CN111455344A

CN111455344A - Film coating equipment

Info

Publication number: CN111455344A
Application number: CN201910058320.5A
Authority: CN
Inventors: 王培红; 李晨光
Original assignee: Nanchang OFilm Display Technology Co Ltd
Current assignee: Nanchang OFilm Display Technology Co Ltd
Priority date: 2019-01-22
Filing date: 2019-01-22
Publication date: 2020-07-28

Abstract

The application discloses coating equipment. The coating equipment of this application embodiment coating film chamber, coating film drum and subassembly of ventilating. A part of the coating drum is positioned in the coating cavity. The substrate is wound on the coating drum, the ventilation assembly is arranged on the coating drum, and the ventilation assembly is used for guiding external gas into the coating drum and transmitting the external gas to the substrate wound on the coating drum. The subassembly of ventilating in the coating equipment of this application embodiment sets up on the coating film drum, through ventilating the subassembly with outside gas transmission to the substrate on, can twine the substrate on the coating film drum, can take away the heat of substrate again, guarantees the coating film quality of substrate.

Description

Film coating equipment

Technical Field

The application relates to the technical field of coating, in particular to coating equipment.

Background

In the related technology, the coating on the surface of the substrate to be coated is completed in the coating cavity, the temperature in the coating cavity rises along with the prolonging of the coating time and the increasing of the power of sputtering coating, and the substrate to be coated is easily heated unevenly under the action of high temperature and stress, the heat on the surface cannot be emitted in time, the problems of wrinkles, deformation, scratching, even material breakage and the like are easily caused, and the coating quality is poor.

Disclosure of Invention

The embodiment of the application provides a coating device.

The coating equipment of the embodiment of the application comprises a coating cavity, a coating drum and a ventilation assembly. One part of the coating drum is positioned in the coating cavity, and the base material is wound on the coating drum. The ventilation assembly is arranged on the coating drum and is used for introducing external gas into the coating drum and transmitting the external gas to the substrate wound on the coating drum.

Among the coating equipment of this application embodiment, the subassembly of ventilating can transmit outside gas to the coating drum, and the heat of substrate can be taken away to outside gas, avoids the high temperature of substrate, improves the quality of coating film on the substrate.

In certain embodiments, the coating apparatus further comprises a loading chamber, a winding chamber, a take-up chamber, and a roller assembly. The roller assembly comprises a plurality of rollers arranged in the feeding cavity, the winding cavity and the receiving cavity, the base material is wound on the rollers, and the roller assembly drives and guides the base material to sequentially pass through the feeding cavity, the winding cavity, the film coating cavity, the winding cavity and the receiving cavity. The air vent assembly is also disposed on at least one of the rollers for introducing external air into the interior of the roller and transferring the external air to the substrate wound on the roller.

In this embodiment, the subassembly of ventilating can transmit outside gas to the roller, and the heat of substrate can be taken away to outside gas, avoids the high temperature of substrate, further improves the quality of coating film on the substrate.

In certain embodiments, the vent assembly comprises a gas-permeable layer disposed on the coating drum and/or at least one of the rollers, the gas-permeable layer being provided with a plurality of vent holes, the vent assembly further comprising a vent conduit communicating with the gas-permeable layer, the vent conduit transmitting external gas through the plurality of vent holes of the gas-permeable layer to the substrate wound on the coating drum and/or the roller.

In this embodiment, the air-permeable layer is disposed on the coating drum and/or at least one roller, and the air-permeable layer can be used to contact with and support the substrate, and transmit the external air to the substrate through the air duct and the air holes, so that the substrate can be wound on the coating drum and/or at least one roller, and the heat of the substrate can be taken away.

In certain embodiments, the aeration assembly comprises a gas-permeable layer disposed on the coating drum and/or at least one of the rollers, the gas-permeable layer being provided with a plurality of aeration grooves, the aeration assembly further comprising an aeration conduit communicating with the gas-permeable layer, the aeration conduit transmitting external gas through the plurality of aeration grooves of the gas-permeable layer to the substrate wound on the coating drum and/or the roller.

In this embodiment, the air-permeable layer is disposed on the coating drum and/or at least one roller, and the air-permeable layer can be used to contact with and support the substrate, and transmit the external air to the substrate through the air duct and the air groove, so that the substrate can be wound on the coating drum and/or at least one roller, and the heat of the substrate can be taken away.

In certain embodiments, the aeration assembly comprises a drum aeration assembly comprising a drum aeration conduit disposed about a surface of the coating drum, the drum aeration conduit disposed within the coating drum and in communication with the aeration layer.

In the embodiment, the air-permeable layer is arranged on the surface of the coating drum to be in contact with the substrate, and the drum ventilation pipeline is arranged in the coating drum, so that the space in the coating drum is effectively utilized, the external size of the coating drum cannot be increased, and the winding of the substrate on the coating drum cannot be influenced.

In certain embodiments, the air-vent assembly comprises a roller air-vent assembly comprising a roller air-vent conduit disposed around a surface of the roller, the roller air-vent conduit disposed within the roller and in communication with the air-vent layer.

In this embodiment, the air-permeable layer is provided on the surface of the roller so as to be in contact with the substrate, and the air duct is provided in the roller, so that the space in the roller is effectively utilized, the outer dimension of the roller is not increased, and the winding of the substrate on the roller is not affected.

In some embodiments, the plurality of rollers includes a guide roller, the guide roller is located in the feeding cavity and the receiving cavity, when the vent assembly is disposed on the guide roller, the air permeable layer is disposed around the surface of the guide roller, the roller vent pipe is disposed in the guide roller, the guide roller can guide the movement direction of the substrate, and the substrate movement can drive the guide roller to rotate.

In the embodiment, the guide roller can be used for guiding the moving direction of the base material, so that the base material is always wound on the coating drum and the roller, and the ventilation assembly in the guide roller can be used for radiating the base material conveyed to the winding cavity or the base material output from the winding cavity, so that the high coating quality of the base material is ensured.

In certain embodiments, the plurality of rollers includes powered rollers positioned within the winding chamber on opposite sides of the coating drum, the air-permeable layer is disposed around a surface of the powered rollers when the air-permeable assembly is disposed on the powered rollers, the roller air-permeable conduits are disposed within the powered rollers, and the powered rollers are rotatable to drive and direct movement of the substrate.

In the embodiment, the power roller can drive the base material to move according to the preset speed, the base material in the coating cavity is prevented from being coated repeatedly, the ventilation assembly in the power roller can be used for radiating the heat of the base material wound on the power roller, and the damage of the base material and the power roller in the friction process is avoided.

In certain embodiments, the plurality of rollers includes an unwind roller positioned in the loading chamber, the substrate is rotatably disposed on the unwind roller, the substrate extends from the unwind roller, and at least one of the guide rollers is positioned between the unwind roller and the coating drum.

In this embodiment, the unwinding roller can be used to compactly store the substrate, the substrate wound on the unwinding roller can be input as a raw material for coating, and the at least one guide roller is located between the unwinding roller and the coating drum to ensure that the substrate is transferred onto the coating drum in a correct direction.

In some embodiments, the plurality of rollers includes a wind-up roller located in the receiving chamber, the substrate is rotatably disposed on the wind-up roller, the wind-up roller is used for winding up the substrate, and at least one guide roller is located between the wind-up roller and the coating drum.

In this embodiment, the coated substrate can be wound on the winding roll to be compactly stored, and the at least one guide roll is located between the winding roll and the coating drum, so that the coated substrate can be conveyed to the winding roll in the correct direction.

In some embodiments, the plurality of rollers further includes a pressing roller located in the material receiving chamber, the substrate is clamped between the pressing roller and the winding roller, and the pressing roller is used for pressing the target attached to the surface of the substrate.

In this embodiment, the pressfitting roller can avoid the target object to drop with target object pressfitting to substrate surface, and the substrate passes through the pressfitting roller earlier and the wind-up roll pressfitting jointly before rolling up to the wind-up roll, exists the perk when avoiding the substrate to be rolled up to the wind-up roll and warp.

In some embodiments, the coating apparatus further comprises a coating source located within the coating chamber, another portion of the coating drum being located within the winding chamber, the substrate passing from the winding chamber into the coating chamber, the coating source being configured to coat a portion of the substrate within the coating chamber.

In this embodiment, the coating source is disposed in the coating chamber to coat the substrate in the coating chamber without affecting the substrate outside the coating chamber.

In some embodiments, the coating device comprises a partition plate located between the coating cavity and the winding cavity, the partition plate extends from one side wall of the winding cavity to the outer side surface of the coating drum, the partition plate surrounds the coating drum, and a gap for the substrate to pass through is formed between the partition plate and the outer side surface.

In the embodiment, the partition board can enable the coating cavity and the winding cavity to be separated, the coating environment in the coating cavity is less influenced by the winding cavity, and the substrate is allowed to enter and exit the coating cavity through the gap.

In some embodiments, the filming drum includes an inner drum wall, a refrigerant layer surrounding the inner drum wall, and an outer drum wall surrounding the refrigerant layer, the air permeable layer is disposed surrounding the outer drum wall, and the drum ventilation duct passes through the inner drum wall, the refrigerant layer, and the outer drum wall.

In the embodiment, the refrigerant layer is arranged between the inner drum wall and the outer drum wall, the heat conduction area of the refrigerant layer and the outer drum wall is large, the heat of the base material can be conducted onto the refrigerant layer through the outer drum wall and taken away by the refrigerant layer, and the drum ventilation pipeline penetrates through the inner drum wall, the refrigerant layer and the outer drum wall to be communicated with the ventilation layer, so that the appearance of the coating drum cannot be influenced.

In some embodiments, the drum ventilating duct includes a first duct and a plurality of second ducts divergently communicated with a peripheral wall of the first duct, the first duct is disposed in the inner drum wall, and the plurality of second ducts extend from the peripheral wall of the first duct in a radial direction of the coating drum, penetrate through the refrigerant layer and the outer drum wall to a surface of the outer drum wall, and are communicated with the ventilating layer.

In this embodiment, the plurality of second pipelines are all communicated with the first pipeline, so that the overall structure of the drum vent pipeline is simplified, and the air pressure in the plurality of second pipelines is the same and is easy to control.

In certain embodiments, the roller aeration conduit comprises a third conduit in divergent communication with a plurality of fourth conduits on a peripheral wall of the third conduit, the third conduit disposed within the roller, the plurality of fourth conduits extending from the peripheral wall of the third conduit in a radial direction of the roller to the surface of the roller and in communication with the air-permeable layer.

In this embodiment, the plurality of fourth ducts are all communicated with the third duct, so that the overall structure of the roller air duct is simplified, and the air pressures in the plurality of fourth ducts are the same and easy to control.

In some embodiments, the vent has a pore size of 0.005mm to 0.5 mm.

In the embodiment, the range of the aperture of the vent hole is moderate, the vent hole has a good ventilation effect, the vent hole is not easy to block, and the substrate and the film cannot be sunken into the vent hole.

In some embodiments, the direction of extension of the vent groove is inclined with respect to the axial direction of the coating drum or the roller; or the extending direction of the vent groove is vertical to the axial directions of the film coating drum and the roller; or the extending direction of the vent groove is parallel to the axial directions of the film coating drum and the roller.

In the embodiment, the shape, the inclination and the extending direction of the vent groove are selected in various ways, so that various different air permeable layers are formed, and the ventilation device can meet more requirements.

In some embodiments, the width of the vent channel is 0.02mm to 2.0mm and the depth of the vent channel is 0.5mm to 20 mm.

In the embodiment, the width and depth range of the vent groove are moderate, the contact area of the vent groove and the base material is moderate, and the internal space formed by the vent groove can better transmit gas.

In certain embodiments, the surface roughness of the gas-permeable layer is 0.01 μm to 2.0 μm.

In the embodiment, the surface roughness of the breathable layer is in a moderate range, so that enough friction force can be generated between the base material and the breathable layer to transmit the base material, and the surface of the breathable layer is not too rough to damage the base material or cause unsmooth guiding of the base material due to too large friction force.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural view of a plating apparatus according to an embodiment of the present application;

FIG. 2 is a schematic structural view of a coating drum, a vent assembly and an external gas source according to an embodiment of the present disclosure;

FIGS. 3 and 4 are schematic views of the roller, the vent assembly and an external air source according to the embodiment of the present application;

FIG. 5 is a schematic structural view of a vent channel according to an embodiment of the present application;

fig. 6 to 8 are schematic structural views of a roller or a coating drum according to an embodiment of the present application;

fig. 9 is a schematic view showing the relationship between the plating film thickness and the gas flow rate of the plating apparatus according to the embodiment of the present application.

Description of the main element symbols:

the coating device 100, the machine body 10, the feeding cavity 11, the winding cavity 12, the coating cavity 13, the receiving cavity 14, the coating drum 20, the inner drum wall 21, the refrigerant layer 22, the outer drum wall 23, the roller assembly 30, the roller 31, the guide roller 32, the power roller 33, the unwinding roller 34, the winding roller 35, the laminating roller 36, the ventilation assembly 40, the ventilation layer 41, the ventilation hole 411, the ventilation groove 412, the ventilation pipeline 42, the drum ventilation assembly 43, the drum ventilation pipeline 431, the first pipeline 432, the second pipeline 433, the roller ventilation assembly 44, the roller ventilation pipeline 441, the third pipeline 442, the fourth pipeline 443, the coating source 50, the isolation plate 60, the substrate 200, the substrate 201 to be coated, the substrate 202 during coating, the substrate 203 after coating, the external gas source 300, the gas supply part 301, the flow controller 302, the heat exchanger 303 and the gas inlet pipeline 304.

Detailed Description

Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.

In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1 and 2, a coating apparatus 100 according to an embodiment of the present disclosure includes a coating chamber 13, a coating drum 20, and a vent assembly 40. A part of the coating drum 20 is located in the coating chamber 13, and the substrate 200 is wound on the coating drum 20. The aeration assembly 40 is disposed on the coating drum 20, and the aeration assembly 40 is used for introducing external gas into the interior of the coating drum 20 and transferring the external gas to the substrate 200 wound on the coating drum 20.

In the coating apparatus 100 according to the embodiment of the present application, the ventilation assembly 40 can transmit the external air to the coating drum 20, and the external air can take away the heat of the substrate 200, thereby preventing the substrate 200 from being too hot, and improving the quality of the coating on the substrate 200.

Further, with reference to fig. 1 and 2, the coating apparatus 100 further includes a loading chamber 11, a winding chamber 12, a receiving chamber 14, and a roller assembly 30. A part of the coating drum 20 is located in the coating chamber 13. The roller assembly 30 includes a plurality of rollers 31 disposed within the loading chamber 11, the winding chamber 12, and the receiving chamber 14. The base material 200 is wound around a plurality of rollers 31. The roller assembly 30 drives and guides the substrate 200 to pass through the loading chamber 11, the winding chamber 12, the coating chamber 13, the winding chamber 12 and the receiving chamber 14 in sequence. The aeration assembly 40 is also provided on at least one of the rollers 31, and the aeration assembly 40 serves to introduce external air into the interior of the roller 31 and transfer it to the substrate 200 wound on the roller 31.

In the coating apparatus 100 according to the embodiment of the present application, the ventilation assembly 40 can transmit the external air to the roller 31, and the external air can take away the heat of the substrate 200, so as to avoid the temperature of the substrate 200 from being too high, and further improve the quality of the coating on the substrate 200.

Specifically, the coating apparatus 100 may be used to coat a thin film on the substrate 200, such as a transparent conductive film, a metal conductive film, a decorative film, a window film, and the like. The coating apparatus 100 may be an apparatus for coating using a physical vapor deposition method (e.g., magnetron sputtering, evaporation coating, arc discharge ion plating, etc.) and a chemical vapor deposition method.

The coating apparatus 100 may include a machine body 10, the machine body 10 forms the above-mentioned cavities such as the loading cavity 11, the winding cavity 12, the coating cavity 13, and the receiving cavity 14, and different processes may be performed on the substrate 200 in different cavities, for example, the loading of the substrate 200 is performed in the loading cavity 11, the conveying direction of the substrate 200 is changed in the winding cavity 12, the coating operation on the substrate 200 is performed in the coating cavity 13, and the receiving of the substrate 200 is performed in the receiving cavity 14. In the embodiment of the present application, the substrate 200 is completely coated in the coating chamber 13, the substrate 200 may be referred to as a substrate 201 to be coated before entering the coating chamber 13, a portion of the substrate 200 located in the coating chamber 13 may be referred to as a substrate 202 during coating, and the substrate 200 output after coating in the coating chamber 13 may be referred to as a substrate 203 after coating.

The coating drum 20 may be cylindrical as a whole, and the coating drum 20 may be partially located in the winding chamber 12 and partially located in the coating chamber 13. The substrate 200 may be wound on the outer surface of the coating drum 20, and the substrate 200 is spread out relatively flat on the outer surface of the coating drum 20. The size of the coating drum 20 may be set larger, for example larger than the size of any one of the rollers 31, to wrap more substrates 200 at the same time and facilitate coating more substrates 200 at the same time. The coating drum 20 may be rotated synchronously while the substrate 200 is being transported, and specifically, in one example, the outer surface of the coating drum 20 and the substrate 200 may not slide relative to each other.

The roller assembly 30 comprises a plurality of rollers 31, the plurality of rollers 31 can be distributed in the feeding cavity 11, the winding cavity 12 and the receiving cavity 14, and the rollers 31 arranged in different cavities can realize different functions. The substrate 200 is driven and guided by the roller assembly 30 to sequentially pass through the loading chamber 11, the winding chamber 12, the coating chamber 13, the winding chamber 12 and the material receiving chamber 14, so as to complete the processes of loading, coating and receiving.

The number of the vent assemblies 40 can be one or more, the vent assemblies 40 can be arranged on the coating drum 20 independently, the vent assemblies 40 can be arranged on one or more rollers 31 independently, and the vent assemblies 40 can also be arranged on the coating drum 20 and one or more rollers 31 simultaneously, which is not limited herein. When the aeration assembly 40 is provided on the coating drum 20, the aeration assembly 40 introduces external gas into the interior of the coating drum 20 and transfers the external gas onto the substrate 200 wound on the coating drum 20. When the vent assembly 40 is provided on the roller 31, the vent assembly 40 introduces external air into the interior of the roller 31 and transfers the external air onto the substrate 200 wound on the roller 31. The external gas transmitted by the venting assembly 40 may be any gas, and preferably, the external gas may be an inert gas, such as argon or nitrogen, to prevent the external gas from reacting with the substrate 200.

It is understood that the temperature of the substrate 200 may be high due to the friction between the substrate 200 and the coating drum 20 and the roller 31 and the heat transferred from the film during the coating process during the process of transferring or coating the substrate 200, and the substrate 200 with high temperature may easily result in low coating yield. The vent assembly 40 can transmit external air to the coating drum 20 and/or the roller 31, and the external air can take away heat of the substrate 200, so that the temperature of the substrate 200 is prevented from being too high, and the coating quality on the substrate 200 is improved.

Referring to fig. 2-4, in some embodiments, the venting assembly 40 includes a gas-permeable layer 41, and the gas-permeable layer 41 is disposed on the coating drum 20 and/or at least one roller 31. The ventilation layer 41 is provided with a plurality of ventilation holes 411. The vent assembly 40 further includes a vent tube 42, the vent tube 42 communicating with the air-permeable layer 41. The vent duct 42 transmits external gas to the substrate 200 wound on the coating drum 20 and/or the roller 31 through the plurality of vent holes 411 of the gas permeable layer 41.

Specifically, the air-permeable layer 41 may be provided only on the coating drum 20, only on one or more rollers 31, or may be provided on both the coating drum 20 and one or more rollers 31. The gas permeable layer 41 may be welded to the coating drum 20 or the roller 31, and the gas permeable layer 41 may be used to contact the substrate 200 and support the substrate 200, and transmit external gas to the substrate 200 through the gas duct 42 and the gas vent 411, so as to wind the substrate 200 around the coating drum 20 and/or at least one roller 31 and take away heat of the substrate 200.

The air-permeable layer 41 may be a porous metal layer, and the material of the air-permeable layer 41 may be a foam-like metal. The surface roughness of the breathable layer 41 may range from 0.01 mm to 2.0mm, preferably from 0.1 mm to 1.0 mm, so that there is sufficient friction between the substrate 200 and the breathable layer 41 to transmit the substrate 200 without the surface of the breathable layer 41 being too rough to damage the substrate 200. The plurality of vent holes 411 are formed in the ventilation layer 41, the plurality of vent holes 411 may be communicated with each other, the pore size of the plurality of vent holes 411 may be 0.005mm to 0.5mm, and preferably, the pore size of the plurality of vent holes 411 is 0.05 mm to 0.2 mm, so that the vent holes 411 are not easily blocked and the substrate 200 and the film are not recessed into the vent holes 411.

Referring to fig. 2-4, in some embodiments, the venting assembly 40 includes a venting layer 41 disposed on the coating drum 20 and/or at least one of the rollers 31. The air-permeable layer 41 is provided with a plurality of vent grooves 412. The vent assembly 40 further includes a vent tube 42, the vent tube 42 communicating with the air-permeable layer 41. The vent duct 42 transmits external gas to the substrate 200 wound on the coating drum 20 and/or the roller 31 through the plurality of vent grooves 412 of the gas-permeable layer 41.

Specifically, the air-permeable layer 41 may be provided only on the coating drum 20, only on one or more rollers 31, or may be provided on both the coating drum 20 and one or more rollers 31. The gas-permeable layer 41 may be welded to the coating drum 20 or the roller 31, and the gas-permeable layer 41 may be used to contact the substrate 200 and support the substrate 200, and transmit external gas to the substrate 200 through the gas duct 42 and the gas groove 412, so as to wind the substrate 200 around the coating drum 20 and/or at least one roller 31 and take away heat of the substrate 200.

Referring to fig. 5, the air channel 412 may be opened on the outer circumferential surface of the air-permeable layer 41, and the bottom of the air channel 412 may communicate with the air duct 42 so that the external air is supplied to the air channel 412. The width W of the vent groove 412 may be 0.02mm to 2.0mm, and preferably, the width W of the vent groove 412 may be 0.1 mm to 1.0 mm, so that the contact area of the vent groove 412 and the substrate 200 is moderate. The depth H of the vent groove 412 may be 0.5mm to 20mm, and preferably, the depth H of the vent groove 412 may be 1 mm to 5mm, wherein the depth H of the vent groove 412 refers to the distance from the groove bottom of the vent groove 412 to the outer surface of the air-permeable layer 41, and the width W of the vent groove 412 refers to the size of the vent groove 412 on the outer surface of the air-permeable layer 41.

Referring to fig. 6 to 8, the air-permeable layer 41 forming the air-permeable groove 412 may be formed on the coating drum 20 or the roller 31. Taking the air-permeable layer 41 formed on the coating drum 20 as an example, the extending direction of the vent grooves 412 may be inclined with respect to the axial direction of the coating drum 20 (as shown in fig. 6), the extending direction of the vent grooves 412 may be perpendicular to the axial direction of the coating drum 20 (as shown in fig. 7), and the extending direction of the vent grooves 412 may be parallel to the axial direction of the coating drum 20 (as shown in fig. 8). In further embodiments, the shape of the vent slot 412 is not limited to the above-mentioned design, for example, the vent slot 412 may be in a wave shape, a zigzag shape, various regular or irregular shapes, etc., and the vent slot 412 may be specifically configured without affecting the normal ventilation of the ventilation assembly 40.

Referring to FIG. 2, in some embodiments, at least one vent assembly 40 includes a drum vent assembly 43. The drum vent assembly 43 includes a drum vent conduit 431. The air-permeable layer 41 is arranged around the surface of the coating drum 20, and the drum air duct 431 is arranged in the coating drum 20 and connected to the air-permeable layer 41.

The ventilation holes 411 or the ventilation grooves 412 described above may be formed in the ventilation layer 41, or the ventilation holes 411 and the ventilation grooves 412 may be formed at the same time. The breathable layer 41 is arranged on the surface of the coating drum 20 to be in contact with the substrate 200, and the drum ventilation pipeline 431 is arranged in the coating drum 20, so that the space in the coating drum 20 is effectively utilized, the external size of the coating drum 20 cannot be increased, and the winding of the substrate 200 on the coating drum 20 cannot be influenced.

Referring to FIG. 1, in some embodiments, the coating apparatus 100 further includes a coating source 50 located within the coating chamber 13. The coating drum 20 is partially located outside the coating chamber 13 and partially located inside the winding chamber 12. The substrate 200 enters the coating chamber 13 from the winding chamber 12. The coating source 50 is used to coat a portion of the substrate 200 within the coating chamber 13.

The coating source 50 is arranged in the coating chamber 13 to coat the substrate 200 in the coating chamber 13 without affecting the substrate 200 or other components outside the coating chamber 13. In one example, the coating source 50 may include components such as a target and an electrode.

Referring to fig. 1, in some embodiments, the coating apparatus 100 further includes a separation plate 60. The partition plate 60 is located between the coating chamber 13 and the winding chamber 12. The partition plate 60 extends from one side wall of the winding chamber 12 toward the outer side surface of the coating drum 20. The separator 60 surrounds the coating drum 20 and has a gap with the outer surface of the outer coating drum 20 through which the substrate 200 passes.

The divider 60 may space the coating chamber 13 from the winding chamber 12, the coating environment within the coating chamber 13 is less affected by the winding chamber 12, and the gap allows the substrate 200 to enter and exit the coating chamber 13. in one example, the gap has a width of 0.5mm to 10 mm, such that the gas cross-over between the coating chamber 13 and the winding chamber 12 is less than or equal to 5%, preferably less than or equal to 1%^-3Pa, the vacuum degree of the coating cavity 13 is kept less than or equal to 1.0 × 10^-4Pa, and adjusting the width of the gap after introducing external air so that the vacuum degree of the winding chamber 12 is maintained at 3.0 × 10 or less^-3Pa, the vacuum degree of the coating cavity 13 is kept less than or equal to 2.0 × 10^-4Pa, to provide a proper film plating environment for the film plating process.

Referring to fig. 2, in some embodiments, the coating drum 20 includes an inner drum wall 21, a refrigerant layer 22, and an outer drum wall 23. The refrigerant layer 22 is provided around the inner drum wall 21. An outer drum wall 23 is provided around the refrigerant layer 22. The breather layer 41 is disposed around the outer drum wall 23. The drum vent 431 passes through the inner drum wall 21, the refrigerant layer 22 and the outer drum wall 23.

The refrigerant layer 22 is disposed between the inner wall 21 and the outer wall 23, and the heat transfer area between the refrigerant layer 22 and the outer wall 23 is large. The heat of the substrate 200 can also be conducted to the refrigerant layer 22 through the outer drum wall 23 and taken away by the refrigerant layer 22, and the drum ventilation pipeline 431 passes through the inner drum wall 21, the refrigerant layer 22 and the outer drum wall 23 to be communicated with the ventilation layer 41, so that the appearance of the coating drum 20 is not influenced. The portion of the substrate 200 in physical contact with the ventilation layer 41 can transfer heat to the outer drum wall 23 and further to the inside of the refrigerant layer 22, and the portion of the substrate 200 corresponding to the ventilation holes 411 (or ventilation grooves 412) of the ventilation layer 41 can transfer heat to the outside air to be taken away. The refrigerant layer 22 may be a liquid, gaseous or solid refrigerant, and the surface temperature of the coating drum 20 can be adjusted by adjusting the temperature of the refrigerant layer 22.

Specifically, referring to fig. 2, in some embodiments, the drum vent conduit 431 includes a first conduit 432 and a plurality of second conduits 433. The plurality of second ducts 433 divergently communicate on the peripheral wall of the first duct 432. The first conduit 432 is disposed within the inner drum wall 21. The plurality of second ducts 433 extend from the peripheral wall of the first duct 432 in the radial direction of the coating drum 20, and the plurality of second ducts 433 pass through the refrigerant layer 22 and the outer drum wall 23 to the surface of the outer drum wall 23 and communicate with the ventilation layer 41.

The plurality of second conduits 433 are all communicated with the first conduits 432, and the plurality of first conduits 432 do not need to be arranged, so that the overall structure of the drum vent conduit 431 is simplified. The plurality of second pipelines 433 are all communicated with the same first pipeline 432, the air pressure in the plurality of second pipelines 433 is the same, and the air pressure in the plurality of second pipelines 433 is easily controlled simultaneously. The first pipe 432 may be coaxially disposed with the coating drum 20, and the plurality of second pipes 433 may be slidably connected with the first pipe 432, so that the plurality of second pipes 433 may rotate along with the rotation of the coating drum 20 without being wound around the first pipe 432.

The first conduit 432 is connected to the external gas source 300 to receive external gas. In the embodiment of the present application, the external gas source 300 includes a gas supply portion 301, a flow controller 302, a heat exchanger 303, and a gas inlet pipe 304. The gas supply portion 301 and the flow rate controller 302, the flow rate controller 302 and the heat exchanger 303, and the heat exchanger 303 and the first pipe 432 are communicated with each other through the intake pipe 304. The gas supply section 301 is used to generate an external gas, such as argon. The flow controller 302 is used to control the flow of the external gas into the first conduit 432, for example, to a flow rate of 5 to 10 standard-state cubic meter per minute (sccm). The heat exchanger 303 is used to adjust the temperature of the outside air introduced into the first conduit 432, and in one example, the temperature of the outside air may be adjusted to be the same as the temperature of the coating drum 20, so that the surface temperature of the solid portion of the gas-permeable layer 41 is substantially equal to the temperature of the air in the vent holes 411 (or the vent grooves 412), and the substrate 200 is uniformly heated.

Referring to fig. 9, in one example, the relationship between the flow rate of the external gas, the temperature of the coating drum 20 and the thickness of the substrate 200 can be represented by a graph as shown in fig. 9. Specifically, at the temperature of the low coating drum 20, generally at a temperature of-20 ℃ to +60 ℃, the flow rate of the introduced external gas is in a linear relationship with the thickness of the substrate 200, and meanwhile, under the same thickness of the substrate 200, the gas flow rate required by the temperature of the low coating drum 20 is greater than the gas flow rate required by the temperature of the high coating drum 20. At high drum 20 temperatures, typically +60 ℃ to +150 ℃, the gas flow remains substantially constant for substrate 200 thicknesses less than or equal to 25 mm.

Referring to fig. 3 and 4, in some embodiments, at least one venting assembly 40 includes a roller venting assembly 44. The roller breather assembly 44 includes a roller breather conduit 441 with the breather layer 41 disposed about the surface of the plurality of rollers 31. The roller air duct 441 is provided inside the roller 31 and communicates through the air layer 41.

The ventilation holes 411 or the ventilation grooves 412 described above may be formed in the ventilation layer 41, or the ventilation holes 411 and the ventilation grooves 412 may be formed at the same time. The air-permeable layer 41 is provided on the surface of the roller 31 to be in contact with the substrate 200, and the air duct 42 is provided in the roller 31, effectively utilizing the space in the roller 31, without increasing the outer dimension of the roller 31 and without affecting the winding of the substrate 200 on the roller 31.

Specifically, in the embodiment shown in fig. 3 and 4, the roller ventilation duct 441 includes a third duct 442 and a plurality of fourth ducts 443. The fourth conduits 443 divergently communicate on the peripheral wall of the third conduit 442. The third duct 442 is provided inside the roller 31, and the plurality of fourth ducts 443 extend from the peripheral wall of the third duct 442 in the radial direction of the roller 31 to the surface of the plurality of rollers 31 and communicate with the air-permeable layer 41.

The plurality of fourth conduits 443 are all in communication with the third conduits 442, eliminating the need for the plurality of third conduits 442, simplifying the overall structure of the roller breather conduit 441. The plurality of fourth conduits 443 are all communicated with the same third conduit 442, the air pressure in the plurality of fourth conduits 443 is the same, and the air pressure in the plurality of fourth conduits 443 can be easily controlled at the same time. The third pipe 442 may be coaxially disposed with the roller 31, and the plurality of fourth pipes 443 may be slidably connected with the third pipe 442 such that the plurality of fourth pipes 443 may rotate following the rotation of the roller 31 without being wound around the third pipe 442. The third pipe 442 is communicated with the external gas source 300 to receive external gas, and the specific composition and structure of the external gas source 300 can be referred to the description of the external gas source 300 communicated with the first pipe 432, which is not described herein again.

The roller 31 in the present embodiment may refer to any one or more of a guide roller 32, a power roller 33, an unwinding roller 34, a winding roller 35, and a nip roller 36 described below.

Referring to fig. 1 and 3, in some embodiments, the plurality of rollers 31 includes a guide roller 32. The guide rollers 32 are positioned in the feeding chamber 11 and the receiving chamber 14. When the air vent assembly 40 is disposed on the guide roll 32, the air permeable layer 41 is disposed around the surface of the guide roll 32. The roller air duct 441 is disposed within the guide roller 32, and the guide roller 32 may guide the moving direction of the substrate 200.

The base material 200 can drive the guide roller 32 to rotate, the guide roller 32 can be used for guiding the moving direction of the base material 200, so that the base material 200 is wound on the coating drum 20 and the roller 31 all the time, and the ventilation assembly 40 in the guide roller 32 can be used for radiating heat of the base material 200 conveyed to the winding cavity 12 or the base material 200 output from the winding cavity 12, thereby ensuring that the coating quality of the base material 200 is high. In addition, the guide roller 32 can also perform a tensioning function, and the substrate 200 can be tensioned with different tensioning forces by adjusting the position of the guide roller 32. In the present embodiment, one guide roller 32 is located in the loading chamber 11 and one guide roller 32 is located in the receiving chamber 14, however, the number and the position of the guide rollers 32 may be other arrangements, such as a plurality of guide rollers 32 arranged in the loading chamber 11 or a plurality of guide rollers 32 arranged in the receiving chamber 14.

Referring to fig. 1 and 3, in some embodiments, the plurality of rollers 31 includes a powered roller 33. The power rollers 33 are located in the winding chamber 12 on opposite sides of the coating drum 20. When the air vent assembly 40 is disposed on the power roller 33, the air-permeable layer 41 is disposed around the surface of the power roller 33. Roller breather conduit 441 is disposed within power roller 33, and power roller 33 is rotatable to drive and guide the movement of substrate 200. The power roller 33 can drive the base material 200 to move according to a preset speed, so that the base material 200 in the film coating cavity 13 is prevented from being coated repeatedly, the ventilation assembly 40 in the power roller 33 can be used for dissipating heat of the base material 200 wound on the power roller 33, and the base material 200 is prevented from being damaged easily in the process of friction with the power roller 33.

Referring to FIG. 1, in some embodiments, the plurality of rollers 31 includes an unwind roller 34 positioned in the loading chamber 11. The substrate 200 is rotatably disposed on the unwind roller 34, and the substrate 200 extends from the unwind roller 34. At least one guide roller 32 is positioned between the unwind roller 34 and the coating drum 20. The unwinding roll 34 can be used to compactly house the substrate 200, and the substrate 200 wound on the unwinding roll 34 can be input as a raw material of the substrate 200. At least one guide roller 32 is positioned between the unwind roller 34 and the coating drum 20 to ensure that the substrate 200 is transferred onto the coating drum 20 in the proper orientation.

Referring to fig. 1, in certain embodiments, the plurality of rollers 31 includes a wind-up roller 35 positioned in the receiving chamber 14. The substrate 200 is rotatably disposed on the wind-up roll 35. The take-up roll 35 is used for taking up the substrate 200, and the at least one guide roll 32 is positioned between the take-up roll 35 and the coating drum 20. The coated substrate 203 may be wound on a take-up roll 35 to be compactly received, and at least one guide roll 32 is located between the take-up roll 35 and the coating drum 20, so that the coated substrate 203 can be transferred onto the take-up roll 35 in a correct direction.

Referring to FIG. 1, in some embodiments, the plurality of rollers 31 further includes a stitching roller 36 positioned within the receiving chamber 14. The substrate 200 is clamped between the pressing roller 36 and the winding roller 35, and the pressing roller 36 is used for pressing the target object attached to the surface of the substrate 200 onto the surface of the substrate 200. The pressing roller 36 can press the target object onto the surface of the substrate 200 to prevent the target object from falling off, wherein the target object can be an electrode plated on the surface of the substrate 200 or an electronic component formed on the surface of the substrate 200. The substrate 200 is firstly pressed together with the wind-up roll 35 through the pressing roll 36 between the wound-up roll 35, so that the substrate 200 is prevented from warping and deforming when being wound up to the wind-up roll 35.

In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims

1. A plating apparatus, characterized by comprising:

coating a film cavity;

the coating drum is partially positioned in the coating cavity, and the base material is wound on the coating drum; and

the ventilation assembly is arranged on the coating drum and is used for introducing external gas into the coating drum and transmitting the external gas to the substrate wound on the coating drum.

2. The plating device according to claim 1, further comprising a feeding chamber, a winding chamber, and a receiving chamber; and

the roller assembly comprises a plurality of rollers arranged in the feeding cavity, the winding cavity and the receiving cavity, the substrate is wound on the rollers, the roller assembly drives and guides the substrate to sequentially pass through the feeding cavity, the winding cavity, the film coating cavity, the winding cavity and the receiving cavity, the ventilation assembly is further arranged on at least one roller, and the ventilation assembly is used for guiding external air into the rollers and transmitting the external air to the substrate wound on the rollers.

3. The plating apparatus according to claim 2, wherein the vent assembly comprises a gas-permeable layer provided on the plating drum and/or at least one of the rollers, the gas-permeable layer being provided with a plurality of vent holes, the vent assembly further comprising a vent pipe communicating with the gas-permeable layer, the vent pipe transmitting external gas to the substrate wound around the plating drum and the roller through the plurality of vent holes of the gas-permeable layer.

4. The plating apparatus according to claim 2, wherein the air vent assembly includes an air-permeable layer provided on the plating drum and/or at least one of the rollers, the air-permeable layer being provided with a plurality of air vent grooves, the air vent assembly further comprising an air vent pipe communicating with the air-permeable layer, the air vent pipe transmitting external gas to the substrate wound around the plating drum and the roller through the plurality of air vent grooves of the air-permeable layer.

5. The plating apparatus according to claim 3 or 4, wherein the vent assembly comprises a drum vent assembly including a drum vent conduit, the gas-permeable layer being disposed around a surface of the plating drum, the drum vent conduit being disposed within the plating drum and in communication with the gas-permeable layer.

6. The plating apparatus according to claim 3 or 4, wherein the air vent assembly comprises a roller air vent assembly including a roller air vent tube, the air-permeable layer being disposed around a surface of the roller, the roller air vent tube being disposed within the roller and communicating with the air-permeable layer.

7. The coating apparatus according to claim 6, wherein the plurality of rollers includes a guide roller, the guide roller is disposed in the feeding chamber and the receiving chamber, the air permeable layer is disposed around a surface of the guide roller when the air vent assembly is disposed on the guide roller, the roller air vent is disposed in the guide roller, the guide roller guides a movement direction of the substrate, and the substrate moves to rotate the guide roller.

8. The coating apparatus according to claim 6, wherein the plurality of rollers includes powered rollers positioned within the winding chamber on opposite sides of the coating drum, the air-permeable layer being disposed around a surface of the powered rollers when the air-vent assembly is disposed thereon, the roller air-vent conduits being disposed within the powered rollers, the powered rollers being rotatable to drive and guide movement of the substrate.

9. The plating apparatus according to claim 7, wherein the plurality of rollers includes an unwinding roller located in the loading chamber, the substrate is rotatably disposed on the unwinding roller, the substrate extends from the unwinding roller, and at least one of the guide rollers is located between the unwinding roller and the plating drum.

10. The plating apparatus according to claim 7, wherein the plurality of rollers includes a take-up roller located in the material receiving chamber, the substrate is rotatably disposed on the take-up roller, the take-up roller is configured to take up the substrate, and at least one of the guide rollers is located between the take-up roller and the plating drum.

11. The plating apparatus according to claim 10, wherein the plurality of rollers further includes a pressing roller disposed in the material receiving chamber, the substrate is sandwiched between the pressing roller and the winding roller, and the pressing roller is configured to press a target attached to a surface of the substrate onto the surface of the substrate.

12. The coating apparatus of claim 5 further comprising a coating source located within the coating chamber, another portion of the coating drum being located within the winding chamber, the substrate passing from the winding chamber into the coating chamber, the coating source being adapted to coat a portion of the substrate within the coating chamber.

13. The plating device according to claim 12, comprising a partition plate that extends from a side wall of the winding chamber toward an outer side surface of the plating drum between the plating chamber and the winding chamber, the partition plate surrounding the plating drum with a gap for the substrate to pass through.

14. The plating apparatus according to claim 12, wherein the plating drum comprises an inner drum wall, a refrigerant layer provided around the inner drum wall, and an outer drum wall provided around the refrigerant layer, the gas permeable layer is provided around the outer drum wall, and the drum vent pipe passes through the inner drum wall, the refrigerant layer, and the outer drum wall.

15. The plating apparatus according to claim 14, wherein the drum vent conduit comprises a first conduit and a plurality of second conduits divergently communicating with a peripheral wall of the first conduit, the first conduit being disposed within the inner drum wall, the plurality of second conduits extending from the peripheral wall of the first conduit in a radial direction of the plating drum, penetrating the refrigerant layer and the outer drum wall to a surface of the outer drum wall and communicating with the gas permeable layer.

16. The plating apparatus according to claim 6, wherein the roller air-vent duct comprises a third duct and a plurality of fourth ducts divergently communicating on a peripheral wall of the third duct, the third duct being provided inside the roller, the plurality of fourth ducts extending from the peripheral wall of the third duct to the surface of the roller in a radial direction of the roller and communicating with the air-permeable layer.

17. The plating apparatus according to claim 3, wherein the aperture of the vent hole is 0.005mm to 0.5 mm.

18. The plating apparatus according to claim 4, wherein the direction of extension of the vent groove is inclined with respect to the axial direction of the plating drum or the roller; or the extending direction of the vent groove is vertical to the axial directions of the film coating drum and the roller; or the extending direction of the vent groove is parallel to the axial directions of the film coating drum and the roller.

19. The plating apparatus according to claim 4, wherein the width of the vent groove is 0.02mm to 2.0mm, and the depth of the vent groove is 0.5mm to 20 mm.

20. The plating apparatus according to claim 3 or 4, wherein the surface roughness of the gas-permeable layer is 0.01 μm to 2.0 μm.