CN111624159A - Elliptical polarization measuring device and measuring method - Google Patents

Abstract

The application discloses an ellipsometry measuring device and a ellipsometry measuring method, wherein the ellipsometry measuring device comprises a base plate, a sample stage, a detection part, an angle switching mechanism and an angle positioning mechanism; the sample table is fixedly arranged on the base plate, and the table top of the sample table is a plane; the angle switching mechanism is rotatably arranged on the base plate, and the rotating axis of the angle switching mechanism is positioned in the detection surface; the detection component comprises a polarizing arm and a polarization detecting arm, and the polarizing arm and the polarization detecting arm are arranged on the angle switching mechanism; the angle positioning mechanism is arranged on the working platform, and the rotation angle of the angle switching mechanism is limited through a rigid interference limiting or self-locking structure. The ellipsometry measuring device and the ellipsometry measuring method do not need to change the sample table or change the position of the sample table, have the advantages of simple structure, simplicity and convenience in operation and high repeated positioning precision, can realize that multiple types of samples adopt the same placing position, reduce the risk of sample fragments in the testing process, realize the test of any point of the samples, and improve the testing efficiency.

Description

Elliptical polarization measuring device and measuring method

Technical Field

The present disclosure relates to optical measurement devices, and particularly to an ellipsometry device and a measurement method.

Background

A solar cell is a semiconductor device that converts light energy into electric energy. The types of solar cells include: the solar cell comprises a crystalline silicon solar cell, a thin-film solar cell, a dye-sensitized solar cell and the like, wherein the crystalline silicon solar cell is the most commonly used solar cell at present, and the basic structure of the solar cell is that a antireflective film is plated after texturing is carried out on a silicon substrate. Wherein, the texturing function is to make the solar cell effectively absorb sunlight; the antireflection film has the function of reducing the reflection of sunlight on the surface of the solar cell, so that most of the sunlight can reach the inside of the cell and be absorbed by the semiconductor material, thereby greatly improving the conversion of the sunlight.

At present, the texture surface single crystal silicon solar cell is mostly made into texture by an alkaline method, and the anisotropy of the crystal when corroded is utilized to form a regular array basic structure with the shape of a four-side pyramid on the surface of the cell; most of textured polycrystalline silicon solar cells are textured by an acid corrosion method, so that irregular micro fluctuation is formed on the surface of the cells.

At present, a common instrument for detecting the thickness and the refractive index of the anti-reflection film on the textured crystalline silicon solar cell is an ellipsometer. The ellipsometer has a basic principle of obtaining surface information (e.g., thickness, refractive index, etc. of a nano-film) of a sample by using a change of a polarization state of a light wave when the light wave is reflected on a surface of the sample.

When the ellipsometer detects, the plane where the sample detection surface is located is required to be perpendicular to the incident plane formed by the incident optical axis and the reflection optical axis and pass through the intersection point of the two optical axes. A plane perpendicular to an incident plane formed by an incident optical axis and a reflection optical axis and passing through an intersection of the two optical axes is generally referred to as a reference plane. During detection, the coincidence of a detection surface and a reference surface is required, and the incident angle of the system is equal to the reflection angle.

When an ellipsometry measurement system is used for measuring the thickness and the refractive index of anti-reflection films on different crystalline silicon (such as monocrystalline silicon and polycrystalline silicon), due to the fact that the structures of the textured surfaces on the crystalline silicon are different, the orientations of the different crystalline silicon relative to a reference surface are required to be different during sample detection, and the coincidence of a detection surface and the reference surface is met.

Specifically, the acute angle between the conical surface of the four-sided pyramid formed on the surface of the single crystal silicon solar cell and the silicon substrate is about 54.7 degrees, and the size of the pyramid is about 2-5 microns. The conical surface is plated with an antireflection film, and in order to detect the thickness and the refractive index of the antireflection film, the conical surface of the pyramid is required to be used as a detection surface during detection. In order to ensure that the detection surface is coincided with the reference surface, the inclination angle of a placing surface of the sample table for placing the monocrystalline silicon and the reference plane is required to be 54.7 degrees; and the orientation of the monocrystalline silicon solar cell on the sample table is adjusted to meet the coincidence of the detection surface and the reference surface.

The texture of the polycrystalline silicon solar cell textured by the acid method is characterized in that the silicon surface has tiny irregular fluctuation, the size of the fluctuation is micron order, an antireflection film is plated on the silicon, and in order to detect the thickness and the refractive index of the antireflection film, a plane which is parallel to the silicon substrate and passes through the surface of a sample is used as a detection plane, so that a placing surface of a sample table for placing the polycrystalline silicon is parallel to a reference plane.

In addition, for the crystalline silicon solar cell without texturing, the detection surface is the upper surface plated with the antireflection film, and the placing surface of the sample stage is also required to be parallel to the reference plane and is the same as the sample stage of the polycrystalline silicon solar cell.

Through the analysis, it can be seen that when testing monocrystalline silicon and polycrystalline silicon solar cells, the placement directions of the cells relative to the reference plane are different, the base of the monocrystalline silicon prepared by the alkaline method and the reference plane have a large included angle when placing the monocrystalline silicon, and the base of the polycrystalline silicon prepared by the acid method is parallel to the reference plane when placing the polycrystalline silicon.

In other words, when the antireflective film of the solar cell with two different surface texture structures is detected, the dihedral angle formed by the placing surface of the sample stage and the reference plane needs to be changed so as to meet the test requirement.

In practical detection, for example, in a production line of solar cells, solar cells of different types (single crystal, polycrystal) need to be detected, which requires that an ellipsometer can adapt to such varying detection conditions, and requires simple operation, time saving, high accuracy and good repeatability in the detection process.

In order to meet the above requirements, the existing methods include:

(1) the different sample platform of inclination designs in the ellipsometry measurement system, according to the test demand of different samples, changes required sample platform through the mode of dismantling the sample platform, inclination means: the acute angle between the placing surface of the sample table and the reference surface. The method is generally applied to an ellipsometry measurement system, but has the defects that the disassembly process of the sample table is complicated, the replacement speed is slow, the disassembled sample table is inconvenient to store, after a new sample table is replaced, the accuracy and the repeatability of the sample table of the whole instrument cannot be guaranteed in the installation process, and recalibration is needed.

(2) The method for installing the sample table at the different inclination angles in the ellipsometry measurement system is characterized in that the sample table at the different inclination angles is not required to be disassembled, the two sample tables are connected through an electric (manual) guide rail, when the sample table at a certain inclination angle is required to be used, the sample table is moved to an installation position through the guide rail, and other sample tables are moved out of the installation position. However, in the mode of replacing different types of sample tables by moving the guide rail, the speed is slow, the occupied space is large, and the accuracy and the repeatability are difficult to ensure.

(3) A sample table with two table positioning surfaces is designed in an ellipsometry system, and the included angle of the two dihedral angles of the two table positioning surfaces is 54.7 degrees +/-5 degrees. By rotating the table top of the sample table, the requirement of different test conditions on the dihedral angle formed by the placing surface of the sample table and the reference plane is met. However, when the single crystal silicon solar cell is detected by using the method, the sample to be detected needs to be placed on the sample table in a state of being inclined to the horizontal plane by 54.7 degrees +/-5 degrees, so that the difficulty of taking and placing the sample is undoubtedly increased, and the risk of damaging the sample to be detected is also increased.

Therefore, in an ellipsometry system, the problems of the existing crystalline silicon solar cell sample table used in the ellipsometer are as follows: (1) the angle of the sample table needs to be changed to realize that the sample is horizontally placed or obliquely placed; (2) the sample is not easy to move when the sample is obliquely placed, so that the uniformity detection of the sample is not facilitated; (3) the risk of debris is high when the sample is tilted.

These problems make some kinds of samples only test a certain fixed point, can't test at any point, and is inconvenient to get and put the test sample, have produced the very big influence to the technological improvement and raise the test efficiency.

Disclosure of Invention

The ellipsometry measuring device and the ellipsometry measuring method have the advantages that the sample stage does not need to be changed or the position of the sample stage does not need to be changed, the structure is simple, the operation is simple and direct, the replacement is rapid, the repeated positioning precision is high, multiple types of samples can be placed at the same position, the ellipsometry measuring device and the ellipsometry measuring method can meet the detection requirements of a single crystal solar cell and a polycrystalline solar cell at the same time, the risk of fragments of the single crystal solar cell in the testing process is reduced, the test of any point of the samples is realized, and the testing efficiency is improved.

The above object of the present application is achieved by the following technical solutions:

an ellipsometry measuring device comprises a base plate, a sample table, a detection part, an angle switching mechanism and an angle positioning mechanism; the sample table is fixedly arranged on the base plate, the table top of the sample table is a plane, and a sample to be measured is placed on the table top of the sample table; the detection component comprises a polarizing arm for emitting incident light and a polarization analyzing arm for receiving reflected light, and an incident plane is formed by an incident optical axis and a reflected light axis; the angle switching mechanism is rotatably arranged on the base plate, the polarization arm and the polarization detecting arm are arranged on the angle switching mechanism, and the angle switching mechanism drives the detection part to synchronously rotate so as to change an included angle between an incident surface of the detection part and the surface of the sample to be detected; the angle positioning mechanism is arranged on the base plate and limits the rotation angle of the angle switching mechanism through a rigid abutting limiting or self-locking structure

By adopting the technical scheme, when a sample to be detected is detected, the sample to be detected is flatly placed on the sample table, the angle switching mechanism is positioned by the angle positioning mechanism, so that the incident surface of the detection part is directly vertical to the detection surface of the sample to be detected, the intersection point of two optical axes passes through the detection surface, and then subsequent measurement is carried out; the whole process is quick and convenient, the sample is prevented from being obliquely placed, and the risk of sample damage is reduced.

The application is further configured to: the height of the sample table can be adjusted.

By adopting the technical scheme, the height of the sample stage can be adjusted in real time so as to correspond to different types of samples, and the sample stage has better adaptability.

The application is further configured to: the angle switching mechanism comprises a door-shaped frame and two bearing seats, and the two bearing seats are coaxially arranged on the base plate; the end part of the door-shaped frame is fixedly connected with a rotating shaft, and the door-shaped frame is rotatably connected with the bearing seat through the rotating shaft penetrating into the bearing seat; the detection part is arranged on the door-shaped frame.

Through adopting above-mentioned technical scheme, door type frame provides the installation basis for detecting the part, and door type frame passes through the bearing frame and rotates the installation on the base plate to make detecting the part can carry out angle modulation.

The application is further configured to: the angle positioning mechanism comprises an inclined positioning piece and a vertical positioning piece, and the inclined positioning piece and the vertical positioning piece are arranged on two sides of the angle switching mechanism along the rotation direction of the angle switching mechanism; the angle switching mechanism is in rigid interference fit with the inclined positioning piece, and the angle switching mechanism is positioned to be in an inclined state; the angle switching mechanism is in rigid interference fit with the vertical positioning piece, and the angle switching mechanism is positioned to be in a vertical state.

Through adopting above-mentioned technical scheme, vertical positioning element has injectd angle switching mechanism's vertical state, and the tilt positioning element has injectd angle switching mechanism's tilt state, through cooperating with vertical positioning element and tilt positioning element, realizes the quick angle positioning of angle switching mechanism to improve efficiency of software testing.

The application is further configured to: the angle switching mechanism is in interference fit with the inclined positioning piece, and an included angle between an incident surface of the detection component and the vertical surface is 54.7 +/-5 degrees.

By adopting the technical scheme, the included angle between the incident surface and the vertical surface is 54.7 degrees, so that after the angle switching mechanism is abutted against the inclined positioning piece, the incident surface of the detection part is directly vertical to the detection surface of the monocrystalline silicon solar cell, the standardized angle adjustment is realized, and the measurement rate is improved.

The application is further configured to: the angle positioning mechanism comprises a first driving piece arranged on the base plate, a crank fixedly connected to the output end of the first driving piece and an intermediate rod rotatably connected to the crank, and one end, far away from the crank, of the intermediate rod is hinged to the angle switching mechanism; the first driving piece is a torque motor.

By adopting the technical scheme, the driving piece drives the crank to do rotary motion, and the crank drives the angle switching mechanism to swing back and forth between a certain angle by pulling the middle rod; when the solar cells of different types are detected, only the driving piece is controlled to drive the crank to move to the corresponding position.

The application is further configured to: the angle positioning mechanism comprises a guide rail arranged on the base plate, a sliding block arranged on the guide rail, a connecting rod hinged with the sliding block and a second driving piece driving the sliding block to reciprocate along the guide rail, and one end of the connecting rod, far away from the sliding block, is hinged with the angle switching mechanism; the second driving piece is a torque motor or an electric push rod.

By adopting the technical scheme, the working principle of the sliding block connecting rod mechanism is utilized, the sliding block is driven to do reciprocating linear motion through the second driving piece, the sliding block drives the angle switching mechanism to do reciprocating swing through pulling the connecting rod, and when the solar cells of different types are detected, the sliding block can move to a corresponding position only by controlling the second driving piece.

The application is further configured to: the angle positioning mechanism is an electric push rod, a base of the electric push rod is hinged to a base plate of the base plate, and an output end of the electric push rod is hinged to a side wall of the angle switching mechanism.

Through adopting above-mentioned technical scheme, directly utilize the driving piece to drive angle switching mechanism and do reciprocating swing motion, realize the angle modulation to angle switching mechanism, the accommodation process is more simple and convenient direct.

The application is further configured to: the angle positioning mechanism comprises a worm wheel and a worm, the worm wheel is fixedly connected to one side of the angle switching mechanism and is coaxially arranged with the rotating axis of the angle switching mechanism; the worm is rotatably arranged on the base plate and meshed with the worm wheel; a third driving piece for driving the worm to rotate is arranged at the end part of the worm; the third driving piece is a motor or a manual crank.

By adopting the technical scheme, the worm is rotated by the third driving piece, the worm and the worm wheel are in meshing transmission, and the worm wheel is driven to synchronously rotate, so that the angle switching mechanism is driven to rotate, and the angle adjustment of the angle switching mechanism is realized; and the worm wheel are meshed with each other in a multi-tooth manner, so that the solar cell detection device has the characteristics of stable transmission and low noise, and the worm wheel have self-locking property, and when solar cells of different types are detected, the worm wheel is rotated to a corresponding position only by controlling the third driving piece.

The second purpose of the present application is achieved by the following technical scheme:

a measurement method using an ellipsometry apparatus, comprising the steps of:

s1, horizontally placing the sample to be detected on the table top of the sample table;

s2, rotating the incidence plane according to the type of the sample to be detected, so that the incidence plane of the detection part is perpendicular to the detection plane of the sample to be detected;

and S3, recording the obtained surface information of the sample to be measured.

In summary, the present application has the following beneficial effects: the angle switching structure is configured for the detection part, so that the detection part can change the angle relative to the sample table and a sample to be tested placed on the sample table, the angle position of the sample to be tested is not changed, the dihedral angle between the incident surface of the detection part and the reference surface is positioned through standardized adjustment, and the purpose of quickly testing the sample is finally achieved.

Drawings

FIG. 1 is a schematic diagram of a manual angle change scheme;

FIG. 2 is a front view of a manual indexing scheme;

FIG. 3 is a schematic view of a crank and rocker mechanism arrangement;

FIG. 4 is a schematic view of a slider linkage arrangement;

FIG. 5 is a schematic view of a power putter scheme;

fig. 6 is a schematic view of a worm gear scheme.

In the figure, 1, a substrate; 2. a sample stage; 3. a detection section; 31. a polarizing arm; 32. a polarization detection arm; 4. an angle switching mechanism; 41. a gantry frame; 42. a bearing seat; 43. a rotating shaft; 5. an angle positioning mechanism; 6. a tilting positioning element; 7. a vertical positioning member; 8. a first driving member; 9. a crank; 10. an intermediate lever; 11. a guide rail; 12. a slider; 13. a connecting rod; 14. a second driving member; 15. a worm gear; 16. a worm; 17. a third driving member; 20. and (5) testing the sample to be tested.

Detailed Description

The present application is described in further detail below with reference to the attached drawings.

The utility model provides an ellipsometry measuring device, compares in prior art ellipsometry measuring system's sample platform detachable design or sample platform mesa conversion, angularly adjustable design, this application has mainly made following improvement: an angle switching structure is configured for the detection component 3, so that the detection component 3 can change the angle relative to the sample table 2 and a sample 20 to be tested placed on the sample table 2, and the aim of quickly testing the sample is achieved by regulating and positioning the dihedral angle between the incident surface of the detection component 3 and the reference surface in a standardized manner.

The specific implementation mode is as follows: as shown in fig. 1, an ellipsometry apparatus includes a base plate 1, a sample stage 2, a detection unit 3, an angle switching mechanism 4, and an angle positioning mechanism 5.

Wherein, base plate 1 top is equipped with work platform, and sample platform 2 fixed mounting is on base plate 1's work platform, and angle switching mechanism 4 rotates to be installed on base plate 1's work platform. The table top of the sample table 2 is a plane, the height of the sample table can be adjusted, and the height adjusting mode can adopt cylinder jacking and can also adopt mechanical lifting structures such as a shear fork and the like; the sample 20 to be measured is flatly placed on the table surface of the sample table 2.

The detection component 3 comprises a polarizing arm 31 and an analyzing arm 32, wherein the polarizing arm 31 emits incident light, and the analyzing arm 32 receives reflected light; the polarizing arm 31 and the polarization analyzing arm 32 are mounted on the angle switching mechanism 4. The rotation axis of the angle switching mechanism 4 is located in the detection plane of the sample 20 to be measured.

When the angle switching mechanism 4 is in a vertical state, an incident plane formed by the incident optical axis and the reflection optical axis of the detection part 3 is perpendicular to the table surface of the sample table 2.

The angle positioning mechanism 5 is also arranged on the working platform of the base plate 1 and is used for limiting the rotation angle of the angle switching mechanism 4, and the angle positioning mechanism 5 can position the angle switching mechanism 4 at a single angle, can also position a plurality of specific angles and can also position any angle; such as positioning the incidence plane of the detection member 3 mounted on the angle switching mechanism 4 to be parallel to the vertical plane or to form a dihedral angle of 54.7 deg. with the vertical plane.

The working principle of the ellipsometry measuring device for measuring the crystalline silicon solar cell is as follows:

when the sample is detected, the coincidence of the detection surface and the reference surface must be satisfied. Therefore, when different types of samples are detected, the sample stage needs to be adjusted to a specific height by taking the detection system as a reference, and the detection part 3 is positioned and fixed on a corresponding angle, namely, the orientation of the reference surface is adjusted through the rotation of the detection part 3; when testing the monocrystalline silicon solar cell, the incident surface of the detection component 3 needs to be positioned at an angle of 54.7 degrees with the vertical surface, and when testing the polycrystalline silicon solar cell, the incident surface of the detection component 3 needs to be positioned at an angle parallel to the vertical surface, so that the detection of the solar cells of different types (monocrystalline and polycrystalline) can be realized, and finally, the obtained surface information of the sample to be tested is recorded.

Example 1: as shown in fig. 1 and 2, the angle switching mechanism 4 includes a gantry 41 and two bearing blocks 42, the two bearing blocks 42 are symmetrically arranged on the working platform of the base plate 1 with the central axis of the platform surface of the sample platform 2 as a reference; the door frame 41 is composed of a cross rod and two vertical rods, the two vertical rods of the door frame 41 are respectively and fixedly connected with a rotating shaft 43, and the rotating shaft 43 is rotatably installed on a bearing seat 42, so that the door frame 41 can rotate around the axis of the rotating shaft 43 in a circumferential manner. The polarizing arm 31 and the polarization detecting arm 32 of the detecting member 3 are mounted on the gate frame 41.

In this embodiment, the bearing seat 42 may be an angular contact ball bearing, a deep groove ball bearing, a rolling bearing, a sliding bearing, or the like, and the hub connection may be a key connection, an interference fit, a pin connection, an expansion sleeve connection, a profile fit connection, or the like.

The angle positioning mechanism 5 comprises an inclined positioning piece 6 and a vertical positioning piece 7, the inclined positioning piece 6 is a mechanical piece with an inclined positioning surface, and the included angle between the inclined positioning surface and the vertical surface of the inclined positioning piece 6 is 54.7 degrees +/-5 degrees; the vertical positioning element 7 is a mechanical element with a vertical positioning surface. The tilt positioning element 6 and the vertical positioning element 7 are arranged opposite to each other on both sides of the angle switching mechanism 4 in the direction of rotation of the angle switching mechanism 4, and the angle switching mechanism is in rigid interference fit with the tilt positioning element or with the vertical positioning element.

When the angle switching mechanism 4 is rotated to the vertical state, the angle switching mechanism 4 is abutted against the vertical positioning surface of the vertical positioning piece 7, and the polycrystalline silicon solar cell can be tested at the moment; when the angle switching mechanism 4 rotates to be attached to and abutted against the inclined surface of the inclined positioning piece 6, testing the monocrystalline silicon solar cell; the whole angle adjusting process can be completed by manual operation.

The contact surfaces of the angle switching mechanism 4 and the angle positioning mechanism 5 are respectively embedded with a magnet and magnetic steel, the angle positioning mechanism 5 and the angle switching mechanism 4 are firmly connected by utilizing the adsorption force of the magnet, the influence of external force factors on the stability of the ellipsometry measuring device during measurement is reduced, and the smooth proceeding of the measuring process is ensured.

Example 2: the present embodiment is different from embodiment 1 in that, as shown in fig. 3, the angle positioning mechanism 5 includes a first driving member 8, a crank 9 and an intermediate lever 10, the first driving member 8 is fixedly mounted on the working platform of the base plate 1 and is located at one side of the rotation direction of the angle switching mechanism 4; in this embodiment, the first driving member 8 is a motor having a holding torque, and can be stopped at any position and held at that position. One end of the crank 9 is fixedly connected to an output shaft of the motor, and the other end of the crank is rotatably connected with the end part of the middle rod 10; the other end of the intermediate lever 10 is rotatably mounted on a side wall of the angle switching mechanism 4.

The working principle of the embodiment is that the first driving member 8 drives the crank 9 to perform rotary motion, and the crank 9 drives the angle switching mechanism 4 to swing back and forth between a certain angle by pulling the intermediate rod 10 (the angle can be adjusted by changing the lengths of the crank 9 and the intermediate rod 10); therefore, when solar cells of different types (single crystal and polycrystal) are detected, only the first driving piece 8 is controlled to drive the crank 9 to move to the corresponding position.

Example 3: the present embodiment is different from embodiment 1 in that, as shown in fig. 4, the angle positioning mechanism 5 includes a guide rail 11, a slider 12, a connecting rod 13 and a second driving member 14, the guide rail 11 is fixedly installed on the working platform of the base plate 1, and the length direction of the guide rail 11 is arranged in the same direction as the rotation direction of the angle switching mechanism 4; the sliding block 12 is arranged on the guide rail 11, one end of the connecting rod 13 is hinged with the sliding block 12, and the other end is hinged with the angle switching mechanism 4; a second driving member 14 is also mounted on the base plate 1 for driving the slide block 12 to perform a reciprocating linear motion on the guide rail 11.

Specifically, the guide rail 11 can be set as a polished rod, the sliding block 12 is in sliding connection with the guide rail 11, and the second driving part 14 adopts an electric push rod; the output end of the electric push rod is connected with the slide block 12, and directly drives the slide block 12 to reciprocate on the slide rail; the guide rail 11 can also be set as a screw, bearing seats are matched at two ends of the screw in a rotating way, the bearing seats are fixed on the base plate 1, correspondingly, the sliding block 12 is in threaded connection with the guide rail 11, the second driving piece 14 adopts a motor, and the output end of the motor is connected with the screw; the motor drives the screw rod to rotate forward and backward so as to drive the sliding block 12 to reciprocate on the screw rod.

This embodiment utilizes the operating principle of the link mechanism of the slide block 12, and drives the slide block 12 to make a reciprocating linear motion through the second driving part 14, and the slide block 12 drives the angle switching mechanism 4 to make a reciprocating swing through pulling the connecting rod 13 (the swing angle can be adjusted by changing the length of the connecting rod 13, and can also be adjusted by changing the stroke of the reciprocating motion of the slide block 12). The second drive member 14 of this embodiment is selected to have a holding torque that can be stopped and held in any position.

When solar cells of different types (single crystal and polycrystal) are detected, the second driving part 14 is controlled to move the slide block 12 to the corresponding position.

Example 4: the difference between this embodiment and embodiment 1 is that, as shown in fig. 5, the angle positioning mechanism 5 is an electric push rod, the base of the electric push rod is hinged on the working platform of the base plate 1, and the output end of the electric push rod is hinged on the side wall of the angle switching mechanism 4. When the electric push rod makes telescopic motion, the angle switching mechanism 4 is driven to make reciprocating swing motion (the angle can be adjusted by selecting electric push rods with different strokes). The electric push rod selected by the embodiment has a holding torque, and can stop at any position and hold the position.

When the solar cells of different types (single crystal and polycrystal) are detected, only the electric push rod is controlled to move to the corresponding position.

Example 5: the present embodiment is different from embodiment 1 in that, as shown in fig. 6, the angle positioning mechanism 5 includes a worm wheel 15, a worm 16 and a third driving member 17, wherein the worm wheel 15 is coaxially and fixedly connected to a rotating shaft 43 at the end of the angle switching mechanism 4, the worm 16 is rotatably mounted on the top of the base plate 1 through a bearing seat 42, and the worm wheel 15 and the worm 16 are engaged; the third driving member 17, which can be a motor or a manual crank, is disposed at one end of the worm 16, and the third driving member 17 drives the worm 16 to rotate. When the worm 16 rotates, the worm wheel 15 is driven to rotate synchronously, so that the angle switching mechanism 4 is driven to do reciprocating swing motion (the angle can be adjusted by the rotation of the worm wheel 15).

When the solar cells of different types (single crystal and polycrystal) are detected, only the worm wheel 15 needs to be controlled to move to the corresponding position.

The present embodiment is only for explaining the present application, and it is not limited to the present application, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present application.

Claims (10)

1. An ellipsometry measuring device, comprising: comprises a base plate (1), a sample table (2), a detection component (3), an angle switching mechanism (4) and an angle positioning mechanism (5);

the sample table (2) is fixedly arranged on the base plate (1), the table top of the sample table (2) is a plane, and a sample (20) to be measured is placed on the table top of the sample table (2);

the detection component (3) comprises a polarizing arm (31) for emitting incident light and a polarization analyzing arm (32) for receiving reflected light, and an incident light axis and a reflected light axis form incident surfaces;

the angle switching mechanism (4) is rotatably arranged on the base plate (1), the polarizing arm (31) and the polarization detecting arm (32) are arranged on the angle switching mechanism (4), and the angle switching mechanism (4) drives the detection part (3) to synchronously rotate so as to change an included angle between an incident surface of the detection part (3) and the surface of the sample (20) to be detected;

the angle positioning mechanism (5) is arranged on the base plate (1), and the rotation angle of the angle switching mechanism (4) is limited through a rigid abutting limiting or self-locking structure.

2. The ellipsometry measuring device of claim 1, wherein: the height of the sample table (2) can be adjusted.

3. The ellipsometry measuring device of claim 1, wherein: the angle switching mechanism (4) comprises a door-shaped frame (41) and two bearing seats (42), and the two bearing seats (42) are coaxially arranged on the base plate (1); the end part of the door-shaped frame (41) is fixedly connected with a rotating shaft (43), and the door-shaped frame (41) is rotatably connected with the bearing seat (42) through the rotating shaft (43) penetrating into the bearing seat (42); the detection component (3) is arranged on the door-shaped frame (41).

4. An ellipsometry apparatus as in claim 1 or 3, characterized in that: the angle positioning mechanism (5) comprises an inclined positioning piece (6) and a vertical positioning piece (7), and the inclined positioning piece (6) and the vertical positioning piece (7) are arranged on two sides of the angle switching mechanism (4) along the rotation direction of the angle switching mechanism (4); the angle switching mechanism (4) is in rigid interference fit with the inclined positioning piece (6) to position the angle switching mechanism (4) to an inclined state; the angle switching mechanism (4) is in rigid interference fit with the vertical positioning piece (7) to position the angle switching mechanism (4) to be in a vertical state.

5. The ellipsometry measurement device according to claim 4, wherein: the angle switching mechanism (4) is in interference fit with the inclined positioning piece (6), and an included angle between an incident surface and a vertical surface of the detection component (3) is 54.7 degrees +/-5 degrees.

6. An ellipsometry apparatus as in claim 1 or 3, characterized in that: the angle positioning mechanism (5) comprises a first driving piece (8) arranged on the base plate (1), a crank (9) fixedly connected to the output end of the first driving piece (8), and an intermediate rod (10) rotatably connected to the crank (9), wherein one end, far away from the crank (9), of the intermediate rod (10) is hinged to the angle switching mechanism (4); the first driving piece (8) is a torque motor.

7. An ellipsometry apparatus as in claim 1 or 3, characterized in that: the angle positioning mechanism (5) comprises a guide rail (11) arranged on the base plate (1), a sliding block (12) arranged on the guide rail (11), a connecting rod (13) hinged with the sliding block (12) and a second driving piece (14) driving the sliding block (12) to reciprocate along the guide rail (11), and one end, far away from the sliding block (12), of the connecting rod (13) is hinged with the angle switching mechanism (4); the second driving piece (14) is a torque motor or an electric push rod.

8. An ellipsometry apparatus as in claim 1 or 3, characterized in that: the angle positioning mechanism (5) is an electric push rod, a base of the electric push rod is hinged to the base plate (1) of the base plate (1), and an output end of the electric push rod is hinged to the side wall of the angle switching mechanism (4).

9. An ellipsometry apparatus as in claim 1 or 3, characterized in that: the angle positioning mechanism (5) comprises a worm wheel (15) and a worm (16), wherein the worm wheel (15) is fixedly connected to one side of the angle switching mechanism (4) and is coaxially arranged with the rotating axis of the angle switching mechanism (4); the worm (16) is rotatably arranged on the base plate (1) and meshed with the worm wheel (15); and a third driving piece (17) for driving the worm (16) to rotate is arranged at the end part of the worm (16), and the third driving piece (17) is a motor or a manual crank.

10. A method of measurement using the ellipsometry apparatus of any one of claims 1-9, comprising: the method comprises the following steps:

s1, horizontally placing the sample (20) to be detected on the table top of the sample table (2);

s2, rotating the incidence plane according to the type of the sample (20) to be detected, so that the incidence plane of the detection part (3) is perpendicular to the detection plane of the sample (20) to be detected;

and S3, recording the obtained surface information of the sample (20) to be measured.

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