CN111693410A - Automatic searching and positioning device and method for micron-sized particle samples - Google Patents
Automatic searching and positioning device and method for micron-sized particle samples Download PDFInfo
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- CN111693410A CN111693410A CN202010681911.0A CN202010681911A CN111693410A CN 111693410 A CN111693410 A CN 111693410A CN 202010681911 A CN202010681911 A CN 202010681911A CN 111693410 A CN111693410 A CN 111693410A
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- 239000002245 particle Substances 0.000 title claims abstract description 32
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 105
- 238000012360 testing method Methods 0.000 claims abstract description 45
- 238000012545 processing Methods 0.000 claims abstract description 40
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 239000011859 microparticle Substances 0.000 claims abstract description 13
- 239000000523 sample Substances 0.000 claims description 138
- 230000003287 optical effect Effects 0.000 claims description 10
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- 238000011056 performance test Methods 0.000 claims description 7
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- 239000011521 glass Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
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- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
The invention discloses a micron-sized particle sample automatic searching and positioning device and a method, wherein the device comprises a single-channel video microscope unit, a digital image processing unit, a multi-dimensional electric control displacement carrying platform and a programmable electric control displacement driving unit, and is used for automatically searching for a proper micro-particle sample so as to test the required performance of the searched micro-particle sample by matching with other modules on a main testing instrument; the automatic searching and positioning method for the micron-sized particle sample realizes scanning type automatic sample searching along the traversal path, and carries out online real-time measurement in a mode of finding, measuring and continuously searching, thereby greatly improving the detection efficiency.
Description
Technical Field
The invention relates to the technical field of microscopic measurement, in particular to an automatic searching and positioning device for a micron-sized particle sample, which is used for searching and positioning the micron-sized particle sample and is matched with a main testing instrument to perform corresponding sample performance testing.
Background
With the development of nano material science, various materials and products presented in micron-sized particles are continuously emerging. The mechanical property data of the microparticles have a decisive influence on the production process and the use. The existing micro-particle mechanical performance measuring instrument is manually operated or is matched with a multi-angle image system to carry out semi-off-line automatic detection in a sample searching and selecting mode, so that the efficiency is low and the process is complex.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides the automatic searching and positioning device and the automatic searching and positioning method for the micron-sized particle samples, so that the micron-sized particle samples can be efficiently and automatically searched and positioned, the corresponding sample performance test can be carried out by matching with a main test instrument, and the test efficiency is improved.
The invention adopts the following technical scheme for solving the technical problems:
the invention relates to a device for automatically searching and positioning micron-sized particle samples, which is characterized by comprising: the system comprises a single-channel video microscope unit, a digital image processing unit, a multi-dimensional electric control displacement carrying platform and a programmable electric control displacement driving unit, wherein the single-channel video microscope unit, the digital image processing unit, the multi-dimensional electric control displacement carrying platform and the programmable electric control displacement driving unit are used for automatically searching for a proper microparticle sample so as to be matched with other modules on a main testing instrument to test the performance of the searched microparticle sample;
the single-channel video microscope unit is provided with a digital video image output component and is used for observing an image of a sample possibly existing on the surface of a sample slide at a side-viewing angle; and outputting image data by the digital video image output section; the images are real-time video image sequences; the side-view angle refers to that the optical axis of the single-channel video microscope unit is perpendicular to a straight line A at the initial position matched with the main testing instrument for measurement, and the straight line A is a straight line on which a connecting line between the central point of the probe on the main testing instrument and the central point of the selected sample is located;
the digital image processing unit comprises a digital video image receiving component and an image processing component, wherein the video image receiving component is used for receiving the image data, and the image processing component is used for obtaining the correlation data of various objects contained in the image by processing the image data; judging whether the corresponding target is of the required sample type according to the correlation data, and judging whether the corresponding target is required to be used for carrying out corresponding mechanical performance test; selecting a target of a required type, selecting a target required to be used for carrying out a corresponding mechanical performance test, and removing dust, sample fragments, special-shaped samples and interference targets which are not in a range required to be tested;
the multi-dimensional electric control displacement carrying platform is used for arranging a sample slide, and the sample slide is not limited to be arranged horizontally;
the programmable electric control displacement driving unit is provided with a programmable multi-dimensional displacement control component, and under the control of the programmable multi-dimensional displacement control component, the programmable electric control displacement driving unit is used for driving the multi-dimensional electric control displacement carrying platform to drive the sample carrying plate to carry out ordered displacement, wherein the ordered displacement is ordered spatial displacement in a three-dimensional space.
The automatic searching and positioning device for the micron-sized particle sample is also characterized in that the correlation data of various targets obtained by the image processing part in the digital image processing unit comprises: the sharpness evaluation index data of the sample, the position of the sample in the image, the shape and size of the sample, set according to the optical characteristics of the different types of samples, also include other additional data extracted as needed for the specificity of the particular sample.
The automatic searching and positioning device for the micron-sized particle sample is also characterized in that the single-channel video microscope unit comprises:
the microscope can be manually focused and electrically focused, and an objective lens arranged at the front end of the microscope can be replaced according to requirements;
the lens bracket is used for fixedly supporting the microscope;
the digital video camera is fixedly arranged at the tail optical output end of the microscope;
the automatic searching and positioning device for the micron-sized particle samples is also characterized in that the lens support is an adjustable support, and the adjustable support is utilized to drive the microscope to enable the single-channel video microscope unit to be at a set side view angle.
The automatic searching and positioning device for the micron-sized particle samples is also characterized in that the multi-dimensional electric control displacement platform deck is provided with a multi-dimensional electric control displacement device, and the multi-dimensional electric control displacement device is utilized to drive a sample slide glass arranged on the multi-dimensional electric control displacement device to perform ordered spatial displacement.
The automatic searching and positioning device for micron-sized particle samples is also characterized in that the multi-dimensional electric control displacement carrying platform drives the sample slide to perform ordered spatial displacement, namely: the programmable multi-dimensional displacement control component drives a multi-dimensional electric control displacement device in the multi-dimensional electric control displacement carrying platform according to a selected traversal path, different parts of a sample slide are sequentially moved into the field depth range of a microscopic field of view, the image processing component synchronously obtains current field of view information data, the current field of view information data is used as a feedback signal, and the programmable multi-dimensional displacement control component finely adjusts the position of the multi-dimensional electric control displacement carrying platform according to the feedback signal, so that a searched sample meeting the requirements of a main testing instrument is positioned at a measuring position, and automatic searching and positioning of a micron-sized particle sample are completed.
The automatic searching and positioning method for the micron-sized particle sample is characterized in that the automatic searching and positioning device for the micron-sized particle sample is adopted, and the method comprises the following steps:
and step 170, ending the measurement process.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, by utilizing the microscopic measurement and high-precision displacement control technology, the functions of high-efficiency automatic searching and positioning of a micro-particle sample through a single-channel video microscope system are realized according to the characteristics that the definition of target optical imaging under a microscope is highly related to the target defocusing degree and is extremely sensitive, and the complex structure and process of sample positioning by adopting the cooperation of a multi-channel video microscope system in the prior art are greatly simplified.
2. The invention is provided with the programmable electric control displacement driving unit which is used for driving the multi-dimensional electric control displacement carrying platform to drive the sample carrying plate to displace in order, provides a high-efficiency automatic sample searching and positioning module for the main measuring instrument, realizes the scanning type automatic sample searching along the traversal path, carries out online real-time measurement in a mode of finding, measuring and continuing to search, and greatly improves the detection efficiency.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a schematic top view of the microscope in relation to the sample and sample slide of the present invention;
FIG. 3 is a schematic diagram of the result of extracting image information of a sample obtained by the present invention;
FIG. 4 is a schematic diagram of the finding and positioning process of the apparatus of the present invention;
reference numbers in the figures: 1 single channel video microscope device, 2 digital image processing unit, 3 automatically controlled displacement microscope stages of multidimension degree, 4 automatically controlled displacement drive unit able to programme, 5 microscopes, 6 lens support, 7 digital video camera, 8 objective, 9 automatically controlled displacement control parts of multidimension degree, 10 automatically controlled displacement device of multidimension degree, 11 sample slide, the sample in 12 fields of view, 13 focal planes, 14 samples outside the field of view, 15 sample slide moving direction, 16 sample rubber balls, the central line position of 17 sample slide upper surface and sample rubber ball contact, 18 sample reflection image, 19 sample marks, 20 side view sample slide moving direction.
Detailed Description
Referring to fig. 1, the automatic searching and positioning device for micron-sized particle samples in the present embodiment includes: the device comprises a single-channel video microscope unit 1, a digital image processing unit 2, a multi-dimensional electric control displacement carrying platform 3 and a programmable electric control displacement driving unit 4, and is used for automatically searching for a proper microparticle sample so as to test the performance of the searched microparticle sample by matching with other modules on a main testing instrument.
In this embodiment, the single-channel video microscope unit 1 has a digital video image output section for observing an image of a sample possibly existing on the surface of the sample slide 11 at a side view angle; and outputting the image data by the digital video image output part; the image is a real-time video image sequence; the side-view angle refers to the fact that in the initial position where measurement is carried out in cooperation with the main testing instrument, the optical axis of the single-channel video microscope unit 1 is perpendicular to a straight line A, and the straight line A is a straight line where a connecting line between the central point of the probe on the main testing instrument and the central point of the selected sample is located.
The digital image processing unit 2 includes a digital video image receiving section for receiving image data and an image processing section for obtaining correlation data of various objects contained in an image by processing the image data; judging whether the corresponding target is of the required sample type according to the correlation data, and judging whether the corresponding target is required to be used for carrying out corresponding mechanical performance test; and then selecting a target of a required type, selecting a target required for carrying out a corresponding mechanical performance test, and rejecting interference targets comprising dust, sample fragments, special-shaped samples and interference targets which are not in a range required to be tested.
The multi-dimensional electric control displacement carrying platform 3 is used for arranging the sample slide 11, and the sample slide 11 is not limited to be arranged horizontally; the programmable electric control displacement driving unit 4 is provided with a programmable multi-dimensional displacement control component 9, and under the control of the programmable multi-dimensional displacement control component 9, the programmable electric control displacement driving unit 4 is used for driving the multi-dimensional electric control displacement carrying platform 3 to drive the sample carrying plate 11 to carry out ordered displacement, wherein the ordered displacement is ordered spatial displacement in a three-dimensional space.
The correlation data of various objects obtained by the image processing section in the digital image processing unit 2 includes: the sharpness evaluation index data of the sample, the position of the sample in the image, the shape and size of the sample, set according to the optical characteristics of the different types of samples, also include other additional data extracted as needed for the specificity of the particular sample.
In specific implementation, the corresponding technical measures also include:
the single-channel video microscope unit 1 includes:
a microscope 5 can be manually focused and electrically focused, and an objective lens 8 arranged at the front end of the microscope 5 can be replaced as required;
a lens holder 6 is used for fixedly supporting the microscope 5, the lens holder 6 is an adjustable holder, and the adjustable holder is utilized to drive the microscope 5 to enable the single-channel video microscope unit 1 to be at a set side viewing angle.
A digital video camera 7 is fixedly arranged at the tail optical output end of the microscope 5;
the multi-dimensional electric control displacement platform 3 is provided with a multi-dimensional electric control displacement device 10, and the multi-dimensional electric control displacement device 10 is utilized to drive a sample slide 11 arranged on the multi-dimensional electric control displacement device 10 to carry out ordered spatial displacement; the multi-dimensional electric control displacement carrying platform 3 drives the sample slide 11 to perform ordered spatial displacement refers to: the programmable multi-dimensional displacement control component 9 drives the multi-dimensional electric control displacement device 10 in the multi-dimensional electric control displacement carrying platform 3 according to the selected traversal path, different parts of the sample slide 11 are sequentially moved into the depth of field range of the microscopic field, the image processing component synchronously obtains current field information data, the current field information data is used as a feedback signal, and the programmable multi-dimensional displacement control component 9 finely adjusts the position of the multi-dimensional electric control displacement carrying platform 3 according to the feedback signal, so that the searched sample meeting the requirements of a main testing instrument is positioned at a measuring position, and the automatic searching and positioning of the micron-sized particle sample are completed.
The relevant contents shown in the drawings include:
as shown in fig. 1, a sample slide 11 carrying a sample of minute particles to be measured is placed on the multi-dimensional electrically controlled displacement stage 3, and an objective lens 8 located at the front end of the microscope 5 is located at one side of the sample slide 11, so that the microscope 5 can observe the sample of minute particles on the sample slide 11 at a side view angle.
Fig. 2 is a schematic top view of the microscope 5, the sample slide 11, and the fine particle sample on the sample slide 11, in which the programmable electrically controlled displacement driving device 4 drives the multi-dimensional electrically controlled displacement stage 3 to sequentially move the corresponding region of the sample slide 11 carrying the fine particle sample into the field of view of the microscope 5 according to the movement path of the sample slide 11 set for the sample to be measured; the digital image processing equipment 2 receives the sample image and judges whether a micro particle sample exists in a field of view in real time, and aiming at the possible micro particle sample, the multi-dimensional electric control displacement carrying platform 3 is finely adjusted to enable the sample image to be in a definition index range meeting the requirement; the digital image processing device 2 is again used to obtain various required evaluation data including the sharpness index, relative position, shape, size, etc. of the fine particle sample by analyzing the sample image satisfying the requirement, and fig. 2 shows the moving direction 15 of the sample slide, the sample 14 outside the field of view, the sample 12 inside the field of view, the objective lens 8, the sample slide 11, the focal plane 13, and the current depth of field range, where the focal plane 13 at the near-middle position is illustrated by a solid line, and the current depth of field range is illustrated by a dotted line.
Fig. 3 shows the side view sample image and the sample size information extraction result, and fig. 3 shows the moving direction 20 of the side view sample slide, the sample rubber ball 16, the center line position 17 of the upper surface of the sample slide contacting the sample rubber ball, the sample reflection image 18 reflected by the upper surface of the sample slide 11 made of glass, and the identified sample mark 19.
Fig. 4 shows a schematic flow of the finding and positioning process of the device of the present invention, which is performed according to the following steps:
and step 170, ending the measurement process.
By micro-sized particles it is meant particles having a maximum dimension of between 1 micron and 1 mm, formed from any biological or non-biological material, regular or irregular in shape, solid, hollow, porous, clustered, microcrystalline, aerosol, animal or plant cells and other various structural forms, including various gases, liquids or solids, processed through a micro-packaging process.
Regarding definition and ambiguity, under the condition of neglecting various distortions of a microscope lens, when an object with infinitesimal thickness is positioned on a focusing focal plane of a microscope, defining the definition of an image at the output end of the microscope as 1 and the ambiguity as 0; at infinity, its sharpness is 0 and its ambiguity is 1; because there is no target with infinitesimal thickness, the definition or ambiguity of any target image recorded by a camera installed at the output end of the microscope and with a non-negligible surface relief structure, or even the definition or ambiguity of the image of the whole field of view, is the average of the ideal definitions or ambiguities of different parts of the image under a certain averaging algorithm; according to the difference of the concerned objects and the needs, the local definition and the global definition, and the relation between the local definition and the global definition is determined according to the specific needs; the definition evaluation index is selected according to the difference of optical characteristics of different sample types under a microscope; on the basis of integrating other information of the sample, the most suitable definition index range is found to be used as a sample evaluation basis, the best position in the invention is the position of a microscope focus plane, and the definition index nearby is most sensitive to position change and is the most suitable position for evaluating the sample.
Claims (7)
1. An automatic searching and positioning device for micron-sized particle samples, which is characterized by comprising: the system comprises a single-channel video microscope unit (1), a digital image processing unit (2), a multi-dimensional electric control displacement carrying platform (3) and a programmable electric control displacement driving unit (4), wherein the single-channel video microscope unit is used for automatically searching for a proper microparticle sample so as to test the performance of the searched microparticle sample by matching with other modules on a main testing instrument;
the single-channel video microscope unit (1) is provided with a digital video image output component for observing an image of a sample possibly existing on the surface of a sample slide (11) at a side view angle; and outputting image data by the digital video image output section; the images are real-time video image sequences; the side-view angle refers to that the optical axis of the single-channel video microscope unit (1) is perpendicular to a straight line A at the initial position matched with the main testing instrument for measurement, and the straight line A is a straight line on which a connecting line between the central point of the probe on the main testing instrument and the central point of the selected sample is located;
the digital image processing unit (2) comprises a digital video image receiving part and an image processing part, wherein the video image receiving part is used for receiving the image data, and the image processing part is used for obtaining the correlation data of various objects contained in the image by processing the image data; judging whether the corresponding target is of the required sample type according to the correlation data, and judging whether the corresponding target is required to be used for carrying out corresponding mechanical performance test; selecting a target of a required type, selecting a target required to be used for carrying out a corresponding mechanical performance test, and removing dust, sample fragments, special-shaped samples and interference targets which are not in a range required to be tested;
the multi-dimensional electric control displacement carrying platform (3) is used for arranging a sample slide (11), and the sample slide (11) is not limited to be arranged horizontally;
the programmable electric control displacement driving unit (4) is provided with a programmable multi-dimensional displacement control component (9), and under the control of the programmable multi-dimensional displacement control component (9), the programmable electric control displacement driving unit (4) is used for driving the multi-dimensional electric control displacement carrying platform (3) to drive the sample slide (11) to perform ordered displacement, wherein the ordered displacement is ordered spatial displacement in a three-dimensional space.
2. The apparatus for automatically searching and locating micrometer-sized particle samples according to claim 1, wherein the correlation data of various targets obtained by the image processing means in the digital image processing unit (2) comprises: the sharpness evaluation index data of the sample, the position of the sample in the image, the shape and size of the sample, set according to the optical characteristics of the different types of samples, also include other additional data extracted as needed for the specificity of the particular sample.
3. The automatic searching and positioning device for micron-sized particle samples according to claim 1, wherein the single-channel video microscope unit (1) comprises:
a microscope (5) capable of manual focusing and electric focusing, wherein an objective lens (8) installed at the front end of the microscope (5) can be replaced as required;
a lens holder (6) for fixedly supporting the microscope (5);
and the digital video camera (7) is fixedly arranged at the tail optical output end of the microscope (5).
4. The automatic searching and positioning device for micron-sized particle samples according to claim 3, wherein the lens holder (6) is an adjustable holder, and the microscope (5) is driven by the adjustable holder to enable the single-channel video microscope unit (1) to be at a set side view angle.
5. The automatic searching and positioning device for micron-sized particle samples according to claim 1, wherein the multi-dimensional electrically-controlled displacement carrying platform (3) is provided with a multi-dimensional electrically-controlled displacement device (10), and the multi-dimensional electrically-controlled displacement device (10) is utilized to drive a sample slide (11) arranged on the multi-dimensional electrically-controlled displacement device (10) to perform ordered spatial displacement.
6. The automatic searching and positioning device for micron-sized particle samples according to claim 5, wherein the multi-dimensional electrically-controlled displacement carrying platform (3) drives the sample slide (11) to perform ordered spatial displacement refers to: the programmable multi-dimensional displacement control component (9) drives a multi-dimensional electric control displacement device (10) in the multi-dimensional electric control displacement carrying platform (3) according to a selected traversal path, different positions of a sample slide (11) are sequentially moved into the depth of field range of a microscopic field, the image processing component synchronously obtains current field information data and uses the current field information data as a feedback signal, and the programmable multi-dimensional displacement control component (9) finely adjusts the position of the multi-dimensional electric control displacement carrying platform (3) according to the feedback signal so that a searched sample meeting the requirements of a main testing instrument is positioned at a measuring position to finish automatic searching and positioning of micron-sized particle samples.
7. An automatic searching and positioning method for micron-sized particle samples is characterized in that the device as claimed in claim 1 is adopted, and the method is carried out according to the following steps:
step 110, starting an automatic searching and positioning process, driving a multi-dimensional electric control displacement carrying platform (3) to move along a set traversal path by a programmable multi-dimensional displacement control part (9), and simultaneously, synchronously analyzing images sent by a single-channel video microscope device (1) by digital image processing equipment (2);
step 120, automatic fine adjustment is performed, when the digital image processing device (2) detects a pattern which is possibly a sample, a path traversal process is interrupted, and the multi-dimensional electric control displacement carrying platform (3) is finely adjusted to move the target at the position with the optimal definition index;
step 130, extracting characteristic data and judging whether the characteristic data accords with the test condition, extracting the characteristic data by the digital image processing equipment (2) aiming at the current view field, extracting correlation data of various targets selected according to different sample forms, including definition evaluation index data of the sample, the position of the sample in the image, the shape and the size of the sample, judging whether the correlation data accords with the test condition, and returning to the step 110 for continuous searching if the correlation data does not accord with the test condition; if the test condition is satisfied, go to step 140;
step 140, data transmission, namely transmitting the correlation data of various targets extracted in the step 130 to a programmable multi-dimensional displacement control component (9) by the image processing equipment (2);
step 150, automatic measurement, starting an automatic measurement process, moving the selected sample to a preset measurement position by the programmable multi-dimensional displacement control component (9) according to the received information, and informing a main test instrument to start automatic measurement;
step 160, judging whether the testing quantity is finished or not, if the testing quantity is not finished, moving the multi-dimensional electric control displacement carrying platform (3) back to the path traversal position interrupted in the step 120 by the programmable multi-dimensional displacement control part (9), and returning to the step 110 to continue the traversal search of the subsequent path; if the number of tests is complete, go to step 170;
and step 170, ending the measurement process.
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