CN111694162A - Spectrum synthesis method and device - Google Patents

Spectrum synthesis method and device Download PDF

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CN111694162A
CN111694162A CN202010575591.0A CN202010575591A CN111694162A CN 111694162 A CN111694162 A CN 111694162A CN 202010575591 A CN202010575591 A CN 202010575591A CN 111694162 A CN111694162 A CN 111694162A
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light source
spectrum
light
spectral
synthesis method
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CN111694162B (en
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高奇
李刚
李哲
刘红军
王昭路
黄楠
赵卫
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/1006Beam splitting or combining systems for splitting or combining different wavelengths
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract

本发明公开了一种光谱合成方法及装置,旨在解决现有技术中存在光谱合成方法其合成的路数仅在数十路,并且无法保证最终光谱合成的光束质量的技术问题。本发明采用可调谐技术分割宽谱超荧光光源,实现上百路种子激光分割,并通过可调滤波功率放大组件实现上千瓦窄线宽光纤激光输出,后通过衍射光栅和密集的光纤阵列实现光谱合成,并分一部分光作为参考光,通过前段可调谐技术进行光谱变换,实现最终反馈控制建立,保证最终的光束质量。本发明的光谱合成方法及装置能够在有限空间内实现数十路甚至上百路的光谱合成,并且通过建立实时反馈控制系统,克服温度、湿度、抖动等外界因素造成的光束质量劣化,保证光谱合成的作用效果。

Figure 202010575591

The invention discloses a spectrum synthesis method and device, aiming at solving the technical problem in the prior art that the number of synthesis paths of the spectrum synthesis method is only tens of paths, and the beam quality of the final spectrum synthesis cannot be guaranteed. The invention adopts the tunable technology to divide the wide-spectrum super-fluorescence light source, realizes the division of hundreds of seed lasers, realizes the output of the fiber laser with a narrow linewidth of thousands of kilowatts through the adjustable filter power amplifying component, and then realizes the spectrum through the diffraction grating and the dense fiber array. Synthesize and divide a part of the light as the reference light, and perform spectral transformation through the front-end tunable technology to realize the establishment of final feedback control and ensure the final beam quality. The spectral synthesis method and device of the present invention can realize spectral synthesis of dozens or even hundreds of channels in a limited space, and by establishing a real-time feedback control system, the degradation of beam quality caused by external factors such as temperature, humidity, and jitter can be overcome, and the spectrum can be guaranteed. Synthetic effect.

Figure 202010575591

Description

一种光谱合成方法及装置A kind of spectral synthesis method and device

技术领域technical field

本发明涉及高功率高光束质量光纤激光输出的光谱合成,具体涉及一种光谱合成方法及装置。The invention relates to spectral synthesis of high-power and high-beam quality fiber laser output, in particular to a spectral synthesis method and device.

背景技术Background technique

光谱合成技术采用色散光学元件将不同波长的光纤激光合成一束激光输出,由于其具有结构简单、扩展性强、合成光束质量好、不用复杂调控等特点,因此是目前实现高亮度、高功率光纤激光系统的有效技术途径。Spectral synthesis technology uses dispersive optical elements to synthesize fiber lasers of different wavelengths into a single beam of laser output. Because of its simple structure, strong expansibility, good quality of the synthesized beam, and no complex regulation, it is currently the only way to achieve high brightness and high power fiber. Efficient technical approach to laser systems.

在现有技术中,为保证光谱组束的光束质量,每路激光线宽须小于35GHz,但由于受激布里渊散射、自相位调制、模式不稳定等问题的影响,单路窄线宽光纤激光输出功率提高难度较大,而且在应用过程中会由于热畸变、环境温度变化、抖动等原因,导致系统光谱合成光束质量劣化,影响应用效果,传统的光谱合成方法其合成的路数仅在数十路,并且无法保证最终光谱合成的光束质量。In the prior art, in order to ensure the beam quality of the spectral beam, the linewidth of each laser must be less than 35 GHz. However, due to the influence of problems such as stimulated Brillouin scattering, self-phase modulation, mode instability, etc. It is difficult to increase the output power of fiber lasers, and due to thermal distortion, ambient temperature changes, jitter and other reasons, the quality of the system's spectrally synthesized beam will be degraded, which will affect the application effect. In dozens of channels, and the beam quality of the final spectral synthesis cannot be guaranteed.

发明内容SUMMARY OF THE INVENTION

本发明旨在解决现有技术中存在光谱合成方法其合成的路数仅在数十路,并且无法保证最终光谱合成的光束质量的技术问题,而提供一种光谱合成方法及装置。The present invention aims to solve the technical problem in the prior art that the spectral synthesis method has only tens of channels and cannot guarantee the beam quality of the final spectral synthesis, and provides a spectral synthesis method and device.

为达到上述目的,本发明所采用的技术方案为:In order to achieve the above object, the technical scheme adopted in the present invention is:

一种光谱合成方法,其特殊之处在于,包括以下步骤:A spectral synthesis method, which is special in that it includes the following steps:

步骤1)将初始光源分束为多路种子宽光谱光源;Step 1) splitting the initial light source into multiple seed wide-spectrum light sources;

步骤2)对每一路种子宽光谱光源进行波长调谐,形成窄线宽光源;Step 2) wavelength tuning is performed on each seed wide spectral light source to form a narrow linewidth light source;

步骤3)对每一路窄线宽光源进行功率放大;Step 3) amplifying the power of each narrow linewidth light source;

步骤4)将功率放大后的多路窄线宽光源进行密集排列形成光纤阵列;Step 4) densely arranging the multiple narrow linewidth light sources after power amplification to form an optical fiber array;

步骤5)对光纤阵列中的各路光束进行准直并整体聚焦,使所有光束都聚焦在一个焦点;Step 5) collimating and focusing the light beams of each path in the fiber array as a whole, so that all the light beams are focused on one focal point;

步骤6)在焦点处进行光路合成,形成光谱合成光束;Step 6) performing optical path synthesis at the focal point to form a spectrally synthesized beam;

步骤7)将光谱合成光束进行分束,形成反射光和透射光;Step 7) splitting the spectrally synthesized beam to form reflected light and transmitted light;

所述反射光输入至功率计或目标靶面;The reflected light is input to the power meter or the target surface;

所述透射光进行聚焦后成像,根据成像效果控制步骤2)的调谐波长,从而控制反射光输出的光束质量。The transmitted light is imaged after being focused, and the tuning wavelength in step 2) is controlled according to the imaging effect, so as to control the beam quality of the reflected light output.

进一步地,步骤1)中所述初始光源为宽谱超荧光光源。Further, the initial light source in step 1) is a broad-spectrum hyperfluorescence light source.

进一步地,步骤7)中的所述反射光占所述合成光路的99%以上。Further, the reflected light in step 7) accounts for more than 99% of the combined light path.

进一步地,步骤3)中所述每一路窄线宽光源均依次通过泵浦合束器、放大级增益光纤对其进行功率放大。Further, in step 3), each narrow linewidth light source is sequentially amplified by the pumping combiner and the gain fiber of the amplifier stage.

进一步地,步骤7)中所述透射光通过聚焦透镜进行聚焦后入射至CCD进行成像。Further, in step 7), the transmitted light is focused by a focusing lens and then incident on the CCD for imaging.

基于上述的一种光谱合成方法,本发明还提供了一种光谱合成装置,其特殊之处在于:包括依次设置的激光光源、分束器、可调滤波功率放大组件、变焦反射镜、衍射光栅、分束镜,以及聚焦透镜和CCD;Based on the above-mentioned spectrum synthesis method, the present invention also provides a spectrum synthesis device, which is special in that it includes a laser light source, a beam splitter, an adjustable filter power amplifying component, a zoom mirror, and a diffraction grating arranged in sequence. , beam splitter, and focusing lens and CCD;

所述激光光源发射宽谱的初始光源;The laser light source emits a broad-spectrum initial light source;

所述分束器将初始光源分为多路种子宽光谱光源;The beam splitter divides the initial light source into multiple seed wide-spectrum light sources;

每一路所述种子宽光谱光源上均设有可调滤波功率放大组件;Each channel of the seed wide-spectrum light source is provided with an adjustable filter power amplifying component;

所述可调滤波功率放大组件包括可调谐滤波器、泵浦合束器、增益光纤;The tunable filter power amplifying component includes a tunable filter, a pump combiner, and a gain fiber;

所述可调谐滤波器的光信号输入端用于接收种子宽光谱光源;The optical signal input end of the tunable filter is used for receiving a seed wide-spectrum light source;

所述泵浦合束器的光信号输入端与可调谐滤波器的光信号输出端连接,其泵浦端连接泵浦源,其光信号输出端与增益光纤的输入端连接;The optical signal input end of the pump beam combiner is connected with the optical signal output end of the tunable filter, the pump end is connected with the pump source, and the optical signal output end is connected with the input end of the gain fiber;

所述增益光纤的输出端连接传输光纤;The output end of the gain fiber is connected to the transmission fiber;

所有传输光纤紧密排列形成光纤阵列;All transmission fibers are closely arranged to form a fiber array;

所述光纤阵列的输出光线被变焦反射镜聚焦在同一焦点;The output light of the optical fiber array is focused at the same focus by the zoom mirror;

所述衍射光栅位于所述焦点处,用于形成光谱合成光束;the diffraction grating is located at the focal point for forming a spectrally combined beam;

所述分束镜将光谱合成光束分为反射光和透射光;The beam splitter divides the spectrally combined beam into reflected light and transmitted light;

所述反射光入射至功率计或目标靶面;The reflected light is incident on the power meter or the target surface;

所述透射光经聚焦透镜聚焦后入射至CCD;The transmitted light is incident on the CCD after being focused by the focusing lens;

所述CCD位于聚焦透镜的焦点处,并与所述可调谐滤波器的电信号反馈端连接,用于对聚焦后的光束进行成像,并将成像信息反馈至可调谐滤波器。The CCD is located at the focal point of the focusing lens, and is connected to the electrical signal feedback end of the tunable filter for imaging the focused beam and feeding back the imaging information to the tunable filter.

进一步地,所述分束镜的反射率为99.9%。Further, the reflectivity of the beam splitter is 99.9%.

进一步地,还包括反射镜;所述反射镜位于分束镜与聚焦透镜之间,用于将透射光反射至聚焦透镜。Further, a reflector is also included; the reflector is located between the beam splitter and the focusing lens, and is used for reflecting the transmitted light to the focusing lens.

进一步地,所述衍射光栅为棱镜或透射光栅或反射光栅。Further, the diffraction grating is a prism, a transmission grating or a reflection grating.

进一步地,所述激光光源为宽谱超荧光光源。Further, the laser light source is a broad-spectrum super-fluorescence light source.

本发明的有益效果是:The beneficial effects of the present invention are:

1.本发明的光谱合成方法及装置能够在有限空间内实现数十路甚至上百路的光谱合成,并且通过建立实时反馈控制系统,克服温度、湿度、抖动等外界因素造成的光束质量劣化,保证光谱合成的作用效果。1. The spectral synthesis method and device of the present invention can realize the spectral synthesis of dozens of channels or even hundreds of channels in a limited space, and by establishing a real-time feedback control system, the beam quality degradation caused by external factors such as temperature, humidity, and jitter can be overcome, Guarantee the effect of spectral synthesis.

2.本发明在分束镜与聚焦透镜之间还设置了反射镜,使得各个光学器件的空间设置更合理,可以减小占用空间。2. In the present invention, a reflecting mirror is further arranged between the beam splitter and the focusing lens, so that the space setting of each optical device is more reasonable and the occupied space can be reduced.

附图说明Description of drawings

图1是本发明一种光谱合成装置的结构示意图。FIG. 1 is a schematic structural diagram of a spectral synthesis device of the present invention.

附图说明:Description of drawings:

1-激光光源,2-分束器,3-可调谐滤波器,4-泵浦合束器,5-增益光纤,6-光纤阵列,7-变焦反射镜,8-衍射光栅,9-光谱合成光束,10-分束镜,11-功率计,12-透射光,13-反射镜,14-聚焦透镜,15-CCD,17-泵浦源。1-laser source, 2-beamsplitter, 3-tunable filter, 4-pump combiner, 5-gain fiber, 6-fiber array, 7-zoom mirror, 8-diffraction grating, 9-spectrum Combined beam, 10-beam splitter, 11-power meter, 12-transmitted light, 13-reflector, 14-focusing lens, 15-CCD, 17-pump source.

具体实施方式Detailed ways

为使本发明的目的、优点和特征更加清楚,以下结合附图和具体实施例对本发明提出的一种光谱合成方法及装置作进一步详细说明。根据下面具体实施方式,本发明的优点和特征将更清楚。需要说明的是:附图均采用非常简化的形式且均使用非精准的比例,仅用以方便、明晰地辅助说明本发明实施例的目的;其次,附图所展示的结构往往是实际结构的一部分。In order to make the objectives, advantages and features of the present invention clearer, a spectral synthesis method and apparatus proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following detailed description. It should be noted that: the accompanying drawings are all in a very simplified form and use inaccurate scales, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention; secondly, the structures shown in the accompanying drawings are often actual structures. part.

本发明的工作原理为:采用可调谐技术分割宽谱超荧光光源,实现上百路种子激光分割,并通过可调滤波功率放大组件实现上千瓦窄线宽光纤激光输出,后通过衍射光栅和密集的光纤阵列实现光谱合成,并分一部分光作为参考光,通过前段可调谐技术进行光谱变换,实现最终反馈控制建立,保证最终的光束质量。The working principle of the present invention is as follows: adopting tunable technology to divide the wide-spectrum super-fluorescence light source, realizing the division of hundreds of seed lasers, and realizing the output of the fiber laser with a narrow linewidth of thousands of kilowatts through the adjustable filter power amplifying component, and then passing through the diffraction grating and dense The optical fiber array realizes spectral synthesis, and divides a part of the light as the reference light, performs spectral transformation through the front-end tunable technology, realizes the establishment of final feedback control, and ensures the final beam quality.

一种光谱合成装置,如图1所示,包括依次设置的激光光源1、分束器2、可调滤波功率放大组件、变焦反射镜7、衍射光栅8、分束镜10,以及反射镜13、聚焦透镜14和CCD 15;A spectral synthesis device, as shown in FIG. 1 , includes a laser light source 1, a beam splitter 2, an adjustable filter power amplifier assembly, a zoom mirror 7, a diffraction grating 8, a beam splitter 10, and a mirror 13 arranged in sequence , focusing lens 14 and CCD 15;

该激光光源1为宽谱超荧光光源,宽谱超荧光光源发射宽谱的初始光源;分束器2将初始光源分为多路种子宽光谱光源;每一路种子宽光谱光源上均设有可调滤波功率放大组件;可调滤波功率放大组件包括可调谐滤波器3、泵浦合束器4、增益光纤5;可调谐滤波器3的光信号输入端用于接收种子宽光谱光源;泵浦合束器4的光信号输入端与可调谐滤波器3的光信号输出端连接,其泵浦端连接泵浦源17,其光信号输出端与增益光纤5的输入端连接;增益光纤5的输出端连接传输光纤。The laser light source 1 is a broad-spectrum super-fluorescence light source, and the broad-spectrum super-fluorescence light source emits a broad-spectrum initial light source; the beam splitter 2 divides the initial light source into multiple seed broad-spectrum light sources; The tunable filter power amplifier assembly; the tunable filter power amplifier assembly includes a tunable filter 3, a pump beam combiner 4, and a gain fiber 5; the optical signal input end of the tunable filter 3 is used to receive a seed wide-spectrum light source; the pump The optical signal input end of the beam combiner 4 is connected with the optical signal output end of the tunable filter 3, its pump end is connected with the pump source 17, and its optical signal output end is connected with the input end of the gain fiber 5; The output end is connected to the transmission fiber.

所有传输光纤紧密排列通过光纤阵列夹具夹持整体形成光纤阵列6;光纤阵列6的输出光线被变焦反射镜7聚焦在同一焦点;衍射光栅8位于焦点处,用于形成光谱合成光束9;该衍射光栅8为棱镜或透射光栅或反射光栅。分束镜10将光谱合成光束9分为反射光和透射光12;该分束镜10的反射率为99.9%;分束后的反射光入射至功率计11或目标靶面;透射光12先经过反射镜13反射,而后到达聚焦透镜14,经聚焦透镜14聚焦后入射至CCD 15;CCD15位于聚焦透镜14的焦点处,并与可调谐滤波器3的电信号反馈端连接,用于对聚焦后的光束进行成像,并将成像信息反馈至可调谐滤波器3。All the transmission fibers are tightly arranged and clamped by the fiber array clamp to form the fiber array 6 as a whole; the output light of the fiber array 6 is focused at the same focal point by the zoom mirror 7; The grating 8 is a prism or a transmission grating or a reflection grating. The beam splitter 10 divides the spectrally combined beam 9 into reflected light and transmitted light 12; the reflectivity of the beam splitter 10 is 99.9%; the split reflected light is incident on the power meter 11 or the target surface; the transmitted light 12 first After being reflected by the reflecting mirror 13, it reaches the focusing lens 14, and is incident on the CCD 15 after being focused by the focusing lens 14; The resulting beam is imaged, and the imaging information is fed back to the tunable filter 3 .

该光谱合成装置的工作过程如下:The working process of the spectral synthesis device is as follows:

步骤1)宽谱的超荧光光源的出射光通过分束器2实现数十路或者上百路种子宽光谱光源;Step 1) The outgoing light of the wide-spectrum super-fluorescent light source is passed through the beam splitter 2 to realize dozens or hundreds of seed wide-spectrum light sources;

步骤2)每一路种子宽光谱光源上设置一个可调谐滤波器3,可调谐滤波器3对单路种子宽光谱光源进行波长调谐,形成窄线宽光源;该可调谐滤波器3还可以由空间调谐装置代替,主要用于实现小功率单路不同光谱输出,同时能够对每路的光谱进行调整,以实现后续的反馈控制;Step 2) A tunable filter 3 is set on each channel of seed wide spectral light source, and the tunable filter 3 performs wavelength tuning on the single channel seed wide spectral light source to form a narrow linewidth light source; this tunable filter 3 can also be composed of space Instead of tuning device, it is mainly used to realize low-power single-channel different spectral output, and at the same time, it can adjust the spectrum of each channel to realize subsequent feedback control;

步骤3)单路不同光谱输出光线通过泵浦合束器4和增益光纤5实现单路窄线宽光源的功率放大,放大功率可到数千瓦;Step 3) The single-channel different spectral output light realizes the power amplification of the single-channel narrow linewidth light source through the pump beam combiner 4 and the gain fiber 5, and the amplified power can reach several kilowatts;

步骤4)所有放大后的不同光谱通过密集排列形成光纤阵列6并输出;Step 4) All amplified different spectra are densely arranged to form an optical fiber array 6 and output;

步骤5)各路输出的激光通过变焦反射镜7实现对各路光束的准直并整体聚焦,使所有光束都聚焦在一个焦点;Step 5) The laser beams output by each channel are collimated and focused on the beams of each channel through the zoom mirror 7, so that all beams are focused in one focus;

步骤6)在焦点的位置放置衍射光栅8,该衍射光栅8为棱镜或透射光栅或反射光栅等,根据光栅衍射角度,调节光束与光栅的位置关系,使得多路光谱激光通过衍射光栅8后能够形成最佳的光谱合成光束9;Step 6) Place the diffraction grating 8 at the focal point. The diffraction grating 8 is a prism, a transmission grating or a reflection grating, etc. According to the diffraction angle of the grating, the positional relationship between the light beam and the grating is adjusted, so that the multi-channel spectral laser can pass through the diffraction grating 8. form the best spectrally synthesized beam 9;

步骤7)光谱合成光束9通过一个反射率为99.9%的分束镜10,大部分反射光照射到功率计11或目标靶面,少部分透射光12经过反射镜13被聚焦透镜14聚焦,CCD 15放置于聚焦透镜14的焦点处,光谱合成光束效果在CCD 15上显示合成效果;合成效果通过反馈控制传递到可调谐滤波器3上,对输入的每一路种子宽光谱光源进行实时调整,以达到最佳光谱合成效果。Step 7) The spectrally synthesized beam 9 passes through a beam splitter 10 with a reflectivity of 99.9%, most of the reflected light irradiates the power meter 11 or the target surface, and a small part of the transmitted light 12 is focused by the focusing lens 14 through the reflector 13, and the CCD 15 is placed at the focal point of the focusing lens 14, and the spectral synthesis beam effect is displayed on the CCD 15; To achieve the best spectral synthesis effect.

Claims (10)

1.一种光谱合成方法,其特征在于,包括以下步骤:1. a spectral synthesis method, is characterized in that, comprises the following steps: 步骤1)将初始光源分束为多路种子宽光谱光源;Step 1) splitting the initial light source into multiple seed wide-spectrum light sources; 步骤2)对每一路种子宽光谱光源进行波长调谐,形成窄线宽光源;Step 2) wavelength tuning is performed on each seed wide spectral light source to form a narrow linewidth light source; 步骤3)对每一路窄线宽光源进行功率放大;Step 3) amplifying the power of each narrow linewidth light source; 步骤4)将功率放大后的多路窄线宽光源进行密集排列形成光纤阵列;Step 4) densely arranging the multiple narrow linewidth light sources after power amplification to form an optical fiber array; 步骤5)对光纤阵列中的各路光束进行准直并整体聚焦,使所有光束都聚焦在一个焦点;Step 5) collimating and focusing the light beams of each path in the fiber array as a whole, so that all the light beams are focused on one focal point; 步骤6)在焦点处进行光路合成,形成光谱合成光束;Step 6) performing optical path synthesis at the focal point to form a spectrally synthesized beam; 步骤7)将光谱合成光束进行分束,形成反射光和透射光;Step 7) splitting the spectrally synthesized beam to form reflected light and transmitted light; 所述反射光输入至功率计或目标靶面;The reflected light is input to the power meter or the target surface; 所述透射光进行聚焦后成像,根据成像效果控制步骤2)的调谐波长,从而控制反射光输出的光束质量。The transmitted light is imaged after being focused, and the tuning wavelength in step 2) is controlled according to the imaging effect, so as to control the beam quality of the reflected light output. 2.根据权利要求1所述的一种光谱合成方法,其特征在于:2. a kind of spectral synthesis method according to claim 1, is characterized in that: 步骤1)中所述初始光源为宽谱超荧光光源。The initial light source in step 1) is a broad-spectrum hyperfluorescence light source. 3.根据权利要求1或2所述的一种光谱合成方法,其特征在于:3. a kind of spectral synthesis method according to claim 1 and 2, is characterized in that: 步骤7)中的所述反射光占所述合成光路的99%以上。The reflected light in step 7) accounts for more than 99% of the combined light path. 4.根据权利要求3所述的一种光谱合成方法,其特征在于:4. a kind of spectral synthesis method according to claim 3, is characterized in that: 步骤3)中所述每一路窄线宽光源均依次通过泵浦合束器、放大级增益光纤对其进行功率放大。The power of each narrow linewidth light source in step 3) is sequentially amplified by the pump combiner and the gain fiber of the amplifier stage. 5.根据权利要求4所述的一种光谱合成方法,其特征在于:5. a kind of spectral synthesis method according to claim 4, is characterized in that: 步骤7)中所述透射光通过聚焦透镜进行聚焦后入射至CCD进行成像。The transmitted light in step 7) is focused by the focusing lens and then incident on the CCD for imaging. 6.一种基于权利要求1至5任一所述光谱合成方法的光谱合成装置,其特征在于:包括依次设置的激光光源(1)、分束器(2)、可调滤波功率放大组件、变焦反射镜(7)、衍射光栅(8)、分束镜(10),以及聚焦透镜(14)和CCD(15);6. A spectral synthesizing device based on any of the described spectral synthesizing methods of claims 1 to 5, characterized in that: comprising a laser light source (1), a beam splitter (2), an adjustable filter power amplifying assembly, a zoom mirror (7), a diffraction grating (8), a beam splitter (10), and a focusing lens (14) and a CCD (15); 所述激光光源(1)发射宽谱的初始光源;The laser light source (1) emits a broad-spectrum initial light source; 所述分束器(2)将初始光源分为多路种子宽光谱光源;The beam splitter (2) divides the initial light source into multiple seed-broad spectrum light sources; 每一路所述种子宽光谱光源上均设有可调滤波功率放大组件;Each channel of the seed wide-spectrum light source is provided with an adjustable filter power amplifying component; 所述可调滤波功率放大组件包括可调谐滤波器(3)、泵浦合束器(4)、增益光纤(5);The tunable filtering power amplifying assembly includes a tunable filter (3), a pumping combiner (4), and a gain fiber (5); 所述可调谐滤波器(3)的光信号输入端用于接收种子宽光谱光源;The optical signal input end of the tunable filter (3) is used for receiving a seed wide-spectrum light source; 所述泵浦合束器(4)的光信号输入端与可调谐滤波器(3)的光信号输出端连接,其泵浦端连接泵浦源(17),其光信号输出端与增益光纤(5)的输入端连接;The optical signal input end of the pump beam combiner (4) is connected to the optical signal output end of the tunable filter (3), the pump end is connected to the pump source (17), and the optical signal output end is connected to the gain fiber (5) input terminal connection; 所述增益光纤(5)的输出端连接传输光纤;The output end of the gain fiber (5) is connected to the transmission fiber; 所有传输光纤紧密排列形成光纤阵列(6);All transmission fibers are closely arranged to form a fiber array (6); 所述光纤阵列(6)的输出光线被变焦反射镜(7)聚焦在同一焦点;The output light of the optical fiber array (6) is focused at the same focus by the zoom mirror (7); 所述衍射光栅(8)位于所述焦点处,用于形成光谱合成光束(9);the diffraction grating (8) is located at the focal point for forming a spectrally combined beam (9); 所述分束镜(10)将光谱合成光束(9)分为反射光和透射光(12);The beam splitter (10) divides the spectrally combined beam (9) into reflected light and transmitted light (12); 所述反射光入射至功率计(11)或目标靶面;The reflected light is incident on the power meter (11) or the target surface; 所述透射光(12)经聚焦透镜(14)聚焦后入射至CCD(15);The transmitted light (12) is incident on the CCD (15) after being focused by the focusing lens (14); 所述CCD(15)位于聚焦透镜(14)的焦点处,并与所述可调谐滤波器(3)的电信号反馈端连接,用于对聚焦后的光束进行成像,并将成像信息反馈至可调谐滤波器(3)。The CCD (15) is located at the focal point of the focusing lens (14), and is connected to the electrical signal feedback end of the tunable filter (3) for imaging the focused beam and feeding back the imaging information to the Tunable filter (3). 7.根据权利要求6所述的一种光谱合成装置,其特殊之处在于:7. a kind of spectral synthesis device according to claim 6, its special feature is: 所述分束镜(10)的反射率为99.9%。The reflectivity of the beam splitter (10) is 99.9%. 8.根据权利要求6或7所述的一种光谱合成装置,其特殊之处在于:8. a kind of spectral synthesis device according to claim 6 or 7, its special feature is: 还包括反射镜(13);所述反射镜(13)位于分束镜(10)与聚焦透镜(14)之间,用于将透射光(12)反射至聚焦透镜(14)。It also includes a reflector (13); the reflector (13) is located between the beam splitter (10) and the focusing lens (14) for reflecting the transmitted light (12) to the focusing lens (14). 9.根据权利要求8所述的一种光谱合成装置,其特殊之处在于:9. a kind of spectral synthesis device according to claim 8, its special feature is: 所述衍射光栅(8)为棱镜或透射光栅或反射光栅。The diffraction grating (8) is a prism or a transmission grating or a reflection grating. 10.根据权利要求9所述的一种光谱合成装置,其特殊之处在于:10. a kind of spectral synthesis device according to claim 9, its special feature is: 所述激光光源(1)为宽谱超荧光光源。The laser light source (1) is a broad-spectrum super-fluorescence light source.
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