CN111694334A - System and method for controlling partitioned areas of wafer inserting machine - Google Patents
System and method for controlling partitioned areas of wafer inserting machine Download PDFInfo
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- CN111694334A CN111694334A CN202010598268.5A CN202010598268A CN111694334A CN 111694334 A CN111694334 A CN 111694334A CN 202010598268 A CN202010598268 A CN 202010598268A CN 111694334 A CN111694334 A CN 111694334A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31302—Verify id data and reread, rewrite or alarm on fault
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention discloses a slice inserting machine regional control system which comprises a basket circulation station control unit, a silicon wafer circulation station control unit, a robot station control unit and a transverse movement station control unit, wherein the basket circulation station control unit is connected with the silicon wafer circulation station control unit; the control unit of one station is a main control unit, the input end of a power supply of the main control unit is used for connecting an external power supply, and the output end of the power supply of the main control unit is respectively connected with the power supplies of other station control units; all the station control units are communicated with each other to form a ring network. The invention also discloses a control method, which comprises the following steps: in an initial state, starting each station control unit by one key; when a certain station control unit has a fault, the fault station control unit automatically jumps out and enters a fault state, and other station control units are not influenced; and after the fault processing is finished, restarting the station control unit and entering an automatic mode. The invention has the advantages of independent control and test of the subareas, high operating efficiency and the like.
Description
Technical Field
The invention mainly relates to the technical field of a wafer inserting machine, in particular to a wafer inserting machine subarea control system and a control method.
Background
A ten-tube wafer inserting machine is matched equipment for ten-tube PECVD, and has two main functions of feeding and discharging. The feeding process is flower basket taking → robot taking → graphite boat inserting → graphite boat feeding PE; the discharging process is that the graphite boat discharges PE → the graphite boat takes the wafer → the robot insert wafer → the flower basket insert wafer.
The whole process needs four stations for completing, namely flower basket circulation, silicon wafer circulation, robot insertion and taking of wafers and graphite boat transverse movement. The flower basket circulation station comprises a full flower basket inlet, a full flower basket outlet, a manual empty flower basket supplementing, an NG piece inlet empty flower basket, an NG piece outlet full flower basket, an empty flower basket circulation mesh belt and a cache, and the design is mainly based on whether a client carries out manual feeding or AGV feeding; the upper layer of the silicon wafer circulation station is composed of basket lifting, telescopic wafer transferring, wafer transferring cache, wafer in and out cache lifting, inserting and taking lifting and NG wafer transverse moving, and the lower layer is provided with basket full circulation; the robot insertion sheet is composed of a robot and a boat transmission mechanism. The graphite boat transverse moving mechanism consists of a transverse moving mechanism and a boat conveying mechanism.
When the whole set of control system is assembled and debugged, equipment point alignment and test work can be carried out only after the whole set of equipment is powered on and the network is assembled; if a certain station breaks down, the whole equipment is shut down and switched to manual operation, and the whole equipment is automatically opened after the fault is processed, so that the production efficiency is greatly reduced. Meanwhile, the equipment failure of a certain station can cause the whole machine to be shut down, the work of a normal station is influenced, the work efficiency is reduced, the yield is greatly reduced, more time is delayed if the failure needing reinitialization occurs, the current state of the whole equipment needs to be cleaned manually, time and labor are wasted, and the productivity of the equipment is seriously influenced. In addition, after the whole shutdown, the whole equipment may need to be initialized, which is time-consuming and labor-consuming.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the technical problems in the prior art, the invention provides a system and a method for controlling the sub-areas of a sheet inserting machine with high operation efficiency.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a slice inserting machine regional control system comprises a basket circulation station control unit, a silicon wafer circulation station control unit, a robot station control unit and a transverse movement station control unit; the control unit of one station is a main control unit, the input end of a power supply of the main control unit is used for connecting an external power supply, and the output end of the power supply of the main control unit is respectively connected with the power supplies of other station control units; all the station control units are communicated with each other to form a ring network.
As a further improvement of the above technical solution:
a main emergency stop switch is arranged between the input end of the power supply of the main control unit and an external power supply; and an independent emergency stop switch is arranged between the output end of the power supply of the main control unit and the power supplies of other station control units.
The main control unit is connected with a touch screen.
All the station control units are connected through PN network cables.
The invention also discloses a control method based on the slice inserting machine subarea control system, which comprises the following steps:
in an initial state, starting each station control unit by one key;
when a certain station control unit has a fault, the fault station control unit automatically jumps out and enters a fault state, and other station control units are not influenced;
and after the fault processing is finished, restarting the station control unit and entering an automatic mode.
As a further improvement of the above technical solution:
the flower basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the transverse movement station control unit respectively correspond to independent control instructions and independent running state display.
Software is used for realizing manual and automatic interlocking among the flower basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the transverse movement station control unit.
The main control unit is connected with a touch screen, the touch screen comprises signal feedback display, alarm record, manual and automatic buttons, a segmented mode control button, one-key starting and equipment running state of the whole system;
when the device is in an initial state, a button can be started by pressing a key on the touch screen, the device is initialized, and then the device enters an automatic state;
in the operation process, when a certain station control unit breaks down, the station control unit stops operating and enters a fault state, other areas normally operate, and meanwhile, the touch screen displays a fault code;
after the fault processing is finished, a sectional mode control button can be selected to restart the fault station control unit, and the normal operation is realized.
Compared with the prior art, the invention has the advantages that:
the invention adopts the control unit of the sub-station (area), can carry on the debugging work by the sub-station (area), can carry on the point-to-point separately after every station control unit assembles and finishes, and the functional test, it is irrelevant to other station control unit assembly progress, have greatly improved and debugged the progress; each station control unit adopts a station distributed power supply network and a communication network, only the power of a main power supply needs to be ensured, any station can be stopped suddenly or tripped after power failure, the station can be stopped independently, the switching is manual-automatic, the fault is processed, the station can enter the automatic mode newly, the station without the fault can work normally, the influence of the fault station is avoided, and the production efficiency of the whole equipment is effectively improved; the substation control unit has fault tolerance for processing faults, greatly improves the operation efficiency of equipment, and reduces the times of manual intervention and complex operation flow.
The invention supplies power in a hardware by strong current in different areas, thereby preventing a certain station from generating overcurrent to cause power failure and influencing the normal work of other stations; the distributed installation of the configuration on the hardware is beneficial to accessing field sensor signals nearby and reducing wiring; the ring-shaped networking on the network prevents the system from dropping the network and influencing the normal work of other stations; and the software is combined with hardware design to define independent modes for different areas, so that the regional control of the equipment is realized.
The regional control of the invention also has great benefits in the debugging process, equipment can be assembled in a targeted manner at ordinary times, after a certain station is assembled by concentrating manpower and material resources, the station can start hardware and software debugging, and the reliability of hardware and the logic of software can be tested; after the assembly test of each station is completed, the equipment is integrally assembled, and the signal butt joint and software interlocking protection of each station are well done, so that the overall performance of the equipment can be tested, the test efficiency is greatly improved, and the time is saved. For the control of the subareas, the standardized design is easy to be carried out on hardware and software.
Drawings
Fig. 1 is a schematic structural diagram of a control system according to an embodiment of the present invention.
Fig. 2 is a control block diagram of the control method according to the embodiment of the present invention.
Detailed Description
The invention is further described below with reference to the figures and the specific embodiments of the description.
As shown in fig. 1 and 2, the slice inserting machine regional control system of the embodiment includes a basket circulation station control unit, a silicon wafer circulation station control unit, a robot station control unit and a traverse station control unit; the control unit of one station is a main control unit, the input end of a power supply of the main control unit is used for connecting an external power supply, and the output end of the power supply of the main control unit is respectively connected with the power supplies of other station control units; each station control unit is communicated and connected with each other through a PN network cable to form a ring network, namely, each station control unit forms a circle, when the wire is broken, the whole network is smooth, the failure rate is reduced, and the continuous operation time of the equipment is prolonged. The invention adopts the control unit of the sub-station (area), can carry on the debugging work by the sub-station (area), can carry on the point-to-point separately after every station control unit assembles and finishes, and the functional test, it is irrelevant to other station control unit assembly progress, have greatly improved and debugged the progress; each station control unit adopts a station distributed power supply network and a communication network, only the power of a main power supply needs to be ensured, any station can be stopped suddenly or tripped after power failure, the station can be stopped independently, the switching is manual-automatic, the fault is processed, the station can enter the automatic mode newly, the station without the fault can work normally, the influence of the fault station is avoided, and the production efficiency of the whole equipment is effectively improved; the substation control unit has fault tolerance for processing faults, greatly improves the operation efficiency of equipment, and reduces the times of manual intervention and complex operation flow.
In this embodiment, a total emergency stop switch is arranged between the input end of the power supply of the main control unit and the external power supply; an independent emergency stop switch is arranged between the output end of the power supply of the main control unit and the power supplies of other station control units. The master emergency stop switch controls the whole wafer inserting machine execution system to supply power, each independent emergency stop switch correspondingly controls the station control unit execution system to supply power, and the PLC and the remote module signal acquisition system in each station control unit are not affected by the emergency stop switch.
In this embodiment, the main control unit is connected with a touch screen. The touch screen comprises signal feedback display, alarm recording, manual and automatic buttons, a segmented mode control button, one-key starting, an operation state and the like. When the equipment is in an initial state, a button can be started by pressing one key, the equipment is initialized, and then the equipment enters an automatic state; in the running process of the equipment, when a certain area breaks down, the area stops running and enters a fault state, other areas run normally, meanwhile, the touch screen displays a fault code, and after fault processing is finished, a segmented mode control button can be selected to restart the fault area, so that the equipment runs normally. The operation efficiency is greatly improved without stopping other areas, and the productivity is improved.
The invention also discloses a control method based on the slice inserting machine subarea control system, which comprises the following steps:
in an initial state, starting each station control unit by one key;
when a certain station control unit has a fault, the fault station control unit automatically jumps out and enters a fault state, and other station control units are not influenced;
and after the fault processing is finished, restarting the station control unit and entering an automatic mode.
In the embodiment, the flower basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the transverse movement station control unit respectively correspond to independent control instructions and independent running state display; software is used for realizing manual and automatic interlocking among the flower basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the transverse movement station control unit.
The system and method of the present invention are further described with reference to a full embodiment:
as the ten-tube sheet inserting machine system is large, a plurality of servos, frequency converters and sensors are provided. The on-site wiring is complex, the wiring is simplified, the wiring quantity is reduced, meanwhile, the disassembly and transportation are convenient, and the electric cabinet is made into an embedded type.
As shown in fig. 1, the whole system is divided into three areas (i.e., stations) for explanation, and the power supply cabinet of the whole system is divided into an a # area electric cabinet, a B # area electric cabinet and a C # area electric cabinet; the A # area electric cabinet corresponds to a basket circulation station control unit, the B # area electric cabinet corresponds to a silicon wafer circulation station control unit, and the C # area electric cabinet corresponds to a robot station control unit and a transverse movement station control unit. Each electric cabinet contains a PLC controller, a servo, a frequency converter, a remote module, an independent power supply, an independent safety relay and the like, wherein the PLC controller is positioned in an A # regional electric cabinet, and communication in each electric cabinet is linked through a PN network cable. Each electric cabinet adopts remote module to carry out the collection of signal point respectively, and each electric cabinet passes through the switch to connect to constitute the looped netowrk. The looped network has the advantages that when a certain area is powered off or the network is disconnected, other areas can normally communicate with the PLC, and the whole equipment cannot be shut down.
The forceful electric power adopts the regional electric cabinet of A # outside to get into, divide into three routes through moulded case circuit breaker and get into the terminal, and the regional electric cabinet of B # and the regional electric cabinet of C #'s power supply is introduced from the regional electric cabinet terminal of A #. The power supply of each electric cabinet and the safety-related execution system is controlled by the corresponding emergency stop switch through the respective safety relay. The equipment safety loop is controlled by a main emergency stop switch and three independent emergency stop switches, and the three independent emergency stop switches respectively control the execution systems of the main emergency stop switch and the three independent emergency stop switches to supply power. The main emergency stop switch controls the power supply of an execution system of the whole equipment, and the PLC control system and the remote module signal acquisition system are not affected by the emergency stop switch.
The touch screen comprises signal feedback display, alarm recording, manual and automatic buttons, a segmented mode control button, one-key starting, equipment running states and the like of the whole system. When the device is in the initial state, a one-touch start button can be pressed, the device is initialized, and then the automatic state is entered. In the running process of the equipment, when a certain area breaks down, the area stops running and enters a fault state, other areas run normally, meanwhile, the touch screen displays a fault code, and after fault processing is finished, a segmented mode control button can be selected to restart the fault area, so that the equipment runs normally. The operation efficiency is greatly improved without stopping other areas, and the productivity is improved.
The whole hardware design is considered comprehensively, and equipment cannot be shut down as long as the PLC can operate regardless of hardware faults or power failure faults. When power failure occurs in a certain area, the PLC panel can flicker with a red light, the area can be disconnected in a configuration, other control networks can be smooth, control commands can be transmitted in time, and complete machine paralysis cannot be caused. The reasonable design of hardware provides a foundation for the partition area control of software.
Correspondingly, the software is divided into an upper computer system and a lower computer system, and the upper computer and the lower computer are mutually connected. The system control is shown in figure 2. The control of ABC # area is independent, corresponding to three sets of independent control instructions, without mutual influence. Certainly, in order to ensure the safe operation of the equipment, software hands are automatically interlocked between ABC # areas, the conditions are not met, and the equipment cannot operate. The ABC # area has independent operation state display, and information is fed back by signals from a PLC control system.
The device starts three ABC # areas by one key in an initial state, so that the independent starting of each area is omitted, and the operation is convenient. Of course, when a fault occurs in a certain area, the fault area mode will jump out automatically and enter into the fault state, but other areas are not affected, and after the fault processing is completed, the area is restarted and enters into the automatic mode.
The invention supplies power in a hardware by strong current in different areas, thereby preventing a certain station from generating overcurrent to cause power failure and influencing the normal work of other stations; the distributed installation of the configuration on the hardware is beneficial to accessing field sensor signals nearby and reducing wiring; the ring-shaped networking on the network prevents the system from dropping the network and influencing the normal work of other stations; and the software is combined with hardware design to define independent modes for different areas, so that the regional control of the equipment is realized.
The regional control of the invention also has great benefits in the debugging process, equipment can be assembled in a targeted manner at ordinary times, after a certain station is assembled by concentrating manpower and material resources, the station can start hardware and software debugging, and the reliability of hardware and the logic of software can be tested; after the assembly test of each station is completed, the equipment is integrally assembled, and the signal butt joint and software interlocking protection of each station are well done, so that the overall performance of the equipment can be tested, the test efficiency is greatly improved, and the time is saved. For the control of the subareas, the standardized design is easy to be carried out on hardware and software.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention.
Claims (8)
1. A slice inserting machine regional control system is characterized by comprising a basket circulation station control unit, a silicon wafer circulation station control unit, a robot station control unit and a transverse movement station control unit; the control unit of one station is a main control unit, the input end of a power supply of the main control unit is used for connecting an external power supply, and the output end of the power supply of the main control unit is respectively connected with the power supplies of other station control units; all the station control units are communicated with each other to form a ring network.
2. The system for controlling the subareas of the wafer inserting machines according to claim 1, wherein a general emergency stop switch is arranged between an input end of a power supply of the main control unit and an external power supply; and an independent emergency stop switch is arranged between the output end of the power supply of the main control unit and the power supplies of other station control units.
3. The system of claim 1, wherein a touch screen is connected to the master control unit.
4. The system for controlling the subareas of the wafer inserting machines according to any one of claims 1-3, wherein the station control units are connected through PN network cables.
5. A control method of the slice inserting machine zone control system based on any one of the claims 1-4 is characterized by comprising the following steps:
in an initial state, starting each station control unit by one key;
when a certain station control unit has a fault, the fault station control unit automatically jumps out and enters a fault state, and other station control units are not influenced;
and after the fault processing is finished, restarting the station control unit and entering an automatic mode.
6. The control method as claimed in claim 5, wherein the basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the traverse station control unit are respectively corresponding to independent control commands and independent operation state display.
7. The control method as claimed in claim 5, wherein software hands are automatically interlocked among the basket circulation station control unit, the silicon wafer circulation station control unit, the robot station control unit and the traverse station control unit.
8. The control method according to any one of claims 5 to 7, wherein the main control unit is connected with a touch screen, and the touch screen comprises signal feedback display, alarm record, manual and automatic buttons, a segmented mode control button, one-key start and equipment running state of the whole system;
when the device is in an initial state, a button can be started by pressing a key on the touch screen, the device is initialized, and then the device enters an automatic state;
in the operation process, when a certain station control unit breaks down, the station control unit stops operating and enters a fault state, other areas normally operate, and meanwhile, the touch screen displays a fault code;
after the fault processing is finished, a sectional mode control button can be selected to restart the fault station control unit, and the normal operation is realized.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010598268.5A CN111694334B (en) | 2020-06-28 | 2020-06-28 | System and method for controlling partitioned areas of wafer inserting machine |
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| CN202010598268.5A CN111694334B (en) | 2020-06-28 | 2020-06-28 | System and method for controlling partitioned areas of wafer inserting machine |
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| CN111694334B CN111694334B (en) | 2021-10-22 |
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