CN111638627A - Method for manufacturing pixel-level color filter film chip for identifying finger print under screen - Google Patents
Method for manufacturing pixel-level color filter film chip for identifying finger print under screen Download PDFInfo
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- CN111638627A CN111638627A CN202010485824.8A CN202010485824A CN111638627A CN 111638627 A CN111638627 A CN 111638627A CN 202010485824 A CN202010485824 A CN 202010485824A CN 111638627 A CN111638627 A CN 111638627A
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- Prior art keywords
- color filter
- pixel
- filter film
- cmos sensor
- negative photoresist
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 23
- 238000003491 array Methods 0.000 claims abstract description 6
- 238000007747 plating Methods 0.000 claims description 8
- 239000003513 alkali Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000003086 colorant Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000002360 preparation method Methods 0.000 abstract description 6
- 238000001914 filtration Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 229910052809 inorganic oxide Inorganic materials 0.000 abstract description 2
- 238000000233 ultraviolet lithography Methods 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1318—Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
Abstract
The invention discloses a method for manufacturing a pixel-level color filter film chip for identifying fingerprints under a screen, which comprises the following steps: the negative photoresist is provided with a color filter film array on a scale through an ultraviolet lithography technology, the color filter film array and the cmos sensor with pixel units are packaged, a single pixel filter block of the color filter film array corresponds to N pixel units on the cmos sensor, and a plurality of color filter film arrays are distributed on the cmos sensor in a discrete mode. Compared with the traditional preparation method of the multi-channel filter film, the preparation method omits two links of removing the photoresist and coating the film, fully exerts the photoresist function of the excessive product in the previous preparation process, expands the filtering function, does not need to plate inorganic oxide photoresist, simplifies the link and reduces the cost.
Description
Technical Field
The invention relates to the field of manufacturing of spectrum chips, in particular to a method for manufacturing a pixel-level color filter film chip for identifying fingerprints under a screen.
Background
Compared with the conventional spectrum detection device, the spectrum chip has the advantages of low load, high integration level, low energy consumption and the like, is widely concerned in recent years, and can be integrated in mobile electronic devices such as mobile phones and the like due to the advantage of high integration level. At present, the underscreen fingerprint technology mainly adopts an oled + cmos pinhole imaging technology, full-screen identification cannot be achieved, and the LTPS technology is only suitable for soft screens and has higher cost. The under-screen spectrum detection module manufactured by the a-si process can realize large-area identification capability at any position under the screen, and the maximum identification area can be the same as that of the screen. The pixel-level color filter film is a key component, and the current under-screen spectral detector only has three RGB color filter structures, so that the application requirements of more spectral channels with higher precision cannot be met.
In the existing method for manufacturing a multi-channel filter film in the patent, for example, the patent publication No. CN1027074878B, the patent name is a method for manufacturing a multi-channel integrated optical filter, which needs to perform a photoresist removing step after defining an area by using a photolithography technique, remove the photoresist, and then use a coating technique to prepare a band-pass filter film made of materials such as SiO2, TiO2, and the like. The process is complex, the yield is low, the manufacturing cost is in the order of hundred thousand, and the method is difficult to be used for civil application.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a method for manufacturing a pixel-level color filter film chip for identifying fingerprints under a screen.
In order to realize the purpose, the following technical scheme is provided:
the manufacturing method of the pixel-level color filter film chip for identifying the finger print under the screen comprises the following steps:
s1: preparing a plating-accompanied sheet as a substrate, wherein the transmittance T of the plating-accompanied sheet in a visible light wave band is more than or equal to 90%;
s2: uniformly spin-coating negative photoresist on the plating assistant sheet, wherein the thickness of the negative photoresist is 1-2 microns;
s3: covering a mask plate on the negative photoresist for ultraviolet exposure, wherein the hollow area of the mask plate can transmit light, and irradiating the negative photoresist to obtain an exposure area which can be solidified on a plating partner;
s4: removing the mask plate, cleaning with alkali liquor for development, washing the unexposed area away, and leaving the desired monochromatic pixel filter block;
s5: repeating the steps S2-S4, and adopting negative photoresist with different colors to manufacture a 3 x 3 pixel filter block with 9 periods, and finally obtaining a color filter film array;
s6: the method comprises the following steps of packaging a color filter film array and a cmos sensor with pixel units, wherein a single pixel filter block of the color filter film array corresponds to N pixel units on the cmos sensor, and a plurality of color filter film arrays are distributed on the cmos sensor in a discrete manner.
Preferably, the color filter film matrix finally forms a visible light film system, a near ultraviolet light film system and a near infrared light film system.
The invention has the beneficial effects that:
1. the corresponding relation between the pixel filtering block and the pixel unit is 1: n, the processing degree of difficulty of filter membrane has been reduced like this, has improved the fault-tolerant rate for it changes the cost step-down to produce the line upgrading.
2. Compared with the traditional preparation method of the multi-channel filter film, the preparation method omits two links of removing the photoresist and coating the film, fully exerts the photoresist function of the excessive product in the previous preparation process, expands the filtering function, does not need to plate inorganic oxide photoresist, simplifies the link and reduces the cost.
3. By utilizing the high-precision filter film of the 9-pixel period module, more spectral information can be realized compared with the existing RGB 3-pixel period module, the identification precision is obviously improved, more spectral information can be obtained, and besides the existing fingerprint identification function, the applications of heat source detection and identification, human skin detection, blood sugar spectrum detection and the like can be realized.
4. The color filter film arrays can completely cover detector pixels according to specific use scenes, and can also be distributed on the cmos sensor in a discrete mode, so that the fingerprint identification can be realized at multiple angles, blanks are left, the cost is saved, the existing algorithm can be compatible, and the conflict with other functions is avoided.
5. Compared with the traditional fingerprint identification technology, the fingerprint identification technology relies on the principle of fingerprint image identification, the detector has the function of spectrum detection after the light filtering film system is added, and the real and false fingerprints can be accurately distinguished through analyzing the obtained spectrum data by utilizing the principle that the scattering spectra of the finger and the false fingerprint model are different, so that the safety of fingerprint identification is improved.
Drawings
FIG. 1 is a schematic diagram of a process for manufacturing a pixel-level color filter chip for underscreen fingerprint identification;
FIG. 2 is a schematic view of a color filter array;
FIG. 3 is a diagram of a filter block and a pixel unit;
FIG. 4 is a diagram illustrating a discrete distribution of color filter arrays.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In this embodiment, a discrete distribution is adopted, and the corresponding relationship between the pixel filter block and the pixel unit is 1: 4.
the method for manufacturing the pixel-level color filter film chip for identifying the finger print under the screen as shown in fig. 1 comprises the following steps:
s1: preparing a plating assistant sheet 10 as a substrate, wherein the transmissivity T of the plating assistant sheet 10 in a visible light wave band is more than or equal to 90%;
s2: uniformly spin-coating negative photoresist 11 on the plating assistant sheet 10;
s3: covering a mask plate 12 on the negative photoresist 11 for ultraviolet exposure, wherein a hollow area of the mask plate 12 can transmit light, and an exposure area obtained by irradiating the negative photoresist 11 can be solidified on the plating assistant sheet 10;
s4: removing the mask plate 12, cleaning with alkali liquor for development, washing the unexposed area away, and leaving the desired monochromatic pixel filter block 13;
s5: repeating the steps S2-S4 to fabricate a 3 × 3 9-cycle pixel filter block by using the negative photoresist 11 of different colors, so as to obtain the color filter array 14 as shown in fig. 2;
s6: the color filter array 14 is packaged with the cmos sensor 16 having the pixel units 15, a single pixel filter block 13 of the color filter array 14 corresponds to 4 pixel units 15 on the cmos sensor as shown in fig. 3, and a plurality of color filter arrays 14 are discretely distributed on the cmos sensor 16 as shown in fig. 4.
The color filter film matrix finally forms a visible light film system, a near ultraviolet light film system and a near infrared light film system.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (2)
1. The manufacturing method of the pixel-level color filter film chip for identifying the finger print under the screen is characterized by comprising the following steps of:
s1: preparing a plating-accompanied sheet as a substrate, wherein the transmittance T of the plating-accompanied sheet in a visible light wave band is more than or equal to 90%;
s2: uniformly spin-coating negative photoresist on the plating assistant sheet, wherein the thickness of the negative photoresist is 1-2 microns;
s3: covering a mask plate on the negative photoresist for ultraviolet exposure, wherein the hollow area of the mask plate can transmit light, and irradiating the negative photoresist to obtain an exposure area which can be solidified on a plating partner;
s4: removing the mask plate, cleaning with alkali liquor for development, washing the unexposed area away, and leaving the desired monochromatic pixel filter block;
s5: repeating the steps S2-S4, and adopting negative photoresist with different colors to manufacture a 3 x 3 pixel filter block with 9 periods, and finally obtaining a color filter film array;
s6: the method comprises the following steps of packaging a color filter film array and a cmos sensor with pixel units, wherein a single pixel filter block of the color filter film array corresponds to N pixel units on the cmos sensor, and a plurality of color filter film arrays are distributed on the cmos sensor in a discrete manner.
2. The method for manufacturing a pixel-level color filter chip for underscreen fingerprint identification according to claim 1, wherein the color filter matrix finally forms a visible light film system, a near ultraviolet light film system and a near infrared light film system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010485824.8A CN111638627A (en) | 2020-06-01 | 2020-06-01 | Method for manufacturing pixel-level color filter film chip for identifying finger print under screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010485824.8A CN111638627A (en) | 2020-06-01 | 2020-06-01 | Method for manufacturing pixel-level color filter film chip for identifying finger print under screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111638627A true CN111638627A (en) | 2020-09-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010485824.8A Pending CN111638627A (en) | 2020-06-01 | 2020-06-01 | Method for manufacturing pixel-level color filter film chip for identifying finger print under screen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111638627A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102819058A (en) * | 2012-08-30 | 2012-12-12 | 广州中国科学院先进技术研究所 | Making method of multi-channel integrated optical filter |
| CN109255285A (en) * | 2017-07-13 | 2019-01-22 | 三星电子株式会社 | Based on optical fingerprint sensor, include its electronic device and its operating method |
| CN110426888A (en) * | 2019-07-23 | 2019-11-08 | 武汉华星光电技术有限公司 | Display panel and display device |
-
2020
- 2020-06-01 CN CN202010485824.8A patent/CN111638627A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102819058A (en) * | 2012-08-30 | 2012-12-12 | 广州中国科学院先进技术研究所 | Making method of multi-channel integrated optical filter |
| CN109255285A (en) * | 2017-07-13 | 2019-01-22 | 三星电子株式会社 | Based on optical fingerprint sensor, include its electronic device and its operating method |
| CN110426888A (en) * | 2019-07-23 | 2019-11-08 | 武汉华星光电技术有限公司 | Display panel and display device |
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Application publication date: 20200908 |