CN111579495A - Photoacoustic spectrum oil gas monitoring unit - Google Patents
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- CN111579495A CN111579495A CN202010478706.4A CN202010478706A CN111579495A CN 111579495 A CN111579495 A CN 111579495A CN 202010478706 A CN202010478706 A CN 202010478706A CN 111579495 A CN111579495 A CN 111579495A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 32
- 238000001834 photoacoustic spectrum Methods 0.000 title description 3
- 238000004867 photoacoustic spectroscopy Methods 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 230000003321 amplification Effects 0.000 claims description 14
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 14
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- 238000001914 filtration Methods 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 238000005496 tempering Methods 0.000 claims 1
- 210000004027 cell Anatomy 0.000 abstract description 12
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000001276 controlling effect Effects 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 210000005056 cell body Anatomy 0.000 abstract description 2
- 238000001228 spectrum Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 10
- 239000000126 substance Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
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- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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Abstract
The invention discloses a photoacoustic spectroscopy oil gas monitoring unit, which comprises: the laser is internally provided with a temperature regulating semiconductor, and the photoacoustic cell body is provided with an air inlet; the acoustic sensor is used for detecting pressure waves generated in the photoacoustic cell and outputting an output signal of the acoustic sensor; the signal processing circuit is used for processing the signal output by the acoustic sensor; the central processing unit is used for analyzing signals, receiving signals and sending instructions, and is externally connected with a power supply circuit; the laser driving circuit is used for controlling the laser to generate laser with a specific wavelength; the laser wavelength emitted by the laser is easy to control, and can be easily changed periodically, so that the finally obtained spectrogram has no deviation, the detection precision is improved, and meanwhile, the signal derived from the acoustic sensor is subjected to multi-stage processing, so that the detection precision is further improved, and the acoustic-optic spectrum oil-gas monitoring unit is sensitive and has higher accuracy.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a photoacoustic spectroscopy oil gas monitoring unit.
Background
The principle of the existing oil gas monitoring unit is that a substance is placed in a closed container, the substance is excited after absorbing light with a specific wavelength, the excited substance returns to an initial state and can pass through radiation transition or non-radiation transition, and heat is generated in the process; if the wavelength of the absorbed light changes periodically, the pressure fluctuation in the container is also periodic; since the frequency of the modulated light is typically in the audible range, this pressure fluctuation becomes an acoustic wave; then, an electric signal obtained by synchronously amplifying the acoustic wave signal sensed by the acoustic sensor is an optical signal, and if the optical signal is recorded as a function of the incident light frequency, an optical-acoustic spectrogram can be obtained; this technique is a technique for obtaining a corresponding spectrogram by using the property of light absorption of a substance, and the obtained spectrogram can be used to confirm the components contained in the substance, and is a method which has high sensitivity and can efficiently detect a sample without any pretreatment.
Especially in the oil gas monitoring unit, adopt the optoacoustic spectroscopy detection technique most extensively, in the current optoacoustic spectroscopy oil gas monitoring unit, generally adopt the laser instrument as the light source, regard as the sound sensing element with the microphone, the wavelength of the light that the laser instrument emitted as the light source among the prior art is unstable inadequately, it is periodic change to be difficult to control the laser that the laser instrument emitted, thereby can make the spectrogram who obtains at last have the deviation, influenced the detection precision, the signal processing effect that its sound sensing element derived is not good simultaneously, also can influence the precision that detects, thereby lead to the oil gas monitoring unit to monitor sensitively inadequately, the degree of accuracy is relatively poor.
Disclosure of Invention
The invention provides a photoacoustic spectroscopy oil-gas monitoring unit, aiming at the technical problems that the laser emitted by a laser is difficult to control to periodically change and the signal processing effect derived by a sound-sensitive element is poor in the photoacoustic spectroscopy oil-gas monitoring unit in the prior art.
The technical scheme for solving the technical problems is as follows: a photoacoustic spectroscopy hydrocarbon monitoring unit comprising:
the photoacoustic cell is hollow, a laser is arranged inside the photoacoustic cell, a temperature adjusting semiconductor is arranged in the laser, and an air inlet is formed in the photoacoustic cell body;
the acoustic sensor is used for detecting pressure waves generated in the photoacoustic cell and outputting an output signal of the acoustic sensor, and the input end of the acoustic sensor is connected with the photoacoustic cell;
the signal processing circuit is used for processing the signal output by the acoustic sensor, and the input end of the signal processing circuit is connected with the output end of the acoustic sensor;
the central processing unit is used for analyzing signals, receiving signals and sending instructions, the input end of the central processing unit is connected with the output end of the signal processing circuit, and the central processing unit is externally connected with a power supply circuit; and
and the laser driving circuit is used for controlling the laser to generate laser with a specific wavelength, the input end of the laser driving circuit is connected with the central processing unit, and the output end of the laser driving circuit is connected with the laser.
Further, the signal processing circuit includes:
the primary amplifying circuit is used for amplifying the analog quantity output by the sound-sensitive element and is connected with the output end of the sound-sensitive element;
the band-pass filter circuit is used for filtering the signal output by the primary amplification circuit, and the input end of the band-pass filter circuit is connected with the output end of the primary amplification circuit;
the second-stage amplifying circuit amplifies the output signal of the A/D conversion circuit and transmits the amplified signal to the A/D conversion circuit, and the input end of the second-stage amplifying circuit is connected with the output end of the first-stage amplifying circuit; and
and the A/D conversion circuit is used for converting the analog quantity input by the secondary amplifying circuit into digital quantity, the input end of the A/D conversion circuit is connected with the output end of the secondary amplifying circuit, and the output end of the A/D conversion circuit is connected with the central processing unit.
Further, the laser driving circuit includes:
the current driving circuit is used for adjusting the current in the laser, the input end of the current driving circuit is connected with the central processing unit, and the output end of the current driving circuit is connected with the laser; and
and the temperature adjusting circuit is used for adjusting the temperature of a temperature adjusting semiconductor in the laser, the input end of the temperature adjusting circuit is connected with the central processing unit, and the output end of the temperature adjusting circuit is connected with the laser.
Further, the power supply circuit includes:
an interface circuit for introducing an external current;
the primary voltage divider is used for primary voltage division to obtain an independent voltage, and the input end of the primary voltage divider is connected with the output end of the interface circuit;
the secondary voltage divider is used for secondary voltage division to obtain an independent voltage, and the input end of the secondary voltage divider is connected with the primary voltage dividing circuit;
furthermore, the current driving circuit comprises a current setting module and a current adjusting module, the current setting module is used for introducing rated current, the input end of the current setting module is connected with the central processing unit, the output end of the current adjusting module is connected with the input end of the current adjusting module, the current adjusting module is used for adjusting the input current of the laser, and the output end of the current adjusting module is connected with the laser.
Further, the temperature adjustment circuit includes:
the voltage control circuit is used for giving an input voltage of the temperature regulating circuit as a reference voltage, and the input end of the voltage control circuit is connected with the central processing unit;
the voltage stabilizing module is used for stabilizing the output voltage of the voltage control circuit, and the input end of the voltage stabilizing module is connected with the output end of the voltage control circuit;
the voltage comparator is used for comparing the internal voltage of the laser with the voltage value of the reference voltage given by the output end of the voltage control circuit; and
and the MCU module is used for analyzing the output signal of the voltage comparator and correspondingly controlling the temperature adjusting semiconductor in the laser, the input end of the MCU module is connected with the output end of the voltage comparator, and the output end of the MCU module is connected with the laser.
Furthermore, the number of the primary voltage dividers and the number of the secondary voltage dividers are respectively provided with a plurality of voltage dividers.
Has the advantages that: the laser is controlled by the laser driving circuit, and because the laser wavelength emitted by the laser is influenced by the temperature and the current, the temperature adjusting semiconductor in the laser is controlled by the laser driving circuit to maintain the temperature adjusting semiconductor at a specific temperature, and then a specific current with periodic variation is given to the laser by the laser driving circuit, so that the laser wavelength of the laser emitter can be periodically changed by accurate control, and the precision of the detection unit is improved; secondly, the invention amplifies and outputs the signal output by the acoustic sensor after primary amplification, filtering and analog-to-digital conversion by the signal processing circuit, thereby obtaining an accurate photoacoustic spectrogram, further improving the precision of the detection unit, and ensuring that the photoacoustic spectrum oil-gas monitoring unit is not only sensitive, but also has higher accuracy.
Drawings
FIG. 1 is a schematic block diagram of an integrated photoacoustic spectroscopy oil and gas monitoring unit according to the present invention;
FIG. 2 is a block schematic diagram of a signal processing circuit of a photoacoustic spectroscopy oil and gas monitoring unit according to the present invention;
FIG. 3 is a schematic block diagram of a laser driving circuit of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 4 is a schematic diagram of a temperature regulating circuit module of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 5 is a schematic diagram of a current driving circuit module of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 6 is a schematic circuit diagram of a signal processing circuit of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 7 is a schematic circuit diagram of a laser driving circuit of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 8 is a schematic circuit diagram of a temperature regulating circuit of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
FIG. 9 is a schematic circuit diagram of a power circuit of a photoacoustic spectroscopy oil and gas monitoring unit according to the present invention;
FIG. 10 is a schematic circuit diagram of a current driving circuit of a photoacoustic spectroscopy oil-gas monitoring unit according to the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1. a photoacoustic cell; 2. a laser; 3. an air inlet; 4. a sound sensitive element; 5. a signal processing circuit; 6. a central processing unit; 7. a laser driving circuit; 8. a first-stage amplifying circuit; 9. a band-pass filter circuit; 10. an A/D conversion circuit; 11. a secondary amplifying circuit; 12. a current drive circuit; 13. a temperature adjusting circuit; 14. a power supply circuit; 15. an interface circuit; 16. a primary voltage divider; 17. a secondary voltage divider; 18. a current setting module; 19. a current regulation module; 20. a voltage control circuit; 21. a voltage stabilization module; 22. a voltage comparator; 23. and the MCU module.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
A photoacoustic spectroscopy hydrocarbon monitoring unit as shown in fig. 1, comprising:
the photoacoustic cell 1 is hollow, a closed space is provided during photoacoustic spectroscopy oil-gas monitoring, a laser 2 is arranged in the photoacoustic cell 1 and used for emitting laser with a specific wavelength, a temperature adjusting semiconductor is arranged in the laser 2, the temperature of the laser 2 is kept unchanged by setting the temperature of the temperature adjusting semiconductor, so that the wavelength of the laser emitted by the laser 2 can be changed along with the change of current, the wavelength of the laser emitted by the laser 2 can be controlled only by controlling the current of the laser 2, and an air inlet 3 is formed in the body of the photoacoustic cell 1 and used for introducing oil-gas substances to be detected;
the input end of the acoustic sensing element 4 is connected with the photoacoustic cell, and the acoustic sensing element 4 is used for detecting pressure waves generated in the photoacoustic cell 1, converting the received pressure waves in the photoacoustic cell 1 into analog quantity and outputting the analog quantity;
the input end of the signal processing circuit 5 is connected with the output end of the acoustic sensor 4 and is used for processing the received output signal of the acoustic sensor 4, carrying out primary amplification and filtering on the output signal, carrying out analog-to-digital conversion on the output signal into a digital signal and finally outputting the digital signal;
the central processing unit 6 is used for analyzing signals, receiving signals and sending instructions, the input end of the central processing unit 6 is connected with the output end of the signal processing circuit 5 and used for receiving the output signals of the signal processing circuit 5, the obtained analog quantity is analyzed and displayed in a spectrum mode, and the central processing unit 6 is externally connected with a power supply circuit 14; and
As shown in fig. 2 or fig. 6, the signal processing circuit 5 includes:
the primary amplifying circuit 8, the primary amplifying circuit 8 is connected with the output end of the acoustic sensor 4 and is used for amplifying the analog quantity output by the acoustic sensor 4, and the analog quantity obtained by the acoustic sensor 4 is weak, so that the signal can be further processed conveniently after amplification;
the input end of the band-pass filter circuit 9 is connected with the output end of the primary amplifying circuit 8, and the band-pass filter circuit 9 is used for filtering signals output by the primary amplifying circuit 8 and aims to filter useless high-frequency and low-frequency signals and extract useful intermediate-frequency signals;
the input end of the second-stage amplifying circuit 11 is connected with the output end of the band-pass filter circuit 9, and the output signal of the band-pass filter circuit 9 is amplified and transmitted to the A/D conversion circuit 10, which is equivalent to a quadratic large signal, so that the purpose is to enable the signal obtained by the A/D conversion circuit 10 to be more accurate and more convenient to convert; and
the A/D conversion circuit 10, the input end of the A/D conversion circuit 10 is connected with the output end of the second-stage amplifying circuit 11, and is used for converting the analog quantity output by the second-stage amplifying circuit 11 into digital quantity, namely a process of changing discrete quantity into continuous quantity, and transmitting the obtained digital quantity to the central processing unit.
As shown in fig. 3 or fig. 7, the laser driving circuit includes two parts, which are a current driving circuit 12 part and a temperature adjusting circuit 13 part, respectively, and the two parts are defined in terms of work, the current driving circuit 12 is used for adjusting the current inside the laser 2, the input end of the current driving circuit 12 is connected to the central processing unit 6, the output end is connected to the laser 2, the temperature adjusting circuit 13 is used for adjusting the temperature of the temperature adjusting semiconductor inside the laser 2, the input end is connected to the central processing unit 6, and the output end is connected to the laser 2.
As shown in fig. 9, the power supply circuit 14 includes:
an interface circuit 15 for introducing an external current;
the primary voltage divider 16 is used for primary voltage division to obtain an independent voltage, and the input end of the primary voltage divider 16 is connected with the output end of the interface circuit 15;
the secondary voltage divider 17 is used for secondary voltage division to obtain an independent voltage, and the input end of the secondary voltage divider 17 is connected with the primary voltage divider 16;
the primary voltage divider 16 can be directly connected with an external load, or connected with a load after being connected with the secondary voltage divider 17 in series, so that a plurality of power supplies with different voltages can be obtained for multiple uses, and meanwhile, the multiple power supplies are converted into a whole.
As shown in fig. 5 or fig. 10, the current driving circuit 12 includes a current setting module 18 and a current adjusting module 19, the current setting module 18 is used for introducing a rated current, an input terminal of the current setting module 18 is connected to the cpu 6, that is, power is supplied through the cpu 6, an output terminal of the current adjusting module 19 is connected to an input terminal of the current adjusting module 19, the current adjusting module 19 is used for adjusting the input current of the laser 2, and an output terminal of the current adjusting module 19 is connected to the laser.
The temperature adjusting circuit 13 shown in fig. 4 or 8 includes: the temperature control circuit comprises a voltage control circuit 20, a voltage stabilizing module 21, a voltage comparator 22 and an MCU module 23, wherein the voltage control circuit 20 is used for giving the input voltage of one temperature adjusting circuit 13 as a reference voltage, and the input end of the voltage control circuit 20 is connected with the central processing unit 6; the voltage stabilizing module 21 is used for stabilizing the output voltage of the voltage control circuit 20, and the input end of the voltage stabilizing module 21 is connected with the output end of the voltage control circuit 20; the voltage comparator 22 is used for comparing the internal voltage of the laser 2 with the voltage value of the reference voltage given by the output end of the voltage control circuit 20; the MCU module 23 is used for analyzing the output signal of the voltage comparator 22 and correspondingly controlling the temperature adjusting semiconductor in the laser 2, the input end of the MCU module 23 is connected with the output end of the voltage comparator 22, and the output end of the MCU module is connected with the laser.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (7)
1. A photoacoustic spectroscopy oil and gas monitoring unit, comprising:
the photoacoustic cell (1) is hollow, a laser (2) is arranged in the photoacoustic cell (1), a temperature adjusting semiconductor is arranged in the laser (2), and an air inlet (3) is formed in the body of the photoacoustic cell (1);
the acoustic sensing element (4) is used for detecting pressure waves generated in the photoacoustic cell and outputting an output signal of the acoustic sensing element (4), and the input end of the acoustic sensing element (4) is connected with the photoacoustic cell;
the signal processing circuit (5) is used for processing the signal output by the acoustic sensor (4), and the input end of the signal processing circuit (5) is connected with the output end of the acoustic sensor (4);
the central processing unit (6) is used for analyzing signals, receiving signals and sending instructions, the input end of the central processing unit (6) is connected with the output end of the signal processing circuit (5), and the central processing unit (6) is externally connected with a power supply circuit (14); and
the laser driving circuit (7) is used for controlling the laser (2) to generate laser with a specific wavelength, the input end of the laser driving circuit (7) is connected with the central processing unit (6), and the output end of the laser driving circuit is connected with the laser (2).
2. A photoacoustic spectroscopic oil and gas monitoring unit as set forth in claim 1, characterized in that said signal processing circuit (5) comprises:
the primary amplification circuit (8) is used for amplifying the analog quantity output by the sound-sensitive element (4), and the primary amplification circuit (8) is connected with the output end of the sound-sensitive element (4);
the band-pass filter circuit (9) is used for filtering the signal output by the primary amplification circuit (8), and the input end of the band-pass filter circuit (9) is connected with the output end of the primary amplification circuit (8);
the second-stage amplification circuit (11) is used for amplifying and transmitting the output signal of the A/D conversion circuit (10) to the A/D conversion circuit (6), and the input end of the second-stage amplification circuit (11) is connected with the output end of the first-stage amplification circuit (8); and
the A/D conversion circuit (10) is used for converting analog quantity input by the secondary amplification circuit (11) into digital quantity, the input end of the A/D conversion circuit (10) is connected with the output end of the secondary amplification circuit (11), and the output end of the A/D conversion circuit is connected with the central processing unit (6).
3. The photoacoustic spectroscopy hydrocarbon monitoring unit of claim 1, wherein the laser driver circuit comprises:
the current driving circuit (12) is used for adjusting the current inside the laser (2), the input end of the current driving circuit (12) is connected with the central processing unit (6), and the output end of the current driving circuit is connected with the laser (2); and
and the temperature adjusting circuit (13) is used for adjusting the temperature of the temperature adjusting semiconductor in the laser (2), the input end of the temperature adjusting circuit is connected with the central processing unit (6), and the output end of the temperature adjusting circuit is connected with the laser (2).
4. A photoacoustic spectroscopy oil and gas monitoring unit according to claim 1, wherein said power supply circuit (14) comprises:
an interface circuit (15) for introducing an external current;
the primary voltage divider (16) is used for primary voltage division to obtain an independent voltage, and the input end of the primary voltage divider (16) is connected with the output end of the interface circuit (15);
and the secondary voltage divider (17) is used for secondary voltage division to obtain an independent voltage, and the input end of the secondary voltage divider (17) is connected with the primary voltage divider (16).
5. A photoacoustic spectroscopy oil-gas monitoring unit according to claim 3, wherein the current driving circuit (12) comprises a current setting module (18) and a current adjusting module (19), the current setting module (18) is used for introducing rated current, the input end of the current setting module is connected with the central processing unit (6), the output end of the current adjusting module (19) is connected with the input end of the current adjusting module (19), the current adjusting module (19) is used for adjusting the input current of the laser (2), and the output end of the current adjusting module (19) is connected with the laser.
6. A photoacoustic spectroscopic oil and gas monitoring unit as set forth in claim 3, characterized in that the tempering circuit (13) comprises:
a voltage control circuit (20) for giving an input voltage of one of the temperature adjusting circuits (13) as a reference voltage, an input terminal of the voltage control circuit (20) being connected to the central processing unit (6);
the voltage stabilizing module (21) is used for stabilizing the output voltage of the voltage control circuit (20), and the input end of the voltage stabilizing module (21) is connected with the output end of the voltage control circuit (20);
a voltage comparator (22) for comparing the voltage inside the laser (2) with a voltage value of a reference voltage given at the output of the voltage control circuit (20); and
the MCU module (23) is used for analyzing the output signal of the voltage comparator (22) and correspondingly controlling the temperature adjusting semiconductor in the laser (2), the input end of the MCU module (23) is connected with the output end of the voltage comparator (22), and the output end of the MCU module is connected with the laser.
7. A photoacoustic spectroscopy oil-gas monitoring unit according to claim 4, wherein there are a plurality of the primary voltage dividers (16) and the secondary voltage dividers (17).
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CN112213270A (en) * | 2020-09-29 | 2021-01-12 | 湖北鑫英泰系统技术股份有限公司 | Stirring speed control method and device based on viscosity |
CN112263849A (en) * | 2020-09-29 | 2021-01-26 | 湖北鑫英泰系统技术股份有限公司 | Stirring speed control method and device based on environmental pressure |
CN112504971A (en) * | 2021-02-08 | 2021-03-16 | 湖北鑫英泰系统技术股份有限公司 | Photoacoustic spectrum identification method and device for characteristic gas in transformer oil |
CN112504971B (en) * | 2021-02-08 | 2021-04-20 | 湖北鑫英泰系统技术股份有限公司 | Photoacoustic spectrum identification method and device for characteristic gas in transformer oil |
CN113588567A (en) * | 2021-08-31 | 2021-11-02 | 西京学院 | Laser trace vacuum pipeline gas detection device and method based on photoacoustic spectroscopy |
CN113588567B (en) * | 2021-08-31 | 2024-05-14 | 西京学院 | Photoacoustic spectrum-based laser trace vacuum pipeline gas detection device and method |
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