CN111610588B - Inspection mirror capable of visually identifying green camouflage and preparation method thereof - Google Patents
Inspection mirror capable of visually identifying green camouflage and preparation method thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title abstract description 4
- 239000000463 material Substances 0.000 claims abstract description 119
- 238000000576 coating method Methods 0.000 claims abstract description 77
- 239000011248 coating agent Substances 0.000 claims abstract description 72
- 239000011521 glass Substances 0.000 claims abstract description 36
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
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- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract
An inspection mirror capable of visually identifying green camouflage and a preparation method thereof can identify artificial green materials with the same color as green vegetation and different spectra from the green vegetation. The blue filter glass QB3 is used as a substrate material, and long-wave-pass cut-off filter films are plated on two surfaces of the blue filter glass QB3, wherein the long-wave-pass cut-off filter films are formed by alternately plating high-refractive-index coating materials and low-refractive-index coating materials for multiple times. The filter lens of the inspection mirror has very obvious selectivity in visible light and near infrared regions, and can greatly transmit red light and near infrared rays with the wavelength of more than 680 nm; transmitting a small amount of 470-520 nm blue-green light, and having a tiny transmission peak value near 500nm or 510 nm; and in other wave bands, the transmission is very little, and any engineering camouflage personnel can visually identify and judge the implemented camouflage effect.
Description
Technical Field
The invention relates to a checking mirror capable of forming a specific transmission spectrum and used for identifying green camouflage and a film manufacturing method thereof. The invention is a very convenient device which can visually identify optical camouflage and the camouflage degree thereof, and furthermore, the invention can identify artificial green materials which have the same color as green vegetation and different spectra from the green vegetation.
Background
The conventional detection means of the green camouflage material mainly adopts a visible/near infrared spectrophotometer to test the spectral reflection characteristic curve of the material in an indoor environment, but professional personnel are required to test and analyze result data; in the field environment, a field transient spectrometer can be used for testing the spectral reflection characteristic of the material, the test result is greatly influenced by solar irradiation, test angle, distance and the like, and professional personnel are also required to operate the test and analyze the result. In comparison, both indoor and outdoor tests have the disadvantages of long time consumption and high cost, and cannot visually judge the camouflage effect.
Disclosure of Invention
The invention aims to provide an inspection mirror capable of quickly and visually identifying artificial green materials with the same colors as green vegetation but different spectrums.
The invention also aims to provide a manufacturing method of the inspection mirror.
The technical scheme of the invention is as follows: the difference of the spectral reflection of the green vegetation and the spectrum of the common artificial green material in the optical wave band is utilized, and the difference is amplified by processing a special optical filter, so that the purpose of distinguishing the difference by observing with human eyes is achieved.
The invention takes blue filter glass QB3 as a substrate material, and two surfaces of the blue filter glass QB3 are plated with long-wave-pass cut-off filter coatings (LWP), wherein the long-wave-pass cut-off filter coatings (LWP) are formed by alternately plating a high-refractive-index coating material and a low-refractive-index coating material for multiple times; the high-refractive-index coating material is ZrO2The material is low-refractive-index coating material SiO2A material.
The thickness of the blue filter glass QB3 is 1-2 mm, the optimal thickness is 1.5mm, and the total thickness of the long-wavelength-pass cut-off filter films (LWP) coated on the front surface and the back surface of the blue filter glass QB3 is 1.5-1.7 microns.
The structure of a long-wavelength-pass cut-off filter film (LWP) film system on the surface of the blue filter glass QB3 is as follows:
（0.5HL0.5H）Staking the center wavelength λ0≈420nm
Wherein: h, high refractive index coating material, the optical thickness of which is one quarter of the central wavelength; l is a low refractive index coating material, the optical thickness of which is one quarter of the central wavelength; s- -number of cycles, λ0-a central wavelength; s =8, 16-18 layers of long wavelength pass cutoff filter (LWP) were chosen. (0.5HL0.5H means that the film system period is 0.5 lambda first during film coating0Of thicknessHigh refractive index material, then 1 λ0Thickness of low refractive index material, then again 0.5 λ0A thickness of high index material).
The high-refractive-index coating material and the low-refractive-index coating material are alternately coated for multiple times, wherein the high-refractive-index coating material is coated with 8-9 layers, the low-refractive-index coating material is coated with 8-9 layers, the high-refractive-index coating material and the low-refractive-index coating material are coated with 16-18 layers together, and the formed long-wavelength-pass cut-off filter coating (LWP) is 16-18 layers in total.
The high-refractive-index coating material ZrO of the invention2The material is high-purity ZrO2Zirconium dioxide optical coating material, high refractive index coating material ZrO2The purity is 99.5%; the low-refractive-index coating material SiO material is a high-purity SiO optical coating material, and the purity of the low-refractive-index coating material SiO is 99.8%.
The width of the cut-off region depends on the difference between the two coating materials with high and low refractive indexes, so that selection is needed; the cut-off depth is also appropriate to ensure a certain transmittance for blue-green light (470 nm to 520 nm). Specifically, data of "S" is selected as S =8, which means that there are 17 layers in total of this long wavelength pass cutoff filter (LWP).
The high-refractive-index coating material is ZrO2High purity material, low refractive index coating material is SiO2The high-purity material is subjected to screening, sintering and other processes, so that the two coating materials have small gas release amount and do not splash during high-temperature evaporation. Both materials are typically provided by specialized suppliers.
The invention relates to a preparation method of a checking mirror capable of visually identifying green camouflage, which adopts a vacuum evaporation coating method and comprises the following procedures:
a. cleaning blue filter glass QB3 in an ultrasonic cleaning machine, then placing the blue filter glass QB3 on a workpiece frame, placing the workpiece frame in a vacuum chamber of a vacuum coating machine, closing a chamber door, and vacuumizing the vacuum chamber;
b. the vacuum degree reaches 3X 10-1Pa, the blue filter glass QB3 was heated at the temperature set to: continuously vacuumizing at 240-250 ℃; c. the vacuum degree reaches 5X 10-3At Pa, the sheet starts to fold highZrO of coating material with refractive index2And low refractive index coating material SiO2Pre-melting the two coating materials respectively, wherein the two coating materials are respectively arranged in different crucibles of an electron gun;
d. after the pre-melting is finished, the vacuum degree of the vacuum chamber reaches 2 multiplied by 10-3When Pa, the film coating can be started. Due to ZrO2And SiO2All oxides are easy to deoxidize during vaporization film formation, so oxygen needs to be charged into the vacuum chamber and the vacuum degree is ensured to be not lower than 1 x 10-3Pa ～2×10-3Pa; the vacuum coating machine is provided with a mass flow meter and a pressure controller so as to control the amount of oxygen filled and the vacuum degree in the vacuum chamber; ZrO needs to be well controlled during film coating2With SiO2The film forming rates of the two coating materials; ZrO (ZrO)2Typical film formation rates are: 0.35nm/S to 0.40nm/S, and SiO2Typical film formation rates are: 0.8 nm/S-1.0 nm/S;
e. both sides of the blue filter glass QB3 are coated with LWP film system which is generally coated with ZrO according to the intrinsic optical property of the blue filter glass QB3 and the required cut-off depth of the product2With SiO216-18 layers of high and low refraction materials;
f. and e), after the step e) is finished (after the coating is finished), closing the electron gun, the baking heater, the high vacuum valve and the like, filling the atmosphere into the vacuum chamber to normal pressure after the temperature of the vacuum chamber is reduced to be lower than 80 ℃, opening the door of the vacuum chamber, taking out the coated filter lens, and preparing the inspection mirror capable of visually identifying the green camouflage by using the filter lens.
Compared with the prior art, the invention has the beneficial effects that: the filter lens of the inspection mirror has very obvious selectivity in visible light and near infrared regions, and can greatly transmit red light and near infrared rays with the wavelength of more than 680 nm; a small amount of blue-green light with the wavelength of 470nm to 520nm is transmitted, and a tiny transmission peak value is arranged near 500nm or 510 nm; while in other bands, there is little transmission, and the light transmission curve is shown in fig. 3.
The effect of the green inspection mirror inspection material is superior to that of a near-infrared night vision device and is close to that of near-infrared photography. The green inspection mirror can also be used as a reconnaissance tool under the condition of sunlight irradiation and relatively transparent atmosphere, reveals targets disguised by common artificial green materials on enemy green vegetation backgrounds, has the action distance of 500-800 meters for the targets such as automobiles, tanks and the like, and can reach the action distance of 1500-2000 meters if the green inspection mirror is arranged on a 6-8-time telescope for observation. Any fighter wears the green ophthalmoscope of the invention, and can visually identify and judge the target disguised by the common artificial green material; any engineering camouflage personnel can visually identify and judge the implemented camouflage effect. Once the green inspection mirror is equipped, the cost basically does not occur in the processes of detection and use at ordinary times, and the cost-effectiveness ratio is high.
Drawings
FIG. 1 is a graph of the spectral reflectance of typical green vegetation;
FIG. 2 is a graph of spectral reflectance of a typical artificial green material;
FIG. 3 is a graph of the spectral transmission of the green inspection mirror of the present invention;
fig. 4 is a spectral transmittance curve of the blue filter glass QB 3.
Detailed Description
Examples
The technical conception of the invention is as follows: the essence of optical camouflage is to simulate the spectral reflectance characteristics of the background, the most important and most critical of which is to simulate the spectral reflectance characteristics of green vegetation, whereas typical artificial green camouflage materials have different spectral reflectance curves than green vegetation (fig. 1 and 2). Fig. 1 and 2 show spectral curves of typical green vegetation and general artificial green materials, with wavelength (in nm) on the abscissa and spectral reflectance (%) on the ordinate. As can be seen from the figure: in a visible light wave band (380-760 nm), due to the action of chlorophyll, a reflection peak exists on a plant leaf at about 550nm, so that the plant leaf is mainly green; in a near infrared band (760-1100 nm), due to the action of a chlorophyll cell structure, the chlorophyll has a high reflection characteristic in the near infrared band. Due to the inherent spectral characteristics of the background of the green vegetation, corresponding requirements are put forward on the spectrum of artificial green materials simulating the green vegetation. GJB 7927-2012 general requirements for camouflage nets and GJB 7928-2012 general requirements for camouflage coatings all propose the spectral characteristic requirements of green camouflage colors.
The camouflage green inspection mirror is convenient camouflage observation equipment which can visually and qualitatively inspect whether the spectral reflection characteristics of artificial green materials are similar to those of natural green vegetation. Natural green vegetation is observed under such inspection mirrors to be reddish-orange or red, while artificial green materials appear in different colors depending on the degree of difference in spectral reflectance from green vegetation: the light spectrum reflection difference is large and is green or dark green; when the spectral reflection curve of the artificial green material is slightly different from the green vegetation (similar to the shape of the spectral reflection curve of the green vegetation), the artificial green material is in a reddish orange or red similar to the appearance of the green vegetation under the observation of a green ophthalmoscope; when the spectral reflection curve of the artificial green material has a certain difference with the green vegetation (between the two), the artificial green material presents reddish brown or dark brown with a certain difference with the green vegetation when observed by a camouflage green ophthalmoscope. Therefore, the artificial green material can be visually and qualitatively judged to meet the camouflage degree by using the camouflage green inspection mirror: materials that appear green or dark green under the inspection scope cannot be used to cope with near-infrared observation and photography; the artificial green material which presents reddish orange or red similar to green vegetation under the camouflage green inspection mirror is a good camouflage material for preventing near infrared observation and photography; artificial green materials that appear reddish-brown or dark-brown under inspection mirrors, although useful for camouflage, are less effective than artificial materials that resemble green vegetation.
The principle of green test mirror for identifying green camouflage materials is as follows: the green inspection mirror distinguishes green with different spectral reflection, and the spectral power distribution of a light source is substantially changed, so that the same color conditions of two different spectral green are obviously changed to generate color difference: two greens of the same color under one lighting condition become different colors under the other lighting condition, and the difference of the colors is used for deducing the degree of the dissimilarity of the two greens.
The filter lens of the inspection mirror has very obvious selectivity in visible light and near infrared regions, and can transmit a large amount of red light and near infrared rays with the wavelength of more than 680 nm; a small amount of blue-green light with the wavelength of 470nm to 520nm is transmitted, and a tiny transmission peak value is arranged near 500nm or 510 nm; while in other bands, there is little transmission, and the light transmission curve is shown in fig. 3. In the figure, the ordinate represents the spectral transmittance, and the ordinate is 30-fold enlarged in the vicinity of a wavelength of 500nm in order to show the curve shape.
For example, P (lambda) represents the relative value of the spectral power distribution of natural light under daytime conditions, rho1(λ) represents the spectral reflectance, ρ, of the green vegetation in FIG. 12(λ) represents the spectral reflectance of the general artificial green material in fig. 2, and the two green colors can be represented by the following formula, respectively, defined by colorimetry:
in the formula:
X1、Y1、Z1-tristimulus values of green vegetation;
X2、Y2、Z2-tristimulus values of common artificial green materials;
P (λ) — illumination source power;
k-adjustment factor.
When two kinds of green colors different in spectral reflectance characteristic are directly observed with normal human eyes, if the same (or nearly the same) color sensation is caused, it is indicated that the two kinds of green colors are the daytime illuminant P (λ) and the standard observer
λ、
λ、
λUnder the condition of heterochromatic green, the tristimulus values of the heterochromatic green and the heterochromatic green are close to equal, namely:
X1=X2
Y1=Y2
Z1=Z2
when the spectral transmittance is taken asλWhen the green inspection mirror is used for observation, the spectral power of two green transmission lenses is respectively P (lambda) rho1(λ)τλAnd P (λ) ρ2(λ)τλIn which the value is represented by P (lambda) tauλ＝P*(λ) indicating that the spectral power distribution of the light source has changed from P (λ) to P*(λ), in this case, tristimulus values of two green colors
、
、
、
、
、
Respectively become:
= K
dλ
= K
dλ
at this time, since the spectral power of the illumination light source is significantly changed, the same color condition of two different same color green will be destroyed, and the color perception will be significantly different, that is:
the chromaticity coordinates x, y, z for the two green colors observed by the human eye and under the inspection scope can be calculated as follows:
x =
y =
z =
with X1、Y1、Z1、X2、Y2、Z2、
、
、
、
、
、
The values of the chromaticity coordinates (x) are obtained separately1，y1)、(x2，y2)、(
，
)、(
，
) And then the human eye observes the chromaticity point (x) of the two green colors1，y1)、(x2，y2) Fall in the green region of the chromaticity diagram and overlap or approach each other; and the chromaticity point of the green vegetation when observed with a green inspection mirror (
，
) Chromaticity point of general artificial green material located in red orange region or red region: (
，
) Is not greatly changed and still falls in a green zone.
Under the conditions of low outdoor illumination (dusk or dawn) and indoor artificial light source (continuous spectrum) illumination, the color change generated by the spectral reflection difference of the material can be still correctly distinguished by observing and checking the artificial green material at a short distance by using a green inspection mirror, and the color distinguishing capability is lost only when the surface illumination of the material is lower than 250 lux.
The filter glass selected was QB3, and its transmittance curve is shown in FIG. 4.
The red light and near infrared transmittance data of the QB3 filter glass are basically consistent with the data of design requirements and also are consistent with green vegetation, the peak is rapidly raised at 680nm, the peak is 20.1 at 700nm, the peak reaches 73.3 at 720nm and the peak reaches 89.8 at 760nm, so that the transmittance after 680nm does not need to be corrected by coating, as long as the original performance of the QB3 filter glass is not influenced by subsequent coating processing, and the coating design scheme and the processing difficulty are greatly simplified. The QB3 filter glass begins to peak towards the short wave direction at 520nm, 31.5 at 9.6,460nm at 1.6,480nm at 500nm can be designed into a coating, 480nm is taken as a wave peak, the bandwidth is 40nm, and the transmittance of the wavelength below 450nm is completely cut off in a multilayer coating mode, so that the processing and manufacturing of a transmittance curve are realized.
In view of the special requirement of spectral transmittance of the camouflage green ophthalmoscope, the optical performance of the common colored glass on the market can not meet the requirement, so that an optical film is required to be adopted to perfect the optical performance of the colored glass.
Especially, the high transmittance of QB3 at 320 nm-440 nm is cut off, and high transmittance of red light and infrared light larger than 680nm is ensured, so that the long-wavelength-pass cut-off filter film (LWP) in the optical film can realize the purpose, and the specific structure is as follows:
（0.5HL0.5H）S，λ0≈420 nm
wherein: h, high refractive index coating material, the optical thickness of which is one quarter of the central wavelength; l is a low refractive index coating material, the optical thickness of which is one quarter of the central wavelength; s- -the number of cycles, which depends on the cut-off depth of the cut-off zone; lambda [ alpha ]0-the central wavelength of the cut-off region.
The width of the cut-off region depends on the difference between the two coating materials with high and low refractive indexes, so that selection is needed; the cut-off depth is also appropriate to ensure a certain transmittance for blue-green light (470 nm to 520 nm).
The optical film plating process can be largely divided into two types: physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD), and are dominated by PVD methods, particularly multilayer optical films. In physical vapor deposition, vacuum evaporation and sputtering are the main processes, and the process to be adopted is vacuum evaporation.
Equipment: vacuum coating machine
The current vacuum coating machine is necessarily provided with: vacuum system, evaporation source (electron gun or steam block), workpiece holder (including workpiece rotation), baking system (capable of baking up and down and heating workpiece), film thickness and evaporation rate control system, gas charging system (charging oxygen or other), ion source, etc
Coating material
The required coating material needs to be high in purity (except for special mixed coating materials with a certain proportion), easy to gasify, not easy to decompose and the like. The refractive index after film formation can be classified into: a high refractive index material (H) and a low refractive index material (L). For the long-wavelength pass cut-off filter film, the high-refraction material ZrO is selected in consideration of factors such as film surface strength and the like2Low refractive index material SiO2. The two films have good matching performance on stress, and after a multilayer film is formed, the phenomena of cracking and peeling are avoided.
The specific process is briefly described as follows:
a. cleaning blue filter glass QB3 in an ultrasonic cleaning machine, then placing the cleaned glass QB on a workpiece frame, placing the workpiece frame in a vacuum chamber of a vacuum coating machine, closing a chamber door, and vacuumizing the vacuum chamber;
b. the vacuum degree reaches 3X 10-1Pa, the blue filter glass QB3 was heated at the temperature set to: continuously vacuumizing at 240-250 ℃;
c. the vacuum degree reaches 5X 10-3When Pa is needed, starting to perform film coating on the two high and low refractive index film coating materials ZrO2And SiO2Pre-melting respectively (two coating materials are respectively arranged in different crucibles of the electron gun).
d. After the pre-melting is finished, the vacuum degree of the vacuum chamber reaches 2 multiplied by 10-3When Pa, the film coating can be started. Due to ZrO2And SiO2All oxides are easy to deoxidize during vaporization film formation, so oxygen needs to be charged into the vacuum chamber and the vacuum degree is ensured to be not lower than 1 x 10-3Pa ～2×10-3Pa. The vacuum coating machine is provided with a mass flow meter and a pressure controller so as to control the amount of oxygen filled and the vacuum degree in the vacuum chamber; in the coating of filmZrO should be well controlled2With SiO2Film forming rates of these two coating materials. ZrO (ZrO)2Typical film formation rates are: 0.35nm/S to 0.40nm/S, and SiO2Typical film formation rates are: 0.8 nm/S-1.0 nm/S.
e. Both sides of the blue filter glass QB3 are coated with LWP film system which is generally coated with ZrO according to the intrinsic optical property of the blue filter glass QB3 and the required cut-off depth of the product2With SiO2The high and low refraction materials have about 17 layers in total. The two coating materials with high and low refractive indexes are respectively ZrO2And SiO2High purity material, S =8, which means that this long wavelength pass cut filter (LWP) has a total of 17 layers.
f. After the working procedure e) is finished (after the film coating is finished), closing the electron gun, the baking heater, the high vacuum valve and the like, filling the vacuum chamber with air to normal pressure after the temperature of the vacuum chamber is reduced to be lower than 80 ℃, and opening the door of the vacuum chamber to take out the colored glass coated with the film.
Claims (7)
1. The utility model provides a can green disguised inspection mirror of visual identification which characterized in that: the blue filter glass QB3 is used as a substrate material, and two surfaces of the blue filter glass QB3 are plated with long-wavelength-pass cut-off filter films; the long-wavelength-pass cut-off filter film is formed by alternately coating a high-refractive-index coating material and a low-refractive-index coating material for multiple times; the high-refractive-index coating material is ZrO2The material is low-refractive-index coating material SiO2A material;
the inspection mirror can transmit a large amount of red light and near infrared rays with the wavelength of more than 680nm, transmit a small amount of blue-green light with the wavelength of 470nm to 520nm, have a tiny transmission peak value near 500nm or 510nm and have little transmission in other wave bands.
2. The inspection mirror capable of visually recognizing green camouflage according to claim 1, wherein: the thickness of the blue filter glass QB3 is 1-2 mm, and the total thickness of the long-wavelength-pass cut-off filter coatings plated on the front surface and the back surface of the blue filter glass QB3 is 1.5-1.7 microns.
3. The inspection mirror capable of visually recognizing green camouflage according to claim 2, wherein: the thickness of the blue filter glass QB3 is 1.5 mm.
4. The inspection mirror capable of visually recognizing green camouflage according to claim 1, wherein the long-wavelength-pass cut-off filter film system structure on the surface of the blue filter glass QB3 is as follows:
（0.5HL0.5H）Staking the center wavelength λ0≈420nm
Wherein: h, high refractive index coating material, the optical thickness of which is one quarter of the central wavelength; l is a low refractive index coating material, the optical thickness of which is one quarter of the central wavelength; s- -number of cycles, λ0-a central wavelength; s =8 is selected, and the long-wave-pass cut-off filter film has 17-18 layers.
5. The inspection mirror capable of visually recognizing the green camouflage according to claim 1 or 4, wherein the high refractive index coating material and the low refractive index coating material are coated alternately for a plurality of times, wherein the high refractive index coating material is coated with 8-9 layers, the low refractive index coating material is coated with 8-9 layers, the high refractive index coating material and the low refractive index coating material are coated with 16-18 layers together, and the formed long-wavelength-pass cut-off filter film is 16-18 layers in total.
6. The inspection mirror capable of visually recognizing green camouflage according to claim 1, wherein the high refractive index coating material ZrO2The material is high-purity ZrO2Zirconium dioxide optical coating material, high refractive index coating material ZrO2The purity is 99.5%; low-refractive-index coating material SiO2The material is high-purity SiO2Optical coating material, low refractive index coating material SiO2The purity was 99.8%.
7. The method for preparing the inspection mirror capable of visually recognizing the green camouflage according to claim 1, wherein the method for coating the film by vacuum evaporation comprises the following steps:
a. cleaning blue filter glass QB3 in an ultrasonic cleaning machine, then placing the blue filter glass QB3 on a workpiece frame, placing the workpiece frame in a vacuum chamber of a vacuum coating machine, closing a chamber door, and vacuumizing the vacuum chamber;
b. the vacuum degree reaches 3X 10-1Pa, the blue filter glass QB3 was heated at the temperature set to: continuously vacuumizing at 240-250 ℃;
c. the vacuum degree reaches 5X 10-3At Pa, starting the high refractive index coating material ZrO2And low refractive index coating material SiO2Pre-melting the two coating materials respectively, wherein the two coating materials are respectively arranged in different crucibles of an electron gun;
d. after the pre-melting is finished, the vacuum degree of the vacuum chamber reaches 2 multiplied by 10-3When Pa, starting coating; due to ZrO2And SiO2All are oxides, and are easy to deoxidize when vaporized to form film, so that it is necessary to fill oxygen into vacuum chamber and ensure vacuum degree of 1X 10-3Pa ~2×10-3Pa; the vacuum coating machine is provided with a mass flow meter and a pressure controller so as to control the amount of oxygen filled and the vacuum degree in the vacuum chamber; ZrO needs to be well controlled during film coating2With SiO2The film forming rates of the two coating materials; ZrO (ZrO)2The film formation rate of (A) is: 0.35nm/S to 0.40nm/S, SiO2The film formation rate of (A) is: 0.8nm/S to 1.0 nm/S;
e. for both sides of the blue filter glass QB3, a long-wavelength pass cut-off filter film system needs to be plated, and according to the intrinsic optical property of the blue filter glass QB3 and the cut-off depth required by the product, the long-wavelength pass cut-off filter film system needs to be plated with ZrO2With SiO216-18 layers of high and low refraction materials;
f. and e, closing the electron gun, the baking heater and the high vacuum valve after the working procedure e is finished, filling the atmosphere into the vacuum chamber to normal pressure after the temperature of the vacuum chamber is reduced to be lower than 80 ℃, opening the door of the vacuum chamber, taking out the filter lens coated with the film, and preparing the inspection mirror capable of visually identifying the green camouflage by using the filter lens.
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