CN111563311B - Arbitrary shape grating simulation system based on ZEMAX - Google Patents
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Abstract
The invention discloses a ZEMAX-based arbitrary-shape grating simulation system, which comprises a Dynamic Link Library (DLL) interface, a calculation module, an acceleration method, a database module, a search module and an interpolation module, wherein the dynamic link library interface is used for embedding an algorithm into optical simulation software ZEMAX so that ZMEAX can call a self-defined grating model; the theoretical model adopts three-dimensional Rigorous Coupled Wave Analysis (RCWA) for calculating diffraction characteristics of any-shape grating under given parameters; the acceleration method adopts the GPU acceleration principle, and uses the strong parallel operation capability of the GPU to realize the rapid operation of the RCWA so as to achieve the purpose of preliminary acceleration optimization algorithm; the database module consists of a plurality of records, each record is marked by a diffraction parameter set, and diffraction characteristics under given parameters are recorded; the searching module adopts a hash table method and is used for quickly searching records corresponding to given parameters, so that further acceleration of a simulation algorithm is realized; the interpolation module is used for calculating diffraction characteristics of non-recording parameters. The model can rapidly calculate the diffraction characteristic of the grating under given parameters and can be applied to ZEMAX to realize ray tracing imaging simulation.
Description
Technical Field
The invention relates to a ZEMAX-based arbitrary-shape grating simulation system.
Background
The near-to-eye display technology, particularly the holographic waveguide display technology, has made great progress and has gained wide attention both at home and abroad. In order to achieve a high-performance slim design, a Diffraction Optical Element (DOE) typified by a grating has been widely adopted and studied as a coupling element of a waveguide near-eye display.
At present, research institutions at home and abroad simulate diffraction characteristics of gratings with any shapes by adopting a COMSOL Multiphysics finite element method, and the method can realize high-precision numerical simulation, but COMSOL has no geometric imaging optimization system of the system and is not suitable for design and optimization of an imaging system. Common optical simulation software such as ZEMAX, tracePro can realize the design, analysis, optimization and other auxiliary functions of the optical imaging system, but only supports simple surface grating simulation and lacks a simulation model of any shape grating. Compared with COMSOL, the design optimization of the holographic waveguide display of the grating with any shape can be realized by the powerful ray tracing algorithm and the optical design optimization function of ZEMAX as long as a simulation model of the grating is built in ZEMAX. Therefore, the ZEMAX-based arbitrary shape grating simulation system is particularly important.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a ZEMAX-based arbitrary-shape grating simulation system which can perform imaging simulation and optimization functions of an arbitrary-shape grating in combination with a ZEMAX ray trace simulation algorithm, optimize an RCWA algorithm, reduce calculation time, improve simulation efficiency and enable the grating to be applied to simulation optimization design of holographic waveguide display.
In order to achieve the above purpose, the invention adopts the following technical scheme: the simulation system comprises a search module, a database module, an interpolation module, a calculation module, a GPU acceleration method and a dynamic link library interface; the searching module adopts a hash table searching method or a MySQL searching engine and is used for quickly searching records corresponding to given parameters in a database, so that the simulation efficiency is improved; the database module is built in a local database file or a MySQL database and consists of a plurality of records, each record is marked by a diffraction parameter set, and the diffraction characteristics under given parameters are recorded; the interpolation module is used for calculating diffraction characteristics when the non-recording parameters meet interpolation conditions; the calculation module adopts a three-dimensional RCWA theoretical model and is used for calculating diffraction characteristics under the condition that parameters are not recorded and interpolation conditions are not met; according to the GPU acceleration method, the acceleration of RCWA matrix calculation is realized by utilizing the powerful parallel processing capability of the GPU, and the simulation efficiency is further improved; the dynamic link library interface defines a data communication interface between the model and ZEMAX, the model is embedded into the ZEMAX, and simulation of the grating with any shape is realized by using a mature ray tracing algorithm of the ZEMAX. The system flow chart is shown in fig. 3, after grating parameters are input into the system, the records in the database module are queried through the searching module, if the corresponding records exist in the database or interpolation conditions are met, the records in the database module are directly called as the diffraction parameters after output or the interpolation module is called to calculate diffraction characteristics by adopting an interpolation method, and a result is output; if the input parameters do not have corresponding records in the database and do not meet the interpolation condition, a calculation module is called to calculate the diffraction characteristics of the grating by adopting an RCWA algorithm and output the result, and the algorithm is optimized by adopting an acceleration method in the process so as to improve the calculation speed. The modules in the flow are integrated and compiled into a dynamic link library file, and ZEMAX optical simulation software can call the dynamic link library, so that the simulation function of the grating with any shape is realized.
As an improvement of the invention, the searching module adopts a hash table searching technology or a MySQL searching engine, and the hash table searching establishes a definite corresponding relation H between the searching key and the storage position, so that each key of the key corresponds to the unique storage position H (key), the time complexity is O (1), and the rapid searching of a large amount of data is realized.
As an improvement of the invention, the database module is composed of a plurality of records, each record is marked by a diffraction parameter set, diffraction characteristics under given parameters are recorded, the database records are ordered according to the parameter sets, the aim is to optimize a search algorithm, reduce search time, and the database can be stored in a local library file or create a MySQL data table which has more flexible operation space. The method can reuse a large number of similar diffraction parameter situations, avoid a large number of repeated calculations and improve simulation efficiency. The searching module corresponds to the database module, the data records can be stored by using a local library file, the records are ordered according to the diffraction parameter set, the diffraction parameter set is sampled and valued according to fixed steps, a certain corresponding relation can be established between the searching key code and the storage position in the way of arrangement and valued, the storage position in the database can be obtained immediately according to the parameter set, the searching is not needed to be compared one by one, the searching time complexity is O (1), and the searching time is irrelevant to the scale of the database.
As an improvement of the present invention, the interpolation module is used for processing the non-recording parameter set, and can be called when the searching recording operation fails, and the module checks whether the diffraction parameter set meets the interpolation condition or not to determine whether to use the interpolation method to calculate the diffraction characteristic or use the calculation module to calculate the diffraction characteristic. If the interpolation conditions are met, searching a plurality of closely matched records for interpolation calculation, wherein the number of the records used for interpolation is required to meet the accuracy requirement of the approximate value. One or more closely matching records (i.e., records that meet their interpolation conditions) may be used to calculate the diffraction field and then the calculated field is interpolated to give the diffraction field of the target solution, e.g., using linear interpolation. If the value condition is not met, a calculation module is called to calculate diffraction characteristics
As an improvement of the invention, the calculation module adopts a three-dimensional RCWA theoretical model, the model belongs to a vector diffraction theory, the diffraction characteristics of incident light with different polarization characteristics are considered, iterative approximation is not needed, the propagation distribution of electromagnetic waves is directly solved strictly according to Maxwell equation sets and boundary condition limitations, and the accuracy of the result is limited only by the expansion series of the characteristic function.
The calculation module adopts a three-dimensional RCWA theoretical model. The research algorithm of the RCWA theory on rectangular gratings is very mature, the result can be obtained at a higher convergence rate, for any-shape gratings, as shown in figure 2, the gratings can be divided into a plurality of layers, each layer is processed according to a matrix grating, and then the diffraction characteristics of the multilayer gratings are obtained through calculation by a transmission matrix method. The RCWA solution is divided into three steps: firstly dividing a grating into thin layers with equal thickness, performing Fourier series expansion on electromagnetic waves in each thin layer, and deducing an expression of an electromagnetic field of an incident medium layer and a basal layer by combining a Maxwell equation set; then, expanding the dielectric constant of the grating layer by utilizing a Fourier series, deducing a coupled wave partial differential equation set by utilizing the dielectric constant series and the electromagnetic field series, and converting the problem of the partial differential equation into a solution problem of the pattern field of the model; thirdly, solving the amplitude coefficient and the propagation coefficient of each layer of intrinsic mode field by using a mathematical method at the boundaries of different areas by using periodic boundary conditions, so as to solve the expressions of an electric field and a magnetic field, and further solve the diffraction efficiency.
As an improvement of the invention, the three-dimensional RCWA theoretical model can be realized as simulation calculation of diffraction gratings with arbitrary shapes through layering treatment.
As an improvement of the invention, the algorithm is optimized by the computing module by adopting a GPU acceleration method, the parallel general computation is realized by utilizing the CUDA parallel computing architecture to the GPU, the complex operation of a large-scale matrix is realized, and the acceleration optimization of the RCWA computing module is improved. The general calculation is completed by utilizing the heterogeneous mode of the GPU and the CPU for cooperative processing, is suitable for operation and calculation of a large matrix, and remarkably improves the operation speed, such as matrix multiplication. For gratings with complex shapes, particularly two-dimensional gratings, the Fourier expansion series is more, the convergence speed is low, and the simulation efficiency is improved by using a GPU acceleration method.
As an improvement of the invention, the dynamic link library interface comprises an input/output interface of a grating simulation model with any shape, ZEMAX supports a self-defined dynamic link library, the grating simulation model with any shape is written into the dynamic link library, and the light ray trace simulation of the grating with any shape can be realized in ZEMAX by leading in the ZEMAX through the self-defined diffraction model function of the ZEMAX.
The dynamic link library interface takes a self-defined DLL provided by ZEMAX as a template, writes the arbitrary-shape grating diffraction algorithm into a C++ program and generates a 64-bit DLL file, and the DLL is selected from diffraction labels of non-sequence mode objects in ZEMAX to realize VHG ray trace simulation.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
the ZEMAX-based arbitrary-shape grating simulation system provided by the invention can realize ray trace imaging simulation of an arbitrary-shape grating in optical simulation software ZEMAX, can more accurately calculate polarization diffraction characteristics of the arbitrary-shape grating by using a grating diffraction model based on a strictly coupled wave, optimizes an algorithm, establishes a database system to store diffraction parameter sets and diffraction characteristic values, avoids repeated calculation under the same diffraction condition, carries out GPU optimization acceleration on an RCWA algorithm, reduces simulation time consumption and improves simulation efficiency.
Drawings
FIG. 1 is a diagram of a database structure according to the present invention.
Fig. 2 is a schematic diagram of an arbitrary shaped grating layering.
FIG. 3 is a flow chart of a simulation system.
Fig. 4 is a schematic diagram of a rectangular grating structure.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and examples.
Example 1: referring to fig. 1-3, a ZEMAX-based arbitrary shape grating simulation system includes a lookup module, a database module, an interpolation module, a calculation module, an acceleration method, and a dynamic link library interface, wherein:
the searching module and the database module form a data query system, a diffraction parameter set possibly used for simulation calculation and corresponding diffraction characteristics form a key value searching pair, the key value searching pair is stored in the database module, and the searching module is called in the simulation process to query the diffraction characteristics corresponding to the actual simulation parameters. The method can reuse a large number of similar diffraction parameter situations, avoid a large number of repeated calculations and improve simulation efficiency. The searching module corresponds to the database module, the data records can be stored by using a local library file, the records are ordered according to the diffraction parameter set, the diffraction parameter set is sampled and valued according to fixed steps, as shown in fig. 1, the arrangement and the valued mode can establish a definite corresponding relation between the searching key code and the storage position, the storage position in the database can be obtained immediately according to the parameter set, the searching is not needed to be compared one by one, the searching time complexity is O (1), and the searching time is irrelevant to the scale of the database.
The interpolation module is used for processing the non-recording parameter set condition. When the searching record operation fails, the module can be called, and the module firstly checks whether the diffraction parameter set meets the interpolation condition, if the diffraction parameter set meets the interpolation condition, a plurality of closely matched records are searched for interpolation calculation, and the number of the records used for interpolation needs to meet the accuracy requirement of the approximate value. One or more closely matching records (i.e., records that meet their interpolation conditions) may be used to calculate the diffraction field and then the calculated field is interpolated to give the diffraction field of the target solution, e.g., using linear interpolation. And if the value condition is not met, calling a calculation module to calculate the diffraction characteristic.
The calculation module adopts a three-dimensional RCWA theoretical model. The research algorithm of the RCWA theory on rectangular gratings is very mature, the result can be obtained at a higher convergence rate, for any-shape gratings, as shown in figure 2, the gratings can be divided into a plurality of layers, each layer is processed according to a matrix grating, and then the diffraction characteristics of the multilayer gratings are obtained through calculation by a transmission matrix method. The RCWA solution is divided into three steps: firstly dividing a grating into thin layers with equal thickness, performing Fourier series expansion on electromagnetic waves in each thin layer, and deducing an expression of an electromagnetic field of an incident medium layer and a basal layer by combining a Maxwell equation set; then, expanding the dielectric constant of the grating layer by utilizing a Fourier series, deducing a coupled wave partial differential equation set by utilizing the dielectric constant series and the electromagnetic field series, and converting the problem of the partial differential equation into a solution problem of the pattern field of the model; thirdly, solving the amplitude coefficient and the propagation coefficient of each layer of intrinsic mode field by using a mathematical method at the boundaries of different areas by using periodic boundary conditions, so as to solve the expressions of an electric field and a magnetic field, and further solve the diffraction efficiency.
The acceleration method adopts the GPU acceleration principle, utilizes the heterogeneous mode of the cooperative processing of the GPU and the CPU to complete the general calculation through the CUDA calculation architecture, is suitable for the operation and the operation of a large matrix, and remarkably improves the operation speed, such as matrix multiplication. For gratings with complex shapes, particularly two-dimensional gratings, the Fourier expansion series is more, the convergence speed is low, and the simulation efficiency is improved by using a GPU acceleration method.
The dynamic link library interface takes a self-defined DLL provided by ZEMAX as a template, writes the arbitrary-shape grating diffraction algorithm into a C++ program and generates a 64-bit DLL file, and the DLL is selected from diffraction labels of non-sequence mode objects in ZEMAX to realize VHG ray trace simulation.
Application examples: the present invention will be described in detail below with reference to the accompanying drawings by taking a rectangular grating as an example.
The ZEMAX-based random-shape grating simulation system comprises a searching module, a database module, an interpolation module, a calculation module, an acceleration method and a dynamic link library interface. As shown in fig. 3, which is a structural diagram of the system, ZEMAX performs data transmission with an arbitrary-shape grating simulation model by calling a DLL, processes a diffraction parameter set as input data in a search module, and selects a specific parameter in the data as a search key. If the search is successful, extracting a corresponding diffraction characteristic result from the database as output; if the searching fails, searching a plurality of closely matched records in a database for interpolation calculation if the diffraction parameter set accords with the interpolation condition, wherein the number of the records used for interpolation is required to meet the accuracy requirement of an approximate value, and the interpolation result is output most; if the searching fails and the diffraction parameter set does not accord with the interpolation condition, a calculation module is called to calculate a diffraction special result by using an RCWA diffraction model, the purpose of less time consumption of an optimization algorithm is achieved by using GPU (graphic processing unit) acceleration matrix calculation in the calculation process, and a final diffraction characteristic result is returned to ZEMAX through a DLL (delay locked loop) to realize ray tracing imaging simulation.
As shown in fig. 4, the angle between the incident light and the z-axis is θ, the angle between the incident plane and the x-axis is Φ, the angle between the vibration direction of the electric field and the normal line of the grating interface is ψ, the grating thickness is d, the period is Λ, the peak duty ratio is f, and the dielectric constant of the grating is developed according to the fourier series:
wherein ε is h Is the h-level Fourier expansion coefficient of relative dielectric constant, and for matrix grating, the refractive index of peak is set as n rd The refractive index of the trough is n gr The following steps are:
let incident light be TE polarizedThe incident light can be expressed as:
E inc,y ＝exp[-jk 0 n 1 (sinθx+cosθz)] (3)
wherein the method comprises the steps ofλ 0 Is the wavelength of light in vacuum. Zone I (0)<z) and zone II (z)>d) The electric field expression of (2) is:
wherein R is i And T i The amplitudes, k, of the i-th reflected wave and the transmitted wave, respectively xi Determined by the Floquet condition:
in the region 0< z < d, the electric and magnetic fields are spread out as fourier series:
wherein E is 0 Is vacuum dielectric constant, S yi (z) and U xi (z) is the amplitude of the i-th harmonic electric and magnetic fields.
Meanwhile, the electric field and the magnetic field need to satisfy a Maxwell equation set:
substituting the formulas (8) and (9) into the formulas (10) and (11) to obtain a coupled wave equation matrix:
wherein z is ′ ＝k 0 z,
A＝K x 2 -E (13)
The element E (i, p) in E is ε defined in formula (1) (i-p) ；K x Is a diagonal matrix and K (i, i) =k xi /k 0 . A is an n×n matrix, n being the fourier expansion series.
The solution of equation (12) is:
wherein w is i,m Is an element of the eigenvector matrix W of matrix A, q m Is the positive root of the eigenvalue of matrix a; v i,m Is an element of matrix v=wq, Q is a diagonal matrix and Q (i, i) =q m 。
c m + And c m - Is an unknown, and the two unknowns are solved by boundary conditions.
At z=0, there are:
the matrix form is:
at z=d, there are:
the matrix form is:
wherein δ when i=0 i0 =1, δ when i+.0 i0 ＝0。X,Y I ,Y II Are diagonal matrices, and the corresponding elements are exp (-k) respectively 0 q m d),k I,zi /k 0 ,k II,zi /k 0 。
Solving equations (18) and (21) to obtain R i And T i The diffraction efficiency is calculated from the following formula:
similarly, the two sets of boundary condition equations for the TM mode are:
for any shape of grating, dividing the grating into a plurality of layers, processing each layer according to a rectangular grating, substituting boundary conditions of each layer, and finally simplifying to obtain R and T.
The database stores the diffraction parameter set records calculated by the above models and the corresponding diffraction characteristic results in ascending order. When a group of diffraction parametersWhen the data set is input into the system, the searching module firstly judges the corresponding position recorded in the database according to the value of the data set. For example, the diffraction parameter set has three elements q 1 ,q 2 ,q 3 Wherein q is 1 The first element in the database is q 11 The last element is q 1m Record step s 1 ,q 2 The first element in the database is q 21 The last element is q 2n Record step s 2 ,q 3 The first element in the database is q 31 The last element is q 3k Record step s 3 For a given parameter Q1, Q2, Q3, its storage location P in the database is:
if the record corresponding to the diffraction parameter set does not exist in the database, a plurality of adjacent records are found out according to the interval range of the given parameter to perform interpolation operation. And if the diffraction parameter set is not in the interval range of the database, calling the RCWA module to calculate the diffraction characteristic. The method can remarkably improve the simulation efficiency.
The foregoing is only a preferred embodiment of the invention, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.
Claims (8)
1. The ZEMAX-based random-shape grating simulation system is characterized by comprising a search module, a database module, an interpolation module, a calculation module, a GPU acceleration method and a dynamic link library interface; the searching module adopts a hash table searching method or a MySQL searching engine and is used for quickly searching records corresponding to given parameters in a database, so that the simulation efficiency is improved; the database module is built in a local database file or a MySQL database and consists of a plurality of records, each record is marked by a diffraction parameter set, and the diffraction characteristics under given parameters are recorded; the interpolation module is used for calculating diffraction characteristics when the non-recording parameters meet interpolation conditions; the calculation module adopts a three-dimensional RCWA theoretical model and is used for calculating diffraction characteristics under the condition that parameters are not recorded and interpolation conditions are not met; according to the GPU acceleration method, the acceleration of RCWA matrix calculation is realized by utilizing the powerful parallel processing capability of the GPU, and the simulation efficiency is further improved; the dynamic link library interface defines a data communication interface between the model and ZEMAX, the model is embedded into the ZEMAX, and simulation of any-shape grating is realized by using a mature ray tracing algorithm of the ZEMAX; ZEMAX performs data transmission with the grating simulation model with any shape by calling DLL, takes the diffraction parameter set as input data to be processed in a searching module, selects specific parameters in the data as searching key codes, and extracts corresponding diffraction characteristic results from a database as output if searching is successful; if the searching fails and the diffraction parameter set accords with the interpolation condition, searching a plurality of closely matched records in the database for interpolation calculation, wherein the number of the records used for interpolation is required to meet the accuracy requirement of the approximate value, and the interpolation result is output most; if the searching fails and the diffraction parameter set does not accord with the interpolation condition, a calculation module is called to calculate a diffraction special result by using an RCWA diffraction model, the purpose of less time consumption of an optimization algorithm is achieved by using GPU (graphic processing unit) acceleration matrix calculation in the calculation process, and a final diffraction characteristic result is returned to ZEMAX through a DLL (delay locked loop) to realize ray tracing imaging simulation.
2. The ZEMAX-based arbitrary shape grating simulation system of claim 1, wherein: the searching module adopts a hash table searching technology or a MySQL search engine, and the hash table searching establishes a determined corresponding relation H between the searching key codes and the storage positions, so that each key code corresponds to a unique storage position H (key), the time complexity is O (1), and the rapid searching of a large amount of data is realized.
3. The ZEMAX-based arbitrary shape grating simulation system of claim 1, wherein: the database module consists of a plurality of records, each record is marked by a diffraction parameter set, the diffraction characteristics under given parameters are recorded, the database records are ordered according to the parameter sets, the purpose is to optimize a search algorithm, the search time is reduced, the database can be stored in a local library file, or a MySQL data table is created, and the MySQL data table has more flexible operation space.
4. The ZEMAX-based arbitrary shape grating simulation system of claim 1, wherein: the interpolation module is used for processing the non-recording parameter set condition, and can be called when the searching recording operation fails, and the module checks whether the diffraction parameter set meets the interpolation condition or not so as to determine whether the diffraction characteristic is obtained by using an interpolation method or calculate the diffraction characteristic by using a calculation module.
5. The ZEMAX-based arbitrary shape grating simulation system of claim 1, wherein: the calculation module adopts a three-dimensional RCWA theoretical model, the model belongs to a vector diffraction theory, diffraction characteristics of incident light with different polarization characteristics are considered, iterative approximation is not needed, propagation distribution of electromagnetic waves is directly solved strictly according to Maxwell equation sets and boundary condition limitations, and accuracy of results is limited only by expansion series of characteristic functions.
6. The ZEMAX-based arbitrary shape grating simulation system of claim 5, wherein: the three-dimensional RCWA theoretical model can be realized into simulation calculation of diffraction gratings with arbitrary shapes through layering treatment.
7. The ZEMAX-based arbitrary shape grating simulation system of claim 5, wherein: the algorithm is optimized by the computing module through a GPU acceleration method, the CUDA parallel computing architecture is utilized to enable the GPU to realize parallel general computing, complex operation of a large-scale matrix is realized, and acceleration optimization of the RCWA computing module is improved.
8. The ZEMAX-based arbitrary shape grating simulation system of claim 1, wherein: the dynamic link library interface comprises an input/output interface of a grating simulation model with any shape, ZEMAX supports a self-defined dynamic link library, the grating simulation model with any shape is written into the dynamic link library, and the dynamic link library is imported into ZEMAX through a self-defined diffraction model function of the ZEMAX, so that ray tracing simulation of the grating with any shape can be realized in the ZEMAX.
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| CN108917605A (en) * | 2018-07-13 | 2018-11-30 | 北京工业大学 | Laser traces system ZEMAX emulation mode based on double-wavelength method make-up air refractive index |
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|---|
| 朱丽娟 ; .利用ZEMAX辅助光栅衍射实验的教学研究.福建电脑.2012,(11),全文. * |
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