CN111342791B - Method and device for reducing static capacitance of resonator - Google Patents

Method and device for reducing static capacitance of resonator Download PDF

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Publication number
CN111342791B
CN111342791B CN201811551303.7A CN201811551303A CN111342791B CN 111342791 B CN111342791 B CN 111342791B CN 201811551303 A CN201811551303 A CN 201811551303A CN 111342791 B CN111342791 B CN 111342791B
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module
resonator
cross
reducing
parallel
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CN111342791A (en
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庞慰
蔡华林
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Tianjin University
ROFS Microsystem Tianjin Co Ltd
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Tianjin University
ROFS Microsystem Tianjin Co Ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H5/00One-port networks comprising only passive electrical elements as network components
    • H03H5/12One-port networks comprising only passive electrical elements as network components with at least one voltage- or current-dependent element
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/023Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Filters And Equalizers (AREA)

Abstract

The invention relates to a filter unit comprising: a resonator having a static capacitance; a cross inversion module; and a abatement module, wherein: the crossed inverting module is connected with the resonator in parallel; and the reduction module is connected with the crossed reverse phase module in parallel and is used for reducing the static capacitance of the resonator. By reducing the static capacitance, for example, the equivalent electromechanical coupling coefficient of the resonator can be adjusted and the loss reduced. The invention also relates to a method of reducing the static capacitance of a resonator, comprising the steps of: the static capacitance is reduced by utilizing a reducing module which is connected with the resonator in a crossed anti-phase parallel manner and comprises an electrical device for reducing. The invention also relates to a device for reducing the static capacitance of a resonator, comprising: a cross inversion module; and a abatement module comprising an abatement electrical device, wherein: the crossed inverting module is connected with the resonator in parallel; and the subtracting electric device is connected with the crossed inverting module in parallel and is used for subtracting the static capacitance. The invention also relates to the electronic equipment with the structure.

Description

Method and device for reducing static capacitance of resonator
Technical Field
Embodiments of the present invention relate to the field of semiconductors, and more particularly, to a filter unit, a filter having the filter unit, a method and apparatus for reducing static capacitance of a resonator, and an electronic device having the filter or the filter unit or the apparatus.
Background
With the popularization of internet of things, intelligent devices and 5G communication, the demand for high-speed transmission is increasingly urgent. The communication rate and the channel bandwidth have a direct corresponding relation, and increasing the bandwidth of the communication channel is the most direct and effective way to increase the transmission rate. Therefore, the broadband system occupies a very important position in the next generation communication system. The bandwidth and transmission performance of the communication channel depend on the choice of the particular communication bandwidth by the radio frequency front end, and in particular the radio frequency filter, so that a wideband high performance filter becomes a bottleneck for implementing a wideband system.
Since the piezoelectric filter has a small piezoelectric coupling coefficient, which directly corresponds to the bandwidth, it is difficult for such a filter to realize a high bandwidth filter. Among them, for example, for the FBAR filter, the static capacitance at both input and output ends is the most fundamental cause of limiting the electromechanical coupling coefficient, and eliminating the static capacitance is an effective way to improve the electromechanical coupling coefficient and even the bandwidth.
Disclosure of Invention
The present invention has been made to alleviate or solve at least one of the above-mentioned problems occurring in the prior art.
According to an aspect of an embodiment of the present invention, there is provided a filter unit including: a first resonator having a static capacitance; a cross inversion module; and a abatement module comprising an abatement electrical device, wherein: the crossed inverting module is connected with the first resonator in parallel; and the electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance of the first resonator.
Optionally, the cross inversion module is a transistor cross coupling structure.
Optionally, the first resonator is an FBAR resonator.
Optionally, the abatement module further comprises a control module for controlling an electrical parameter of the abatement electrical device and/or for disconnecting the abatement electrical device from parallel connection with the cross-inversion module.
Further, the control module comprises a switching device for controlling the disconnection of the electrical device for abatement from the parallel connection of the cross-inverting module, and/or at least one electrical parameter adjustment branch connected in parallel with the electrical device for abatement, the electrical parameter adjustment branch being used for adjusting the electrical parameter of the electrical device for abatement.
Optionally, the electrical device for reducing is a capacitor. Or the electric device for reducing is a series structure or a parallel structure formed by a capacitor and the second resonator.
Optionally, the filter unit is divided into an active module and a passive module, wherein the passive module comprises at least a part of the subtraction module and the first resonator, and the active module comprises the cross-inversion module.
The embodiment of the invention also relates to a static capacitance reduction method of the resonator, which comprises the following steps: the static capacitance is subtracted by a subtraction module which is connected in inverse parallel with the resonator in a crossing way and comprises an electrical subtraction device.
Optionally, "reducing the static capacitance with a reduction module" includes the steps of: a cross-inversion module is provided, such that the resonator is in parallel with the cross-inversion module and the abatement electrical device is in parallel with the cross-inversion module.
Optionally, at least a portion of the abatement module and the resonator are part of a passive structure, and the cross inversion module is part of an active structure; and the step of reducing the static capacitance by using a reducing module further comprises the steps of: the gain value of the cross inversion module is selected to cooperate with the subtraction module to subtract the static capacitance of the resonator. Further, the cross inversion module is a transistor cross coupling structure.
Optionally, the step of "reducing the static capacitance with a reducing module" further comprises the steps of: and controlling the electrical parameters of the electrical device for reduction and/or disconnecting the electrical device for reduction from the cross inversion module in parallel.
In the above method, optionally, the electrical device for reducing is a capacitor, or a series structure or a parallel structure of the capacitor and the second resonator.
The embodiment of the invention also relates to a device for reducing the static capacitance of a resonator, which comprises: a cross inversion module; and a abatement module comprising an abatement electrical device, wherein: the crossed inverting module is connected with the resonator in parallel; and the electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance. The embodiment of the invention also relates to a filter comprising the filter unit.
Embodiments of the invention also relate to an electronic device comprising a filter as described above or a filter unit as described above.
Drawings
These and other features and advantages of the various embodiments of the disclosed invention will be better understood from the following description taken in conjunction with the accompanying drawings, in which like reference characters designate like parts throughout the several views, and wherein:
fig. 1 is an equivalent circuit diagram of a prior art resonator;
fig. 2 is a schematic diagram of a filter unit according to an exemplary embodiment of the invention;
FIG. 3 is an impedance plot, wherein the thin line is the impedance plot of the individual resonators in FIG. 1, and the thick line is the impedance plot of the filter unit in FIG. 2;
fig. 4 is a schematic diagram of a filter unit according to an exemplary embodiment of the invention;
fig. 5 is a schematic diagram of a filter unit according to an exemplary embodiment of the invention;
FIG. 6 is an impedance plot, wherein the thin line is the impedance plot of the individual resonators of FIG. 1 and the thick line is the impedance plot of the filter unit of FIG. 4;
FIG. 7 is a schematic diagram of a filter according to an exemplary embodiment of the invention;
FIG. 8 is a schematic diagram of a filter according to an exemplary embodiment of the invention;
FIG. 9 is a schematic diagram of a filter according to an exemplary embodiment of the invention;
FIG. 10 is a schematic diagram of a filter according to an exemplary embodiment of the invention;
FIG. 11 is a simulation result of the performance of the filter of FIG. 7;
FIG. 12 is a schematic diagram of an exemplary implementation of the filter unit of FIG. 2;
fig. 13 shows schematically a packaging of a filter unit according to the invention;
FIG. 14 is a schematic diagram illustrating the effect of gain variation of an active module on an impedance curve;
fig. 15 is a schematic diagram illustrating a control module of the abatement module according to one embodiment of the invention.
Detailed Description
The technical scheme of the invention is further specifically described below through examples and with reference to the accompanying drawings. In the specification, the same or similar reference numerals denote the same or similar components. The following description of embodiments of the present invention with reference to the accompanying drawings is intended to illustrate the general inventive concept and should not be taken as limiting the invention.
The invention proposes a filter unit comprising: a first resonator; a cross inversion module; and a abatement module comprising an abatement electrical device, wherein: the crossed inverting module is connected with the first resonator in parallel; and the electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance of the first resonator.
The filter unit according to the invention is exemplarily described below with reference to the accompanying drawings.
Fig. 1 is an equivalent circuit diagram of a resonator in the prior art. Fig. 1 is an equivalent MBVD model of a resonator, with resistance being the loss term, wherein: the resonance of the series inductance Lm and the series capacitance Cm is the series resonance frequency Fs; the series inductance, series capacitance, and parallel capacitance (i.e., static capacitance) Co produce a parallel resonance Fp, where Fp and Fs are related by fp=fs, sqrt (1+cm/Co), so the larger the parallel capacitance Co, the smaller the Fp-Fs, and the smaller the parallel capacitance Co, the larger the Fp-Fs. In filter design, the bandwidth BW of the filter is generally proportional to 2 x (Fp-Fs). The greater the Fp-Fs, the wider the filter bandwidth that can be achieved.
Fig. 2 is a schematic diagram of a filter unit according to an exemplary embodiment of the present invention. In fig. 2, the two ends of the resonator R are connected in parallel with a transistor cross-coupling structure, which is connected in parallel with a capacitor C1. The capacitance C1 here serves to subtract the static capacitance Co of the resonator R. When the static capacitance Co is partially eliminated, the static capacitance Co becomes small, so that the bandwidth of the filter can be greatly expanded. In the embodiment of fig. 2, the capacitor C1 serves as an electrical device for abatement.
In the present invention, the transistors in the transistor cross-coupling structure shown in the drawings are NPN type, but the transistors may be PNP type based on the difference of external power sources. The invention is not limited in terms of the type of transistor.
The transistor cross-coupling structure is a cross-inversion module. The circuit structure which can perform both the inversion function and the cross function can be used in the present invention. In other words, in the present invention, the transistor cross-coupling structure is one embodiment of the cross-inversion module of the present invention.
The filter unit operates and requires an external circuit structure. Fig. 12 is a schematic diagram of an exemplary implementation of the filter unit in fig. 2. However, in the filter shown in fig. 7 to 11, the external circuit structure of the filter unit shown in fig. 12 is not shown.
In the present invention, an FBAR resonator is taken as an example of the resonator. As will be appreciated by those skilled in the art, the resonator in the present invention may also be other types of piezoelectric resonators.
Fig. 3 is an impedance graph in which thin lines are impedance curves of the individual resonators in fig. 1 and thick lines are impedance curves of the filter unit in fig. 2. As can be seen from fig. 3, the difference between Fp and Fs increases significantly, so that higher bandwidths can be achieved when using this unit to design the filter.
Fig. 11 is a simulation result of the performance of the filter of fig. 7, and the filter of fig. 7 uses the filter unit of fig. 2. As shown in fig. 11, a high bandwidth filter of 2.4-2.8GHz is implemented using a common FBAR resonator. It is apparent that the coupling coefficient of the filter is significantly improved and the bandwidth of the filter is extended.
The following illustrates why the circuit configuration in fig. 2 can expand the bandwidth of the filter. Referring to fig. 2, from the operating principle of the transistor, i=gm (-V1-V2) and from the impedance and current relationship across the capacitor C1, i=2v2×jωc can be found. From these two formulas one can get: the impedance of the V1 end is Z= -1/gm-1/2j omega C, wherein the real part is negative resistance, the imaginary part is negative capacitance, the negative resistance of the real part can counteract the loss in the circuit, so that the loss can be reduced, the insertion loss is improved, the static capacitance of the resonator can be reduced by the negative capacitance of the imaginary part, the bandwidth can be expanded, and the high-bandwidth filter can be realized.
As can be appreciated by those skilled in the art, it is also within the scope of the present invention to utilize negative resistance to improve the insertion loss of the filter.
A control module may also be added to the filter unit for controlling the electrical parameters of the electrical abatement device and/or for disconnecting the electrical abatement device from parallel connection with the cross-inversion module.
More specifically, the control module includes a switching device for controlling the disconnection of the electrical device for abatement in parallel with the cross-inverting module, and/or includes at least one electrical parameter adjustment branch connected in parallel with the electrical device for abatement, the electrical parameter adjustment branch having a switching device for controlling the electrical parameter adjustment branch to be disconnected and connected.
Fig. 15 is a schematic diagram illustrating a control module of the abatement module according to one embodiment of the invention. As shown in fig. 15, two electric parameter adjustment branches are provided, and each branch is provided with parallel capacitors C21 and C22 for adjustment and a transistor as a switch. In the two adjusting branches, the parallel capacitors for adjustment can have the same capacitance value or different capacitance values. Although two electrical parameter adjustment branches are shown in fig. 15, only one branch may be provided, or more branches may be provided. By selecting the capacitance value of the parallel adjustment capacitor and the number of branches connected in parallel to the capacitor C1 as the reduction electric device, the electric parameters of the adjustment electric device connected in parallel to the cross inversion module can be selected or adjusted, and for example, in fig. 15, the final capacitance value thereof can be adjusted. In the example shown in fig. 15, the electrical device for subtraction is a capacitor, and the electrical parameter adjustment circuit is a capacitive circuit.
Based on fig. 15, the control module of the abatement module may include at least one electrical parameter adjustment branch in parallel with the abatement electrical device, the electrical parameter adjustment branch for adjusting an electrical parameter of the electrical device for adjustment.
In addition, although not shown, a switch may be provided on the circuit where the abatement electrical device is located to control whether the abatement module is used to abate the static capacitance.
Fig. 4 is a schematic diagram of a filter unit according to an exemplary embodiment of the invention; fig. 6 is an impedance graph in which thin lines are impedance curves of the individual resonators in fig. 1 and thick lines are impedance curves of the filter unit in fig. 10. As shown in fig. 4, the reduction electric device is constituted by a parallel structure of a capacitor C1 and a resonator R1. As shown in fig. 6, the difference between frequencies Fp and Fs increases significantly, so that a higher bandwidth can be achieved when the filter is designed using this unit.
Fig. 5 is a schematic diagram of inductive coupling according to an exemplary embodiment of the present invention, wherein the subtractive electrical device is formed by a series arrangement of a capacitor C1 and a resonator R1.
Fig. 7 is a schematic diagram of a filter according to an exemplary embodiment of the present invention, wherein the filter unit exemplary employs the embodiment of fig. 2. Reasonable input-output matching and ground inductance can be included in the diagram.
Fig. 8 is a schematic diagram of a filter according to an exemplary embodiment of the invention, wherein the present filter unit is used on the serial branch of the filter and not on the parallel branch.
Fig. 9 is a schematic diagram of a filter according to an exemplary embodiment of the invention, wherein only one resonator comprises a filter unit of the invention.
Fig. 10 is a schematic diagram of a filter according to an exemplary embodiment of the invention, wherein the filter unit of the invention is not used on the serial branches of the filter, but only on the parallel branches.
Fig. 13 shows schematically a packaging diagram of a filter unit according to the invention. Fig. 13 shows a connection form between an active module and a passive module, where an active die is an active circuit and a module, and the passive die includes components such as a resonator, an inductor, and a capacitor, where the inductor and the capacitor may be on the same die as the resonator, or may be implemented as another single die or on a package. The capacitor, resonator, etc. as the electrical device for reduction may be provided in the active structure based on actual needs. The control module shown in fig. 15 may be provided in an active structure.
Fig. 14 illustrates a schematic diagram showing the effect of gain variation of an active module on an impedance curve. When the gains of the active modules, for example, the gains of the transistors are 5, 10, and 15dB, respectively, the corresponding Fp impedance (Rp) is from small to large, and the larger Rp is, the lower the passband insertion loss of the filter is in design, the larger the out-of-band rejection is, but the larger the gain of the corresponding active structure is, the larger the power consumption is.
Based on the above, the present invention also proposes a method for reducing the static capacitance of a resonator, comprising:
step 1: selecting a cross inversion module and a reduction module, wherein the reduction module comprises a reduction electrical device;
step 2: connecting the resonator in parallel with the cross-inversion module and connecting the electrical abatement device in parallel with the cross-inversion module; and
step 3: and utilizing the electric device for reducing to reduce the static capacitance of the resonator.
Based on the above, the present invention also provides a method for reducing static capacitance of a resonator, comprising the steps of: the static capacitance is subtracted by a subtraction module which is connected in inverse parallel with the resonator in a crossing way and comprises an electrical subtraction device.
Optionally, in the above method, the step of "using a subtraction module to subtract the static capacitance" includes the steps of: a cross-inversion module is provided, such that the resonator is in parallel with the cross-inversion module and the abatement electrical device is in parallel with the cross-inversion module.
Further, at least a portion of the abatement module and the resonator are part of a passive structure, and the cross inversion module is part of an active structure; and the step of reducing the static capacitance by using a reducing module further comprises the steps of: the gain value of the cross inversion module is selected to cooperate with the subtraction module to subtract the static capacitance of the resonator. Further, the cross-inversion module is a transistor cross-coupling structure.
Optionally, the step of "reducing the static capacitance with a reducing module" further comprises the steps of: and controlling the electrical parameters of the electrical device for reduction and/or disconnecting the electrical device for reduction from the cross inversion module in parallel.
Optionally, the electrical device for reducing is a capacitor, or a series-parallel structure of the capacitor and the second resonator.
The embodiment of the invention also relates to a device for reducing the static capacitance of a resonator, which comprises: a cross inversion module; and a abatement module comprising an abatement electrical device, wherein: the crossed inverting module is connected with the resonator in parallel; and the electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance.
Embodiments of the invention also relate to an electronic device comprising a filter unit or a filter as described above or means for reducing the static capacitance of a resonator. It should be noted that, the electronic devices herein include, but are not limited to, intermediate products such as a radio frequency front end, a filtering and amplifying module, and end products such as a mobile phone, a WIFI, and an unmanned aerial vehicle.
Although embodiments of the present invention have been shown and described, it would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims (23)

1. A filter unit comprising:
a resonator having a static capacitance;
the cross inversion module is used for performing an inversion function and a cross function; and
a abatement module comprising an abatement electrical device comprising at least one of a resonator and a capacitance,
wherein:
the crossed inverting module is connected with the resonator in parallel; and is also provided with
The electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance.
2. The filter unit of claim 1, wherein:
the cross inversion module is a transistor cross coupling structure.
3. The filter unit of claim 1, wherein:
the resonator is an FBAR resonator.
4. The filter unit of claim 1, wherein:
the abatement module further comprises a control module for controlling an electrical parameter of the abatement electrical device and/or for disconnecting the parallel connection of the abatement electrical device and the cross-inversion module.
5. The filter unit of claim 4, wherein:
the control module comprises a switching device for controlling the disconnection of the electrical device for abatement and the parallel connection of the cross-inverting module, and/or
The control module comprises at least one electric parameter adjusting branch connected with the electric device for reduction in parallel, and the electric parameter adjusting branch is used for adjusting the electric parameter of the electric device for reduction.
6. The filter unit according to any one of claims 1-5, wherein:
the electrical device for reducing is a capacitor.
7. The filter unit according to any one of claims 1-5, wherein:
the resonator is a first resonator; and is also provided with
The electric device for reduction is a series structure formed by a capacitor and a second resonator.
8. The filter unit according to any one of claims 1-5, wherein:
the resonator is a first resonator; and is also provided with
The electric device for reduction is a parallel structure formed by a capacitor and a second resonator.
9. The filter unit according to any one of claims 1-5, wherein:
the filter unit is divided into an active module and a passive module, wherein the passive module includes at least a portion of the abatement module and the resonator, and the active module includes the cross-inversion module.
10. A method of reducing the static capacitance of a resonator, comprising the steps of:
the static capacitance is subtracted by a subtraction module, the subtraction module is connected with the resonator in a crossed anti-phase parallel connection mode and comprises an electrical subtraction device, and the electrical subtraction device comprises at least one device of the resonator and the capacitance.
11. The method according to claim 10, wherein:
the step of reducing the static capacitance by using a reducing module comprises the following steps: providing a cross-over inversion module, connecting the resonator in parallel with the cross-over inversion module and connecting the electrical abatement device in parallel with the cross-over inversion module, the cross-over inversion module being configured to perform both an inversion and a cross-over function.
12. The method according to claim 11, wherein:
at least a part of the abatement module and the resonator are components of a passive structure, and the cross inversion module is a component of an active structure;
the step of reducing the static capacitance by using a reducing module further comprises the steps of: the gain value of the cross inversion module is selected to cooperate with the subtraction module to subtract the static capacitance of the resonator.
13. The method according to claim 12, wherein:
the cross inversion module is a transistor cross coupling structure.
14. The method of any one of claims 11-13, wherein:
the step of reducing the static capacitance by using a reducing module further comprises the steps of: and controlling the electrical parameters of the electrical device for reduction and/or disconnecting the electrical device for reduction from the cross inversion module in parallel.
15. The method of any one of claims 10-13, wherein:
the resonator is a first resonator; and is also provided with
The electric device for reducing is a capacitor, or a series structure or a parallel structure of the capacitor and the second resonator.
16. An apparatus for reducing static capacitance of a resonator, comprising:
a cross inversion module; and
the reduction module comprises an electrical device for reduction,
wherein:
the crossed inverting module is connected with the resonator in parallel; and is also provided with
The electric device for reducing is connected with the cross reverse phase module in parallel and is used for reducing the static capacitance.
17. The apparatus of claim 16, wherein:
the cross inversion module is a transistor cross coupling structure.
18. The apparatus of claim 16, wherein:
the abatement module further comprises a control module for controlling an electrical parameter of the abatement electrical device and/or for disconnecting the parallel connection of the abatement electrical device and the cross-inversion module.
19. The apparatus of claim 18, wherein:
the control module comprises a switching device for controlling the disconnection of the electrical device for abatement and the parallel connection of the cross-inverting module, and/or
The control module comprises at least one electric parameter adjusting branch connected with the electric device for reduction in parallel, and the electric parameter adjusting branch is used for adjusting the electric parameter of the electric device for reduction.
20. The apparatus of claim 18, wherein:
the resonator is a first resonator; and is also provided with
The electric device for reduction is a capacitor, or a series structure or a parallel structure formed by the capacitor and the second resonator.
21. The apparatus of claim 19, wherein:
the electric device for reduction is a capacitor;
the electric parameter adjusting branch circuit is a capacitive branch circuit.
22. A filter comprising a filter unit according to any of claims 1-9.
23. An electronic device comprising a filter according to claim 22 or a filter unit according to any of claims 1-9 or a means of reducing the static capacitance of a resonator according to any of claims 16-21.
CN201811551303.7A 2018-12-18 2018-12-18 Method and device for reducing static capacitance of resonator Active CN111342791B (en)

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CN1494210A (en) * 2002-09-30 2004-05-05 ��ʿͨý�岿Ʒ��ʽ���� Surface acoustic wave filter and surface acoustic wave duplexer with the same
CN101305440A (en) * 2005-10-05 2008-11-12 艾利森电话股份有限公司 Oscillatory circuit of tunable filter with minimize phase noise
CN108449067A (en) * 2017-09-11 2018-08-24 京信通信技术(广州)有限公司 Bulk accoustic wave filter

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Publication number Priority date Publication date Assignee Title
US8576024B2 (en) * 2010-02-11 2013-11-05 Hollinworth Fund, L.L.C. Electro-acoustic filter
FR3026582A1 (en) * 2014-09-29 2016-04-01 Commissariat Energie Atomique CIRCUIT RESONANT TO VARIABLE FREQUENCY AND IMPEDANCE

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1383611A (en) * 2000-06-16 2002-12-04 皇家菲利浦电子有限公司 Bulk accoustic wave filter
CN1494210A (en) * 2002-09-30 2004-05-05 ��ʿͨý�岿Ʒ��ʽ���� Surface acoustic wave filter and surface acoustic wave duplexer with the same
CN101305440A (en) * 2005-10-05 2008-11-12 艾利森电话股份有限公司 Oscillatory circuit of tunable filter with minimize phase noise
CN108449067A (en) * 2017-09-11 2018-08-24 京信通信技术(广州)有限公司 Bulk accoustic wave filter

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