CN111650743A - Vibrating mirror based on imaging mirror photoelectric angle measurement - Google Patents
Vibrating mirror based on imaging mirror photoelectric angle measurement Download PDFInfo
- Publication number
- CN111650743A CN111650743A CN202010530362.7A CN202010530362A CN111650743A CN 111650743 A CN111650743 A CN 111650743A CN 202010530362 A CN202010530362 A CN 202010530362A CN 111650743 A CN111650743 A CN 111650743A
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- Prior art keywords
- galvanometer
- shaft sleeve
- permanent magnet
- stator
- lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a galvanometer based on photoelectric angle measurement of an imaging mirror. Wherein the hollow cylindrical stator is fixed on the shell of the galvanometer; the cylindrical radial magnet rotor is positioned in a middle cavity of the stator coil, moves in a variable magnetic field generated by the stator and limits the rotation angle of the rotor through a limiting pin; the galvanometer angle sensor is arranged on the side surface of the galvanometer lens, and the rotation angle of the lens is measured in real time through the photoelectric displacement sensor. Through the structure, the vibrating mirror is compact and simple in structure, the production cost is obviously reduced, the rotational inertia of the rotor is greatly reduced, the response rate of the vibrating mirror is improved, and the deflection angle of the lens is directly measured by the sensor, so that the performance test of the vibrating mirror can be directly carried out without the help of external equipment.
Description
Technical Field
The invention belongs to the field of laser processing equipment, relates to a galvanometer, and particularly relates to a moving magnetic galvanometer capable of being used in a laser marking system, an optical scanning system or a similar system.
Background
The laser galvanometer is a high-precision and high-speed optical scanner consisting of a high-speed swing motor, a lens and a position sensor, and is widely applied to the fields of laser marking, laser welding, laser precision cutting, laser micromachining, laser inner carving, laser drilling, material processing, shearing, biomedical detection and projection and the like. In the working process of the laser galvanometer, a laser beam output by the laser device is irradiated on the galvanometer lens, and the processing and forming of the designated position in a certain range are realized through the deflection of the reflecting lens.
In the prior art, capacitive and inductive sensors or encoders are mostly used for position feedback of the galvanometer. The drift of the capacitive inductance type sensor influences the swing precision of the vibrating mirror, and the extra rotation load brought by the encoder for the rotor reduces the swing acceleration of the vibrating mirror. In addition, the traditional position feedback system is often positioned inside the galvanometer, so that the galvanometer has multiple internal parts, complex assembly process and high manufacturing cost.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the vibrating mirror based on the imaging mirror photoelectric angle measurement is provided, on one hand, the structure of the vibrating mirror is greatly simplified, the structure is compact, and meanwhile, the manufacturing cost is reduced; on the other hand, the non-contact sensor is adopted, and the sensor is arranged on one side of the lens, so that the rotational inertia of the rotor is reduced, the response speed of the galvanometer is improved, and meanwhile, the galvanometer can be subjected to performance test independently of other test equipment. The new structural layout mode also provides a new idea for the development of the galvanometer.
The technical scheme adopted by the invention for solving the technical problems is as follows: a galvanometer based on photoelectric angle measurement of an imaging mirror comprises a stator, a rotor rotating relative to the stator, a galvanometer shell and a galvanometer angle sensor;
the stator comprises a hollow cylindrical epoxy resin rod with a coil winding poured inside and a magnetic yoke connected with the epoxy resin rod; the wound coil winding is poured in a space surrounded by the magnet yoke by using epoxy resin, and a hollow cylindrical epoxy resin rod is poured; the rotor comprises a cylindrical radial permanent magnet positioned in a cavity of the stator, an upper shaft sleeve connected with the upper part of the permanent magnet, a lower shaft sleeve connected with the lower part of the permanent magnet, a lens base connected with the upper shaft sleeve, a lens arranged on the lens base, and an upper bearing, a lower bearing, a wave spring and a clamp spring for fixing the position of the rotor; a gap is formed between the cylindrical radial permanent magnet and the resin rod, and the permanent magnet generates a permanent magnet passage; the upper shaft sleeve and the lower shaft sleeve are bonded at two ends of the permanent magnet;
the galvanometer shell comprises a galvanometer middle cylinder, a top cover and a base; the middle cylinder is used for structurally supporting and mounting a galvanometer angle sensor, the stator and the rotor are mounted in the middle cylinder, and the galvanometer angle sensor is positioned on a convex part parallel to the lens at the top of the middle cylinder; the top cover is connected with the middle cylinder through a screw for sealing, and a limiting pin for limiting penetrates through the top cover; the base and the middle cylinder are connected through screws and are positioned at the lowest part of the whole galvanometer to play a role of sealing;
the galvanometer angle sensor comprises a photoelectric displacement sensor and a light source; the installation positions of the two are arranged at the top of the shell and are as high as the central axis of the lens of the galvanometer in the horizontal direction.
Furthermore, the stator coil winding is wound by the same wire into two oval coils with the same size, then is pressed into a tile shape, and is poured on the inner wall of the cylindrical magnet yoke by epoxy resin; the epoxy resin pouring shape is a hollow cylinder with two ends provided with bulges, so that the position between the resin body and the magnet yoke is fixed.
Furthermore, the magnet yoke and the middle cylinder are in interference fit, and are pressed into the middle cylinder by a press machine during assembly.
Furthermore, the permanent magnet in the rotor is a cylindrical radial permanent magnet of Ru Fe B, and the diameter of the cylindrical permanent magnet at two ends is reduced for sleeving the upper shaft sleeve and the lower shaft sleeve.
Furthermore, the upper shaft sleeve and the lower shaft sleeve are hollow cylindrical, and one ends of the upper shaft sleeve and the lower shaft sleeve, which are connected with the permanent magnet, are bonded at the two ends of the permanent magnet by glue.
Furthermore, the upper shaft sleeve and the lower shaft sleeve are respectively provided with a bearing to realize radial positioning between the rotor and the stator; the wave spring and the clamp spring are further mounted on the upper shaft sleeve, and a boss is arranged at the bottommost part of the lower shaft sleeve and used for achieving axial positioning between the rotor and the stator.
Furthermore, two grooves opposite in position are formed in the top of the upper shaft sleeve, two limiting pins penetrate through the grooves and the top cover respectively, and the limiting pins limit the maximum rotation angle of the vibrating mirror to +/-15 degrees.
Further, the lens is adhered to the upper groove of the lens base by using glue.
Furthermore, the position measurement light source is an LED light source with the wavelength of 900 nm.
Further, the photoelectric displacement sensor is a one-dimensional PSD sensor.
The invention has the advantages that:
(1) the invention greatly simplifies the structure of the galvanometer, leads the structure to be compact and simultaneously reduces the manufacturing cost.
(2) The invention adopts the non-contact sensor and arranges the sensor at one side of the lens, thereby reducing the rotational inertia of the rotor and improving the response speed of the galvanometer.
(3) So that the galvanometer can carry out self performance test without depending on other test equipment.
Drawings
FIG. 1 is a cross-sectional view of the present invention;
FIG. 2 is an isometric view of the present invention;
FIG. 3 is an isometric view of a stator of the present invention;
FIG. 4 is an isometric view of a rotor of the present invention;
FIG. 5 is an isometric view of the housing of the present invention;
FIG. 6 is a sectional view showing the internal structure of the galvanometer of the present invention;
FIG. 7 is an isometric view of the upper bushing of the present invention.
Description of reference numerals:
1-lens 2-photoelectric position sensor 3-lens base
4-stop pin 5-upper bearing 6-yoke
7-epoxy bar 8-permanent magnet 9-bobbin
10-lower bearing 11-base 12-lower bushing
13-wave spring 14-snap spring 15-roof cover
16-upper shaft sleeve 17-LED light source 18-coil winding
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person skilled in the art based on the embodiments of the present invention belong to the protection scope of the present invention without creative efforts.
According to an embodiment of the present invention, as shown in fig. 1-2, a galvanometer based on photoelectric angle measurement of an imaging mirror is provided, which includes a stator, a rotor rotating relative to the stator, a galvanometer housing, and a galvanometer angle sensor.
Wherein the stator (as shown in fig. 3) comprises an epoxy resin rod 7 in which a coil winding 18 is cast and a yoke 6 connected with the resin rod. A wire is wound into two oval coil windings 18 of the same size and then pressed into a tile shape (see fig. 6) so that it can be poured into the space enclosed by the inner wall of the cylindrical yoke 6 using epoxy resin. The epoxy resin pouring shape is a hollow cylinder with two convex ends, and the position between the resin rod 7 and the magnetic yoke 6 can be fixed.
As shown in fig. 4, the rotor rotating relative to the stator includes a permanent magnet 8, an upper shaft sleeve 16, a lower shaft sleeve 12, a lens base 3, a lens 1, an upper bearing 5, a lower bearing 10, a wave spring 13, and a clamp spring 14. The permanent magnet 8 is a cylindrical radial permanent magnet of Ru Fe B with strong magnetism, the diameter of the cylindrical magnet is reduced at two ends, and the two ends are respectively sleeved with a hollow upper shaft sleeve 16 and a hollow lower shaft sleeve 12. The upper shaft sleeve and the lower shaft sleeve are respectively provided with a micro angular contact ball bearing. The wave spring 13 and the clamp spring 14 are respectively arranged on the upper side and the lower side of the upper bearing 5, the wave spring 13 makes up for a gap caused by manufacturing and applies a certain pretightening force, so that the structure is more compact and reliable, and the axial movement and abrasion of the bearing are reduced; the circlip 14 limits the axial displacement of the upper and lower bearings. As shown in fig. 7, two grooves are further formed on two sides of the upper shaft sleeve 16, and a limit pin 4 is arranged at the groove to limit the maximum rotation range of the galvanometer to +/-15 degrees. The top of the upper shaft sleeve 16 is provided with a lens base 3, and the lens base 3 is provided with a lens.
As shown in fig. 5, the galvanometer shell comprises a galvanometer middle cylinder 9, a top cover 15 and a base 11. The middle cylinder 9 plays a structural supporting role and plays a role of installing a position measuring device, most of the scales of the stator and the rotor are positioned inside the middle cylinder 9, and the position measuring device is positioned on a convex part of the top of the middle cylinder, which is parallel to the lens. The top cover 15 is connected with the middle cylinder 9 through a screw to play a certain sealing role, and a limiting pin 4 for limiting penetrates through the top cover; the base 11 is connected with the middle cylinder 9 through screws, is positioned at the lowest part of the whole galvanometer and also plays a role in sealing. The measurement feedback device for measuring the rotation position of the rotor comprises: a photoelectric displacement sensor 2 and an LED light source 17. The mounting positions of the two are both positioned on the raised part at the top of the shell and are at the same horizontal height with the central position of the galvanometer lens.
When the stator coil is electrified, the epoxy resin rod 7 and the permanent magnet 8 interact with each other to generate torque, so that the rotor drives the lens 1 to rotate, and when the coil is electrified with alternating current, the rotor swings in the stator in a reciprocating manner.
In this embodiment, when the mirror-vibrating angle sensor works, the LED light source 17 emits a beam of light to the lens 1, and the position sensor of the mirror-vibrating receives the light reflected by the lens 1, and the change of the deflection angle of the lens can be obtained by the change of the angle of the reflected light. After the position information is fed back to the controller, the controller can drive the galvanometer to realize the accurate adjustment of the deflection angle of the lens 1. The displacement sensor in this feedback device may use a one-dimensional PSD2, a two-dimensional PSD, or a four-quadrant detector, but considering that the accuracy of the current one-dimensional PSD2 is highest, the one-dimensional PSD2 is preferable as the position detection element. The light source uses a light source commonly used in the one-dimensional PSD 2: an LED light source with a wavelength of 900 nm.
The assembly process of the invention is as follows: and pressing the magnetic yoke 6 into the middle barrel 9 by using a press machine, placing the wound and press-formed coil into the magnetic yoke, pouring and fixing the coil into the magnetic yoke by using epoxy resin, and placing the coil aside for later use. The upper shaft sleeve and the lower shaft sleeve are bonded on two sides of the permanent magnet by glue, the lower bearing penetrates through one side of the upper shaft sleeve, the shaft penetrating through the lower bearing penetrates through the lower part of the stator part which is just assembled, and at the moment, the lower cover can be covered below the middle cylinder. The wave spring, the upper bearing and the clamp spring are sequentially inserted above the shaft. And a limit pin penetrates through a small hole in the side surface of the upper end cover, then penetrates through the uppermost part of the shaft, and is fixed by a screw. The lens base is mounted with screws on top of the shaft, after which the lens is glued over the lens base. Finally, the position sensor and the light source are mounted and fixed with glue.
The position sensor of the galvanometer is arranged on the side surface of the lens of the galvanometer, so that the galvanometer is compact and simple in structure, the production cost is obviously reduced, the rotational inertia of the rotor is greatly reduced, the response rate of the galvanometer is improved, and the performance test of the galvanometer can be directly carried out by directly measuring the deflection angle of the lens without external equipment by the sensor.
The present invention is not disclosed in detail as belonging to the common general knowledge of the skilled person.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can understand that the substitutions or additions and deletions within the technical scope of the present invention are included in the scope of the present invention, therefore, the scope of the present invention should be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a mirror that shakes based on imaging mirror photoelectricity angle measurement which characterized in that: the device comprises a stator, a rotor rotating relative to the stator, a galvanometer shell and a galvanometer angle sensor;
the stator comprises a hollow cylindrical epoxy resin rod (7) with a coil winding (18) poured inside and a magnetic yoke (6) connected with the epoxy resin rod (7); the coiled coil winding (18) is poured into a space surrounded by the magnet yoke (6) by using epoxy resin, and a hollow cylindrical epoxy resin rod (7) is poured; the rotor comprises a cylindrical radial permanent magnet (8) positioned in a stator cavity, an upper shaft sleeve (16) connected with the upper part of the permanent magnet (8), a lower shaft sleeve (12) connected with the lower part of the permanent magnet (8), a lens base (3) connected with the upper shaft sleeve (16), a lens (1) arranged on the lens base (3), an upper bearing (5), a lower bearing (10), a wave spring (13) and a clamp spring (14) for fixing the position of the rotor; a gap is reserved between the cylindrical radial permanent magnet (8) and the epoxy resin rod (7), and the permanent magnet (8) generates a permanent magnet passage; the upper shaft sleeve (16) and the lower shaft sleeve (12) are bonded at two ends of the permanent magnet (8);
the galvanometer shell comprises a galvanometer middle cylinder (9), a top cover (15) and a base (11); the middle cylinder (9) is used for structurally supporting and mounting a galvanometer angle sensor, the stator and the rotor are mounted in the middle cylinder (9), and the galvanometer angle sensor is positioned on a convex part parallel to the lens at the top of the middle cylinder; the top cover (15) is connected with the middle cylinder (9) through a screw for sealing, and a limiting pin (4) for limiting penetrates through the top cover (15); the base (11) and the middle barrel (9) are connected through screws and positioned at the lowest part of the whole galvanometer to play a role of sealing;
the galvanometer angle sensor comprises a photoelectric displacement sensor (2) and an LED light source (17); the installation positions of the two are arranged at the top of the shell and are the same as the central axis of the galvanometer lens (1) in the horizontal direction.
2. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the stator coil winding (18) is wound into two oval coils with the same size by using the same lead, then is pressed into a tile shape, and is poured on the inner wall of the cylindrical magnet yoke (6) by using epoxy resin; the epoxy resin pouring shape is a hollow cylinder with two convex ends, and the position between the resin body and the magnet yoke (6) is fixed.
3. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the magnetic yoke (6) and the middle cylinder (9) are in interference fit, and a press machine is used for pressing the magnetic yoke into the middle cylinder (9) during assembly.
4. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: permanent magnet (8) in the rotor are cylindrical radial permanent magnet (8) of Ru indisputable boron, and cylindrical permanent magnet (8) diameter diminishes in both ends department for cup joint upper and lower axle sleeve.
5. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the upper shaft sleeve (16) and the lower shaft sleeve (12) are hollow cylindrical, and one ends of the upper shaft sleeve and the lower shaft sleeve, which are connected with the permanent magnet (8), are bonded at two ends of the permanent magnet (8) by glue.
6. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the upper shaft sleeve (16) and the lower shaft sleeve (12) are respectively provided with a bearing to realize radial positioning between the rotor and the stator; the upper shaft sleeve (16) is also provided with a wave spring (13) and a clamp spring (14), and the bottommost part of the lower shaft sleeve (12) is provided with a boss, so that the axial positioning between the rotor and the stator is realized by the wave spring and the clamp spring.
7. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the top of the upper shaft sleeve (16) is provided with two grooves with opposite positions, two limiting pins (4) are respectively penetrated in the grooves and the top cover (15), and the limiting pins (4) limit the maximum rotation angle of the galvanometer to be +/-15 degrees.
8. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the lens (1) is adhered to the upper groove of the lens base (3) by glue.
9. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the position measurement LED light source (17) is an LED light source with the wavelength of 900 nm.
10. The galvanometer based on imaging mirror photoelectric goniometry is characterized in that: the photoelectric displacement sensor (2) is a one-dimensional PSD sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010530362.7A CN111650743A (en) | 2020-06-11 | 2020-06-11 | Vibrating mirror based on imaging mirror photoelectric angle measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010530362.7A CN111650743A (en) | 2020-06-11 | 2020-06-11 | Vibrating mirror based on imaging mirror photoelectric angle measurement |
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| Publication Number | Publication Date |
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| CN111650743A true CN111650743A (en) | 2020-09-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010530362.7A Pending CN111650743A (en) | 2020-06-11 | 2020-06-11 | Vibrating mirror based on imaging mirror photoelectric angle measurement |
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| CN (1) | CN111650743A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115113363A (en) * | 2022-08-26 | 2022-09-27 | 北京瑞控信科技股份有限公司 | High-performance moving-coil type flexible support galvanometer |
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2020
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| US20060066282A1 (en) * | 2004-09-15 | 2006-03-30 | Canon Kabushiki Kaisha | Motor apparatus and optical scanning apparatus, each with feedback control of drive load |
| CN101567589A (en) * | 2009-06-01 | 2009-10-28 | 深圳市大族精密机电有限公司 | Galvanometer motor |
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| CN109782252A (en) * | 2017-11-14 | 2019-05-21 | 北京万集科技股份有限公司 | MEMS galvanometer synchronizing device, method and laser radar based on laser radar |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115113363A (en) * | 2022-08-26 | 2022-09-27 | 北京瑞控信科技股份有限公司 | High-performance moving-coil type flexible support galvanometer |
| CN115113363B (en) * | 2022-08-26 | 2022-12-09 | 北京瑞控信科技股份有限公司 | Moving-coil flexible support galvanometer |
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Application publication date: 20200911 |
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| RJ01 | Rejection of invention patent application after publication |