CN111640869A - Multifunctional photoresponse transistor device, preparation method and application thereof - Google Patents

Multifunctional photoresponse transistor device, preparation method and application thereof Download PDF

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CN111640869A
CN111640869A CN202010474481.5A CN202010474481A CN111640869A CN 111640869 A CN111640869 A CN 111640869A CN 202010474481 A CN202010474481 A CN 202010474481A CN 111640869 A CN111640869 A CN 111640869A
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黄佳
杨奔
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Abstract

本发明提供了一种多功能光响应晶体管器件、制备方法及其应用,属于半导体领域。本发明提供了一种多功能光响应晶体管器件,包括:衬底、活性层以及电极,其中,活性层的材料包括:有机半导体以及叶绿素。本发明提供的多功能光响应晶体管器件可以作为光电晶体管实现对光信号的探测,还能够作为光电探测器或光刺激突触器件使用。当作为光电晶体管时,器件对光信号具有很高灵敏度,并且晶体管的输出信号和转移信号均可作为响应的电学信号,易于实现不同模式下的光信号检测以及转换。当本发明提供的多功能光响应晶体管作为光刺激突触晶体管时,能够模拟突触的学习和遗忘行为,并且具有对图形处理的功能。

Figure 202010474481

The invention provides a multifunctional light-responsive transistor device, a preparation method and an application thereof, and belongs to the field of semiconductors. The invention provides a multifunctional light-responsive transistor device, comprising: a substrate, an active layer and an electrode, wherein the materials of the active layer include: organic semiconductor and chlorophyll. The multifunctional light-responsive transistor device provided by the present invention can be used as a phototransistor to realize the detection of light signals, and can also be used as a photodetector or a light stimulation synapse device. When used as a phototransistor, the device has high sensitivity to optical signals, and both the output signal and the transfer signal of the transistor can be used as responsive electrical signals, and it is easy to realize the detection and conversion of optical signals in different modes. When the multifunctional light-responsive transistor provided by the present invention is used as a light-stimulated synaptic transistor, it can simulate the learning and forgetting behavior of synapses, and has the function of image processing.

Figure 202010474481

Description

一种多功能光响应晶体管器件、制备方法及其应用A kind of multifunctional photoresponsive transistor device, preparation method and application thereof

技术领域technical field

本发明属于半导体领域,具体涉及一种多功能光响应晶体管器件、制备方法及其应用。The invention belongs to the field of semiconductors, and in particular relates to a multifunctional light-responsive transistor device, a preparation method and applications thereof.

背景技术Background technique

光响应有机场效应晶体管由于其在通信单元、医学成像仪器、柔性和可穿戴电子器件等领域的巨大应用潜力而得到了广泛的研究。近年来,研究热点从基于单组分有机半导体的光响应有机场效应晶体管扩展到由多种活性材料组成的器件,如基于钙钛矿和有机半导体的光响应有机场效应晶体管,以及同时具有p型和n型半导体的光响应有机场效应晶体管。虽然这些器件中使用了多种活性材料,但通常表现出单一的光响应功能,例如,以往的研究大多集中在光传感功能上,最近的研究则集中在光突触功能上。目前多功能光电倍增管的研究还很少,但是很重要。这是因为同一器件可以实现不同种的功能,对于高集成度的多功能有机电子具有重要意义。Light-responsive organic field-effect transistors have been extensively studied due to their great application potential in communication units, medical imaging instruments, flexible and wearable electronics, etc. In recent years, research hotspots have expanded from photoresponsive organic field effect transistors based on single-component organic semiconductors to devices composed of multiple active materials, such as photoresponsive organic field effect transistors based on perovskites and organic semiconductors, and Light-responsive organic field-effect transistors of type and n-type semiconductors. Although a variety of active materials are used in these devices, they usually exhibit a single light-responsive function, for example, most of the previous studies have focused on the light sensing function, and the recent research has focused on the photo-synaptic function. At present, the research on multifunctional photomultipliers is still very little, but it is very important. This is because the same device can realize different kinds of functions, which is of great significance for highly integrated multifunctional organic electronics.

此外,随着人们环保意识的增强,可生物降解材料,特别是从天然有机物中提取的材料,对发展生物安全、环境友好的有机光电器件具有重要意义。叶绿素是植物光合作用和生物代谢过程中最丰富、最绿色、最重要的天然色素。在过去的几十年里,叶绿素在光催化和光合作用中得到了广泛的研究。然而,基于叶绿素的光电探测器是稀有的,并且限于石墨烯/叶绿素和金属氧化物/叶绿素基光电探测器的若干研究。In addition, with the enhancement of people's awareness of environmental protection, biodegradable materials, especially those extracted from natural organic materials, are of great significance for the development of biosafe and environmentally friendly organic optoelectronic devices. Chlorophyll is the most abundant, greenest and most important natural pigment in plant photosynthesis and biological metabolism. Chlorophyll has been extensively studied in photocatalysis and photosynthesis over the past few decades. However, chlorophyll-based photodetectors are rare and limited to several studies of graphene/chlorophyll and metal oxide/chlorophyll-based photodetectors.

另一方面,与为人脑神经系统提供基本功能的生物突触类似,人工突触装置有可能成为神经形态网络的基本组成部分。已有研究表明,突触器件在克服冯诺依曼体系结构瓶颈方面具有巨大的潜力,而人脑神经形态计算的模拟是下一代神经形态计算机系统发展的一个重要的研究方向。On the other hand, artificial synaptic devices have the potential to become fundamental components of neuromorphic networks, similar to biological synapses that provide basic functions for the human nervous system. Previous studies have shown that synaptic devices have great potential in overcoming the bottleneck of von Neumann architecture, and the simulation of human brain neuromorphic computing is an important research direction for the development of next-generation neuromorphic computer systems.

发明内容SUMMARY OF THE INVENTION

本发明是为了解决上述问题而进行的,目的在于提供一种一方面通过使用对光具有吸收能力的叶绿素提高器件的光响应性能,使有机场效应晶体管具有优异的光响应性能,能够实现对光信号,尤其是弱光的检测;另一方面,能够利用晶体管栅极调控的功能,赋予该有机光响应晶体管对于光可调的响应方式。方便和快捷的实现了该有机晶体管对于光的多功能响应,在单一的器件上实现光电探测器和光刺激突触功能的多功能光响应晶体管器件的制备方法及其应用。The present invention is made in order to solve the above-mentioned problems, and the purpose is to provide an organic field effect transistor with excellent photoresponse performance by using chlorophyll having the ability to absorb light to improve the photoresponse performance of the device on the one hand, which can realize the light Signal, especially the detection of weak light; on the other hand, the function of gate regulation of the transistor can be used to give the organic photoresponsive transistor a tunable response to light. The multifunctional response of the organic transistor to light is conveniently and quickly realized, and the preparation method and application of a multifunctional photoresponsive transistor device capable of realizing photodetector and photo-stimulated synapse functions on a single device.

本发明提供了一种多功能光响应晶体管器件,具有如下特征,包括:衬底、活性层以及电极,其中,其中,活性层的材料包括有机半导体材料以及叶绿素,叶绿素重量占活性层总重量的0.1%-90%。The present invention provides a multifunctional light-responsive transistor device, which has the following features, comprising: a substrate, an active layer and an electrode, wherein, the material of the active layer includes organic semiconductor materials and chlorophyll, and the weight of chlorophyll accounts for the total weight of the active layer. 0.1%-90%.

在本发明提供的多功能光响应晶体管器件中,还可以具有这样的特征:其中,叶绿素为天然叶绿素,人工合成叶绿素或叶绿素衍生物。The multifunctional light-responsive transistor device provided by the present invention may also have the following characteristics: wherein, the chlorophyll is natural chlorophyll, artificially synthesized chlorophyll or chlorophyll derivatives.

在本发明提供的多功能光响应晶体管器件中,还可以具有这样的特征:其中,有机半导体可以为高分子半导体或小分子半导体,优选为具有苯环结构的有机半导体(如DNTT,C8-BTBT,并五苯,F8T2,酞菁,PTAA,PFO,PPE,PIF)或者具有噻吩结构的有机半导体(如PDPP4T,并五噻吩,PQT-12,P3HT,PBTTT,NVP,PTVTF,PNDTBT)。In the multifunctional light-responsive transistor device provided by the present invention, it can also have the following characteristics: wherein, the organic semiconductor can be a polymer semiconductor or a small molecule semiconductor, preferably an organic semiconductor with a benzene ring structure (such as DNTT, C8-BTBT , pentacene, F8T2, phthalocyanine, PTAA, PFO, PPE, PIF) or organic semiconductors with thiophene structure (such as PDPP4T, pentathiophene, PQT-12, P3HT, PBTTT, NVP, PTVTF, PNDTBT).

在本发明提供的多功能光响应晶体管器件中,还可以具有这样的特征:其中,衬底为无机衬底(如玻璃衬底、陶瓷衬底、硅衬底等)或者有机衬底(如PLA衬底、PET衬底)等。In the multifunctional light-responsive transistor device provided by the present invention, it may also have the following characteristics: wherein the substrate is an inorganic substrate (such as a glass substrate, a ceramic substrate, a silicon substrate, etc.) or an organic substrate (such as PLA) substrate, PET substrate), etc.

在本发明提供的多功能光响应晶体管器件中,还可以具有这样的特征:其中,电极的材质为导电金属、导电合金或导电金属氧化物。The multifunctional light-responsive transistor device provided by the present invention may also have the following feature: wherein, the material of the electrode is a conductive metal, a conductive alloy or a conductive metal oxide.

在本发明提供的多功能光响应晶体管器件中,还可以具有这样的特征:其中,电极的数量为两个,两个电极之间设置有导电沟道,导电沟道长为4μm-100μm,导电沟道宽为0.2mm-10mm。The multifunctional light-responsive transistor device provided by the present invention may also have the following characteristics: wherein the number of electrodes is two, a conductive channel is arranged between the two electrodes, the conductive channel length is 4 μm-100 μm, and the conductive channel is 4 μm-100 μm long. The channel width is 0.2mm-10mm.

在本发明提供了一种多功能光响应晶体管器件的制备方法,还具有这样的特征:包括如下步骤:步骤1,清洗衬底,吹干,对衬底进行OTS处理,得中间体A;步骤2,在中间体A的表面滴加天然叶绿素/有机半导体溶液,然后在衬底表面形成活性层,得到中间体B,在衬底表面形成活性层的方法为旋涂、滴涂、提拉或刮涂中的任意一种;步骤3,通过掩膜的方式在高真空条件下将电极材料蒸镀或压印到中间体B的活性层上表面,形成两个电极,得多功能光响应晶体管器件。The present invention provides a method for preparing a multifunctional light-responsive transistor device, which also has the following features: comprising the following steps: step 1, cleaning the substrate, blowing dry, and performing OTS treatment on the substrate to obtain intermediate A; step 2. Add natural chlorophyll/organic semiconductor solution dropwise on the surface of intermediate A, and then form an active layer on the surface of the substrate to obtain intermediate B, and the method for forming an active layer on the surface of the substrate is spin coating, drop coating, pulling or Any one of the blade coating; Step 3, the electrode material is evaporated or imprinted on the upper surface of the active layer of the intermediate B by means of a mask under high vacuum conditions to form two electrodes, a multifunctional light-responsive transistor device.

在本发明还提供了一种多功能光响应晶体管器件的制备方法,还具有这样的特征:其中,当在步骤2中采用旋涂的方法在衬底表面形成活性层时,旋涂转速为200r/min-6000r/min,旋涂的时间为10s-300s。The present invention also provides a method for preparing a multifunctional light-responsive transistor device, which also has the following characteristics: wherein, when the active layer is formed on the surface of the substrate by the spin coating method in step 2, the spin coating speed is 200r /min-6000r/min, spin coating time is 10s-300s.

本发明还提供了一种多功能光响应晶体管器件作为光电探测器的应用,具有这种的技术特征:多功能光响应晶体管器件的栅极电压为-5V~-70V。The invention also provides the application of a multifunctional photoresponse transistor device as a photodetector, which has the technical characteristics: the gate voltage of the multifunctional photoresponse transistor device is -5V--70V.

本发明还提供了一种多功能光响应晶体管器件作为光刺激突触器件的应用,具有这种的技术特征:多功能光响应晶体管器件的栅极电压为5V~70V。The invention also provides the application of a multifunctional light-responsive transistor device as a photo-stimulation synapse device, which has the technical characteristics: the gate voltage of the multi-functional photo-responsive transistor device is 5V-70V.

发明的作用与效果The role and effect of the invention

根据本发明所涉及的多功能光响应晶体管器件,因为其活性层采用叶绿素/有机半导体,所以,本发明提供的多功能光响应晶体管器件不仅可以实现对光信号的探测,具有很高灵敏度,而且制备的晶体管传感器为三端晶体管器件,双电压驱动,晶体管的输出信号和转移信号均可作为响应的电学信号,易于实现不同模式下的光信号检测以及转换,同时制备工艺简单,成本低,使用方便,容易实现大规模生产。According to the multifunctional light-responsive transistor device involved in the present invention, because its active layer adopts chlorophyll/organic semiconductor, the multi-functional photo-responsive transistor device provided by the present invention can not only realize the detection of optical signals, but also has high sensitivity and high sensitivity. The prepared transistor sensor is a three-terminal transistor device, driven by two voltages, and both the output signal and the transfer signal of the transistor can be used as electrical signals in response, and it is easy to realize the detection and conversion of optical signals in different modes, and the preparation process is simple, the cost is low, and the use Convenient and easy to achieve mass production.

根据本发明所涉及的多功能光响应晶体管器件作为光电探测器的应用,因为对多功能光响应晶体管器件施加-5V~-70V的栅极电压,所以多功能光响应晶体管器件对光和暗信号做出迅速响应,光暗电流比可达到106,具有成像能力。According to the application of the multifunctional photoresponsive transistor device as a photodetector, the multifunctional photoresponsive transistor device is sensitive to light and dark signals because a gate voltage of -5V to -70V is applied to the multifunctional photoresponsive transistor device. It responds quickly, the ratio of light to dark current can reach 10 6 , and it has imaging capability.

根据本发明所涉及的多功能光响应晶体管器件作为光刺激突触器件的应用,因为对多功能光响应晶体管器件施加5V~70V的栅极电压,所以本发明提供的多功能光响应晶体管器件可以对于光信号展示出模拟生物突触的特性,实现动态学习,遗忘,图形处理如对比度增强,以及网络认知模型计算识别的功能。According to the application of the multifunctional light-responsive transistor device involved in the present invention as a photo-stimulated synaptic device, since a gate voltage of 5V to 70V is applied to the multi-functional photo-responsive transistor device, the multifunctional photo-responsive transistor device provided by the present invention can For light signals, it exhibits properties that mimic biological synapses, enabling dynamic learning, forgetting, graphics processing such as contrast enhancement, and computational recognition in networked cognitive models.

附图说明Description of drawings

图1是本发明的实施例1中多功能光响应晶体管器件的结构示意图;1 is a schematic structural diagram of a multifunctional photoresponsive transistor device in Embodiment 1 of the present invention;

图2是本发明的实施例1中多功能光响应晶体管器件的输出特性曲线图;Fig. 2 is the output characteristic curve diagram of the multifunctional photoresponse transistor device in the embodiment 1 of the present invention;

图3是本发明的实施例中1中多功能光响应晶体管器件的转移特性曲线图;Fig. 3 is the transfer characteristic curve diagram of the multifunctional photo-responsive transistor device in 1 in the embodiment of the present invention;

图4是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化示意图;4 is a schematic diagram of the variation of the output current with the intensity of the light signal when the multifunctional photo-responsive transistor device is used as a photodetector in the embodiment of the present invention;

图5是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化图;5 is a graph showing the variation of output current with the intensity of illumination signals when the multifunctional photo-responsive transistor device is used as a photodetector in 2 in the embodiment of the present invention;

图6是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时成像应用的展示图;6 is a display diagram of an imaging application when the multifunctional photo-responsive transistor device in 2 is used as a photodetector in an embodiment of the present invention;

图7是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时输出电流和光刺激信号的关系图;7 is a graph showing the relationship between the output current and the photostimulation signal when the multifunctional light-responsive transistor device is used as the photostimulation synapse device in 3 in the embodiment of the present invention;

图8是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其动态学习和遗忘的展示图;8 is a diagram showing dynamic learning and forgetting of the multifunctional light-responsive transistor device as a photo-stimulated synaptic device in Embodiment 3 of the present invention;

图9是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其图形处理功能的展示图;以及FIG. 9 is a diagram showing the graphics processing function of the multifunctional light-responsive transistor device in 3 as a photo-stimulated synaptic device according to an embodiment of the present invention; and

图10是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其对于数字进行网络识别模拟的展示图;10 is a display diagram of the multifunctional photo-responsive transistor device in the embodiment of the present invention when it is used as a photo-stimulated synaptic device for digital network recognition simulation;

图11是本发明的实施例中4中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化图;11 is a graph showing the variation of output current with the intensity of the light signal when the multifunctional light-responsive transistor device is used as a photodetector in the embodiment of the present invention;

图12是本发明的实施例中4中多功能光响应晶体管器件作为光电探测器时光暗电流比值图。FIG. 12 is a graph of the light-dark current ratio of the multifunctional photo-responsive transistor device in Example 4 as a photodetector.

具体实施方式Detailed ways

为了使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,以下结合实施例及附图对本发明作具体阐述。In order to make it easy to understand the technical means, creative features, achieved goals and effects of the present invention, the present invention is described in detail below with reference to the embodiments and the accompanying drawings.

<实施例1><Example 1>

图1是本发明的实施例1中多功能光响应晶体管器件的结构示意图。FIG. 1 is a schematic structural diagram of a multifunctional photoresponsive transistor device in Example 1 of the present invention.

如图1所示,本实施例提供的多功能光响应晶体管器件100包括:衬底10、活性层20以及两个金电极30。As shown in FIG. 1 , the multifunctional photo-responsive transistor device 100 provided in this embodiment includes: a substrate 10 , an active layer 20 and two gold electrodes 30 .

衬底10包括栅极11以及设置在栅极11上方的绝缘层12。在本实施例中栅极11为N掺杂硅,绝缘层12为厚度为300nm的二氧化硅的硅衬底。在别的实施例中,绝缘层也可以选用PLA或PVA等聚合物材料作为柔性衬底。在别的实施例中,衬底10也可以选用表面绝缘且光滑的玻璃衬底或陶瓷衬底。The substrate 10 includes a gate electrode 11 and an insulating layer 12 disposed above the gate electrode 11 . In this embodiment, the gate 11 is made of N-doped silicon, and the insulating layer 12 is a silicon substrate of silicon dioxide with a thickness of 300 nm. In other embodiments, the insulating layer can also be a polymer material such as PLA or PVA as the flexible substrate. In other embodiments, the substrate 10 may also be a glass substrate or a ceramic substrate with an insulating and smooth surface.

活性层20由叶绿素和有机半导体PDPP4T(聚[2,5-双(2-辛基十二烷基)吡咯[3,4-c]吡咯-1,4(2H,5H)-二酮-3,6-二基)-丙氨酸氨基转移酶-(2,2';5',2';5',2”'-四氢噻吩-5,5”-二基])组成,叶绿素的重量百分比为6.7%。在其他的实施例中,叶绿素含量可以为0.1%到90%。活性层20通过旋涂地方式设置在绝缘层12的上方。The active layer 20 is composed of chlorophyll and the organic semiconductor PDPP4T (poly[2,5-bis(2-octyldodecyl)pyrrole[3,4-c]pyrrole-1,4(2H,5H)-dione-3 ,6-diyl)-alanine aminotransferase-(2,2';5',2';5',2"'-tetrahydrothiophene-5,5"-diyl]), chlorophyll The weight percent is 6.7%. In other embodiments, the chlorophyll content may be 0.1% to 90%. The active layer 20 is disposed above the insulating layer 12 by spin coating.

叶绿素的结构式如下所示:The structural formula of chlorophyll is as follows:

Figure BDA0002515391890000071
Figure BDA0002515391890000071

有机半导体PDPP4T的结构式如下所示:The structural formula of the organic semiconductor PDPP4T is as follows:

Figure BDA0002515391890000072
Figure BDA0002515391890000072

两个金电极30通过真空热蒸镀物理气相沉积法沉积在活性层20的上表面。两个金电极30之间的导电沟道长为5μm,沟道宽为0.3mm。在别的实施例中,可以使用其他导电材料作为电极,如银电极、合金电极或金属氧化物电极、导电塑料等。在别的实施例中,导电沟道长为可以为4μm-100μm,导电沟道宽为0.2mm-10mm。Two gold electrodes 30 are deposited on the upper surface of the active layer 20 by vacuum thermal evaporation physical vapor deposition. The length of the conductive channel between the two gold electrodes 30 is 5 μm, and the width of the channel is 0.3 mm. In other embodiments, other conductive materials may be used as electrodes, such as silver electrodes, alloy electrodes or metal oxide electrodes, conductive plastics, and the like. In other embodiments, the length of the conductive channel may be 4 μm-100 μm, and the width of the conductive channel may be 0.2 mm-10 mm.

本实施例提供的多功能光响应晶体管器件的制备方法包括如下步骤:The preparation method of the multifunctional light-responsive transistor device provided in this embodiment includes the following steps:

步骤1,对衬底10使用丙酮,异丙醇超声清洗,之后再使用去离子水和酒精进行冲洗,使用氮气吹干衬底10表面,接着,对衬底进行OTS处理,得中间体A;Step 1, use acetone and isopropanol to ultrasonically clean the substrate 10, then use deionized water and alcohol to rinse, use nitrogen to dry the surface of the substrate 10, and then perform OTS treatment on the substrate to obtain Intermediate A;

步骤2,将中间体A放入旋涂仪上,在表面滴加叶绿素重量为6.7%的叶绿素/有机半导体溶液,然后进行旋涂,3000r/min的转速旋涂60秒,在衬底表面形成活性层,得中间体B;Step 2, put the intermediate A on the spin coater, drop the chlorophyll/organic semiconductor solution with a chlorophyll weight of 6.7% on the surface, and then perform spin coating, spin coating at a speed of 3000r/min for 60 seconds, and form on the surface of the substrate. Active layer to obtain intermediate B;

步骤3,通过掩膜的方式,在高真空下将金蒸镀到有机半导体上形成两个金电极30,两个之间的导电沟道长5μm,沟道宽为0.3mm,得多功能光响应晶体管器件。In step 3, by means of a mask, gold is evaporated on the organic semiconductor under high vacuum to form two gold electrodes 30. The conductive channel between the two is 5 μm long and the channel width is 0.3 mm. responsive transistor device.

对本实施例提供的多功能光响应有机晶体管进行输出特性曲线和转移特性曲线测试。测试方法为:在室温,大气环境下,使用K-4200半导体测试仪和相关探针台,驱动电压-60V—60V内扫描,从而得到器件的输出特性曲线和转移特性曲线。The output characteristic curve and the transfer characteristic curve are tested for the multifunctional light-responsive organic transistor provided in this embodiment. The test method is as follows: at room temperature and in the atmospheric environment, using K-4200 semiconductor tester and related probe station, the driving voltage is scanned within -60V-60V, so as to obtain the output characteristic curve and transfer characteristic curve of the device.

图2是本发明的实施例1中多功能光响应晶体管器件的输出特性曲线图。图3是本发明的实施例中1中多功能光响应晶体管器件的转移特性曲线图。FIG. 2 is a graph showing the output characteristics of the multifunctional photoresponsive transistor device in Example 1 of the present invention. 3 is a graph of the transfer characteristics of the multifunctional photoresponsive transistor device in Example 1 of the present invention.

<实施例2><Example 2>

将实施例1制得的多功能光响应晶体管器件的栅极电压调节至-60V,即可将多功能光响应晶体管器件作为光电探测器使用。By adjusting the gate voltage of the multifunctional photoresponsive transistor device prepared in Example 1 to -60V, the multifunctional photoresponsive transistor device can be used as a photodetector.

使用LED准直光源(波长430nm)照射上述多功能光响应有机晶体管,调节照射光强从0.002-0.271mW/cm2,用半导体参数仪测试OFET的输出特性曲线及转移特性曲线,得出OFET的电流、迁移率以及阈值电压随光强的变化。Use LED collimated light source (wavelength 430nm) to irradiate the above-mentioned multifunctional photoresponse organic transistor, adjust the irradiated light intensity from 0.002-0.271mW/cm 2 , and test the output characteristic curve and transfer characteristic curve of the OFET with a semiconductor parameter meter. Current, mobility, and threshold voltage as a function of light intensity.

图4是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化示意图。图5是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化图。FIG. 4 is a schematic diagram showing the variation of the output current with the intensity of the light signal when the multifunctional photo-responsive transistor device in Example 2 is used as a photodetector. 5 is a graph showing the variation of output current with the intensity of illumination signal when the multifunctional photo-responsive transistor device in Example 2 is used as a photodetector.

如图4所示,实施例1提供的多功能光响应晶体管器件作为光敏传感器时的光开关比约为106As shown in FIG. 4 , the optical on-off ratio of the multifunctional photo-responsive transistor device provided in Example 1 as a photosensor is about 10 6 .

如图5所示,实施例1提供的多功能光响应晶体管器件作为光敏传感器时输出电流随光强的变化而变化,表明实施例1提供的多功能光响应晶体管器件还可作为光敏晶体管。As shown in FIG. 5 , when the multifunctional photoresponse transistor device provided in Example 1 is used as a photosensor, the output current changes with the change of light intensity, indicating that the multifunctional photoresponsive transistor device provided in Example 1 can also be used as a phototransistor.

此时研究作为光敏传感器的实施例1提供的多功能光响应晶体管器件的光成像特征。将具有特定形状图案的物件(本实例中使用E形纸板)覆盖在5×5的多功能光响应晶体管器件矩阵上,再将器件矩阵置于光照下测试每个器件元件的电学参数如电流、迁移率以及阈值电压等与没有物件覆盖时各元件电学参数的比值,给出器件矩阵对于该物件的光敏成像。At this time, the photoimaging characteristics of the multifunctional photoresponsive transistor device provided in Example 1 as a photosensitive sensor were investigated. An object with a specific shape pattern (in this example, E-shaped cardboard was used) was covered on a 5×5 multifunctional photoresponsive transistor device matrix, and then the device matrix was placed under light to test the electrical parameters of each device element such as current, The ratio of mobility and threshold voltage to the electrical parameters of each element when no object is covered, gives the photosensitive imaging of the device matrix for the object.

图6是本发明的实施例中2中多功能光响应晶体管器件作为光电探测器时成像应用的展示图。FIG. 6 is a diagram showing the imaging application of the multifunctional photo-responsive transistor device in Embodiment 2 of the present invention as a photodetector.

测试结果如图6所示,光敏器件矩阵信号输出清晰地显示出E形状的图案,说明实施例1制备的多功能光响应晶体管器件具有良好的图案成像能力。The test results are shown in Figure 6, the photosensitive device matrix signal output clearly shows an E-shaped pattern, indicating that the multifunctional photoresponsive transistor device prepared in Example 1 has good pattern imaging capability.

<实施例3><Example 3>

将实施例1制得的多功能光响应晶体管器件的栅极电压调节至60V,即可将多功能光响应晶体管器件作为光刺激突触器件使用。By adjusting the gate voltage of the multi-functional photo-responsive transistor device prepared in Example 1 to 60V, the multi-functional photo-responsive transistor device can be used as a photo-stimulated synaptic device.

使用LED准直光源(波长430nm)照射上述多功能光响应有机晶体管。调节照射强度为0.04-0.48mW/cm2,照射时间为2秒,检测其输出电流曲线。The above-mentioned multifunctional photoresponsive organic transistors were irradiated using an LED collimated light source (wavelength 430 nm). The irradiation intensity was adjusted to 0.04-0.48 mW/cm 2 , the irradiation time was 2 seconds, and the output current curve was detected.

图7是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时输出电流和光刺激信号的关系图。FIG. 7 is a graph showing the relationship between the output current and the photostimulation signal when the multifunctional photoresponsive transistor device in the third embodiment of the present invention is used as a photostimulation synapse device.

如图7所示,在不同强度的光刺激照射下实施例1制得的多功能光响应晶体管器件的输出电流曲线具有类似于生物突触的特征,可以作为突触器件使用。As shown in Figure 7, the output current curve of the multifunctional photo-responsive transistor device prepared in Example 1 under the irradiation of different intensities of light stimulation has characteristics similar to that of a biological synapse, and can be used as a synaptic device.

对作为光刺激突触器件的实施例1制得的多功能光响应晶体管器件的动态学习和遗忘行为进行测试。将具有特定形状图案的物件(本实例中使用H形纸板)覆盖在3×3的多功能光响应晶体管器件矩阵上,测试在没有光刺激和光刺激1次,5次,20次后该光刺激突触晶体管的学习行为,记录下该矩阵的电流信号。随后撤去光刺激,测试该矩阵在1,3,5分钟后的输出电流信号。The dynamic learning and forgetting behaviors of the multifunctional light-responsive transistor device prepared in Example 1 as a photo-stimulated synaptic device were tested. Objects with specific shape patterns (H-shaped cardboard used in this example) were covered on a 3×3 matrix of multifunctional photoresponsive transistor devices, tested without light stimulation and after light stimulation 1, 5, and 20 times with the light stimulation The learning behavior of the synaptic transistor, recording the current signal of the matrix. The photostimulation was subsequently withdrawn, and the output current signal of the matrix was tested after 1, 3, and 5 minutes.

图8是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其动态学习和遗忘的展示图。8 is a diagram showing the dynamic learning and forgetting of the multifunctional light-responsive transistor device in Example 3 of the present invention when it is used as a photo-stimulated synaptic device.

测试结果如图8所示,实施例1制得的多功能光响应晶体管器件矩阵信号输出清晰地显示出了该器件对于光刺激地动态学习和遗忘过程。The test results are shown in FIG. 8 . The matrix signal output of the multifunctional photo-responsive transistor device prepared in Example 1 clearly shows the dynamic learning and forgetting process of the device for light stimulation.

对作为光刺激突触器件的实施例1制得的多功能光响应晶体管器件对于图形的处理能力进行研究。我们制备了一个3×3的突触晶体管矩阵,在不同的位置上采用不同的光强照射该光刺激突触晶体管。可以读取到矩阵器件的电流,此时将它作为输入信号,得到了该器件具有四种灰度。The processing capability of the multifunctional light-responsive transistor device prepared in Example 1 as a photo-stimulated synapse device for graphics was studied. We prepared a 3 × 3 matrix of synaptic transistors and illuminated the photostimulated synaptic transistors with different light intensities at different locations. The current of the matrix device can be read, and at this time, it is used as the input signal, and the device has four grayscales.

图9是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其图形处理功能的展示图。FIG. 9 is a diagram showing the graphics processing function of the multifunctional light-responsive transistor device in Embodiment 3 of the present invention when it is used as a photo-stimulated synapse device.

测试结果如图9所示,当光刺激信号撤去,该器件随着时间表现出电流信号差异的增大现象。在撤去光刺激信号的30秒和90秒,该器件表现出更大的电流差异,即图形对比度增强现象。The test results are shown in Figure 9. When the optical stimulation signal is removed, the device shows an increase in the current signal difference over time. At 30 and 90 seconds after the photostimulation signal was removed, the device showed a greater difference in current, a phenomenon known as pattern contrast enhancement.

图10是本发明的实施例中3中多功能光响应晶体管器件作为光刺激突触器件时其对于数字进行网络识别模拟的展示图。FIG. 10 is a diagram showing the simulation of network recognition for numbers when the multifunctional light-responsive transistor device is used as a photo-stimulated synapse device in Example 3 of the present invention.

对作为光刺激突触器件的实施例1制得的多功能光响应晶体管器件对数字识别模拟性能进行研究。本实施例采用了国家标准与技术研究所(MNIST)数据库展示该光刺激突触晶体管的学习能力。本实施例中设计了两层卷积神经网络,基于该突触晶体管的通道电导值,建立了一个有监督的学习框架,并对系统级MNIST模式识别进行了仿真。如图10所示,本实施例用MNIST数据库中的图像对网络进行训练,可以得到了从0到9的10个字符的识别率,图中展示了数字0的识别过程。The multifunctional light-responsive transistor device prepared in Example 1 as a photo-stimulated synapse device was studied for its digital recognition and analog performance. This example uses the National Institute of Standards and Technology (MNIST) database to demonstrate the learning ability of the light-stimulated synaptic transistor. In this example, a two-layer convolutional neural network is designed, based on the channel conductance value of the synaptic transistor, a supervised learning framework is established, and a system-level MNIST pattern recognition is simulated. As shown in Figure 10, in this example, the network is trained with images in the MNIST database, and the recognition rate of 10 characters from 0 to 9 can be obtained. The figure shows the recognition process of the number 0.

<实施例4><Example 4>

图1也为本发明的实施例4中多功能光响应晶体管器件的结构示意图。FIG. 1 is also a schematic structural diagram of a multifunctional photo-responsive transistor device in Embodiment 4 of the present invention.

如图1所示,活性层20由叶绿素的衍生物和有机半导体PDPP4T(聚[2,5-双(2-辛基十二烷基)吡咯[3,4-c]吡咯-1,4(2H,5H)-二酮-3,6-二基)-丙氨酸氨基转移酶-(2,2';5',2';5',2”'-四氢噻吩-5,5”-二基])组成,叶绿素衍生物的含量为50%。在其他的实施例中,含量可以为1%到80%。活性层20通过旋涂地方式设置在绝缘层12的上方。As shown in FIG. 1, the active layer 20 is composed of a derivative of chlorophyll and an organic semiconductor PDPP4T (poly[2,5-bis(2-octyldodecyl)pyrrole[3,4-c]pyrrole-1,4( 2H,5H)-diketo-3,6-diyl)-alanine aminotransferase-(2,2';5',2';5',2"'-tetrahydrothiophene-5,5" -diyl]), the content of chlorophyll derivatives is 50%. In other embodiments, the content may be 1% to 80%. The active layer 20 is disposed above the insulating layer 12 by spin coating.

叶绿素衍生物的结构式如下所示:The structural formula of chlorophyll derivatives is shown below:

Figure BDA0002515391890000121
Figure BDA0002515391890000121

两个金电极30通过真空热蒸镀物理气相沉积法沉积在活性层20的上表面。两个金电极30之间的导电沟道长为30μm,沟道宽为1mm。在别的实施例中,可以使用其他导电材料作为电极,如银电极、合金电极或金属氧化物电极、导电塑料等。在别的实施例中,导电沟道长为可以为4μm-100μm,导电沟道宽为0.2mm-10mm。Two gold electrodes 30 are deposited on the upper surface of the active layer 20 by vacuum thermal evaporation physical vapor deposition. The conductive channel between the two gold electrodes 30 is 30 μm long and 1 mm wide. In other embodiments, other conductive materials may be used as electrodes, such as silver electrodes, alloy electrodes or metal oxide electrodes, conductive plastics, and the like. In other embodiments, the length of the conductive channel may be 4 μm-100 μm, and the width of the conductive channel may be 0.2 mm-10 mm.

本实施例提供的光响应晶体管器件的制备方法同与实施例1类似,包括如下步骤:The preparation method of the photoresponsive transistor device provided in this embodiment is similar to that of Embodiment 1, and includes the following steps:

步骤1,对衬底10使用丙酮,异丙醇超声清洗,之后再使用去离子水和酒精进行冲洗,使用氮气吹干衬底10表面,接着,对衬底进行OTS处理,得中间体A;Step 1, use acetone and isopropanol to ultrasonically clean the substrate 10, then use deionized water and alcohol to rinse, use nitrogen to dry the surface of the substrate 10, and then perform OTS treatment on the substrate to obtain Intermediate A;

步骤2,将中间体A放入旋涂仪上,在表面滴加叶绿素/有机半导体溶液,其中本实施例中叶绿素衍生物的含量为50%。然后进行旋涂2500r/min的转速旋涂30秒,在衬底表面形成活性层,得中间体B;Step 2, put the intermediate A on the spin coater, drop the chlorophyll/organic semiconductor solution on the surface, wherein the content of the chlorophyll derivative in this embodiment is 50%. Then spin-coating at a speed of 2500r/min for 30 seconds to form an active layer on the surface of the substrate to obtain Intermediate B;

步骤3,通过掩膜的方式,在高真空下将金蒸镀到有机半导体上形成两个金电极30,两个之间的导电沟道长30μm,沟道宽为1mm,得光响应晶体管器件。Step 3, by means of a mask, gold is evaporated on the organic semiconductor under high vacuum to form two gold electrodes 30, the conductive channel between the two is 30 μm long, and the channel width is 1 mm, to obtain a light-responsive transistor device. .

对本实施例提供的光响应有机晶体管进行转移特性曲线测试。测试方法为:在室温,大气环境下,使用K-4200半导体测试仪和相关探针台,驱动电压10V—45V内扫描,从而可以得到器件的转移特性曲线。A transfer characteristic curve test is performed on the light-responsive organic transistor provided in this embodiment. The test method is as follows: at room temperature and in the atmospheric environment, using a K-4200 semiconductor tester and a related probe station, and scanning within a driving voltage of 10V-45V, the transfer characteristic curve of the device can be obtained.

此时将其作为光电探测器使用。使用LED准直光源(波长430nm)照射上述多功能光响应有机晶体管,调节照射光强从0.00068-0.0686mW/cm2,用半导体参数仪测试和记录OFET的输出特性曲线及转移特性曲线。In this case, it is used as a photodetector. Use the LED collimated light source (wavelength 430nm) to irradiate the above-mentioned multifunctional photoresponsive organic transistor, adjust the irradiation light intensity from 0.00068-0.0686mW/cm 2 , test and record the output characteristic curve and transfer characteristic curve of the OFET with a semiconductor parameter meter.

图11是本发明的实施例中4中多功能光响应晶体管器件作为光电探测器时输出电流随光照信号强度的变化示意图。可以发现,随着光强增加,器件电流持续增加。11 is a schematic diagram showing the change of the output current with the intensity of the light signal when the multifunctional photo-responsive transistor device in Example 4 is used as a photodetector. It can be found that as the light intensity increases, the device current continues to increase.

如图12所示,实施例4提供的多功能光响应晶体管器件作为光敏传感器时的光开关比约为106。说明器件具有良好的光响应能力,可以作为光电晶体管。As shown in FIG. 12 , the optical on-off ratio of the multifunctional photo-responsive transistor device provided in Example 4 as a photosensor is about 10 6 . It shows that the device has good photoresponse ability and can be used as a phototransistor.

实施例的作用与效果Action and effect of the embodiment

根据实施例1所涉及的多功能光响应晶体管器件,因为其活性层采用叶绿素/有机半导体,所以,本实施例1提供的多功能光响应晶体管器件不仅可以实现对光信号的探测,具有很高灵敏度,而且制备的晶体管传感器为三端晶体管器件,双电压驱动,晶体管的输出信号和转移信号均可作为响应的电学信号,易于实现不同模式下的光信号检测以及转换,同时制备工艺简单,成本低,使用方便,容易实现大规模生产。According to the multi-functional photo-responsive transistor device involved in Embodiment 1, because the active layer uses chlorophyll/organic semiconductor, the multi-functional photo-responsive transistor device provided in Embodiment 1 can not only realize the detection of optical signals, but also has high performance. Sensitivity, and the prepared transistor sensor is a three-terminal transistor device, driven by dual voltages, the output signal and transfer signal of the transistor can be used as electrical signals in response, and it is easy to realize the detection and conversion of optical signals in different modes. At the same time, the preparation process is simple and the cost Low, easy to use, easy to achieve mass production.

根据实施例2所涉及的多功能光响应晶体管器件作为光电探测器的应用,因为对多功能光响应晶体管器件施加-60V的栅极电压,所以多功能光响应晶体管器件对光和暗信号做出迅速响应,光暗电流比可达到106,具有成像能力。According to the application of the multi-functional photo-responsive transistor device involved in Example 2 as a photodetector, since the multi-functional photo-responsive transistor device is applied with a gate voltage of -60V, the multi-functional photo-responsive transistor device can respond to light and dark signals. Quick response, the ratio of light to dark current can reach 10 6 , and it has imaging ability.

根据实施例3所涉及的多功能光响应晶体管器件作为光刺激突触器件的应用,因为对多功能光响应晶体管器件施加60V的栅极电压,所以多功能光响应晶体管器件可以对于光信号展示出模拟生物突触的特性,实现动态学习,遗忘,图形处理如对比度增强,以及网络认知模型计算识别的功能。According to the application of the multifunctional photoresponsive transistor device involved in Example 3 as a photo-stimulated synapse device, since the gate voltage of 60 V was applied to the multifunctional photoresponsive transistor device, the multifunctional photoresponsive transistor device could exhibit an optical signal Simulate the properties of biological synapses to realize the functions of dynamic learning, forgetting, graph processing such as contrast enhancement, and computational recognition of network cognitive models.

根据实施例4所涉及的多功能光响应晶体管器件,因为其活性层采用叶绿素衍生物/有机半导体,所以本发明的器件,对于叶绿素及其衍生物均作为活性材料均具有很好的光响应效果,适用光敏材料丰富。同时本实施例4提供的多功能光响应晶体管器件制备工艺简单,成本低,容易生产。According to the multifunctional light-responsive transistor device involved in Example 4, because its active layer uses chlorophyll derivatives/organic semiconductors, the device of the present invention has a good light-responsive effect for both chlorophyll and its derivatives as active materials , suitable for photosensitive materials rich. At the same time, the multifunctional light-responsive transistor device provided in the fourth embodiment is simple in preparation process, low in cost, and easy to produce.

上述实施方式为本发明的优选案例,并不用来限制本发明的保护范围。The above embodiments are preferred cases of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (10)

1.一种多功能光响应晶体管器件,其特征在于,包括:衬底、活性层以及电极,1. a multifunctional photoresponse transistor device, is characterized in that, comprises: substrate, active layer and electrode, 其中,所述活性层的材料包括有机半导体材料以及叶绿素,所述叶绿素重量占活性层总重量的0.1%-90%。Wherein, the material of the active layer includes organic semiconductor material and chlorophyll, and the weight of the chlorophyll accounts for 0.1%-90% of the total weight of the active layer. 2.根据权利要求1所述的多功能光响应晶体管器件,其特征在于:2. The multifunctional light-responsive transistor device according to claim 1, wherein: 其中,所述叶绿素为天然叶绿素,人工合成叶绿素或叶绿素衍生物。Wherein, the chlorophyll is natural chlorophyll, artificially synthesized chlorophyll or chlorophyll derivative. 3.根据权利要求1所述的多功能光响应晶体管器件,其特征在于:3. The multifunctional photoresponsive transistor device according to claim 1, wherein: 其中,所述半导体为具有苯环结构的有机半导体或者具有噻吩结构的有机半导体。Wherein, the semiconductor is an organic semiconductor having a benzene ring structure or an organic semiconductor having a thiophene structure. 4.根据权利要求1所述的多功能光响应晶体管器件,其特征在于:4. The multifunctional photoresponsive transistor device according to claim 1, wherein: 其中,所述衬底为玻璃衬底、陶瓷衬底、硅衬底、PET衬底或PLA衬底。Wherein, the substrate is a glass substrate, a ceramic substrate, a silicon substrate, a PET substrate or a PLA substrate. 5.根据权利要求1所述的多功能光响应晶体管器件,其特征在于:5. The multifunctional photoresponsive transistor device according to claim 1, wherein: 其中,所述电极的材质为导电金属、导电合金或导电金属氧化物。Wherein, the material of the electrode is conductive metal, conductive alloy or conductive metal oxide. 6.根据权利要求1所述的多功能光响应晶体管器件,其特征在于:6. The multifunctional photoresponsive transistor device according to claim 1, wherein: 其中,所述电极数量为两个,两个所述电极之间设置有导电沟道,所述导电沟道长为4μm-100μm,所述导电沟道宽为0.2mm-10mm。Wherein, the number of the electrodes is two, a conductive channel is provided between the two electrodes, the length of the conductive channel is 4 μm-100 μm, and the width of the conductive channel is 0.2 mm-10 mm. 7.一种多功能光响应晶体管器件的制备方法,用于制备权利要求1-6任意一项所述的多功能光响应晶体管器件,其特征在于,包括如下步骤:7. A preparation method of a multifunctional light-responsive transistor device, for preparing the multifunctional photo-responsive transistor device according to any one of claims 1-6, characterized in that, comprising the following steps: 步骤1,清洗衬底,吹干,对所述衬底进行OTS处理,得中间体A;Step 1, cleaning the substrate, blowing dry, and performing OTS treatment on the substrate to obtain Intermediate A; 步骤2,在所述中间体A的表面滴加天然叶绿素/有机半导体溶液,然后在所述衬底表面形成活性层,得到中间体B,在所述衬底表面形成活性层的方法为旋涂、滴涂、提拉或刮涂中的任意一种;Step 2, drop the natural chlorophyll/organic semiconductor solution on the surface of the intermediate A, and then form an active layer on the surface of the substrate to obtain the intermediate B, and the method for forming the active layer on the surface of the substrate is spin coating , drip, pull or scrape any one; 步骤3,通过掩膜的方式在高真空条件下将电极材料蒸镀或压印到所述中间体B的活性层上表面,形成两个电极,得多功能光响应晶体管器件。Step 3, the electrode material is evaporated or imprinted on the upper surface of the active layer of the intermediate B by means of a mask under high vacuum conditions to form two electrodes, a multifunctional light-responsive transistor device. 8.根据权利要求7所述的多功能光响应晶体管器件的制备方法,其特征在于:8. The preparation method of the multifunctional light-responsive transistor device according to claim 7, wherein: 其中,当在步骤2中采用旋涂的方法在衬底表面形成活性层时,旋涂转速为200r/min-6000r/min,旋涂的时间为10s-300s。Wherein, when the active layer is formed on the surface of the substrate by the spin coating method in step 2, the spin coating speed is 200r/min-6000r/min, and the spin coating time is 10s-300s. 9.权利要求1-5任意一项所述的多功能光响应晶体管器件作为光电探测器的应用,其特征在于,所述多功能光响应晶体管器件的栅极电压为-5V~-70V。9 . The application of the multifunctional photoresponsive transistor device according to any one of claims 1 to 5 as a photodetector, wherein the gate voltage of the multifunctional photoresponsive transistor device is -5V to -70V. 10 . 10.权利要求1-5任意一项所述的多功能光响应晶体管器件作为光刺激突触器件的应用,其特征在于,所述多功能光响应晶体管器件的栅极电压为5V~70V。10 . The application of the multifunctional light-responsive transistor device according to any one of claims 1 to 5 as a photo-stimulated synapse device, wherein the gate voltage of the multifunctional photo-responsive transistor device is 5V to 70V. 11 .
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