CN111397813A - Leakage rate measuring equipment and system based on gas mass flow control technology - Google Patents

Abstract

The invention relates to a leakage rate measuring device and system based on a gas mass flow control technology. Furthermore, a target gas mass flow controller with a range matching the PID flow value can be specified, and the PID control module can dynamically adjust the opening of the target gas mass flow controller according to the PID flow value. And when the minimum stabilization time is reached, the human-computer interaction component can output the PID flow value at the moment as the leakage rate of the system to be tested. By adopting the technical scheme of the invention, the gas mass flow controller with matched measuring range is selected according to the pressure of the system to be detected without vacuumizing, and dynamic adjustment is carried out based on the PID control assembly, so that the leakage rate of a flexible material system or a system with low pressure resistance and low pressure resistance can be quickly detected, and the timeliness of mass production is fully met.

Description

Leakage rate measuring equipment and system based on gas mass flow control technology

Technical Field

The invention relates to the technical field of equipment detection, in particular to leakage rate measuring equipment and a system based on a gas mass flow control technology.

Background

The traditional leak detection mode of the closed system is divided into two modes, namely positive pressure leak detection and negative pressure leak detection. The whole system to be tested needs to be vacuumized in a negative pressure leak detection mode, a small amount of high-purity helium is sprayed to the vicinity of suspected leak points after the preset vacuum degree is reached, and the leak rate is detected through a helium mass spectrometer leak detector. However, this method requires vacuum pumping and is not suitable for leak detection of flexible material systems. The pressure of a system needing leak detection is increased to be more than 0.5MPa in a positive pressure leak detection mode, a pressure gauge is externally connected, after the system is stabilized for a plurality of hours, the indication of the pressure gauge is read again, and the leak rate of the closed system is calculated through the numerical value of pressure drop and a time theory. However, the method has long detection time, cannot meet the timeliness during sufficient production, and some detected materials have low pressure resistance, so the positive pressure detection mode cannot be used.

Therefore, how to provide a rapid leak rate detection device suitable for a flexible material system or a low pressure resistance and low pressure resistance system is a technical problem to be solved urgently by those skilled in the art.

Disclosure of Invention

In view of this, the present invention provides a leakage rate measuring device and system based on a gas mass flow control technology, so as to overcome the problem that the leakage rate cannot be detected quickly in the current flexible material system or low pressure resistance system.

In order to achieve the purpose, the invention adopts the following technical scheme:

a leakage rate measuring device based on a gas mass flow control technology comprises a cabinet shell, a pressure monitoring assembly, a PID control assembly, a man-machine interaction assembly, a plurality of gas mass flow controllers with gradually increased measuring ranges, and a plurality of gas mass flow controllers, wherein the PID control assembly, the man-machine interaction assembly and the gas mass flow controllers are respectively arranged in the cabinet shell;

the gas mass flow controller is used for controlling the inflation flow of the system to be tested;

the pressure monitoring component is arranged at the tested system and used for monitoring a first pressure value in the tested system;

the PID control assembly is electrically connected with the pressure monitoring assembly and the gas mass flow controller respectively;

the PID control component is used for carrying out PID control according to the first pressure value and a second pressure value input by a detector through the human-computer interaction component in advance and outputting a PID flow value;

the PID control component is also used for determining a target gas mass flow controller with the measuring range matched with the PID flow value, and dynamically adjusting the opening of the target gas mass flow controller according to the PID flow value until the preset minimum stabilization time is reached;

and the human-computer interaction component is used for outputting the PID flow value corresponding to the minimum stable time as the leakage rate of the tested system.

Further, in the leakage rate measuring device based on the gas mass flow control technology, a stop valve is arranged between each gas mass flow controller and the system to be measured;

the stop valve is electrically connected with the PID control assembly;

the stop valve is used for stopping the corresponding gas circuit of the gas mass flow controller, and errors caused by micro leakage when the gas mass flow controller is in a stop state are avoided.

Further, the leakage rate measuring equipment based on the gas mass flow control technology is characterized in that a high-pressure manual stop valve is arranged at a gas outlet of the gas source, and a stop control knob of the high-pressure manual stop valve is arranged on the cabinet shell.

Further, in the above leakage rate measuring apparatus based on the gas mass flow control technology, a pressure reducing valve is arranged at an air inlet of the gas mass flow controller;

the pressure reducing valve is used for reducing the pressure of the gas output by the gas source.

Further, in the above leakage rate measuring device based on the gas mass flow control technology, the human-computer interaction component is a touchable screen;

the touchable screen is embedded in one side of the cabinet shell.

Further, in the leakage rate measuring device based on the gas mass flow control technology, the pressure monitoring component and the PID control component interact through digital signals.

Further, in the leakage rate measuring apparatus based on the gas mass flow control technology, a check valve is disposed on the first pipeline and/or the second pipeline.

Further, in the leakage rate measuring device based on the gas mass flow control technology, the pressure monitoring component is a high-precision pressure transmitter.

Further, the leakage rate measuring device based on the gas mass flow control technology further comprises a reminding component;

the reminding component is connected with the PID control component;

and the PID control component is used for controlling the reminding component to send out unqualified reminding if the leakage rate is greater than a preset standard leakage rate.

The invention also provides a leak rate measuring system based on the gas mass flow control technology, which comprises a gas source and any one of the leak rate measuring devices based on the gas mass flow control technology;

and the gas source is connected with the leakage rate measuring equipment based on the gas mass flow control technology.

The leakage rate measuring equipment and the leakage rate measuring system based on the gas mass flow control technology are provided with a plurality of ranges of gas mass flow controllers, a pressure monitoring assembly is arranged on a measured system to detect the air pressure in the measured system at any time, a first detected pressure value and a second pressure value input by a user in advance are input into a PID control assembly, and the PID control assembly outputs a PID flow value. Furthermore, a target gas mass flow controller with a range matching the PID flow value can be specified, and the PID control module can dynamically adjust the opening of the target gas mass flow controller according to the PID flow value. And when the minimum stabilization time is reached, the human-computer interaction component can output the PID flow value at the moment as the leakage rate of the system to be tested. By adopting the technical scheme of the invention, the gas mass flow controller with matched measuring range is selected according to the pressure of the system to be detected without vacuumizing, and dynamic adjustment is carried out based on the PID control assembly, so that the leakage rate of a flexible material system or a system with low pressure resistance and low pressure resistance can be quickly detected, and the timeliness of mass production is fully met.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a leak rate measuring apparatus according to an embodiment of the present invention based on a gas mass flow control technique;

FIG. 2 is a schematic structural diagram of region A in FIG. 1;

FIG. 3 is a schematic diagram of the circuit provided by one embodiment of the leak rate measurement apparatus of the present invention based on gas mass flow control technology;

FIG. 4 is a schematic diagram of a leak rate measurement system according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be described in detail below. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the examples given herein without any inventive step, are within the scope of the present invention.

Fig. 1 is a schematic structural diagram provided by an embodiment of a leakage rate measuring apparatus based on a gas mass flow control technology of the present invention, fig. 2 is a schematic structural diagram of a region a in fig. 1, and fig. 3 is a schematic circuit diagram provided by an embodiment of a leakage rate measuring apparatus based on a gas mass flow control technology of the present invention. Referring to fig. 1, fig. 2 and fig. 3, the leakage rate measuring apparatus based on the gas mass flow control technology of the present embodiment includes a cabinet housing 100, a pressure monitoring assembly 101, and a PID control assembly 102, a human-computer interaction assembly 103, and a plurality of gas mass flow controllers 104 with increasing stroke, which are respectively disposed in the cabinet housing 100.

Generally, the leakage rate range is different due to different materials and functions of the system to be tested. Therefore, the range of the leakage rate of the tested system with different materials and functions may be greatly different. The controllable range ratio of the gas mass flow controller 104 is 1:50, and in order to achieve the optimal precision control range and adapt to the tested systems with different materials and functions, a plurality of gas mass flow controllers 104 with gradually increased ranges can be arranged. For example, 3 gas mass flow controllers 104 may be provided, the maximum full range is 30 l/min, the middle is 10 l/min, and the last is 3 l/min, so that the combination of the gas mass flow controllers 104 may measure a range from 30 l/min to 1 l/min, if the measured system requires more precise leakage rate data, a gas mass flow controller 104 with a smaller range may be provided, which is generally about 1-5, and this embodiment is not limited.

The gas mass flow controller 104 has a gas inlet for connecting to a gas source via a first pipeline 105, the gas outlet for connecting to the system under test via a second pipeline 106, and the gas mass flow controller 104 for controlling the charging flow of the system under test.

The pressure monitoring component 101 is disposed at the system to be tested, and in this embodiment, two placement points of the pressure monitoring component 101 are provided, wherein the placement points are disposed at the tail end of the air outlet of the second pipeline 106, and the pressure monitoring component 101 is disposed on the interface if a proper interface is disposed in the cavity of the system to be tested. The pressure monitoring assembly 101 is configured to monitor a first pressure value within the system under test.

The PID control module 102 is electrically connected to the pressure monitoring module 101 and the gas mass flow controller 104, respectively.

In one implementation, the user may select the gas mass flow controllers 104 to participate in the test based on the volume of the system under test, for example, if the volume of the system under test is 40L and the ranges of the gas mass flow controllers 104 are 1 liter/min, 3 liters/min, 10 liters/min, and 30 liters/min, respectively, then the user may select all of the 4 gas mass flow controllers 104 for batch testing, and if the volume of the system under test is 10L, the user may select the gas mass flow controllers 104 with three ranges of 1 liter/min, 3 liters/min, and 10 liters/min.

Alternatively, the user may set a program that causes the PID control module 102 to automatically select the gas mass flow controller 104 when the volume of the system under test is entered.

The PID control component 102 is used for carrying out PID control according to the first pressure value and a second pressure value input by a detection person through the man-machine interaction component 103 in advance, and outputting a PID flow value. Specifically, in the PID control process, when a test is started, the first pressure value is lower than the input second pressure value, the PID flow value output by the PID control component 102 is larger, the tested system is rapidly filled above atmospheric pressure, and when the first pressure value is closer to the input second pressure value, the PID flow value output by the PID control component 102 is smaller, and the gas has certain compressibility, so that a situation that the first pressure value is larger than the second pressure value may occur, and at this time, the PID flow value is rapidly reduced.

The PID control is widely applied to engineering control, wherein the basic implementation formula of the PID is as follows:

u(t)＝Kp×e(t)+Ki∑e(t)+Kd[e(t)–e(t-1)]+u₀

in this example, u₀Is the second pressure value, e (t) is the deviation between the first pressure value and the second pressure value, and u (t) is the output PID flow value. Kp, Ki, and Kd are parameters in the PID control process, and in the actual debugging, Kp, Ki, and Kd need to be repeatedly debugged to achieve the optimal effect, which is not limited in this embodiment.

The PID control component 102 is also configured to select a target gas mass flow controller having a range that matches the PID flow value, i.e., the PID flow value should be within the range of the gas mass flow controller 104, and in order to improve speed and accuracy, the target gas mass flow controller should have a range that is closest to the PID flow value, except that the target gas mass flow controller satisfies the condition that the PID flow value should be within the range of the gas mass flow.

For example, in a single detection process, the gas mass flow controller 104 with three ranges of 1 l/min, 3 l/min and 10 l/min is selected, when the PID flow value is 10 l/min at the beginning of the test, the target gas mass flow controller with 10 l/min can be selected to operate, the PID flow value is gradually reduced under the control of the PID control component 102 along with the gradual increase of the first pressure value, and the opening degree of the target gas mass flow controller is reduced according to the PID flow value; when the PID flow value is reduced to 3 liters/minute, the target gas mass flow controller with the measuring range of 3 liters/minute can be selected to work, and the opening degree of the target gas mass flow controller is reduced according to the PID flow value; when the PID flow rate value is further decreased with the gradual increase of the first pressure value, after decreasing to 1 liter/min, the target gas mass flow controller with the range of 1 liter/min may be selected to operate, and the opening degree of the target gas mass flow controller may be decreased according to the PID flow rate value.

When the first pressure value is increased to the second pressure value and can be kept stable within the preset time, the preset minimum stable time is considered to be reached, and the corresponding PID flow value is the leakage rate of the system to be tested.

In this embodiment, the human-computer interaction component 103 is configured to output a leak rate of the system under test.

Further, in the leakage rate measuring apparatus based on the gas mass flow control technology of the embodiment, a stop valve 107 is disposed between each gas mass flow controller 104 and the system to be measured, and the stop valve 107 is electrically connected to the PID control component 102.

When the gas mass flow controller 104 corresponding to the stop valve 107 starts to operate as the target gas mass flow controller, the PID control module 102 may control the stop valve 107 to be opened, and the remaining stop valves 107 are in a closed state, thereby preventing the gas mass flow controller 104 from generating a micro leak and causing an error. Among them, the shutoff valve 107 is preferably an electromagnetic shutoff valve.

Further, a high-pressure manual stop valve 108 is arranged at the air outlet of the air source, and a stop control knob of the high-pressure manual stop valve 108 is arranged on the cabinet housing 100. The tester can control the on-off of the air source by controlling the high-pressure manual stop valve 108.

Further, a pressure reducing valve 109 is provided at the air inlet of the gas mass flow controller 104. The outlet gas pressure of the gas source is relatively high, typically around 15MPa, while the gas mass flow controller 104 typically operates at a pressure of around 0.3 MPa. A pressure reducing valve 109 is therefore provided at the gas inlet of the gas mass flow controller 104 to reduce the pressure of the gas to the available pressure of the gas mass flow controller 104.

Further, the human-computer interaction assembly 103 includes a touchable screen embedded in one side of the cabinet housing 100 and a microprocessor. Because gas has compressible nature, therefore is not a process of increasing and reducing symmetry in whole PID control process, and there may exist vibration regulation many times, therefore, the check out test set of this embodiment is along with the increase in volume of the system under test, the difference of stable pressure, and the check out time may last several minutes, and the microprocessor of this embodiment sets up functions such as automatic data record, a key start, automatic result derivation to make this period of time can realize unmanned on duty.

Further, in the present embodiment, the pressure monitoring module 101 and the PID control module 102 preferably interact through digital signals, such as RS485 communication, CAN communication, IIC communication, SPI communication, PROFIBUS communication, DEVICENET communication, or the like. The present embodiment does not take the form of an analog signal because small amplitude fluctuations in the analog signal may cause the settling time of the entire leak detection system to be too slow to enable readout of the system leak rate.

Further, the first pipeline 105 and/or the second pipeline 106 of the present embodiment are provided with a check valve, so as to avoid the damage to the equipment and the influence on the experimental result due to the reverse transmission of the gas.

Further, the pressure monitoring assembly 101 of the present embodiment is a high-precision pressure transmitter, and the precision level requirement is 0.1% F.S. Moreover, the communication speed of the pressure monitoring component 101 needs to be up to 200 ms/byte at the lowest, because the process of the internal pressure from low to high for the system to be tested is increased instantaneously, so that the pressure signal needs to be acquired at high speed, if the system has delay, the control delay may be caused, so that the pressure in the closed cavity is overshot, the control speed is reduced if the system is light, and the system to be tested is damaged if the system is heavy.

Further, the leakage rate measuring device based on the gas mass flow control technology of the embodiment further includes a reminding component, and the reminding component is connected to the PID control component 102. The PID control component 102 is used for controlling the reminding component to send out unqualified reminding if the leakage rate is larger than a preset standard leakage rate. The reminding component can be a flashlight or a buzzer or other devices, and can also be a voice output device, and the embodiment is not limited.

It should be noted that the leakage rate measurement device based on the gas mass flow control technology in this embodiment is mainly used for micro-positive pressure detection, the input second voltage value is generally not more than 0.05MPa, and leakage rate detection is mainly performed for a flexible material system or a system with low pressure resistance and low pressure resistance.

The example of the test of the airtight chemical protective clothing with the volume of 30 liters is further explained, in this embodiment, the airtight chemical protective clothing is required to be qualified within 20 ml/min under the micro-positive pressure of 0.04MPa, that is, the input second pressure value is 0.04 MPa.

The pressure of the gas source entering the leak rate measuring device is about 15MPa at the cylinder pressure, and the pressure is reduced to about 0.3MPa available to the gas mass flow controller 104 using a pressure reducing valve 109.

The gas mass flow controller 104 has a maximum of one full range of 30 liters/minute, one full range of 10 liters/minute, and a final full range of 3 liters/minute. In addition, the gas mass flow controller 104 selects products with control speed within 1 second, so that the whole system is prevented from falling into a continuous PID regulation process due to slow response time.

The stop valve 107 behind each gas mass flow controller 104 is used for completely stopping the gas path to avoid errors caused by micro leakage, and the stop valve 107 can use a 1MPa pressure-resistant stop valve without a high-pressure product, so that the cost is saved. Since the inside of the airtight chemical protective clothing is provided with the interface, the pressure monitoring assembly 101 is arranged on the interface in the embodiment.

The interface of the human-computer interaction component 103 adopts a 15-inch touch screen, the PID control component 102 adopts an embedded processor with 32 bits or more as an inner core to carry out circuit design, preferably, a chip with AD acquisition and DA output is adopted to carry out design (such as an ADUC7 series single chip microcomputer), or mature products such as a P L C + communication module + AD/DA module are adopted to carry out configuration, the whole system calculates to finally ensure that the pressure acquisition interval is 200ms at the maximum, the gas flow is regulated within 100ms after the pressure signal is read, and the flow is stabilized within 1 s.

After system hardware is connected, a PID control function is started, when the system hardware is just started, the first pressure value is far lower than the second pressure value (0.04MPa), the PID control component 102 can increase the PID flow value, and as the volume of the cavity of the closed chemical protection suit is about 30 liters, a target gas mass flow controller with the full range of 30 liters/minute is selected to work. Therefore, the PID flow value is gradually increased at the beginning, the sealing chemical protection suit is stably filled to be above the atmospheric pressure within 1 minute, at the moment, the PID flow value is slowly increased, the closer the first pressure value is to the second pressure value, the lower the PID flow value is, when the pressure is lower than 10 liters/minute, the automatic switching through the stop valve 107 is changed into the operation of a target gas mass flow controller of 10 liters/minute, when the PID flow value is lower than 3 liters/minute, the automatic switching through the stop valve 107 is changed into the operation of the target gas mass flow controller of 3 liters/minute, due to the compressible property of gas, the system has a certain amount of overshoot, when the pressure is higher than 0.04MPa, the PID flow value is rapidly reduced, and the PID parameter of the system is repeatedly debugged in the process, and finally the minimum stabilization time is reached. The stable PID flow value is the leakage rate of the chemical protective clothing under 0.04 MPa.

The process can be divided into three stages, each stage uses different PID parameters, only a Kp proportional parameter needs to be set when the first large flow rate is achieved, the system delay is avoided, the second stage and the third stage need to set the Kp proportional parameter and the Ki integral parameter, in the actual debugging, the repeated debugging achieves the best effect, the Kd differential parameter does not need to be adjusted or is adjusted a little, and the values of the parameters are determined according to the sizes of different closed cavities.

The leakage rate measuring device based on the gas mass flow control technology of the embodiment is provided with a plurality of ranges of gas mass flow controllers 104, a pressure monitoring component 101 is arranged on a measured system to detect the air pressure in the measured system at any time, a detected first pressure value and a second pressure value input by a user in advance are input into a PID control component 102, and the PID control component 102 outputs a PID flow value. Further, a target gas mass flow controller whose range matches the PID flow value may be specified, and the PID control module 102 may dynamically adjust the opening degree of the target gas mass flow controller based on the PID flow value. When the minimum stabilization time is reached, the human-computer interaction component 103 can output the PID flow value at the moment as the leakage rate of the system to be tested. By adopting the technical scheme of the embodiment, the gas mass flow controller 104 matched with the measuring range is selected according to the pressure of the system to be measured without vacuumizing, dynamic adjustment is carried out based on the PID control component 102, the leakage rate of a flexible material system or a low pressure resistance and low system can be rapidly detected, and the timeliness of mass production is fully met.

Fig. 4 is a schematic structural diagram provided in an embodiment of the leak rate measurement system based on the gas mass flow control technology of the present invention, and please refer to fig. 4, this embodiment includes a gas source 21 and a leak rate measurement device 22 based on the gas mass flow control technology described in the above embodiment, the gas source 21 is connected to the leak rate measurement device 22 based on the gas mass flow control technology, and the leak rate measurement device 22 based on the gas mass flow control technology is further connected to a system under test 23.

By adopting the technical scheme of the embodiment, the gas mass flow controller 104 matched with the measuring range is selected according to the pressure of the system to be tested 23 without vacuumizing, dynamic adjustment is carried out based on the PID control component 102, the leakage rate of a flexible material system or a low pressure resistance and low system can be rapidly detected, and the timeliness of mass production is fully met.

It is understood that the same or similar parts in the above embodiments may be mutually referred to, and the same or similar parts in other embodiments may be referred to for the content which is not described in detail in some embodiments.

It should be noted that the terms "first," "second," and the like in the description of the present invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Further, in the description of the present invention, the meaning of "a plurality" means at least two unless otherwise specified.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims (10)

1. The leakage rate measuring equipment based on the gas mass flow control technology is characterized by comprising a cabinet shell, a pressure monitoring assembly, a PID control assembly, a man-machine interaction assembly and a plurality of gas mass flow controllers with gradually increased measuring ranges, wherein the PID control assembly, the man-machine interaction assembly and the gas mass flow controllers are respectively arranged in the cabinet shell;

the gas mass flow controller is used for controlling the inflation flow of the system to be tested;

the pressure monitoring component is arranged at the tested system and used for monitoring a first pressure value in the tested system;

the PID control assembly is electrically connected with the pressure monitoring assembly and the gas mass flow controller respectively;

the PID control component is used for carrying out PID control according to the first pressure value and a second pressure value input by a detector through the human-computer interaction component in advance and outputting a PID flow value;

the PID control component is also used for determining a target gas mass flow controller with the measuring range matched with the PID flow value, and dynamically adjusting the opening of the target gas mass flow controller according to the PID flow value until the preset minimum stabilization time is reached;

and the human-computer interaction component is used for outputting the PID flow value corresponding to the minimum stable time as the leakage rate of the tested system.

2. The gas mass flow control technology-based leak rate measurement device according to claim 1, wherein a stop valve is provided between each gas mass flow controller and the system under test;

the stop valve is electrically connected with the PID control assembly;

the stop valve is used for stopping the corresponding gas circuit of the gas mass flow controller, and errors caused by micro leakage when the gas mass flow controller is in a stop state are avoided.

3. The gas mass flow control technology-based leak rate measuring device according to claim 1, wherein a high-pressure manual stop valve is arranged at a gas outlet of the gas source, and a stop control knob of the high-pressure manual stop valve is arranged on the cabinet shell.

4. The leak rate measuring apparatus according to claim 1, wherein a pressure reducing valve is provided at an air inlet of the gas mass flow controller;

the pressure reducing valve is used for reducing the pressure of the gas output by the gas source.

5. The gas mass flow control technology-based leak rate measurement device of claim 1, wherein the human-computer interaction component is a touchable screen;

the touchable screen is embedded in one side of the cabinet shell.

6. The gas mass flow control technology-based leak rate measurement device of claim 1, wherein the pressure monitoring component interacts with the PID control component via digital signals.

7. The gas mass flow control technology-based leak rate measurement device according to claim 1, wherein a check valve is provided on the first pipeline and/or the second pipeline.

8. The gas mass flow control technology-based leak rate measurement device of claim 1, wherein the pressure monitoring component is a high precision pressure transmitter.

9. The gas mass flow control technology-based leak rate measurement device of claim 1, further comprising a reminder component;

the reminding component is connected with the PID control component;

and the PID control component is used for controlling the reminding component to send out unqualified reminding if the leakage rate is greater than a preset standard leakage rate.

10. A leak rate measuring system based on a gas mass flow control technique, comprising a gas source and a leak rate measuring apparatus based on a gas mass flow control technique according to any one of claims 1 to 9;

and the gas source is connected with the leakage rate measuring equipment based on the gas mass flow control technology.

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