CN111701433A - LED-MOCVD ammonia-containing waste gas recycling treatment method and treatment system thereof - Google Patents
LED-MOCVD ammonia-containing waste gas recycling treatment method and treatment system thereof Download PDFInfo
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Abstract
The invention discloses a resource treatment method of LED-MOCVD ammonia-containing waste gas, which comprises the steps of carrying out resource treatment on the LED-MOCVD ammonia-containing waste gas by using a membrane treatment method, filtering the waste gas to remove impurities, then carrying out acid spraying absorption to remove ammonia gas to obtain an ammonium sulfate solution, adjusting the pH value of the ammonium sulfate solution to 10-12, then carrying out deep deamination on the ammonium sulfate solution in a hydrophobic membrane system, feeding the deaminated sulfate solution into a bipolar membrane electrodialysis system for acid-base regeneration, wherein the total recovery rate of ammonia gas is more than or equal to 99.5%, and thus realizing the resource; the treatment method of the invention recovers the ammonia resource in the ammonia-containing waste gas of the LED-MOCVD in the form of electronic grade high-purity ammonia, the ammonia recovery rate is more than 99.5 percent, the purity of the recovered ammonia gas is more than 99.99999 percent, no secondary pollution is generated, and the resource and harmless treatment of the ammonia-containing waste gas is really realized.
Description
Technical Field
The invention belongs to the field of waste gas recycling treatment, and particularly relates to an LED-MOCVD ammonia-containing waste gas recycling treatment method and a treatment system thereof.
Background
The tail gas generated by the LED epitaxial technology prepared by the MOCVD (metal organic chemical vapor phase epitaxy) method is relatively harmful, and mainly contains N2、H2、NH3Small amounts of metal ions, particulates, arsine, methane, water, carbon monoxide, carbon dioxide, oxygen, and other impurity components, etc., that need to be treated for discharge. The common methods at present generally comprise a combustion method, a water absorption method and an acid absorption method.
The combustion method uses a catalyst bed to heat and decompose ammonia into hydrogen and nitrogen. H2And NH3The difference between the ignition point and the combustion concentration range is large, and the condition of asynchronous combustion is easy to occur. NH (NH)3The explosion during combustion causes frequent changes in pressure, and high gas temperatures generate acid gases, which require additional treatment. The water absorption method is to treat MOCVD tail gas by using the solubility of ammonia gas in water. But the water absorption method cannot treat H2And the tail gas treated by the method still has ammonia smell and has certain limitation. The acid absorption method generally adopts dilute sulfuric acid and NH3The method has good effect, but needs to consume a large amount of acid for neutralization and has high cost for treating ammonium salt wastewater. In view of high purity and high price of gas applied to the MOCVD process, the waste of available gas in tail gas is caused by adopting the treatment method, and a new environmental protection problem is brought.
Chinese patent application No. 201210244528.4 proposes an MOCVD tail gas recovery method, which adopts an alkaline earth metal chloride adsorption bed to adsorb ammonia gas, and the ammonia gas is condensed into liquid ammonia and then rectified and purified by a rectifying tower, but the method empties unadsorbed hydrogen gas, thereby causing waste of raw materials; and the target finished product can be obtained only by adopting the rectification treatment of the rectification tower and multiple purifications, so the production cost is higher.
Chinese patent application No. 201810526174, X, proposes a method for recycling waste gas of an LED-MOCVD process through full-temperature-range pressure swing adsorption hydrogen extraction, through the procedures of pretreatment, fine deamination, deoxidation, pressure swing adsorption hydrogen extraction, deep dehydration and hydrogen purification, ammonia-containing waste hydrogen from the LED-MOCVD process is purified to meet the standard of electronic-grade hydrogen (the purity is more than or equal to 99.99999%) required by the LED-MOCVD process, and the resource recycling of the waste gas is realized, wherein the hydrogen yield is more than or equal to 75-86%. The method realizes the purification of the waste hydrogen, but cannot realize the recycling of ammonia resources, and has the advantages of very long process flow, large equipment investment, high operation cost and no economic benefit.
Chinese patent No. 201810526206.6 discloses a method for recycling ammonia from ammonia-containing waste gas in an LED-MOCVD process by performing pretreatment, medium and shallow temperature pressure swing adsorption concentration, condensation and freezing, liquid ammonia vaporization, ammonia extraction by pressure swing adsorption and ammonia purification, wherein the ammonia-containing waste gas from the LED-MOCVD process is purified to meet the electronic-grade ammonia standard required by the LED-MOCVD process, thereby realizing the resource recycling of the waste gas, and the yield of the ammonia gas is more than or equal to 70-85%. The method has high energy consumption cost, high operation cost and low ammonia recovery rate.
Chinese patent No. 201420660937.7 proposes a tail gas treatment, recovery and recycling device for MOCVD growth of gallium nitride wafers, which mainly comprises: MOCVD device, precision filter, compressor, ammonia separator, liquid ammonia steel cylinder, ammonia purification device, palladium tube purifier. The waste gas containing ammonia and hydrogen generated by growing the gallium nitride semiconductor luminescent material by MOCVD is firstly removed and recovered with rare earth metal particles by precise filtration, then high-purity ammonia is removed and recovered by compression and refrigeration, and then high-purity hydrogen is separated and removed and recovered by a palladium tube purifier.
Because the component in the waste gas is relatively complex, the various treatment methods for directly performing pressure swing adsorption or separating ammonia from the ammonia-containing waste gas have the advantages of relatively long process flow, high energy consumption, high operation cost and relatively low recovery rate of ammonia gas.
Disclosure of Invention
Aiming at the problems, the invention provides a recycling treatment method and a recycling treatment system for ammonia-containing waste gas of LED-MOCVD (light-emitting diode-metal organic chemical vapor deposition), wherein the method applies a membrane treatment technology to the field of wastewater treatment, realizes effective recovery of ammonia, and realizes effective recycling of ammonia
In order to achieve the purpose, the invention adopts the following technical scheme:
an LED-MOCVD ammonia-containing waste gas recycling method utilizes a membrane treatment method to carry out recycling treatment on the LED-MOCVD ammonia-containing waste gas.
The method comprises the steps of filtering waste gas to remove impurities, then, carrying out acid spraying absorption to remove ammonia gas to obtain an ammonium sulfate solution, adjusting the pH value of the ammonium sulfate solution to 10-12, then, carrying out deep deamination on the ammonium sulfate solution in a hydrophobic membrane system, carrying out acid-base regeneration on the deaminated sulfate solution in a bipolar membrane electrodialysis system, wherein the total recovery rate of ammonia gas is more than or equal to 99.5%, and thus, recycling treatment is realized.
And the acid and the alkali recovered by the bipolar membrane electrodialysis system are respectively returned to the alkali returning and acid spraying absorption working procedures for recycling.
Fresh water obtained after the bipolar membrane electrodialysis system recovers the acid and the alkali enters the reverse osmosis membrane assembly to obtain concentrated water, and the concentrated water returns to the salt chamber of the bipolar membrane electrodialysis system.
The ammonia gas recovered by deep deamination of the hydrophobic membrane system is further dried and dehydrated, and the dehydrated ammonia gas has the purity of more than 99.99999 percent and can be directly recycled.
The acid spray absorbs ammonia in the waste gas, the ammonia absorption rate is more than or equal to 99.95 percent, and the used acid is sulfuric acid with the concentration of 1 to 6 percent.
The deep deamination of a hydrophobic membrane system is realized, the pressure difference between two sides of a control membrane is 10-50 kpa, the purity of ammonia gas on the ammonia gas side is more than or equal to 99.999%, and the water content is less than or equal to 0.001%.
An LED-MOCVD ammonia-containing waste gas recycling treatment system comprises a filtering unit, an ammonia absorption unit, a pH adjusting unit, a deep deamination unit, a bipolar membrane electrodialysis unit and a reverse osmosis unit; the filtering unit is connected with the ammonia absorption unit, the ammonia absorption unit is connected with the pH adjusting unit, the pH adjusting unit is connected with the deep deamination unit, the deep deamination unit is connected with the bipolar membrane unit, and the bipolar membrane unit is connected with the reverse osmosis unit.
The bipolar membrane electrodialysis unit is respectively connected with the ammonia absorption unit and the pH regulation unit.
And a concentrated water outlet of the reverse osmosis unit is connected with a salt chamber of the bipolar membrane unit.
Drawings
FIG. 1 is a flow chart of an ammonia-containing waste gas recycling treatment system of LED-MOCVD.
Wherein: 1-a filtration unit; 2-an ammonia absorption unit; 3-a pH adjusting unit; 4-deep deamination unit; 5-a bipolar membrane electrodialysis unit; 6-reverse osmosis unit.
As shown in fig. 1, an LED-MOCVD ammonia-containing waste gas recycling treatment system comprises a filtration unit 1, an ammonia absorption unit 2, a pH adjustment unit 3, a deep deamination unit 4, a bipolar membrane electrodialysis unit 5 and a reverse osmosis unit 6; the filtering unit 1 is connected with an ammonia absorption unit 2, the ammonia absorption unit 2 is connected with a pH adjusting unit 3, the pH adjusting unit 3 is connected with a deep deamination unit 4, the deep deamination unit 4 is connected with a bipolar membrane unit 5, the bipolar membrane unit 5 is connected with a reverse osmosis unit 6, the bipolar membrane unit 5 is respectively connected with the ammonia absorption unit 2 and the pH adjusting unit 3, and a concentrated water outlet of the reverse osmosis unit 6 is connected with a salt chamber of the bipolar membrane unit 5.
Through the treatment system, after the MOCVD ammonia-containing waste gas is filtered to remove mechanical impurities, acid spraying absorption is carried out, ammonia in the waste gas is absorbed by acid, unabsorbed hydrogen-containing tail gas enters a follow-up system for recovery treatment, the ammonia absorption rate is more than or equal to 99.95%, the used acid is 1% -6% sulfuric acid, nitric acid or hydrochloric acid cannot be used, and new impurities are easily introduced into the hydrogen-containing tail gas because the nitric acid and the hydrochloric acid are volatile.
Spraying the absorption liquid to ammonium sulfate solution, adding 1-6% sodium hydroxide solution to adjust the pH value to 10-12 to make NH in the solution4 +Conversion to NH3。
Containing NH3The solution enters a hydrophobic membrane system for deamination, the hydrophobic membrane can only permeate gas molecules, and NH in the solution at the feed liquid side depends on the pressure difference between the two sides of the membrane (the pressure at the feed liquid side is high, the pressure at the ammonia side is low)3The molecules permeate the membrane to the other side and are collected. The pressure difference between two sides of the control film is 10-50 kpa, the purity of ammonia gas on the ammonia gas side is more than or equal to 99.999%, and the water content is less than or equal to 0.001%.
The ammonia gas recovered by the hydrophobic membrane system is further dried and dehydrated, and the dehydration method is drying or pressure swing adsorption. The purity of the dehydrated ammonia gas is more than 99.99999 percent, reaches the standard of electronic grade high-purity ammonia gas, and can be directly recycled, and the total recovery rate of the ammonia gas is more than or equal to 99.5 percent.
And the deamination solution is a sodium sulfate solution, the content of ammonia nitrogen is less than 3mg/L, the solution enters a bipolar membrane electrodialysis system for acid-base regeneration, the concentration of the recovered sodium hydroxide is 1-6%, the concentration of the recovered sulfuric acid is 1-6%, and the solution is respectively returned to the alkali-spraying and acid-spraying absorption procedures for recycling.
Fresh water after acid and alkali are recovered by bipolar membrane electrodialysis enters a reverse osmosis membrane assembly, concentrated water returns to a salt chamber of a bipolar membrane electrodialysis system, the resistivity of the fresh water obtained by reverse osmosis is less than or equal to 17 MOmega-cm, the resistivity of the fresh water reaches the standard of electronic grade ultrapure water, and the fresh water can be reused in an acid chamber and an alkali chamber of the bipolar membrane system and can also be reused in the production process of LED wafers.
Compared with the prior art, the invention has the following beneficial effects:
(1) the treatment method applies the membrane treatment method to the field of waste gas resource treatment, realizes the recovery of ammonia resources in ammonia-containing waste gas in the form of electronic-grade high-purity ammonia, and achieves the treatment effects that the ammonia recovery rate is more than 99.5 percent and the purity of the recovered ammonia gas is more than 99.99999 percent;
(2) the high selective permeability of the hydrophobic membrane realizes the dual purposes of high-efficiency deamination and separation and recovery of high-purity ammonia gas, and compared with the traditional stripping method and the rectification deamination method, the method has the advantages of low energy consumption, high ammonia gas purity and lower investment;
(3) the bipolar membrane acid-base regeneration technology is combined with the reverse osmosis system, so that the infinite circulation of acid, base and water in the system is realized, and the acid, the base and the water do not need to be supplemented in the whole process;
(4) zero emission in the whole process, no secondary pollution and real realization of resource and harmless treatment of the ammonia-containing waste gas.
Example 1
The ammonia content of the LED-MOCVD ammonia-containing waste gas of a certain semiconductor research institute is 0.5 percent.
Step 1: after mechanical impurities in the ammonia-containing waste gas are removed by a 200-mesh cloth bag filter, acid spraying absorption is carried out, the concentration of the used sulfuric acid is 1%, and the ammonia absorption rate is 99.95%.
(2) Spraying the absorption liquid to obtain ammonium sulfate solution, adding 1% sodium hydroxide solution to adjust pH to 10, and adding NH4 +All being converted to NH3。
(3) Containing NH3The solution enters a hydrophobic membrane system for deamination, and the pressure difference between the two sides of the membrane is controlled to be 10 kpa. The purity of ammonia gas on the ammonia gas side is 99.999 percent, and the water content is 0.001 percent.
(4) And (3) further drying and dehydrating the ammonia gas recovered by the hydrophobic membrane system, wherein the dehydration method is drying. The purity of the dehydrated ammonia gas is more than 99.99999 percent and reaches the standard of electronic grade high-purity ammonia gas, and the total recovery rate of the ammonia gas is 99.7 percent.
(5) And (3) after deamination, enabling the nitrogen content of the ammonia liquid to be less than 3mg/L, enabling the ammonia liquid to enter a bipolar membrane electrodialysis system for acid-base regeneration, enabling the concentration of the recovered sodium hydroxide to be 1% and the concentration of the recovered sulfuric acid to be 1%, and respectively returning to the alkali-spraying and acid-spraying absorption working procedures for recycling.
(6) Fresh water after acid and alkali are recovered by bipolar membrane electrodialysis enters a reverse osmosis membrane assembly, concentrated water returns to a salt chamber of a bipolar membrane electrodialysis system, the resistivity of the fresh water obtained by reverse osmosis is 17M omega cm, the fresh water reaches the standard of electronic grade ultrapure water, and the fresh water is recycled to an acid chamber and an alkali chamber of the bipolar membrane system.
Example 2
The ammonia content of the LED-MOCVD ammonia-containing waste gas of a certain enterprise is 3.2 percent.
Step 1: after mechanical impurities in the ammonia-containing waste gas are removed by a 200-mesh cloth bag filter, acid spraying absorption is carried out, the concentration of the used sulfuric acid is 6%, and the ammonia absorption rate is 99.98%.
(2) Spraying the absorption liquid to obtain ammonium sulfate solution, adding 1% sodium hydroxide solution to adjust pH to 12, and adding NH4 +All being converted to NH3。
(3) Containing NH3The solution enters a hydrophobic membrane system for deamination, and the pressure difference between the two sides of the membrane is controlled to be 50 kpa. The purity of ammonia gas on the ammonia gas side was 99.9994%, and the water content was 0.0006%.
(4) The ammonia gas recovered by the hydrophobic membrane system is further dried and dehydrated, and the dehydration method is pressure swing adsorption. The purity of the dehydrated ammonia gas is 99.999999 percent, the ammonia gas reaches the standard of electronic grade high-purity ammonia gas, and the total recovery rate of the ammonia gas is 99.6 percent.
(5) And (3) after deamination, enabling the nitrogen content of the ammonia liquid to be less than 3mg/L, enabling the ammonia liquid to enter a bipolar membrane electrodialysis system for acid-base regeneration, enabling the concentration of the recovered sodium hydroxide to be 6% and the concentration of the recovered sulfuric acid to be 6%, and respectively returning to the alkali-spraying and acid-spraying absorption working procedures for recycling.
(6) Fresh water after acid and alkali are recovered by bipolar membrane electrodialysis enters a reverse osmosis membrane assembly, concentrated water returns to a salt chamber of a bipolar membrane electrodialysis system, the resistivity of the fresh water obtained by reverse osmosis is 13 MOmega-cm, the fresh water reaches the standard of electronic grade ultrapure water, and the fresh water is recycled to an acid chamber and an alkali chamber of the bipolar membrane system.
Example 3
The ammonia content of the LED-MOCVD ammonia-containing waste gas of a certain semiconductor research institute is 1.4 percent.
Step 1: after mechanical impurities in the ammonia-containing waste gas are removed by a 200-mesh cloth bag filter, acid spraying absorption is carried out, the concentration of the used sulfuric acid is 3%, and the ammonia absorption rate is 99.98%.
(2) Spraying the absorption liquid to obtain ammonium sulfate solution, adding 3% sodium hydroxide solution to adjust pH to 11, and adding NH4 +All being converted to NH3。
(3) Containing NH3The solution enters a hydrophobic membrane system for deamination, and the pressure difference between the two sides of the membrane is controlled to be 20 kpa. The purity of ammonia gas on the ammonia gas side was 99.9996%, and the water content was 0.0004%.
(4) And (3) further drying and dehydrating the ammonia gas recovered by the hydrophobic membrane system, wherein the dehydration method is drying. The purity of the dehydrated ammonia gas is 99.999997%, the purity reaches the standard of electronic grade high-purity ammonia gas, and the total recovery rate of the ammonia gas is 99.8%.
(5) And (3) after deamination, enabling the nitrogen content of the ammonia liquid to be less than 3mg/L, enabling the ammonia liquid to enter a bipolar membrane electrodialysis system for acid-base regeneration, enabling the concentration of the recovered sodium hydroxide to be 3% and the concentration of the recovered sulfuric acid to be 3%, and respectively returning to the alkali-spraying and acid-spraying absorption working procedures for recycling.
(6) Fresh water after acid and alkali are recovered by bipolar membrane electrodialysis enters a reverse osmosis membrane assembly for concentration, concentrated water returns to a salt chamber of a bipolar membrane electrodialysis system, the resistivity of the fresh water obtained by reverse osmosis is 16M omega cm, the fresh water reaches the standard of electronic grade ultrapure water, and the fresh water is recycled to an acid chamber and an alkali chamber of the bipolar membrane system.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It should be understood by those skilled in the art that any modification of the present invention, equivalent substitutions of the raw materials of the product of the present invention, addition of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. A recycling treatment method for LED-MOCVD ammonia-containing waste gas is characterized in that the recycling treatment is carried out on the LED-MOCVD ammonia-containing waste gas by a membrane treatment method.
2. The treatment method of claim 1, wherein the waste gas is filtered to remove impurities, then enters an acid spray absorption system to remove ammonia gas to obtain an ammonium sulfate solution, the pH value of the ammonium sulfate solution is adjusted to 10-12, then enters a hydrophobic membrane system to be deeply deaminated, the deaminated sulfate solution enters a bipolar membrane electrodialysis system to be subjected to acid-base regeneration, and the total recovery rate of ammonia gas is more than or equal to 99.5%, so that the resource treatment is realized.
3. The treatment method according to claim 2, wherein the acid and the base recovered by the bipolar membrane electrodialysis system are respectively returned to the alkali return process and the acid spray absorption process for recycling.
4. The treatment method of claim 3, wherein the fresh water obtained after the acid and alkali recovery of the bipolar membrane electrodialysis system enters the reverse osmosis membrane module to obtain concentrated water, and the concentrated water is returned to the salt chamber of the bipolar membrane electrodialysis system.
5. The treatment method of claim 4, wherein the ammonia gas recovered by deep deamination in the hydrophobic membrane system is further dried and dehydrated, and the dehydrated ammonia gas has a purity of more than 99.99999 percent and is directly recycled.
6. The treatment method as claimed in claim 5, wherein the acid spray absorbs ammonia in the exhaust gas, the ammonia absorption rate is not less than 99.95%, and the acid is sulfuric acid with a concentration of 1-6%.
7. The treatment method of claim 6, wherein the hydrophobic membrane system is used for deep deamination, the pressure difference between two sides of the membrane is 10-50 kpa, the purity of ammonia gas on the ammonia gas side is more than or equal to 99.999%, and the water content is less than or equal to 0.001%.
8. A treatment system for use in the treatment method according to any one of claims 1 to 7, comprising a filtration unit (1), an ammonia absorption unit (2), a pH adjustment unit (3), a deep deamination unit (4), a bipolar membrane electrodialysis unit (5) and a reverse osmosis unit (6); the filter unit (1) is connected with ammonia absorption unit (2), ammonia absorption unit (2) is connected with pH regulating unit (3), pH regulating unit (3) is connected with degree of depth deamination unit (4), degree of depth deamination unit (4) is connected with bipolar membrane electrodialysis unit (5), bipolar membrane electrodialysis unit (5) is connected with reverse osmosis unit (6).
9. The treatment system according to claim 8, wherein the bipolar membrane electrodialysis unit (5) is connected to the ammonia absorption unit (2) and the pH adjustment unit (3), respectively.
10. A treatment system as claimed in claim 9, characterized in that the concentrate outlet of the reverse osmosis unit (6) is connected to the salt compartment of the bipolar membrane electrodialysis unit (5).
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| CN112744788A (en) * | 2020-12-16 | 2021-05-04 | 四川天采科技有限责任公司 | Separation and purification method for deep dehydration and impurity removal of FTrPSA refined by anhydrous HF (hydrogen fluoride) produced by fluosilicic acid method |
| CN114515499A (en) * | 2022-02-21 | 2022-05-20 | 新泰市日进化工科技有限公司 | Intelligent ammonia-containing tail gas recovery control system and method for acid sprayer |
| US20230321587A1 (en) * | 2022-04-07 | 2023-10-12 | The United States Of America, As Represented By The Secretary Of Agriculture | System for removing ammonia, dust and pathogens from air within an animal rearing/sheltering facility |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1546393A (en) * | 2003-12-01 | 2004-11-17 | 江南大学 | Technology for treating high concentration ammonia nitrogen waste water using membrane based absorption method |
| CN202028335U (en) * | 2011-03-15 | 2011-11-09 | 苏州金宏气体股份有限公司 | Waste gas recycling device of ultra pure ammonia production system |
| CN102380302A (en) * | 2011-09-02 | 2012-03-21 | 黄再新 | Method for collecting, purifying and processing ammonia exhaust gas |
| CN102989266A (en) * | 2011-09-13 | 2013-03-27 | 杨友发 | Ammonia gas (ammonium sulfate crystallization) treatment technology system |
| CN103341321A (en) * | 2013-07-24 | 2013-10-09 | 宜宾海翔化工有限责任公司 | Viscose sodium sulfate waste liquor acid and alkali recycling technology by virtue of bipolar membrane electrodialysis method |
| CN104291500A (en) * | 2014-11-13 | 2015-01-21 | 北京赛科康仑环保科技有限公司 | Resourceful treatment system of low-concentration NH4Cl wastewater containing Mo and method of resourceful treatment system |
| CN104355472A (en) * | 2014-10-28 | 2015-02-18 | 北京赛科康仑环保科技有限公司 | Inorganic ammonium salt-containing wastewater treatment system, treatment process and application of wastewater treatment system |
| CN204337983U (en) * | 2014-12-05 | 2015-05-20 | 北京赛科康仑环保科技有限公司 | The recycling treatment process system of MOCVD waste gas in a kind of LED chip production process |
| CN205204929U (en) * | 2015-11-28 | 2016-05-04 | 合肥凯华环保科技有限公司 | Ammonia nitrogen equipment in hydrophobic membrane desorption high ammonia -nitrogen concentration waste water |
| CN106186492A (en) * | 2016-08-24 | 2016-12-07 | 国家海洋局天津海水淡化与综合利用研究所 | The ammonia nitrogen removal of a kind of embrane method high-concentration ammonia nitrogenous wastewater and ammonium salt enrichment method |
| CN107188358A (en) * | 2017-07-19 | 2017-09-22 | 北京中科康仑环境科技研究院有限公司 | A kind of recycling treatment system, processing method and the application of high-concentration ammonium salt waste water |
| CN107890761A (en) * | 2017-11-14 | 2018-04-10 | 合肥创想能源环境科技有限公司 | A kind of method that the industrial waste gas containing ammonia is handled using membrane separation technique |
-
2020
- 2020-07-06 CN CN202010638175.0A patent/CN111701433A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1546393A (en) * | 2003-12-01 | 2004-11-17 | 江南大学 | Technology for treating high concentration ammonia nitrogen waste water using membrane based absorption method |
| CN202028335U (en) * | 2011-03-15 | 2011-11-09 | 苏州金宏气体股份有限公司 | Waste gas recycling device of ultra pure ammonia production system |
| CN102380302A (en) * | 2011-09-02 | 2012-03-21 | 黄再新 | Method for collecting, purifying and processing ammonia exhaust gas |
| CN102989266A (en) * | 2011-09-13 | 2013-03-27 | 杨友发 | Ammonia gas (ammonium sulfate crystallization) treatment technology system |
| CN103341321A (en) * | 2013-07-24 | 2013-10-09 | 宜宾海翔化工有限责任公司 | Viscose sodium sulfate waste liquor acid and alkali recycling technology by virtue of bipolar membrane electrodialysis method |
| CN104355472A (en) * | 2014-10-28 | 2015-02-18 | 北京赛科康仑环保科技有限公司 | Inorganic ammonium salt-containing wastewater treatment system, treatment process and application of wastewater treatment system |
| CN104291500A (en) * | 2014-11-13 | 2015-01-21 | 北京赛科康仑环保科技有限公司 | Resourceful treatment system of low-concentration NH4Cl wastewater containing Mo and method of resourceful treatment system |
| CN204337983U (en) * | 2014-12-05 | 2015-05-20 | 北京赛科康仑环保科技有限公司 | The recycling treatment process system of MOCVD waste gas in a kind of LED chip production process |
| CN205204929U (en) * | 2015-11-28 | 2016-05-04 | 合肥凯华环保科技有限公司 | Ammonia nitrogen equipment in hydrophobic membrane desorption high ammonia -nitrogen concentration waste water |
| CN106186492A (en) * | 2016-08-24 | 2016-12-07 | 国家海洋局天津海水淡化与综合利用研究所 | The ammonia nitrogen removal of a kind of embrane method high-concentration ammonia nitrogenous wastewater and ammonium salt enrichment method |
| CN107188358A (en) * | 2017-07-19 | 2017-09-22 | 北京中科康仑环境科技研究院有限公司 | A kind of recycling treatment system, processing method and the application of high-concentration ammonium salt waste water |
| CN107890761A (en) * | 2017-11-14 | 2018-04-10 | 合肥创想能源环境科技有限公司 | A kind of method that the industrial waste gas containing ammonia is handled using membrane separation technique |
Non-Patent Citations (1)
| Title |
|---|
| 中国环境科学学会: "《中国环境科学学会学术年会优秀论文集2008 上》", 31 May 2008, 北京：中国环境科学出版社 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112744788A (en) * | 2020-12-16 | 2021-05-04 | 四川天采科技有限责任公司 | Separation and purification method for deep dehydration and impurity removal of FTrPSA refined by anhydrous HF (hydrogen fluoride) produced by fluosilicic acid method |
| CN112744788B (en) * | 2020-12-16 | 2022-09-23 | 四川天采科技有限责任公司 | Separation and purification method for deep dehydration and impurity removal of FTrPSA refined by anhydrous HF (hydrogen fluoride) produced by fluosilicic acid method |
| CN114515499A (en) * | 2022-02-21 | 2022-05-20 | 新泰市日进化工科技有限公司 | Intelligent ammonia-containing tail gas recovery control system and method for acid sprayer |
| US20230321587A1 (en) * | 2022-04-07 | 2023-10-12 | The United States Of America, As Represented By The Secretary Of Agriculture | System for removing ammonia, dust and pathogens from air within an animal rearing/sheltering facility |
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