CN111595475A - Renewable axial film thermocouple for transient temperature measurement and manufacturing method thereof - Google Patents
Renewable axial film thermocouple for transient temperature measurement and manufacturing method thereof Download PDFInfo
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- CN111595475A CN111595475A CN202010444142.2A CN202010444142A CN111595475A CN 111595475 A CN111595475 A CN 111595475A CN 202010444142 A CN202010444142 A CN 202010444142A CN 111595475 A CN111595475 A CN 111595475A
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- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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Abstract
The invention belongs to the related technical field of transient temperature measurement, and discloses a renewable axial thin-film thermocouple for transient temperature measurement and a manufacturing method thereof, wherein the thermocouple comprises a first semi-cylindrical matrix, a second semi-cylindrical matrix, a first thermode, a second thermode, an armored sleeve and a metal conducting film; the first semi-cylindrical matrix and the second semi-cylindrical matrix are jointly used for clamping the first thermode and the second thermode, and both are accommodated in the armored sleeve; the metal conducting film is arranged at one end of the armored sleeve, which contains the first semi-cylindrical matrix and the second semi-cylindrical matrix, and the first semi-cylindrical matrix and the second semi-cylindrical matrix are electrically connected through the metal conducting film; one end of the first thermode far away from the metal conduction film and one end of the second thermode far away from the metal conduction film sequentially penetrate through the armored sleeve and protrude out of the armored sleeve. The invention can measure various transient temperatures and has the advantages of high response speed, simple structure, long service life, small volume, wide temperature measurement range, high precision and the like.
Description
Technical Field
The invention belongs to the technical field related to transient temperature measurement, and particularly relates to a renewable axial film thermocouple for transient temperature measurement and a manufacturing method thereof.
Background
The transient dynamic temperature measurement is very important for the transient dynamic temperature measurement in the field of industrial measurement and scientific research, and the transient temperature measurement is indispensable data in the research processes of heat transfer calculation, thermal stress calculation, safety performance evaluation and the like.
The thermocouple is widely applied to modern temperature measurement technology as a temperature sensor with excellent performance. During temperature measurement, the temperature of the measured object and the thermal junction of the thermocouple when the temperature is balanced is the temperature of the measured object, and the response of the thermocouple is delayed due to the influence of the thermal capacity of the thermal junction on the heat transfer speed in the actual measurement process. For the measurement of the steady-state temperature, a common thermocouple can be used to meet the requirement, but when the thermocouple is used for measuring the transient temperature signal with extremely fast temperature change speed, the response speed of the thermocouple must be fast enough. The hot junction of the common thermocouple is spherical, the spherical hot junction is made by welding, the response speed can be improved only by adopting the thermocouple wire with small diameter, the diameter of the hot junction cannot be greatly reduced in the process, and the response speed cannot be greatly improved. The time constant of the film thermocouple is in direct proportion to the thickness of the film, the time constant of the film thermocouple can be reduced by reducing the thickness of the film, and the existing film preparation technology can prepare metal or nonmetal films with different thicknesses from a few nanometers to hundreds of micrometers, so that the response speed of the film thermocouple can be extremely high, and the quick-response thermocouple can be divided into the film thermocouple and a shaft-shaped thermocouple according to the structure.
Thin-film thermocouple such as one described in patent CN 104406706 a, a thin film of thermode material is directly evaporated on an insulating substrate, and a thermocouple is formed by overlapping two thermode materials; however, such thermocouples are still under laboratory research, and the installation of the planar insulating substrate is difficult to be realized in practical engineering measurement, and has a large distance from industrial application. Shaft thermocouple such as a needle-like coaxial thin film thermocouple for measuring transient temperature described in patent CN 103245430 a, in which an outer sleeve is used as one pole of the thermocouple, a thermocouple wire passing through a central hole is used as the other pole, and an insulating layer is covered on the central thermocouple to realize the insulation between the electrodes; the thermocouple is a cylindrical thermocouple formed by preparing a thermode film with a specific shape on a semi-cylindrical substrate and buckling the thermode film through a semi-cylindrical structure, as described in patent CN 206974557U, wherein the hot junction of the thermocouple described in the patent is an axial hot junction of 10mm × 2mm, and the response speed of the thermocouple is greatly limited.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides a renewable axial thin-film thermocouple for transient temperature measurement and a manufacturing method thereof.
To achieve the above objects, according to one aspect of the present invention, there is provided a renewable axial thin-film thermocouple for transient temperature measurement, the thermocouple comprising a first semi-cylindrical base, a second semi-cylindrical base, a first hot electrode, a second hot electrode, an armored sleeve, and a metal conductive film; wherein the content of the first and second substances,
the first semi-cylindrical matrix and the second semi-cylindrical matrix are jointly used for clamping the first thermode and the second thermode, and both are accommodated in the armored sleeve; the metal conducting film is arranged at one end of the armored sleeve, which contains the first semi-cylindrical matrix and the second semi-cylindrical matrix, and the first semi-cylindrical matrix and the second semi-cylindrical matrix are electrically connected through the metal conducting film; one end of the first thermode, which is far away from the metal conducting film, and one end of the second thermode, which is far away from the metal conducting film, sequentially penetrate through the armored sleeve and protrude out of the armored sleeve.
Furthermore, the thin-film thermocouple also comprises a plug, the plug is installed at the other end of the armored sleeve, and the first thermode and the second thermode penetrate through the plug.
Furthermore, the surface of the first semi-cylindrical substrate and the surface of the second semi-cylindrical substrate are both provided with insulating films.
Furthermore, the thickness of the metal conducting film is 3-6 microns, and the metal conducting film is made of gold.
Further, the radius of the first semi-cylindrical base body is the same as the radius of the second semi-cylindrical base body, and the armored sleeve is cylindrical and has the same radius as the radius of the first semi-cylindrical base body.
Furthermore, a positioning step is arranged in the armored sleeve, is in a circular ring shape, and is used for axially positioning the first semi-cylindrical matrix and the second semi-cylindrical matrix; the armor sleeve is provided with a thermocouple cavity and a glue filling cavity, and the positioning step is positioned between the thermocouple cavity and the glue filling cavity and communicated with the thermocouple cavity and the glue filling cavity.
Furthermore, the first semi-cylindrical base body and the second semi-cylindrical base body are accommodated in the thermocouple cavity, and high-temperature heat-conducting glue is filled in the glue filling cavity to fix the first hot electrode and the second hot electrode; the plug part is accommodated in the glue filling cavity to plug the glue filling cavity.
Furthermore, the positioning step is provided with a glue injection hole, and the glue injection hole is communicated with the thermocouple cavity and the glue filling cavity.
According to another aspect of the present invention, there is provided a method of making a renewable axial thin film thermocouple for transient temperature measurement, the method comprising the steps of: firstly, fixing the first thermode and the second thermode through the first semi-cylindrical matrix and the second semi-cylindrical matrix, and then installing the fixed first thermode and the second thermode into the armored sleeve; and then, preparing metal conducting films on the end faces of the first semi-cylindrical substrate and the second semi-cylindrical substrate, wherein the metal conducting films are electrically connected with the first hot electrode and the second hot electrode.
Further, the first semi-cylindrical matrix, the second semi-cylindrical matrix and the armor sleeve are fixed to each other through a second welding spot formed by spot welding; the method also comprises the step of filling high-temperature-resistant heat-conducting glue into the armored sleeve before preparing the metal conducting film.
In general, compared with the prior art, the renewable axial thin-film thermocouple for transient temperature measurement and the manufacturing method thereof provided by the invention have the following beneficial effects:
1. the metal conducting film is arranged at one end of the armored sleeve, which contains the first semi-cylindrical base body and the second semi-cylindrical base body, the first semi-cylindrical base body and the second semi-cylindrical base body are electrically connected through the metal conducting film, and after a hot junction is used for a long time and fails, the metal conducting film is prepared again by grinding the end face of the temperature measuring end, so that the metal conducting film has a very long service life.
2. The metal conducting film is made of gold, so that the hot junction has excellent high-temperature oxidation resistance and corrosion resistance; the thickness of the metal conducting film is 3-6 microns, the metal conducting film has very small heat capacity, heat balance between the metal conducting film and the temperature of a measured object can be easily achieved, and quick response of the renewable axial thin-film thermocouple is achieved.
3. The thin-film thermocouple is simple in structure, small in size, wide in measurement range, high in precision and good in applicability.
4. The manufacturing method is simple in process, easy to implement and beneficial to popularization and application.
Drawings
FIG. 1 is an exploded schematic view of a renewable axial thin film thermocouple for transient temperature measurement provided by the present invention;
FIG. 2 is a cross-sectional view of the armored sleeve of the renewable axial thin-film thermocouple for transient temperature measurement of FIG. 1;
FIG. 3 is a schematic view of the renewable axial thin film thermocouple of FIG. 1 for transient temperature measurement along an angle;
FIG. 4 is a schematic diagram of the semi-cylindrical matrix of the renewable axial thin film thermocouple of FIG. 1 for transient temperature measurement;
FIG. 5 is a schematic perspective view of the renewable axial thin film thermocouple of FIG. 1 for transient temperature measurement.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-a first semi-cylindrical matrix, 2-a second semi-cylindrical matrix, 3-a first thermode, 4-a second thermode, 5-an armored sleeve, 5 a-an adhesive injection hole, 5 b-a positioning step, 5 c-a thermocouple cavity, 5 d-an adhesive filling cavity, 6-a plug, 7-a metal conducting die, 8 a-a first welding point and 8 b-a second welding point.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1 and 2, the renewable axial thin-film thermocouple for transient temperature measurement provided by the present invention includes a first semi-cylindrical base 1, a second semi-cylindrical base 2, a first hot electrode 3, a second hot electrode 4, an armored sleeve 5, a plug 6 and a metal conducting film 7, wherein the first semi-cylindrical base 1 and the second semi-cylindrical base 2 are used together to clamp the first hot electrode 3 and the second hot electrode 4, and the radii of the two are equal. The first semi-cylindrical base body 1 and the second semi-cylindrical base body 2 are both accommodated in the armored sleeve 5, the metal conductive film 7 is arranged at one end of the armored sleeve 5, which accommodates the first semi-cylindrical base body 1 and the second semi-cylindrical base body 2, and the first semi-cylindrical base body 1 and the second semi-cylindrical base body 2 are electrically connected through the metal conductive film 7; the plug 6 is arranged at the other end of the armored sleeve 5. One end of the first thermode 3 away from the metal conducting film 7 and one end of the second thermode 4 away from the metal conducting film 7 sequentially penetrate through the armored sleeve 5 and the plug 6 and protrude out of the plug 6.
In this embodiment, the first semi-cylindrical base 1, the second semi-cylindrical base 2, the armor sleeve 5, and the plug 6 are cut by slow-speed wire, and the surface of the first semi-cylindrical base 1 and the surface of the second semi-cylindrical base 2 are prepared by a PECVD technique to form a silica insulating film; the metal conducting film 7 is prepared by adopting a vacuum magnetron sputtering technology, is made of gold and has the thickness of 3-6 microns; the first thermode 3 and the second thermode 4 are clamped by the first semi-cylindrical base body 1 and the second semi-cylindrical base body 2 and then are installed in the armored sleeve 5.
The armored sleeve 5 is cylindrical, and the radius of the armored sleeve is equal to that of the first semi-cylindrical base body 1. A positioning step 5b is arranged in the armored sleeve 5, and the positioning step 5b is in a circular ring shape. The armored sleeve 5 is provided with a thermocouple cavity 5c and a glue filling cavity 5d, and the positioning step 5b is located between the thermocouple cavity 5c and the glue filling cavity 5d and communicated with the thermocouple cavity 5c and the glue filling cavity 5 d.
The thermocouple cavity 5c is used for accommodating the first semi-cylindrical base 1, the second semi-cylindrical base 2 and a part of the first hot electrode 3 and the second hot electrode 4. In this embodiment, the cross section of the thermocouple cavity 5c perpendicular to the length direction thereof is circular, and the cross section of the glue filling cavity 5d perpendicular to the length direction thereof is circular. The positioning step 5b is used for axially positioning the first semi-cylindrical base body 1 and the second semi-cylindrical base body 2. The positioning step 5b is provided with a glue injection hole 5a, and the glue injection hole 5a is communicated with the thermocouple cavity 5c and the glue filling cavity 5 d.
The plug 6 is partially accommodated in the glue filling cavity 5d to plug the glue filling cavity 5d, and the glue filling cavity 5d accommodates high-temperature heat-conducting glue to fix the first hot electrode 3 and the second hot electrode 4. In this embodiment, the first and second semicylindrical bases 1 and 2 are connected to the armor sleeve 5 by welding; the plug 6 is also connected with the armored sleeve 5 by welding, as shown in fig. 3, the first semi-cylindrical base 1, the second semi-cylindrical base 2 and the armored sleeve 5 are fixed to each other by a second welding point 8b formed by spot welding; as shown in fig. 5, the plug 6 is connected to the armouring sleeve 5 by a first welding point 8 a.
Referring to fig. 4, the structure of the first semi-cylindrical substrate 1 is the same as that of the second semi-cylindrical substrate 2, two semi-circular holes are formed in the first semi-cylindrical substrate 1 at intervals, the semi-circular holes of the first semi-cylindrical substrate 1 correspond to the semi-circular holes of the second semi-cylindrical substrate 2 in shape and position, and two circular holes are formed in pairs, and the two circular holes formed between the first semi-cylindrical substrate 1 and the second semi-cylindrical substrate 2 are respectively used for accommodating the first hot electrode 3 and the second hot electrode 4. In the present embodiment, the longitudinal direction of the semicircular hole is parallel to the longitudinal direction of the first semicylindrical base 1.
The invention also provides a method for manufacturing the renewable shaft-shaped film thermocouple for transient temperature measurement, which mainly comprises the following steps:
step 1: and processing each part by a slow-wire cutting technology, wherein each part comprises the first semi-cylindrical matrix 1, the second semi-cylindrical matrix 2, the armored sleeve 5 and the plug 6.
Step 2: and carrying out insulation treatment on the surfaces of the first semi-cylindrical substrate 1 and the second semi-cylindrical substrate 2 by a PECVD (plasma enhanced chemical vapor deposition) technology.
And step 3: the first thermode 3 and the second thermode 4 are fixed by the first semi-cylindrical base body 1 and the second semi-cylindrical base body 2 and then are installed in the thermocouple cavity 5c of the armored sleeve 5, and the other ends of the first thermode 3 and the second thermode 4 are led out through the glue filling cavity 5d and the inner hole of the plug 6.
And 4, step 4: fixing among the parts is realized by spot welding the first welding point 8a and the second welding point 8b, and the first welding point 8a and the second welding point 8b are ground to make the surface smooth.
And 5: and (3) filling the glue filling cavity 5d with high-temperature-resistant heat-conducting glue through the glue filling hole 5a, and standing until the high-temperature-resistant heat-conducting glue in the glue filling cavity 5d is completely solidified.
Step 6: and grinding the end face of the obtained renewable shaft-shaped film thermocouple, and preparing the metal conducting film 7 on the surface after the surface smoothness meets the requirement, thereby finishing the manufacturing of the film thermocouple.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A renewable axial thin film thermocouple for transient temperature measurement, characterized by:
the thin-film thermocouple comprises a first semi-cylindrical matrix, a second semi-cylindrical matrix, a first thermode, a second thermode, an armored sleeve and a metal conducting film; wherein the content of the first and second substances,
the first semi-cylindrical matrix and the second semi-cylindrical matrix are jointly used for clamping the first thermode and the second thermode, and both are accommodated in the armored sleeve; the metal conducting film is arranged at one end of the armored sleeve, which contains the first semi-cylindrical matrix and the second semi-cylindrical matrix, and the first semi-cylindrical matrix and the second semi-cylindrical matrix are electrically connected through the metal conducting film; one end of the first thermode, which is far away from the metal conducting film, and one end of the second thermode, which is far away from the metal conducting film, sequentially penetrate through the armored sleeve and protrude out of the armored sleeve.
2. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 1, wherein: the thin-film thermocouple further comprises a plug, the plug is installed at the other end of the armored sleeve, and the first thermode and the second thermode penetrate through the plug.
3. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 1, wherein: and insulating films are prepared on the surface of the first semi-cylindrical matrix and the surface of the second semi-cylindrical matrix.
4. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 1, wherein: the thickness of the metal conducting film is 3-6 microns, and the metal conducting film is made of gold.
5. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 1, wherein: the radius of the first semi-cylindrical base body is the same as that of the second semi-cylindrical base body, and the armored sleeve is cylindrical and has the same radius as that of the first semi-cylindrical base body.
6. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 2, wherein: a positioning step is arranged in the armored sleeve, is in a circular ring shape and is used for axially positioning the first semi-cylindrical matrix and the second semi-cylindrical matrix; the armor sleeve is provided with a thermocouple cavity and a glue filling cavity, and the positioning step is positioned between the thermocouple cavity and the glue filling cavity and communicated with the thermocouple cavity and the glue filling cavity.
7. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 6, wherein: the first semi-cylindrical base body and the second semi-cylindrical base body are accommodated in the thermocouple cavity, and high-temperature heat-conducting glue is filled in the glue filling cavity so as to fix the first hot electrode and the second hot electrode; the plug part is accommodated in the glue filling cavity to plug the glue filling cavity.
8. The renewable axial thin film thermocouple for transient temperature measurement as set forth in claim 6, wherein: the positioning step is provided with a glue injection hole, and the glue injection hole is communicated with the thermocouple cavity and the glue filling cavity.
9. A method of making a renewable axial thin film thermocouple for transient temperature measurement as claimed in any of claims 1-8, comprising the steps of: firstly, fixing the first thermode and the second thermode through the first semi-cylindrical matrix and the second semi-cylindrical matrix, and then installing the fixed first thermode and the second thermode into the armored sleeve; and then, preparing metal conducting films on the end faces of the first semi-cylindrical substrate and the second semi-cylindrical substrate, wherein the metal conducting films are electrically connected with the first hot electrode and the second hot electrode.
10. The method of claim 9, wherein the step of forming a renewable axial thin film thermocouple comprises: the first semi-cylindrical matrix, the second semi-cylindrical matrix and the armored sleeve are mutually fixed through a second welding spot formed by spot welding; the method also comprises the step of filling high-temperature-resistant heat-conducting glue into the armored sleeve before preparing the metal conducting film.
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| CN202010444142.2A CN111595475A (en) | 2020-05-22 | 2020-05-22 | Renewable axial film thermocouple for transient temperature measurement and manufacturing method thereof |
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| CN202010444142.2A CN111595475A (en) | 2020-05-22 | 2020-05-22 | Renewable axial film thermocouple for transient temperature measurement and manufacturing method thereof |
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Cited By (1)
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|---|---|---|---|---|
| CN113091936A (en) * | 2021-04-06 | 2021-07-09 | 华中科技大学 | Coaxial film thermocouple suitable for measuring transient temperature on surface of 42CrMo steel piston |
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Application publication date: 20200828 |