CN111550481A - Automatic precision alignment laminating system - Google Patents
Automatic precision alignment laminating system Download PDFInfo
- Publication number
- CN111550481A CN111550481A CN202010353244.3A CN202010353244A CN111550481A CN 111550481 A CN111550481 A CN 111550481A CN 202010353244 A CN202010353244 A CN 202010353244A CN 111550481 A CN111550481 A CN 111550481A
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- Prior art keywords
- alignment
- laminating
- detection unit
- vacuum chamber
- pasted
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- 238000010030 laminating Methods 0.000 title claims description 37
- 239000000463 material Substances 0.000 claims abstract description 136
- 238000003475 lamination Methods 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 41
- 238000001179 sorption measurement Methods 0.000 claims description 31
- 230000000007 visual effect Effects 0.000 claims description 19
- 238000000926 separation method Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 4
- 238000011179 visual inspection Methods 0.000 claims description 4
- 238000013459 approach Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 6
- 239000002648 laminated material Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B11/00—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0028—Force sensors associated with force applying means
Abstract
The invention discloses an automatic precise alignment and lamination system, which comprises a software component operated through a computer end, a signal control component and a mechanical execution component, wherein the signal control component and the mechanical execution component are connected with the software component and the hardware component; the system can accurately align the attaching material and the attached material, and compared with a manual attaching mode, the system is high in attaching efficiency, high in accuracy and high in repeatability.
Description
Technical Field
The invention relates to the technical field of precision alignment fitting, in particular to an automatic precision alignment fitting system.
Background
The alignment bonding technology is widely applied to industrial processes, particularly in the fields of semiconductors, electronic technologies, integrated circuits, corrosion industries and the like. Indexes such as accuracy, precision, repeatability and the like are key indexes of the alignment bonding technology, and the accuracy and quality of a machining process after bonding are directly influenced.
At present, alignment and lamination are mostly carried out in a manual mode, and the specific method comprises the following steps: the material to be pasted is clamped on a high-power tool microscope, the pasting material is clamped on another clamp, the pasting material and the pasting material are aligned in a manual alignment mode of manually moving the object moving table through the objective lens, and then the pasting is completed by manually pressing down.
The existing manual laminating technology has the following defects: (1) the jointed material and the objective table are separated manually, so that a jointing gap can be caused; (2) the manual pressure is uncontrollable, and materials are easily damaged; (3) the manual alignment precision is difficult to ensure, so that the fitting is inaccurate; (4) the dependence on the personnel attaching experience is strong, and common personnel cannot attach the adhesive directly; (5) the laminating repeatability is poor, and the laminating efficiency is low.
Disclosure of Invention
The invention aims to provide an automatic precise alignment laminating system which can overcome the defects of low efficiency, low accuracy, low repeatability and the like of a manual laminating technology.
The embodiment of the invention is realized by the following steps:
an automated precision alignment fit system, comprising: the machine vision detection module comprises a jointing material, a pasted material, a first vision detection unit and a second vision detection unit, the space precision positioning module comprises a clamping mechanism fixed above the jointing material, a clamping mechanism fixed below the pasted material, an alignment mechanism and a multidimensional precision motion mechanism connected with a pressure supply mechanism and the second vision detection unit, the real-time closed-loop feedback control jointing module comprises a pressure supply mechanism and a force feedback unit, the jointing material is fixed on the pressure supply mechanism through the clamping mechanism, the pasted material is connected with the force feedback unit and fixed on the alignment mechanism, the first vision detection unit is positioned below the jointing material and detects the surface appearance of the jointing material, determining a space pose through the surface appearance of the laminated material, transmitting information of the space pose to an alignment mechanism by a first visual detection unit, adjusting the pose of the laminated material by the alignment mechanism, transmitting the information of the laminated material to a pressure supply mechanism by the alignment mechanism, pressing down by the pressure supply mechanism for lamination, and separating the laminated material from a clamping mechanism after lamination; the second visual detection unit is located above the pasted material and detects the surface appearance of the pasted material, the space pose is determined according to the surface appearance of the pasted material, the second visual detection unit transmits information of the space pose to the alignment mechanism, the alignment mechanism aligns the pose of the pasted material, the clamping mechanism fixes the pose of the pasted material or the pasted material through negative pressure, the force feedback unit monitors the stress of the pasted material, and the pasted material and the clamping mechanism are separated from each other after the pasting is completed.
In a preferred embodiment of the present invention, the clamping mechanism is a platform for achieving adsorption and separation by negative pressure, the clamping mechanism includes a vacuum chamber, a vacuum chamber is disposed inside the vacuum chamber, a plurality of adsorption holes for the material to be attached or the material to be attached are disposed on an upper surface or a lower surface of the vacuum chamber, the adsorption holes are communicated with the vacuum chamber, air holes for supplying pressure are disposed on a side surface of the vacuum chamber, and a plurality of processing holes facilitating processing are further disposed on the side surface of the vacuum chamber and are sealed.
In a preferred embodiment of the present invention, the plurality of adsorption holes are arranged in a plurality of rows and columns, and the adsorption holes simultaneously adsorb the surface of the bonding material or the material to be bonded; the shape of the adsorption holes is a regular pattern including, but not limited to, circles, squares, and triangles.
In a preferred embodiment of the present invention, the air hole is a built-in threaded through hole, and the air hole communicates the vacuum chamber and the outside of the vacuum chamber body.
In a preferred embodiment of the present invention, a micro vacuum pump is externally connected to the air hole, and the vacuum pump vacuumizes or injects air into the vacuum chamber to form a stable negative pressure or positive pressure, so as to stably adsorb or separate the bonding material or the bonded material.
In a preferred embodiment of the present invention, the multi-dimensional precision motion mechanism includes: the electric stepping displacement platform comprises a large-stroke electric mechanism moving along the horizontal direction and a small-stroke electric mechanism moving along the vertical direction, and the electric stepping rotary platform can rotate 360 degrees along the horizontal plane.
In a preferred embodiment of the present invention, when the distance detected by the first detecting unit and the second detecting unit is greater than 2cm, the large-stroke electric mechanism is rapidly stepped, and when the distance detected by the first detecting unit and the second detecting unit is less than 2cm, the small-stroke electric mechanism is stepped at a small step.
In a preferred embodiment of the present invention, when the real-time pressure value detected by the force feedback unit approaches a preset threshold of the bonding force, the pressure supply mechanism steps by a small step distance, and when the real-time pressure value is greater than or equal to the threshold of the bonding force, the pressure supply mechanism stops stepping.
In a preferred embodiment of the present invention, each step of the pressure supplying mechanism is performed once, the force feedback unit outputs a real-time pressure value once and compares the real-time pressure value with the bonding force threshold value each time until the real-time pressure value is greater than or equal to the bonding force threshold value, which indicates that the bonding of the bonding material and the bonded material is completed.
In a preferred embodiment of the present invention, the pressure supplying mechanism, the clamping mechanism, the force feedback unit, the alignment mechanism, the first visual inspection unit and the second visual inspection unit are electrically connected to the signal control assembly, and the signal control assembly is electrically connected to the software assembly.
The invention has the beneficial effects that:
the invention fixes and positions the attaching material and the attached material through the vacuum positive/negative pressure active separation/adsorption principle by the clamping mechanism and the adsorption hole of the vacuum cabin body, detects the poses of the attaching material and the attached material by the first visual detection unit and the second visual detection unit, accurately steps and positions the multidimensional precise movement mechanism, controls the attaching module through real-time closed-loop feedback, and detects a real-time pressure value by the force feedback unit, thereby finishing the alignment and attachment of the attaching material and the attached material; the system can accurately align the attaching material and the attached material, and compared with a manual attaching mode, the system is high in attaching efficiency, high in accuracy and high in repeatability.
Drawings
To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, and it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope.
FIG. 1 is a schematic diagram of an automatic precision alignment and bonding system according to the present invention;
FIG. 2 is a schematic side perspective view of a vacuum chamber of the present invention as a separation/adsorption platform;
FIG. 3 is a schematic bottom perspective view of a vacuum chamber used as a separation/adsorption platform according to the present invention;
FIG. 4 is a schematic illustration of a bonding process of the mechanical actuator assembly of the present invention;
FIG. 5 is a schematic flow diagram of the mechanical actuator assembly of the present invention;
icon: 1-a software component; 2-a signal control component; 3-a pressure supply mechanism; 4-laminating material; 5-a material to be pasted; 6-a clamping mechanism; 7-a first visual detection unit; 8-a second visual detection unit; 9-a force feedback unit; 10-an alignment mechanism; 11-a vacuum chamber; 12-a vacuum chamber; 13-adsorption holes; 14-pores; and 15-machining holes.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
First embodiment
Referring to fig. 1, the present embodiment provides an automatic precision alignment and bonding system, which includes: the machine vision detection module comprises a jointing material 4, a jointed material 5, a first vision detection unit 7 and a second vision detection unit 8, the space precision positioning module comprises a clamping mechanism 6 fixed above the jointing material 4, a clamping mechanism 6 fixed below the jointed material 5, an alignment mechanism 10 and a multidimensional precision motion mechanism connected with a pressure supply mechanism 3 and the second vision detection unit 8, the real-time closed-loop feedback control jointing module comprises a pressure supply mechanism 3 and a force feedback unit 9, the multidimensional precision motion mechanism comprises an electric stepping displacement platform and an electric stepping rotation platform, the electric stepping displacement platform comprises a large-stroke electric mechanism and a small-stroke electric mechanism, the multidimensional precision motion mechanism, the pressure supply mechanism 3, the clamping mechanism 6, the force feedback unit 9, the alignment mechanism 10, the first visual detection unit 7 and the second visual detection unit 8 are respectively and electrically connected to the signal control component 2, and the signal control component 2 is electrically connected to the software component 1; this embodiment can carry out the position appearance through machine vision detection module to laminating material 4 and 5 by the material of pasting and detect, carry out the translation to laminating material 4 and 5 spatial position by the material of pasting through space precision positioning module, it is rotatory and aim at, it is aimed at to produce the vacuum positive/negative pressure completion through the fixture 6 of space precision positioning module, through implementing closed loop feedback control laminating module and detecting real-time pressure value and through real-time pressure value to step-by-step carrying out feedback control, final accuracy is aimed laminating material 4 and 5 by the material of pasting, compare in manual laminating mode, the laminating efficiency of this system is high, the precision is higher, has stronger repeatability.
Due to system structural factors, the attaching material 4 and the attached material 5 may have adhesion to metal, the attaching material 4 is fixed on the pressure supply mechanism 3 through the clamping mechanism 6, the attached material 5 is connected with the force feedback unit 9 and fixed on the alignment mechanism 10, the first visual detection unit 7 is located below the attaching material 4 and detects the surface appearance of the attaching material 4, the spatial pose is determined according to the surface appearance of the attaching material 4, the first visual detection unit 7 transmits the information of the spatial pose to the alignment mechanism 10, the alignment mechanism 10 adjusts the pose of the attaching material 4, the alignment mechanism 10 transmits the information of the attaching material 4 to the pressure supply mechanism 3, the pressure supply mechanism 3 presses down for attaching, and after attaching is completed, the attaching material 4 is separated from the clamping mechanism 6; the second visual detection unit 8 is located above the pasted material 5 and detects the surface appearance of the pasted material 5, the spatial pose is determined through the surface appearance of the pasted material 5, the second visual detection unit 8 transmits the information of the spatial pose to the alignment mechanism 10, the alignment mechanism 10 aligns the pose of the pasted material 5, the clamping mechanism 6 fixes the pose of the pasting material 4 or the pasted material 5 through negative pressure, the force feedback unit 9 monitors the stress of the pasted material 5, and after the pasting is completed, the pasted material 5 and the clamping mechanism 6 are separated from each other
Referring to fig. 2 and 3, the clamping mechanism 6 is a platform for achieving adsorption and separation by negative pressure, the clamping mechanism 6 includes a vacuum chamber 11, the vacuum chamber 11 is used as a separation/adsorption platform of this embodiment, a vacuum chamber 12 is disposed inside the vacuum chamber 11, a plurality of adsorption holes 13 for the attached material 5 or the attached material 4 are disposed on an upper surface or a lower surface of the vacuum chamber 11, the adsorption holes 13 are communicated with the vacuum chamber 12, an air hole 14 for supplying pressure is disposed on a side surface of the vacuum chamber 11, and a plurality of processing holes 15 for facilitating processing are further disposed on a side surface of the vacuum chamber 11 and are sealed. The vacuum positive/negative pressure active separation/adsorption generated by the vacuum cabin body 11 can actively separate or adsorb the attaching material 4 and the attached material 5, and can roughly position the attaching material 4 and the attached material 5 while clamping; the plurality of adsorption holes 13 are arranged in multiple rows and multiple columns, the vacuum chamber body 11 serving as the separation/adsorption platform is distributed with regular adsorption holes 13, and the adsorption holes 13 simultaneously adsorb the surfaces of the attaching material 4 or the attached material 5; the shape of the adsorption holes 13 is a regular pattern, the regular pattern includes but is not limited to a circle, a square and a triangle, the adsorption holes 13 of the embodiment are a circle, and the adsorption holes 13 are arranged in a hexagon; the air hole 14 is a built-in threaded through hole, the air hole 14 is communicated with the outside of the vacuum cabin 12 and the vacuum cabin body 11, the air hole 14 is externally connected with a micro vacuum pump, and the vacuum pump vacuumizes or injects air into the air in the vacuum cabin body 11 to form stable negative pressure or positive pressure so as to stably adsorb or separate the attaching material 4 or the attached material 4.
Referring to fig. 4 and 5, the multi-dimensional precision motion mechanism includes a high-precision high-resolution electric stepping displacement platform and an electric stepping rotation platform, the electric stepping displacement platform includes a large-stroke electric mechanism moving in a horizontal direction and a small-stroke electric mechanism moving in a vertical direction, and the electric stepping rotation platform can rotate 360 degrees in a horizontal plane. The matching technology of the pneumatic motion linkage positioning space pose is completed through a clamping mechanism 6 and a multidimensional precise motion mechanism, so that the matching of the space pose of the attaching material 4 and the attached material 5 is realized, firstly, a vacuum cabin 12 in a vacuum cabin body 11 is pumped with air through a micro vacuum pump to form negative pressure, the attaching material 4 and the attached material 5 are stably fixed on a platform, then, the direction matching is carried out through the multidimensional precise motion mechanism to establish an XY coordinate system, the X direction is the direction in which the center points of the attaching material 4 and the attached material 5 are aligned, the Y direction is the direction in which the attaching material 4 and the attached material 5 which are vertical to the X axis deviate, firstly, the rapid stepping is carried out through a large-stroke electric mechanism to adjust the displacement in the X direction and the displacement in the Y direction, finally, the rotation matching of an angle theta is carried out, so that the pose of the attaching material 4 and the attached material 5 are aligned, and in the using process, when the distance detected by the first detection unit and the second detection unit is larger than 2cm, the large-stroke electric mechanism rapidly steps, and when the distance detected by the first detection unit and the second detection unit is smaller than 2cm, the small-stroke electric mechanism steps at a small step pitch, so that the position and the attitude of the attaching material 4 and the attached material 5 are aligned finally, and the spatial position and attitude matching is completed; when the distance between the laminating material 4 and the pasted material 5 is greater than 0.5cm, the pressure supply mechanism 3 rapidly steps until the laminating material 4 is about to contact the pasted material 5, namely, when the difference distance is less than 0.5cm, the pressure supply mechanism 3 steps with a small step pitch, the force feedback unit 9 detects the real-time pressure applied to the laminating material 4 all the time, when the real-time pressure value detected by the force feedback unit 9 is close to the preset laminating force threshold value, the pressure supply mechanism 3 steps with a smaller step pitch, and when the real-time pressure value is greater than or equal to the laminating force threshold value, the pressure supply mechanism 3 stops stepping. Before using, set up the parameter of laminating power threshold value in software component 1 in advance, real-time closed loop feedback control laminating module is on the basis of supplying 3 step resolution ratios of pressure mechanism and laminating power dominant relation, and it is in reasonable controllable within range mainly to laminate power when guaranteeing the actual laminating, guarantees that the laminating is inseparable seamless and to being pasted material 5 and do not harm, and concrete implementation is: setting a fitting force threshold value in the software component 1, outputting a real-time pressure value once by the force feedback unit 9 every time the pressure supply mechanism 3 steps once, comparing the real-time pressure value and the fitting force threshold value each time until the real-time pressure value is greater than or equal to the fitting force threshold value, and finishing the alignment and fitting of the fitting material 4 and the material 4 to be fitted.
In summary, the embodiment of the invention fixes and positions the attaching material and the attached material through the vacuum positive/negative pressure active separation/adsorption principle by the clamping mechanism and the adsorption hole of the vacuum cabin, detects the poses of the attaching material and the attached material by the first visual detection unit and the second visual detection unit, accurately steps and positions the multidimensional precision motion mechanism, controls the attaching module through real-time closed loop feedback, and detects a real-time pressure value by the force feedback unit, thereby completing the alignment and attachment of the attaching material and the attached material; the system can accurately align the attaching material and the attached material, and compared with a manual attaching mode, the system is high in attaching efficiency, high in accuracy and high in repeatability.
This description describes examples of embodiments of the invention, and is not intended to illustrate and describe all possible forms of the invention. It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.
Claims (10)
1. An automatic precision alignment laminating system, comprising: the machine vision detection module comprises a laminating material, a pasted material, a first vision detection unit and a second vision detection unit, the space precision positioning module comprises a clamping mechanism fixed above the laminating material, a clamping mechanism fixed below the pasted material, an alignment mechanism and a multi-dimensional precision motion mechanism connected with a pressure supply mechanism and the second vision detection unit, the real-time closed-loop feedback control laminating module comprises a pressure supply mechanism and a force feedback unit, the laminating material is fixed on the pressure supply mechanism through the clamping mechanism, the pasted material is connected with the force feedback unit and fixed on the alignment mechanism, the first visual detection unit is positioned below the laminating material and detects the surface appearance of the laminating material, the space pose is determined according to the surface appearance of the laminating material, the first visual detection unit transmits the information of the space pose to the alignment mechanism, the alignment mechanism adjusts the pose of the laminating material, the alignment mechanism transmits the information of the laminating material to the pressure supply mechanism, the pressure supply mechanism presses down again for laminating, and after the laminating is completed, the laminating material is separated from the clamping mechanism; the second visual detection unit is located above the pasted material and detects the surface appearance of the pasted material, the space pose is determined according to the surface appearance of the pasted material, the second visual detection unit transmits the information of the space pose to the alignment mechanism, the alignment mechanism aligns the pose of the pasted material, the clamping mechanism fixes the pose of the pasted material or the pasted material through negative pressure, the force feedback unit monitors the stress of the pasted material, and the pasted material and the clamping mechanism are separated from each other after the pasting is completed.
2. The automatic precise alignment and lamination system according to claim 1, wherein the clamping mechanism is a platform for achieving adsorption and separation through negative pressure, the clamping mechanism comprises a vacuum chamber, a vacuum chamber is arranged inside the vacuum chamber, a plurality of adsorption holes for the material to be laminated or the material to be laminated are arranged on the upper surface or the lower surface of the vacuum chamber, the adsorption holes are communicated with the vacuum chamber, air holes for supplying pressure are arranged on the side surface of the vacuum chamber, and a plurality of processing holes convenient to process are further arranged on the side surface of the vacuum chamber and are sealed.
3. The automatic precise alignment and bonding system of claim 2, wherein a plurality of the adsorption holes are arranged in a plurality of rows and columns, and the adsorption holes simultaneously adsorb the surface of the bonding material or the bonded material; the shape of the adsorption holes is a regular pattern, and the regular pattern includes, but is not limited to, a circle, a square and a triangle.
4. The automatic precise alignment and lamination system of claim 3, wherein the air hole is a built-in threaded through hole, and the air hole is communicated with the vacuum chamber and the outside of the vacuum chamber body.
5. The automatic precise alignment and bonding system according to claim 2, wherein a micro vacuum pump is externally connected to the air hole, and the vacuum pump is used for vacuumizing or injecting air in the vacuum chamber to form a stable negative pressure or positive pressure, so as to stably adsorb or separate the bonding material or the bonded material.
6. The automated precision alignment fit system of claim 1, wherein the multi-dimensional precision motion mechanism comprises: the electric stepping displacement platform comprises a large-stroke electric mechanism moving along the horizontal direction and a small-stroke electric mechanism moving along the vertical direction, and the electric stepping rotary platform can rotate 360 degrees along the horizontal plane.
7. The automatic precise alignment and bonding system of claim 6, wherein the large-stroke electric mechanism is rapidly stepped when the distance detected by the first detection unit and the second detection unit is greater than 2cm, and the small-stroke electric mechanism is stepped at a small step when the distance detected by the first detection unit and the second detection unit is less than 2 cm.
8. The automatic precise alignment bonding system of claim 7, wherein when the real-time pressure value detected by the force feedback unit approaches a preset bonding force threshold value, the pressure supply mechanism will step by a small step distance, and when the real-time pressure value is greater than or equal to the bonding force threshold value, the pressure supply mechanism stops stepping.
9. The automatic precise alignment and lamination system according to claim 8, wherein the force feedback unit outputs a real-time pressure value once per step of the pressure supply mechanism, and compares the real-time pressure value with the lamination force threshold value each time until the real-time pressure value is greater than or equal to the lamination force threshold value, and the lamination of the lamination material and the lamination material is considered to be completed.
10. The automatic precise alignment and bonding system of claim 1, wherein the pressure supply mechanism, the clamping mechanism, the force feedback unit, the alignment mechanism, the first visual inspection unit and the second visual inspection unit are electrically connected to a signal control assembly respectively, and the signal control assembly is electrically connected to a software assembly.
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| WO2023011080A1 (en) * | 2021-08-03 | 2023-02-09 | 重庆康佳光电技术研究院有限公司 | Sheet bonding and alignment system and sheet bonding method |
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