CN111463104A - Vacuum ultraviolet light source - Google Patents

Vacuum ultraviolet light source Download PDF

Info

Publication number
CN111463104A
CN111463104A CN202010218144.XA CN202010218144A CN111463104A CN 111463104 A CN111463104 A CN 111463104A CN 202010218144 A CN202010218144 A CN 202010218144A CN 111463104 A CN111463104 A CN 111463104A
Authority
CN
China
Prior art keywords
ultraviolet light
electrode
vacuum ultraviolet
electrode part
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010218144.XA
Other languages
Chinese (zh)
Other versions
CN111463104B (en
Inventor
游卫龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Deqing Wahaha Science And Technology Innovation Center Co ltd
Original Assignee
Zhejiang Deqing Wahaha Science And Technology Innovation Center Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Deqing Wahaha Science And Technology Innovation Center Co ltd filed Critical Zhejiang Deqing Wahaha Science And Technology Innovation Center Co ltd
Priority to CN202010218144.XA priority Critical patent/CN111463104B/en
Publication of CN111463104A publication Critical patent/CN111463104A/en
Application granted granted Critical
Publication of CN111463104B publication Critical patent/CN111463104B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/361—Seals between parts of vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Led Device Packages (AREA)

Abstract

The invention discloses a vacuum ultraviolet light source, which solves the defects of the prior art and comprises a packaging base and an ultraviolet light transmitting sealing cover, wherein an insulating structure is arranged at the outer side of the packaging base, two base electrodes are arranged between the insulating structure and a packaging base body, a kovar alloy frame is arranged at the top of the insulating structure, an eutectic solder ring is arranged below the ultraviolet light transmitting sealing cover, and the packaging base and the ultraviolet light transmitting sealing cover are fixedly connected through the sealing matching between the kovar alloy frame and the solder ring; an airtight cavity is arranged between the packaging base and the ultraviolet light transmitting sealing cover, inert gas is filled in the airtight cavity, a getter and a vacuum ultraviolet light excitation electrode part are further arranged in the airtight cavity, the getter and the vacuum ultraviolet light excitation electrode part are fixedly connected with the packaging base through solder, the vacuum ultraviolet light excitation electrode part is connected with the top layer of the base electrode through a lead, and the bottom layer of the base electrode is arranged at the bottom side of the insulating structure.

Description

Vacuum ultraviolet light source
Technical Field
The invention relates to the technical field of electronics, in particular to a vacuum ultraviolet light source.
Background
The vacuum ultraviolet light source can radiate deep ultraviolet light with the wavelength of 10-200nm, the photon energy in the wave band exceeds the bond energy of chemical bonds in most organic molecules, the organic molecules can generate the photoelectric effect under the action of photons with the ionization energy higher than that of the organic molecules, so that the organic molecules are ionized to form corresponding ions without damaging the molecular structure of the organic substances, and the ionization current is positively correlated with the concentration of the organic molecules, so that the ultraviolet light has wide application in the field of analysis and detection.
The vacuum ultraviolet light source used in the field of analysis and detection can be divided into two types according to the different excitation modes and structures: one is a high voltage direct current vacuum ultraviolet light source, and the other is a Radio Frequency (RF) electrodeless vacuum ultraviolet light source. The ultraviolet light of the high-voltage direct-current ultraviolet light source is formed into plasma by using direct-current high-voltage excitation gas between two metal electrodes, so that the structure design of the light source is more complicated and the volume is larger in order to avoid the bombardment of high-energy ions in the lamp on the electrodes, and the ultraviolet light is basically eliminated in field application. The RF electrodeless vacuum ultraviolet light source seals the low-pressure discharge gas in the glass shell, and the ultraviolet light is emitted through the light-transmitting material. Its advantages are: the structure is simple, no metal electrode is arranged in the lamp, the exciting electrode is arranged on the outer wall of the lamp, and the detection sensitivity is higher. The excitation mode of the RF electrodeless vacuum ultraviolet light source comprises the following steps: the system is characterized by capacitive coupling excitation and inductive coupling excitation, wherein the capacitive coupling excitation is not easily interfered, and the system stability is high.
The working principle of a vacuum ultraviolet light source commonly used in a miniaturized organic matter analysis and detection instrument at present is capacitive/inductive coupling radio frequency electrodeless excitation, the light source is formed by hermetically sealing a glass shell containing low-pressure inert gas and an optical window through half century development, and related patent applications include CN 89106035.6, US 4013913, US 4398152, US5561344, US 6225633, US 6646444, US 2005/0218811A 1, US 6225633, US 6313638, US5773833, DE 19535216C 1, RU 193903U1 and the like.
The vacuum ultraviolet light source has large size, can not be integrated, has low production efficiency and high cost, and can not meet the application requirements in the fields of miniature gas analysis and detection, increasingly networked environmental gas monitoring and the like.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a vacuum ultraviolet light source.
The purpose of the invention is realized by the following technical scheme:
a vacuum ultraviolet light source comprises a packaging base and an ultraviolet light transmitting sealing cover, wherein the surface of the packaging base is provided with a plurality of inner electrodes and outer electrodes, the inner electrodes and the outer electrodes are filled with airtight materials and are correspondingly connected, an alloy frame is arranged outside a packaging base body, a welding material ring is arranged on the outer edge of one side of the ultraviolet light transmitting sealing cover, and the packaging base and the ultraviolet light transmitting sealing cover are fixedly sealed and connected through the sealing matching of the alloy frame and the welding material ring; an airtight cavity is arranged between the packaging base and the ultraviolet light transmitting sealing cover, an inner electrode of the packaging base is sealed in the airtight cavity, inert gas is filled in the airtight cavity, a getter and a vacuum ultraviolet light excitation electrode part are further arranged in the airtight cavity, the getter and the vacuum ultraviolet light excitation electrode part are both fixedly connected with the packaging base, an electrode of the vacuum ultraviolet light excitation electrode part is connected with the inner electrode of the packaging base through a lead, and an outer electrode of the packaging base is arranged outside the airtight cavity. The getter is used for absorbing gas components except inert gas in the packaging cavity after being activated under the activation condition, so that the inert gas is always in the airtight cavity, the stability of the vacuum ultraviolet light source is improved, and the solder is eutectic alloy solder or glass solder. The inert gas needs to reach the pressure required for the light source to operate. An ultraviolet light excitation electrical signal is applied to an electrode outside the packaging base, the signal is transmitted to the vacuum ultraviolet light excitation electrode component through a lead, the vacuum ultraviolet light excitation electrode component works to enable inert gas to be excited into plasma, and the plasma radiates vacuum ultraviolet light.
As a preferable scheme, the vacuum ultraviolet light excitation electrode component comprises a quartz glass tube side wall and two electrode component metal electrodes, the two motor component metal electrodes are not contacted with each other, the electrode component metal electrodes are arranged on the outer side of the quartz glass tube side wall, and the two electrode component metal electrodes are respectively connected with two leads.
As a preferable scheme, the vacuum ultraviolet light excitation electrode component comprises an insulating substrate and an electrode component metal electrode, the electrode component metal electrode is arranged on the insulating substrate, one end of the electrode component metal electrode is connected with one conducting wire, and the other end of the electrode component metal electrode is connected with the other conducting wire.
Preferably, the two electrode parts are arranged on the insulating substrate in a structure of a plurality of pairs of comb teeth.
As a preferable scheme, the vacuum ultraviolet light excitation electrode component comprises two electrode component metal electrodes, the two electrode component metal electrodes are respectively and symmetrically arranged in an arc shape, the metal electrodes of the electrode component are bonded in the grooves at the positions of the insulating substrate through glass solders, insulating layers are arranged on the inner sides of the two electrode component metal electrodes, an extending part parallel to the insulating substrate is arranged in the middle of each metal component metal electrode, and the extending part is connected to the inner electrode of the packaging base through a lead.
Preferably, the getter is disposed between the vacuum ultraviolet excitation electrode part and the pedestal electrode and close to the pedestal electrode.
Preferably, the solder is glass solder or Au80Sn20Eutectic solder, wherein the solder finishes sealing under the environment condition of 350-750 ℃.
As a preferred scheme, the ultraviolet-transmitting sealing cover is MgF with the radial direction vertical to the crystal direction of a C axis2An optical window made of a single crystal.
Preferably, the alloy frame material of the packaging base has a thermal expansion coefficient of 7.8-8.8 × 10-6A/° c alloy material, preferably an iron-cobalt-nickel 4J49 alloy.
Preferably, the packaging base is a multi-pin ceramic packaging tube shell.
Preferably, the packaging base is a transistor housing packaging base.
Preferably, the ultraviolet light transmitting sealing cover is MgF with the radial direction vertical to the C axis crystalline phase2Single crystal glass and 4J49 alloy cylinder, 4J49 alloy cylinder top and MgF2And sealing and fixing, wherein the bottom of the 4J49 alloy cylinder is hermetically sealed with the packaging base of the transistor shell.
Preferably, the packaging base and the ultraviolet light transmitting sealing cover are circular, and the circular structure enhances the mechanical strength of the light window under the action of differential pressure on two sides.
The vacuum ultraviolet light source has the advantages that the vacuum ultraviolet light source improves the production efficiency and the yield, reduces the cost, enhances the integration compatibility, is relatively stable in the actual use process, and prolongs the service life.
Drawings
FIG. 1 is a schematic view of example 1 of the present invention;
FIG. 2 is a schematic cross-sectional view of example 1 of the present invention;
FIG. 3 is a schematic view of example 2 of the present invention;
FIG. 4 is a schematic cross-sectional view of example 2 of the present invention;
FIG. 5 is a schematic view of example 3 of the present invention;
FIG. 6 is a schematic cross-sectional view of example 3 of the present invention;
wherein: 101-packaging base, 102-ultraviolet light transmitting sealing cover, 103-vacuum ultraviolet light excitation electrode part, 104-getter, 105-quartz glass tube, 106-metal electrode of vacuum ultraviolet light excitation electrode part, 107-lead, 108-Au80Sn20Solder, 118-Fe-Co-Ni 4J49 alloy frame, 109-inner electrode, 110-airtight material, 111-outer electrode, 112-adhesive, 113-insulating substrate, 114-MgF2Single crystal wafer, alloy frame 118-4J49, alloy cylinder 138-4J 49.
Detailed Description
The invention is further described below with reference to the figures and examples.
Example 1: a vacuum ultraviolet light source is shown in figure 1-2 and comprises a packaging base 101 and an ultraviolet light transmitting sealing cover 102, wherein the packaging base is a circular ceramic packaging tube shell, a plurality of inner electrodes are arranged in an air-tight cavity in the packaging base, the packaging base and the ultraviolet light transmitting sealing cover are both of a circular structure for enhancing the mechanical strength of the ultraviolet light transmitting sealing cover, the packaging base 101 is a circular ceramic packaging tube shell, a 4J49 alloy frame 118 is arranged at the top of the packaging base, and an Au (gold) is arranged below the ultraviolet light transmitting sealing cover80Sn20 Eutectic solder ring 108, package base and uv transparent hermetic cap pass through 4J49 alloy frame 118 and Au80Sn20The eutectic solder rings 108 are fixedly connected in a sealing fit manner; an airtight cavity is arranged between the packaging base 101 and the ultraviolet light transmitting sealing cover 102Inert gas is filled in the airtight cavity, a getter 104 and a vacuum ultraviolet light excitation electrode part 103 are further arranged in the airtight cavity, the getter and the vacuum ultraviolet light excitation electrode part are fixedly connected with the packaging base through glass solder 112, the vacuum ultraviolet light excitation electrode part is connected with a base inner electrode 109 through a lead, and a base electrode outer electrode 111 is arranged at the bottom and the outer side of the packaging base. The vacuum ultraviolet light excitation electrode part comprises a quartz glass tube side wall 105 and two symmetrical electrode part metal electrodes 106, the two electrode part metal electrodes are arranged on the outer side wall and are not in contact with each other and are insulated from the substrate of the packaging base, and the two electrode part metal electrodes 106 are respectively connected with an inner electrode 109 of the packaging base through two leads 107. The getter 104 is arranged between the vacuum ultraviolet excitation electrode part 102 and the package base inner electrode 109, and is fixedly connected with the package base through a glass solder 112.
The glass solder is solidified and connected at the temperature of 350-750 ℃, and the Au is80Sn20The eutectic alloy solder is welded at 350-500 ℃. The ultraviolet light transmitting sealing cover 102 is MgF parallel to the optical axis and crystal direction2A single chip 114.
The inert gas is high-purity krypton with the purity of 99.999% or above and the pressure of 10-4000 Pa, and the inert gas needs to reach the pressure required by the work of the light source. The package base 101 and the uv-transparent sealing cover 102 are fixedly connected by the sealing fit between the 4J49 alloy frame 118 and the solder ring 108, and the sealing process is a parallel seam welding process. The getter is used for absorbing gas components except inert gas in the packaging cavity under the activation condition, so that the inert gas in the airtight cavity is always ensured, and the stability of the vacuum ultraviolet light source is improved. An ultraviolet light excitation electrical signal is applied to the outer electrode 111 of the base electrode, the signal is transmitted to the two metal electrodes 106 of the vacuum ultraviolet light excitation electrode component through the inner electrode 109 connected with the outer electrode and the lead 107, the vacuum ultraviolet light excitation electrode component works to excite the inert gas into plasma, and the plasma radiates vacuum ultraviolet light.
Example 2: the principle and the implementation method of the vacuum ultraviolet light source are basically the same as those of the embodiment 1, the difference is shown in fig. 3-4, the packaging base 101 is a square ceramic packaging tube shell, the ultraviolet light transmitting sealing cover 102 is square, the mechanical strength can reach standard atmospheric pressure, the vacuum ultraviolet light excitation electrode component comprises an insulating substrate and two electrode component metal electrodes 105, the electrode component metal electrodes are thick film metal layers, the inner side walls of the electrode component metal electrodes are attached with insulating layers, the electrode component metal electrodes are arranged on the insulating substrate 113, and the two electrode component metal electrodes are respectively connected with two leads. The two electrode parts are arranged on the insulating substrate in a comb tooth structure.
Example 3: the principle and the implementation method of the vacuum ultraviolet light source are basically the same as those of embodiment 1, except that as shown in fig. 5-6, the package base 101 is a circular airtight to (transistor outline) package tube, the vacuum ultraviolet light excitation electrode component comprises two electrode component metal electrodes, the two electrode component metal electrodes are respectively and symmetrically arranged on an insulating substrate 113 etched with a groove at the position in an arc shape, the metal electrodes of the electrode component are bonded in the groove at the position of the insulating substrate through glass solder, the inner sides of the two electrode component metal electrodes are provided with insulating layers 105, the middle part of the metal component metal electrode is provided with an extension part parallel to the insulating substrate, and the extension part is connected to an inner electrode of the package base through a lead 107; the UV-transparent cover 102 has a circular single crystal MgF2Glass sheet and 4J49 alloy cylinder 138, round MgF2The glass sheet is adhered to one side of the opening of the 4J49 alloy cylinder through glass solder, and the other side of the cover and the outer side 4J49 alloy frame of the packaging base 101 are made of Au80Sn20Eutectic solder is sealed and sealed, and the ultraviolet light sealing cover is sealed and transmitted.
The above-described embodiment is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and other variations and modifications may be made without departing from the scope of the invention as set forth in the claims.

Claims (10)

1. A vacuum ultraviolet light source is characterized by comprising a packaging base and an ultraviolet light transmitting sealing cover, wherein the surface of the packaging base is provided with a plurality of inner electrodes and outer electrodes, the inner electrodes and the outer electrodes are filled with airtight materials and are correspondingly connected, an alloy frame is arranged outside a packaging base body, a solder ring is arranged on the outer edge of one side of the ultraviolet light transmitting sealing cover, and the packaging base and the ultraviolet light transmitting sealing cover are fixedly sealed and connected through the sealing matching of the alloy frame and the solder ring; an airtight cavity is arranged between the packaging base and the ultraviolet light transmitting sealing cover, an inner electrode of the packaging base is sealed in the airtight cavity, inert gas is filled in the airtight cavity, a getter and a vacuum ultraviolet light excitation electrode part are further arranged in the airtight cavity, the getter and the vacuum ultraviolet light excitation electrode part are both fixedly connected with the packaging base, an electrode of the vacuum ultraviolet light excitation electrode part is connected with the inner electrode of the packaging base through a lead, and an outer electrode of the packaging base is arranged outside the airtight cavity.
2. The vacuum ultraviolet light source as claimed in claim 1, wherein the vacuum ultraviolet light excitation electrode part comprises a side wall of the quartz glass tube and two electrode part metal electrodes, the two electrode part metal electrodes are not in contact with each other, the electrode part metal electrodes are disposed on the outer side of the side wall of the quartz glass tube, and the two electrode part metal electrodes are respectively connected with two wires.
3. The vacuum ultraviolet light source as claimed in claim 1, wherein the vacuum ultraviolet light excitation electrode part comprises an insulating substrate and an electrode part metal electrode, the electrode part metal electrode is disposed on the insulating substrate, one end of the electrode part metal electrode is connected to one conducting wire, and the other end of the electrode part metal electrode is connected to the other conducting wire.
4. The vacuum ultraviolet light source as claimed in claim 3, wherein the two electrode parts are arranged on the insulating substrate in a structure of a plurality of pairs of comb teeth.
5. The vacuum ultraviolet light source as claimed in claim 1, wherein the vacuum ultraviolet light excitation electrode part comprises two electrode part metal electrodes, the two electrode part metal electrodes are symmetrically arranged in a circular arc shape, the metal electrodes of the electrode part are adhered in the position grooves of the insulating substrate by glass solder, the inner sides of the two electrode part metal electrodes are provided with insulating layers, the middle part of the metal electrode of the metal part is provided with an extension part parallel to the insulating substrate, and the extension part is connected to the inner electrode of the package base through a lead.
6. The vacuum ultraviolet light source as claimed in claim 1, wherein the getter is disposed between the vacuum ultraviolet excitation electrode member and the susceptor electrode and near the susceptor electrode.
7. The vacuum ultraviolet light source as claimed in claim 1, wherein the solder is glass solder or Au80Sn20Eutectic solder, wherein the solder finishes sealing and curing under the environment condition of 350-750 ℃.
8. The vacuum ultraviolet light source of claim 1, wherein the uv transparent seal cap is MgF with a radial direction perpendicular to the C-axis crystal direction2An optical window made of a single crystal.
9. The vacuum ultraviolet light source of claim 5, wherein the ultraviolet light transmitting cover is MgF with a crystal phase radial perpendicular to the C-axis2Single crystal glass and 4J49 alloy cylinder, 4J49 alloy cylinder top and MgF2And sealing and fixing, wherein the bottom of the 4J49 alloy cylinder is hermetically sealed with the packaging base of the transistor shell.
10. The vacuum ultraviolet light source of claim 1, wherein the ultraviolet light transmitting cover is circular, and the circular structure enhances the mechanical strength of the light window under the differential pressure on two sides.
CN202010218144.XA 2020-03-25 2020-03-25 Vacuum ultraviolet light source Active CN111463104B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010218144.XA CN111463104B (en) 2020-03-25 2020-03-25 Vacuum ultraviolet light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010218144.XA CN111463104B (en) 2020-03-25 2020-03-25 Vacuum ultraviolet light source

Publications (2)

Publication Number Publication Date
CN111463104A true CN111463104A (en) 2020-07-28
CN111463104B CN111463104B (en) 2022-08-23

Family

ID=71680164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010218144.XA Active CN111463104B (en) 2020-03-25 2020-03-25 Vacuum ultraviolet light source

Country Status (1)

Country Link
CN (1) CN111463104B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050062398A1 (en) * 2003-09-19 2005-03-24 Nec Corporation Vacuum ultraviolet-excited ultraviolet phosphor and light-emitting device that uses this phosphor
CN1910733A (en) * 2004-01-14 2007-02-07 松下电器产业株式会社 Discharge lamp device
CN105845814A (en) * 2016-05-04 2016-08-10 华中科技大学 Ultraviolet LED packaging structure and manufacturing method thereof
US20180247806A1 (en) * 2017-02-26 2018-08-30 Anatoly Glass, LLC. Sulfur Plasma Lamp

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050062398A1 (en) * 2003-09-19 2005-03-24 Nec Corporation Vacuum ultraviolet-excited ultraviolet phosphor and light-emitting device that uses this phosphor
CN1910733A (en) * 2004-01-14 2007-02-07 松下电器产业株式会社 Discharge lamp device
CN105845814A (en) * 2016-05-04 2016-08-10 华中科技大学 Ultraviolet LED packaging structure and manufacturing method thereof
US20180247806A1 (en) * 2017-02-26 2018-08-30 Anatoly Glass, LLC. Sulfur Plasma Lamp

Also Published As

Publication number Publication date
CN111463104B (en) 2022-08-23

Similar Documents

Publication Publication Date Title
US3502929A (en) High intensity arc lamp
US7468515B2 (en) Ultra violet light sensor
EP0076648B1 (en) Electrodeless fluorescent light source
US20090206753A1 (en) Metal vapor discharge lamp
WO2006114988A1 (en) Excimer lamp
CA2166833C (en) Starting aid for metal halide lamps
JP4637822B2 (en) High pressure discharge lamp
CN111463104B (en) Vacuum ultraviolet light source
TWI287820B (en) Dielectric barrier-discharge lamp with socket
KR19980024933A (en) UV detector tube
US7061086B2 (en) Silicon package for piezoelectric device
JP3043565B2 (en) Dielectric barrier discharge lamp
JP2009252546A (en) Discharge lamp for ultraviolet rays, and lamp unit having this
US4221987A (en) High-pressure discharge tube operable in the open air without outer protective envelope
EP1043755A1 (en) Gas discharge tube
JP3692987B2 (en) Dielectric barrier discharge lamp device
JP5278211B2 (en) Discharge lamp
KR100926354B1 (en) Excimer lamp of flat type and tube type, and manufacturing method thereof
GB2424755A (en) A low-pressure discharge lamp for a photoionisation detector
WO1999034407A1 (en) Gas discharge tube
CN113294698A (en) Airtight packaging structure integrating plane optical window and spherical lens and manufacturing method
JP2004288634A (en) Dielectric barrier discharge lamp
JP3232946B2 (en) Dielectric barrier discharge lamp
JP2008293912A (en) High-voltage discharge lamp and light source device using the same
JP2011154876A (en) High-pressure discharge lamp and lighting system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant