CN111360409A - Method and device for manufacturing parabolic surface nano axial photon microcavity device - Google Patents
Method and device for manufacturing parabolic surface nano axial photon microcavity device Download PDFInfo
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Abstract
The invention belongs to the field of photonic device processing, and particularly relates to a method and a device for manufacturing a parabolic surface nano axial photonic microcavity device, wherein the method comprises the following steps: acquiring femtosecond laser processing parameters including the number of axially parallel line segments in the axial central section of the optical fiber and the length distribution of the line segments, wherein the overall edge profile formed by all the line segments is parabolic, and the longest line segment and the shortest line segment are symmetrically positioned at two sides of the central axis of the optical fiber; the method comprises the steps of controlling femtosecond laser pulses to vertically enter a section based on processing parameters, enabling the femtosecond laser pulses to continuously expose and scan according to the track of each line segment so as to modulate the refractive index of an optical fiber at the scanning position, and completing the manufacture of the SNAP structure with parabolic effective radius change distribution, wherein the axial length of the manufactured microcavity structure is equal to the length of the longest line segment, and the axial radius of the microcavity structure is positively correlated with the processing parameters. The invention utilizes femtosecond laser to realize a high-precision, flexible and controllable parabolic SNAP microcavity structure.
Description
Technical Field
The invention belongs to the field of photonic device processing, and particularly relates to a method and a device for manufacturing a parabolic surface nano axial photonic microcavity device.
Background
The ultra-low loss and high-precision processing of the photonic integrated device has important application significance and value in the fields of photonic signal processing and optical communication. A Surface Nanometer Axial Photon (SNAP) device based on an optical fiber echo wall principle is a novel micro-cavity structure proposed in recent years, has the advantages of ultralow loss (high Q value), high processing precision (sub-angstrom magnitude), small size (nanometer scale) and the like, and has huge application value and potential in the aspects of optical sensing, optical frequency comb, optical delay, optical buffer device and the like. The characteristic enables the parabolic SNAP microcavity structure to have important application significance in generating frequency combs, optical delay lines and the like, wherein the realization of the SNAP microcavity processing method capable of flexibly and accurately controlling the parabolic shape is a key step in the wide application of the parabolic SNAP microcavity.
Theoretical research shows that the shape of the SNAP microcavity which is parabolic along the axial direction of the optical fiber and is determined by characteristic parameters such as Effective Radius Variation (ERV), axial Radius and the like can greatly influence the problems of mode shift, dispersion and the like of the SNAP microcavity under the nonlinear action, so that the application characteristics of the frequency comb excited by the parabolic SNAP microcavity are influenced. Therefore, the key technology for manufacturing the parabolic SNAP microcavity structure is to realize the precise control of ERV distribution of the microcavity surface along the axial direction of the optical fiber, namely the precise processing of the SNAP microcavity surface in a parabolic shape.
At present, there are three techniques for fabricating parabolic SNAP microcavity structures: carbon dioxide exposure, bent fiber, tapered fiber, and the like. The processing process is complex when the carbon dioxide exposure method is used for manufacturing the parabolic SNAP structure, and the number of axial modes with equal frequency intervals is limited. The curved fiber method cannot simultaneously meet the requirements that the parabolic SNAP microcavity structure has a large axial dimension of the optical fiber and a large ERV, so that the manufactured structure is single and the flexibility is poor. Although the tapered optical fiber method can be used for manufacturing a parabolic SNAP microcavity structure with large ERV, the experimental repeatability is poor, the robustness is low, and the influence of the parameters of a tapered system is easy.
In recent years, a platform for manufacturing a micro optical fiber photonic device based on a femtosecond laser processing technology is developed abundantly. The femtosecond laser pulse has small light spot and high local processing precision, and has important advantages for manufacturing a micro optical fiber SNAP micro-cavity device of nanometer level ERV. However, the current scheme of processing SNAP microcavity by femtosecond laser is generally to singly scribe along the axial direction of the optical fiber, and utilizes complex physical effect to cause the nano-scale ERV on the surface of the optical fiber. The scheme can not effectively control the distribution shape of the ERV along the axial direction, and can not manufacture SNAP micro-cavity devices with complex linear distribution, such as parabolic SNAP micro-cavities. Therefore, in the face of a parabolic SNAP microcavity structure with strict microcavity shape requirement, the traditional femtosecond laser processing method cannot flexibly and accurately realize processing.
Disclosure of Invention
The invention provides a method and a device for manufacturing a parabolic surface nano axial photon microcavity device, which are used for solving the technical problem that the structural shape cannot be flexibly and effectively regulated and controlled in the existing method for manufacturing the parabolic surface nano axial photon microcavity device.
The technical scheme for solving the technical problems is as follows: a method for manufacturing a parabolic surface nano axial photon microcavity device comprises the following steps:
s1, obtaining femtosecond laser processing parameters, wherein the processing parameters comprise the number of axially parallel line segments in the axial central section of the optical fiber and the length distribution of the line segments, the overall edge profile formed by all the line segments is parabolic, and the longest line segment and the shortest line segment are symmetrically positioned on two sides of the central axis of the optical fiber;
and S2, based on the processing parameters, controlling the femtosecond laser pulse light beam to vertically irradiate the section, so that the femtosecond laser pulse carries out continuous exposure scanning according to the track of each line segment to realize the modulation of the refractive index of the optical fiber at the scanning position, and finishing the manufacture of the surface nano axial photon microcavity structure with parabolic change distribution of the axial effective radius of the optical fiber, wherein the axial length of the microcavity structure obtained by the manufacture is equal to the length of the longest line segment, and the axial radius of the microcavity structure is in positive correlation with the number of the line segments and the length of each line segment.
The invention has the beneficial effects that: the micro-cavity structure processing method introduces the design of the lineation shape in the local processing, realizes the manufacture of the surface nano axial photon micro-cavity with special ERV shape distribution by the femtosecond laser processing technology, which is a function that can not be realized by the traditional femtosecond laser processing method of the optical fiber surface nano axial photon micro-cavity. Meanwhile, the limitation of parameters such as power, scanning speed and the like in the traditional laser processing technology on the processing of the SNAP microcavity structure is broken through, and the geometric shape freedom degree which can be regulated and controlled by the parameters in the laser processing is additionally increased. Secondly, the processing method is high in flexibility and good in controllability, parameters can be flexibly regulated and controlled according to an actually required structure, and accurate manufacturing is achieved. The ERV of the surface nano axial photon microcavity can be realized by flexibly changing regulation and control such as scribing number, length distribution and the like according to device requirements, and the specific axial radius and axial length of the microcavity with the ERV distributed in a parabolic shape can be flexibly adjusted according to the length distribution of the line segments forming the parabolic outline of the processing area. Therefore, the method has high repeatability, the repeated error can be limited to the sub-Hertz magnitude, the processing precision is higher than that of the traditional micro-photonic device by several magnitudes, and the technical problem that the structural shape cannot be flexibly and effectively regulated in the existing manufacturing method of the parabolic surface nano-axial photonic microcavity device is effectively solved.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the processing parameters further include femtosecond laser pulse energy and scanning speed.
Further, the segment length distribution comprises: the length of the longest line segment, the length of the shortest line segment, the interval between two adjacent line segments and the length of other line segments;
wherein, the interval between every two adjacent line segments is equal.
The invention has the further beneficial effects that: the more concrete the contour of the processing area is determined, the higher the processing precision is, and the stronger the accurate regulation and control performance of the structure is. Wherein the intervals between every two adjacent line segments are equal, which is convenient for processing.
Further, before the S1, the method further includes:
determining initial femtosecond laser processing parameters based on a parabolic surface nano axial photon microcavity structure to be processed; the length of the longest line segment is the axial length of the parabolic surface nano axial photon microcavity structure to be processed;
then after the S2 preparing an initial parabolic surface nano-axial photonic microcavity structure based on the initial femtosecond laser processing parameters, the method further includes:
and comparing the difference of effective radius change distribution between the initial surface nano axial photon microcavity structure and the parabolic surface nano axial photon microcavity structure to be processed so as to adjust the initial femtosecond laser processing parameters, and repeating the step S1 by adopting another optical fiber until the parabolic surface nano axial photon microcavity structure to be processed is prepared.
The invention has the further beneficial effects that: the whole edge profile of the designed processing area is not completely identical to the parabola shape of the actually manufactured micro-cavity structure, the effective radius change and the axial radius regulation are of great importance to the micro-cavity performance, and the effective radius change distribution and the axial length of the micro-cavity structure determine the axial radius of the micro-cavity structure. Therefore, the processing parameters can be adjusted according to the difference of effective radius change distribution between the initial surface nano axial photon microcavity structure and the parabolic surface nano axial photon microcavity structure to be processed, and the required microcavity structure can be quickly and effectively prepared.
Further, the adjusting of the initial femtosecond laser processing parameters specifically comprises: and adjusting the initial femtosecond laser processing parameters according to the positive correlation between the effective radius change of any radial section and the number of line segments in the radial direction of the section.
The invention has the further beneficial effects that: in the longest line segment region in the axial direction of the optical fiber, according to the fact that the effective radius change of any radial section is related to the number of the line segments parallel to the axial direction in the section, the effective radius change is larger when the refractive index change modulated by laser is larger as the number of the line segments is larger, and the number of the line segments parallel to the axial direction in the section is closely related to the number, the interval, the length and the like of the line segments in the processing region, and therefore the processing parameters can be effectively adjusted.
Further, an optical fiber microcavity coupling measurement system is adopted to measure the drift amount of the resonant wavelength of the whispering gallery mode, and the effective radius change distribution of the initial surface nano axial photon microcavity structure is obtained for comparison.
The invention also provides a device for manufacturing the parabolic surface nano axial photon microcavity device, which comprises: the device comprises an optical fiber, a three-dimensional moving platform, a light path adjusting component, a main controller and a femtosecond laser;
the optical fiber is horizontally placed on the three-dimensional moving platform, and the axial direction of the optical fiber is vertical to the incident direction of a femtosecond laser pulse beam emitted by the femtosecond laser;
the main controller controls the switch of the femtosecond laser and the movement of the three-dimensional moving platform, so that the femtosecond laser pulse beam is focused on the axial center section of the optical fiber through the optical path adjusting component, and the specific manufacturing processes of S1 and S2 in any manufacturing method of the parabolic surface nano axial photon microcavity device are executed.
The invention has the beneficial effects that: the main controller is adopted to control the movement of the three-dimensional moving platform so as to drive the optical fiber to move, the problem of complex structure and high control difficulty caused by the movement of laser beams during scanning is solved, and the required parabolic surface nano axial photon microcavity device can be quickly and accurately manufactured by combining the manufacturing method.
Further, the optical fiber is a single mode optical fiber, a special optical fiber or a polymer optical fiber with any diameter.
The present invention also provides a machine-readable storage medium storing machine-executable instructions which, when invoked and executed by a processor, cause the processor to implement the specific fabrication flows of S1 and S2 in any one of the methods of fabricating a parabolic surface nano-axial photonic microcavity device as described above.
Drawings
Fig. 1 is a flow chart of a method for manufacturing a parabolic SNAP microcavity device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a parabolic SNAP microcavity device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a measurement apparatus for an optical fiber ERV according to an embodiment of the present invention;
FIG. 4 is a spectrum of a parabolic SNAP microcavity structure with an axial length of 560 μm and an axial radius of about 3.14m fabricated by laser processing according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a write line segment distribution of the parabolic profile designed during processing corresponding to FIG. 4;
FIG. 6 is a schematic diagram of a distribution structure of inscribed line segments of a parabolic profile designed during processing according to an embodiment of the present invention;
FIG. 7 is a spectrum corresponding to FIG. 6 showing a parabolic SNAP microcavity structure with an axial length of 1mm and an axial radius of about 9.3m fabricated by laser processing;
FIG. 8 is a schematic diagram of a write line segment distribution structure of a parabolic profile designed during processing according to an embodiment of the present invention;
FIG. 9 is a spectrum corresponding to FIG. 8 of a parabolic SNAP microcavity structure having an axial length of 2mm and an axial radius of about 37.8m fabricated using laser machining techniques;
fig. 10 is a device for manufacturing a parabolic SNAP microcavity device according to an embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein:
11. the optical fiber comprises an optical fiber 12, a whispering gallery mode 13, a surface of an optical fiber SNAP microcavity structure 21, a three-dimensional displacement platform 22, a laser beam 23, an optical path adjusting component 24, a laser 25, an optical fiber center under overlook 26, a parallel line segment engraved in the optical fiber by the laser 31, a conical micro-nano optical fiber 32, a laser light source 33 and a spectrometer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example one
A method 100 of fabricating a parabolic SNAP microcavity device, as shown in fig. 1, comprises:
110, acquiring femtosecond laser processing parameters, wherein the processing parameters comprise the number of axially parallel line segments in the axial central section of the optical fiber and the length distribution of the line segments, the overall edge profile formed by all the line segments is parabolic, and the longest line segment and the shortest line segment are symmetrically positioned at two sides of the central axis of the optical fiber;
and 120, based on the processing parameters, controlling the femtosecond laser pulse light beam to vertically irradiate the section, so that the femtosecond laser pulse carries out continuous exposure scanning according to the track of each line segment to realize the modulation of the refractive index of the optical fiber at the scanning position, and finishing the manufacture of the SNAP micro-cavity structure which has parabolic distribution of the optical fiber axial ERV, wherein the axial length of the manufactured micro-cavity structure is equal to the length of the longest line segment, and the axial radius of the micro-cavity structure is in positive correlation with the number of the line segments and the length of each line segment.
The method mainly comprises the steps of designing the geometric shape of a processing area of femtosecond laser pulses in an optical fiber, further manufacturing a specific parabolic SNAP micro-cavity structure, introducing the design of the geometric shape of the processing area into femtosecond laser processing, and flexibly and efficiently manufacturing the SNAP micro-cavity with the axial ERV space geometric shape of the optical fiber in parabolic distribution by combining control of modulation intervals, scribing number and the like of the femtosecond laser processing.
Specifically, the femtosecond laser pulse processing region is in a central plane of the optical fiber in the axial direction (of course, according to actual needs, in addition, a plurality of parallel line segments are respectively exposed and scanned in symmetrical planes at two sides of the central plane, and a required microcavity structure is also prepared). The shape of the processing area is composed of a plurality of parallel line segments which are different in length and subjected to refractive index modulation by femtosecond laser pulses, the overall edge profile composed of the line segments with different lengths is parabolic, and the parabolic SNAP microcavity structure is obtained after the femtosecond laser pulses are scanned finally (the overall edge profile of the processing area is not completely identical to the parabolic profile of the actually manufactured microcavity structure). The axial length of the processed parabolic SNAP micro-cavity structure is determined by the length of the longest line segment in the writing line segments forming the parabolic outline in the designed processing area; because the axial radius of the microcavity structure is determined by the ERV distribution and the axial length, and the ERV size of the processed parabolic SNAP microcavity structure is dynamically adjusted according to the length distribution, the number of scribing lines and the like (in combination with parameters such as femtosecond laser processing energy, scanning speed and the like) of each modulation line segment forming the parabolic profile in the designed processing area, the axial radius of the processed parabolic SNAP microcavity structure is dynamically adjusted by the curvature radius at the vertex of the parabolic profile formed by different writing line segments in the designed processing area, and specifically, the larger the number of line segments is, the longer the length of the line segments is, the larger the refractive index change amount is, and the larger the axial radius of the processed microcavity structure is.
The fiber parabolic SNAP microcavity device structure shown in fig. 2 generates a nanometer tiny Effective Radius Variation (ERV) on the SNAP microcavity structure surface 13 of the cylindrical fiber 11, and the ERV is parabolic along the axial direction, and this SNAP microcavity structure can control the whispering gallery mode 12 to rotate around the axis on the outer surface of the fiber and transmit slowly along the axial direction.
The micro-cavity structure processing method introduces the design of the lineation shape in the local processing, realizes the manufacture of the SNAP micro-cavity (not limited to the parabola shape) with special ERV shape distribution by the femtosecond laser processing technology, and has the function which can not be realized by the traditional femtosecond laser processing method for the optical fiber SNAP micro-cavity. Meanwhile, the limitation of parameters such as power, scanning speed and the like in the traditional laser processing technology on the processing of the SNAP microcavity structure is broken through, and the geometric shape freedom degree which can be regulated and controlled by the parameters in the laser processing is additionally increased. Secondly, the processing method of the embodiment has high flexibility and good controllability, and can flexibly regulate and control parameters according to an actually required structure to realize accurate manufacturing. The ERV of the SNAP microcavity can be realized by flexibly changing regulation and control such as the number of scribing lines and length distribution according to the requirements of devices, and the specific curvature radius and the axial length of the ERV in parabolic distribution can be flexibly adjusted according to the length distribution of the line segments forming the parabolic outline of the processing area. Therefore, the method has high repeatability, the repeated error can be limited to the sub-Hertz order, and the processing precision is higher than that of the traditional micro photonic device by several orders of magnitude.
In addition, in the method of the embodiment, by controlling the focal position of the femtosecond laser pulse, the stress is introduced only in a partial region in the optical fiber, so that the ERV distribution of the optical fiber is caused without damaging the surface of the optical fiber, the integrity and the robustness of the optical fiber are ensured, and the overall low loss factor of the SNAP microcavity device is ensured.
Preferably, the femtosecond processing parameters further include femtosecond laser pulse energy and scanning speed. The ERV size of the parabolic SNAP microcavity is dynamically and flexibly adjusted according to the length distribution, the number of scribing lines and the like of each modulation line segment forming a parabolic profile in a designed processing area and by combining parameters such as femtosecond laser processing energy, scanning speed and the like.
Preferably, the segment length distribution includes: the length of the longest line segment, the length of the shortest line segment, the interval between two adjacent line segments and the length of other line segments; wherein, the interval between every two adjacent line segments is equal. The more concrete the contour of the processing area is determined, the higher the processing precision is, and the stronger the accurate regulation and control performance of the structure is. Wherein the intervals between every two adjacent line segments are equal, which is convenient for processing.
Preferably, before step 110, the method 100 further comprises:
determining initial femtosecond laser processing parameters based on a parabolic SNAP microcavity structure to be processed; the length of the longest line segment is the axial length of the parabolic SNAP microcavity structure to be processed;
then, after the step 120 of obtaining the initial parabolic SNAP microcavity structure based on the initial femtosecond laser processing parameters, the method 100 further includes:
comparing ERV distribution difference between the initial SNAP micro-cavity structure and the parabolic SNAP micro-cavity structure to be processed to adjust initial femtosecond laser processing parameters, and repeating the step 110 by adopting another optical fiber until the parabolic SNAP micro-cavity structure to be processed is obtained.
Based on the foregoing, the shape of the processing region is formed by a plurality of parallel line segments with different lengths, which are subjected to refractive index modulation by femtosecond laser pulses, and the overall edge profile formed by the line segments with different lengths is parabolic, and the parabolic SNAP microcavity structure is obtained after scanning by the final femtosecond laser pulses, but the overall edge profile of the processing region may not be completely identical to the parabolic profile of the actually manufactured microcavity structure, and since the mode shift and dispersion problems of the SNAP microcavity under the nonlinear action can be greatly influenced by the SNAP microcavity shape which is parabolic along the axial direction of the optical fiber and is determined by the ERV, the curvature radius and the like, the regulation of the ERV and the curvature radius is of great importance, and the axial radius of the microcavity structure is determined by the distribution and the axial length of the ERV. Therefore, at this time, the processing parameters can be adjusted according to the ERV distribution difference between the initial SNAP micro-cavity structure and the parabolic SNAP micro-cavity structure to be processed, and finally the required micro-cavity structure is manufactured.
Preferably, the adjusting of the initial femtosecond laser processing parameters specifically includes: and adjusting initial femtosecond laser processing parameters according to the positive correlation between the ERV of any radial section and the number of line segments in the radial direction of the section.
In the longest line segment region in the axial direction of the optical fiber, the ERV of any radial cross section is related to the number of axially parallel line segments in the cross section, and generally, the greater the number of segments, the greater the change in refractive index modulated by the laser light, the greater the ERV, and the number of axially parallel line segments in the cross section is closely related to the number, interval, length, etc. of line segments in the machining region, and based on this, the machining parameters can be effectively adjusted.
Preferably, the fiber microcavity coupling measurement system is adopted to measure the drift amount of the resonant wavelength of the whispering gallery mode, and obtain the initial ERV distribution of the SNAP microcavity structure for the comparison.
FIG. 3 is a graph for measuring the parabolic SNAP micro-scale proposed in this exampleThe measuring device of the optical fiber ERV with the cavity structure is based on a common micro-nano optical fiber-micro cavity coupling system, the cone region of the cone-shaped micro-nano optical fiber 31 is in contact coupling with the optical fiber to be measured, so that an optical signal of a light source 33 is coupled into the optical fiber to be measured through an evanescent field of the cone-shaped micro-nano optical fiber, a whispering gallery mode 12 on the surface of the optical fiber to be measured is excited, and a resonance peak signal is generated and coupled back to the cone-shaped micro-nano optical fiber to be received by an optical spectrum analyzer 32. In order to measure the ERV of the parabolic SNAP microcavity, the spectral signals of the conical micro-nano optical fiber at different positions along the axial direction of the SNAP microcavity structure need to be measured, a spectral change graph distributed along the axial direction of the optical fiber can be obtained, and the spectral change graph is obtained through a formula delta r/r0＝Δλ/λ0ERV distribution of the SNAP microcavity structure along the axial direction can be calculated.
To better illustrate that the present invention can be flexibly and accurately implemented in processing a parabolic SNAP microcavity, the following specific examples are given:
first, as shown in fig. 4, the method of the present embodiment designs a parabolic shape of the femtosecond laser pulse to the internal processing region of the optical fiber and processes the manufactured parabolic SNAP microcavity structure with an axial length of 560 μm. As can be seen from the figure, the resonance wavelength of the SNAP microcavity structure changes by about 0.5nm, and the structure is calculated to cause an ERV of the optical fiber of about 13 nm. The dashed line in this figure is a fitted parabolic curve, with an axial radius of the parabolic SNAP microcavity of 3.14 m.
Wherein, the profile of the parabolic shape of the femtosecond laser pulse to the internal processing area of the optical fiber is designed as shown in fig. 5. The femtosecond laser pulse is subjected to equidistant continuous exposure scanning according to the track of the straight line segments in the graph, wherein the shortest line segment for writing is 70 microns, the longest line segment is 560 microns, the number and length distribution of the line segments for writing can be regulated according to the ERV requirement of the needed parabolic SNAP microcavity, 16 straight line segments with equal interval of 2.5 microns are written in the example, and the generated refractive index change can correspondingly cause 13nm ERV on the surface of the optical fiber.
In the second example, on the basis of the first example, the length distribution of each parallel straight line segment is changed in the design of the parabolic shape of the machining area, wherein the length of the longest line segment is 1mm, the length of the shortest line segment is 50 μm, the lengths of other line segments are changed correspondingly, and the line segment interval, the femtosecond laser machining power, the scanning speed and the like are kept unchanged, and a specific structural schematic diagram is shown in fig. 6.
According to the design of the shape of the processing area and the method of the embodiment, a parabolic SNAP microcavity structure with the axial length of 1mm can be processed in the experiment. As shown in fig. 7, it can be seen that the length of the longest segment in the parabolic shape design of the machining region determines the axial length of the finally machined parabolic SNAP microcavity structure. In addition, as the line segment interval, the femtosecond laser processing power, the scanning speed and the like are kept unchanged compared with the example, the resonance wavelength change of the parabolic SNAP microcavity structure and the corresponding induced fiber ERV are kept unchanged, namely 0.5nm and 13nm respectively. The axial radius of the parabolic SNAP microcavity is calculated to be 9.3 m.
And in the third example, on the basis of the first example, the length of the longest writing line segment forming the parabola shape in the machining area is designed to be 2mm, the length of the shortest line segment is optimized to be 40um, the lengths of other line segments are changed correspondingly, and in addition, the line segment interval, the line segment number, the femtosecond laser machining power, the scanning speed and the like can be set according to the requirements of the needed parabola SNAP micro-cavity ERV. In this example, in order to show the influence of the parabolic shape design caused by the length distribution of the line segments on the processed parabolic SNAP microcavity structure, the line segment interval, the femtosecond laser processing power, the scanning speed, and the like are kept unchanged, and a specific structural schematic diagram is shown in fig. 8.
According to the design of the shape of the processing area and the method of the embodiment, a parabolic SNAP microcavity structure with the axial length of 2mm can be processed in the experiment. As shown in fig. 9, and as compared to example one and example two, it can be seen that the length of the shortest line segment in the designed parabolic profile greatly affects the top smoothness of the finally processed parabolic SNAP microcavity structure. It can be seen that the precise processing of the SNAP microcavity structure with the axial ERV of the optical fiber in a parabolic shape can flexibly design the length distribution of each line segment forming the parabolic profile in the processing area through precision.
The effective radius change generated on the surface of the optical fiber is that the focused femtosecond laser pulse and the optical fiber material generate nonlinear interaction to generate refractive index modulation change and stress action in a processing area, thereby causing the nano-scale change of the optical fiber radius. The refractive index modulation change quantity and the generated stress are influenced by the energy of femtosecond laser pulse, the moving speed of the scanning optical fiber, the scribing interval, the number of the scanning optical fiber and other parameters, and the size and the distribution shape of the axial ERV of the optical fiber are determined. The greater the refractive index change caused by the line segment in the radial direction of the section is, the greater the ERV value of the radial section is, so that the design of the axial parallel line segments with different lengths can generate the parabolic SNAP microcavity structure.
Example two
An apparatus for fabricating a parabolic SNAP microcavity device, as shown in fig. 10, comprises: the device comprises an optical fiber, a three-dimensional moving platform, a light path adjusting component, a main controller and a femtosecond laser;
the optical fiber is horizontally placed on the three-dimensional moving platform, and the axial direction of the optical fiber is vertical to the incident direction of a femtosecond laser pulse beam emitted by the femtosecond laser;
the main controller controls the switching of the femtosecond laser and the movement of the three-dimensional moving platform, so that the femtosecond laser pulse beam is focused on the axial center section of the optical fiber through the optical path adjusting component, and the specific manufacturing process of steps 110 and 120 in any manufacturing method of the parabolic SNAP microcavity device according to embodiment one is executed. The related technical solution is the same as the first embodiment, and is not described herein again.
Preferably, the optical fiber is a single mode optical fiber, a specialty optical fiber or a polymer optical fiber of any diameter. The processing technical scheme provided by the embodiment is not influenced by the characteristics of the optical fiber, and can be manufactured on various optical fibers by using the technology.
The device can be used for manufacturing various SNAP micro-cavity devices by accurately designing the shapes of the processing areas of the femtosecond lasers in the optical fibers. For example, the femtosecond pulse has a central wavelength of 520nm, and the optical fiber is a special optical fiber with a diameter of 80 μm, and the parabolic SNAP microcavity structure described in the first example is prepared by the following specific operation method:
1) fixing the optical fiber (11) on a three-dimensional moving platform (21) to enable the axial direction of the optical fiber (11) to be perpendicular to the incident direction of the laser beam (22); observing and adjusting the position of the optical fiber (11) through a microscope (23), and enabling a laser beam (22) output by a femtosecond laser (24) to be focused on a central plane of the optical fiber (11) through an optical path adjusting component (23);
2) controlling a three-dimensional moving platform to enable an optical fiber to move along an axial direction, simultaneously opening a femtosecond laser pulse exposure shutter, enabling a femtosecond laser pulse (24) to continuously expose in the optical fiber (11) along the axial direction to perform line segment writing (26), completing other line segment modulation writing in the same method at equal line spacing, and performing a line segment modulation path according to designed line segment distribution (25) with a parabolic contour;
3) placing the processed optical fiber (11) with the parabolic SNAP microcavity structure in the optical fiber microcavity coupling measurement system shown in figure 3, measuring the drift amount of the resonant wavelength of the whispering gallery mode (12), and calculating according to the formula delta r/r0＝Δλ/λ0And calculating the ERV value of the processed SNAP microcavity structure.
EXAMPLE III
A machine-readable storage medium storing machine-executable instructions that, when invoked and executed by a processor, cause the processor to implement the specific fabrication flows of 110 and 120 of any one of the methods of fabricating parabolic SNAP microcavity devices, as described in embodiment one.
The related technical solution is the same as the first embodiment, and is not described herein again.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. A method for manufacturing a parabolic surface nano axial photon microcavity device is characterized by comprising the following steps:
s1, obtaining femtosecond laser processing parameters, wherein the processing parameters comprise the number of axially parallel line segments in the axial central section of the optical fiber and the length distribution of the line segments, the overall edge profile formed by all the line segments is parabolic, and the longest line segment and the shortest line segment are symmetrically positioned on two sides of the central axis of the optical fiber;
s2, based on the processing parameters, controlling the femtosecond laser pulse light beam to vertically irradiate the section, so that the femtosecond laser pulse carries out continuous exposure scanning according to the track of each line segment to realize the modulation of the refractive index of the optical fiber at the scanning position, and finishing the manufacture of the surface nano axial photon microcavity structure with parabolic effective radius change distribution in the optical fiber axial direction, wherein the axial length of the microcavity structure obtained by the manufacture is equal to the length of the longest line segment, and the axial radius of the microcavity structure is in positive correlation with the number of the line segments and the length of each line segment.
2. The method of claim 1, wherein the processing parameters further include femtosecond laser pulse energy and scanning speed.
3. The method of claim 1, wherein the distribution of lengths of the segments comprises: the length of the longest line segment, the length of the shortest line segment, the interval between two adjacent line segments and the length of other line segments;
wherein, the interval between every two adjacent line segments is equal.
4. The method as claimed in any one of claims 1 to 3, wherein before S1, the method further comprises:
determining initial femtosecond laser processing parameters based on a parabolic surface nano axial photon microcavity structure to be processed; the length of the longest line segment is the axial length of the parabolic surface nano axial photon microcavity structure to be processed;
then after the S2 preparing an initial parabolic surface nano-axial photonic microcavity structure based on the initial femtosecond laser processing parameters, the method further includes:
and comparing the difference of effective radius change distribution between the initial surface nano axial photon microcavity structure and the parabolic surface nano axial photon microcavity structure to be processed so as to adjust the initial femtosecond laser processing parameters, and repeating the step S1 by adopting another optical fiber until the parabolic surface nano axial photon microcavity structure to be processed is prepared.
5. The method for fabricating the parabolic surface nano-axial photonic microcavity device according to claim 4, wherein the adjusting of the initial femtosecond laser processing parameters specifically comprises: and adjusting the initial femtosecond laser processing parameters according to the positive correlation between the effective radius change of any radial section and the number of line segments in the radial direction of the section.
6. The method of claim 4, wherein an optical fiber microcavity coupling measurement system is used to measure the shift of the resonant wavelength of the whispering gallery mode, to obtain the distribution of the change in effective radius of the initial surface nano-axial photonic microcavity structure for the comparison.
7. A device for manufacturing a parabolic surface nano axial photon microcavity device is characterized by comprising: the device comprises an optical fiber, a three-dimensional moving platform, a light path adjusting component, a main controller and a femtosecond laser;
the optical fiber is horizontally placed on the three-dimensional moving platform, and the axial direction of the optical fiber is vertical to the incident direction of a femtosecond laser pulse beam emitted by the femtosecond laser;
the main controller controls the switch of the femtosecond laser and the movement of the three-dimensional moving platform, so that the femtosecond laser pulse beam is focused on the axial center section of the optical fiber through the optical path adjusting component, and the specific manufacturing procedures of S1 and S2 in the manufacturing method of the parabolic surface nano-axial photonic microcavity device according to any one of claims 1 to 6 are executed.
8. The apparatus of claim 7, wherein the optical fiber is a single mode fiber, a specialty fiber, or a polymer fiber with any diameter.
9. A machine-readable storage medium storing machine-executable instructions which, when invoked and executed by a processor, cause the processor to implement the specific fabrication flows of S1 and S2 in a method of fabricating a parabolic surface nano-axial photonic microcavity device as claimed in any one of claims 1 to 6.
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