CN111519140A - Backplate and coating by vaporization machine - Google Patents

Abstract

The invention provides a backboard and an evaporator. According to the back plate, the mounting parts are arranged on the back plate body, and the balancing weights are detachably arranged in the mounting parts, so that when the back plate is actually used, the distribution of the balancing weights can be adjusted according to the deformation condition of the surface of the back plate body, the balancing weights with heavier mass are applied to the places with larger deformation, and the balancing weights with lighter mass or without the balancing weights are applied to the places with smaller deformation, so that the pressure distribution condition on the whole back plate body is adjusted, the phenomenon of uneven pressure caused by local deformation is reduced, and the stable production yield of an evaporator is ensured.

Description

Backplate and coating by vaporization machine

Technical Field

The invention relates to the technical field of display, in particular to a back plate and an evaporation machine.

Background

The evaporation process is one of the most difficult links in the production process of an OLED (organic Light Emitting diode) display screen, and the components of the evaporation machine have great influence on the quality of the evaporation process. In the coating by vaporization machine, the backplate is an important part in the coating by vaporization machine counterpoint system, and the main effect of backplate is for exerting certain pressure for the base plate in the coating by vaporization in-process, makes base plate and mask plate laminating inseparable, prevents the bad production of display screen. However, the back plate in the prior art is easy to be locally deformed after being used for a long time, thereby affecting the production yield.

Disclosure of Invention

The invention aims to provide a back plate and an evaporator to solve the defects. The backboard can reduce the probability of local deformation after long-time use, thereby ensuring that the evaporator has stable production yield.

An embodiment of the invention provides a backboard, which comprises a backboard body, wherein a plurality of mounting parts are arranged on the backboard body, and balancing weights are detachably arranged in at least part of the mounting parts.

The back plate as described above, optionally, the mounting portion comprises a groove, a through hole or an annular groove provided on the back plate body.

When the installation department adopts the structure of recess, the recess can set up and keep away from one side of treating pressing the base plate at the backplate body under the user state, also be on the non-working face of backplate body to be convenient for the staff installs or dismantles the balancing weight on the backplate body, improves the operating efficiency. When the installation department adopts the through-hole structure, the through-hole runs through the backplate body along backplate thickness direction, inserts the balancing weight this moment after, the balancing weight can be directly with treat the surface contact of pressing the base plate to adjust the local pressure inequality phenomenon that warp and cause of backplate body.

As above, optionally, the through hole is a stepped hole, the counterweight block includes a base and a protrusion disposed on the base, the protrusion is insertable into the small-diameter section of the stepped hole, and the base is insertable into the large-diameter section of the stepped hole and is overlapped on the end surface of the small-diameter section of the stepped hole.

Through above-mentioned structure, the weight accessible base of balancing weight and the overlap joint relation between the terminal surface of the path section of shoulder hole and even distribution to the backplate body of balancing weight both sides to the local pressure distribution condition of adjustment backplate body reduces the local pressure inequality phenomenon that warp and cause of backplate body, makes to wait to press better and the mask plate laminating of base plate.

Optionally, the inner surface of the mounting portion is provided with a sliding groove, and the weight member is slidably disposed in the mounting portion.

The counterweight block is arranged in the mounting part in a sliding connection mode, so that the counterweight block can be conveniently detached, the replacement time of the counterweight block is reduced, and the operation efficiency is improved.

The back plate as described above, optionally, a plurality of the mounting portions constitute at least one annular structure, the annular structure being concentrically arranged with the back plate body.

The arrangement mode can be beneficial to adjusting the back plate body, and the phenomenon of uneven pressure caused by local deformation of the back plate body is reduced.

As mentioned above, optionally, a plurality of the mounting portions form a plurality of concentric ring structures with similar shapes and different sizes, and the spacing distance between two adjacent ring structures is equal.

Evenly set up the installation department on the backplate body and can be convenient for the adjustment to backplate body optional position local deformation, after the balancing weight inserted the installation department, the balancing weight was around the local deformation position of backplate body to the pressure homodisperse of backplate body to the pressure distribution condition on the whole backplate body has been adjusted, reduced local deformation and the uneven phenomenon of pressure that causes.

The back plate as described above, optionally, a plurality of the mounting portions form a plurality of concentric ring structures with similar shapes and different sizes, and the spacing distance between two adjacent ring structures gradually decreases along the direction from the center of the back plate body to the edge of the back plate body.

Because the backplate body is when using, warp and produce more at the border position of backplate body, set the annular structure that the installation department enclosed into to the structure that increases along backplate body center to backplate body edge density gradually, be convenient for set up more balancing weights at the border position of backplate body to improve the pressure distribution condition in backplate body yielding region, reduce local deformation and the uneven phenomenon of pressure that causes.

The backplate as described above, optionally, the backplate body comprises a central region and an edge region surrounding the central region, and the plurality of mounting parts are distributed at the edge region of the backplate body; preferably, a plurality of the mounting parts form at least two concentric annular structures with similar shapes and different sizes or a plurality of the mounting parts surround to form an annular structure.

Because the backplate body is when using, warp and produce more at the border position of backplate body, set up the installation department at the border position of backplate body, be convenient for set up more balancing weights at the border position of backplate body to improve the pressure distribution condition in backplate body yielding region, reduce local deformation and the uneven phenomenon of pressure that causes. Meanwhile, the central area of the back plate body still keeps an integrated design, so that the stability of the central area is better.

The back plate as described above, optionally, the material of the weight member includes a nonmagnetic metal or alloy. The pressure distribution condition on the back plate body can be adjusted more easily by arranging the balancing weight made of the material.

Another embodiment of the present invention provides an evaporation machine, including a driving mechanism and the back plate as described above, wherein an output end of the driving mechanism is connected to the back plate to drive the back plate to move.

The coating by vaporization machine that this embodiment provided owing to adopted above-mentioned backplate, consequently still can guarantee the pressure distribution condition on the whole backplate body after long-time the use, can reduce the probability of backplate local deformation to guarantee that the coating by vaporization machine has stable production yield.

The application provides a backplate and coating by vaporization machine, this backplate includes the backplate body, and set up a plurality of installation departments on the backplate body, detachable is provided with the balancing weight in the at least partial installation department, when in-service use, can be according to the deformation condition on backplate body surface, the distribution of adjustment balancing weight, apply the heavier balancing weight of quality in the great place of deflection, apply the lighter balancing weight of quality or do not add the balancing weight in the less place of deflection, thereby adjust the pressure distribution condition on the whole backplate body, reduce local deformation and the uneven phenomenon of pressure that causes.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.

FIG. 1 is a schematic top view of a backplate according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of the backing plate of FIG. 1 in accordance with one embodiment of the present invention;

FIG. 3 is a cross-sectional view of the back plate of FIG. 1 according to another embodiment of the present invention;

FIG. 4 is a schematic top view of a backing plate according to another embodiment of the present invention;

FIG. 5 is a schematic top view of a backing plate according to yet another embodiment of the present invention;

FIG. 6 is a schematic top view of a back plate according to yet another embodiment of the present invention;

FIG. 7 is a schematic top view of a back plate according to another embodiment of the present invention.

Reference numerals:

10-a back plate; 101-a first ring-shaped structure; 102-a second ring-shaped structure; 103-a third ring-shaped structure;

110-a backplane body; 111-a mounting portion; 120-a counterweight block; 121-a base; 122-a protrusion;

20-a back plate; 201-a first ring-shaped structure; 202-a second ring-shaped structure; 203-a third ring-shaped structure;

210-a backplane body; 211-a mounting portion; 220-a balancing weight;

30-a back plate; 301-a first ring-shaped structure; 302-a second ring-shaped structure; 310-a backplane body;

311-a mounting part; 320-a balancing weight;

40-a back plate; 401 — ring structure; 410-a back plate body; 411-a mounting portion; 420-a balancing weight;

50-a back plate; 501-a first annular groove; 502-a second annular groove; 503-a third annular groove;

510-a back plate body; 511-a mounting part; 520-balancing weight.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention.

All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

The backboard is an important component in an alignment system of the evaporation machine, and the backboard mainly has the function of applying certain pressure to the substrate in the evaporation process to ensure that the substrate is tightly attached to the mask plate and the bad production of the display screen is prevented. In the prior art, the back plate is formed from a single flat piece of metal. The inventor researches for a long time to find that after the backboard is used for a long time, local deformation can be generated, so that uniform pressure can not be provided for the substrate, and a gap is generated locally after the substrate is attached to the mask plate, so that the display screen is poor. At the moment, a new back plate needs to be replaced, and the normal production efficiency of the evaporator is influenced.

In view of the above, embodiments of the present invention provide a back plate, which can reduce the probability of local deformation after long-term use, thereby ensuring a stable production yield of an evaporator.

The present invention will be described in detail below with reference to the accompanying drawings so that those skilled in the art can more fully understand the present invention.

Example one

FIG. 1 is a schematic top view of a backplate according to an embodiment of the present invention; FIG. 2 is a cross-sectional view of the backing plate of FIG. 1 in accordance with one embodiment of the present invention; FIG. 3 is a cross-sectional view of the back plate of FIG. 1 according to another embodiment of the present invention; please refer to fig. 1-3.

The present embodiment provides a back plate 10, which includes a back plate body 110, wherein the back plate body 110 is provided with a plurality of mounting portions 111, and at least a portion of the mounting portions 111 is detachably provided with a weight 120.

Specifically, as shown in fig. 1, the back plate body 110 of the present embodiment is square, and it can be understood that the shape of the back plate body 110 can be set according to needs, for example, in other alternative embodiments, the back plate body 110 can also be in a circular, diamond, polygonal, or other structure. The back plate body 110 can be made of aluminum alloy or titanium alloy material. The weight member 120 may be made of a nonmagnetic and dense metal or alloy, for example, the weight member 120 should not contain metals such as iron, cobalt, and nickel, and the weight member 120 may be made of stainless steel (e.g., 304 stainless steel). The thickness of the weight 120 can be adjusted according to the thickness of the back plate body 110, and preferably, the thickness of the weight 120 can be 8-12 mm.

The mounting portion 111 may be integrally formed on the back plate body 110 to improve the strength of the back plate body 110, and avoid the influence on the surface flatness of the back plate body 110 when the back plate body 110 is manufactured first and the mounting portion 111 is processed. The weight block 120 is detachably disposed in the mounting portion 111, so that the pressure distribution on the back plate body 110 can be adjusted by adding the weight block 120.

Through the structure, the balancing weight 120 can be placed at the position where deformation occurs on the backboard body 110, so that the local pressure of the position is increased, the pressure applied to the to-be-pressed substrate at the deformation position of the backboard 10 is also increased when the backboard is used, the risk of poor lamination of the to-be-pressed substrate and the mask is reduced, and the yield of the display screen is improved.

The backplate 10 of this embodiment, because a plurality of installation departments 111 have been set up on backplate body 110, the detachable balancing weight 120 that is provided with in installation department 111, when the in-service use, can be according to the deformation condition on backplate body 110 surface, the distribution of adjustment balancing weight 120, apply the balancing weight 120 that the quality is heavier in the great place of deflection, apply the balancing weight 120 that the quality is lighter or do not add balancing weight 120 in the less place of deflection, thereby adjust the pressure distribution condition on the whole backplate body 110, reduce the local deformation and the uneven phenomenon of pressure that causes.

Further, as shown in fig. 2 and 3, in the present embodiment, the mounting portion 111 may be a groove, a through hole, or an annular groove provided on the back plate body 110.

Specifically, the depth of the mounting portion 111 may account for 30% to 100% of the thickness of the back plate body 110, and it is understood that when the depth of the mounting portion 111 accounts for 100% of the thickness of the back plate body 110, the mounting portion 111 is a through hole structure. Further, the depth of the mounting portion 111 may account for 60% to 100% of the thickness of the back plate body 110, and may be more conveniently adjusted by being set within this range.

Preferably, the depth of the mounting portion 111 may account for 80% -100% of the thickness of the back plate body 110, so that the back plate body may be further conveniently and quickly adjusted, and the operation efficiency may be improved.

When the mounting portion 111 is a groove, along the thickness direction of the back plate 10, the projection shape of the groove on the back plate body 110 may include a rectangle, a diamond, a circle, a triangle, or the like, which is not limited in this embodiment.

When the installation part 111 adopts the structure of the groove, the groove can be arranged on one side of the backboard body 110 far away from the substrate to be pressed in the use state, namely on the non-working surface of the backboard body 110, so that the counter weight 120 can be conveniently installed or detached on the backboard body 110 by a worker, and the operation efficiency is improved.

When the installation part 111 adopts a through hole structure, the through hole penetrates through the backboard body 110 along the thickness direction of the backboard 10, and after the counterweight block 120 is inserted, the counterweight block 120 can directly contact with the surface of the substrate to be pressed, so that the phenomenon of uneven pressure caused by local deformation of the backboard body 110 is adjusted.

In an alternative embodiment, as shown in fig. 2, the mounting portion 111 has a through hole structure, and the through hole is a stepped hole. At this time, the weight member 120 includes a base 121 and a protrusion 122 disposed on the base 121, the protrusion 122 is insertable into the small diameter section of the stepped hole, and the base 121 is insertable into the large diameter section of the stepped hole and is overlapped on the end surface of the small diameter section of the stepped hole.

In other alternative embodiments, the inner diameter of the through-hole is equal everywhere; at this moment, the balancing weight can still include the base and set up the arch on the base, and wherein, the external diameter of base is greater than the internal diameter of through-hole to make the base can the overlap joint on the outer terminal surface of through-hole, bellied external diameter less than or equal to the internal diameter of through-hole, so that the arch can be swift insert in the through-hole.

Through the structure, the weight of the balancing weight 120 can be uniformly distributed on the back plate body 110 on two sides of the balancing weight 120 through the lap joint relation between the base 121 and the end surface of the small-diameter section of the stepped hole, so that the local pressure distribution condition of the back plate body 110 is adjusted, the phenomenon of uneven pressure caused by local deformation of the back plate body 110 is reduced, and the substrate to be pressed is better attached to a mask plate.

In another alternative embodiment, as shown in fig. 3, the mounting portion 111 is a groove provided on the back plate body 110. At this time, the shape of the weight block 120 is adapted to the groove, and the weight block 120 can be placed in the groove in any detachable connection manner. For example, the inner surface of the mounting portion 111 may be provided with a sliding groove, and the weight 120 may be slidably disposed in the mounting portion 111.

With balancing weight 120 adoption sliding connection's mode setting in installation department 111, can make things convenient for balancing weight 120's dismantlement, reduce balancing weight 120's change time, improve the operating efficiency.

Alternatively, the plurality of mounting portions 111 constitute at least one ring structure, which is concentrically disposed with the backplate body 110. This may facilitate more uniform weight adjustment of the back plate body 110.

Referring to fig. 1, in the present embodiment, the plurality of mounting portions 111 form a plurality of concentric ring structures with similar shapes and different sizes, and the spacing distance between two adjacent ring structures is equal.

Alternatively, the spacing between two adjacent mounting portions 111 in the ring structure is equal, facilitating weight adjustment and process preparation. In other embodiments, the distance between two adjacent mounting portions 111 in the annular structure is not equal, and may be set according to actual conditions.

For ease of understanding, this embodiment adds a dashed line showing the general course of the loop configuration in FIG. 1 to facilitate explanation thereof.

As shown in fig. 1, the plurality of mounting portions 111 in this embodiment may enclose three concentric ring structures, which are, in order from the center to the edge of the backplate body 110, a first ring structure 101, a second ring structure 102, and a third ring structure 103. In this embodiment, the annular structures may include a rectangle, a diamond, a triangle, or a circle, and preferably, in this embodiment, the first annular structure 101, the second annular structure 102, and the third annular structure 103 are all rectangular, and the side lengths of the first annular structure 101, the second annular structure 102, and the third annular structure 103 are gradually increased, that is, the rectangle surrounded by the second annular structure 102 is sleeved outside the rectangle surrounded by the first annular structure 101, and the rectangle surrounded by the third annular structure 103 is sleeved outside the rectangle surrounded by the second annular structure 102.

Through the structure, the installation part 111 is uniformly arranged on the back plate body 110, so that the local deformation of any position of the back plate body 110 can be adjusted conveniently, after the balancing weight 120 is inserted into the installation part 111, the pressure of the balancing weight 120 on the back plate body 110 is uniformly dispersed around the local deformation position of the back plate body 110, the pressure distribution condition on the whole back plate body 110 is adjusted, and the phenomenon of uneven pressure caused by local deformation is reduced.

Example two

FIG. 4 is a schematic top view of a backing plate according to another embodiment of the present invention; please refer to fig. 4.

The embodiment provides a backboard 20, which comprises a backboard body 210, wherein the backboard body 210 is provided with a plurality of mounting parts 211, and balancing weights 220 are detachably arranged in the mounting parts 211.

In this embodiment, the structures of the back plate body 210, the mounting portion 211 and the weight block 220 are the same as those in the first embodiment, and are not described herein again. The difference between the present embodiment and the above-mentioned embodiment is that the plurality of mounting portions 211 in the present embodiment form a plurality of concentric ring structures with similar shapes and different sizes, and the distance between two adjacent ring structures gradually decreases along the direction from the center of the backplate body 210 to the edge of the backplate body 210.

For ease of understanding, this embodiment adds a dashed line showing the general course of the loop configuration in FIG. 4 to facilitate explanation thereof.

As shown in fig. 4, the plurality of mounting portions 211 in this embodiment may enclose three concentric ring structures, which are a first ring structure 201, a second ring structure 202, and a third ring structure 203 in sequence from the center to the edge of the backplate body 210. In this embodiment, the annular structures may include a rectangle, a diamond, a triangle, or a circle, and preferably, in this embodiment, the first annular structure 201, the second annular structure 202, and the third annular structure 203 are all rectangular, and the side lengths of the first annular structure 201, the second annular structure 202, and the third annular structure 203 are gradually increased, that is, the rectangle surrounded by the second annular structure 202 is sleeved outside the rectangle surrounded by the first annular structure 201, and the rectangle surrounded by the third annular structure 203 is sleeved outside the rectangle surrounded by the second annular structure 202.

In the present embodiment, the spacing distance between two adjacent ring structures is gradually increased, that is, the spacing distance between the first ring structure 201 and the second ring structure 202 is greater than the spacing distance between the second ring structure 202 and the third ring structure 203. Furthermore, the spacing distance between two adjacent mounting portions 211 in the first ring-shaped structure 201 is greater than the spacing distance between two adjacent mounting portions 211 in the second ring-shaped structure 202; the spacing distance between two adjacent mounting portions 211 in the second annular structure 202 is greater than the spacing distance between two adjacent mounting portions 211 in the third annular structure 203, i.e. the density of the mounting portions 211 is gradually increased from the center to the edge of the backplate body 210.

Because backplate body 210 is when using, the deformation mostly produces in the border position of backplate body 210, sets the annular structure that the installation department 211 encloses into by the structure that increases gradually to backplate body 211 edge density along backplate body 210 center, is convenient for set up more balancing weights 220 in the border position of backplate body 210 to improve the pressure distribution condition in backplate body 210 yielding region, reduce local deformation and the uneven phenomenon of pressure that causes.

EXAMPLE III

FIG. 5 is a schematic top view of a backing plate according to yet another embodiment of the present invention; please refer to fig. 5.

The present embodiment provides a back plate 30, which includes a back plate body 310, a plurality of mounting portions 311 are disposed on the back plate body 310, and a weight 320 is detachably disposed in the mounting portions 311.

In this embodiment, the structures of the back plate body 310, the mounting portion 311 and the weight member 320 are the same as those in the first embodiment, and are not described herein again. The difference between the present embodiment and the above-mentioned embodiments is that in the present embodiment, the plurality of mounting portions 311 are distributed at the edge of the backplate body 310, and the plurality of mounting portions 311 form two concentric ring structures with similar shapes and different sizes. In other embodiments, the plurality of mounting portions 311 form more than two concentric ring structures of similar shape and different sizes.

For ease of understanding, this embodiment adds a dashed line showing the general course of the loop configuration in FIG. 5 to facilitate explanation thereof.

As shown in fig. 5, in the present embodiment, the backplate body 310 may be divided into a central region and an edge region surrounding the central region, and the plurality of mounting portions 311 are disposed in the edge region of the backplate body 310. In the edge region, the area of the weight 320, which is orthographically projected on the backboard body 310, accounts for 10% -75% of the area of the backboard body 310. In this embodiment, the plurality of mounting portions 311 may enclose two concentric ring structures, which are the first ring structure 301 and the second ring structure 302 in sequence from the center to the edge of the backplate body 310. The annular structures in this embodiment may include a rectangle, a diamond, a triangle, or a circle, preferably, in this embodiment, the first annular structure 301 and the second annular structure 302 are both rectangular, and the side lengths of the first annular structure 301 and the second annular structure 302 are gradually increased, that is, the rectangle surrounded by the second annular structure 302 is sleeved outside the rectangle surrounded by the first annular structure 301.

Preferably, in the edge region, the proportion of the area of the weight 320, which is orthographically projected on the back plate body 310, to the area of the back plate body 310 is 35% to 75%, and on the basis of ensuring the action of the central region of the back plate body 310, by setting the area within this range, the pressure distribution of the easily deformable region of the back plate body 310 can be improved, and the pressure unevenness caused by local deformation can be reduced. The spacing distance between two adjacent mounting portions 311 in the first annular structure 301 in this embodiment may be greater than the spacing distance between two adjacent mounting portions 311 in the second annular structure 302, i.e., the density of the mounting portions 311 in the first annular structure 301 is less than the density in the second annular structure 302.

Because backplate body 310 is when using, the deformation is produced in the border position of backplate body 310 more, sets up installation department 311 in the border position of backplate body 310, is convenient for set up more balancing weights 320 in the border position of backplate body 310 to improve the pressure distribution condition in backplate body 310 yielding region, reduce local deformation and the uneven phenomenon of pressure that causes. Meanwhile, the central area of the back plate body 310 still maintains an integrated design, so that the stability of the central area is better.

Example four

FIG. 6 is a schematic top view of a back plate according to yet another embodiment of the present invention; please refer to fig. 6.

The embodiment provides a back plate 40, which comprises a back plate body 410, wherein a plurality of mounting parts 411 are arranged on the back plate body 410, and balancing weights 420 are detachably arranged in the mounting parts 411.

In this embodiment, the structures of the back plate body 410, the mounting portion 411 and the weight block 420 are the same as those in the first embodiment, and are not described herein again. Different from the above embodiments, in the present embodiment, the plurality of mounting portions 411 are distributed at the edge of the backplate body 410, and the plurality of mounting portions 411 surround to form an annular structure 401.

For ease of understanding, this embodiment adds a dashed line showing the general course of the loop configuration in FIG. 6 to facilitate explanation thereof. In this embodiment, the backplate body 410 may be divided into a central region and an edge region surrounding the central region, and the plurality of mounting portions 411 are all disposed in the edge region. In the edge region, the proportion of the area of the weight 420 to the area of the back plate body 410 is 10-75%. In this embodiment, the annular structure 401 enclosed by the plurality of mounting portions 411 may include a rectangle, a diamond, a triangle, or a circle, and preferably, the annular structure 401 in this embodiment is rectangular.

Because backplate body 410 is when using, the deformation is produced in the border position of backplate body 410 more, sets up installation department 411 in the border position of backplate body 410, is convenient for set up more balancing weights 420 in the border position of backplate body 410 to improve the pressure distribution condition in backplate body 410 yielding region, reduce local deformation and the uneven phenomenon of pressure that causes. Meanwhile, the central area of the back plate body 410 still keeps an integrated design, so that the stability of the central area is better.

EXAMPLE five

FIG. 7 is a schematic top view of a backing plate according to yet another embodiment of the present invention; please refer to fig. 7.

The present embodiment provides a backboard 50, which comprises a backboard body 510, wherein the backboard body 510 is provided with a plurality of mounting portions 511, and a weight block 520 is detachably disposed in the mounting portions 511.

In this embodiment, the structure of the backplate body 510 is the same as that in the first embodiment, and is not described herein again. The mounting portion 511 is an annular structure, such as an annular groove, and the weight block 520 is slidably disposed in the mounting portion 511.

Optionally, the mounting portion 511 may be a sliding groove, a sliding rail may be disposed on an inner side wall of the sliding groove, and the outer surface of the weight block 520 is provided with a roller and other structures so that the sliding rail is matched, thereby achieving movement. Can be provided with a plurality of balancing weights 520 in the same spout, when detecting that certain position takes place to deform on backplate body 510, can slide balancing weight 520 in the spout to this position to improve the partial pressure in this position, in order to offset the influence that the deformation brought. Knowably, balancing weight 520 still includes buckle structure, when sliding balancing weight 520 to the deformation position, fixes in this position through its buckle structure, avoids balancing weight 520 horizontal slip.

When each part of the back plate body 510 is not deformed, the weight block 520 can be uniformly arranged in the sliding groove, or the weight block 520 can be taken out from the sliding groove.

Specifically, as shown in fig. 7, in the present embodiment, the plurality of mounting portions 511 may enclose three annular grooves, which are a first annular groove 501, a second annular groove 502, and a third annular groove 503 in sequence from the center to the edge of the back plate body 510. The annular groove in this embodiment may include a rectangle, a diamond, a triangle, or a circle, preferably, in this embodiment, the first annular groove 501, the second annular groove 502, and the third annular groove 503 are all rectangular, and the side lengths of the first annular groove 501, the second annular groove 502, and the third annular groove 503 are gradually increased, that is, the second annular groove 502 is sleeved outside the first annular groove 501, and the third annular groove 503 is sleeved outside the second annular groove 502. The first annular groove 501, the second annular groove 502 and the third annular groove 503 are all detachably provided with a plurality of balancing weights 520, and the balancing weights 520 can slide in the corresponding annular grooves.

Through above-mentioned structure, set up a plurality of ring channels on backplate body 510 to set up a plurality of slidable balancing weights 520 in the ring channel, can be convenient for carry out the pertinence regulation to backplate body 510 according to the actual deformation position of backplate body 510, thereby adjusted the pressure distribution condition on the whole backplate body 510, reduced local deformation and the uneven phenomenon of pressure that causes.

Optionally, the installation portion 111 may be provided in a groove, a through hole, or an annular groove formed in the back plate body 110, or may be provided on the upper surface of the back plate body 110, for example, each installation portion 111 may be a protrusion formed by encircling a circle, and the size of the protrusion is set according to the size of the weight block 120, so as to place the weight block 120 in the protrusion, and the installation portion 111 may be provided in other forms, and may be specifically set according to actual situations. By placing the counterweight blocks 120 in the plurality of mounting portions 111, the pressure distribution on the back plate body 110 is adjusted, and the manufacturing process of the back plate body 110 is simplified.

EXAMPLE six

The present embodiment provides an evaporation machine, including a driving mechanism and the back plate as described in any one of the first to fifth embodiments, wherein an output end of the driving mechanism is connected to the back plate to drive the back plate to move.

In this embodiment, the driving mechanism may be a hydraulic driving mechanism or a pneumatic driving mechanism, for example, and the driving mechanism may be provided in plural, and the plural driving mechanisms are uniformly distributed on the back plate to provide uniform and stable pressure to the back plate. The output of the drive mechanism may be connected to the back plate by, for example, a linkage arrangement or the like.

The coating by vaporization machine that this embodiment provided owing to adopted the backplate in above-mentioned embodiment, consequently still can guarantee the pressure distribution condition on the whole backplate body after long-time the use, can reduce the probability of backplate local deformation to guarantee that the coating by vaporization machine has stable production yield.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

It should be noted that the terms "first" and "second" in the description of the present invention are used merely for convenience in describing different components, and are not to be construed as indicating or implying a sequential relationship, relative importance, or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The utility model provides a backplate, its characterized in that includes the backplate body, be equipped with a plurality of installation departments on the backplate body, at least part detachable is provided with the balancing weight in the installation department.

2. The backplate of claim 1, wherein the mounting portion comprises a groove, through-hole, or annular groove disposed on the backplate body.

3. The back plate of claim 2, wherein the through hole is a stepped hole, the weight member includes a base and a protrusion provided on the base, the protrusion is insertable into the small diameter section of the stepped hole, and the base is insertable into the large diameter section of the stepped hole and overlaps an end surface of the small diameter section of the stepped hole.

4. A backplate according to claim 2 in which the inner surface of the mounting portion is provided with a sliding groove and the weight member is slidably disposed within the mounting portion.

5. A backplate according to any one of claims 1 to 4 in which a plurality of the mounting portions form at least one annular formation which is arranged concentrically with the backplate body.

6. The backplate of claim 5, wherein a plurality of the mounting portions form a plurality of concentric annular structures of similar shape and different sizes, and the annular structures are spaced apart by the same distance.

7. The backplate of claim 5, wherein the plurality of mounting portions form a plurality of concentric annular structures of similar shape and different sizes, and the distance between two adjacent annular structures decreases from the center of the backplate body to the edge of the backplate body.

8. A backplate according to claim 5 in which the backplate body comprises a central region and an edge region surrounding the central region, the mounting portions being distributed over the edge region of the backplate body;

preferably, a plurality of the mounting parts form at least two concentric annular structures with similar shapes and different sizes or a plurality of the mounting parts surround to form an annular structure.

9. A backplate according to any one of claims 1 to 4 in which the material of the weight comprises a non-magnetic metal or alloy.

10. An evaporation machine, comprising a driving mechanism and the back plate as claimed in any one of claims 1 to 9, wherein the output end of the driving mechanism is connected to the back plate to drive the back plate to move.

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