CN111624870A - Inversion anti-integral saturation method for precise motion control - Google Patents
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Abstract
An inversion anti-integral saturation method for fine motion control, comprising: obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform; the control quantity is subjected to a preset saturation link and an advanced saturation link, and whether the control quantity is in a state of integral saturation is judged; if the controlled variable is in a state of being saturated by integral, obtaining a corrected controlled variable according to the controlled variable obtained by a preset saturation link and the controlled variable obtained by an advanced saturation link; and sending the corrected control quantity to a preset driver so as to drive the mechanical table body of the precision motion platform to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity. The integral saturation phenomenon can be inhibited, and the establishment time of the positioning motion and the uniform scanning of the precise motion platform is shortened.
Description
Technical Field
The application relates to the technical field of motion control, in particular to an inversion anti-integral saturation method for precise motion control.
Background
Precision motion platforms are commonly used in machine tool machining and semiconductor manufacturing industries. The motion time of a typical positioning motion and scanning motion is equal to the sum of the acceleration time, the setup time, the scanning time and the deceleration time. The acceleration time and the deceleration time are related to the maximum acceleration, the maximum jerk and the like of the displacement platform, the scanning time is determined by the scanning speed, and the establishment time directly accounts for the total time consumed by the movement. The motion time often influences the production efficiency of the devices, and from the perspective of improving economic output, the precision motion platform needs to reduce the motion time of positioning motion and scanning motion as much as possible, so that certain requirements are provided for motion performance indexes such as scanning speed, maximum acceleration, establishment time and the like.
The motion control method of the precision motion platform adopts classical PID control and the like. In order to reduce the acceleration time and the deceleration time, the thrust of the actuating motor needs to be increased as much as possible, but the negative effect of the method is that after the acceleration and deceleration stage is finished, the controller is easy to generate an integral saturation phenomenon to cause large overshoot, so that the setup time is prolonged, and the yield is directly influenced negatively. The control system integral saturation resisting method is generally characterized in that a correction coefficient of an integral deviation signal is calculated through a difference value between a PID control quantity and a saturation link upper limit, and an overshoot phenomenon is restrained. The literature defines the integral saturation depth on the basis of traditional inversion anti-integral saturation and sets a threshold constant, and the value of an anti-integral saturation compensation coefficient is automatically adjusted by judging the relation between the integral saturation depth and the threshold, so that the overall performance of an algorithm and a control system is improved. These methods all function when the controlled variable is saturated, without the early warning effect of integral saturation.
Disclosure of Invention
The application mainly aims to provide an inversion anti-integral saturation method for precise motion control, and aims to solve the technical problems that integral saturation is easy to occur in a precise motion platform motion control method in the prior art, large overshoot is caused, and further the establishment time of positioning motion and uniform scanning motion is prolonged.
To achieve the above object, a first aspect of embodiments of the present application provides an inversion anti-integral saturation method for fine motion control, including:
obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform;
the control quantity is subjected to a preset saturation link and an advanced saturation link, whether the control quantity is in a state of integral saturation is judged, and the saturation upper limit of the advanced saturation link is smaller than that of the preset saturation link;
if the control quantity is in a state of being saturated by integration, obtaining a corrected control quantity by utilizing the control quantity obtained through the preset saturation link and the control quantity obtained through the advanced saturation link;
and sending the corrected control quantity to a preset driver so as to drive the precision motion platform mechanical table body to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity.
Optionally, the using the control quantity obtained through the preset saturation link and the control quantity obtained through the advanced saturation link includes:
wherein: u. ofctrlFor the corrected control quantity, PD(s) is a proportional-derivative controller, KpIs a gain factor, TiAs integral time coefficient, TsFor inverting time coefficients, TaFor leading inversion time coefficient, usFor the controlled variable, u, obtained through said preset saturation stepaThe control quantity obtained through the advanced saturation link.
Optionally, the control quantity u obtained by using the preset saturation linksCalculated by the following formula:
wherein u islimitAnd setting the saturation upper limit of the preset saturation link.
Optionally, the control quantity u obtained by using the advanced saturation linkaCalculated by the following formula:
wherein u isanticipatoryAnd the saturation upper limit of the leading saturation link.
Optionally, wherein,
gsto control the parameters, gs＞1。
Optionally, the obtaining of the control quantity of the precision motion platform mechanical stage body through the position deviation between the reference position and the actual position of the precision motion platform mechanical stage body includes:
acquiring a reference position of the mechanical table body of the precision motion platform, and detecting the actual position of the mechanical table body of the precision motion platform;
calculating the difference between the reference position and the actual position of the mechanical table body of the precision motion platform to obtain the position deviation;
and filtering the signal containing the position deviation by utilizing a preset PID controller to obtain the control quantity of the mechanical table body of the precise motion platform, wherein the PID controller comprises a plurality of wave traps and a low-pass filter.
Optionally, the wave traps are second-order wave traps, and the trap frequency of each wave trap is different;
NFi(s) is the ith wave trap, N is the total number of wave traps, omegan1，iAnd ωn2，iInflection frequency of the ith trap, βn1，iAnd βn2，iIs the corresponding damping coefficient.
A second aspect of the embodiments of the present application provides an inversion anti-integral saturation motion control apparatus for a precision motion platform, including:
the acquisition module is used for obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform;
the control quantity is subjected to a preset saturation link and an advanced saturation link, whether the control quantity is in a state of integral saturation is judged, and the saturation upper limit of the advanced saturation link is smaller than that of the preset saturation link;
the correction module is used for obtaining a corrected control quantity by utilizing the control quantity obtained according to the preset saturation link and the control quantity obtained according to the advanced saturation link if the control quantity is in a state of being subjected to integral saturation;
and the output module is used for sending the corrected control quantity to a preset driver so as to drive the precision motion platform mechanical table body to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity.
A third aspect of the present embodiments provides an electronic device, including:
the motion control method for the precise motion platform comprises a memory, a processor and a computer program which is stored in the memory and can run on the processor, wherein the processor executes the program to realize the inverse anti-integral saturation motion control method for the precise motion platform provided by the first aspect of the embodiment of the application.
It can be known from the foregoing embodiments of the present application that the inversion anti-integral saturation motion control method and apparatus for a precision motion platform, the electronic device, and the storage medium provided in the present application further add a leading saturation link on the basis of the preset saturation link, and the saturation upper limit of the newly added leading saturation link is smaller than the saturation upper limit of the preset saturation link and can be set by parameters. The advanced saturation link is more sensitive to the integral saturation phenomenon, and the control quantity is adjusted when the control quantity is about to be saturated but not yet saturated, so that the advanced adjustment function is achieved. Compared with the traditional preset saturation link, the suppression effect is better, and the positioning motion and uniform scanning establishment time of the precision motion platform can be reduced more. When the method is applied to semiconductor equipment, the time for establishing the positioning and scanning of the precise motion platform for the wafer can be shortened, and the working efficiency of the equipment for manufacturing and detecting the semiconductor can be improved.
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In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic flowchart of an inversion anti-integral saturation motion control method for a precision motion platform according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a motion control structure of an inversion anti-integral saturation motion control method for a precision motion platform according to an embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of a conventional preset saturation link in a controller according to an embodiment of the present application;
FIG. 4 is a schematic diagram of an inversion anti-integral saturation structure with a leading saturation element in a controller according to an embodiment of the present application;
FIG. 5 is a perspective view of a position tracking curve provided by an embodiment of the present application;
FIG. 6 is an enlarged partial view of a position tracking curve provided in accordance with an embodiment of the present application;
FIG. 7 is a speed tracking profile panorama provided in accordance with an embodiment of the present application;
FIG. 8 is an enlarged partial view of a velocity tracking curve provided by an embodiment of the present application;
fig. 9 is a schematic structural diagram of a preset saturation link motion control apparatus for a precision motion platform according to an embodiment of the present disclosure;
fig. 10 shows a hardware configuration diagram of an electronic device.
Detailed Description
In order to make the purpose, features and advantages of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1, fig. 1 is a schematic flow chart of an inversion anti-integral saturation motion control method for a precision motion platform according to an embodiment of the present application, where the method mainly includes the following steps:
s101, obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform;
s102, judging whether the controlled variable is in a state of being about to be subjected to integral saturation or not through a preset saturation link and an advance saturation link, wherein the saturation upper limit of the advance saturation link is smaller than that of the preset saturation link;
s103, if the controlled variable is in a state of being saturated in integral, obtaining a corrected controlled variable by using the controlled variable obtained according to the preset saturation link and the controlled variable obtained by using the advanced saturation link;
and S104, sending the corrected control quantity to a preset driver so as to drive the mechanical table body of the precision motion platform to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity.
In this embodiment, a sum-lead saturation link is added on the basis of the preset saturation link, and the saturation upper limit of the newly added lead saturation link is smaller than the saturation upper limit of the preset saturation link and can be set by parameters. The advanced saturation link is more sensitive to the integral saturation phenomenon, and the control quantity is adjusted when the control quantity is about to be saturated but not yet saturated, so that the advanced adjustment function is achieved. Compared with the traditional preset saturation link, the suppression effect is better, and the positioning motion and uniform scanning establishment time of the precision motion platform can be reduced more.
As shown in fig. 2, the inversion anti-integral saturation motion control method for the precision motion platform shown in fig. 1 of the present application can be implemented by using the motion control principle structure diagram of the precision motion platform shown in fig. 2. In fig. 2, a closed-loop feedback control (including a forward channel and a feedback channel) is adopted for a motion control system of the precision motion platform, the controlled object is a mechanical stage body of the precision motion platform, the forward channel comprises a processor, a controller, a motor and a driver, and the feedback channel comprises a position measurement device. Specifically, the position measuring device executes a step of detecting an actual position of the precision motion platform mechanical stage, the processor executes a step of calculating a difference value between a reference position and an actual position of the precision motion platform mechanical stage to obtain a position deviation, the controller (i.e. the PID controller) performs filtering processing on a signal containing the position deviation to obtain a control quantity of the precision motion platform mechanical stage, the control quantity is subjected to a preset saturation link and an advanced saturation link to judge whether the control quantity is in a state to be subjected to integral saturation, and a saturation upper limit of the advanced saturation link is smaller than a saturation upper limit of the preset saturation link; if the controlled variable is in a state of being saturated by integration, obtaining a corrected controlled variable by using the controlled variable obtained according to the preset saturation link and the controlled variable obtained according to the advanced saturation link; and sending the corrected control quantity to a preset driver so as to drive the mechanical table body of the precision motion platform to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity. The integral saturation phenomenon of a motion control system of the precision motion platform is inhibited, and the establishment time of the positioning motion and the uniform scanning motion of the precision motion platform is shortened.
As shown in fig. 3 and 4, in one embodiment of the present application, in step S103, a corrected control amount is obtained by using the following formula 1;
wherein: u. ofctrlFor the corrected control quantity, PD(s) is a proportional-derivative controller, KpIs a gain factor, TiAs integral time coefficient, TsFor inverting time coefficients, TaFor leading inversion time coefficient, usFor the control quantity, u, obtained through a preset saturation stepaIs a control quantity obtained through an advanced saturation link.
In one embodiment of the present application, the control quantity u obtained through the preset saturation stepsCalculated by the following equation 2:
wherein u islimitThe saturation upper limit of the saturation link is preset.
In one embodiment of the present application, the control quantity u obtained through the early saturation stageaCalculated by the following equation 3:
wherein u isanticipatoryThe saturation upper limit of the leading saturation link.
In one of the embodiments of the present application, wherein,
gsto control the parameters, gs＞1。
More, the control parameter gsThe value of (A) determines the lead of the lead saturation linkDegree of the disease. If g issToo large, it may have a serious effect of suppressing the controlled variable, and the control capability of the feedback control system may not be fully exerted. If g issToo close to 1, the look-ahead characteristic is not apparent. Thus, gsIn actual debugging, a compromise value needs to be obtained by continuously trying, and the judgment is based on whether the integral saturation phenomenon is sufficiently suppressed or not and whether the establishment time of the uniform scanning of the precision motion platform meets the design requirement or not.
In one embodiment of the present application, the obtaining the control variable of the precision motion platform mechanical stage body through the position deviation between the reference position and the actual position of the precision motion platform mechanical stage body comprises: acquiring a reference position of the mechanical table body of the precision motion platform, and detecting the actual position of the mechanical table body of the precision motion platform; calculating the difference between the reference position and the actual position of the mechanical table body of the precision motion platform to obtain the position deviation; and filtering the signal containing the position deviation by using a preset PID controller to obtain the control quantity of the mechanical table body of the precise motion platform, wherein the PID controller comprises a wave trap and a low-pass filter.
Wherein the wave trap corresponds to different resonance peaks of the mechanical stage for suppressing resonance of the mechanical stage. The low pass filter quickly attenuates gain outside the control system bandwidth, thereby acting to suppress interference.
More specifically, the signal of the position deviation is filtered, and equation 4 is as follows:
efLF(s) NF(s) e equation 4
Wherein: e is a signal of the position deviation, efNf(s) is a trap and lf(s) is a low-pass filter for the position-shifted signal processed by the trap and the low-pass filter.
In one embodiment of the present application, the wave traps are second-order wave traps, and the trap frequency of each wave trap is different;
NFi(s) is the ith wave trap, N is the total number of wave traps, omegan1，iAnd ωn2，iInflection frequency of the ith trap, βn1，iAnd βn2，iIs the corresponding damping coefficient.
More specifically, the low-pass filter may be a first-order or second-order low-pass filter, and the typical first-order low-pass filter is calculated as follows:
wherein: omegalIs the knee frequency.
Further, a typical position trajectory of the precision motion platform is an S-curve, a PID method without anti-integral saturation, a traditional inversion anti-integral saturation method and an improved inversion anti-integral saturation method with an advanced saturation link are adopted, and a position tracking curve is shown in fig. 5 and 6.
Further, a typical scanning speed track of the precision motion platform is a derivative of a position track, a PID method without anti-integral saturation, a traditional inversion anti-integral saturation method with a preset saturation link and an improved inversion anti-integral saturation method with an advance saturation link are adopted, and a speed tracking curve is shown in fig. 7 and 8. It can be obviously found that the overshoot of the PID controller without the anti-integral saturation design is large, and the establishment time is long. The traditional inversion anti-integral saturation method inhibits overshoot to a certain extent, and the establishment time is reduced to a certain extent. The overshoot of the improved inversion anti-windup method is further suppressed and the settling time is shorter compared to the 2 methods described above.
Referring to fig. 9, fig. 9 is a schematic structural diagram of an inversion anti-integral saturation motion control apparatus for a precision motion platform according to an embodiment of the present application, where the apparatus mainly includes:
the acquisition module 201 is configured to obtain a control quantity of the precision motion platform mechanical stage body through a position deviation between a reference position and an actual position of the precision motion platform mechanical stage body;
a determining module 202, configured to perform a preset saturation step and an advance saturation step on the control amount, and determine whether the control amount is in a state to be subjected to integral saturation, where a saturation upper limit of the advance saturation step is smaller than a saturation upper limit of the preset saturation step;
a correction module 203, configured to obtain a corrected control quantity according to the control quantity obtained by using the preset saturation link and the control quantity obtained by using the advanced saturation link if the control quantity is in a state that integral saturation is about to occur;
and the output module 204 is configured to send the corrected control amount to a preset driver, so as to drive the precision motion platform mechanical stage to perform positioning motion and uniform scanning motion according to the corrected control amount by using the driver.
In one embodiment of the present application, the correction module 203 is obtained by using equation 1:
wherein: u. ofctrlFor the corrected control quantity, PD(s) is a proportional-derivative controller, KpIs a gain factor, TiAs integral time coefficient, TsFor inverting time coefficients, TaFor leading inversion time coefficient, usFor the control quantity, u, obtained by inversion anti-product saturationaIs a control quantity obtained through an advanced saturation link.
In one embodiment of the present application, the control quantity u obtained through the preset saturation stepsCalculated by the following equation 2:
wherein u islimitThe saturation upper limit of the saturation link is preset.
In one embodiment of the present application, the control quantity u obtained through the early saturation stageaCalculated by the following equation 3:
wherein u isanticipatoryThe saturation upper limit of the leading saturation link.
In one of the embodiments of the present application, wherein,
gsto control the parameters, gs＞1。
In one embodiment of the present application, the acquisition module includes: the acquisition submodule is used for acquiring the reference position of the mechanical table body of the precision motion platform and detecting the actual position of the mechanical table body of the precision motion platform; the calculation submodule is used for calculating the difference between the reference position and the actual position of the mechanical table body of the precision motion platform to obtain the position deviation; and the filtering submodule is used for filtering the signal containing the position deviation by utilizing a preset PID controller to obtain the control quantity of the mechanical platform body of the precise motion platform, and the PID controller comprises a wave trap and a low-pass filter.
In one embodiment of the present application, the wave traps are second-order wave traps, and the trap frequency of each wave trap is different;
NFi(s) is the ith wave trap, N is the total number of wave traps, omegan1，iAnd ωn2，iInflection frequency of the ith trap, βn1，iAnd βn2，iIs the corresponding damping coefficient.
It can be understood that the inversion anti-integral saturation motion control devices for the precise motion platform shown in fig. 2 and fig. 9 are the same motion control device, and only the expression forms are different. The processor in fig. 2 is equivalent to the acquisition module 201 in fig. 9, and the controller in fig. 2 is equivalent to the determination module 202 and the correction module 203 and the output module 204 in fig. 9. Further, the processor and the controller may be integrated into one. The embodiment of the present application does not limit this.
Referring to fig. 10, fig. 10 is a diagram illustrating a hardware structure of an electronic device.
The electronic device described in this embodiment includes:
a memory 41, a processor 42, and a computer program stored on the memory 41 and executable on the processor, the processor implementing the inverse anti-integral saturation motion control method for a precision motion platform described in the embodiment of fig. 1.
Further, the electronic device further includes:
at least one input device 43; at least one output device 44.
The memory 41, processor 42 input device 43 and output device 44 are connected by a bus 45.
The memory 41 may be a high speed random access memory for storing a set of executable program code. The processor 42 is coupled to the memory 41 for calculating the motion control algorithm in real time, the input device 43 is used for collecting various physical quantities of the controlled driving system and the controlled driven system, and the output device 44 is used for outputting the control quantity calculated by the processor 42.
It should be noted that each functional module in each embodiment of the present disclosure may be integrated into one processing module, or each module may exist alone physically, or two or more modules are integrated into one module. The integrated module can be realized in a hardware mode, and can also be realized in a software functional module mode.
The integrated module, if implemented in the form of a software functional module and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be substantially or partially embodied in the form of a software product, or all or part of the technical solution that contributes to the prior art.
It should be noted that, for the sake of simplicity, the above-mentioned method embodiments are described as a series of acts or combinations, but those skilled in the art should understand that the present invention is not limited by the described order of acts, as some steps may be performed in other orders or simultaneously according to the present invention. Further, those skilled in the art will appreciate that the embodiments described in the specification are presently preferred and that no acts or modules are necessarily required of the invention.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In view of the above description of the inversion anti-integral saturation motion control method for a precision motion platform provided by the present invention, those skilled in the art will appreciate that the embodiments and applications of the present invention can be modified, and in summary, the present disclosure should not be construed as limiting the present invention.
Claims (10)
1. An inversion anti-integral saturation method for fine motion control, comprising:
obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform;
the control quantity is subjected to a preset saturation link and an advanced saturation link, whether the control quantity is in a state of integral saturation is judged, and the saturation upper limit of the advanced saturation link is smaller than that of the preset saturation link;
if the control quantity is in a state of being saturated by integration, obtaining a corrected control quantity by utilizing the control quantity obtained through the preset saturation link and the control quantity obtained through the advanced saturation link;
and sending the corrected control quantity to a preset driver so as to drive the precision motion platform mechanical table body to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity.
2. The method of claim 1, wherein the utilizing the control quantity obtained through the preset saturation stage and the control quantity obtained through the advanced saturation stage comprises:
wherein: u. ofctrlFor the corrected control quantity, PD(s) is a proportional-derivative controller, KpIs a gain factor, TiAs integral time coefficient, TsFor inverting time coefficients, TaFor leading inversion time coefficient, usFor the controlled variable, u, obtained through said preset saturation stepaThe control quantity obtained through the advanced saturation link.
3. The method according to claim 2, wherein the control quantity u obtained through the preset saturation stepsCalculated by the following formula:
wherein u islimitAnd setting the saturation upper limit of the preset saturation link.
4. Method according to claim 2 or 3, characterized in that the control quantity u obtained via the early saturation stageaCalculated by the following formula:
wherein u isanticipatoryFor the leading saturationThe upper saturation limit of the link.
5. The method of claim 4, wherein,
gsto control the parameters, gs＞1。
6. The method of claim 1 or 2, wherein the deriving the control quantity of the precision motion platform mechanical stage by a position deviation between a reference position and an actual position of the precision motion platform mechanical stage comprises:
acquiring a reference position of the mechanical table body of the precision motion platform, and detecting the actual position of the mechanical table body of the precision motion platform;
calculating the difference between the reference position and the actual position of the mechanical table body of the precision motion platform to obtain the position deviation;
and filtering the signal containing the position deviation by utilizing a preset PID controller to obtain the control quantity of the mechanical table body of the precise motion platform, wherein the PID controller comprises a plurality of wave traps and a low-pass filter.
7. The method of claim 6, wherein the traps are second order traps, and the trap frequency of each trap is different;
NFi(s) is the ith wave trap, N is the total number of wave traps, omegan1，iAnd ωn2，iInflection frequency of the ith trap, βn1，iAnd βn2，iIs the corresponding damping coefficient.
8. The method of claim 6, wherein the low pass filter is a first or second order low pass filter;
wherein: omegaiIs the knee frequency.
9. An inversion anti-integral saturation device for fine motion control, comprising:
the acquisition module is used for obtaining the control quantity of the mechanical table body of the precision motion platform through the position deviation between the reference position and the actual position of the mechanical table body of the precision motion platform;
the judging module is used for judging whether the control quantity is in a state of being about to be subjected to integral saturation or not through a preset saturation link and an advanced saturation link, wherein the saturation upper limit of the advanced saturation link is smaller than that of the preset saturation link;
the correction module is used for obtaining a corrected control quantity by utilizing the control quantity obtained according to the preset saturation link and the control quantity obtained according to the advanced saturation link if the control quantity is in a state of being subjected to integral saturation;
and the output module is used for sending the corrected control quantity to a preset driver so as to drive the precision motion platform mechanical table body to perform positioning motion and uniform scanning motion by using the driver according to the corrected control quantity.
10. An electronic device, comprising: memory, processor and computer program stored on the memory and executable on the processor, characterized in that the processor implements the steps of the method for inverse anti-integral saturation for precision motion platforms according to any one of claims 1 to 7 when executing the computer program.
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005242715A (en) * | 2004-02-26 | 2005-09-08 | Nagaoka Univ Of Technology | Integral proportion system control device and integral proportion system control method |
| JP2006106925A (en) * | 2004-10-01 | 2006-04-20 | Yamatake Corp | Pid controller |
| CN102591201A (en) * | 2012-02-09 | 2012-07-18 | 山东电力研究院 | Control method of integral saturation resistance in auxiliary machine failure load reduction process |
| CN102654772A (en) * | 2012-05-15 | 2012-09-05 | 北京航空航天大学 | Track dip angle inversion controlling method of aircraft based on control force limitation situation |
| CN104007660A (en) * | 2014-06-12 | 2014-08-27 | 国电科学技术研究院 | Servo system anti-saturation control method based on inversion design |
| CN105109510A (en) * | 2015-08-06 | 2015-12-02 | 大连交通大学 | Method for achieving anti-snaking broadband energy absorption mechanism and optimal configuration method for parameters of bogie |
| CN105301957A (en) * | 2015-11-24 | 2016-02-03 | 泉州装备制造研究所 | Novel anti-integral-saturation PID control method |
| CN105798930A (en) * | 2016-04-01 | 2016-07-27 | 浙江工业大学 | Flexible mechanical arm system saturation compensation control method based on Luenberger state observer |
| CN106842960A (en) * | 2017-03-29 | 2017-06-13 | 南京埃斯顿自动控制技术有限公司 | A kind of anti-windup saturation control method for motor control |
| CN107193211A (en) * | 2017-05-11 | 2017-09-22 | 南京邮电大学 | Single arm robot controller and its design method based on active disturbance rejection and inversion technique |
| CN108828943A (en) * | 2018-06-20 | 2018-11-16 | 南通航运职业技术学院 | A kind of Auto-disturbance-rejection Control with disturbance compensation and finite time convergence control |
| CN109062029A (en) * | 2018-07-20 | 2018-12-21 | 江汉大学 | A kind of repetitive controller system and the control method for integrating anti-saturation |
| CN110609470A (en) * | 2019-09-11 | 2019-12-24 | 中国科学院光电技术研究所 | Anti-integral saturation design method based on transition process |
| CN110673479A (en) * | 2019-09-30 | 2020-01-10 | 中国科学院长春光学精密机械与物理研究所 | Trajectory tracking optimization control method and device, multi-rotor unmanned aerial vehicle and storage device |
-
2020
- 2020-06-30 CN CN202010616267.9A patent/CN111624870B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005242715A (en) * | 2004-02-26 | 2005-09-08 | Nagaoka Univ Of Technology | Integral proportion system control device and integral proportion system control method |
| JP2006106925A (en) * | 2004-10-01 | 2006-04-20 | Yamatake Corp | Pid controller |
| CN102591201A (en) * | 2012-02-09 | 2012-07-18 | 山东电力研究院 | Control method of integral saturation resistance in auxiliary machine failure load reduction process |
| CN102654772A (en) * | 2012-05-15 | 2012-09-05 | 北京航空航天大学 | Track dip angle inversion controlling method of aircraft based on control force limitation situation |
| CN104007660A (en) * | 2014-06-12 | 2014-08-27 | 国电科学技术研究院 | Servo system anti-saturation control method based on inversion design |
| CN105109510A (en) * | 2015-08-06 | 2015-12-02 | 大连交通大学 | Method for achieving anti-snaking broadband energy absorption mechanism and optimal configuration method for parameters of bogie |
| CN105301957A (en) * | 2015-11-24 | 2016-02-03 | 泉州装备制造研究所 | Novel anti-integral-saturation PID control method |
| CN105798930A (en) * | 2016-04-01 | 2016-07-27 | 浙江工业大学 | Flexible mechanical arm system saturation compensation control method based on Luenberger state observer |
| CN106842960A (en) * | 2017-03-29 | 2017-06-13 | 南京埃斯顿自动控制技术有限公司 | A kind of anti-windup saturation control method for motor control |
| CN107193211A (en) * | 2017-05-11 | 2017-09-22 | 南京邮电大学 | Single arm robot controller and its design method based on active disturbance rejection and inversion technique |
| CN108828943A (en) * | 2018-06-20 | 2018-11-16 | 南通航运职业技术学院 | A kind of Auto-disturbance-rejection Control with disturbance compensation and finite time convergence control |
| CN109062029A (en) * | 2018-07-20 | 2018-12-21 | 江汉大学 | A kind of repetitive controller system and the control method for integrating anti-saturation |
| CN110609470A (en) * | 2019-09-11 | 2019-12-24 | 中国科学院光电技术研究所 | Anti-integral saturation design method based on transition process |
| CN110673479A (en) * | 2019-09-30 | 2020-01-10 | 中国科学院长春光学精密机械与物理研究所 | Trajectory tracking optimization control method and device, multi-rotor unmanned aerial vehicle and storage device |
Non-Patent Citations (5)
| Title |
|---|
| A. SCOTTEDWARD HODEL 等: "Variable-structure PID control to prevent integrator windup", pages 442 - 451 * |
| JIN-LIN HU ET AL.: "Sequential Quadratic Programming Method for Solution of Electromagnetic Inverse Problems", vol. 53, no. 8, pages 2680 - 2687, XP011137415, DOI: 10.1109/TAP.2004.838791 * |
| 何顶新 等: "温控系统中改进的PID算法", no. 08, pages 36 - 39 * |
| 武志鹏 等: "光刻机工件台宏微系统的滑模变结构控制", pages 50 - 54 * |
| 赵贺伟 等: "弹性高超声速飞行器抗输入饱和动态神经网络控制", no. 04, pages 854 - 865 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112612210A (en) * | 2020-12-14 | 2021-04-06 | 哈尔滨工业大学 | Method for suppressing specific frequency disturbance of precision motion platform |
| CN112612210B (en) * | 2020-12-14 | 2021-07-16 | 哈尔滨工业大学 | Method for suppressing specific frequency disturbance of precision motion platform |
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