CN111696899A - Air filtering and rectifying device for semiconductor equipment - Google Patents
Air filtering and rectifying device for semiconductor equipment Download PDFInfo
- Publication number
- CN111696899A CN111696899A CN202010579833.3A CN202010579833A CN111696899A CN 111696899 A CN111696899 A CN 111696899A CN 202010579833 A CN202010579833 A CN 202010579833A CN 111696899 A CN111696899 A CN 111696899A
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- rectifying
- semiconductor equipment
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- wall
- fixed
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- 238000001914 filtration Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 11
- 239000011324 bead Substances 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009967 tasteless effect Effects 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Air-Flow Control Members (AREA)
Abstract
The invention discloses an air filtering rectifying device for semiconductor equipment, which structurally comprises a rectifying box, a rectifying cavity, an air inlet, an air filtering net, an air outlet, a rectifying blade and a clamping mechanism.
Description
Technical Field
The invention discloses an air filtering rectifying device for semiconductor equipment, and belongs to the field of semiconductor production auxiliary devices.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and is widely applied to the fields of integrated circuits, communication systems, photovoltaic power generation and the like.
The semiconductor device of prior art is with straining wind fairing, because the dust in the air current easily adsorbs to the rectification intracavity wall, need regularly to dismantle the device and wash the dust to guarantee its and strain wind rectification effect, nevertheless because the device uses threaded connection as main mounting means usually, is difficult to dismantle fast with it and wash and change.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects in the prior art, the invention aims to provide an air filtering rectifying device for a semiconductor device, which aims to solve the problem that the air filtering rectifying device for the semiconductor device in the prior art is difficult to rapidly disassemble, clean and replace because dust in air flow is easily adsorbed to the inner wall of a rectifying cavity and the dust needs to be periodically disassembled and cleaned so as to ensure the air filtering rectifying effect of the air filtering rectifying device, but the air filtering rectifying device is usually assembled by taking threaded connection as a main installation mode.
(II) technical scheme
In order to achieve the purpose, the invention is realized by the following technical scheme: an air filtering and rectifying device for semiconductor equipment comprises a rectifying box, a rectifying cavity, an air inlet, an air filtering net, an air outlet, rectifying blades and a clamping mechanism, wherein the rectifying box is internally provided with the rectifying cavity, the middle part of the left side of the rectifying box is provided with the air inlet, the inner wall of the air inlet is embedded with the air filtering net, the left side of the rear end of the rectifying box is provided with the air outlet, the inner wall of the rectifying box is longitudinally provided with the rectifying blades, the clamping mechanism is arranged at the bottom of the rectifying box and comprises a first fixing block, a rotating shaft groove, a second fixing block, a rotating shaft, a rotating ball, a control knob, a thread groove, an inner thread block and a clamping element, the first fixing block is fixed at the right side of the bottom of the rectifying box, the left side of the first fixing block is provided with the rotating shaft groove, the second fixing block is fixed at the left side, and the left side of the rotating shaft transversely penetrates through the middle part of the second fixed block and is fixedly connected with the right side of the control knob, the thread groove transversely surrounds the right side of the outer wall of the rotating shaft, the right side of the outer wall of the rotating shaft is in threaded connection with the inner wall of the internal thread block, and the clamping elements are arranged at the front end and the rear end of the bottom of the rectifier box.
Further, the clamping element comprises a fixing rod, a connecting block, a guide rod, a limiting block and a clamping block, the middle parts of the front end and the rear end of the internal thread block are fixed on the inner side of the fixing rod, the outer side of the fixing rod penetrates through the inner bottom of the connecting block, the left end of the inner side of the guide rod is welded to the middle parts of the front end and the rear end of the second fixing block, the limiting block is fixed on the left side and the right side of the top of.
Furthermore, the inner side of the clamping block is attached with a rubber antiskid layer, and antiskid lines are arranged on the surface of the rubber antiskid layer.
Furthermore, the clamping elements are provided with a pair and symmetrically distributed at the front end and the rear end of the rotating shaft.
Furthermore, the number of the rotating beads is four, and the cross section diameter of the rotating beads is 2 mm.
Furthermore, the diameter of the cross section of the guide rod is 1cm, and an included angle formed between the guide rod and the rotating shaft is 30 degrees.
Further, the rectification leaf is provided with five, and horizontal equidistance installs in air outlet department.
Furthermore, the diameter of the section of the rotating shaft is 3cm, and a limiting ring is fixed in the middle of the outer wall of the rotating shaft.
Furthermore, the rotating shaft and the fixing rod are made of tungsten steel.
Further, the control knob is made of polyethylene.
(III) advantageous effects
Compared with the prior art, the invention provides an air filtering rectifying device for semiconductor equipment, which has the following beneficial effects:
this semiconductor equipment is with straining wind fairing through having set up clamping mechanism in rectifier bottom of the case portion, and rotation control knob makes the thread groove and the internal thread piece cooperation rotation of pivot outer wall, and the internal thread piece drives the tight piece of clamp of connecting block bottom and slides right, can dismantle the rectification of straining wind fairing, washs the absorptive dust of rectification intracavity wall, avoids piling up because of rectification intracavity wall dust and influences the rectification effect of straining wind.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic sectional view of a rectifier box according to the present invention;
FIG. 3 is a schematic view of the clamping mechanism of the present invention;
FIG. 4 is a schematic front sectional view of a first fixing block according to the present invention;
fig. 5 is a top sectional partial structure view of the clamping member of the present invention.
In the figure: the air filter comprises a rectification box-1, a rectification cavity-2, an air inlet-3, an air filtering net-4, an air outlet-5, a rectification blade-6, a clamping mechanism-7, a first fixing block-71, a rotating shaft groove-72, a second fixing block-73, a rotating shaft-74, a rotating bead-75, a control knob-76, a thread groove-77, an internal thread block-78, a clamping element-79, a fixing rod-791, a connecting block-792, a guide rod-793, a limiting block-794 and a clamping block-795.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Referring to fig. 1 and 2, the present invention provides an air-filtering rectifying device for semiconductor devices: comprises a rectifying box 1, a rectifying cavity 2 (figure 2), an air inlet 3, an air filtering net 4, an air outlet 5, a rectifying blade 6 and a clamping mechanism 7. Be provided with rectification chamber 2 in the rectifier box 1, rectifier box 1 left side middle part has been seted up into wind gap 3, and goes into that 3 inner walls in wind gap have inlayed and strain wind screen 4, and air outlet 5 has been seted up on the left of rectifier box 1 rear end, and rectifier leaf 6 is vertically installed to rectifier box 1 inner wall, and clamping mechanism 7 sets up in rectifier box 1 bottom.
As shown in fig. 3 to 5, the clamping mechanism 7 includes a first fixing block 71, a rotating shaft groove 72, a second fixing block 73, a rotating shaft 74, a rotating ball 75, a control knob 76, a thread groove 77, an internal thread block 78 and a clamping element 79, the first fixing block 71 is fixed on the right side of the bottom of the rectifying box 1, the rotating shaft groove 72 is formed in the left side of the inside of the first fixing block 71, the second fixing block 73 is fixed on the left side of the bottom of the rectifying box 1, the right side of the outer wall of the rotating shaft 74 is rotatably connected with the inner wall of the rotating shaft groove 72 through the rotating ball 75, the left side of the rotating shaft 74 transversely penetrates through the middle of the second fixing block 73 and is fixedly connected with the right side of the control knob 76, the thread groove 77 transversely surrounds the right side of the outer wall of the rotating.
Wherein, clamping element 79 includes dead lever 791, connecting block 792, guide arm 793, stopper 794 and presss from both sides tight piece 795, and both ends middle part around dead lever 791 inboard is fixed in interior screw thread piece 78, and the dead lever 791 outside runs through the bottom in the connecting block 792, and the inboard left end of guide arm 793 welds in both ends middle part around second fixed block 73, and the guide arm 793 top left and right sides is fixed with stopper 794, presss from both sides tight piece 795 and is fixed in the connecting block 792 bottom.
Wherein, the inboard laminating of clamp splice 795 has the rubber skid resistant course, and the anti-skidding line has been seted up on the rubber skid resistant course surface, stability when guaranteeing equipment fixing.
Wherein, the clamping elements 79 are provided in a pair and symmetrically distributed at the front and rear ends of the rotating shaft 74, so as to further ensure the stability of the equipment during installation.
Wherein, the number of the rotating beads 75 is four, and the diameter of the cross section of the rotating beads 75 is 2mm, which is convenient for the rotating shaft 74 to rotate.
The diameter of the section of the guide rod 793 is 1cm, and an included angle formed between the guide rod 793 and the rotating shaft 74 is 30 degrees, so that the device is convenient to disassemble.
Wherein, the rectification leaf 6 is provided with five, and horizontal equidistance installs in air outlet 5 department, is favorable to adjusting the air current angle.
The diameter of the cross section of the rotating shaft 74 is 3cm, and a limit ring is fixed in the middle of the outer wall of the rotating shaft 74 to prevent the internal thread block 78 from separating from the range of the thread groove 77 on the right side of the outer wall of the rotating shaft 74.
The rotating shaft 74 and the fixing rod 791 are made of tungsten steel.
The control knob 76 is made of polyethylene.
The control knob 76 described in this patent is made of polyethylene, which is a thermoplastic resin obtained by polymerizing ethylene, and in industry, also includes a copolymer of ethylene and a small amount of α -olefin, and polyethylene is odorless, nontoxic, tasteless, insoluble in common solvents at normal temperature, low in water absorption, excellent in electrical insulation, and has the characteristics of excellent low temperature resistance, good chemical stability, and resistance to most of the acid and alkali erosion (no resistance to acids with oxidation properties).
When a user wants to use the device, the device is placed at a position needing rectification, the control knob 76 on the left side of the second fixing block 73 is rotated, the right side of the outer wall of the rotating shaft 74 rotates in the rotating shaft groove 72 at the bottom in the first fixing block 71 through the rotating ball 75, the thread groove 77 and the internal thread block 78 are matched and rotated, the internal thread block 78 drives the connecting block 792 to slide leftwards on the surface of the guide rod 793 through the fixing rod 791, the clamping block 795 is clamped at a semiconductor device, installation of the air filtering rectification device is completed, air flow flows into the rectification box 1 through the air inlet 3, the air filtering net 4 filters dust in the air flow, the rectification cavity 2 adjusts the air flow, the air flow further adjusted through the rectification blade 6 flows to the surface of the semiconductor from the air outlet 5, so that the reduction of the semiconductor capacity caused by uneven air flow is avoided, when the rectification cavity 2 absorbs more dust, the control knob 76 on the left side of, make pivot 74 outer wall right side through changeing the pivot groove 72 internal rotation of pearl 75 bottom in first fixed block 71, thereby thread groove 77 rotates with the cooperation of internal thread piece 78, internal thread piece 78 drives connecting block 792 through dead lever 791 and slides right in guide arm 793 surface and supports in stopper 794, and then press from both sides tight piece 795 and keep away from semiconductor equipment department, the dismantlement to straining wind fairing is accomplished, can wash to the adsorbed dust of rectification intracavity 2 inner wall, the semiconductor equipment that has solved prior art is with straining wind fairing, because the dust in the air current easily adsorbs to rectification intracavity wall, need regularly to dismantle the device and wash the dust, with guaranteeing its rectification effect of straining wind, nevertheless because the device uses threaded connection as main mounting means usually, be difficult to dismantle the problem of washing and changing its fast.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. An air filtering rectifying device for semiconductor equipment comprises a rectifying box (1), wherein a rectifying cavity (2) is arranged in the rectifying box (1), an air inlet (3) is formed in the middle of the left side of the rectifying box (1), an air filtering net (4) is embedded in the inner wall of the air inlet (3), an air outlet (5) is formed in the left side of the rear end of the rectifying box (1), and rectifying blades (6) are longitudinally arranged on the inner wall of the rectifying box (1);
the method is characterized in that: the rectifying box is characterized by further comprising a clamping mechanism (7), wherein the clamping mechanism (7) is arranged at the bottom of the rectifying box (1).
2. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 1, wherein: clamping mechanism (7) include first fixed block (71), pivot groove (72), second fixed block (73), pivot (74), change pearl (75), control knob (76), thread groove (77), internal thread piece (78) and clamping element (79), first fixed block (71) are fixed in rectifier box (1) bottom right side, just left side has been seted up in first fixed block (71) pivot groove (72), second fixed block (73) are fixed in rectifier box (1) bottom left side, pivot (74) outer wall right side is passed through change pearl (75) with pivot groove (72) inner wall rotates and is connected, just pivot (74) left side transversely runs through second fixed block (73) middle part with control knob (76) right side fixed connection.
3. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 2, wherein: the thread groove (77) transversely surrounds the right side of the outer wall of the rotating shaft (74), the right side of the outer wall of the rotating shaft (74) is in threaded connection with the inner wall of the inner thread block (78), and the clamping elements (79) are arranged at the front end and the rear end of the bottom of the rectifying box (1).
4. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 3, wherein: clamping element (79) include dead lever (791), connecting block (792), guide arm (793), stopper (794) and press from both sides tight piece (795), both ends middle part around dead lever (791) inboard is fixed in internal thread piece (78), just dead lever (791) outside is run through bottom in connecting block (792), the inboard left end of guide arm (793) weld in both ends middle part around second fixed block (73), just guide arm (793) top left and right sides is fixed there is stopper (794), press from both sides tight piece (795) to be fixed in connecting block (792) bottom.
5. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 4, wherein: the inner side of the clamping block (795) is attached with a rubber antiskid layer, and antiskid lines are arranged on the surface of the rubber antiskid layer.
6. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 3, wherein: the clamping elements (79) are arranged in a pair and are symmetrically distributed at the front end and the rear end of the rotating shaft (74).
7. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 3, wherein: the number of the rotating beads (75) is four, and the diameter of the cross section of each rotating bead (75) is 2 mm.
8. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 4, wherein: the diameter of the section of the guide rod (793) is 1cm, and an included angle formed between the guide rod (793) and the rotating shaft (74) is 30 degrees.
9. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 3, wherein: the rectifying blades (6) are provided with five blades and are transversely and equidistantly arranged at the air outlet (5).
10. The wind-filtering rectification device for the semiconductor equipment as claimed in claim 3, wherein: the diameter of the section of the rotating shaft (74) is 3cm, and a limiting ring is fixed in the middle of the outer wall of the rotating shaft (74).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010579833.3A CN111696899A (en) | 2020-06-23 | 2020-06-23 | Air filtering and rectifying device for semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010579833.3A CN111696899A (en) | 2020-06-23 | 2020-06-23 | Air filtering and rectifying device for semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111696899A true CN111696899A (en) | 2020-09-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010579833.3A Pending CN111696899A (en) | 2020-06-23 | 2020-06-23 | Air filtering and rectifying device for semiconductor equipment |
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| Country | Link |
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| CN (1) | CN111696899A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08261535A (en) * | 1995-03-23 | 1996-10-11 | Sony Corp | Dust removal apparatus, semiconductor processing apparatus, and vapor deposition apparatus |
| JPH0992782A (en) * | 1995-09-21 | 1997-04-04 | Mitsubishi Electric Corp | Jig and method for replacing semiconductor element |
| KR20110006008U (en) * | 2009-12-09 | 2011-06-15 | 포-쳉 슈에 | Dust cleaning apparatus for semiconductor components |
| CN105321839A (en) * | 2014-07-08 | 2016-02-10 | 沈阳芯源微电子设备有限公司 | Wind-filtering rectification device for semiconductor device |
| US20170151523A1 (en) * | 2015-11-26 | 2017-06-01 | Orient Service Co., Ltd. | Dust Filter Mounted In Semiconductor Waste Gas Treatment Equipment |
| CN110332067A (en) * | 2019-08-19 | 2019-10-15 | 江苏新海科技发展有限公司 | A kind of horizontal cylinder diesel engine tank support mounting structure |
| CN210254308U (en) * | 2019-05-24 | 2020-04-07 | 无锡市强仔机械制造有限公司 | Auxiliary tool holder device for numerical control vertical lathe |
| CN212625497U (en) * | 2020-06-23 | 2021-02-26 | 芯米(厦门)半导体设备有限公司 | Air filtering and rectifying device for semiconductor equipment |
-
2020
- 2020-06-23 CN CN202010579833.3A patent/CN111696899A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08261535A (en) * | 1995-03-23 | 1996-10-11 | Sony Corp | Dust removal apparatus, semiconductor processing apparatus, and vapor deposition apparatus |
| JPH0992782A (en) * | 1995-09-21 | 1997-04-04 | Mitsubishi Electric Corp | Jig and method for replacing semiconductor element |
| KR20110006008U (en) * | 2009-12-09 | 2011-06-15 | 포-쳉 슈에 | Dust cleaning apparatus for semiconductor components |
| CN105321839A (en) * | 2014-07-08 | 2016-02-10 | 沈阳芯源微电子设备有限公司 | Wind-filtering rectification device for semiconductor device |
| US20170151523A1 (en) * | 2015-11-26 | 2017-06-01 | Orient Service Co., Ltd. | Dust Filter Mounted In Semiconductor Waste Gas Treatment Equipment |
| CN210254308U (en) * | 2019-05-24 | 2020-04-07 | 无锡市强仔机械制造有限公司 | Auxiliary tool holder device for numerical control vertical lathe |
| CN110332067A (en) * | 2019-08-19 | 2019-10-15 | 江苏新海科技发展有限公司 | A kind of horizontal cylinder diesel engine tank support mounting structure |
| CN212625497U (en) * | 2020-06-23 | 2021-02-26 | 芯米(厦门)半导体设备有限公司 | Air filtering and rectifying device for semiconductor equipment |
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