a modular slipway assembly 5-4 and an electrically driven assembly, wherein the modular slipway is a kit of outsourcing parts.
Claims (6)
1. A rotating cabin manipulator of a workpiece jig of a vacuum coating machine is provided with an upper inserted rod (1-2) positioned on the upper end surface of the jig (1) and a lower inserted rod (1-1) positioned on the lower end surface of the jig (1),
including being used for the centre gripping fixture of tool (1), and control respectively fixture is flexible, the telescopic machanism, the elevating system that go up and down, and control fixture changes rotary mechanism and the translation mechanism in cabin, wherein:
the clamping mechanism comprises a supporting plate (2-1) and a claw, wherein the claw comprises an upper claw (2-21) which is arranged at the top end of the supporting plate (2-1) and is used for clamping the upper inserted link (1-2), and a lower claw (2-22) which is arranged at the bottom end of the supporting plate (2-1) and is used for clamping the lower inserted link (1-1) and is parallel to the upper claw (2-21); bayonets (2-23) are arranged at the front ends of the upper claw hand (2-21) and the lower claw hand (2-22) and used for clamping the upper and lower inserted rods (1-2, 1-3) of the clamping jig;
the telescopic mechanism comprises a transverse cylinder (2-3) parallel to a horizontal plane, a transverse cylinder fixing seat (2-4) used for fixing the transverse cylinder, a transverse rail fixing plate arranged at the upper end and the lower end of the transverse cylinder fixing seat (2-4) and extending in the same direction as the claw, a transverse rail arranged on one side of the transverse rail fixing plate facing the claw, and a transverse rail sliding block used for connecting the transverse rail and the claw, wherein the tail end of a transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected with the supporting plate (2-1);
the lifting mechanism comprises a main frame fixing seat (3-1), a longitudinal cylinder fixing seat (3-4) which is fixed on the upper end surface of the main frame fixing seat (3-1) and is used for fixing a main frame of the main frame fixing seat (3-1), a longitudinal cylinder (3-5) which is arranged on the upper end surface of the longitudinal cylinder fixing seat (3-4), a longitudinal rail (3-6) which is arranged on the inner side wall of the main frame and is used for connecting the longitudinal rail (3-6) with a longitudinal rail sliding block (3-7) on the telescopic mechanism, a longitudinal piston push rod (3-51) of the longitudinal cylinder (3-5) vertically extends upwards, and the tail end of the longitudinal piston push rod (2-51) is fixedly connected with the bottom of the telescopic mechanism;
the rotating mechanism comprises a moving bottom plate (4-1) arranged below the main frame fixing seat (3-1), a crossed roller bearing (4-2) used for connecting the main frame fixing seat (3-1) with the moving bottom plate (4-1), and a rotating device (4-3) arranged on the lower end face of the moving bottom plate (4-1), wherein a rotating shaft (4-31) of the rotating device (4-3) penetrates through the moving bottom plate (4-1) and is fixedly connected with the main frame fixing seat (3-1), so that the main frame fixing seat (3-1) can rotate along with the rotation of the rotating shaft (4-31);
the translation mechanism comprises a pair of translation guide rails (5-1) arranged on the lower end face of the moving bottom plate (4-1), a sliding table fixing plate (5-3) arranged on the outer side of the translation guide rails (5-1), a sliding table assembly (5-4) fixed on the sliding table fixing plate (5-3) and parallel to the translation guide rails (5-1), and a connecting block (5-5) used for connecting the moving bottom plate (4-1) and the sliding table fixing plate (5-3).
2. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 1, characterized in that: the supporting plate (2-1) is a T-shaped plate, and a web plate (2-11) of the T-shaped supporting plate (2-1) faces the same direction as the extending direction of the upper claw hand (2-21) and the lower claw hand (2-22) and is positioned on a central axis of the extending direction of the upper claw hand (2-21) and the lower claw hand (2-22).
3. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 2, characterized in that: the tail end of a transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected with the supporting plate (2-1) through a bolt, and a gap (2-12) used for accommodating the head of the bolt is excavated at the position of the bolt of a web plate (2-11) of the supporting plate (2-1).
4. The vacuum coating machine workpiece fixture rotary cabin manipulator of any one of claims 1-3, characterized in that: the two transverse rail fixing plates are respectively arranged at the top and the bottom of the transverse cylinder fixing seat (2-4) and respectively comprise an upper transverse rail fixing plate (2-51) and a lower transverse rail fixing plate (2-52), vertical plates (2-54) used for being connected with the longitudinal rail sliding block (3-7) are respectively arranged on the transverse rail fixing plates in the direction of the two sides of the supporting plate (2-1) and on the side walls of the transverse rail fixing plates, and a groove (2-53) used for allowing the upper and lower insertion rods (1-2 and 1-3) to pass through is dug in the side walls of the upward and lower claw hands (2-21 and 2-22) of the upper transverse rail fixing plate (2-51) and the lower transverse rail fixing plates (2-52); the transverse rails comprise upper transverse rails (2-61) arranged on the lower end surfaces of the upper transverse rail fixing plates (2-51) and lower transverse rails (2-62) arranged on the upper end surfaces of the lower transverse rail fixing plates (-52); the transverse rail sliding blocks comprise upper transverse rail sliding blocks (2-71) used for connecting upper transverse rails (2-61) and the upper claws (2-21), and lower transverse rail sliding blocks (2-72) used for connecting lower transverse rails (2-62) and the lower claws (2-22).
5. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 4, characterized in that: the connecting structure is characterized in that a step-type through hole is dug in the center of the upper end face of the main frame fixing seat (3-1), the rotating shaft (4-31) is fixedly connected with the main frame fixing seat (3-1) through a connecting seat (4-4), the connecting seat (4-4) is a sleeve with convex shoulders (4-41) on two sides of the upper end of the connecting seat, the connecting seat (4-4) is connected with the rotating shaft (4-31) in a sleeved mode through a flat key (4-5), the convex shoulders (4-41) correspond to steps of the step-type through hole, and the connecting seat (4-4) is connected with the main frame fixing seat (3-1) through fastening bolts (4-6) in the step.
6. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 5, characterized in that: the main frame comprises side plates (3-21) positioned on two sides of the supporting plate (1-4), top plates (3-22) positioned at the top ends of the two side plates (3-21) and connected with the two side plates (3-21), and at least one connecting plate (3-23) positioned on one side of the transverse cylinder (2-3) and used for connecting the two side plates (3-21), wherein the side plates (3-21), the top plates (3-22) and the connecting plates (3-23) are all provided with at least one round hole (3-3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010501906.7A CN111702750A (en) | 2020-06-04 | 2020-06-04 | Vacuum coating machine workpiece jig rotating cabin mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010501906.7A CN111702750A (en) | 2020-06-04 | 2020-06-04 | Vacuum coating machine workpiece jig rotating cabin mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111702750A true CN111702750A (en) | 2020-09-25 |
Family
ID=72539281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010501906.7A Pending CN111702750A (en) | 2020-06-04 | 2020-06-04 | Vacuum coating machine workpiece jig rotating cabin mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111702750A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501574A (en) * | 2020-10-27 | 2021-03-16 | 东兴华鸿光学科技有限公司 | Coating equipment for sunglasses |
| CN113072307A (en) * | 2021-04-07 | 2021-07-06 | 廖飞赛 | Clamping device for coating film processing of glass curtain wall |
| CN113652647A (en) * | 2021-08-16 | 2021-11-16 | 佛山市博顿光电科技有限公司 | Protective baffle replacing equipment and replacing method thereof, and protective baffle of film coating machine |
| CN113957408A (en) * | 2021-09-03 | 2022-01-21 | 广东汇成真空科技股份有限公司 | Large-scale vacuum coating machine with workpiece hanging plate rotating cabin synchronous conveying manipulator |
| CN113981405A (en) * | 2021-09-03 | 2022-01-28 | 广东汇成真空科技股份有限公司 | Large-scale vacuum coating machine with remove conveying work piece link plate manipulator |
| CN114715662A (en) * | 2022-03-15 | 2022-07-08 | 成都晶宝时频技术股份有限公司 | Automatic material turning device |
-
2020
- 2020-06-04 CN CN202010501906.7A patent/CN111702750A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501574A (en) * | 2020-10-27 | 2021-03-16 | 东兴华鸿光学科技有限公司 | Coating equipment for sunglasses |
| CN113072307A (en) * | 2021-04-07 | 2021-07-06 | 廖飞赛 | Clamping device for coating film processing of glass curtain wall |
| CN113072307B (en) * | 2021-04-07 | 2022-12-23 | 国网浙江省电力有限公司台州供电公司 | Clamping device for coating film processing of glass curtain wall |
| CN113652647A (en) * | 2021-08-16 | 2021-11-16 | 佛山市博顿光电科技有限公司 | Protective baffle replacing equipment and replacing method thereof, and protective baffle of film coating machine |
| CN113957408A (en) * | 2021-09-03 | 2022-01-21 | 广东汇成真空科技股份有限公司 | Large-scale vacuum coating machine with workpiece hanging plate rotating cabin synchronous conveying manipulator |
| CN113981405A (en) * | 2021-09-03 | 2022-01-28 | 广东汇成真空科技股份有限公司 | Large-scale vacuum coating machine with remove conveying work piece link plate manipulator |
| CN114715662A (en) * | 2022-03-15 | 2022-07-08 | 成都晶宝时频技术股份有限公司 | Automatic material turning device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111702750A (en) | Vacuum coating machine workpiece jig rotating cabin mechanical arm | |
| CN107804705A (en) | One kind conveying handling system | |
| CN108637709B (en) | Improved overturning platform for machining side cover of thrust wheel | |
| CN104690593A (en) | Processing and assembling logistics line | |
| JP5524676B2 (en) | Work carry-in / out device and method in machining system | |
| CN213259486U (en) | Vacuum coating machine workpiece jig rotating cabin mechanical arm | |
| CN215393675U (en) | Flexible automatic installation production line for steel wire thread insert | |
| CN113523785A (en) | Flexible automatic installation production line for steel wire thread insert | |
| JP2014083670A (en) | Pallet conveyer | |
| CN110576330B (en) | Revolving body workpiece carrying mechanism and revolving body workpiece production line | |
| CN207844408U (en) | A kind of conveying handling system | |
| CN217262435U (en) | Board conveying equipment with height-variable inlet | |
| CN1938121A (en) | Device and method for machining long workpieces fixed between two rotating bearings | |
| CN211589263U (en) | Multistage bearing structure of accurate axostylus axostyle work piece | |
| KR100500974B1 (en) | Flexible gripper apparatus with multiple gripping points for parts handling | |
| CN210102884U (en) | Double-deck anchor clamps of baked brick | |
| CN210360488U (en) | Automatic feeding and water controlling device for hollow axle parts | |
| CN107877077B (en) | Primary and secondary chuck device | |
| CN109509660B (en) | Integrative kludge of many specifications multi-structure balancing pole | |
| EP2881220B1 (en) | Machine tool | |
| CN217513148U (en) | Welding equipment for front corner post and corner fitting | |
| CN219112928U (en) | Positioning tool for processing inner hole of cylinder sleeve | |
| CN115302268B (en) | Torque converter clamp, turning equipment and system | |
| CN220947146U (en) | Automatic side pad printing equipment of photovoltaic fuse base | |
| CN115744282B (en) | Automatic feeding truss suitable for heavy parts |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |