CN111628406B - Strip mounting clamp with vacuum adsorption effect and strip mounting method - Google Patents
Strip mounting clamp with vacuum adsorption effect and strip mounting method Download PDFInfo
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- CN111628406B CN111628406B CN201910149166.2A CN201910149166A CN111628406B CN 111628406 B CN111628406 B CN 111628406B CN 201910149166 A CN201910149166 A CN 201910149166A CN 111628406 B CN111628406 B CN 111628406B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to a bar mounting clamp with a vacuum adsorption effect and a bar mounting method, belonging to the field of semiconductor laser cavity surface coating, and comprising a support and a cover plate, wherein the back of the support is provided with a groove, the back of the support is provided with the cover plate, and the cover plate and the groove form a closed cavity; the front surface of the bracket is provided with four ridges, each ridge is provided with a slit, the depth of each slit penetrates through the front surface of the bracket and is positioned in the groove, the slits are communicated with the closed chamber, the upper side of the bracket is provided with a through hole, one end of each through hole is the same as the closed chamber, and the other end of each through hole is connected with a vacuum pump; the height of two middle ridges is less than the height of two outside ridges, and the interval of two middle ridges is less than the length of bar, and the interval of two outside ridges is greater than the length of bar and is less than the length of accompanying the strip, and the bar is higher than accompanying the strip in the chamber length direction after the strip is adorned. The bar arranging device is simple in structure, low in cost and convenient to operate, and the problem of bar collapse in the bar arranging process is solved through vacuum adsorption, so that the uniformity of the bar cavity surface is improved.
Description
Technical Field
The invention relates to a bar mounting clamp with a vacuum adsorption effect and a bar mounting method, and belongs to the technical field of cavity surface coating of semiconductor lasers.
Background
Semiconductor laser products are favored by various industries by virtue of own advantages. The manufacturing process of the semiconductor laser is more and more mature and stable, and in order to pursue high power, high conversion efficiency and long service life, the semiconductor laser needs to be coated on the cavity surface to optimize the reflectivity.
In the process of coating the film on the semiconductor laser, a plurality of bars need to be arranged together, and then the film is coated on the two cavity surfaces respectively. The bars of semiconductor lasers are small and delicate and cumbersome to arrange. In japan, germany and other countries, an automatic binding machine has been produced to replace the manual binding, but the price of the equipment is relatively high and the efficiency is not high. Currently, most of the industry uses manual loading of the strips, with forceps or a vacuum wand to pick up the strips, which are then placed in a specially made jig. In the process of assembling the bars, because the factors of static electricity, friction, adhesion and the like exist among the bars, the cavity surfaces of the bars are not easy to arrange in order. When the bar with uneven cavity surface is coated, a shielding effect exists, so that the film layer is uneven, and the quality and the stability of the product are influenced. In order to solve the problems, the main measure at present is to adopt a strip accompanying process, namely, the strips are separated by a matching strip and a strip accompanying the cavity length of which is shorter than the strips, the strips are in a protruding state in the cavity surface direction, and the shielding effect of the strips can be reduced during film coating. In order to reduce the membrane material infiltration of the bar PN surface, the protruding amount of the bar cavity length is generally controlled within ten and several microns. The bars may not protrude out of alignment due to metal adhesion and technology.
Chinese patent CN104218446A discloses a semiconductor laser bar loading device and method, the device includes a support and a clamp, four ridges are provided on the support, the height of the middle two ridges is the same and lower than the height of the outer two ridges. The clamp comprises a fixed clamping plate, a movable clamping plate, a guide post and a spring. The guide post is connected with the fixed clamping plate; the movable clamping plate is provided with grooves corresponding to the four ridges of the support and can move up and down along the guide post; a tension spring is arranged between the fixed splint and the movable splint. When the batten is installed, the clamp is placed on the support, the movable clamping plate is pushed upwards, the accompanying batten and the batten are placed on the ridge corresponding to the support alternately from bottom to top, and then the movable clamping plate moves downwards to clamp the batten. The technical core of the patent is that two groups of ridges are utilized to determine the height difference, the bar cavity surface falls on the middle two ridges, and the associated cavity surface falls on the ridges on the two sides of the outer edge. After the bars are arranged, the protruding amount of the height difference of the bars in the cavity length direction effectively improves the shielding effect of the bars. However, when the bars are arranged, there is a problem of bar collapse, and the problem of bar collapse becomes more prominent as the cavity length becomes smaller. And because factors such as static electricity, friction and metal adhesion are difficult to guarantee that the bars fall on the two ridges in the middle completely, accompany the bars fall on the two ridges on the outside completely, the operation is inconvenient.
The invention content is as follows:
aiming at the problems that the bars are easy to collapse and not easy to arrange neatly when the bars are arranged on the semiconductor laser in the prior art, the invention provides the bar installing clamp and the bar installing method which have the advantages of simple structure, convenience in operation, better bar arranging effect by matching with the accompanying bars and have the vacuum adsorption effect.
The invention adopts the following technical scheme:
a strip mounting clamp with a vacuum adsorption effect comprises a support and a cover plate, wherein a groove is formed in the back of the support, the cover plate is fixed on the groove in the back of the support, and a closed cavity is formed by the cover plate and the groove;
the front surface of the support is provided with four ridges, each ridge is provided with a slit, the length of each slit is less than that of each ridge, preferably, the distance between each slit and each ridge is about 3mm, the depth of each slit penetrates through the front surface of the support and is positioned in each groove, each slit is communicated with the closed chamber, the upper side of the support is provided with a through hole, one end of each through hole is the same as that of the closed chamber, the other end of each through hole is connected with a connecting pipe, each connecting pipe is connected with a vacuum pump, and the vacuum force of the vacuum pump is adjustable;
the height of two ridges in the middle of four ridges is the same, and the height of two ridges in the outside is the same, and the height that highly is less than two ridges in the outside of two ridges in the middle, the interval of two ridges in the middle slightly is lighter than the length of stick, guarantee that the stick can place on two ridges in the middle can, the interval of two ridges in the outside is greater than the length of stick and slightly is less than the length of accompanying the stick, accompanies the strip and places on two ridges in the outside, the chamber length of stick is greater than the chamber length of accompanying the strip, guarantees to adorn the strip after, the stick all is higher than accompanying the strip in chamber length direction.
Preferably, the through hole positioned at the upper side of the bracket is provided with an internal thread, and one end of the connecting pipe is provided with an external thread matched with the internal thread of the through hole.
Preferably, the upper surface of support is the inclined plane, becomes certain contained angle with the horizontal plane, and inclination guarantees that whole can not topple over after placing the batten and accompanying the batten.
Preferably, the included angle between the upper surface of the support and the horizontal plane is 40-70 degrees.
Preferably, a sealing ring matched with the groove is placed in the groove, and the cover plate compresses the sealing ring to ensure the sealing property between the groove and the cover plate.
Further preferably, the shape of the groove is circular or square, and the like, and can be flexibly selected according to the situation, and correspondingly, the shape of the sealing ring is consistent with that of the groove, and the sealing ring and the groove are matched.
Further preferably, the bracket is connected with the cover plate through screws.
Preferably, the length of the cavity of the accompanying strip is 0.01-0.03 mm smaller than that of the cavity of the bar, the height of the two ridges in the middle is 0.005-0.015mm lower than that of the two ridges on the outer side, and after the bar is installed, the length of the cavity of the bar is 0.005-0.015mm higher than that of the accompanying strip.
Preferably, the length of the cavity of the bar is 0.02mm smaller than that of the bar, the height of the middle two ridges is 0.01mm lower than that of the outer two ridges, and after the bar is installed, the bar is 0.01mm higher than the bar in the cavity length direction.
The groove, the cover plate and the sealing ring of the bracket form a relative closed cavity, and the inside of the clamp is in a sealed state except for the four slits and the through hole positioned on the upper side of the bracket.
The invention discloses a bar loading method of a bar loading clamp with a vacuum adsorption effect, which comprises the following steps:
(1) opening a vacuum pump, vacuumizing the closed chamber of the bracket by the vacuum pump, and communicating the slits on the four ridges with the outside to form a certain adsorption force;
(2) placing a clamp for clamping the bars on a bracket in an open state, sequentially and respectively placing the accompanying bars and the bars on the two outer ridges and the two middle ridges through the adsorption effect of the slit, and closing the clamp for clamping the bars and a vacuum pump of the bar installing clamp after the bar installing is finished;
(3) and coating the strips.
The invention has the beneficial effects that:
the bar arranging device is simple in structure, low in cost and convenient to operate, the problem of bar collapse in the bar arranging process is solved by means of vacuumizing and absorbing the bars, and the uniformity of the bar cavity surface is improved. The arrangement method of the accompanying strips is matched for use, the bars are guaranteed to be higher than the matching strips by 0.005-0.015mm in the cavity length direction, the shielding effect is further reduced, and the qualification rate of the bars is improved.
Description of the drawings:
FIG. 1 is a schematic structural diagram of the front side of a support of a bar loading fixture with vacuum adsorption function according to the present invention;
FIG. 2 is a schematic view of the structure of the back of the rack of the bar loading fixture with vacuum adsorption;
FIG. 3 is a schematic view of one of the structures of the cover plate of the present invention;
FIG. 4 is a schematic view of one of the structures of the connecting tube of the present invention;
FIG. 5 is a schematic view of one of the structures of the seal ring of the present invention;
FIG. 6 is a schematic view of one of the supporting frames, the cover plate and the sealing ring of the present invention;
wherein, 1-bracket, 2-cover plate, 3-groove, 4-slit, 5-through hole, 6-connecting pipe, A, B, C, D-ridge.
The specific implementation mode is as follows:
in order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific examples, but not limited thereto, and the present invention is not described in detail and is in accordance with the conventional techniques in the art.
Example 1:
as shown in fig. 1 to 6, a strip mounting fixture with vacuum adsorption effect comprises a support 1 and a cover plate 2, wherein a groove 3 is formed in the back surface of the support 1, the cover plate 2 is fixed on the groove 3 in the back surface of the support 1, and the cover plate 2 and the groove 3 form a closed chamber;
the front surface of the support 1 is provided with four ridges which are A, B, C, D respectively from left to right as shown in fig. 1, the four ridges are the same in length, each ridge is provided with a slit 4, the length of the slit 4 is smaller than that of the ridge, the distance between the slit 4 and the two ends of the ridge (A, B, C or D) is 3mm, the depth of the slit 4 penetrates through the front surface of the support 1 and is positioned in the groove 3, the slit 4 is communicated with the closed chamber, the upper side of the support 1 is provided with a through hole 5, one end of the through hole 5 is the same as the closed chamber, the other end of the through hole is connected with a connecting pipe 6, the connecting pipe 6 is connected with a vacuum pump;
the height of the two middle ridges B, C of the four ridges is the same, the height of the two outer ridges A, D is the same, the height of the two middle ridges B, C is smaller than the height of the two outer ridges A, D, the distance between the two middle ridges B, C is slightly smaller than the length of the bar, the bar can be placed on the two middle ridges B, C, the distance between the two outer ridges A, D is larger than the length of the bar and slightly smaller than the length of the accompanying bar, the accompanying bar is placed on the two outer ridges A, D, the cavity length of the bar is larger than the cavity length of the accompanying bar, and after the bar is mounted, the bar is higher than the accompanying bar in the cavity length direction.
Example 2:
the utility model provides a dress strip anchor clamps with vacuum adsorption, the structure is as shown in embodiment 1, and the difference is that through-hole 5 that is located support 1 upside is provided with the internal thread, and the one end of connecting pipe 6 is provided with the external screw thread that matches with the internal thread of through-hole.
Example 3:
the utility model provides a dress strip anchor clamps with vacuum adsorption, the structure is shown as embodiment 1, and the difference is that the upper surface of support 1 is the inclined plane, becomes certain contained angle with the horizontal plane, and inclination guarantees that whole can not topple over after placing the strip and accompany the strip.
Example 4:
the utility model provides a dress strip anchor clamps with vacuum adsorption, the structure is as shown in embodiment 3, and the difference is that the upper surface of support 1 is 40 ~ 70 ° with the contained angle of horizontal plane.
Example 5:
the utility model provides a dress strip anchor clamps with vacuum adsorption effect, the structure is shown as embodiment 1, and the difference is that, places rather than assorted sealing washer in the recess 3, and apron 2 compresses tightly sealing washer 7, guarantees the leakproofness between recess and the apron.
Example 6:
a bar loading clamp with a vacuum adsorption function is structurally shown as embodiment 1, except that a groove 3 is circular as shown in figure 2, and correspondingly, a sealing ring 7 is also circular as shown in figure 5.
Example 7:
the utility model provides a dress strip anchor clamps with vacuum adsorption effect, the structure is as shown in embodiment 1, and the difference is that, through screwed connection between support 1 and the apron 2, as shown in fig. 2 ~ 3, support 1 back four corners is provided with screw hole 8, and the apron four corners is provided with connecting hole 9 rather than corresponding, and the accessible screw is connected.
Example 8:
the structure of the strip mounting clamp with the vacuum adsorption effect is as shown in embodiment 1, except that the accompanying strips are 0.02mm shorter than the cavity length of the bar strips, the heights of the middle two ridges are 0.01mm lower than those of the outer two ridges, and after the strip mounting, the bar strips are 0.01mm higher than the accompanying strips in the cavity length direction.
Example 9:
a bar loading method of a bar loading clamp with a vacuum adsorption effect comprises the following steps:
(1) opening a vacuum pump, vacuumizing the closed chamber of the bracket 1 by the vacuum pump, and communicating the slits 4 on the four ridges with the outside and having certain adsorption force;
(2) placing the clamp for clamping the bars on the bracket 1 in an open state, sequentially placing the accompanying bars and the bars on the two outer ridges and the two middle ridges respectively through the adsorption effect of the slit 4, and closing the clamp for clamping the bars and the vacuum pump of the bar installing clamp after the bar installing is finished;
(3) and coating the strips.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. The strip mounting clamp with the vacuum adsorption effect is characterized by comprising a support and a cover plate, wherein a groove is formed in the back surface of the support, the cover plate is fixed on the groove in the back surface of the support, and a closed cavity is formed by the cover plate and the groove;
the front surface of the bracket is provided with four ridges, each ridge is provided with a slit, the length of the slit is smaller than that of the ridge, the depth of the slit penetrates through the front surface of the bracket and is positioned in the groove, the slit is communicated with the closed chamber, the upper side of the bracket is provided with a through hole, one end of the through hole is the same as that of the closed chamber, the other end of the through hole is connected with a connecting pipe, and the connecting pipe is connected with a vacuum pump;
the height of the middle two ridges of the four ridges is the same, the height of the outer two ridges is the same, the height of the middle two ridges is smaller than the height of the outer two ridges, the distance between the middle two ridges is smaller than the length of the bar, the distance between the outer two ridges is larger than the length of the bar and smaller than the length of the accompanying bar, the cavity length of the bar is larger than the cavity length of the accompanying bar, and the bar is higher than the accompanying bar in the cavity length direction after bar loading;
the upper surface of the bracket is an inclined surface and forms a certain included angle with the horizontal plane;
the upper surface of support and the contained angle of horizontal plane are 40 ~ 70.
2. The strip mounting jig with vacuum adsorption according to claim 1, wherein the through hole at the upper side of the support is provided with an internal thread, and one end of the connecting pipe is provided with an external thread matching the internal thread of the through hole.
3. The strip mounting fixture with vacuum adsorption function as claimed in claim 1, wherein a sealing ring matched with the groove is placed in the groove to ensure the sealing property between the groove and the cover plate.
4. The strip mounting jig with vacuum adsorption according to claim 1, wherein the groove is circular or square in shape.
5. The strip mounting fixture with vacuum adsorption function as claimed in claim 1, wherein the support and the cover plate are connected through screws.
6. The strip mounting fixture with vacuum adsorption effect as claimed in claim 1, wherein the accompanying strip is 0.01-0.03 mm shorter than the cavity length of the bar, the heights of the two middle ridges are 0.005-0.015mm lower than those of the two outer ridges, and after mounting, the bar is 0.005-0.015mm higher than the accompanying strip in the cavity length direction.
7. A bar loading method of the bar loading jig with vacuum adsorption of claim 1, comprising:
(1) opening a vacuum pump, vacuumizing the closed chamber of the bracket by the vacuum pump, and communicating the slits on the four ridges with the outside to form a certain adsorption force;
(2) placing a clamp for clamping the bars on a bracket in an open state, sequentially and respectively placing the accompanying bars and the bars on the two outer ridges and the two middle ridges through the adsorption effect of the slit, and closing the clamp for clamping the bars and a vacuum pump of the bar installing clamp after the bar installing is finished;
(3) and coating the strips.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910149166.2A CN111628406B (en) | 2019-02-28 | 2019-02-28 | Strip mounting clamp with vacuum adsorption effect and strip mounting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910149166.2A CN111628406B (en) | 2019-02-28 | 2019-02-28 | Strip mounting clamp with vacuum adsorption effect and strip mounting method |
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| Publication Number | Publication Date |
|---|---|
| CN111628406A CN111628406A (en) | 2020-09-04 |
| CN111628406B true CN111628406B (en) | 2021-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910149166.2A Active CN111628406B (en) | 2019-02-28 | 2019-02-28 | Strip mounting clamp with vacuum adsorption effect and strip mounting method |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501576B (en) * | 2020-11-30 | 2022-09-20 | 武汉光迅科技股份有限公司 | Clamp and clamping method for semiconductor laser bar |
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|---|---|---|---|---|
| JP2003263774A (en) * | 2002-03-08 | 2003-09-19 | Ricoh Co Ltd | Method and device for manufacturing integrated laser unit |
| CN102545041A (en) * | 2012-01-17 | 2012-07-04 | 苏州纳睿光电有限公司 | Coating strip of cavity surface of semiconductor laser and preparation method thereof |
| CN104218446A (en) * | 2014-09-22 | 2014-12-17 | 山东华光光电子有限公司 | Strip installing device and strip installing method for semiconductor laser |
| CN105006740A (en) * | 2015-07-23 | 2015-10-28 | 山东华光光电子有限公司 | End face coating fixture for stripe-geometry semiconductor laser and application thereof |
| CN108663764A (en) * | 2018-05-21 | 2018-10-16 | 武汉驿路通科技股份有限公司 | The method of optical fiber assembling jig and assembling optical fiber |
| CN208196537U (en) * | 2018-05-18 | 2018-12-07 | 深圳鑫振华光电科技有限公司 | Grinding machine vacuum adsorption fixture |
-
2019
- 2019-02-28 CN CN201910149166.2A patent/CN111628406B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003263774A (en) * | 2002-03-08 | 2003-09-19 | Ricoh Co Ltd | Method and device for manufacturing integrated laser unit |
| CN102545041A (en) * | 2012-01-17 | 2012-07-04 | 苏州纳睿光电有限公司 | Coating strip of cavity surface of semiconductor laser and preparation method thereof |
| CN104218446A (en) * | 2014-09-22 | 2014-12-17 | 山东华光光电子有限公司 | Strip installing device and strip installing method for semiconductor laser |
| CN105006740A (en) * | 2015-07-23 | 2015-10-28 | 山东华光光电子有限公司 | End face coating fixture for stripe-geometry semiconductor laser and application thereof |
| CN208196537U (en) * | 2018-05-18 | 2018-12-07 | 深圳鑫振华光电科技有限公司 | Grinding machine vacuum adsorption fixture |
| CN108663764A (en) * | 2018-05-21 | 2018-10-16 | 武汉驿路通科技股份有限公司 | The method of optical fiber assembling jig and assembling optical fiber |
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| CN111628406A (en) | 2020-09-04 |
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