CN111474825B - Photoetching machine motion track planning method and device, computer equipment and storage medium - Google Patents
Photoetching machine motion track planning method and device, computer equipment and storage medium Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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Abstract
The application relates to a method and a device for planning a motion trail of a photoetching machine, computer equipment and a storage medium. The method comprises the following steps: acquiring a preset planning value and a constraint condition of a preset motion track; determining the initial duration of the jerk in the preset motion trail according to the preset planning value and the three-order scanning motion trail profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage; processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track; determining an objective function relation of jerk and time according to the target duration and the initial function relation of jerk and time in the three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. By adopting the method, the motion precision and the photoetching precision of the photoetching machine can be improved.
Description
Technical Field
The present application relates to the field of integrated circuit technologies, and in particular, to a method and an apparatus for planning a motion trajectory of a lithography machine, a computer device, and a storage medium.
Background
With the improvement of the processing density and the increase of the integration level of the integrated circuit, the requirement of the workbench of the photoetching machine on the precision of motion control is higher and higher, and the precision of the motion control is directly determined by the trajectory planning of the photoetching machine. In the photolithography process of the stepper, a mask plate and a wafer are respectively arranged on a mask stage (reticle stage) and a wafer stage (wafer stage). When exposure is carried out, the mask plate and the wafer move to the specified positions, and the light source is turned on; after light passes through the mask plate, the light passes through the lens, the lens can reduce the circuit pattern to one fourth of the original circuit pattern, and then the circuit pattern is projected onto a wafer to enable the photoresist to be partially photosensitive; during photoetching, the mask plate and the bearing wafer move simultaneously, so that light rays scan a bare area (die) of a silicon wafer in a scanning mode, and a circuit pattern is engraved on the wafer. The motion track has certain impact on the system, and exposure can be carried out only when the vibration amplitude of the system is smaller than a certain threshold value. However, after the lithography machine accelerates to the maximum speed according to the current motion trajectory, the vibration amplitude is large, the convergence time is long, and the motion precision and the lithography precision of the lithography machine are low.
Disclosure of Invention
In view of the above, it is necessary to provide a method, an apparatus, a computer device and a storage medium for planning a motion trajectory of a lithography machine, which can improve the motion accuracy of the lithography machine and the lithography accuracy.
A method for planning a motion trail of a photoetching machine, comprising the following steps:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion trail according to the preset planning value and the three-order scanning motion trail profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage;
processing the initial duration according to the constraint condition to obtain a target duration of the jerk in the preset motion trail;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
In one embodiment, the preset planning values include a maximum jerk, a maximum acceleration, an initial velocity, a maximum velocity, and a target displacement of the preset motion trajectory.
In one embodiment, the constraint condition includes a maximum jerk constraint, a constant velocity segment acceleration constraint, a constant velocity segment speed constraint, a displacement constraint, and a vibration constraint corresponding to the preset motion trajectory.
In one embodiment, before the determining the initial duration of the jerk in the preset motion trajectory according to the preset planning value and the third-order scanning motion trajectory profile, the method further includes:
detecting whether the product value of the maximum speed and the maximum jerk is larger than the square value of the maximum acceleration;
when the product value of the maximum speed and the maximum jerk is greater than the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion trajectory according to the preset planning value and the profile of the three-order scanning motion trajectory, including:
determining the initial duration of the jerk in the preset motion track according to the maximum speed, the maximum jerk, the maximum acceleration and the profile of the three-order scanning motion track;
when the product value of the maximum speed and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion trajectory according to the preset planning value and the profile of the three-order scanning motion trajectory, including:
and determining the initial duration of the turning point of the acceleration in the preset motion track according to the maximum acceleration, the maximum jerk and the three-order scanning motion track profile.
In one embodiment, the determining an initial duration of jerk in the preset motion profile according to the maximum speed, the maximum jerk, the maximum acceleration, and the third-order scanning motion profile includes:
determining the initial duration of the acceleration stage and the deceleration stage in the preset motion track as the ratio of the maximum acceleration to the maximum acceleration according to the maximum speed, the maximum acceleration and the profile of the three-order scanning motion track; the initial duration of the jerk of the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk of the uniform acceleration motion stage in the preset motion track is zero.
In one embodiment, the determining an initial duration of jerk in the preset motion profile according to the maximum acceleration, the maximum jerk, and the third-order scanning motion profile includes:
determining the initial duration of the jerk of the acceleration motion stage and the deceleration motion stage in the preset motion track as the square root of the maximum speed and the maximum jerk according to the maximum jerk, the maximum acceleration and the profile of the three-order scanning motion track; and the initial duration of the jerk of the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion trail is zero.
In one embodiment, the processing the initial duration according to the constraint condition, and determining the target duration of the jerk in the preset motion trajectory includes:
and processing the initial time length by using a gradient descent method according to the constraint condition, and determining the target time length of the jerk in the preset motion track.
A lithography machine motion trajectory planning device, the device comprising:
the acquisition module is used for acquiring a preset planning value and a constraint condition of a preset motion track;
the first determining module is used for determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage;
the processing module is used for processing the initial duration according to the constraint condition to obtain a target duration of the jerk in the preset motion track;
the second determining module is used for determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and the integration module is used for determining a curve of the displacement of the preset motion track along with the change of time by calculating triple integration of the objective function relation.
A computer device comprising a memory and a processor, the memory storing a computer program, the processor implementing the following steps when executing the computer program:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage;
processing the initial duration according to the constraint condition to obtain a target duration of the jerk in the preset motion trail;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
A computer-readable storage medium, on which a computer program is stored which, when executed by a processor, carries out the steps of:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage;
processing the initial duration according to the constraint condition to obtain a target duration of the jerk in the preset motion trail;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
The photoetching machine motion trail planning method, the photoetching machine motion trail planning device, the computer equipment and the storage medium acquire the preset planning value and the constraint condition of the preset motion trail; determining the initial duration of the jerk turning point corresponding to the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage. Processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track; determining an objective function relation of the jerk and the time according to the target time value set and the initial function relation of the jerk and the time in the three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. Optimizing the initial time of the acceleration in the preset motion track of the photoetching machine through the preset planning value and the constraint condition of the preset motion track planning of the photoetching machine to obtain the target time, so that the target time is the minimum, and under the condition of meeting the constraint condition, improving the motion precision and the photoetching precision of the photoetching machine by shortening the motion time of the photoetching machine.
Drawings
FIG. 1 is a diagram illustrating an internal structure of a computer device according to an embodiment;
FIG. 2 is a schematic flow chart diagram of a method for planning a motion trajectory of a lithography machine in one embodiment;
FIG. 3 is a schematic flow chart diagram of a method for planning a motion trajectory of a lithography machine in another embodiment;
FIG. 4 is a diagram illustrating a predetermined movement trajectory of the lithography machine according to an embodiment;
FIG. 5 is a diagram illustrating a general motion trajectory of a lithography machine in one embodiment;
FIG. 6 is a schematic diagram of a preset motion trajectory of the lithography machine in one embodiment;
FIG. 7 is a block diagram of an embodiment of an apparatus for planning a motion trajectory of a lithography machine;
FIG. 8 is a block diagram of a motion trajectory planning apparatus of a lithography machine in another embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad application.
The method for planning the motion trail of the photoetching machine can be applied to the terminal shown in FIG. 1. In one embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as shown in fig. 1. The computer device includes a processor, a memory, a communication interface, a display screen, and an input device connected by a system bus. Wherein the processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device comprises a nonvolatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operating system and the computer program to run on the non-volatile storage medium. The communication interface of the computer device is used for carrying out wired or wireless communication with an external terminal, and the wireless communication can be realized through WIFI, an operator network, NFC (near field communication) or other technologies. The computer program is executed by a processor to realize a motion trail planning method of the photoetching machine. The display screen of the computer equipment can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer equipment can be a touch layer covered on the display screen, a key, a track ball or a touch pad arranged on a shell of the computer equipment, an external keyboard, a touch pad or a mouse and the like.
Those skilled in the art will appreciate that the architecture shown in fig. 1 is merely a block diagram of some of the structures associated with the disclosed aspects and is not intended to limit the computing devices to which the disclosed aspects apply, as particular computing devices may include more or less components than those shown, or may combine certain components, or have a different arrangement of components.
In an embodiment, as shown in fig. 2, a method for planning a motion trajectory of a lithography machine is provided, and is described by taking the method as an example of being applied to a terminal in fig. 1, it is to be understood that the method may also be applied to a server, and may also be applied to a system including the terminal and the server, and is implemented through interaction between the terminal and the server. In this embodiment, the method includes the steps of:
The preset motion track refers to an exposure motion process of the lithography machine planned according to a preset planning value and a constraint condition. The exposure motion process of the lithography machine can be realized by accelerating the mask table and the wafer table of the lithography machine from a set initial speed to a maximum constant speed. The preset planning values may include a maximum jerk, a maximum acceleration, an initial velocity, a maximum velocity, a target displacement, and the like of the preset motion trajectory. The constraint conditions may include a maximum jerk constraint, a constant velocity segment acceleration constraint, a constant velocity segment speed constraint, a displacement constraint, a vibration constraint, and the like corresponding to the preset motion trajectory.
Specifically, a track instruction of a preset motion track is received by the photoetching machine, and the track instruction carries a preset planning value and a constraint condition of the preset motion track; and the photoetching machine accelerates from the initial speed to the maximum constant speed to complete the exposure movement according to the preset planning value and the constraint conditions of the maximum acceleration constraint, the constant speed section speed constraint, the displacement constraint and the vibration constraint.
Step 204, determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the third-order scanning stage track profile comprises a third-order scanning stage track profile which comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage. The acceleration stage, the uniform acceleration stage, the deceleration stage and the uniform motion stage can generate corresponding vibration amplitudes.
The acceleration is obtained by solving first order differential of the acceleration, and the acceleration is a vector; jerk may be used to describe the impact of lithographic acceleration changes on the electromechanical system. The jerk can be jerk in jerk motion stage, jerk in uniform acceleration motion stage, jerk in deceleration motion stage or jerk in uniform velocity motion stage; the initial duration of the jerk may be a motion duration of the jerk phase, and a motion duration of the uniform motion phase. The preset motion track comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage.
Specifically, the photoetching machine corresponds to different accelerations at different motion stages in a preset track, the corresponding jerk can be determined by differentiating the accelerations, the photoetching machine generates different vibration amplitudes along with the change of the jerk in the preset track, and when the vibration amplitudes are smaller than a preset convergence value after being converged for a period of time, the photoetching machine starts exposure; wherein the predetermined convergence value can be an error band amplitude allowed by the lithography machine. Determining the initial time length corresponding to each accelerated speed of the accelerated speed of an accelerated motion stage, the accelerated speed of a uniform accelerated motion stage, the accelerated speed of an accelerated speed reduction stage or the accelerated speed of a uniform motion stage in the preset motion track according to the preset planning value and the three-order scanning motion track profile of the photoetching machine, and determining the initial convergence time length of the photoetching machine according to the initial time length.
And step 206, processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion trail.
The constraint conditions may include maximum jerk constraint, maximum acceleration constraint, constant velocity segment velocity constraint, displacement constraint and vibration constraint corresponding to the preset motion trajectory.
The maximum jerk constraint means that the absolute value of jerk in an acceleration motion stage and the absolute value of jerk in an acceleration motion stage in a preset motion track are less than or equal to the maximum jerk; the maximum jerk constraint may be expressed as:
|j 1 |≤j max
|j 2 |≤j max
wherein, | j 1 | represents the absolute value of jerk as the jerk phase of jerk motion, | j 2 | is expressed as addition of decreasing acceleration motion phaseAbsolute value of velocity, j max Expressed as maximum jerk.
The maximum acceleration constraint is that the product of the jerk phase and the duration of the jerk phase is less than or equal to the maximum acceleration. The maximum acceleration constraint can be expressed as:
|j 2 |×T 1 ≤a max
wherein, | j 1 L is expressed as the absolute value of jerk, T, of the jerk phase 1 Expressed as the duration of the accelerated motion phase, a max Expressed as maximum acceleration.
The acceleration constraint of the uniform velocity section is that the sum of the product of the acceleration and the corresponding duration of the acceleration motion stage and the product of the acceleration and the corresponding duration of the deceleration and acceleration motion stage in the preset motion trail is zero. The constant velocity segment acceleration constraint may be expressed as:
j 1 ×T 1 +j 2 ×T 3 ＝0
wherein j is 1 Shown as jerk, j, of jerk motion phase 2 Jerk, T, expressed as a phase of jerk motion 1 Expressed as the duration of the accelerated motion phase, T 3 Indicated as decreasing the duration of the acceleration movement phase.
The constant speed segment speed constraint is that the following relation is satisfied when the initial speed and the jerk in the acceleration motion stage in the preset motion track and the jerk in the preset motion track are added:
wherein j is 1 Shown as jerk, v, of jerk motion phase 0 Is an initial velocity, v aim For the target speed, the target speed may be a maximum speed, t 1 Expressed as the duration of the accelerated motion phase, t 2 Expressed as the duration from the jerk phase to the end of the jerk phase, t 3 The duration from the plus acceleration phase to the end of the minus acceleration phase.
The displacement constraint may be represented by the following relationship:
wherein T is the time length from the accelerated motion stage to the end of the uniform motion stage, v 0 Is the initial velocity, t 1 Expressed as the duration of the accelerated motion phase, t 3 For the duration from the accelerated motion phase to the end of the accelerated motion phase, t 4 Expressed as the time duration from the accelerated motion phase to the end of the uniform motion phase, and p is expressed as the target displacement.
The vibration constraints can be represented by either of the following two relationships:
wherein, the first and the second end of the pipe are connected with each other,
expressed as the estimated displacement at the completion of the planning, p denotes target displacement, based on>
Representing the estimated speed at the completion of planning, epsilon representing the allowable error, omega n The resonant frequency is shown as the resonant frequency of the photoetching machine, and the resonant frequency of different types of photoetching machines is different.
Specifically, when the jerk duration in the preset motion trajectory simultaneously satisfies the constraint condition, the initial jerk duration in the preset motion trajectory is processed by using an optimization algorithm, an optimal solution with the shortest jerk duration in the preset motion trajectory is obtained, and a target jerk duration in the preset motion trajectory is obtained, so that the shortest jerk duration in the photoetching machine from an acceleration motion stage to a uniform motion stage can be determined. The optimization algorithm may include a random gradient descent method, a random coordinate descent method, and the like.
And step 208, determining an objective function relation of the jerk and the time according to the target duration and the initial functional relation of the jerk and the time in the three-order scanning motion track profile.
Specifically, according to the initial functional relation between the Jerk and the time in the target duration and the profile of the three-order scanning motion track, the target functional relation between the Jerk and the time is determined to be Jerk (t).
Specifically, a triple integral of the objective function relation is calculated to obtain a function relation Pos (t) of displacement and time, and a curve of the displacement of the preset motion trajectory along with the change of time can be determined according to the function relation of the displacement and the time. Wherein, the displacement versus time Pos (t) can be expressed as:
Pos(t)＝∫∫∫Jerk(t)dt
optionally, a function relation of acceleration and time is obtained by calculating a double integral of the objective function relation, and a curve of the acceleration of the preset motion trajectory along with time may be determined according to the function relation of acceleration and time, where the function relation Acc (t) of acceleration and time may be represented as:
Acc(t)＝∫Jerk(t)dt
obtaining a function relation of the acceleration and the time by calculating a double integral of the objective function relation, and determining a curve of the change of the acceleration of the preset motion track along with the time according to the function relation of the acceleration and the time, wherein a function relation Vel (t) of the acceleration and the time can be expressed as:
Vel(t)＝∫∫Jerk(t)dt
in the photoetching machine motion trail planning method, a preset planning value and a constraint condition of a preset motion trail are obtained; determining the initial duration of the jerk turning point corresponding to the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage. Processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track; determining an objective function relation of jerk and time according to a target time value set and an initial function relation of jerk and time in a three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. Optimizing the initial duration of the acceleration in the preset motion track of the photoetching machine through the preset planning value and the constraint condition of the preset motion track planning of the photoetching machine to obtain the target duration with the shortest duration of the vibration amplitude convergence from the acceleration motion stage to the uniform motion stage of the photoetching machine in the motion process, namely, converging the vibration amplitude by shortening the motion time of the photoetching machine under the condition of meeting the constraint condition, and further improving the motion precision and the photoetching precision of the photoetching machine.
In another embodiment, as shown in fig. 3, a method for planning a motion trajectory of a lithography machine is provided, which is described by taking the method applied to the terminal in fig. 1 as an example, and includes the following steps:
step 302, obtaining a preset planning value and a constraint condition of a preset motion trajectory, where the preset planning value includes a maximum jerk, a maximum acceleration, an initial speed, a maximum speed, and a target displacement of the preset motion trajectory.
Specifically, the shape of the jerk in the preset motion trajectory may be determined according to the magnitude relationship between the product value of the maximum velocity and the maximum jerk and the square value of the maximum acceleration, and the calculation mode of the initial duration of the jerk in the preset motion trajectory may be determined according to the different shapes of the jerk.
Wherein the maximum speed V max With maximum jerk j max Is greater than the maximum acceleration a max The expression of the square value of (b) can be expressed as:
V max *j max >a max *a max
and step 306, determining the initial duration of the jerk in the preset motion track according to the maximum speed, the maximum jerk, the maximum acceleration and the three-order scanning motion track profile.
In one embodiment, determining an initial duration of jerk in a preset motion profile based on a maximum velocity, a maximum jerk, a maximum acceleration, and a third order scanning motion profile comprises:
determining the initial duration of the accelerated speeds of an accelerated motion stage and an accelerated motion stage in the preset motion track as the ratio of the maximum accelerated speed to the maximum accelerated speed according to the maximum speed, the maximum accelerated speed and the profile of the three-order scanning motion track; the initial duration of the jerk in the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk in the uniform velocity motion stage in the preset motion track is zero.
Specifically, according to the maximum velocity, the maximum jerk, the maximum acceleration and the profile of the third-order scanning motion trajectory, determining that the initial duration of the jerk of the acceleration motion phase and the deceleration motion phase in the preset motion trajectory is the ratio of the maximum acceleration to the maximum jerk may be represented as a max /j max (ii) a The difference between the initial duration of the jerk in the uniform acceleration motion phase in the preset motion trajectory and the ratio between the maximum speed and the maximum acceleration can be represented as V max /a max -a max /j max The initial duration of the jerk can be obtained according to the maximum speed, the maximum jerk, the maximum acceleration and the three-order scanning motion track profile, so that the calculation process is reduced, and the processing performance of a computer is improved.
And 308, determining the initial duration of the jerk in the preset motion track according to the maximum acceleration, the maximum jerk and the three-order scanning motion track profile.
In one embodiment, determining an initial duration of jerk in a preset motion profile based on the maximum acceleration, the maximum jerk, and the third order sweeping motion profile comprises:
determining the initial duration of the acceleration in the acceleration motion stage and the deceleration motion stage in the preset motion track as the square root of the maximum speed and the maximum acceleration according to the maximum acceleration, the maximum acceleration and the three-order scanning motion track profile; the initial duration of the jerk of the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion track is zero.
Wherein, the initial duration of the jerk in the jerk phase and the jerk phase is the square root of the maximum speed and the maximum jerk, and may represent sqrt (V) max /j max ) The initial duration of the jerk can be obtained according to the maximum jerk, the maximum acceleration and the three-order scanning motion track profile, the calculation of the initial duration is simplified, and the processing performance of a computer is improved.
And 310, processing the initial time length by using a gradient descent method according to the constraint condition, and determining the target time length of the jerk in the preset motion track.
The step length of initial duration optimization can be determined by a gradient descent method in the convex optimization algorithm. The gradient is a vector by calculating partial derivatives of parameters of the multivariate function to obtain partial derivatives in the form of vectors. The step length is the length of the advance along the negative direction of the gradient in the gradient descent iteration process, and can be obtained through a random function or set by a user.
Specifically, according to the constraint conditions, the step length λ of the initial duration optimization can be determined by a gradient descent method. According to the gradient
The direction of the moving object and the step length of the advancing in the negative gradient direction, and the acceleration of the preset motion trackAnd optimizing the initial duration of the acceleration, performing iterative solution on the duration of the jerk in the preset motion track to obtain an optimal solution of the duration of the jerk of the preset motion track when the constraint condition is met, and determining the target duration of the jerk in the preset motion track, wherein the optimal solution can be that the sum of the durations of all the jerks in the preset motion track is minimum.
The initial function relationship of the Jerk and the time is a linear function relationship, and an objective function relationship formula of the Jerk and the time in the preset motion track is determined to be Jerk (t) according to the target duration and the initial function relationship of the Jerk and the time in the three-order scanning motion track profile. The objective function relation can be used for describing the linear relation between the jerk and the time corresponding to each motion stage of the jerk stage, the uniform acceleration stage, the deceleration and acceleration stage and the uniform velocity stage in the preset motion track.
And step 314, determining a curve of the displacement of the preset motion track changing along with time by calculating triple integral of the objective function relation.
In the embodiment, by obtaining a preset planning value and a constraint condition of a preset motion trajectory, the preset planning value includes a maximum jerk, a maximum acceleration, an initial velocity, a maximum velocity and a target displacement of the preset motion trajectory, detecting whether a product value of the maximum velocity and the maximum jerk is greater than a square value of the maximum acceleration, and when the product value of the maximum velocity and the maximum jerk is greater than the square value of the maximum acceleration, determining an initial duration of the jerk in the preset motion trajectory according to the maximum velocity, the maximum jerk, the maximum acceleration and a three-order scanning motion trajectory profile; and when the product value of the maximum speed and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of the turning point of the jerk in the preset motion track according to the maximum acceleration, the maximum jerk and the profile of the three-order scanning motion track.
Determining the gradient and the step length of the initial duration optimization through a gradient descent method in a convex optimization algorithm, optimizing the initial duration according to the constraint condition, the gradient and the step length, and determining the target duration of the jerk in the preset motion track; determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. By optimizing the duration of the acceleration in the preset motion track, when the constraint condition is met, the target duration with the shortest duration of the vibration amplitude convergence from the acceleration motion stage to the uniform motion stage in the motion process of the photoetching machine is obtained, namely under the condition that the constraint condition is met, the vibration amplitude is converged to the maximum speed and is kept stable by shortening the motion time of the photoetching machine, exposure photoetching is carried out, and the motion precision and the photoetching precision of the photoetching machine are improved.
In an embodiment, the resonant frequency of an electromechanical control system in the lithography machine is 30Hz, and a preset planned value and a set constraint condition of a preset motion trajectory plan of the lithography machine are input into a convex optimization toolbox to obtain a graph of a relationship between acceleration and time, a graph of a relationship between speed and time, and a graph of a relationship between displacement and time of the preset motion trajectory of the lithography machine, as shown in fig. 4, where Acc represents acceleration, vel represents speed, pos represents displacement, and time(s) represents time.
In one embodiment, a preset motion trajectory (as shown in FIG. 6) and a normal motion trajectory (as shown in FIG. 5) of a lithography machine are provided. Wherein the solid lines in fig. 5 and 6 represent the acceleration value changes of the lithography machine, and the dotted lines represent the vibration amplitudes generated by the acceleration changes. According to preset conditions such as a planned value of a preset track, maximum jerk constraint, constant speed segment acceleration constraint, constant speed segment speed constraint, displacement constraint and vibration constraint, when the photoetching machine reaches a maximum speed value after acceleration, vibration amplitude rapidly converges to a preset convergence range and keeps stable, and the photoetching machine starts to perform processing exposure. The motion control precision and the processing efficiency of the photoetching machine are improved by reducing the vibration amplitude after entering the maximum speed section and shortening the convergence time.
It should be understood that although the various steps in the flow charts of fig. 2-3 are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not limited to being performed in the exact order illustrated and, unless explicitly stated herein, may be performed in other orders. Moreover, at least some of the steps in fig. 2-3 may include multiple steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, and the order of performing the steps or stages is not necessarily sequential, but may be performed alternately or alternatingly with other steps or at least some of the other steps or stages.
In one embodiment, as shown in fig. 7, there is provided a motion trajectory planning apparatus 700 for a lithography machine, including: an acquisition module 702, a first determination module 704, a processing module 706, a second determination module 708, and an integration module 710, wherein:
an obtaining module 702, configured to obtain a preset planning value and a constraint condition of a preset motion trajectory;
a first determining module 704, configured to determine an initial duration of a jerk in a preset motion trajectory according to a preset planned value and a three-order scanning motion trajectory profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage;
the processing module 706 is configured to process the initial duration according to the constraint condition to obtain a target duration of the jerk in the preset motion trajectory;
a second determining module 708, configured to determine an objective function relationship between jerk and time according to the target duration and the initial function relationship between jerk and time in the three-order scanning motion trajectory profile;
the integrating module 710 is configured to determine a curve of the displacement of the preset motion trajectory along with the change of time by calculating triple integral of the objective function relation.
In the photoetching machine motion trail planning device, a preset planning value and a constraint condition of a preset motion trail are obtained; determining the initial duration of the jerk turning point corresponding to the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage. Processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track; determining an objective function relation of jerk and time according to a target time value set and an initial function relation of jerk and time in a three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. The initial duration of the acceleration in the preset motion track of the photoetching machine is optimized through the preset planning value and the constraint condition of the preset motion track planning of the photoetching machine, and the target duration with the shortest duration of the vibration amplitude convergence from the acceleration motion stage to the uniform motion stage of the photoetching machine in the motion process is obtained, namely under the condition that the constraint condition is met, the convergence time of the photoetching machine after the photoetching machine enters the uniform motion is shortened, and the motion control precision and efficiency of the photoetching machine are further improved.
In another embodiment, as shown in fig. 7, there is provided a lithography machine motion trajectory planning apparatus 700, which includes an acquisition module 702, a first determination module 704, a processing module 706, a second determination module 708, and an integration module 710, and further includes a detection module 712 and an optimization module 714, wherein:
and a detecting module 712, configured to detect whether a product of the maximum velocity and the maximum jerk is greater than a square of the maximum acceleration.
The optimization module 714 is used for determining the gradient and the step length of the initial duration optimization through a gradient descent method in the convex optimization algorithm; and optimizing the initial duration according to the constraint conditions, the gradient and the step length, and determining the target duration of the jerk in the preset motion trail.
In one embodiment, the first determining module 704 is further configured to determine, according to the maximum speed, the maximum jerk, the maximum acceleration and the three-step scanning motion trajectory profile, that an initial duration of jerk of a jerk phase and a jerk phase in a preset motion trajectory is a ratio of the maximum acceleration to the maximum jerk; the initial duration of the jerk in the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk in the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the first determining module 704 is further configured to determine, according to the maximum jerk, the maximum acceleration and the profile of the third-order scanning motion trajectory, that the initial duration of jerk in the acceleration motion phase and the deceleration motion phase in the preset motion trajectory is a square root of the maximum speed and the maximum jerk; the initial duration of the jerk of the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the method comprises the steps of detecting whether a product value of a maximum speed and a maximum jerk is larger than a square value of the maximum acceleration or not by acquiring a preset planning value and a constraint condition of a preset motion track, wherein the preset planning value comprises the maximum jerk, the maximum acceleration, an initial speed, the maximum speed and a target displacement of the preset motion track, and determining an initial duration of the jerk in the preset motion track according to the maximum speed, the maximum jerk, the maximum acceleration and a three-order scanning motion track profile when the product value of the maximum speed and the maximum jerk is larger than the square value of the maximum acceleration; and when the product value of the maximum speed and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of the turning point of the jerk in the preset motion track according to the maximum acceleration, the maximum jerk and the profile of the three-order scanning motion track.
Determining the gradient and the step length of the initial duration optimization through a gradient descent method in a convex optimization algorithm, optimizing the initial duration according to the constraint condition, the gradient and the step length, and determining the target duration of the jerk in the preset motion track; determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile; and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation. By optimizing the duration of the acceleration in the preset motion track, the target duration with the shortest duration of the convergence of the vibration amplitude is obtained from the acceleration motion stage to the uniform motion stage of the photoetching machine in the motion process, namely, the convergence time of the photoetching machine after the photoetching machine enters the uniform motion is shortened under the condition of meeting the constraint condition, so that the motion control precision and efficiency of the photoetching machine are improved.
For specific definition of the device for planning the motion trail of the lithography machine, reference may be made to the definition of the method for planning the motion trail of the lithography machine, which is not described herein again. All or part of the modules in the photoetching machine motion trail planning device can be realized by software, hardware and a combination thereof. The modules can be embedded in a hardware form or independent of a processor in the computer device, and can also be stored in a memory in the computer device in a software form, so that the processor can call and execute operations corresponding to the modules.
In one embodiment, a computer device is provided, comprising a memory and a processor, the memory having a computer program stored therein, the processor implementing the following steps when executing the computer program:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion trail according to the preset planning value and the three-order scanning motion trail profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage;
processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
In one embodiment, the processor, when executing the computer program, further implements the following:
the preset planning values comprise the maximum acceleration, the initial speed, the maximum speed and the target displacement of the preset motion track.
In one embodiment, the processor when executing the computer program further implements the following:
the constraint conditions comprise maximum jerk constraint, constant speed segment acceleration constraint, constant speed segment speed constraint, displacement constraint and vibration constraint corresponding to the preset motion trail.
In one embodiment, the processor, when executing the computer program, further performs the steps of:
detecting whether the product value of the maximum speed and the maximum acceleration is larger than the square value of the maximum acceleration;
when the product value of the maximum speed and the maximum jerk is larger than the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile, including:
determining the initial duration of the jerk in the preset motion trail according to the maximum speed, the maximum jerk, the maximum acceleration and the profile of the three-order scanning motion trail;
when the product value of the maximum speed and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile, including:
and determining the initial duration of the turning point of the acceleration in the preset motion track according to the maximum acceleration, the maximum jerk and the three-order scanning motion track profile.
In one embodiment, the processor when executing the computer program further performs the steps of:
determining the initial duration of the accelerated speeds of an accelerated motion stage and an accelerated motion stage in the preset motion track as the ratio of the maximum accelerated speed to the maximum accelerated speed according to the maximum speed, the maximum accelerated speed and the profile of the three-order scanning motion track; the initial duration of the jerk in the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk in the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the processor, when executing the computer program, further performs the steps of:
determining the initial duration of the acceleration in the acceleration motion stage and the deceleration motion stage in the preset motion track as the square root of the maximum speed and the maximum acceleration according to the maximum acceleration, the maximum acceleration and the three-order scanning motion track profile; the initial duration of the jerk in the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the processor when executing the computer program further performs the steps of:
and processing the initial duration by using a gradient descent method according to the constraint conditions, and determining the target duration of the jerk in the preset motion track.
In one embodiment, a computer-readable storage medium is provided, having a computer program stored thereon, which when executed by a processor, performs the steps of:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion trail according to the preset planning value and the three-order scanning motion trail profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage;
processing the initial duration according to the constraint condition to obtain the target duration of the jerk in the preset motion track;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
In one embodiment, the computer program when executed by the processor further implements the following:
the preset planning values comprise the maximum acceleration, the initial speed, the maximum speed and the target displacement of the preset motion track.
In one embodiment, the computer program when executed by the processor further implements the following:
the constraint conditions comprise maximum jerk constraint, constant speed segment acceleration constraint, constant speed segment speed constraint, displacement constraint and vibration constraint corresponding to the preset motion trail.
In one embodiment, the computer program when executed by the processor further performs the steps of:
detecting whether the product value of the maximum speed and the maximum acceleration is larger than the square value of the maximum acceleration;
when the product value of the maximum speed and the maximum jerk is larger than the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile, including:
determining the initial duration of the jerk in the preset motion trail according to the maximum speed, the maximum jerk, the maximum acceleration and the profile of the three-order scanning motion trail;
when the product value of the maximum speed and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile, including:
and determining the initial duration of the acceleration turning point in the preset motion track according to the maximum acceleration, the maximum jerk and the three-order scanning motion track profile.
In one embodiment, the computer program when executed by the processor further performs the steps of:
determining the initial duration of the acceleration of a pre-set motion track in an acceleration motion stage and an acceleration motion stage as the ratio of the maximum acceleration to the maximum acceleration according to the maximum speed, the maximum acceleration and the profile of the three-order scanning motion track; the initial duration of the jerk in the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk in the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the computer program when executed by the processor further performs the steps of:
determining the initial duration of the acceleration in the acceleration motion stage and the deceleration motion stage in the preset motion track as the square root of the maximum speed and the maximum acceleration according to the maximum acceleration, the maximum acceleration and the three-order scanning motion track profile; the initial duration of the jerk in the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion track is zero.
In one embodiment, the computer program when executed by the processor further performs the steps of:
and processing the initial time length by using a gradient descent method according to the constraint condition, and determining the target time length of the jerk in the preset motion trail.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. Any reference to memory, storage, database or other medium used in the embodiments provided herein can include at least one of non-volatile and volatile memory. Non-volatile Memory may include Read-Only Memory (ROM), magnetic tape, floppy disk, flash Memory, optical storage, or the like. Volatile Memory can include Random Access Memory (RAM) or external cache Memory. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM), among others.
All possible combinations of the technical features in the above embodiments may not be described for the sake of brevity, but should be considered as being within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, and these are all within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A method for planning a motion trail of a photoetching machine is characterized by comprising the following steps:
acquiring a preset planning value and a constraint condition of a preset motion track;
determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, a uniform acceleration motion stage, an acceleration motion reduction stage and a uniform motion stage;
processing the initial duration by using a gradient descent method according to the constraint condition to obtain a target duration of the acceleration in the preset motion track;
determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and determining a curve of the displacement of the preset motion trail changing along with time by calculating triple integral of the objective function relation.
2. The method of claim 1, wherein the preset programmed values comprise a maximum jerk, a maximum acceleration, an initial velocity, a maximum velocity, and a target displacement of the preset motion profile.
3. The method according to claim 1, wherein the constraint conditions include a maximum jerk constraint, a constant velocity segment acceleration constraint, a constant velocity segment velocity constraint, a displacement constraint, and a vibration constraint corresponding to the preset motion trajectory.
4. The method of claim 3,
the maximum jerk constraint is that the absolute value of the jerk in the jerk motion phase and the absolute value of the jerk in the jerk motion phase are less than or equal to a maximum jerk.
5. The method of claim 2, wherein prior to said determining an initial duration of jerk in the predetermined motion profile based on the predetermined programmed values and a third order scan motion profile, the method further comprises:
detecting whether the product value of the maximum speed and the maximum jerk is larger than the square value of the maximum acceleration;
when the product value of the maximum speed and the maximum jerk is greater than the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion trajectory according to the preset planning value and the profile of the three-order scanning motion trajectory, including:
determining the initial duration of the jerk in the preset motion trail according to the maximum speed, the maximum jerk, the maximum acceleration and the three-order scanning motion trail profile;
when the value of the product of the maximum velocity and the maximum jerk is less than or equal to the square value of the maximum acceleration, determining the initial duration of jerk in the preset motion trajectory according to the preset planning value and the profile of the three-order scanning motion trajectory, including:
and determining the initial duration of the turning point of the acceleration in the preset motion track according to the maximum acceleration, the maximum jerk and the profile of the three-order scanning motion track.
6. The method of claim 5, wherein determining an initial duration corresponding to the jerk in the preset motion profile according to the maximum speed, the maximum jerk, the maximum acceleration, and a third-order scanning motion profile comprises:
determining the initial duration of the acceleration stage and the deceleration stage in the preset motion track as the ratio of the maximum acceleration to the maximum acceleration according to the maximum speed, the maximum acceleration and the profile of the three-order scanning motion track; the initial duration of the jerk in the uniform acceleration motion stage in the preset motion track is the ratio difference between the maximum speed and the maximum acceleration, and the initial duration of the jerk in the uniform velocity motion stage in the preset motion track is zero.
7. The method of claim 5, wherein said determining an initial duration of jerk in the predetermined motion profile based on the maximum acceleration, the maximum jerk, and a third order swept motion profile comprises:
determining the initial duration of the jerk of the acceleration motion stage and the deceleration motion stage in the preset motion track as the square root of the maximum speed and the maximum jerk according to the maximum jerk, the maximum acceleration and the profile of the three-order scanning motion track; and the initial duration of the jerk of the uniform acceleration motion stage and the uniform velocity motion stage in the preset motion trail is zero.
8. A motion trail planning device for a photoetching machine is characterized by comprising:
the acquisition module is used for acquiring a preset planning value and a constraint condition of a preset motion track;
the first determining module is used for determining the initial duration of the jerk in the preset motion track according to the preset planning value and the three-order scanning motion track profile; the three-order scanning stage track profile comprises an acceleration motion stage, an acceleration motion stage and a uniform motion stage;
the processing module is used for processing the initial duration by using a gradient descent method according to the constraint condition to obtain a target duration of the jerk in the preset motion track;
the second determining module is used for determining an objective function relation of the jerk and the time according to the target duration and the initial function relation of the jerk and the time in the three-order scanning motion track profile;
and the integration module is used for determining a curve of the displacement of the preset motion track along with the change of time by calculating triple integration of the objective function relation.
9. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that the processor, when executing the computer program, implements the steps of the method of any of claims 1 to 7.
10. A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of the method according to any one of claims 1 to 7.
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| CN112558427A (en) * | 2020-12-11 | 2021-03-26 | 西安工业大学 | Track planning system and method suitable for step-and-scan projection lithography machine |
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| CN102236269A (en) * | 2011-07-21 | 2011-11-09 | 中国科学院光电技术研究所 | Planning method for stepping and scanning motion trail of projection photoetching machine |
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