CN111351511A - Laser interferometry system - Google Patents
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- CN111351511A CN111351511A CN202010316331.1A CN202010316331A CN111351511A CN 111351511 A CN111351511 A CN 111351511A CN 202010316331 A CN202010316331 A CN 202010316331A CN 111351511 A CN111351511 A CN 111351511A
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- 238000004556 laser interferometry Methods 0.000 title claims abstract description 35
- 238000012545 processing Methods 0.000 claims abstract description 88
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 238000004891 communication Methods 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000012369 In process control Methods 0.000 description 29
- 210000004544 dc2 Anatomy 0.000 description 29
- 238000004190 ion pair chromatography Methods 0.000 description 29
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000004590 computer program Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009781 safety test method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Abstract
The present application relates to a laser interferometry system. The laser interference measurement system comprises a laser interference device and a data processing terminal. The laser interference device comprises a network camera, and the network camera is used for collecting interference fringe images. And the data processing terminal is in communication connection with the network camera through a network and is used for obtaining a measurement result according to the interference fringe image. The application provides a laser interferometry system data processing efficiency is high.
Description
Technical Field
The application relates to the technical field of battery safety testing, in particular to a laser interferometry system.
Background
The laser interferometry is a technique for measuring based on the principle of light wave interference. Laser interferometry is non-contact measurement and has high measurement sensitivity and accuracy, and thus is widely used in various measuring instruments for distance measurement, spectral measurement, frequency measurement, rapid process observation, machining, and the like.
A conventional laser interferometry system generally includes a laser source, an interferometer, and a data acquisition device. The data acquisition device converts the optical signal acquired from the interferometer into an electrical signal. And then, the electric signal is led into computer equipment, and data processing software pre-installed on the computer equipment processes the electric signal to obtain a measurement result.
However, such a laser interferometry system has a problem of low data processing efficiency.
Disclosure of Invention
In view of the above, it is necessary to provide a laser interferometry system for solving the above technical problems.
A laser interferometry system, comprising:
the laser interference device comprises a network camera, and the network camera is used for acquiring an interference fringe image;
and the data processing terminal is in communication connection with the network camera through a network and is used for obtaining a measurement result according to the interference fringe image.
In one embodiment, the data processing terminal is in wireless communication connection with the network camera.
In one embodiment, the data processing terminal is a cloud service terminal.
In one embodiment, the data processing terminal includes:
the image receiving module is in communication connection with the network camera through a network and is used for receiving the interference fringe image;
and the processing module is in communication connection with the image receiving module and is used for processing the interference fringe image to obtain the measuring result.
In one embodiment, the data processing terminal further includes:
and the feedback module is in communication connection with the processing module and is used for comparing the measuring result with a preset standard and determining whether the measuring result meets the requirement.
In one embodiment, the laser interference device comprises:
a laser source for generating a measuring beam;
the interferometer comprises the network camera, the interferometer is arranged on a light path of the measuring beam, the measuring beam irradiates to a measured object through the interferometer and is incident to the interferometer after being reflected by the measured object to form interference fringes.
In one embodiment, the number of the laser sources and the number of the interferometers are multiple, and each laser source emits the measuring beam to one interferometer.
In one embodiment, the number of the interferometers is plural, the number of the laser sources is less than the number of the interferometers, and the laser interferometer further includes:
and the light splitting unit is arranged on a light path of the measuring light beam, the measuring light beam is split into multiple measuring light beams through the light splitting unit, and the multiple measuring light beams are respectively incident to the interferometers.
In one embodiment, the interferometer further comprises:
the spectroscope is arranged on the light path of the measuring light beam and is used for dividing the measuring light beam into vertical sub-measuring light and sub-reference light;
the first reflecting mirror is arranged on the light path of the sub-reference light and used for reflecting the sub-reference light back to the spectroscope;
the sub-measuring light irradiates the measured object, is reflected to the spectroscope by the measured object, and is mixed with the sub-reference light reflected by the first reflector to obtain mixed light;
a second reflecting mirror disposed on an optical path of the mixed light;
and the mixed light is reflected to the grating by the second reflecting mirror, and the grating is used for scattering the mixed light to obtain the interference fringes.
In one embodiment, the interferometer further comprises:
and the cylindrical mirror is used for collimating the interference fringes.
The laser interference measuring system comprises a laser interference device and the data processing terminal. The laser interference device comprises IPC, and the IPC and the data processing terminal are in communication connection through a network. Therefore, the data processing terminal can acquire the interference fringe image acquired by the IPC in real time and quickly through the network, so that the data processing efficiency is improved. Especially, when a plurality of measured objects are measured simultaneously, synchronous, unified and centralized processing can be realized, manual normalization and integration processing is not needed, and the data processing efficiency is high. In addition, the IPC is used for acquiring the interference fringe image, the measurement result is obtained based on the analysis and the processing of the interference fringe image, a data acquisition device is not needed for acquiring an optical signal, and then the optical signal is converted into an electric signal, so that the processing process is simplified, the data processing time is reduced, the safety of data transmission and processing is guaranteed, and the data processing efficiency is improved; meanwhile, a data acquisition device is not required, the hardware structure is simplified, and the cost is saved.
Drawings
FIG. 1 is a schematic diagram of a laser interferometry system according to one embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a data processing terminal according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a laser interferometry system according to one embodiment of the present disclosure;
FIG. 4 is a schematic diagram of a laser interferometry system according to one embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of an interferometer according to an embodiment of the present application.
Description of reference numerals:
Second reflecting mirror 133
Grating 134
Image receiving module 210
Object to be measured 20
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the laser interferometry system of the present application is further described in detail below by embodiments and with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
One embodiment of the present application provides a laser interferometry system 10 for measuring distance, position, frequency, spectrum, etc. of an object under test 20. The application does not limit the application of the laser interferometry system 10, and the laser interferometry system can be designed and selected according to actual requirements.
Referring to fig. 1, the laser interferometry system 10 includes a laser interference device 100 and a data processing terminal 200.
The laser interference device 100 is configured to emit a measuring beam and irradiate a measuring beam portion onto the surface of the object 20. The measuring beam is reflected by the object to be measured 20, returns to the laser interference device 100, and interferes with another part emitting the measuring beam to obtain interference light. The interference light can be further dispersed to obtain interference fringes. The internal structure, the components and the like of the laser interference device 100 are not limited in any way, and can be selected according to actual requirements. In one embodiment, the laser interferometer 100 includes a laser source 110 and an interferometer 130. Wherein the laser source 110 is used to generate a measuring beam. In one embodiment, the laser source 110 may be a femtosecond laser. The femtosecond laser generated by the femtosecond laser has the advantages of wide spectrum range, narrow pulse width, high stability of repetition frequency, high peak power and the like, reliably provides a connection path between an optical frequency domain and a radio frequency domain, and has wide application range. The interferometer 130 is disposed on an optical path of the measuring beam. The measuring beam generated by the laser source 110 is irradiated to the surface of the object to be measured 20 through the interferometer 130, is reflected by the object to be measured 20 and then enters the interferometer 130, and is interfered and processed by the interferometer 130 to form interference fringes. Specifically, the interferometer 130 splits the measuring beam into sub-measuring light and sub-reference light. The sub-measurement light irradiates the surface of the object to be measured 20, and is reflected by the object to be measured 20 and then enters the interferometer 130. The light reflected by the object to be measured 20 and the sub-reference light are further mixed by the interferometer 130 and then dispersed, so that the interference fringes are obtained.
The interferometer 130 includes a network Camera (IP Camera, hereinafter IPC) 101. The IPC may include a network coding module and an analog camera. The network coding module codes and compresses the analog video signals collected by the analog camera into digital signals, so that the network coding module can be directly accessed to network switching and routing equipment to realize network transmission. The IPC is arranged on a light path corresponding to the interference fringes and is used for collecting the image of the interference fringes to obtain an interference fringe image. The embodiment of the present application does not limit the types, structures, and the like of IPCs, as long as the IPCs can function.
The data processing terminal 200 is connected with the IPC through network communication. The data processing terminal 200 is configured to obtain a measurement result according to the interference fringe image. In one embodiment, the IPC transmits the acquired interference fringe image to a server through a network, the data processing terminal 200 downloads the interference fringe image from the server, performs image processing on the interference fringe image, and extracts phase information from the interference fringe image, so as to calculate a distance or other measurement result between the laser interference device 100 and the object to be measured 20 according to the phase information. Of course, the processing procedure of the data processing terminal 200 may be different according to the usage scenario of the laser interferometry system 10 and the parameters to be measured. The data processing terminal 200 may include a memory capable of storing a computer program and a processor capable of executing the computer program to implement the above processing procedures.
It should be noted that the data processing terminal 200 may be a computer device, an upper computer, or a separately designed terminal device capable of obtaining a required measurement result according to an interference fringe image. The embodiment of the present application is not limited to this. When the data processing terminal 200 is a separately designed terminal device, the pertinence is strong, and the processing efficiency is high.
The data processing terminal 200 may be connected to multiple IPCs through network communication at the same time, so as to process multiple sets of interference fringe images acquired by the laser interference device 100. That is, in some embodiments, the laser interference device 100 is used to measure multiple objects 20 simultaneously. The laser interferometer 100 may include a plurality of the interferometers 130, so as to measure a plurality of the objects to be measured 20 simultaneously, and obtain a plurality of sets of the interference fringe images. These objects 20 may be located at the same place or different places. That is, a plurality of the objects 20 to be measured may be placed in different places. The IPC of each interferometer 130 uploads the acquired interference fringe image to a server through a network, and the data processing terminal 200 can download all the interference fringe images in real time through the network, and then uniformly centralize and process all the interference fringe images. Compared with the prior art, the laser interferometry system provided by the embodiment can realize simultaneous centralized processing of a plurality of collected data only through a network, and even interference fringe images collected at different places do not need to be manually normalized and integrated, so that the data processing speed is increased, the data processing time is saved, and the processing efficiency is improved.
In this embodiment, the laser interferometry system 10 includes a laser interferometer 100 and the data processing terminal 200. The laser interference device 100 includes an IPC, and the IPC and the data processing terminal 200 are connected through a network. In this way, the data processing terminal 200 can acquire the interference fringe image acquired by the IPC in real time and quickly through the network, thereby improving the efficiency of data processing. Especially, when a plurality of measured objects 20 are measured simultaneously, synchronization, unification and centralized processing can be realized, manual normalization and integration processing is not needed, and the data processing efficiency is high. In addition, the IPC is used for acquiring the interference fringe image, the measurement result is obtained based on the analysis and the processing of the interference fringe image, a data acquisition device is not needed for acquiring an optical signal, and then the optical signal is converted into an electric signal, so that the processing process is simplified, the data processing time is reduced, the safety of data transmission and processing is guaranteed, and the data processing efficiency is improved; meanwhile, a data acquisition device is not required, the hardware structure is simplified, and the cost is saved.
The data processing terminal 200 and the IPC may be connected through wired communication or wireless communication. In one embodiment, the data processing terminal 200 and the IPC are connected through wireless communication via a wireless network, so that the cost can be saved and the system structure can be simplified.
The data processing terminal 200 may be a cloud service terminal, and may also be a local service terminal. That is, the data processing terminal 200 may be in communication connection with a cloud server through a network to realize communication connection with the IPC, or may be in communication connection with a local server through a network to realize communication connection with the IPC. When the data processing terminal 200 is a cloud service terminal, the data processing terminal can be in communication connection with a cloud server, so that the communication speed can be increased, and the data processing efficiency can be further improved.
Referring to fig. 2, in one embodiment, the data processing terminal 200 may include an image receiving module 210 and a processing module 220. The image receiving module 210 is connected with the IPC through network communication. The image receiving module 210 is configured to receive the interference fringe image. The processing module 220 is communicatively coupled to the image receiving module 210. The processing module 220 is configured to process the interference fringe image to obtain the measurement result. The image receiving module 210 and the processing module 220 may be functional modules of a hardware circuit, or may also be functional modules of a software program, or may also be functional modules realized by cooperation of a hardware circuit and a software program. In one embodiment, the processing module 220 may process the interference fringe image through a preset image processing algorithm to extract required phase information or other information, and further analyze the phase information or other information to obtain the measurement result. In this embodiment, the measurement result is obtained by processing the interference fringe image, the acquisition of interference information is more intuitive, and the data source is more stable by extracting required information through image information, so that the measurement result is more accurate.
In one embodiment, the data processing terminal 200 may further include a feedback module 230. The feedback module 230 is communicatively coupled to the processing module 220. The feedback module 230 is configured to receive the measurement result processed by the processing module 220, compare the measurement result with a preset standard, and determine whether the measurement result meets a requirement. For example, if the distance processed by the processing module 220 is 2.5cm and the preset standard is 2.2cm to 2.4cm, the measurement result is not satisfactory. The results obtained by the feedback module 230 may be used to guide the measurement of the next batch. Such as: if the measurement result meets the requirement, continuing to measure the next batch; if the measurement result does not meet the requirement, the measured object 20 can be repeatedly measured, and the measurement result is confirmed; or if the measurement result does not meet the requirement, outputting alarm information to prompt the measured object 20 which does not meet the requirement to be correspondingly adjusted so as to enable the measured object to meet the requirement. By providing the feedback module 230, the intelligence of the laser interferometry optical system 10 is improved.
The structure of the laser interference device 100 is further described below with reference to the following embodiments:
the laser interference device 100 may be a device capable of measuring one measured object 20, or may be a device capable of simultaneously measuring a plurality of measured objects 20. Referring to fig. 3, in an embodiment, when the laser interference device 100 performs simultaneous measurement on a plurality of objects 20 to be measured, the laser interference device 100 may include a plurality of the laser sources 110 and a plurality of the interferometers 130. Each of the laser sources 110 emits the measuring beam to one of the interferometers 130, and the measuring beam is divided into the sub-reference light and the sub-measuring light. Each beam of the sub-measuring light is irradiated on the surface of one of the measured objects 20. That is to say, the numbers of the laser sources 110, the interferometers 130 and the object to be measured 20 are equal, and the laser sources 110, the interferometers 130 and the object to be measured 20 are in one-to-one correspondence, so as to realize the measurement of the object to be measured 20. Therefore, the method can realize simultaneous measurement of a plurality of measured objects 20, save detection time, improve detection efficiency, and can be applied to scenes such as simultaneous detection of a plurality of workpieces in a production line. Each of the interferometers 130 includes an IPC, and each IPC is communicatively connected to the data processing terminal 200 via a network. In this way, the data processing terminal 200 can acquire interference information (i.e., the interference fringe image) collected by all IPCs in real time and quickly through a network, and obtain a measurement result based on the interference information analysis, thereby realizing centralized and unified processing of data and improving data processing efficiency.
Referring to fig. 4, in an embodiment, when the laser interference device 100 performs simultaneous measurement on a plurality of objects 20 to be measured, the number of the interferometers 130 in the laser interference device 100 is multiple, and the number of the laser sources 110 is less than the number of the interferometers 130. The laser interference device 100 may further include a light splitting unit 140. The light splitting unit 140 is disposed on an optical path of the measuring beam. The measuring beam is split into a plurality of measuring beams by the beam splitting unit 140. The multi-measurement infusion is incident to a plurality of the interferometers 130, respectively. That is, one laser source 110 corresponds to a plurality of interferometers 130. Thus, the laser source can be saved, and the cost can be reduced.
Referring to fig. 5, in one embodiment, the interferometer 130 may further include a beam splitter 131, a first mirror 132, a second mirror 133, a grating 134, and a cylindrical mirror 135 in addition to the IPC. The beam splitter 131 is disposed on the optical path of the measuring beam. The beam splitter 131 processes the measuring beam to split the measuring beam into perpendicular sub-measuring light and sub-reference light. The first reflecting mirror 132 is disposed on the optical path of the sub-reference light. The first reflecting mirror 132 reflects the sub-reference light back to the beam splitter 131. The sub-measuring light irradiates the surface of the measured object 20 and is reflected by the measured object 20 back to the spectroscope 131. The reflected sub-measurement light is mixed with the sub-reference light to obtain mixed light. The second reflecting mirror 133 is disposed on an optical path of the mixed light. The mixed light is reflected by the second mirror 133 to the grating 134. The grating spreads out the reflected mixed light to be incident on the cylindrical mirror 135. The cylindrical mirror 135 collimates the scattered mixed light, i.e., the interference fringes, and transmits the collimated mixed light to the IPC. IPC photographs resulted in interference fringe images. Through the collimation treatment of the cylindrical mirror 135, the interference fringe image obtained by the IPC is more accurate.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A laser interferometry system, comprising:
the laser interference device comprises a network camera, and the network camera is used for acquiring an interference fringe image;
and the data processing terminal is in communication connection with the network camera through a network and is used for obtaining a measurement result according to the interference fringe image.
2. The laser interferometry system of claim 1, wherein the data processing terminal is in wireless communication with the web camera.
3. The laser interferometry system of claim 1, wherein the data processing terminal is a cloud service terminal.
4. The laser interferometry system of claim 2, wherein the data processing terminal comprises:
the image receiving module is in communication connection with the network camera through a network and is used for receiving the interference fringe image;
and the processing module is in communication connection with the image receiving module and is used for processing the interference fringe image to obtain the measuring result.
5. The laser interferometry system of claim 4, wherein the data processing terminal further comprises:
and the feedback module is in communication connection with the processing module and is used for comparing the measuring result with a preset standard and determining whether the measuring result meets the requirement.
6. The laser interferometry system of claim 5, wherein the laser interference device comprises:
a laser source for generating a measuring beam;
the interferometer comprises the network camera, the interferometer is arranged on a light path of the measuring beam, the measuring beam irradiates to a measured object through the interferometer and is incident to the interferometer after being reflected by the measured object to form interference fringes.
7. The laser interferometry system of claim 6, wherein the number of laser sources and interferometers is plural, each laser source emitting the measuring beam to a corresponding one of the interferometers.
8. The laser interferometry system of claim 6, wherein the number of interferometers is plural, the number of laser sources is less than the number of interferometers, the laser interferometry device further comprising:
and the light splitting unit is arranged on a light path of the measuring light beam, the measuring light beam is split into multiple measuring light beams through the light splitting unit, and the multiple measuring light beams are respectively incident to the interferometers.
9. The laser interferometry system of claim 6, wherein the interferometer further comprises:
the spectroscope is arranged on the light path of the measuring light beam and is used for dividing the measuring light beam into vertical sub-measuring light and sub-reference light;
the first reflecting mirror is arranged on the light path of the sub-reference light and used for reflecting the sub-reference light back to the spectroscope;
the sub-measuring light irradiates the measured object, is reflected to the spectroscope by the measured object, and is mixed with the sub-reference light reflected by the first reflector to obtain mixed light;
a second reflecting mirror disposed on an optical path of the mixed light;
and the mixed light is reflected to the grating by the second reflecting mirror, and the grating is used for scattering the mixed light to obtain the interference fringes.
10. The laser interferometry system of claim 9, wherein the interferometer further comprises:
and the cylindrical mirror is used for collimating the interference fringes.
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| CN202010316331.1A CN111351511A (en) | 2020-04-21 | 2020-04-21 | Laser interferometry system |
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| CN202010316331.1A CN111351511A (en) | 2020-04-21 | 2020-04-21 | Laser interferometry system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114259208A (en) * | 2021-12-08 | 2022-04-01 | 南京润楠医疗电子研究院有限公司 | Monitoring equipment |
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