CN111554637A - Flexible substrate, preparation method thereof, flexible display panel and display device - Google Patents
Flexible substrate, preparation method thereof, flexible display panel and display device Download PDFInfo
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- CN111554637A CN111554637A CN202010406086.3A CN202010406086A CN111554637A CN 111554637 A CN111554637 A CN 111554637A CN 202010406086 A CN202010406086 A CN 202010406086A CN 111554637 A CN111554637 A CN 111554637A
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- 239000000758 substrate Substances 0.000 title claims abstract description 185
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 238000005452 bending Methods 0.000 claims abstract description 38
- 229920002120 photoresistant polymer Polymers 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000004380 ashing Methods 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 48
- 235000012239 silicon dioxide Nutrition 0.000 description 24
- 239000000377 silicon dioxide Substances 0.000 description 24
- 239000011521 glass Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- 239000004341 Octafluorocyclobutane Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Theoretical Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention relates to the technical field of display, and provides a flexible substrate, a preparation method of the flexible substrate, a flexible display panel and a display device. The flexible substrate comprises a flat area and at least one bending area, and the preparation method comprises the following steps: providing a substrate base plate; forming a plurality of bar-shaped protrusions on a substrate base plate; forming a flexible substrate in an exposed area of one surface of the strip-shaped bulges, which is far away from the substrate base plate, and one surface of the substrate base plate, which is provided with the strip-shaped bulges; the flexible substrate, the substrate base plate and the strip-shaped bulges are peeled off, so that a plurality of strip-shaped grooves are formed on one surface, which is attached to the substrate base plate, of the flexible base plate, the strip-shaped grooves are located in a bending area, and the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible base plate. The flexible display structure can provide a relatively flat substrate for forming a flexible display structure on a flexible substrate subsequently, and can also form a strip-shaped groove on the flexible substrate, wherein the strip-shaped groove can enable the stress of a bending region to be small, so that quality hidden danger is avoided.
Description
Technical Field
The invention relates to the technical field of display, in particular to a flexible substrate, a preparation method of the flexible substrate, a flexible display panel comprising the flexible substrate and a display device comprising the flexible display panel.
Background
In recent years, flexible display devices prepared by polyimide flexible substrates instead of glass substrates have attracted much attention, and have more and more application spaces in the display field. Compared with a rigid display, the flexible display has the characteristics of being foldable, bendable and convenient to carry, and provides more design ideas for terminal products.
However, the existing flexible substrate bending area has large stress and hidden quality troubles.
Therefore, it is necessary to research a new flexible substrate, a method for manufacturing the flexible substrate, a flexible display panel including the flexible substrate, and a display device including the flexible display panel.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not constitute prior art that is already known to a person of ordinary skill in the art.
Disclosure of Invention
The present invention is directed to overcome the disadvantage of large stress in the prior art, and provides a flexible substrate with small stress, a method for manufacturing the flexible substrate, a flexible display panel including the flexible substrate, and a display device including the flexible display panel.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
According to an aspect of the present disclosure, there is provided a method of manufacturing a flexible substrate including a flat region and at least one bent region, the method including:
providing a substrate base plate;
forming a plurality of stripe-shaped protrusions on the substrate base plate;
forming a flexible substrate on one surface of the strip-shaped bulges, which is far away from the substrate base plate, and an exposed area of one surface of the substrate base plate, which is provided with the strip-shaped bulges;
peeling the flexible substrate, the substrate base plate and the strip-shaped bulges to form a plurality of strip-shaped grooves on one surface of the flexible substrate, which is attached to the substrate base plate;
the strip-shaped grooves are located in the bending area, and the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible substrate.
In an exemplary embodiment of the present disclosure, forming a plurality of stripe-shaped protrusions over the base substrate includes:
forming a strip-shaped protruding material layer on the substrate base plate;
forming a photoresist layer on one side of the strip-shaped protruding material layer far away from the substrate base plate;
exposing and developing the photoresist layer to remove part of the photoresist layer to expose part of the strip-shaped protruding material layer;
etching the exposed strip-shaped protruding material layer;
ashing the residual photoresist layer to reduce the width of the photoresist layer to expose part of the strip-shaped protruding material layer;
etching the exposed strip-shaped protruding material layer again;
ashing the photoresist layer for multiple times and etching the exposed strip-shaped protruding material layer for multiple times to enable the strip-shaped protruding material layer to form a symmetrical step shape;
and removing the residual photoresist layer.
In an exemplary embodiment of the present disclosure, peeling the flexible substrate from the substrate and the plurality of stripe-shaped projections includes:
irradiating the substrate base plate through ultraviolet laser to separate the flexible base plate from the substrate base plate and the plurality of strip-shaped bulges;
and removing the substrate base plate and the plurality of strip-shaped bulges.
According to one aspect of the present disclosure, a flexible substrate is provided for bearing a flexible display structure, the flexible substrate includes a straight region and at least one bending region, the flexible substrate includes a substrate body, one surface of the substrate body, which is far away from the flexible display structure, is provided with a plurality of bar-shaped grooves, the plurality of bar-shaped grooves are located in the bending region, and the length direction of the plurality of bar-shaped grooves is perpendicular to the bending direction of the flexible substrate.
In an exemplary embodiment of the present disclosure, a cross-sectional shape of the bar-shaped groove perpendicular to a length direction thereof is a symmetrical step shape, and a width of the cross-sectional shape of the bar-shaped groove on a side close to the flexible display structure is smaller than a width of the cross-sectional shape of the bar-shaped groove on a side far from the flexible display structure.
In an exemplary embodiment of the present disclosure, each of the bar-shaped grooves penetrates the bending region of the substrate body.
In an exemplary embodiment of the present disclosure, each of the bar-shaped grooves includes a plurality of sub-bar-shaped grooves having center lines on the same straight line.
According to an aspect of the present disclosure, there is provided a flexible display panel including: the flexible substrate according to any one of the above.
In an exemplary embodiment of the present disclosure, the flexible display panel further includes:
the flexible display structure is arranged on one side of the flexible substrate, which is far away from the strip-shaped groove;
and the packaging structure is arranged on one side of the flexible display structure, which is far away from the flexible substrate.
According to an aspect of the present disclosure, there is provided a display device including: the flexible display panel of any of the above.
According to the technical scheme, the invention has at least one of the following advantages and positive effects:
the preparation method of the flexible substrate can provide a relatively flat base for forming a flexible display structure on the flexible substrate subsequently, and can also form the strip-shaped grooves on the flexible substrate, wherein the strip-shaped grooves are positioned in the bending area, the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible substrate, and the strip-shaped grooves can slow down the difference between the inner radius and the outer radius of the flexible substrate in the folding process, so that bidirectional folding is realized, the stress of the bending area is relatively small, and the quality hidden danger is avoided.
Drawings
The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
FIG. 1 is a schematic block diagram of an exemplary embodiment of a method of manufacturing a flexible substrate of the present invention;
fig. 2 to 11 are schematic structural diagrams of steps of an exemplary embodiment of a method for manufacturing a flexible substrate according to the present invention;
FIG. 12 is a schematic structural diagram of an exemplary embodiment of a flexible substrate of the present invention;
FIG. 13 is a schematic structural view of another exemplary embodiment of a flexible substrate of the present invention;
FIG. 14 is a schematic structural view of a flexible substrate according to the present invention after being bent toward one side of a strip-shaped groove;
fig. 15 is a schematic structural view of the flexible substrate of the present invention after being bent to a side away from the stripe-shaped groove.
The reference numerals of the main elements in the figures are explained as follows:
1. a glass substrate; 2. a silicon dioxide layer; 21. a strip-shaped bulge;
3. a photoresist layer;
4. a flexible substrate; 41. a flat area; 42. a bending region; 43. a substrate body;
5. a flexible display structure;
6. a strip-shaped groove; 61. a sub-strip-shaped groove.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed description will be omitted.
The present exemplary embodiment first provides a method for manufacturing a flexible substrate, which may include a flat region and at least one bent region, with reference to a schematic block diagram of an exemplary embodiment of a method for manufacturing a flexible substrate of the present invention shown in fig. 1, and the method may include the steps of:
in step S10, a substrate is provided.
In step S20, a plurality of stripe-shaped projections 21 are formed on the base substrate.
Step S30, forming a flexible substrate 4 on the exposed areas of the surfaces of the plurality of strip-shaped protrusions 21 away from the base substrate and the surface of the base substrate on which the plurality of strip-shaped protrusions 21 are formed.
Step S40, peeling the flexible substrate 4, the substrate and the strip-shaped protrusions 21 to form a plurality of strip-shaped grooves 6 on one surface of the flexible substrate 4, which is attached to the substrate; the strip-shaped grooves 6 are located in the bending region 42 of the flexible substrate 4, and the length direction of the strip-shaped grooves 6 is perpendicular to the bending direction of the flexible substrate 4.
Next, a method of manufacturing the flexible substrate 4 in the present exemplary embodiment will be further described.
In step S10, a substrate is provided.
In the present exemplary embodiment, the base substrate may be a glass substrate 1. Of course, other rigid substrates are possible.
In step S20, a plurality of stripe-shaped projections 21 are formed on the base substrate.
As shown with reference to fig. 2 to 7.
In the present exemplary embodiment, the material of the plurality of stripe-shaped protrusions 21 may be silicon dioxide, and the material layer of the stripe-shaped protrusions may be the silicon dioxide layer 2. The plurality of stripe-shaped protrusions 21 may be formed by a photolithography process. The method specifically comprises the following steps: referring to fig. 2, a silicon dioxide layer 2 is formed on a glass substrate 1 by deposition, sputtering or evaporation, and the thickness of the silicon dioxide layer 2 is approximately 1 to 10 micrometers; forming a photoresist layer 3 on one side of the silicon dioxide layer 2, which is far away from the glass substrate 1, covering the photoresist layer 3 with a mask plate, selectively irradiating the photoresist layer 3 covering the mask plate by light with a specific wavelength (i.e. exposing the photoresist layer 3), developing the photoresist layer 3 to remove the photoresist layer 3 which is not covered by the mask plate so as to expose part of the silicon dioxide layer 2, then etching the silicon dioxide layer 2 which is not covered by the photoresist layer 3 (i.e. exposing) for a first period of time, and etching the silicon dioxide layer 2 to form a plurality of separated strips, as shown in fig. 3.
Then, referring to fig. 4, ashing the remaining photoresist layer 3 to reduce the width of the remaining photoresist layer 3 again, so as to expose more silicon dioxide layer 2; referring to fig. 5, the exposed silicon dioxide layer 2 is then etched for a second period of time, which is less than the first period of time, so that the silicon dioxide layer 2 forms a step.
Then, the remained photoresist layer 3 is repeatedly ashed, as shown in fig. 6, and all the exposed silicon dioxide layer 2 after ashing is etched for a third time period, that is, the silicon dioxide layer 2 remained after the second etching is also etched, and the third time period may be equal to the second time period, so that the silicon dioxide layer 2 forms a step again.
Repeating ashing the photoresist layer 3 a plurality of times and repeating the ashing the silicon dioxide layer 2After multiple etching, the silicon dioxide layer 2 is formed into a step-shaped strip-shaped protrusion 21. The silicon dioxide layer 2 may be etched using octafluorocyclobutane (C)4F8) Etching with gases such as tetrafluoromethane (CF4) and sulfur hexafluoride (SF6), and ashing the photoresist layer 3 with oxygen (O)2) The plasma is ashed.
Referring to fig. 7, finally, the remaining photoresist layer 3 is completely removed to form a plurality of strip-shaped protrusions 21, and an included angle α between a connecting line of corner points of a plurality of steps of the strip-shaped protrusions 21 and the glass substrate 1 is about 45 degrees, so that the subsequent flexible substrate 4 can be conveniently peeled.
It should be noted that the first time period may also be equal to the second time period, that is, the silicon dioxide layer 2 is not etched to form a plurality of separate strips during the first etching, but the silicon dioxide layer 2 is etched to form a plurality of grooves, the silicon dioxide layer 2 at the bottom of the groove is continuously etched during the subsequent second etching, the third etching, and other multiple etching, and finally the silicon dioxide layer 2 forms a plurality of step-shaped strip-shaped protrusions 21 with symmetrical cross-sectional shapes. The time for etching each time can be the same, so that the heights of the formed steps are the same; the time for each ashing may be the same, and the width of the step to be formed may be the same.
In other exemplary embodiments of the present invention, the bottoms of the plurality of stripe-shaped protrusions 21 may also be connected together, i.e., the silicon dioxide layer 2 may not be etched into a separated state during the entire etching process, as long as the stripe-shaped protrusions 21 having a step shape can be formed.
Step S30, forming a flexible substrate 4 on the exposed areas of the surfaces of the plurality of strip-shaped protrusions 21 away from the base substrate and the surface of the base substrate on which the plurality of strip-shaped protrusions 21 are formed.
In the present exemplary embodiment, as shown in fig. 8, the flexible substrate 4 is formed by a process such as coating, printing, or the like in the exposed area of the one surface of the plurality of strip-shaped protrusions 21 away from the base substrate and the one surface of the base substrate where the plurality of strip-shaped protrusions 21 are formed. The portions of the flexible substrate 4 that are brought into contact with the plurality of strip-shaped projections 21 form a plurality of strip-shaped grooves 6.
In the present exemplary embodiment, referring to fig. 9, a flexible display structure 5 may also be formed over the flexible substrate 4, and the flexible display structure 5 may include an array substrate, a light emitting layer, and the like; an encapsulation structure (not shown) is then formed on the side of the flexible display structure 5 remote from the flexible substrate 4, and finally the flexible substrate 4 and the base substrate are separated.
Step S40, the flexible substrate 4, the base substrate and the plurality of strip-shaped protrusions 21 are peeled off, so that a plurality of strip-shaped grooves 6 are formed on one surface of the flexible substrate 4, which is attached to the base substrate, the plurality of strip-shaped grooves 6 are located in the bending region 42 of the flexible substrate 4, and the length direction of the plurality of strip-shaped grooves 6 is perpendicular to the bending direction of the flexible substrate 4.
In the present exemplary embodiment, as shown with reference to fig. 10, the substrate may be irradiated with ultraviolet laser light, and since the substrate of glass and the bar-shaped protrusions 21 of silicon dioxide do not absorb ultraviolet light, but the flexible substrate 4 absorbs ultraviolet light, the contact surfaces of the flexible substrate 4 and the glass substrate 1 and the bar-shaped protrusions 21 are easily separated. Referring to fig. 11, the flexible substrate 4 is formed by removing the glass substrate 1 and the plurality of stripe-shaped projections 21.
The preparation method of the flexible substrate 4 can provide a relatively flat base for forming a flexible display structure on the flexible substrate 4 subsequently, and also can form the strip-shaped grooves 6 on the flexible substrate 4, wherein the strip-shaped grooves are positioned in a bending area, the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible substrate, the strip-shaped grooves can slow down the difference of the inner radius and the outer radius of the flexible substrate 4 in the folding process, so that bidirectional folding is realized, the stress of the bending area 42 is small, and the quality hidden danger is avoided.
Further, the present exemplary embodiment also provides a flexible substrate 4, and refers to a schematic structural diagram of the flexible substrate 4 shown in fig. 12. The flexible substrate 4 is used for bearing a flexible display structure 5, the flexible substrate 4 may include a straight region 41 and at least one bending region 42, the flexible substrate 4 may include a substrate body 43, a plurality of strip-shaped grooves 6 are disposed on a surface of the substrate body 43 away from the flexible display structure 5, the plurality of strip-shaped grooves 6 are located in the bending region 42, and a length direction of the plurality of strip-shaped grooves 6 is perpendicular to a bending direction of the flexible substrate 4.
In the present exemplary embodiment, the material of the flexible substrate 4 may be polyimide resin. The sectional shape of the bar groove 6 perpendicular to the length direction thereof may be a symmetrical step shape, each side of the bar groove 6 may have four steps, and the width of the sectional shape of the bar groove 6 on the side close to the flexible display structure 5 is smaller than the width on the side far from the flexible display structure 5, that is, the bar groove 6 is in a shape that the opening portion is larger than the bottom portion. The symmetrical stepped strip-shaped grooves 6 have gradually changed widths, and the requirement that the outermost side or the innermost side of the flexible substrate 4 has the maximum deformation amount during bending is met. And the symmetrical stepped strip-shaped grooves 6 are easy to prepare in terms of process.
Of course, in some other exemplary embodiments of the present invention, the cross-sectional shape of the strip-shaped groove 6 perpendicular to the length direction thereof may be an arc shape, and the arc-shaped strip-shaped groove 6 also has a gradually changing width, which may also meet the requirement that the flexible substrate 4 has the maximum deformation amount at the outermost side or the innermost side when being bent.
In the present exemplary embodiment, as shown with reference to fig. 12, three strip-shaped grooves 6 may be provided, the three strip-shaped grooves 6 being arranged in parallel with each other, each strip-shaped groove 6 penetrating the bending region 42 of the substrate body 43. Each strip-shaped groove 6 extends through the entire bending region 42, without a break in the middle of the strip-shaped groove 6.
Of course, in other exemplary embodiments of the present invention, as shown with reference to fig. 13, each of the bar-shaped grooves 6 may include a plurality of sub-bar-shaped grooves 61 having centerlines on the same line. That is, the plurality of sub-bar-shaped grooves 61 form one bar-shaped groove 6 on the same straight line, and the bar-shaped grooves 6 formed by the plurality of sub-bar-shaped grooves 61 also penetrate through the bending region 42 of the substrate body 43, and the sub-bar-shaped grooves 61 of the respective bar-shaped grooves 6 are arranged in a staggered manner, so that the bar-shaped grooves 6 are not arranged at a certain position of the bending region 42.
Referring to fig. 14, when the flexible substrate 4 is bent toward the strip-shaped groove 6, the strip-shaped groove 6 can provide a squeezing space for the flexible substrate 4 to reduce the stress of the bending region 42. Please refer to fig. 15, which illustrates a structure diagram of the flexible substrate after being bent to a side away from the strip-shaped groove. When the flexible substrate 4 is bent to the side away from the strip-shaped groove 6, the strip-shaped groove 6 can provide a stretching space for the flexible substrate 4, and the stress of the bending region 42 is reduced. Due to the existence of the strip-shaped groove 6, the stress in the bending area 42 is small, the quality hidden trouble is reduced, and the flexible display panel can be bent at any angle.
Further, the present exemplary embodiment also provides a flexible display panel, which may include the flexible substrate 4 described above. The specific structure and manufacturing method of the flexible substrate 4 have been described in detail above, and therefore, the detailed description thereof is omitted here.
The flexible display panel may further comprise a flexible display structure 5 and an encapsulation structure; the flexible display structure 5 is arranged on one side of the flexible substrate 4 far away from the strip-shaped groove 6; the encapsulation structure is arranged on a side of the flexible display structure 5 remote from the flexible substrate 4. The flexible display structure 5 may comprise an array substrate arranged at a side of the flexible substrate 4 remote from the stripe-shaped groove 6, and a light emitting layer arranged at a side of the array substrate remote from the flexible substrate 4. The encapsulation structure is arranged on the side of the light-emitting layer away from the flexible substrate 4.
Compared with the prior art, the beneficial effects of the flexible display panel provided by the embodiment of the invention are the same as the beneficial effects of the flexible substrate 4 provided by the above embodiment, and are not described herein again.
Further, the present exemplary embodiment also provides a display device, which may include the flexible display panel described above. The specific structure and manufacturing method of the flexible display panel have been described in detail above, and therefore, the detailed description thereof is omitted here.
The specific type of the display device is not particularly limited, and any display device commonly used in the art may be used, specifically, for example, an OLED display, a mobile device such as a mobile phone, a wearable device such as a watch, a VR device, and the like.
It should be noted that, the display device includes other necessary components and components besides the flexible display panel, taking a display as an example, specifically, such as a housing, a circuit board, a power line, and the like, and those skilled in the art can supplement the display device accordingly according to specific use requirements of the display device, and details are not described herein.
Compared with the prior art, the beneficial effects of the display device provided by the embodiment of the invention are the same as the beneficial effects of the flexible substrate 4 provided by the above embodiment, and are not described herein again.
The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments, and the features discussed in connection with the embodiments are interchangeable, if possible. In the above description, numerous specific details are provided to give a thorough understanding of embodiments of the invention. One skilled in the relevant art will recognize, however, that the invention may be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of the invention.
Although relative terms, such as "upper" and "lower," may be used in this specification to describe one element of an icon relative to another, these terms are used in this specification for convenience only, e.g., in accordance with the orientation of the examples described in the figures. It will be appreciated that if the device of the icon were turned upside down, the element described as "upper" would become the element "lower". When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure via another structure.
In this specification, the terms "a", "an", "the", "said" and "at least one" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising," "including," and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. other than the listed elements/components/etc.; the terms "first," "second," and "third," etc. are used merely as labels, and are not limiting on the number of their objects.
It is to be understood that the invention is not limited in its application to the details of construction and the arrangement of components set forth in the description. The invention is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications fall within the scope of the present invention. It will be understood that the invention disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute alternative aspects of the present invention. The embodiments described in this specification illustrate the best mode known for carrying out the invention and will enable those skilled in the art to utilize the invention.
Claims (10)
1. A method of manufacturing a flexible substrate comprising a flat region and at least one bent region, the method comprising:
providing a substrate base plate;
forming a plurality of stripe-shaped protrusions on the substrate base plate;
forming a flexible substrate on one surface of the strip-shaped bulges, which is far away from the substrate base plate, and an exposed area of one surface of the substrate base plate, which is provided with the strip-shaped bulges;
peeling the flexible substrate, the substrate base plate and the strip-shaped bulges to form a plurality of strip-shaped grooves on one surface of the flexible substrate, which is attached to the substrate base plate;
the strip-shaped grooves are located in the bending area, and the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible substrate.
2. The method for manufacturing a flexible substrate according to claim 1, wherein forming a plurality of stripe-shaped projections on the base substrate comprises:
forming a strip-shaped protruding material layer on the substrate base plate;
forming a photoresist layer on one side of the strip-shaped protruding material layer far away from the substrate base plate;
exposing and developing the photoresist layer to remove part of the photoresist layer to expose part of the strip-shaped protruding material layer;
etching the exposed strip-shaped protruding material layer;
ashing the residual photoresist layer to reduce the width of the photoresist layer to expose part of the strip-shaped protruding material layer;
etching the exposed strip-shaped protruding material layer again;
ashing the photoresist layer for multiple times and etching the exposed strip-shaped protruding material layer for multiple times to enable the strip-shaped protruding material layer to form a symmetrical step shape;
and removing the residual photoresist layer.
3. The method for manufacturing a flexible substrate according to claim 1, wherein peeling the flexible substrate from the base substrate and the plurality of stripe-shaped projections comprises:
irradiating the substrate base plate through ultraviolet laser to separate the flexible base plate from the substrate base plate and the plurality of strip-shaped bulges;
and removing the substrate base plate and the plurality of strip-shaped bulges.
4. The flexible substrate is characterized by comprising a substrate body, wherein one surface of the substrate body, which is far away from the flexible display structure, is provided with a plurality of strip-shaped grooves, the strip-shaped grooves are positioned in the bending area, and the length directions of the strip-shaped grooves are perpendicular to the bending direction of the flexible substrate.
5. The flexible substrate of claim 4, wherein the cross-sectional shape of the bar-shaped groove perpendicular to the length direction is symmetrical and stepped, and the width of the cross-sectional shape of the bar-shaped groove near the flexible display structure is smaller than the width of the cross-sectional shape of the bar-shaped groove far from the flexible display structure.
6. The flexible substrate of claim 4, wherein each of the strip-shaped grooves extends through the bending region of the substrate body.
7. The flexible substrate of claim 6, wherein each of the bar-shaped grooves comprises a plurality of sub-bar-shaped grooves having center lines on the same line.
8. A flexible display panel, comprising: a flexible substrate according to any one of claims 4 to 7.
9. The flexible display panel of claim 8, further comprising:
the flexible display structure is arranged on one side of the flexible substrate, which is far away from the strip-shaped groove;
and the packaging structure is arranged on one side of the flexible display structure, which is far away from the flexible substrate.
10. A display device, comprising: the flexible display panel of claim 8 or 9.
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