CN111364010A

CN111364010A - Plasma coating equipment and plasma coating nozzle

Info

Publication number: CN111364010A
Application number: CN202010361456.6A
Authority: CN
Inventors: 丁雪苗; 赵芝强; 赵公魄
Original assignee: Zhuhai Boffotto Hall Electronic Technology Co ltd
Current assignee: Zhuhai Boffotto Hall Electronic Technology Co ltd
Priority date: 2020-04-30
Filing date: 2020-04-30
Publication date: 2020-07-03

Abstract

The invention relates to plasma coating equipment and a plasma coating nozzle. The jet orifice of the plasma coating nozzle is aligned with the surface to be coated. And arranging the plasma coating spray head above the surface to be coated so that the spray opening of the plasma coating spray head is aligned with the surface to be coated. Plasma gas enters into the spray hole of the plasma coating nozzle, and coating materials can enter into the spray hole from the feed hole on the side wall of the plasma coating nozzle, so that the coating materials can be ionized by the plasma gas in the spray hole. Because the coating material is generally in a liquid state, because the inner surface of the spray hole between the feeding hole and the spray opening is provided with the convex structure and/or the groove structure, the path of the coating material flowing from the feeding hole to the spray opening can be effectively prolonged, the action time of the plasma gas and the coating material is prolonged, the coating material is conveniently and fully ionized, the stability of the surface coating to be coated is conveniently improved, and the utilization rate of the coating material is improved.

Description

Plasma coating equipment and plasma coating nozzle

Technical Field

The invention relates to the technical field of coating structures, in particular to plasma coating equipment and a plasma coating nozzle.

Background

Plasma coating is to gasify the coating material into atoms, molecules or ionize them into ions and deposit them directly on the surface of the substrate. A conventional plasma coating showerhead may be used for spraying the coating material. However, the conventional plasma coating nozzle is prone to uneven coating, which results in poor coating effect.

Disclosure of Invention

In view of the above, it is desirable to provide a plasma plating apparatus and a plasma plating showerhead capable of improving the stability of plating.

A plasma coating nozzle is provided with a spray hole, the spray hole penetrates through one end face of the plasma coating nozzle to form a spray opening, a feed hole is formed in the side wall of the plasma coating nozzle and communicated with the spray hole, and a protruding structure and/or a groove structure are/is arranged on the inner surface of the spray hole, which is located between the feed hole and the spray opening.

In one embodiment, an intersection point of an extension line of the axis of the feeding hole and the inner surface of the injection hole is located on a first plane, the injection port is located on a second plane, the second plane and the first plane are parallel to each other, and a distance between any first cross-sectional point of the injection hole located on the first plane and a second cross-sectional point of the injection hole located at the shortest distance on the second plane is smaller than a distance between the first cross-sectional point and the second cross-sectional point along the inner surface of the injection hole.

In one embodiment, a distance between any third cross-sectional point of the nozzle hole located on a third plane and a second cross-sectional point of the nozzle hole located at the shortest distance on the second plane is equal to a distance between the third cross-sectional point and the second cross-sectional point along the inner surface of the nozzle hole, wherein the third plane is located between the first plane and the second plane and is close to the second plane.

In one embodiment, the spray hole penetrates through the other end face, opposite to the plasma coating spray head, of the plasma coating spray head to form a spray opening, and the inner surface, located between the feed hole and the spray opening, of the spray hole is a smooth surface.

In one embodiment, the size of the cross section of the nozzle hole tends to decrease toward the ejection port.

In one embodiment, the size of the cross section of the nozzle hole is gradually reduced toward the direction of the ejection port.

In one embodiment, the spray hole is a conical hole, and the conical angle of the conical hole is 16-30 degrees.

A plasma coating apparatus comprising a plasma coating nozzle as described above.

In one embodiment, the plasma coating apparatus further includes a mounting member and an electrode, the mounting member is formed with a mounting cavity, the electrode is mounted in the mounting cavity, the plasma coating nozzle includes a connecting end and a spraying end connected to each other, the spraying hole is opened in the connecting end and penetrates through an end surface of the spraying end opposite to the connecting end, the spraying hole is formed in the spraying end, and the connecting end is connected to the mounting member so that the mounting cavity is communicated with the spraying hole.

In one embodiment, the connecting end is removably attached to the mounting member.

When the plasma coating equipment and the plasma coating nozzle are used, the plasma coating nozzle is arranged above the surface to be coated, so that the jet orifice of the plasma coating nozzle is aligned with the surface to be coated. Plasma gas enters into the spray hole of the plasma coating nozzle, and coating materials can enter into the spray hole from the feed hole on the side wall of the plasma coating nozzle, so that the coating materials can be ionized by the plasma gas in the spray hole. Because the coating material is generally in a liquid state, because the inner surface of the spray hole between the feeding hole and the spray opening is provided with the convex structure and/or the groove structure, the path of the coating material flowing from the feeding hole to the spray opening can be effectively prolonged, the action time of the plasma gas and the coating material is prolonged, the coating material is conveniently and fully ionized, the stability of the surface coating to be coated is conveniently improved, and the utilization rate of the coating material is improved.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Furthermore, the drawings are not to scale of 1:1, and the relative dimensions of the various elements in the drawings are drawn only by way of example and not necessarily to true scale. In the drawings:

FIG. 1 is a schematic view of a plasma coating apparatus according to an embodiment;

FIG. 2 is a cross-sectional view of the plasma plating apparatus shown in FIG. 1, with a plasma excitation power supply omitted;

FIG. 3 is a cross-sectional view of the plasma coating showerhead of FIG. 2;

FIG. 4 is a cross-sectional view of another embodiment of a plasma coating showerhead.

Description of reference numerals:

10. the plasma coating device comprises a plasma coating device 100, a plasma coating spray head 110, a connecting end 120, a spray end 130, a spray hole 140, a spray opening 150, a feed hole 160, a convex structure 170, a spray inlet 200, a mounting piece 210, a mounting cavity 300, an electrode 400, a plasma excitation power supply 500, a gas pipe 201, a first plane 202, a second plane 203, a first section point 204, a second section point 205, a third plane 206, a third section point 30 and a surface to be coated.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

Referring to fig. 1 and 2, a plasma coating apparatus 10 according to an embodiment of the present invention at least can improve an ionization effect of a coating material. Specifically, the plasma plating apparatus 10 includes a plasma plating shower head 100. The plasma coating nozzle 100 is provided with a nozzle hole 130, the nozzle hole 130 penetrates through one end surface of the plasma coating nozzle 100 to form a nozzle hole 140, the side wall of the plasma coating nozzle 100 is provided with a feed hole 150, the feed hole 150 is communicated with the nozzle hole 130, and a protrusion structure 160 and/or a groove structure is/are arranged on the inner surface of the nozzle hole 130 between the nozzle hole 140 and the feed hole 150.

When the plasma coating nozzle 100 is used, the plasma coating nozzle 100 is disposed above the surface 30 to be coated, such that the injection port 140 of the plasma coating nozzle 100 is aligned with the surface 30 to be coated. Plasma gas enters the spray holes 130 of the plasma coating nozzle 100, and coating materials can enter the spray holes 130 from the feed holes 150 on the side wall of the plasma coating nozzle 100, so that the coating materials can be ionized by the plasma gas in the spray holes 130. Because the inner surface of the nozzle hole 130 between the injection port 140 and the feeding hole 150 is provided with the protrusion structure 160 and/or the groove structure, the path of the coating material flowing from the feeding hole 150 to the injection port 140 can be effectively prolonged, the action time of the plasma gas and the coating material can be prolonged, the coating material can be ionized sufficiently, the stability of the coating on the surface 30 to be coated can be improved, the utilization rate of the coating material can be improved, and the cost increase of the plasma coating equipment 10 can be avoided.

In another mode, before the coating material enters the nozzle hole 130 through the feeding hole 150, the coating material is heated and vaporized by a heating and vaporizing device, so that the vaporized coating material enters the nozzle hole 130 through the feeding hole 150, and the coating material is in full contact with the plasma gas. However, this approach requires, on the one hand, an additional apparatus for vaporizing the coating material, which in turn leads to an increase in the cost of the plasma coating apparatus 10; on the other hand, the evaporation amount of the coating material is not easy to control due to the evaporated coating material entering from the feeding pipe, and the amount of the coating material entering the spray hole 130 after evaporation cannot be accurately controlled, so that the stability of coating is affected. On the other hand, if the inner surface of the nozzle hole 130 of the plasma coating showerhead 100 is set to be a smooth surface, the coating material is easily not ionized sufficiently by the plasma, and the coating material is wasted.

Referring to fig. 3 and 4, in an embodiment, a plurality of protrusion structures 160 are disposed on an inner surface of the nozzle 130 between the injection port 140 and the feeding hole 150. The convex structure 160 is arranged on the inner surface of the nozzle hole 130, so that the surface area of the inner surface of the nozzle hole 130 can be effectively increased, the length of a path from the coating material to the jet port 140 after entering the nozzle hole 130 can be effectively increased, the time of the coating material in the nozzle hole 130 can be prolonged, and the coating material can be fully ionized.

In the present embodiment, the protrusion structure 160 is a convex ring structure, and a plurality of convex ring structures are arranged in parallel along the direction toward the injection port 140 to increase the area of the inner surface of the injection hole 130. Wherein the torus structure is arranged around the axis of the nozzle hole 130, i.e. the axis of the nozzle hole 130 passes through the torus structure. After the coating material enters the nozzle hole 130, the coating material needs to gradually flow to the jet port 140 along the inner surface of the nozzle hole 130, and the convex ring structure is arranged on the inner surface of the nozzle hole 130, so that the coating material needs to cross the surface of the convex ring structure, the flowing path of the coating material in the nozzle hole 130 is effectively prolonged, and the ionization time of the coating material in the nozzle hole 130 is prolonged.

In other embodiments, the protrusion structures 160 may be bump structures, and a plurality of bump structures are disposed on the inner surface of the nozzle 130 at intervals to effectively increase the area of the inner surface of the nozzle 130, so as to prolong the time of the coating material in the nozzle 130. For example, the raised structure 160 may be obtained by means of sandblasting or by means of electric sparks. In other embodiments, the protrusion structure 160 may have other structures as long as the surface area of the inner surface of the injection hole 130 between the injection port 140 and the feeding hole 150 can be effectively increased.

In another embodiment, the injection hole 130 is provided with a plurality of groove structures on an inner surface between the injection port 140 and the feeding hole 150. Furthermore, after the coating material enters the nozzle hole 130, the coating material needs to flow through the inner surface of the groove in the process of flowing to the jet port 140 along the inner surface of the nozzle hole 130, so that the flowing path of the coating material in the nozzle hole 130 is effectively prolonged, and the ionization time of the coating material in the nozzle hole 130 is further prolonged. Specifically, the groove structure may be an annular groove, and a plurality of annular grooves are juxtaposed in a direction toward the ejection port 140. Alternatively, the groove structure may also be a semicircular groove or the like as long as the surface area of the inner surface of the nozzle hole 130 can be effectively increased.

Alternatively, in other embodiments, the inner surface of the nozzle hole 130 between the injection port 140 and the feeding hole 150 is provided with a plurality of protrusion structures 160 and a plurality of groove structures. As long as the surface area of the inner surface of the nozzle hole 130 can be effectively increased, so as to prolong the time of the coating material in the nozzle hole 130 and realize sufficient ionization of the coating material in the nozzle hole 130.

In one embodiment, an intersection point of an extension line of the axis of the feeding hole 150 and the inner surface of the injection hole 130 is located on a first plane 201, the injection port 140 is located on a second plane 202, the second plane 202 and the first plane 201 are parallel to each other, and a distance between any first cross-sectional point 203 of the injection hole 130 located on the first plane 201 and a second cross-sectional point 204 of the injection hole 130 located at the shortest distance on the second plane 202 is smaller than a distance between the first cross-sectional point 203 and the second cross-sectional point 204 along the inner surface of the injection hole 130. In the process that the coating material entering the nozzle hole 130 flows to the jet hole 140, the action time of the coating material and the plasma gas at each position can be prolonged, so that the coating material is further conveniently ionized fully, the stability of coating the surface 30 to be coated is further conveniently improved, the utilization rate of the coating material is improved, and the cost increase of the plasma coating equipment 10 is avoided.

Since the first plane 201 is a plane, the nozzle 130 can form a cross-sectional pattern on the first plane 201, wherein the first cross-sectional point 203 is any point on the cross-sectional pattern. Since the second plane 202 is a plane, the nozzle 130 can be formed on the second plane 202 into a cross-sectional pattern, wherein the second cross-sectional point 204 is a point on the cross-sectional pattern on the second plane 202. In this embodiment, if a point on the cross-sectional profile on the first plane 201 is the first cross-sectional point 203, the second cross-sectional point 204 is the point on the second plane 202 where the distance between the cross-sectional profile and the first cross-sectional point 203 is the shortest.

In this embodiment, the first plane 201 is a plane on which the axis of the feeding hole 150 is located. In other embodiments, the first plane 201 may also be a plane parallel to the second plane 202. The axis of the feeding hole 150 may be disposed at an angle to the first plane 201, as long as the coating material is not affected to enter the nozzle hole 130 through the feeding hole 150.

In this embodiment, the injection hole 130 may be formed by providing at least one protruding ring structure on an inner surface thereof in a circumferential direction. Alternatively, at least one annular groove may be provided in the circumferential direction on the inner surface of the nozzle hole 130. In another embodiment, a male ring structure and an annular groove structure may be provided along a circumferential direction at an inner surface of the nozzle hole 130, and the male ring structure and the annular groove structure may be juxtaposed along a direction toward the injection port 140.

Referring to fig. 3 and 4, in an embodiment, a distance between any third cross-sectional point 206 of the nozzle 130 located on the third plane 205 and the second cross-sectional point 204 of the nozzle 130 located on the second plane 202 is equal to a distance between the third cross-sectional point 206 and the second cross-sectional point 204 along the inner surface of the nozzle 130. Wherein the third plane 205 is located between the first plane 201 and the second plane 202 and is close to the second plane 202. Since the third plane 205 is a plane, the nozzle 130 can form a cross-sectional pattern on the third plane 205, wherein the third cross-sectional point 206 is any point on the cross-sectional pattern. And the second cross-sectional point 204 is a point on the cross-sectional profile of the orifice 130 on the second plane 202. In the present embodiment, a point on the cross-sectional pattern of the nozzle 130 on the third plane 205 is selected as the third cross-sectional point 206, and the second cross-sectional point 204 is a point on the second plane 202 where the distance between the cross-sectional pattern and the third cross-sectional point 206 is the shortest.

Because the linear distance between the third cross-sectional point 206 and the second cross-sectional point 204 is the distance between the third cross-sectional point 206 and the second cross-sectional point 204 along the inner surface of the nozzle 130, and the nozzle 140 is located on the second plane 202, the inner surface of the nozzle 130 between the third plane 205 and the second plane 202 can effectively guide the spraying of the coating material, the uniformity and stability of the coating material sprayed from the nozzle 140 to the surface 30 to be coated are improved, and the influence on the spraying direction of the coating material from the nozzle 140 due to the arrangement of the convex structures 160 or the groove structures on the inner surface of the nozzle 130 between the third plane 205 and the second plane 202, and the influence on the spraying uniformity are avoided.

In the present embodiment, the third plane 205 and the second plane 202 are parallel to each other. Thereby further ensuring the guiding function of the inner surface of the nozzle hole 130 between the third plane 205 and the second plane 202 to the coating material.

In one embodiment, the size of the cross-section of the nozzle hole 130 tends to decrease toward the ejection opening 140. Because the size of the cross section of the spray hole 130 tends to be reduced, the coating material can be gradually gathered in the process of spraying the coating material from the spray hole, and the uniformity and stability of the coating can be effectively improved. In the present embodiment, the size of the cross section of the nozzle hole 130 is gradually reduced toward the ejection port 140. The effect of gradual gathering of the coating materials can be further improved, and the uniformity and the stability of the coating are further improved. In other embodiments, the taper of the nozzle holes 130 at different positions in the direction toward the injection port 140 may also be different, which may be understood as that the nozzle holes 130 are stepped holes, and the taper of the nozzle holes 130 at different stepped positions may be different. Of course, the taper of the nozzle hole 130 may be the same at different positions.

In this embodiment, the nozzle hole 130 is a tapered hole, and the taper angle a of the tapered hole is 16 ° to 30 °. For example, as shown in fig. 3, the taper angle a of the nozzle hole 130 is 16 °; as shown in fig. 4, the taper angle a of the nozzle hole 130 is 30 °. In other embodiments, the taper angle a of the nozzle hole 130 may also be 20 °, 25 °, etc. Wherein the taper angle a is an angle between opposite sides of a cross-sectional pattern of a radial cross-section of the nozzle hole 130.

The taper angle a of the spray hole 130 is 16-30 degrees, which can effectively reduce the flowing speed of the coating material along the inner surface of the spray hole 130 and strive for sufficient ionization time for the coating material. If the taper angle a is too small, the coating material can flow out of the spray hole 130 quickly and then flow onto the surface 30 to be coated, so that the ionization effect of the coating material is influenced; if the taper angle a is too large, the speed of the coating material ejected from the ejection opening 140 is affected, and the coating effect is affected. Meanwhile, since the temperature of the plasma gas entering the nozzle hole 130 is generally above 80 ℃, the sufficient ionization time of the coating material can be ensured by the taper angle a, the ionization effect of the coating material can be ensured, and the coating material sprayed from the spray hole 140 can be ensured to be in a foggy and ionized state, so that the coating effect can be ensured.

In one embodiment, the nozzle 130 penetrates through the other end surface of the plasma coating showerhead 100 opposite to the other end surface to form the injection port 170, and the inner surface of the nozzle 130 between the feeding hole 150 and the injection port 170 is smooth, so as to reduce the resistance to the plasma gas and improve the injection effect. Optionally, the shape of the nozzle hole 130 between the feeding hole 150 and the injection port 170 is a tapered hole, which can realize the collection of plasma gas, thereby facilitating the increase of the injection speed of the coating material. In other embodiments, the shape of the injection hole 130 between the feeding hole 150 and the injection port 170 may be a cylindrical hole as long as the plasma gas guiding effect can be conveniently achieved.

In one embodiment, the plasma coating showerhead 100 is made of stainless steel or copper, thereby ensuring structural stability of the plasma coating showerhead 100. In other embodiments, the plasma coating showerhead 100 may be made of other materials with stable structural properties, such as alloys.

In this embodiment, the coating material comprises a ring-shaped non-functionalized hydrocarbon and a hydrocarbon having at least one functional group, and is atomized and ionized after passing through the plasma coating apparatus 10, so as to form a plasma polymer layer on the surface 30 to be coated, thereby achieving the coating effect. In other embodiments, the coating material may be set according to the coating requirement of the surface 30 to be coated. The surface 30 to be coated may be a surface to be coated, such as a mobile phone, an earphone, a circuit board, etc.

Referring to fig. 1 and 2, in an embodiment, the plasma coating apparatus 10 further includes a mounting member 200 and an electrode 300, the mounting member 200 forms a mounting cavity 210, and the electrode 300 is mounted in the mounting cavity 210. The plasma coating shower head 100 includes a connection end 110 and a spray end 120 connected to each other, a spray hole 130 is opened on the connection end 110, and the spray hole 130 penetrates through an end surface of the spray end 120 opposite to the connection end 110 and forms a spray opening 140. The connection end 110 is connected to the mounting member 200 such that the mounting cavity 210 communicates with the nozzle hole 130. Plasma gas is conveniently formed by providing the mounting member 200, thereby facilitating ionization of the coating material.

In one embodiment, the connecting end 110 is removably attached to the mounting member 200. When plasma coating shower nozzle 100 takes place to damage, can be convenient for realize plasma coating shower nozzle 100's change through dismantling the linkage segment, and need not change installed part 200, effectively reduce the cost that plasma coating equipment 10 changed.

In this embodiment, an external thread is disposed on an outer wall of the connecting end 110, an internal thread is disposed on an inner wall of the mounting cavity 210 of the mounting member 200, and the internal thread is matched with the external thread to implement the mounting of the connecting end 110 on the mounting member 200, and further implement the mounting of the plasma coating nozzle 100 on the mounting member 200. In other embodiments, the connection end 110 and the mounting member 200 can be connected by a detachable fastening structure, so long as the plasma coating showerhead 100 can be detached from the mounting member 200.

In other embodiments, the connection end 110 may be integrally formed on the mounting member 200, so as to effectively ensure the stability of the communication between the mounting cavity 210 and the nozzle 130.

In one embodiment, the mounting member 200 is made of stainless steel or copper, thereby ensuring structural stability of the plasma plating apparatus 10. In other embodiments, the mounting member 200 can be made of other structurally stable alloys.

In one embodiment, the electrode 300 is made of a copper alloy material, so that the service life of the electrode 300 can be effectively ensured, and the service life of the plasma coating apparatus 10 can be prolonged. In other embodiments, the electrode 300 may be made of stainless steel or copper.

In one embodiment, the electrode 300 is electrically connected to a plasma excitation power source 400. The electrode 300 can be conveniently energized by the plasma excitation power source 400, thereby facilitating the generation of plasma. Specifically, the frequency of the plasma excitation power supply 400 may be 25KHz, 40KHz, 13.56MHz, or 2.45GHz, and the density and temperature of the plasma that can be generated at different frequencies are different, so that the frequency of the plasma excitation power supply 400 may be selected according to the main choice.

In one embodiment, the end of the mounting member 200 opposite to the plasma coating nozzle 100 is disposed on the gas pipe 500, and the gas pipe 500 is communicated with the mounting chamber 210. Dry compressed air or nitrogen is conveniently introduced into the installation cavity 210 through the air pipe 500 to be plasma excited gas, so that the coating material is conveniently sprayed on the surface 30 to be coated through the spray opening 140.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Claims

1. A plasma coating nozzle is characterized in that the plasma coating nozzle is provided with a spray hole, the spray hole penetrates through one end face of the plasma coating nozzle to form a spray opening, the side wall of the plasma coating nozzle is provided with a feed hole, the feed hole is communicated with the spray hole, and a convex structure and/or a groove structure are/is arranged on the inner surface of the spray hole between the feed hole and the spray opening.

2. The plasma plating showerhead of claim 1, wherein an intersection of an extension of the axis of the feed hole and an inner surface of the injection hole is located on a first plane, the injection port is located on a second plane, the second plane is parallel to the first plane, and a distance between any first cross-sectional point of the injection hole located on the first plane and a second cross-sectional point of the injection hole located at a shortest distance on the second plane is smaller than a distance between the first cross-sectional point and the second cross-sectional point along the inner surface of the injection hole.

3. The plasma coating showerhead of claim 2, wherein a distance between any third cross-sectional point of the nozzle hole on a third plane and a second cross-sectional point of the nozzle hole on the second plane at a shortest distance is equal to a distance between the third cross-sectional point and the second cross-sectional point along an inner surface of the nozzle hole, wherein the third plane is located between the first plane and the second plane and is close to the second plane.

4. The plasma coating showerhead of claim 1, wherein the orifice extends through an opposite end surface of the plasma coating showerhead to form a jet port, and an inner surface of the orifice between the feed hole and the jet port is smooth.

5. The plasma plating showerhead of any of claims 1 to 4, wherein the size of the cross section of the injection hole tends to decrease toward the injection port.

6. The plasma coating showerhead of claim 5, wherein the cross-sectional size of the orifice is gradually reduced toward the ejection port.

7. The plasma coating showerhead of claim 6, wherein the spray holes are tapered holes having a taper angle of 16 ° -30 °.

8. A plasma coating apparatus, characterized in that it comprises a plasma coating head according to any one of claims 1 to 7.

9. The plasma plating apparatus according to claim 8, further comprising a mounting member formed with a mounting cavity, and an electrode mounted in the mounting cavity, wherein the plasma plating head includes a connection end and a jet end connected, the jet hole opens at the connection end and penetrates through an end surface of the jet end opposite to the connection end, the jet port is formed at the jet end, and the connection end is connected to the mounting member so that the mounting cavity communicates with the jet hole.

10. The plasma plating apparatus according to claim 9, wherein the connection end is detachably connected to the mounting member.