CN111458865B

CN111458865B - Position error compensation correction device applied to large-caliber optical super-structure surface

Info

Publication number: CN111458865B
Application number: CN202010354552.8A
Authority: CN
Inventors: 罗先刚; 马晓亮; 李雄; 蒲明博; 高平
Original assignee: Institute of Optics and Electronics of CAS
Current assignee: Institute of Optics and Electronics of CAS
Priority date: 2020-04-29
Filing date: 2020-04-29
Publication date: 2021-11-19
Anticipated expiration: 2040-04-29
Also published as: CN111458865A

Abstract

The invention discloses a position error compensation and correction device applied to a large-aperture optical super-structure surface. The whole device is attached to the structural base for installation, the gas circuit system is communicated with the copper sucker, and the super-structural surface element is attached to the copper sucker to form micro-vacuum chamber adsorption. The upper end and the lower end of the flexible hinge mechanism are respectively fixed on the cylinder mounting part and the structure base. The multi-hinge mode is combined with a lever force arm to realize the amplification and the reversal of the thrust, the displacement lever ratio of the output end of the hinge is reduced, and the force is transmitted to the super-structural surface element to realize the micro-displacement deformation. After the super-structure surface element is processed, due to the influence of processing errors, ambient temperature and the like, deformation such as distortion, deviation, displacement and the like of a pattern area is corrected to correct errors of the super-structure surface element, and the position of the pattern is restored through compensation. The invention is suitable for precise adjustment of a light-weight optical system.

Description

Position error compensation correction device applied to large-caliber optical super-structure surface

Technical Field

The invention relates to the technical field of micro-nano optics, in particular to a high-precision position error compensation and correction device for a large-caliber optical super-structure surface, which is suitable for precision adjustment of a light-weight optical system.

Background

A nanostructured surface is a two-dimensional device composed of sub-wavelength structures. Optical devices generally realize the change of phase or polarization of light through the accumulation of optical paths, and a super-structure surface can break the optical path limit in refractive optics to realize sudden change of physical quantities such as phase, amplitude, polarization and the like. Such mutation may be achieved by a two-dimensional array of sub-wavelength scatterers. The scatterer is an electromagnetic modulation unit structure, which is often called an optical antenna in an optical band, and may be a metal or dielectric micron/nano particle, a metal or dielectric pattern, or the like. The principal characteristic of a nanostructured surface is that the distance between the unit structures is sub-wavelength, and these unit structures may have different geometric parameters, including shape, size, orientation, etc. There are three major differences between a super-surface and a conventional diffractive optic: firstly, wave front distribution is formed in a wavelength range after the emergence of the super surface; secondly, the regulation and control scale of the two-dimensional unit structure on the electromagnetic wave is smaller than the wavelength; the unit structure of the super surface is not only limited to the response to the electric field in the traditional device, but also can respond to the magnetic field. The metamaterial surface is characterized in that corresponding design and processing of a metamaterial surface structure are required to be carried out at each local position, but a substrate bearing the metamaterial surface is subjected to environmental changes (temperature, humidity, gravity and the like) to generate local position changes, so that the absolute position of the structure is changed, the amplitude and the phase of the metamaterial surface are changed, and finally the optical performance is deteriorated.

Disclosure of Invention

The invention aims to realize high-precision position error compensation and correction of an optical super-structure surface and can perform multi-point multi-area single correction in order to realize a high-resolution regional position error compensation and correction means of a nano pattern. Sixteen groups of flexible hinge mechanisms are uniformly distributed in the circumferential direction of the surface super-structural element, and the flexible hinge mechanisms can independently act to compensate and correct regional errors.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a be applied to high accuracy position error compensation correcting unit on heavy-calibre optics super structure surface, includes super structure surface component, flexible the hinge mechanism, circumference blocks, cylinder installed part, gas circuit system, structure base, gas circuit hang, copper sucking disc, POM, horizontal hinge, adaptor, cylinder, quick-connect plug, screw switching, direction hinge, lever hinge, screw, force transducer. Super-structure surface component passes through copper sucking disc vacuum adsorption function fixed, copper sucking disc passes through locating pin screw and gas circuit suspension screw connection, gas circuit system circumference is arranged everywhere in gas circuit suspension recess, through external vacuum pump, realize the little real empty room vacuum extraction of copper sucking disc, the gas circuit hangs and adopts locating pin mode screw connection at the structure base, the regional plane of fine machining at the structure base is installed to the cylinder installed part, use integral circumference to block restriction cylinder stroke, flexible the hinge mechanism is connected on the device through many places, the realization is rectified the error compensation of whole structure.

The flexible hinge mechanism is composed of a POM, a horizontal hinge, an adapter, a cylinder, a quick-connection plug, a thread adapter, a guide hinge, a lever hinge, a screw and a force sensor, 16 groups of the same flexible hinge mechanisms are uniformly distributed on the periphery of the super-structural surface element, the cylinder is arranged on a cylinder mounting part and serves as a thrust end of the device and is transmitted to the guide hinge through the thread adapter, the guide hinge adopts a hinge type design scheme to prevent radial force from being generated and avoid the cylinder from being damaged, only horizontal thrust is left after the radial force is transmitted through the guide hinge, the lever hinge is fixedly connected to a structural base through the screw, a fixed position serves as a fulcrum position of the lever hinge structure, and the output force transmitted to the force sensor after the lever hinge receives the thrust of the guide hinge is amplified by 3 times through the ratio of the lengths of the upper end to the lower end of the fulcrum 3: 1. The force sensor and the adapter are rigidly transmitted to the horizontal hinge, the output end of the flexible hinge mechanism is completely attached to the arc of the super-structural surface element by eliminating offset force, the POM is transmitted to the centripetal force of the super-structural surface element, deformation such as distortion, offset and displacement of a graphic area of the super-structural surface element is realized, and the correcting device compensates the error of the super-structural surface element and restores the graphic area.

Wherein: because the cylinder increases the cylinder power through atmospheric pressure under the normal condition, adopts three way atmospheric pressure valve to adjust for the cylinder is gone into to admit and export gas and is coordinated, can realize the in-process and reduce the cylinder power, in specific in-service use, avoids this type of operation as far as possible.

Wherein: the force sensor feeds back data after force detection, and the adjustment and control of the force of the cylinder are realized through the adjustment of the control system, so that the closed-loop control of the whole high-precision position error compensation and correction device is realized.

Wherein: the design theory of the invention can realize high-precision position error compensation and correction of various large-caliber optical super-structure surfaces, the same design theory means that the whole structures are similar, but the sizes of the same parts on different super-structure surface element correction devices are inconsistent, and the whole graph adjustment proportion needs to be determined jointly according to factors such as the size of a graph area, the diameter of the super-structure surface element and the like.

Wherein: the lever hinge is designed to be in arc transition with a four-thin-wall hinge structure. The center positions of the four thin walls are connected to form a parallelogram, the horizontal thin wall at the upper end is used as the fulcrum position of the whole lever hinge, one side of the parallelogram is fixed, the parallelogram horizontally moves around one point of the parallelogram under the action of thrust, the direction is changed from deviating from the super-structural surface element to the centripetal direction of the super-structural surface element, and the direction change of input force is realized.

Wherein: the horizontal hinge, the guide hinge and the lever hinge are all made of beryllium bronze materials through milling, and the quenching HRC35-42 enables the beryllium bronze to have higher wear resistance and high rigidity (1250-1500 MPa), so that the original shape can be stably restored after the thrust deformation, and the stability of the whole device is ensured.

Wherein: 16 groups of flexible hinge mechanisms are uniformly distributed in the circumferential direction of the super-structural surface element, corresponding to the non-uniform deformation of the graphic area of the super-structural surface element, and partial cylinders of the flexible hinge mechanisms are adopted to change air pressure to perform regional gradual error compensation and correction.

Wherein: the high-precision cavity surface of the copper sucker is attached to the surface element, and the surface element is subjected to vacuum adsorption by adopting a hard attaching mode. The adsorption force is adjusted by adjusting the air pressure of the air path system.

Compared with the prior art, the invention has the advantages that:

(1) the invention adopts the cylinder as the force source and provides enough thrust under the condition of limited height.

(2) The invention adopts a multi-hinge design scheme, and realizes the technology of amplifying input force, reducing the pushing displacement in equal proportion and reversing the pushing force by matching the hinges.

(3) The invention adopts sixteen groups of flexible hinge mechanisms which are uniformly distributed, and realizes the error correction of local areas by adopting different cylinder correction combination modes for the deformation of different graphic areas.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present invention;

FIG. 2 is a schematic view of the structure of the flexible hinge mechanism;

FIG. 3 is a high precision position error compensation and correction device for a 300mm large-caliber optical superstructure surface;

FIG. 4 is a high-precision position error compensation and correction device for a 500mm large-caliber optical super-structure surface.

In fig. 1: 1-a super-structure surface element, 2-a flexible hinge mechanism, 3-a circumferential barrier, 4-a cylinder mounting piece, 5-an air path system, 6-a structure base, 7-an air path suspension and 8-a copper sucker;

in fig. 2: 9-POM, 10-horizontal hinge, 11-adapter, 12-cylinder, 13-quick connector, 14-thread adapter, 15-guide hinge, 16-lever hinge, 17-screw and 18-force sensor.

Detailed Description

The invention is further illustrated by the following examples in connection with the accompanying drawings. The scope of the invention is not limited to the following examples, but is intended to include the full scope of the claims.

As shown in fig. 1: the invention relates to a high-precision position error compensation and correction device applied to a large-caliber optical super-structure surface, which comprises: the device comprises a super-structural surface element 1, a flexible hinge mechanism 2, a circumferential barrier 3, a cylinder mounting part 4, an air path system 5, a structural base 6, an air path suspension 7 and a copper sucker 8. Super structure surface element 1 is fixed through 8 vacuum adsorption functions of copper sucking disc, 7 screwed connection are hung with the gas circuit to copper sucking disc 8 through locating pin screw, 5 circumference of gas circuit system are arranged everywhere and are hung 7 recesses at the gas circuit, through external vacuum pump, the realization is to 8 little real empty room vacuum extractions of copper sucking disc, 7 adoption locating pin mode screw connections are hung to the gas circuit at structural foundation 6, 6 fine machining region planes at structural foundation are installed to cylinder installed part 4, flexible hinge mechanism 2 connects on the device through many places, the realization is rectified the error compensation of whole structure.

As shown in fig. 2: the flexible hinge mechanism 2 is a mechanism consisting of POM9, a horizontal hinge 10, an adapter 11, an air cylinder 12, a quick-connect plug 13, a thread adapter 14, a guide hinge 15, a lever hinge 16, a screw 17 and a

force sensor

18, 16 groups of the same flexible hinge mechanisms 2 are integrally used and uniformly distributed on the periphery of the super-structural surface component 1, the air cylinder 12 is installed on an air cylinder installation part 4 to serve as a thrust end of the device, the quick-connect plug 13 is connected on the air cylinder 12 in a threaded mode, an air cylinder with the diameter of 4mm is used for introducing air pressure, a push rod of the air cylinder 12 generates horizontal thrust and transmits the horizontal thrust to the guide hinge 15 through the thread adapter 14, the guide hinge 15 adopts a hinge type design scheme to prevent radial force from being generated to avoid damage of the air cylinder 12, only the horizontal thrust is left after the transmission through the guide hinge 15, the lever hinge 16 is fixedly connected on a structural base 6 through the screw 17, a fixed position serves as a fulcrum position of a lever hinge 16 structure, and the length ratio of the upper end to the lower end of the fulcrum is 3:1, the output force transmitted to the force sensor 18 by the lever hinge 16 after being pushed by the guide hinge 15 is expanded by 3 times, the force sensor 18 feeds back data after detecting the force, and the force of the air cylinder 12 is adjusted and controlled by the control system, so that the closed-loop control of the whole high-precision position error compensation correcting device is realized. The force sensor 18 and the adapter piece 11 are rigidly transmitted to the horizontal hinge 10, the output end of the flexible hinge mechanism 2 is completely attached to the arc of the super-structural surface element 1 by eliminating offset force, the output end of the flexible hinge mechanism is transmitted to the centripetal force of the super-structural surface element 1 through the POM9, deformation such as distortion, offset and displacement of the graphic area of the super-structural surface element 1 is realized, and the correction device compensates the error of the super-structural surface element 1 to restore the graphic position.

As shown in fig. 2: the lever hinge 16 is designed as a four-thin-wall hinge structure, and adopts circular arc transition. The center positions of the four thin walls are connected to form a parallelogram, the horizontal thin wall at the upper end is used as the fulcrum position of the whole lever hinge 16, and the parallelogram structure is pushed to move by input force, so that the force direction is reversed.

As shown in fig. 2: the horizontal hinge 10, the guide hinge 15 and the lever hinge 16 are all made of beryllium bronze through milling, and the quenching HRC35-42 enables the beryllium bronze to have higher wear resistance and high rigidity (1250-1500 MPa), so that the beryllium bronze can stably recover the original shape after thrust deformation, and the stability of the whole device is ensured.

As shown in fig. 3 and 4: the same design theory is applied to the distortion and the offset of the pattern area of the large-aperture super-structure surface element 1 with the diameter of 300mm, 500mm and the like. 16 groups of flexible hinge mechanisms 2 are uniformly distributed in the circumferential direction of the super-structural surface element 1, corresponding to the non-uniform deformation of the graphic area of the super-structural surface element 1, and partial air cylinders of the flexible hinge mechanisms 2 are adopted to change air pressure to perform regional gradual error compensation correction.

The invention has not been described in detail and is within the skill of the art.

Claims

1. The utility model provides a be applied to position error compensation correcting unit on heavy-calibre optics superstructure surface which characterized in that: the device comprises a super-structural surface element (1), a flexible hinge mechanism (2), a circumferential barrier (3), a cylinder mounting piece (4), an air channel system (5), a structural base (6), an air channel suspension (7) and a copper sucker (8); the super-structural surface element (1) is fixed through a vacuum adsorption function of a copper sucker (8), the copper sucker (8) is in screw connection with a gas circuit suspension (7) through a positioning pin screw, a gas circuit system (5) is circumferentially arranged in a groove of the gas circuit suspension (7), vacuum extraction of a micro-vacuum chamber of the copper sucker (8) is realized through an external vacuum pump, the gas circuit suspension (7) is positioned and installed on a structural base (6), a cylinder installation part (4) is installed on a fine machining area plane of the structural base (6), an integral circumferential barrier (3) is used for limiting the macro-motion stroke of a cylinder, and a flexible hinge mechanism (2) is connected onto the device through a screw;

16 groups of same flexible hinge mechanisms (2) are uniformly distributed on the periphery of a super-structural surface element (1), an air cylinder (12) is arranged on an air cylinder mounting piece (4) and serves as a thrust end of the device, a quick-connection plug (13) is in threaded connection with the air cylinder (12), air pressure is introduced by using a phi 4mm air cylinder, a push rod of the air cylinder (12) generates horizontal thrust and transmits the horizontal thrust to a guide hinge (15) through a threaded connection (14), the guide hinge (15) adopts a hinge type design scheme to prevent radial force from being generated and avoid the damage of the air cylinder (12), only the horizontal thrust is left after the transmission through the guide hinge (15), a lever hinge (16) is fixedly connected to a structural base (6) through a screw (17), the fixed position serves as a fulcrum position of a lever hinge (16) structure, and the output force transmitted to a force sensor (18) after the lever hinge (16) receives the thrust of the guide hinge (15) is amplified by 3 times through the length ratio of the lengths of the upper end to the lower end of the fulcrum being 3:1, force sensor (18) through feedback data after to the force detection, adjust control to cylinder (12) power size through control system adjustment, realize whole position error compensation correcting unit closed loop control, through force sensor (18), adaptor (11) rigidity is transmitted horizontal hinge (10) and is eliminated the offset force, flexible hinge mechanism (2) output is laminated completely with super structure surface component (1) arc, transmit super structure surface component (1) centripetal force through polyformaldehyde POM (9), realize warping, the skew, shift deformation to super structure surface component (1) figure district, correcting unit is to super structure surface component (1) error compensation, make the figure district recover.

2. The apparatus of claim 1, wherein the apparatus comprises: the same design theory is applied to the distortion and the offset of the pattern area of the 300mm and 500mm large-aperture super-structure surface element (1).

3. The apparatus of claim 1, wherein the apparatus comprises: the lever hinge (16) is designed into a four-thin-wall hinge structure, circular arc transition is adopted, the four thin-wall hinge structure is connected at the center position to form a parallelogram, the horizontal thin wall at the upper end is used as the fulcrum position of the whole lever hinge (16), and the parallelogram structure is pushed to move by input force, so that the force direction is reversed.

4. The apparatus of claim 1, wherein the apparatus comprises: the horizontal hinge (10), the guide hinge (15) and the lever hinge (16) are all milled and processed by beryllium bronze.

5. The apparatus of claim 1, wherein the apparatus comprises: 16 groups of flexible hinge mechanisms (2) are uniformly distributed in the circumferential direction of the super-structured surface element (1), corresponding to the non-uniform deformation of the graphic area of the super-structured surface element (1), and partial air cylinders of the flexible hinge mechanisms (2) are adopted to change air pressure to perform regional gradual error compensation correction.

6. The apparatus of claim 1, wherein the apparatus comprises: the copper sucking disc (8) chamber surface is laminated with super structure surface element (1), adopts stereoplasm laminating mode to super structure surface element (1) vacuum adsorption, through adjustment gas circuit system (5) atmospheric pressure size, adjusts the adsorption affinity.