CN111593304B - Method for improving ITO target blank strength - Google Patents
Method for improving ITO target blank strength Download PDFInfo
- Publication number
- CN111593304B CN111593304B CN201910125113.7A CN201910125113A CN111593304B CN 111593304 B CN111593304 B CN 111593304B CN 201910125113 A CN201910125113 A CN 201910125113A CN 111593304 B CN111593304 B CN 111593304B
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- Prior art keywords
- ito
- slurry
- target blank
- blank
- improving
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
Abstract
The invention discloses a method for improving the strength of an ITO target blank, which is characterized in that before ITO slurry is poured into a plaster mold, protective liquid is prepared firstly, then the protective liquid is coated on the surface of a plaster mold cavity, then the ITO slurry is poured, after the ITO slurry is poured, the protective liquid is sprayed on the surface of the exposed ITO slurry in the plaster mold, and the ITO slurry blank with a solidified protective film coated on the surface can be obtained after molding and demolding. The application of the invention can form a solidified protective film on the surface of the ITO target blank, thereby fixing the ITO target blank, greatly improving the strength of the blank, avoiding the problems of cracking and the like in the production process of the ITO target blank and improving the transfer yield.
Description
Technical Field
The invention relates to the technical field of target production, in particular to a method for improving the strength of a target blank.
Background
The ITO green body is a green body made of indium tin oxide, and the molding techniques are generally classified into dry molding and wet molding. The dry method molding is prepared by a method of molding firstly and then performing cold isostatic pressing, the wet method molding is divided into methods of normal pressure slip casting, filter pressing slip casting and the like, the slip casting is generally to pour prepared ITO slurry into a plaster mold to mold an ITO green body, and the method can obtain a uniform plate-shaped green body, so the method is widely applied.
However, the powder raw material of the ITO target blank belongs to poor raw materials, the viscosity is poor, and the target product has high requirement on purity, so additives such as clay and the like cannot be used, and the prepared ITO target blank has high brittleness and poor bending strength. In order to improve the strength of the ITO target blank, an organic binder is usually added into the grouting slurry, but the strength of the blank is improved to a certain extent in the early molding stage by the common binder, and the action of the binder is gradually weakened along with the gradual drying of the blank, so that the strength of the blank is reduced along with the drying. Moreover, the ITO green body is subjected to a plurality of subsequent procedures of degreasing and sintering, so that the ITO green body is easy to crack in the transfer process and the yield is low.
Chinese patent CN108298977A discloses a method for improving the strength of an ITO target blank, which also improves the strength by adding a binder into a grouting material, and although the binder is a mixture of organic fibers and an organic dispersant, the binder is directly added into the slurry, so that the strength is inevitably reduced in subsequent drying, degreasing, sintering and other processes, and the cracking and other problems cannot be completely avoided.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a method for improving the strength of an ITO target blank, thoroughly avoid the problems of cracking and the like in the production process of the ITO target blank and improve the yield.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows.
A method for improving ITO target blank strength comprises the steps of preparing a protective solution before pouring ITO slurry into a gypsum mold, coating the protective solution on the surface of a cavity of the gypsum mold, then pouring the ITO slurry, spraying the protective solution on the surface of the exposed ITO slurry in the gypsum mold after the ITO slurry is poured, and demolding after molding to obtain an ITO slurry blank coated with a cured protective film on the surface.
According to the method for improving the strength of the ITO target blank, the protective solution is a mixed solution of water-based silicone rubber, a curing agent and water.
According to the method for improving the strength of the ITO target blank, the curing agent is a silane coupling agent.
According to the method for improving the strength of the ITO target blank, the curing agent is at least one of vinyl silane, sulfenyl silane, amino silane and amido silane.
According to the method for improving the strength of the ITO target blank, the ratio of the water-based silicone rubber, the curing agent and the water is 20-40: 0.6-1.5: 100.
Due to the adoption of the technical scheme, the technical progress of the invention is as follows.
The application of the invention can form the water-based silicon rubber curing protective film on the surface of the ITO target blank, thereby fixing the ITO target blank, greatly improving the strength of the blank, avoiding the problems of cracking and the like in the production process of the ITO target blank and improving the transfer yield. The water-based silicon rubber curing protective film has hydrophilicity, air permeability and high stretchability, and does not influence the dehydration and shrinkage of a blank body in the drying process. The solidified protective film formed by the invention can be removed in the subsequent high-temperature degreasing process, the surface silicon impurities can be removed by post-grinding, the impurities can not be brought into the ITO target blank, and the purity of the ITO target blank is ensured.
Detailed Description
A method for improving ITO target blank strength comprises the steps of firstly preparing ITO slurry for casting; preparing a protective solution before pouring the ITO slurry into the gypsum mold, coating the protective solution on the surface of a cavity of the gypsum mold, then pouring the ITO slurry, spraying the protective solution on the surface of the exposed ITO slurry in the gypsum mold after the ITO slurry is poured, and demolding after molding to obtain an ITO slurry blank body with a cured protective film wrapped on the surface.
The protective solution is a mixed solution of water-based silicone rubber, a curing agent and water; the ratio of the water-based silicone rubber to the curing agent to the water is 20-40: 0.6-1.5: 100. The curing agent is a silane coupling agent, preferably at least one of vinyl silane, sulfur-based silane, amino silane and amide silane.
The present invention will be described in further detail with reference to specific examples.
Example 1
In the embodiment, the protective solution is obtained by uniformly stirring water-based silicone rubber, a curing agent and water in a ratio of 30:1:100, wherein the curing agent is vinyl silane. Before the ITO slurry is poured into the plaster mold, the protection liquid is coated on the surface of a cavity of the plaster mold, then the ITO slurry is poured, after the ITO slurry is poured, a layer of protection liquid is sprayed on the surface of the ITO slurry exposed in the plaster mold, and after the ITO slurry is formed, the ITO slurry blank body with a solidified protective film wrapped on the surface can be obtained by demolding.
The protective solution can form a water-based silicon rubber curing protective film on the surface of the ITO target blank, thereby fixing the ITO target blank and greatly improving the strength of the blank. And the solidified protective film can be removed in the subsequent high-temperature degreasing process, silicon impurities on the surface can be removed through later grinding, impurities cannot be brought into the ITO target blank, and the purity of the ITO target blank is ensured.
Examples 2 to 5
This example differs from example 1 only in the specific components of the curing agent in the protective solution and the proportions of the components of the protective solution, as shown in the following table.
Claims (1)
1. A method for improving ITO target blank strength is characterized in that before ITO slurry is poured into a gypsum mold, firstly, protective liquid is prepared, then the protective liquid is coated on the surface of a cavity of the gypsum mold, then, the ITO slurry is poured, after the ITO slurry is poured, the protective liquid is sprayed on the surface of the exposed ITO slurry in the gypsum mold, and after molding, demolding is carried out, thus obtaining an ITO slurry blank with a cured protective film coated on the surface;
the protective solution is a mixed solution of water-based silicone rubber, a curing agent and water; the proportion of the water-based silicone rubber, the curing agent and the water is 20-40: 0.6-1.5: 100; the curing agent is at least one of vinyl silane, sulfenyl silane, amino silane and amide silane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910125113.7A CN111593304B (en) | 2019-02-20 | 2019-02-20 | Method for improving ITO target blank strength |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910125113.7A CN111593304B (en) | 2019-02-20 | 2019-02-20 | Method for improving ITO target blank strength |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111593304A CN111593304A (en) | 2020-08-28 |
| CN111593304B true CN111593304B (en) | 2022-06-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910125113.7A Active CN111593304B (en) | 2019-02-20 | 2019-02-20 | Method for improving ITO target blank strength |
Country Status (1)
| Country | Link |
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| CN (1) | CN111593304B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013074206A (en) * | 2011-09-28 | 2013-04-22 | Taiheiyo Cement Corp | Vacuum suction apparatus and method of manufacturing the same |
| CN103332929A (en) * | 2013-07-17 | 2013-10-02 | 国家纳米技术与工程研究院 | Forming process of high density large size AZO target material blank body |
| CN107315297A (en) * | 2017-07-05 | 2017-11-03 | 南京工业大学 | A kind of electrochromism cloth preparation method |
| CN108298977A (en) * | 2018-01-10 | 2018-07-20 | 中国船舶重工集团公司第七二五研究所 | A method of improving ITO target blank strength |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6041709B2 (en) * | 2013-03-05 | 2016-12-14 | 東京エレクトロン株式会社 | Method for etching a metal layer |
-
2019
- 2019-02-20 CN CN201910125113.7A patent/CN111593304B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013074206A (en) * | 2011-09-28 | 2013-04-22 | Taiheiyo Cement Corp | Vacuum suction apparatus and method of manufacturing the same |
| CN103332929A (en) * | 2013-07-17 | 2013-10-02 | 国家纳米技术与工程研究院 | Forming process of high density large size AZO target material blank body |
| CN107315297A (en) * | 2017-07-05 | 2017-11-03 | 南京工业大学 | A kind of electrochromism cloth preparation method |
| CN108298977A (en) * | 2018-01-10 | 2018-07-20 | 中国船舶重工集团公司第七二五研究所 | A method of improving ITO target blank strength |
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| CN111593304A (en) | 2020-08-28 |
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