CN111468464B - Cleaning equipment - Google Patents

Abstract

The invention relates to cleaning equipment, which comprises a cleaning tank, a chassis positioned in the cleaning tank, an ultrasonic cleaner positioned right above the chassis, a filtering tank, a first valve, a second valve and a hard pipe positioned above the filtering tank, wherein a plurality of supporting plates are arranged between the chassis and the tank bottom of the cleaning tank, the lower part of the ultrasonic cleaner is provided with the ultrasonic cleaning tank with a downward notch, the tank bottom center of the ultrasonic cleaning tank is provided with a first through hole, the upper part of the ultrasonic cleaner is provided with a pipe joint communicated with the first through hole, a hose is arranged between the hard pipe and the pipe joint, and the filtering tank comprises a tank body, a filter element arranged in the tank body and a tank cover arranged at a tank body filling opening. The cleaning equipment is simple to operate and convenient to clean, and can effectively clean the semi-finished product formed in the small hole machining process of the silicon electrode thoroughly, so that impurities such as silicon mud are prevented from being retained on the inner wall of the small hole.

Description

Cleaning equipment

Technical Field

The invention relates to cleaning equipment, and belongs to the technical field of semiconductor material processing and production.

Background

During CNC production of industrial products, the efficiency problem of large-scale batch processing of parts is well solved by CNC numerical control equipment when the industrial production of the precision machining of the physical shapes of the parts is performed. For CNC numerical control equipment, the precision is high, the speed is fast, the batch production is the biggest advantage, but because in the machine operation process, because the influence of some uncontrollable factors, the product of processing out always can appear processing line inhomogeneous, damage, burst limit, the unfavorable scheduling common problem of downthehole flatness, especially for brittle material, for example semiconductor product such as silicon, the material is fragile and hard, the machining precision, the line, downthehole flatness etc. all require very much, current scheme is that the mode of filtering cutting fluid with the filtration car circulation prevents that cutting fluid is inside has impurity to influence the processing, but can not avoid the aperture processing after, because the cutting fluid flows with partial silicon mud dashes into in the aperture, adsorb difficult complete the cleaning on the aperture inner wall, consequently, all can exist aperture jam, cause the risk that aperture measurement error is big. The conventional ultrasonic cleaning is performed at present, but the cleaning effect cannot be achieved.

At present, although the silicon mud in the cutting fluid is well filtered by using a filter vehicle, the cleanliness in the small holes of the product cannot be guaranteed, and the aperture measurement precision of the small holes of the product is affected, so that the quality of the product is judged inaccurately, the reworking is caused, and the continuity of the production of the product cannot be guaranteed.

Disclosure of Invention

Aiming at the defects existing in the prior art, the invention provides cleaning equipment, which comprises the following specific technical scheme:

The cleaning equipment comprises a cleaning tank, a chassis positioned in the cleaning tank, an ultrasonic cleaner positioned right above the chassis, a filtering tank, a first valve, a second valve and a hard pipe positioned above the filtering tank, wherein a plurality of supporting plates are arranged between the chassis and the tank bottom of the cleaning tank, the lower ends of the supporting plates are fixedly connected with the tank bottom of the cleaning tank, and the upper parts of the supporting plates are fixedly connected with the edge of the chassis; an ultrasonic cleaning tank with a downward notch is arranged at the lower part of the ultrasonic cleaner, a first through hole is arranged at the center of the tank bottom of the ultrasonic cleaning tank, the upper part of the ultrasonic cleaner is provided with a pipe joint communicated with the first through hole, a hose is arranged between the hard pipe and the pipe joint, the lower end of the hose is communicated with the pipe joint, and the upper end of the hose is communicated with the tail end of the hard pipe; the filter tank comprises a tank body, a filter element arranged in the tank body, and a tank cover arranged at the tank body filling opening, wherein a first through hole communicated with the head end of the hard pipe is formed in the tank cover, a second through hole communicated with the first valve output end is formed in the side wall of the tank body, and a third through hole communicated with the second valve output end is further formed in the side wall of the tank body.

As the improvement of above-mentioned technical scheme, the upper portion of chassis is provided with the recess with ultrasonic cleaning tank assorted, the tank bottom central authorities of recess are provided with circular second through hole, the tank bottom of recess is provided with the ring-shaped sealing strip, the outside at the second through hole is established to the sealing strip cover, the tank bottom of recess still is provided with a plurality of ring channels that are concentric circles setting with the second through hole, the ring channel all sets up between sealing strip and second through hole, the tank bottom of recess still is provided with a plurality of guiding gutter that radially set up along the second through hole, the guiding gutter all sets up between sealing strip and second through hole, guiding gutter and ring channel intercommunication.

As the improvement of the technical scheme, a plurality of first disassembly openings are formed in the outer edge of the lower portion of the ultrasonic cleaner, and second disassembly openings in one-to-one correspondence with the first disassembly openings are formed in the upper portion of the chassis.

As an improvement of the technical scheme, the hose is of a cylindrical spiral spring-like structure.

As an improvement of the above technical solution, the first through hole is in a spiral structure.

As the improvement of the technical scheme, a third valve is arranged below the cleaning tank, a circulating pump is arranged outside the cleaning tank, the input end of the third valve is communicated with the cleaning tank, the output end of the third valve is communicated with the input end of the circulating pump, and the output end of the circulating pump is communicated with the input end of the second valve.

As an improvement of the technical scheme, a fourth valve communicated with the cleaning tank is arranged below the cleaning tank, and the communication part of the fourth valve and the cleaning tank is arranged at the bottom of the cleaning tank.

As an improvement of the technical scheme, the upper end of the supporting plate is provided with a quick clamp for pressing the ultrasonic cleaner and the chassis.

As an improvement of the technical scheme, the cleaning process of the cleaning equipment for the plate to be cleaned comprises the following steps:

Firstly, placing a plate to be cleaned at a chassis, combining an ultrasonic cleaner above the chassis, and compacting the ultrasonic cleaner;

step two, alkaline detergent with pH value of 8-12 is poured into the cleaning tank, a second valve, a third valve and a circulating pump are opened, the first valve is closed, the liquid level of the alkaline detergent in the cleaning tank is lower than the lower part of the chassis, an ultrasonic cleaner is started, the flushing pressure is 0.5-1.5 Mpa, and the ultrasonic cleaning time is 4-10 minutes;

Step three, closing a second valve, a third valve and a circulating pump, opening a first valve, externally connecting an air source to the input end of the first valve, and flushing the plate to be cleaned with compressed air for 3-5 minutes;

And step four, repeating the step two and the step three and alternately carrying out 2-5 times, and finally carrying out purging on the plate to be cleaned by compressed air until the surface of the plate to be cleaned is dried by blowing, and ending the cleaning.

The cleaning equipment disclosed by the invention is simple to operate and convenient to clean, can effectively clean the semi-finished product formed by the silicon electrode in the small hole machining process thoroughly, avoids impurities such as silicon mud and the like from being remained on the inner wall of the small hole, ensures that the silicon mud flowing in the small hole in the no-cutting process exists, and further ensures that the data of a subsequent product inspection link is real and accurate, and also ensures that the product meets the requirement of cleanliness.

Drawings

FIG. 1 is a schematic view of a cleaning apparatus according to the present invention;

FIG. 2 is a schematic view of the cleaning apparatus according to the present invention (rear view state);

FIG. 3 is a schematic view of the cleaning apparatus according to the present invention (side view);

FIG. 4 is a schematic view of the circulation flow of the alkaline detergent of the present invention;

FIG. 5 is a schematic view of the structure of the ultrasonic cleaner according to the present invention;

FIG. 6 is a schematic view of the chassis of the present invention;

FIG. 7 is a schematic view of the chassis of the present invention (in top view);

FIG. 8 is a schematic view of the quick clamp of the present invention when closed;

FIG. 9 is a schematic view of the quick clamp of the present invention with the quick clamp open;

Fig. 10 is a schematic structural view of a plate to be cleaned according to the present invention.

Detailed Description

The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.

In the description of the present invention, it is to be noted that, unless otherwise indicated, the meaning of "plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Example 1

As shown in fig. 1,2, 3 and 5, the cleaning device comprises a cleaning tank 1 for recycling alkaline detergent, a chassis 3 positioned in the cleaning tank 1, an ultrasonic cleaner 5 positioned right above the chassis 3, a filter tank 6, a first valve 7, a second valve 8 and a hard pipe 9 positioned above the filter tank 6, wherein a plurality of support plates 4 are arranged between the chassis 3 and the bottom of the cleaning tank 1, the lower ends of the support plates 4 are fixedly connected with the bottom of the cleaning tank 1, and the upper parts of the support plates 4 are fixedly connected with the edge of the chassis 3; the lower part of the ultrasonic cleaner 5 is provided with an ultrasonic cleaner tank 51 with a downward notch, the tank bottom of the ultrasonic cleaner tank 51 is upward, the tank bottom center of the ultrasonic cleaner tank 51 is provided with a first through hole 52, the upper part of the ultrasonic cleaner 5 is provided with a pipe joint 12 communicated with the first through hole 52, a hose 11 is arranged between the hard pipe 9 and the pipe joint 12, the lower end of the hose 11 is communicated with the pipe joint 12, and the upper end of the hose 11 is communicated with the tail end of the hard pipe 9; the filtering tank 6 comprises a tank body 61, a filter element 62 arranged in the tank body 61, and a tank cover 63 arranged at the filling opening of the tank body 61, a first through hole (not shown in the figure) communicated with the head end of the hard pipe 9 is arranged at the tank cover 63, a second through hole (not shown in the figure) communicated with the output end of the first valve 7 is arranged on the side wall of the tank body 61, and a third through hole (not shown in the figure) communicated with the output end of the second valve 8 is also arranged on the side wall of the tank body 61.

The ultrasonic cleaner 5 is built in an ultrasonic transducer, a notch of the ultrasonic cleaning tank 51 is arranged downwards, the tank bottom of the ultrasonic cleaning tank 51 is arranged upwards, and the ultrasonic cleaner 5 can be manufactured by CHNT DZ-47-60 equipment of Kerster company; an ultrasonic generator (not shown) associated with the ultrasonic cleaning tank 51 may be installed below the cleaning tank 1, and the ultrasonic cleaning tank 51 is made of japanese SUS series stainless steel. The model of the sound wave generator matched with the ultrasonic cleaner 5 is JYD-300E, the power is 300W, and the rated frequency is 20KHZ. The ultrasonic cleaning tank 51 is of the type SUS316L, phi 250mm 50mm.

The alkaline detergent can be Valtron type cleaning agent, and has good cleaning effect.

The cleaning tank 1 can be made of polytetrafluoroethylene materials with excellent acid and alkali resistance and corrosion resistance, and can also be made of metal materials after corrosion resistance treatment according to the actual enterprises.

The tank cover 63 and the tank body 61 can be in threaded connection at the filling opening, so that the sealing performance can be improved in a mode of additionally installing a rubber ring, and the tank cover is convenient to install and disassemble. The filter element 62 can be a polypropylene melt-blown filter element with a filtration accuracy of 1-60 μm.

Further, as shown in fig. 6 and 7, the upper portion of the chassis 3 is provided with a groove 31 matching with the ultrasonic cleaning tank 51, the center of the bottom of the groove 31 is provided with a circular second through hole 32, the bottom of the groove 31 is provided with a circular sealing strip 33, the sealing strip 33 is sleeved outside the second through hole 32, the bottom of the groove 31 is further provided with a plurality of circular annular grooves 34 concentric with the second through hole 32, the annular grooves 34 are all arranged between the sealing strip 33 and the second through hole 32, the bottom of the groove 31 is further provided with a plurality of diversion grooves 35 radially arranged along the second through hole 32, the diversion grooves 35 are all arranged between the sealing strip 33 and the second through hole 32, and the diversion grooves 35 are communicated with the annular grooves 34.

Further, a first bracket 2 is installed below the cleaning tank 1, and the upper part of the first bracket 2 is fixedly connected with the lower part of the cleaning tank 1. A second bracket 10 is installed above the cleaning tank 1, the lower part of the second bracket 10 is fixedly connected with the upper part of the cleaning tank 1, and the upper part of the second bracket 10 is fixedly connected with the tank 61.

Further, the ultrasonic cleaner 5 is lifted upward for convenience; the outer edge of the lower part of the ultrasonic cleaner 5 is provided with a plurality of open groove-shaped first dismounting openings 53, and the upper part of the chassis 3 is provided with second dismounting openings 36 which are in one-to-one correspondence with the first dismounting openings 53. The first and second removal ports 53 and 36 facilitate handling.

Further, a fourth valve 13 communicated with the cleaning tank 1 is installed below the cleaning tank 1, and a communication part between the fourth valve 13 and the cleaning tank 1 is arranged at the bottom of the cleaning tank 1. The fourth valve 13 corresponds to a blow-down valve.

As shown in FIG. 10, the surface of the plate 15 to be cleaned is covered with small holes 151, and the aperture of the small holes 151 is 0.4-1mm; the plate 15 to be cleaned is the semi-finished product of the existing silicon electrode after the small hole is processed.

The plate 15 to be cleaned is placed at the chassis 3, the ultrasonic cleaner 5 is put over the chassis 3 and the ultrasonic cleaner 5 is pressed, and the plate 15 to be cleaned is located between the ultrasonic cleaning tank 51 and the groove 31. The alkaline detergent passes through the second valve 8 and then is filtered by the tank 6, and then sequentially passes through the hard tube 9, the hose 11, the pipe joint 12 and the first through hole 52 to finally flow into the space between the ultrasonic cleaning tank 51 and the groove 31, and the flow of the liquid flowing out of the second through hole 32 is smaller than the flow flowing out of the through hole 52, so that the plate 15 to be cleaned can be finally submerged by the alkaline detergent, and impurities at the small holes 151 can be effectively cleaned under the ultrasonic cleaning action; the annular groove 34 and the diversion trench 35 are arranged, so that impurities are easy to flow downwards from the second through hole 32 to the inside of the cleaning tank 1 along with the fluid; the structure of the annular groove 34 and the diversion trench 35 is more beneficial to impurity removal; especially, the silicon mud is more easily discharged during the subsequent gas purging. The sealing strip 33 can improve the sealing property when the ultrasonic cleaner 5 is closed with the chassis 3.

The input end of the first valve 7 is externally connected with a high-pressure air source, compressed air is filtered by the filter tank 6 and finally flows into the space between the ultrasonic cleaning tank 51 and the groove 31 through the hard pipe 9, the hose 11, the pipe joint 12 and the first through hole 52 in sequence, the plate 15 to be cleaned is cleaned, and impurities at the small hole 151 are finally discharged into the cleaning tank 1 through the second through hole 32; the impurities at the small holes 151 can be further cleaned by further purging with compressed air. When the purging is performed using compressed air, the ultrasonic cleaner 5 is in a closed state, and at this time, since the alkaline detergent is not inputted any more, the alkaline detergent between the ultrasonic cleaning tank 51 and the groove 31 eventually flows into the inside of the cleaning tank 1, and the liquid level of the alkaline detergent in the cleaning tank 1 is lower than the lower portion of the chassis 3.

Example 2

In order to save alkaline detergent, a circulating liquid supply mode is adopted; as shown in fig. 4, a third valve 14 is installed below the cleaning tank 1, a circulation pump 16 is disposed outside the cleaning tank 1, an input end of the third valve 14 is communicated with the cleaning tank 1, an output end of the third valve 14 is communicated with an input end of the circulation pump 16, and an output end of the circulation pump 16 is communicated with an input end of the second valve 8.

The alkaline detergent is pressurized by the circulating pump 16, filtered by the filtering tank 6, then conveyed to the ultrasonic cleaning tank 51, and after the plate 15 to be cleaned is cleaned, the dirty liquid flows into the cleaning tank 1 and is pumped out by the circulating pump 16, so that the dirty liquid is circulated and reciprocated.

Example 3

First, the hard tube 9 may be made of a metal tube; the hard tube 9 is mainly used for the medium from which the hose 11 hangs. The hose 11 may be made of nylon. The hose 11 is convenient for the ultrasonic cleaner 5 to move up and down.

In this embodiment, the hose 11 may be provided in a cylindrical coil spring-like structure. The hose 11 of this structure has a certain elasticity and facilitates the up-and-down adjustment of the ultrasonic cleaner 5.

Example 4

In this embodiment, the first through hole 52 has a spiral structure and a screw hole structure. The actual effect of the first through hole 52 with the spiral structure is to improve the medium intervention direction, so that the medium is not impacted positively, the surface impact pressure of the medium on the plate 15 to be cleaned is ensured to be uniform, the pressure is prevented from being concentrated on the part of the cleaning workpiece, the medium pressure in the closed cleaning cavity is the same, and the product cleaning near the medium inlet is prevented from being excessively cleaned.

Example 5

As shown in fig. 8 and 9, a quick clamp 18 for pressing the ultrasonic cleaner 5 and the chassis 3 is installed at the upper end of the support plate 4. The quick clamp 18 may be a horizontal quick clamp of Dongguan industrial and medical hardware limited, and is preferably a GH series.

The base of the quick clamp 18 is mounted on the upper end of the support plate 4. When the ultrasonic cleaner 5 is covered on the chassis 3, the quick clamp 18 is closed at this time, as shown in fig. 8, and the ram 181 of the quick clamp 18 can press the ultrasonic cleaner 5 at this time; the handle 183 of the quick clamp 18 is continuously pressed down until three hinge points 182 of the quick clamp 18 are in the same straight line, and the upward pulling force applied from the pressure head 181 can not lift the pressure head 181 upwards any more according to the mechanical principle, so that the locking state is achieved, the ultrasonic cleaner 5 is ensured to be pressed above the chassis 3, and the ultrasonic cleaning tank 51 and the groove 31 form a closed cleaning space.

When the ultrasonic cleaner 5 needs to be lifted upwards, the handle 183 of the quick clamp 18 is lifted upwards, so that the three hinge points 182 of the quick clamp 18 are not in the same straight line any more, and the pressure head 181 moves along with the three hinge points in a direction away from the ultrasonic cleaner 5, as shown in fig. 9, and finally the ultrasonic cleaner 5 can be lifted upwards.

The quick clamp 18 is simple and convenient to operate, the compression force of GH series products can reach 227kg, and the compression operation of the ultrasonic cleaner 5 can be effectively met.

Example 6

The cleaning process of the plate 15 to be cleaned of the cleaning apparatus includes the steps of:

firstly, placing a plate 15 to be cleaned at the position of a chassis 3, combining an ultrasonic cleaner 5 above the chassis 3, and compacting the ultrasonic cleaner 5, wherein the plate 15 to be cleaned is positioned between an ultrasonic cleaning tank 51 and a groove 31;

step two, alkaline detergent with pH value of 8-12 is poured into the cleaning tank 1, the second valve 8, the third valve 14 and the circulating pump 16 are opened, the first valve 7 is closed, the liquid level of the alkaline detergent in the cleaning tank 1 is lower than the lower part of the chassis 3, the ultrasonic cleaner 5 is opened, the flushing pressure (namely the outlet pressure of the circulating pump) is 0.5-1.5 Mpa, and the ultrasonic cleaning time is 4-10 minutes;

step three, closing the second valve 8, the third valve 14 and the circulating pump 16, opening the first valve 7, and externally connecting a high-pressure air source (the air source pressure is 0.5-0.7 Mpa) to the input end of the first valve 7, wherein compressed air is used for purging the plate 15 to be cleaned for 3-5 minutes;

and step four, repeating the step two and the step three and alternately carrying out 2-5 times, and finally carrying out purging on the plate 15 to be cleaned by compressed air until the surface of the plate 15 to be cleaned is dried by blowing, and ending the cleaning.

In the above embodiment, the first valve 7, the second valve 8, the third valve 14 and the fourth valve 13 are ball valves. The filter tank 6 can filter out impurities in the circulating liquid.

The cleaning equipment is simple to operate and convenient to clean, semi-finished products (to-be-cleaned plate 15) formed in the small hole machining process of the silicon electrode can be effectively and thoroughly cleaned, impurities such as silicon mud are prevented from being retained on the inner wall of the small hole, the existence of the silicon mud flowing in the small hole in a cutting-free process is guaranteed, the reality and accuracy of data of a subsequent product inspection link are guaranteed, and the requirement of cleanliness of the product is guaranteed.

The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (7)

1. A cleaning apparatus, characterized in that: the cleaning device comprises a cleaning tank, a chassis positioned in the cleaning tank, an ultrasonic cleaner positioned right above the chassis, a filtering tank, a first valve, a second valve and a hard pipe positioned above the filtering tank, wherein a plurality of supporting plates are arranged between the chassis and the tank bottom of the cleaning tank, the lower ends of the supporting plates are fixedly connected with the tank bottom of the cleaning tank, and the upper parts of the supporting plates are fixedly connected with the edge of the chassis; an ultrasonic cleaning tank with a downward notch is arranged at the lower part of the ultrasonic cleaner, a first through hole is arranged at the center of the tank bottom of the ultrasonic cleaning tank, the upper part of the ultrasonic cleaner is provided with a pipe joint communicated with the first through hole, a hose is arranged between the hard pipe and the pipe joint, the lower end of the hose is communicated with the pipe joint, and the upper end of the hose is communicated with the tail end of the hard pipe; the filter tank comprises a tank body, a filter element arranged in the tank body and a tank cover arranged at a tank body filling opening, wherein a first through hole communicated with the head end of a hard pipe is formed in the tank cover, a second through hole communicated with the output end of a first valve is formed in the side wall of the tank body, and a third through hole communicated with the output end of the second valve is further formed in the side wall of the tank body;

The upper part of the chassis is provided with a groove matched with the ultrasonic cleaning groove, the center of the bottom of the groove is provided with a circular second through hole, the bottom of the groove is provided with a circular sealing strip, the sealing strip is sleeved outside the second through hole, the bottom of the groove is also provided with a plurality of annular grooves which are concentric with the second through hole, the annular grooves are all arranged between the sealing strip and the second through hole, the bottom of the groove is also provided with a plurality of diversion grooves which are radially arranged along the second through hole, the diversion grooves are all arranged between the sealing strip and the second through hole, and the diversion grooves are communicated with the annular grooves;

the first through hole is of a spiral structure;

The alkaline detergent enters the filter tank through the second valve, and the input end of the first valve is externally connected with a high-pressure air source.

2. A cleaning apparatus as claimed in claim 1, wherein: the outer edge of ultrasonic cleaner lower part is provided with a plurality of first dismantlement mouths, the upper portion of chassis is provided with the second dismantlement mouth with first dismantlement mouth one-to-one.

3. A cleaning apparatus as claimed in claim 1, wherein: the hose is of a cylindrical spiral spring-shaped structure.

4. A cleaning apparatus as claimed in claim 1, wherein: the cleaning tank is characterized in that a third valve is arranged below the cleaning tank, a circulating pump is arranged outside the cleaning tank, the input end of the third valve is communicated with the cleaning tank, the output end of the third valve is communicated with the input end of the circulating pump, and the output end of the circulating pump is communicated with the input end of the second valve.

5. A cleaning apparatus as claimed in claim 1, wherein: a fourth valve communicated with the cleaning tank is arranged below the cleaning tank, and the communication part of the fourth valve and the cleaning tank is arranged at the bottom of the cleaning tank.

6. A cleaning apparatus as defined in claim 4, wherein: the upper end of the supporting plate is provided with a quick clamp for pressing the ultrasonic cleaner and the chassis.

7. A cleaning apparatus as claimed in claim 1, wherein: the cleaning process of the plate to be cleaned by the cleaning equipment comprises the following steps:

Firstly, placing a plate to be cleaned at a chassis, combining an ultrasonic cleaner above the chassis, and compacting the ultrasonic cleaner;

Step two, pouring alkaline detergent with pH of 8-12 into the cleaning tank, opening a second valve, a third valve and a circulating pump, closing the first valve, wherein the liquid level of the alkaline detergent in the cleaning tank is lower than the lower part of the chassis, starting an ultrasonic cleaner, flushing the cleaning tank at 0.5-1.5 mpa, and performing ultrasonic cleaning for 4-10 minutes;

Step three, closing a second valve, a third valve and a circulating pump, opening a first valve, externally connecting an air source to the input end of the first valve, and flushing the plate to be cleaned with compressed air for 3-5 minutes;

And step four, repeating the step two and the step three and alternately carrying out 2-5 times, and finally carrying out purging on the plate to be cleaned by compressed air until the surface of the plate to be cleaned is dried by blowing, and ending the cleaning.