CN111502992A - Low-energy-consumption zero-emission intelligent vacuum siphon system - Google Patents
Low-energy-consumption zero-emission intelligent vacuum siphon system Download PDFInfo
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- CN111502992A CN111502992A CN202010357894.5A CN202010357894A CN111502992A CN 111502992 A CN111502992 A CN 111502992A CN 202010357894 A CN202010357894 A CN 202010357894A CN 111502992 A CN111502992 A CN 111502992A
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- Prior art keywords
- condensation
- separation
- vacuum pump
- machine
- siphon
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
- F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
- F04C19/005—Details concerning the admission or discharge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
The invention discloses a low-energy-consumption zero-emission intelligent vacuum siphoning system which comprises a vacuum pump, a condensation and separation all-in-one machine and an integrated control system, wherein an air suction port of the vacuum pump is connected with siphoned equipment through a check valve, a water inlet and an air outlet of the vacuum pump are respectively connected with the condensation and separation all-in-one machine, the condensation and separation all-in-one machine provides circulating working liquid of the vacuum pump, and after liquid-liquid mixed gas exhausted by the vacuum pump is separated, the liquid is continuously recycled, and the gas is exhausted. The water inlet of the vacuum pump is connected with the condensation and separation all-in-one machine through a working liquid water inlet pipeline, a temperature sensor is arranged on the working liquid water inlet pipeline, a ball float valve is installed in the condensation and separation all-in-one machine, and the ball float valve feeds back detected liquid level signals to the integrated control system. The invention has the advantages of high automation degree, high reliability, high efficiency, low energy consumption, zero emission and the like.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of vacuum systems, in particular to a low-energy-consumption zero-emission intelligent vacuum siphon system.
[ background of the invention ]
Vacuum siphon system, the tradition design is open direct vent or closed-loop water ring vacuum unit generally, and the direct vent vacuum unit directly discharges the cooling working solution that supplies with the vacuum pump at the actual motion in-process and can waste a large amount of water resources, and closed-loop water ring vacuum unit need provide cooling working solution for the vacuum pump heat exchanger at the actual motion in-process, has increased investment cost and running cost, has not played energy-concerving and environment-protective, simple installation convenient effect.
[ summary of the invention ]
In view of this, in order to overcome the defects in the prior art, the invention provides a low-energy-consumption zero-emission intelligent vacuum siphon system, which adopts the technologies of natural cooling and cooling fan compensation, and transmits the information of judgment and detection to a vacuum device through a control system execution instruction, thereby realizing the effects of low energy consumption and zero emission.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the utility model provides a low energy consumption zero release intelligence vacuum siphon system, includes vacuum pump, condensation separation all-in-one and integrated control system, the induction port of vacuum pump passes through the check valve and is connected by siphon equipment, the water inlet and the gas vent of vacuum pump respectively with condensation separation all-in-one is connected, condensation separation all-in-one provides vacuum pump circulation working solution, and right after the gas-liquid mixture gas of vacuum pump combustion gas separates, liquid continues to circulate and uses, gas outgoing.
The water inlet of the vacuum pump is connected with the condensation and separation all-in-one machine through a working fluid water inlet pipeline, a temperature sensor is arranged on the working fluid water inlet pipeline, a float valve is installed in the condensation and separation all-in-one machine, and the temperature sensor and the float valve are connected with the integrated control system through lines respectively, so that automatic control is realized.
And the exhaust port of the vacuum pump is connected with the condensation and separation all-in-one machine through an exhaust pipeline.
And a total water replenishing valve and a starting water replenishing valve are further installed on the working liquid water inlet pipeline, the total water replenishing valve is a normally open valve, one end of the total water replenishing valve is connected with an external water supply pipe, the other end of the total water replenishing valve is connected with a ball float valve in the condensation and separation integrated machine, and the ball float valve feeds back a detected liquid level signal to the integrated control system.
And the outer side of the condensation and separation integrated machine is also respectively provided with a main drain valve, an overflow port and a main exhaust port.
And a heat dissipation pipeline penetrating through the end face is distributed in the middle of the condensation and separation all-in-one machine, and a cooling compensation fan is arranged outside the heat dissipation pipeline.
And the exhaust pipeline is connected with a cavitation protection pipe which is in a PP pipe structure and is used for preventing the cavitation of the flow passage component in the vacuum pump.
The condensation separation all-in-one is the steel sheet shaping, provides vacuum pump circulation working solution to after separating the vacuum pump combustion gas-liquid mixture, liquid continues the recycle, and gas is discharged through total gas vent, and the condensation separation all-in-one intermediate distribution runs through the thin wall steel pipe (or copper pipe) of the nature heat dissipation of terminal surface, and when working solution temperature was higher than vacuum pump work and also set up the temperature, the cooling compensation fan of heat dissipation pipeline outside installation starts the cooling, and the cooling compensation fan is connected with control system respectively and is used for realizing automated control.
Furthermore, the integrated control system is installed in the integrated case and is connected with a siphon system intelligent display, and the siphon system intelligent display is embedded on a panel of the integrated case.
And the intelligent siphon system display is also provided with a visual panel for displaying the running state of the equipment and real-time numerical values of various monitoring positions.
The siphon system intelligent display is also respectively connected with the mobile phone module and the vacuum siphon controller through an external interface and a circuit.
One end of the mobile phone module is connected with the intelligent siphon system display, and the other end of the mobile phone module realizes on-line monitoring or control of a mobile phone through short message service.
One end of the vacuum siphon controller is connected with the siphon system intelligent display, and the other end of the vacuum siphon controller is connected with the remote control system, so that remote monitoring and control are realized.
The working principle of the invention is as follows: before starting for the first time, manually supplementing water to the condensation and separation all-in-one machine to a set liquid level, after a vacuum pump receiving a control instruction is automatically started to pump out gas in siphoned equipment, the gas is discharged to the condensation and separation all-in-one machine for gas-liquid separation through an exhaust pipeline, the liquid continues to circulate internally, the gas is discharged, a temperature sensor on a working fluid water inlet pipeline senses that the temperature of circulating working fluid is higher than a set value, a detection device transmits a signal to an integrated control system, the integrated control system executes an instruction to transmit information for judgment and detection to a cooling compensation fan for cooling, and the cooling compensation fan stops running after the temperature is reduced to a lower temperature value at which the vacuum pump can work.
Further, the integrated control system executes an instruction to the vacuum pump, the vacuum pump operates, when the liquid level is low or the temperature of the working liquid exceeds a set value, the ball float valve automatically opens water supplement, and the cooling compensation fan is started; when the liquid level rises to a specified position or the temperature of the working liquid drops to a set value, the ball float valve automatically closes to stop water supply, and the cooling compensation fan stops running.
When the water replenishing valve breaks down and the liquid level is higher than the designated highest position, redundant working liquid automatically overflows through the overflow port, so that the vacuum pump is protected, and overcurrent is prevented.
When the vacuum of the vacuum pump reaches the limit vacuum, the added cavitation protection tube can prevent the cavitation of the overflowing part in the pump.
The invention has the advantages of low energy consumption, zero emission, high automation degree, high reliability and high efficiency, can be automatically put into and shut down according to process design, and can prevent manual operation, high energy consumption, high installation cost, high later maintenance cost and the like.
[ description of the drawings ]
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic diagram of the intelligent control of the present invention.
Fig. 3 is a schematic operation flow diagram of the present invention.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 2, the low-energy-consumption zero-emission intelligent vacuum siphon system comprises a vacuum pump 2, a condensation and separation all-in-one machine 6 and an integrated control system 01, and is further provided with a check valve 1, a starting water replenishing valve 3, a working fluid water inlet pipeline 31, a total water replenishing valve 4, a ball float valve 5, a cooling compensation fan 7, a total drain valve 8, an overflow port 9, a total exhaust port 10, a vacuum pump exhaust pipeline 11, a cavitation protection pipe 12 and a temperature sensor 13.
The suction port of the vacuum pump 2 is connected with siphoned equipment through a check valve 1, the water inlet and the exhaust port of the vacuum pump 2 are respectively connected with the condensation and separation all-in-one machine 6, the condensation and separation all-in-one machine 6 provides circulating working liquid for the vacuum pump 2, and after the mixed gas of the gas and the liquid discharged from the vacuum pump 2 is separated, the liquid is continuously recycled, and the gas is discharged through a total exhaust port 10.
The water inlet of the vacuum pump 2 is connected with the condensation and separation all-in-one machine 6 through a working fluid water inlet pipeline 31, a temperature sensor 13 is arranged on the working fluid water inlet pipeline 31, a float valve 5 is installed in the condensation and separation all-in-one machine 6, the temperature sensor 13 and the float valve 5 are respectively connected with the integrated control system 01 through lines, and automatic control is achieved.
Working solution inlet pipe 31, one end is connected with the mouth of a river is mended to vacuum pump 2, and the other end is connected with condensation separation all-in-one 6, installs temperature sensor 13 on the working solution inlet pipe 31, and the working solution can supply with 2 inner loop of vacuum pumps and use, and temperature sensor 13 passes to integrated control system 01 through detecting the signal after feeding back, integrated control system 01 executive instruction is cooling compensation fan 7, the accurate operation of adjustable actuating mechanism for the information transfer that the judgement detected.
The total water replenishing valve 4 and the starting water replenishing valve 3 are installed on the working liquid water inlet pipeline 31, the total water replenishing valve 4 is a normally open valve, one end of the total water replenishing valve is connected with an outer water supply pipe, the other end of the total water replenishing valve is connected with the condensation and separation all-in-one machine 6, the total water replenishing valve 4 is used for manually replenishing water to the condensation and separation all-in-one machine 6 before being started for the first time, the water replenishing quantity in the pump is determined before the starting water replenishing valve 3 is started for the.
One end of the ball float valve 5 is connected with the total water replenishing valve 4, and the other end of the ball float valve is installed in the condensation and separation all-in-one machine 6 and used for controlling the liquid level, detecting feedback and sending signals to the integrated control system 01.
Referring to fig. 2, an integrated control system 01 is installed in an integrated chassis and connected with a siphon system intelligent display 02, and the siphon system intelligent display 02 is embedded on a panel of the integrated chassis. And a touch key is arranged on the intelligent siphon system display 02 and used for setting parameters and browsing the running records of the equipment. And a visual panel for displaying the running state of the equipment and real-time numerical values of various monitoring positions is also arranged on the intelligent siphon system display 02.
Siphon system intelligent display 02 still is provided with seven external interfaces, including following interfaces: the system comprises a field bus interface a, a Modbus protocol b, a mobile phone module c, a local area network d, the Internet e, a vacuum siphon controller e and a USB interface f.
One end of the field bus interface a is connected with the siphon system intelligent display 02, and the other end is connected with the integrated control system 01, and the field bus interface a is provided with an optional expansion card for collecting and feeding back instructions.
One end of the mobile phone module c is connected with the intelligent siphon system display 02, and the other end of the mobile phone module c can realize the on-line monitoring or operation of the mobile phone through the short message service.
One end of the vacuum siphon controller e is connected with the intelligent siphon system display 02, and the other end of the vacuum siphon controller e can be connected with a remote control system, so that remote start-stop, remote pressure regulation, operation, fault alarm and protection shutdown can be realized.
One end of the USB interface f is connected with the intelligent siphon system display 02, and the other end of the USB interface f can be connected with a local interface or a computer for modifying programs or parameters.
As shown in fig. 3, the working principle and process of the present invention are:
s1, opening a total water replenishing valve 4, manually replenishing water, and condensing and separating the liquid level of the integrated 6-machine to a specified position;
s2, starting the water replenishing valve 3 to be opened, manually replenishing water, replenishing three liters of working fluid in the vacuum pump 2, and closing the valve;
s3, the integrated control system 01 executes the instruction, and the vacuum pump 2 is started;
s4, when the temperature of the working fluid is higher than the set upper limit, the cooling compensation fan 7 is turned on; when the temperature of the working fluid reaches a set lower limit, the cooling compensation fan 7 is stopped;
s5, when the working liquid level is lower than the set lower limit, the ball float valve 5 is opened to supplement water; when the working liquid level reaches the set upper limit, the ball float valve 5 is closed to stop water supply; the working liquid level is higher than the upper limit, and the working liquid automatically overflows through the overflow port 9, so that the vacuum pump 2 is protected, and overcurrent is prevented.
When the vacuum of the vacuum pump 2 reaches the limit vacuum, the added cavitation protection tube 12 can prevent the cavitation of the flow passage component in the pump.
The starting water replenishing valve 3 is opened to replenish water for the vacuum pump 2 for three liters when the vacuum pump 2 is started for the first time, when the temperature of the working fluid is higher than that of the working fluid of the vacuum pump 2 and is set to 45 ℃, the cooling compensation fan 7 installed on the outer side of the heat dissipation pipeline is started to cool, and when the temperature of the working fluid is reduced to that of the working fluid of the vacuum pump 2 and is set to 25 ℃ which is the normal temperature, the cooling compensation fan 7 installed on the outer side of the heat dissipation pipeline stops.
In summary, the invention adopts the technology of natural cooling and cooling fan compensation, and the information of judgment and detection is transmitted to the vacuum device through the control system executing instructions, thereby realizing the effects of low energy consumption and zero emission. The automatic control system has the advantages of high automation degree, high reliability, high efficiency, low energy consumption, zero emission and the like.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A low-energy-consumption zero-emission intelligent vacuum siphon system is characterized by comprising a vacuum pump, a condensation and separation all-in-one machine and an integrated control system, wherein an air suction port of the vacuum pump is connected with siphoned equipment through a check valve, a water inlet and an air exhaust port of the vacuum pump are respectively connected with the condensation and separation all-in-one machine, the condensation and separation all-in-one machine provides circulating working liquid of the vacuum pump, and after liquid-liquid mixed gas exhausted by the vacuum pump is separated, the liquid is continuously recycled, and the gas is exhausted;
the water inlet of the vacuum pump is connected with the condensation and separation all-in-one machine through a working fluid inlet pipeline, a temperature sensor is arranged on the working fluid inlet pipeline, a float valve is installed in the condensation and separation all-in-one machine, and the temperature sensor and the float valve are respectively connected with the integrated control system through lines;
an exhaust port of the vacuum pump is connected with the condensation and separation integrated machine through an exhaust pipeline;
and a total water replenishing valve and a starting water replenishing valve are further installed on the working liquid water inlet pipeline, the total water replenishing valve is a normally open valve, one end of the total water replenishing valve is connected with an external water supply pipe, the other end of the total water replenishing valve is connected with a ball float valve in the condensation and separation integrated machine, and the ball float valve feeds back a detected liquid level signal to the integrated control system.
2. The low-energy-consumption zero-emission intelligent vacuum siphon system according to claim 1, wherein a main drain valve, an overflow port and a main exhaust port are respectively installed on the outer side of the condensation and separation integrated machine.
3. The system of claim 1, wherein a heat dissipation pipeline penetrating through an end face is distributed in the middle of the condensation and separation all-in-one machine, and a cooling compensation fan is installed outside the heat dissipation pipeline.
4. The system according to claim 1, wherein a cavitation protection tube is connected to the exhaust pipeline, and the cavitation protection tube is a PP tube structure.
5. The system of claim 1, wherein the integrated control system is installed in an integrated chassis and is connected with a siphon system smart display, and the siphon system smart display is embedded on a panel of the integrated chassis.
6. The system of claim 5, wherein a visual panel is further provided on the intelligent siphon system display to display the operating status of the equipment and the real-time values of various monitoring locations.
7. The system of claim 5, wherein the siphon system intelligent display is further connected with the mobile phone module and the vacuum siphon controller through an external interface and a line.
8. The system of claim 7, wherein one end of the mobile phone module is connected to the siphon system intelligent display, and the other end of the mobile phone module is used for realizing mobile phone online monitoring or operation through short message service.
9. The system of claim 7, wherein the vacuum siphon controller is connected to the siphon system intelligent display at one end and to a remote control system at another end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010357894.5A CN111502992A (en) | 2020-04-29 | 2020-04-29 | Low-energy-consumption zero-emission intelligent vacuum siphon system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010357894.5A CN111502992A (en) | 2020-04-29 | 2020-04-29 | Low-energy-consumption zero-emission intelligent vacuum siphon system |
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| CN111502992A true CN111502992A (en) | 2020-08-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010357894.5A Pending CN111502992A (en) | 2020-04-29 | 2020-04-29 | Low-energy-consumption zero-emission intelligent vacuum siphon system |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03279693A (en) * | 1990-03-28 | 1991-12-10 | Ngk Insulators Ltd | Vacuum unit |
| JP2004132328A (en) * | 2002-10-15 | 2004-04-30 | Awamura Mfg Co Ltd | Evacuation equipment |
| CN101691858A (en) * | 2009-09-22 | 2010-04-07 | 博山精工泵业有限公司 | Self-condensing gas-water separating device of water-ring vacuum pump set |
| CN205401121U (en) * | 2016-03-07 | 2016-07-27 | 杭州非耀真空设备有限公司 | Air -cooled self -loopa water ring vacuum pump unit |
| CN106523367A (en) * | 2016-12-20 | 2017-03-22 | 合肥中辰轻工机械有限公司 | Vacuum pump water conservation control device based on cooling coil |
| CN208059608U (en) * | 2018-02-02 | 2018-11-06 | 苏州艾嘉亚真空科技有限公司 | Cryogenic heat exchanger water ring pumped vacuum systems |
| CN208982281U (en) * | 2018-09-06 | 2019-06-14 | 大唐陕西发电有限公司 | A kind of Seal Oil vacuum system |
| CN209724661U (en) * | 2019-04-29 | 2019-12-03 | 山东精工泵业有限公司 | Roots Vacuum Pump Units |
| CN209990642U (en) * | 2019-01-28 | 2020-01-24 | 钱飞 | Device for cooling vacuum pump cooling liquid and separating waste gas |
-
2020
- 2020-04-29 CN CN202010357894.5A patent/CN111502992A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03279693A (en) * | 1990-03-28 | 1991-12-10 | Ngk Insulators Ltd | Vacuum unit |
| JP2004132328A (en) * | 2002-10-15 | 2004-04-30 | Awamura Mfg Co Ltd | Evacuation equipment |
| CN101691858A (en) * | 2009-09-22 | 2010-04-07 | 博山精工泵业有限公司 | Self-condensing gas-water separating device of water-ring vacuum pump set |
| CN205401121U (en) * | 2016-03-07 | 2016-07-27 | 杭州非耀真空设备有限公司 | Air -cooled self -loopa water ring vacuum pump unit |
| CN106523367A (en) * | 2016-12-20 | 2017-03-22 | 合肥中辰轻工机械有限公司 | Vacuum pump water conservation control device based on cooling coil |
| CN208059608U (en) * | 2018-02-02 | 2018-11-06 | 苏州艾嘉亚真空科技有限公司 | Cryogenic heat exchanger water ring pumped vacuum systems |
| CN208982281U (en) * | 2018-09-06 | 2019-06-14 | 大唐陕西发电有限公司 | A kind of Seal Oil vacuum system |
| CN209990642U (en) * | 2019-01-28 | 2020-01-24 | 钱飞 | Device for cooling vacuum pump cooling liquid and separating waste gas |
| CN209724661U (en) * | 2019-04-29 | 2019-12-03 | 山东精工泵业有限公司 | Roots Vacuum Pump Units |
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Application publication date: 20200807 |