CN111431493B - Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone - Google Patents
Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone Download PDFInfo
- Publication number
- CN111431493B CN111431493B CN202010324200.8A CN202010324200A CN111431493B CN 111431493 B CN111431493 B CN 111431493B CN 202010324200 A CN202010324200 A CN 202010324200A CN 111431493 B CN111431493 B CN 111431493B
- Authority
- CN
- China
- Prior art keywords
- resistor
- capacitor
- circuit
- operational amplifier
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/68—Combinations of amplifiers, e.g. multi-channel amplifiers for stereophonics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/26—Modifications of amplifiers to reduce influence of noise generated by amplifying elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/30—Modifications of amplifiers to reduce influence of variations of temperature or supply voltage or other physical parameters
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Networks & Wireless Communication (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Amplifiers (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention discloses an echo amplifying circuit of a low-noise MEMS piezoelectric hydrophone. The echo amplifying circuit mainly comprises an in-phase amplifying circuit and a voltage following circuit. The circuit is supplied with power by an accurate voltage source, a proper static potential is provided for the in-phase amplifying circuit by the aid of the following circuit through resistance voltage division, the operational amplifier with low equivalent input noise voltage and low equivalent input noise current is selected, and the external resistance is reasonably selected, so that the echo amplifying circuit has a certain filtering effect, equivalent input noise of the circuit is reduced, and signal-to-noise ratio of signals is further improved. The circuit is convenient for adjusting the static working point of the amplifying circuit, the circuit is simplified by single power supply, the circuit stability is good, the used devices are few, the cost is low, the input and output share the same interface, the circuit is convenient to be connected with an external circuit, the operation is convenient, and the circuit has certain application value.
Description
Technical Field
The invention belongs to the field of electronic circuits, and particularly relates to a low-noise MEMS piezoelectric hydrophone echo amplification circuit.
Background
The sea is a treasure house of resources and is the key point of long-term development of human society. Exploration and development of oceans, and detection and management of resources thereof all rely on acquisition of ocean information. The hydrophone is mainly used for picking up and analyzing underwater sound waves, and has very important significance for exploration and excavation of ocean resources. The traditional hydrophone has the advantage of high sensitivity and occupies the mainstream position in the market at present, but has the disadvantages of high manufacturing cost, large volume, difficulty in forming an array situation to cover a large area of sea and the like. With the development of technology, hydrophones with low power consumption, low cost and long endurance time are required to be applied to some specific fields. The MEMS piezoelectric hydrophone has the advantages of small volume, low power consumption, low cost and the like, the MEMS piezoelectric sensor acts on the surface of the sensor through external sound, so that the piezoelectric material deforms to generate weak charges, and because signals are weak and are not enough to be detected, the in-phase amplifying circuit with high input impedance is needed to amplify and filter the signals so as to reduce the influence of noise on useful signals, and the signal-to-noise ratio of the sensor is improved.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides an echo amplifying circuit of a low-noise MEMS piezoelectric hydrophone. The circuit can reasonably amplify a weak voltage signal of the sensor, reduces equivalent input noise of the circuit and improves the signal-to-noise ratio of the circuit, and has the advantages of low cost, simple structure, easiness in adjustment, single power supply and the like.
In order to achieve the purpose, the invention specifically adopts the following technical scheme:
an echo amplifying circuit of a low-noise MEMS piezoelectric hydrophone comprises a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, a sixth capacitor C6, a seventh capacitor C7, an eighth capacitor C8, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, a ninth resistor R9, a tenth resistor R10, a first operational amplifier U1A, a second operational amplifier U2A and a connector P1;
one end of a piezoelectric sensor of the MEMS piezoelectric hydrophone is connected with one end of a first capacitor C1, the other end of the first capacitor C1 and one end of a first resistor R1 are respectively connected with a forward input end of a first operational amplifier U1A, one end of a second resistor R2, one end of a third resistor R3 and one end of a second capacitor C2 are respectively connected with a reverse input end of the first operational amplifier U1A, the other end of the third resistor R3, the other end of a second capacitor C2 and one end of a third capacitor C3 are respectively connected with an output end of the first operational amplifier U1A, the other end of the piezoelectric sensor, the other end of the first resistor R1, the other end of the second resistor R2 and one end of a seventh capacitor C7 are respectively connected with one end of a seventh resistor R7, the other end of the third capacitor C3 is connected with one end of a fourth resistor R4, the other end of the fourth resistor R4, one end of the fifth resistor R5 and one end of the fourth capacitor C4, A positive power supply end of the first operational amplifier U1A, a positive power supply end of the second operational amplifier U2A are respectively connected to one end of a ninth resistor R9, the other end of a fourth capacitor C4 is connected to one end of a tenth resistor R10, the other end of the ninth resistor R9, the other end of a fourth capacitor C4, and the other end of a tenth resistor R10 are respectively connected to the 1 port, the 2 port, and the 3 port of the connector P1, the other end of the fifth resistor R5, one end of the sixth resistor R6, one end of a fifth capacitor C5, and one end of a sixth capacitor C6 are respectively connected to the positive input end of the second operational amplifier U2A, the negative power supply end of the first operational amplifier U1A, the negative power supply end of the second operational amplifier U2A, the other end of the sixth resistor R6, the other end of the fifth capacitor C5, the other end of the sixth capacitor C6, the other end of the seventh capacitor C7 are all grounded, one end of the eighth resistor R8, and one end of the eighth capacitor U8 are respectively connected to the reverse input end of the second operational amplifier U2A, the other end of the eighth resistor R8, the other end of the eighth capacitor C8, and the other end of the seventh resistor R7 are respectively connected to the output terminal of the second operational amplifier U2A.
Preferably, the first operational amplifier U1A is an LTC6241 dual-channel operational amplifier with low equivalent input noise voltage.
Preferably, the second operational amplifier U2A is an LTC6241 dual-channel operational amplifier with low equivalent input noise voltage.
Preferably, the size of the first capacitor C1 is 1 μ F, the size of the second capacitor C2 is 180pF, the size of the third capacitor C3 is 68 μ F, the size of the fourth capacitor C4 is 1 μ F, the size of the fifth capacitor C5 is 100nF, the size of the sixth capacitor C6 is 10 μ F, the size of the seventh capacitor C7 is 10pF, and the size of the eighth capacitor C8 is 1 μ F.
Preferably, the first resistor R1 is 1M Ω, the second resistor R2 is 10k Ω, the third resistor R3 is 1.5M Ω, the fourth resistor R4 is 100 Ω, the fifth resistor R5 is 10k Ω, the sixth resistor R6 is 10k Ω, the seventh resistor R7 is 2k Ω, the eighth resistor R8 is 4.99k Ω, the ninth resistor R9 is 300 Ω, and the tenth resistor R10 is 1M Ω.
Preferably, the port 1, the port 2 and the port 3 of the connector P1 are a power supply positive input terminal, a data output terminal and a power supply ground terminal, respectively.
Compared with the prior art, the circuit provided by the invention is powered by an accurate voltage source, a proper static potential is provided for the in-phase amplifying circuit by utilizing the following circuit through resistance voltage division, and the equivalent input noise of the circuit is reduced while the echo amplifying circuit has a certain filtering effect by selecting the operational amplifier with low equivalent input noise voltage and low equivalent input noise current and reasonably selecting the external resistance, so that the signal-to-noise ratio of the signal is further improved. The circuit is convenient for adjusting the static working point of the amplifying circuit, the circuit is simplified by single power supply, the circuit stability is good, the used devices are few, the cost is low, the input and output share the same interface, the circuit is convenient to be connected with an external circuit, the operation is convenient, and the application value is high.
Drawings
Fig. 1 is a schematic diagram of a low-noise amplifier circuit of a MEMS piezoelectric hydrophone according to the present invention.
Fig. 2 is a block diagram of a low-noise amplifier circuit of a MEMS piezoelectric hydrophone according to the present invention.
FIG. 3 is a simulation diagram of the gain performance of the low noise amplifier circuit in the embodiment;
FIG. 4 is a diagram showing the simulation result of the equivalent noise voltage spectrum density of the low noise amplifier circuit in the embodiment;
fig. 5 is a practical diagram of the gain performance of the low noise amplifier circuit in the embodiment.
Detailed Description
The invention will be further elucidated and described with reference to the drawings and the detailed description.
Fig. 1 is a schematic diagram of a MEMS piezoelectric hydrophone low-noise amplifier circuit according to an embodiment of the present invention. The echo amplifying circuit is used in an MEMS piezoelectric hydrophone, and the receiving sensitivity of a hydrophone chip in a low frequency band is low, so that a signal amplifying circuit needs to be designed to amplify signals picked up by a piezoelectric sensor, and the sensitivity of the hydrophone is improved. The MEMS piezoelectric hydrophone low-noise amplifying circuit comprises a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, a sixth capacitor C6, a seventh capacitor C7, an eighth capacitor C8, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, a ninth resistor R9, a tenth resistor R10, a first operational amplifier U1A, a second operational amplifier U2A and a connector P1.
One end of a piezoelectric sensor of the MEMS piezoelectric hydrophone is connected to one end of a first capacitor C1, the other end of the first capacitor C1 and one end of a first resistor R1 are respectively connected to a forward input terminal of a first operational amplifier U1A, one end of a second resistor R2, one end of a third resistor R3 and one end of a second capacitor C2 are respectively connected to a reverse input terminal of the first operational amplifier U1A, the other end of the third resistor R3, the other end of the second capacitor C2 and one end of a third capacitor C3 are respectively connected to an output terminal of the first operational amplifier U1A, the other end of the piezoelectric sensor, the other end of the first resistor R1, the other end of the second resistor R2 and one end of a seventh capacitor C7 are respectively connected to one end of a seventh resistor R7, the other end of the third capacitor C3 is connected to one end of a fourth resistor R4, the other end of the fourth resistor R4, one end of the fifth resistor R5 and one end of the fourth capacitor C4, A positive power supply end of the first operational amplifier U1A, a positive power supply end of the second operational amplifier U2A are respectively connected to one end of a ninth resistor R9, the other end of a fourth capacitor C4 is connected to one end of a tenth resistor R10, the other end of the ninth resistor R9, the other end of a fourth capacitor C4, and the other end of a tenth resistor R10 are respectively connected to the 1 port, the 2 port, and the 3 port of the connector P1, the other end of the fifth resistor R5, one end of the sixth resistor R6, one end of a fifth capacitor C5, and one end of a sixth capacitor C6 are respectively connected to the positive input end of the second operational amplifier U2A, the negative power supply end of the first operational amplifier U1A, the negative power supply end of the second operational amplifier U2A, the other end of the sixth resistor R6, the other end of the fifth capacitor C5, the other end of the sixth capacitor C6, the other end of the seventh capacitor C7 are all grounded, one end of the eighth resistor R8, and one end of the eighth capacitor U8 are respectively connected to the reverse input end of the second operational amplifier U2A, the other end of the eighth resistor R8, the other end of the eighth capacitor C8, and the other end of the seventh resistor R7 are respectively connected to the output terminal of the second operational amplifier U2A. The port 1, the port 2 and the port 3 of the connector P1 are respectively a power supply positive input terminal, a data output terminal and a power supply ground terminal.
The MEMS piezoelectric hydrophone low-noise amplifier circuit can be functionally divided into an in-phase amplifier circuit module and a voltage follower circuit module, and fig. 2 is a circuit structure block diagram thereof. The principle of signal processing is as follows:
weak charge signals are converted into amplified voltage signals through the in-phase amplifying circuit module, the positive input end of the amplifying circuit is connected with the end 1 of the piezoelectric sensor, and the output end of the amplifying circuit is connected with the end 2 of the connector; and the 2 ends of the piezoelectric sensors are connected with the output end of the following circuit. The voltage follower circuit provides a state potential for the in-phase amplifying circuit, the positive input end is connected with a voltage dividing point of the power supply voltage, and the output end is connected with the reverse input end of the operational amplifier of the amplifying circuit. The P1 connector is a common port for power supply and signal output, mainly for providing power supply voltage and signal output to the operational amplifiers of the two modules. The 1 port of the connector P1 supplies a positive voltage U0 to the two operational amplifiers via the ninth resistor R9, and the other end of the operational amplifier is connected to ground. The fifth resistor R5 and the sixth resistor R6 are connected in series to divide the power supply voltage provided by the connector P1, so that the voltage of the direct current voltage U1 which is input to the positive input end of the voltage follower amplifier is U0/2, a static bias voltage is provided for the non-inverting amplifier, the signal output is favorably amplified, and the sixth capacitor C6 and the third capacitor C3 play a role in parallel decoupling on the voltage input by the fifth resistor R5. The reverse input end of the operational amplifier of the voltage following module is connected with the output end of the second operational amplifier U2A through a seventh resistor R7 and a second capacitor C2, and the function of low-pass filtering is achieved to remove unnecessary high-frequency noise. The output end of the voltage following module is connected with the inverting input end of the first operational amplifier U1A to provide the bias voltage of U0/2 for the non-inverting amplifying circuit module. When the piezoelectric sensor is not stressed, no alternating voltage is generated so there is no output at the 2 port of connector P1. When the piezoelectric transducer is subjected to an external sound field, alternating charges are generated, and the port 1 of the piezoelectric transducer is connected with the positive input end of the first operational amplifier U1A through the first capacitor C1. The first resistor R1 is connected in parallel with the first capacitor C1 for dissipating the initial charge on the first capacitor C1. Alternating charges are changed into alternating voltages Uq0 after passing through a first capacitor C1, the alternating voltages are superposed with bias voltages U0/2 provided by a voltage following module, direct current and alternating current amplification is carried out through a non-inverting amplifying circuit, the amplification factor 1+ R3/R2 of the non-inverting amplifying circuit is determined by the resistance of the negative input end of an operational amplifier, and an active low-pass filter circuit is formed by a second capacitor C2 and a third resistor R3 to inhibit the influence of high-frequency noise. The final output signal passes through the blocking capacitors C3 and C9, and the fourth resistor R4 filters the dc signal to obtain an amplified voltage signal Uq1 ═ 1+ R3/R2 Uq0, and the amplified voltage signal Uq1 is output at the 2-port of P1.
In the circuit, the model selection parameters of each element are as follows:
the size of the first capacitor C1 is 1 muF, the size of the second capacitor C2 is 180pF, the size of the third capacitor C3 is 68 muF, the size of the fourth capacitor C4 is 1 muF, the size of the fifth capacitor C5 is 100nF, the size of the sixth capacitor C6 is 10 muF, the size of the seventh capacitor C7 is 10pF, and the size of the eighth capacitor C8 is 1 muF.
The size of the first resistor R1 is 1M omega, the size of the second resistor R2 is 10k omega, the size of the third resistor R3 is 1.5M omega, the size of the fourth resistor R4 is 100 omega, the size of the fifth resistor R5 is 10k omega, the size of the sixth resistor R6 is 10k omega, the size of the seventh resistor R7 is 2k omega, the size of the eighth resistor R8 is 4.99k omega, the size of the ninth resistor R9 is 300 omega, and the size of the tenth resistor R10 is 1M omega.
Further, as operational amplifiers that are currently used in the piezoelectric sensing field, there are LM358A dual-channel operational amplifiers manufactured by Texas Instruments (TI), AD8542 dual-channel operational amplifiers manufactured by ADI, LTC6241 dual-channel operational amplifiers manufactured by Texas Instruments (TI), and the like. The main advantages of LM358A and AD8542 are low cost and large operating voltage range (LM 358A). But the gain-bandwidth product, input bias current, offset voltage, slew rate, and input noise-voltage spectral density are less than ideal. In contrast, the LTC6241 dual-channel operational amplifier has higher cost, and has greater advantages in other performance parameters, particularly, the slew rate and the input voltage noise density are particularly important for the MEMS hydrophone designed by the present invention, so the LTC6241 dual-channel operational amplifier can be used for both the first operational amplifier U1A and the second operational amplifier U2A of the present invention.
In the circuit, the third capacitor C3 has very low capacitance to alternating current signals, can effectively isolate direct current signals, and is connected with the positive power supply end of the operational amplifier after being connected with the R4 in series, so that the power supply of the operational amplifier can be increased to a certain extent along with the increase of output signals, and the linear working interval of the operational amplifier is improved. The fifth resistor R5 and the sixth resistor R6 divide the power supply voltage of the operational amplifier so that the output voltage of the follower circuit is exactly half of the power supply voltage. The resistor R8 and the capacitor C4 combine to form a passive low-pass filter, so that the reference ground is stable when the voltage at the positive power supply terminal of the operational amplifier is floating due to changes in the output signal.
The performance of the low noise amplifier circuit was simulated and the results are shown in fig. 3 and 4. From the results, the maximum gain was about 38dB and the-3 dB bandwidth was 8Hz-800 Hz. The equivalent input noise voltage spectral density is basically stabilized at 15.8 nV/V Hz after 10Hz, which is in line with the design expectation.
In order to verify the practical performance of the low-noise amplifying circuit, a corresponding PCB is processed, and the area is only 13mm multiplied by 40 mm. Then the actual performance was tested side-by-side: the invention adopts a direct current power supply (Agilent E3631A) to provide working voltage for an operational amplifier, then uses a signal generator (Agilent 33522A) to input a sinusoidal alternating current signal with a peak value of 10mV for a circuit, and uses an oscilloscope (Agilent DSO-X4052A) to read the output amplitude of the circuit. The actual gain is calculated as shown in fig. 5. From the actual measurement result, the actual maximum gain reaches 40dB, the-3 dB bandwidth is about 30-900Hz, and the result is basically consistent with the expected value and meets the design requirement in consideration of the precision error of components.
In summary, the invention simplifies the power supply circuit by using the voltage following module to give the amplifying circuit a proper static potential under the condition of single power supply, and reduces the overall equivalent output noise of the echo amplifying circuit by using the operational amplifier with low equivalent input noise, thereby improving the signal-to-noise ratio of the signal.
Claims (5)
1. An echo amplifying circuit of a low-noise MEMS piezoelectric hydrophone is characterized by comprising a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, a sixth capacitor C6, a seventh capacitor C7, an eighth capacitor C8, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, a ninth resistor R9, a tenth resistor R10, a first operational amplifier U1A, a second operational amplifier U2A and a connector P1;
one end of a piezoelectric sensor of the MEMS piezoelectric hydrophone is connected with one end of a first capacitor C1, the other end of the first capacitor C1 and one end of a first resistor R1 are respectively connected with a forward input end of a first operational amplifier U1A, one end of a second resistor R2, one end of a third resistor R3 and one end of a second capacitor C2 are respectively connected with a reverse input end of the first operational amplifier U1A, the other end of the third resistor R3, the other end of a second capacitor C2 and one end of a third capacitor C3 are respectively connected with an output end of the first operational amplifier U1A, the other end of the piezoelectric sensor, the other end of the first resistor R1, the other end of the second resistor R2 and one end of a seventh capacitor C7 are respectively connected with one end of a seventh resistor R7, the other end of the third capacitor C3 is connected with one end of a fourth resistor R4, the other end of the fourth resistor R4, one end of the fifth resistor R5 and one end of the fourth capacitor C4, A positive power supply end of the first operational amplifier U1A and a positive power supply end of the second operational amplifier U2A are respectively connected to one end of a ninth resistor R9, the other end of a fourth capacitor C4 is connected to one end of a tenth resistor R10, the other end of the ninth resistor R9 is connected to a port 1 of the connector P1, the other end of a fourth capacitor C4 is connected to a port 2 of the connector P1, the other end of the tenth resistor R10 is connected to a port 3 of the connector P1, the other end of the fifth resistor R5, one end of a sixth resistor R6, one end of a fifth capacitor C5 and one end of a sixth capacitor C6 are respectively connected to a positive input end of the second operational amplifier U2A, a negative power supply end of the first operational amplifier U1A, a negative power supply end of the second operational amplifier U2A, the other end of the sixth resistor R6, the other end of the fifth capacitor C5, the other end of the sixth capacitor C6, a negative power supply end of the seventh capacitor R7, and one end of the eighth resistor R8 are all connected to ground, One end of an eighth capacitor C8 is connected to the inverting input terminal of the second operational amplifier U2A, and the other end of the eighth resistor R8, the other end of the eighth capacitor C8, and the other end of the seventh resistor R7 are connected to the output terminal of the second operational amplifier U2A;
the port 1, the port 2 and the port 3 of the connector P1 are respectively a power supply positive input end, a data output end and a power supply ground end.
2. The echo amplification circuit of a low-noise MEMS piezoelectric hydrophone according to claim 1, wherein: the first operational amplifier U1A adopts an LTC6241 dual-channel operational amplifier with low input noise voltage.
3. The echo amplification circuit of a low-noise MEMS piezoelectric hydrophone according to claim 1, wherein: the second operational amplifier U2A adopts an LTC6241 dual-channel operational amplifier with low input noise voltage.
4. The echo amplification circuit of a low-noise MEMS piezoelectric hydrophone according to claim 1, wherein: the size of the first capacitor C1 is 1 muF, the size of the second capacitor C2 is 180pF, the size of the third capacitor C3 is 68 muF, the size of the fourth capacitor C4 is 1 muF, the size of the fifth capacitor C5 is 100nF, the size of the sixth capacitor C6 is 10 muF, the size of the seventh capacitor C7 is 10 muF, and the size of the eighth capacitor C8 is 1 muF.
5. The echo amplification circuit of a low-noise MEMS piezoelectric hydrophone according to claim 1, wherein: the first resistor R1 is 1M omega, the second resistor R2 is 10k omega, the third resistor R3 is 1.5M omega, the fourth resistor R4 is 100 omega, the fifth resistor R5 is 10k omega, the sixth resistor R6 is 10k omega, the seventh resistor R7 is 2k omega, the eighth resistor R8 is 4.99k omega, the ninth resistor R9 is 300 omega, and the tenth resistor R10 is 1M omega.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324200.8A CN111431493B (en) | 2020-04-22 | 2020-04-22 | Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324200.8A CN111431493B (en) | 2020-04-22 | 2020-04-22 | Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111431493A CN111431493A (en) | 2020-07-17 |
| CN111431493B true CN111431493B (en) | 2021-08-24 |
Family
ID=71552009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010324200.8A Active CN111431493B (en) | 2020-04-22 | 2020-04-22 | Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111431493B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102420603A (en) * | 2011-10-26 | 2012-04-18 | 哈尔滨工业大学 | Negative feedback self-balancing drive circuit used for microsensor |
| WO2012037290A3 (en) * | 2010-09-14 | 2012-07-12 | Osterhout Group, Inc. | Eyepiece with uniformly illuminated reflective display |
| CN104568242A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale resonance cylinder pressure sensor signal conditioning circuit excitated by piezoelectricity |
| US9606239B2 (en) * | 2014-12-04 | 2017-03-28 | Topcon Positioning Systems, Inc. | Detection of excessively high interference signal levels during reception of global navigation satellite system signals |
| CN209627333U (en) * | 2019-05-05 | 2019-11-12 | 广州辰方互联信息科技有限公司 | A kind of MEMS piezoelectric transducer preamplifier |
-
2020
- 2020-04-22 CN CN202010324200.8A patent/CN111431493B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012037290A3 (en) * | 2010-09-14 | 2012-07-12 | Osterhout Group, Inc. | Eyepiece with uniformly illuminated reflective display |
| CN102420603A (en) * | 2011-10-26 | 2012-04-18 | 哈尔滨工业大学 | Negative feedback self-balancing drive circuit used for microsensor |
| US9606239B2 (en) * | 2014-12-04 | 2017-03-28 | Topcon Positioning Systems, Inc. | Detection of excessively high interference signal levels during reception of global navigation satellite system signals |
| CN104568242A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale resonance cylinder pressure sensor signal conditioning circuit excitated by piezoelectricity |
| CN209627333U (en) * | 2019-05-05 | 2019-11-12 | 广州辰方互联信息科技有限公司 | A kind of MEMS piezoelectric transducer preamplifier |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111431493A (en) | 2020-07-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106959160B (en) | Faint optical signal processing unit and Feebleness Light Signal Examining system | |
| CN103858014B (en) | For the sensing circuit of self-equilibrating capacitor electric bridge | |
| CN103954794A (en) | Charge amplification and acquisition system of low-frequency piezoelectricity acceleration sensor | |
| CN101281220A (en) | Capacitance testing circuit and capacitance-type sensor interface circuit chip thereof | |
| CN102410781A (en) | Detection device and detection method for frequency of artillery launchings | |
| CN109150123A (en) | A kind of small-signal pre-amplification circuit of high-gain | |
| CN203785781U (en) | Handheld noise measuring device | |
| CN103281042B (en) | Remote transmission IEPE type charge amplifier | |
| CN113406708B (en) | Electrode range eliminating system and method for electromagnetic prospecting electric field measurement | |
| CN101131334A (en) | High-frequency wideband amplification circuit used for piezoresistive dynamic pressure sensor | |
| EP1426771A1 (en) | Impedance measuring circuit and capacitance measuring circuit | |
| CN111431493B (en) | Echo amplifying circuit of low-noise MEMS piezoelectric hydrophone | |
| CN207352066U (en) | A kind of signal supervisory instrument | |
| Hou et al. | Piezoelectric geophone: a review from principle to performance | |
| CN109425366A (en) | A kind of analog signal processing circuit for active optics micro-displacement sensor | |
| CN111044213A (en) | LMS (least mean Square) acquisition system and water attack pressure parameter calibration method and processing method thereof | |
| CN116202700A (en) | Charge signal acquisition conditioning device and system | |
| CN211454626U (en) | Ultrasonic circuit, fingerprint identification sensor and electronic equipment | |
| CN209590067U (en) | Signal acquiring system | |
| Capineri et al. | Design, realization and characterization of a differential charge amplifier for ultrasonic piezopolymer transducers | |
| CN2695987Y (en) | Low noise electric charge sensitive preamplifier | |
| CN113029207B (en) | High-sensitivity and configurable sensor driving and signal processing integrated circuit | |
| CN202217066U (en) | Three-component intelligent acceleration detector | |
| CN104697650B (en) | A kind of high speed optical speed measuring device | |
| CN221042805U (en) | Pre-amplifier circuit for free-field microphone |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |