CN111621759A - Solid-liquid composite lubricating system for reducing friction coefficient of moving part - Google Patents

Solid-liquid composite lubricating system for reducing friction coefficient of moving part Download PDF

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CN111621759A
CN111621759A CN202010497783.4A CN202010497783A CN111621759A CN 111621759 A CN111621759 A CN 111621759A CN 202010497783 A CN202010497783 A CN 202010497783A CN 111621759 A CN111621759 A CN 111621759A
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film
solid
moving part
friction coefficient
lubricating
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魏晓莉
高凯雄
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LANZHOU UNIVERSITY OF ARTS AND SCIENCE
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/04Mixtures of base-materials and additives
    • C10M169/048Mixtures of base-materials and additives the additives being a mixture of compounds of unknown or incompletely defined constitution, non-macromolecular and macromolecular compounds
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623Sulfides, selenides or tellurides
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3485Sputtering using pulsed power to the target
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/04Elements
    • C10M2201/041Carbon; Graphite; Carbon black
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06Metal compounds
    • C10M2201/061Carbides; Hydrides; Nitrides
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06Metal compounds
    • C10M2201/065Sulfides; Selenides; Tellurides
    • C10M2201/066Molybdenum sulfide
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
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    • C10M2203/00Organic non-macromolecular hydrocarbon compounds and hydrocarbon fractions as ingredients in lubricant compositions
    • C10M2203/10Petroleum or coal fractions, e.g. tars, solvents, bitumen
    • C10M2203/1006Petroleum or coal fractions, e.g. tars, solvents, bitumen used as base material
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2205/00Organic macromolecular hydrocarbon compounds or fractions, whether or not modified by oxidation as ingredients in lubricant compositions
    • C10M2205/02Organic macromolecular hydrocarbon compounds or fractions, whether or not modified by oxidation as ingredients in lubricant compositions containing acyclic monomers
    • C10M2205/0206Organic macromolecular hydrocarbon compounds or fractions, whether or not modified by oxidation as ingredients in lubricant compositions containing acyclic monomers used as base material
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    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10MLUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2227/00Organic non-macromolecular compounds containing atoms of elements not provided for in groups C10M2203/00, C10M2207/00, C10M2211/00, C10M2215/00, C10M2219/00 or C10M2223/00 as ingredients in lubricant compositions
    • C10M2227/06Organic compounds derived from inorganic acids or metal salts
    • C10M2227/061Esters derived from boron

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Abstract

The invention relates to a solid-liquid composite lubricating system for reducing friction coefficient of a moving part, which is formed by compounding a solid lubricating film and lubricating oil, wherein the solid lubricating film is prepared by depositing on the surface of a metal, ceramic or polymer material by a high-power pulse unbalanced magnetron sputtering technology; the solid lubricating film is one of a diamond-like carbon film, a molybdenum disulfide film and a titanium nitride film; the lubricating oil is prepared by mixing base oil and additives according to the weight ratio of 200: 1-100: 5 in a mass ratio. The invention can form the abrasive dust with a low-friction nano ball structure on the surface interface of the moving part, effectively reduce the contact area of the moving part in the friction process, reduce the friction shearing acting force, and finally obviously reduce the friction coefficient and the wear rate of the moving part, thereby achieving the purposes of prolonging the service life and improving the reliability of the moving part and solving the problem that the traditional automobile, engineering machinery, high-grade numerical control machine tool and the like can not meet the requirements of long service life and high reliability.

Description

Solid-liquid composite lubricating system for reducing friction coefficient of moving part
Technical Field
The invention relates to the fields of surface treatment and service life prolonging of mechanical moving parts and the like, in particular to a solid-liquid composite lubricating system for reducing the friction coefficient of the moving parts.
Background
The miniaturization and heavy-duty development of machinery puts higher and higher requirements on the lubricating technology. Conventional liquid lubrication techniques exhibit more and more limitations, such as insufficient load bearing capacity, and liquid lubrication is not free from various additives. The current additives are also based on the S-, P-type, which, while providing good lubrication, also create serious environmental problems. The solid lubrication technology has the main advantages of high bearing capacity and small environmental pressure. However, there are many technical problems to be overcome to achieve complete solid lubrication of the entire mechanical system and it is not economically feasible.
In order to achieve the purpose of taking economic benefits and environmental protection into consideration, people pay attention to the combination of a solid-liquid composite lubricating technology in more and more fields, such as the lubrication of automobile engines, the lubrication of space vehicles and the like. The solid lubricating film such as a diamond-like carbon film, a molybdenum disulfide film, a titanium nitride film and the like has the advantages of low friction, abrasion resistance, corrosion resistance, chemical inertness and the like, and attracts the attention of a large number of scientific research personnel and engineering technical personnel. The tribological behavior of solid lubricating films is highly susceptible to environmental factors. By adopting solid-liquid composite lubrication, the solid lubricating film can be separated from the surrounding environment, and meanwhile, when the liquid lubricant fails, the solid lubricating film can play a role in reducing friction. Therefore, the solid-liquid composite lubricating system is reasonably designed on the surface of the moving part, so that the purposes of effectively reducing the contact area of the moving part in the friction process and reducing the friction shearing acting force are achieved, and finally the friction coefficient and the wear rate of the moving part are obviously reduced.
Disclosure of Invention
The invention aims to provide a solid-liquid composite lubricating system with excellent performance and capable of reducing the friction coefficient of a moving part.
In order to solve the problems, the invention provides a solid-liquid composite lubricating system for reducing the friction coefficient of a moving part, which is characterized in that: the system is composed of a solid lubricating film and lubricating oil which are prepared by depositing on the surface of a metal, ceramic or polymer material by a high-power pulse unbalanced magnetron sputtering technology; the solid lubricating film is one of a diamond-like carbon film, a molybdenum disulfide film and a titanium nitride film; the lubricating oil is prepared by mixing base oil and additives according to the weight ratio of 200: 1-100: 5 in a mass ratio.
The solid lubricating film is formed by sputtering metal titanium or chromium on a diamond-like carbon film by adopting high-power pulse sputtering to serve as a priming layer, depositing for 10-30 min, and introducing methane and argon with the purity of more than 99.99%, wherein the pressure ratio of the methane to the argon is 1: 1-1: 3; and adjusting the pulse bias voltage to 100-300V, the graphite target current to 3-5A and the time to 50-200 min to obtain the film with the thickness of 1-3 microns.
The solid lubricating film is formed by sputtering molybdenum metal on a molybdenum disulfide film by using high-power pulses to form a bottom layer, depositing for 10-30 min, introducing argon with the purity of more than 99.99%, adjusting the pulse bias voltage to 400-600V, adjusting the molybdenum disulfide target current to 6-9A, and keeping the time to 50-200 min, so as to obtain the film with the thickness of 1-3 microns.
The solid lubricating film is prepared by sputtering metal titanium or chromium on a titanium nitride film by adopting high-power pulse sputtering as a priming layer, depositing for 10-30 min, and introducing nitrogen and argon with the purity of more than 99.99%, wherein the pressure ratio of the nitrogen to the argon is 2: 1-5: 1; and adjusting the pulse bias voltage to 800-1000V, the titanium target current to 10-12A and the time to 50-200 min to obtain the film with the thickness of 2-5 microns.
The base oil refers to Polyalphaolefin (PAO) or alkane mineral oil.
The additive refers to boron nitrogen compound.
Compared with the prior art, the invention has the following advantages:
1. the diamond-like carbon film has an ultralow friction coefficient in the atmosphere, and the molybdenum disulfide has a two-dimensional layered structure formed by Van der Waals force among molecules and a low friction coefficient; titanium nitride has high hardness and wear resistance characteristics. Therefore, the solid-oil composite lubricating system consisting of the solid lubricating film and the lubricating oil can form low-friction nano ball structure abrasive dust on a moving interface, effectively reduce the contact area of a moving part in the friction process, reduce the friction shearing acting force and finally obviously reduce the friction coefficient and the wear rate of the moving part.
2. The system obtained by the invention is adjusted between 0.01 and 0.04 in the friction coefficient under atmospheric conditions, and can achieve the purpose of improving the long service life and high reliability of moving parts, thereby solving the problem that the existing automobiles, engineering machinery, high-grade numerical control machines and the like cannot meet the requirements of long service life and high reliability.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing the reduction of friction coefficient after adding a solid-liquid composite lubrication system in the friction process of the present invention (stage I is the friction coefficient after only using the solid lubrication, and stage II is the friction coefficient after using the solid-liquid composite lubrication system).
FIG. 2 shows that the (100) plane of the graphite structure is bent due to the presence of B element generated on the surface during the rubbing process of the present invention, and finally the carbon nano onion structure is formed during the rubbing process.
Detailed Description
A solid-liquid composite lubricating system for reducing friction coefficient of moving parts is composed of a solid lubricating film prepared by depositing on the surface of metal, ceramic or polymer material by high-power pulse unbalanced magnetron sputtering technique and lubricating oil. The solid lubricating film is one of a diamond-like carbon film, a molybdenum disulfide film and a titanium nitride film; the lubricating oil is base oil and additives, wherein the weight ratio of the base oil to the additives is 200: 1-100: 5 in a mass ratio.
Example 1 a solid-liquid composite lubricating system for reducing the friction coefficient of moving parts, which system is composed of a solid lubricating film and a lubricating oil.
Wherein: the solid lubricating film is formed by sputtering metal titanium or chromium on a diamond-like carbon film by adopting high-power pulse to serve as a priming layer, and depositing the diamond-like carbon film on the surface of stainless steel after depositing for 10-30 min. Introducing methane and argon with the purity of more than 99.99%, wherein the gas pressure ratio of the methane to the argon is 1: 1; and adjusting the pulse bias voltage to 300V, the graphite target current to 5A and the time to 120min to obtain the film with the thickness of 2.3 microns.
The lubricating oil is poly α olefin (PAO 4) and additive (R)1-CO-N-C2H4O2-B-OR2Wherein R is1、R2Is an alkane chain) According to the following steps of 200: 1, and the weight ratio is prepared.
The solid-liquid composite lubrication system obtained by the invention was subjected to a friction test under the conditions of a load of 10N and a frequency of 5Hz using GCr15 bearing steel as a friction couple, and the results are shown in FIG. 1. The friction coefficient of the stage I is 0.07 by adopting solid lubrication friction only, and the friction coefficient of the stage II is reduced to 0.01 by adopting a solid-liquid composite lubrication system. Compared with GCr15 bearing steel and stainless steel which do not adopt solid-liquid composite lubrication (friction coefficient is 0.5), the friction coefficient is reduced by 98%. FIG. 2 shows that the (100) plane of the graphite structure is bent due to the presence of B element generated on the surface during the rubbing process of the present invention, and finally the carbon nano onion structure is formed during the rubbing process.
Example 2a solid-liquid composite lubricating system for reducing the friction coefficient of moving parts, which system is composed of a solid lubricating film and a lubricating oil.
Wherein: the solid lubricating film is formed by depositing a molybdenum disulfide film on the surface of tool steel after depositing for 15min by using high-power pulse sputtering metal molybdenum as a priming layer. And introducing argon with the purity of more than 99.99 percent, adjusting the pulse bias voltage to 400V, and obtaining the film with the thickness of 2.1 microns by regulating the current of the molybdenum disulfide target to 8A for 100 min.
The lubricating oil refers to alkane mineral oil and additive (R)1-CO-N-C2H4O2-B-OR2Wherein R is1、R2An alkane chain) as 100: 5 in a mass ratio.
The aluminum oxide is used as a friction couple, a friction test is carried out on the solid-liquid composite lubricating system obtained by the invention for 60min under the conditions that the load is 10N and the frequency is 10Hz, and the friction coefficient is 0.03. Compared with the friction between alumina and tool steel which are not lubricated by solid-liquid combination (the friction coefficient is 0.4), the friction coefficient is reduced by 92.5 percent.
Example 3 a solid-liquid composite lubricating system for reducing the coefficient of friction of moving parts, which system consists of a solid lubricating film and a lubricating oil.
Wherein: the solid lubricating film is formed by sputtering titanium nitride film with high power pulse to form titanium or chromium base layer, and depositing for 20min to deposit the titanium nitride film on the surface of stainless steel. Introducing nitrogen and argon with the purity of more than 99.99%, wherein the pressure ratio of the nitrogen to the argon is 2: 1; and adjusting the pulse bias voltage to 800V, the titanium target current to 10A and the time to 80min to obtain the film with the thickness of 1.5 microns.
The lubricating oil is poly α olefin (PAO 10) and additive (R)1-CO-N-C2H4O2-B-OR2Wherein R is1、R2Is an alkane chain) as follows 150: 2 in a mass ratio.
The silicon nitride is used as a friction pair, and a friction test is carried out on the solid-liquid composite lubricating system obtained by the invention for 60min under the conditions that the load is 5N and the frequency is 10Hz, wherein the friction coefficient is 0.04. Compared with the friction between silicon nitride and stainless steel which are not lubricated by solid-liquid combination (the friction coefficient is 0.5), the friction coefficient is reduced by 94 percent.

Claims (6)

1. A solid-liquid composite lubricating system for reducing friction coefficient of moving parts is characterized in that: the system is composed of a solid lubricating film and lubricating oil which are prepared by depositing on the surface of a metal, ceramic or polymer material by a high-power pulse unbalanced magnetron sputtering technology; the solid lubricating film is one of a diamond-like carbon film, a molybdenum disulfide film and a titanium nitride film; the lubricating oil is prepared by mixing base oil and additives according to the weight ratio of 200: 1-100: 5 in a mass ratio.
2. The solid-liquid composite lubricating system for reducing the friction coefficient of a moving part according to claim 1, characterized in that: the solid lubricating film is formed by sputtering metal titanium or chromium on a diamond-like carbon film by adopting high-power pulse sputtering to serve as a priming layer, depositing for 10-30 min, and introducing methane and argon with the purity of more than 99.99%, wherein the pressure ratio of the methane to the argon is 1: 1-1: 3; and adjusting the pulse bias voltage to 100-300V, the graphite target current to 3-5A and the time to 50-200 min to obtain the film with the thickness of 1-3 microns.
3. The solid-liquid composite lubricating system for reducing the friction coefficient of a moving part according to claim 1, characterized in that: the solid lubricating film is formed by sputtering molybdenum metal on a molybdenum disulfide film by using high-power pulses to form a bottom layer, depositing for 10-30 min, introducing argon with the purity of more than 99.99%, adjusting the pulse bias voltage to 400-600V, adjusting the molybdenum disulfide target current to 6-9A, and keeping the time to 50-200 min, so as to obtain the film with the thickness of 1-3 microns.
4. The solid-liquid composite lubricating system for reducing the friction coefficient of a moving part according to claim 1, characterized in that: the solid lubricating film is prepared by sputtering metal titanium or chromium on a titanium nitride film by adopting high-power pulse sputtering as a priming layer, depositing for 10-30 min, and introducing nitrogen and argon with the purity of more than 99.99%, wherein the pressure ratio of the nitrogen to the argon is 2: 1-5: 1; and adjusting the pulse bias voltage to 800-1000V, the titanium target current to 10-12A and the time to 50-200 min to obtain the film with the thickness of 2-5 microns.
5. The solid-liquid composite lubricating system for reducing the friction coefficient of a moving part according to claim 1, characterized in that: the base oil refers to poly-alpha-olefin or alkane mineral oil.
6. The solid-liquid composite lubricating system for reducing the friction coefficient of a moving part according to claim 1, characterized in that: the additive refers to boron nitrogen compound.
CN202010497783.4A 2020-06-04 2020-06-04 Solid-liquid composite lubricating system for reducing friction coefficient of moving part Pending CN111621759A (en)

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN113355633A (en) * 2021-05-25 2021-09-07 清华大学 Surface treatment method of gear pair
CN114874832A (en) * 2022-06-13 2022-08-09 中国科学院兰州化学物理研究所 Gel-diamond-like carbon film composite lubricating material, preparation method thereof and application thereof in mechanical part lubrication
CN115013437A (en) * 2022-06-29 2022-09-06 中国地质大学(北京) Long-life ultralow-friction solid lubrication sliding bearing assembly for spacecraft

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113355633A (en) * 2021-05-25 2021-09-07 清华大学 Surface treatment method of gear pair
CN114874832A (en) * 2022-06-13 2022-08-09 中国科学院兰州化学物理研究所 Gel-diamond-like carbon film composite lubricating material, preparation method thereof and application thereof in mechanical part lubrication
CN115013437A (en) * 2022-06-29 2022-09-06 中国地质大学(北京) Long-life ultralow-friction solid lubrication sliding bearing assembly for spacecraft

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