CN111336107A - Screw vacuum pump rotor molded lines and rotor with labyrinth seal - Google Patents
Screw vacuum pump rotor molded lines and rotor with labyrinth seal Download PDFInfo
- Publication number
- CN111336107A CN111336107A CN202010105218.9A CN202010105218A CN111336107A CN 111336107 A CN111336107 A CN 111336107A CN 202010105218 A CN202010105218 A CN 202010105218A CN 111336107 A CN111336107 A CN 111336107A
- Authority
- CN
- China
- Prior art keywords
- segment
- labyrinth seal
- spiral
- vacuum pump
- archimedes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A screw vacuum pump rotor profile and a rotor with labyrinth seals are provided, wherein the profile is a point meshing cycloid segment A which is connected in sequence from the head1A2Arc segment A of tooth root2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1Composition is carried out; the labyrinth seal correction section A5A1The base line segment is a circular arc, a plurality of rectangular grooves with the width of a and the depth of h are equidistantly arranged on the base line segment along the circumferential direction according to the angle α, and a plurality of spiral small channels are formed by the rectangular grooves after the rectangular grooves are stretched along with the end face molded lineThe land, thereby forming a labyrinth seal section at the tip leakage path. The invention has the advantages of high ultimate vacuum degree, low power loss, high energy efficiency and the like, and the rotor can greatly reduce the integral leakage of the screw vacuum pump.
Description
Technical Field
The invention belongs to the field of mechanical engineering, and particularly relates to a screw vacuum pump rotor profile with labyrinth seals and a rotor.
Background
In recent years, the research and development of vacuum pumps have been driven by the demand for vacuum in the semiconductor industry as well as in the field of micro-electro-mechanical systems. Dry vacuum pumps have become an important component of vacuum systems due to their oil-free performance characteristics. The screw vacuum pump is a non-contact dry vacuum pump, is a positive displacement vacuum pump with wide application prospect at the end of the 20 th century, and has the advantages of simple and compact structure, wide pumping speed range, environmental friendliness, small pressure pulsation and the like, so that the screw vacuum pump gradually becomes vacuum equipment with large market demand. The screw vacuum pump consists of a pair of non-contact male and female rotors, and gas can be compressed along with the rotation of the rotors and then discharged out of a working cavity in the working process. Since the sealing of the working chamber is achieved by a slight gap, the leakage of gas through the gap is a major cause of wear in the screw vacuum pump. And the leakage can greatly influence the ultimate vacuum degree which can be reached by the vacuum pump, so how to reduce the leakage of the screw vacuum pump is a popular research direction at present.
Disclosure of Invention
The invention aims to solve the problem of insufficient sealing performance of the screw vacuum pump in the prior art, and provides a rotor profile and a rotor of the screw vacuum pump with labyrinth seal.
In order to achieve the purpose, the invention has the following technical scheme:
a screw vacuum pump rotor profile with labyrinth seal is a point-meshing cycloid segment A sequentially connected from the head1A2Arc segment A of tooth root2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1Composition is carried out; the labyrinth seal correction section A5A1The base line segment is an arc, a plurality of rectangular grooves with the width of a and the depth of h are equidistantly arranged on the base line segment along the circumferential direction according to an angle α, and the rectangular grooves form a plurality of spiral small channels after the end face molded lines are stretched, so that a labyrinth sealing segment is formed in the tooth top leakage channel.
Tooth root arc section A2A3Has a circular arc radius of R1Labyrinth seal correction segment A5A1Has a circular arc radius of R2；
Then, the center distance A between the male and female rotors is:
the point meshing cycloid segment A1A2The coordinate equation of (a) is:
wherein t is a point-meshing cycloid segment A1A2β0Is the angle corresponding to t at the end point of the point meshing cycloid segment.
The tooth root circular arc section A2A3The coordinate equation of (a) is:
wherein θ is an angle parameter selected from the line segments, β1Is the ending angle of the tooth root circular arc section.
The labyrinth seal correction section A5A1The coordinate equation of the base line segment is:
wherein θ is an angle parameter selected from the line segments, β3The starting angle of the labyrinth seal correction segment.
The Archimedes-like spiral segment A3A4The coordinate equation of (a) is:
where theta is the angle parameter selected by the line segment, f (theta) is the function of angle in the Archimedes spiral, a and b are respectively given constants β1Starting angle of Archimedes-like spiral segment, β2Is the termination angle of the archimedes-like spiral segment.
The conjugate envelope segment A of the Archimedes-like spiral4A5The coordinate equation of (a) is:
wherein, theta is an angle parameter selected by the line segment,
as position parameter of the profile, β2Starting angle of conjugate envelope segment of Archimedes-like spiral, β3Is the conjugate envelope segment termination angle of the archimedean-like spiral.
The tooth root arc section A2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1The radian of the formed molded line is 2 pi, and the angle parameter theta selected by each line segment is continuous.
The invention also provides a rotor which is provided with the screw vacuum pump rotor profile with the labyrinth seal.
Compared with the prior art, the invention has the following beneficial effects: the tooth top arc section of the rotor profile of the screw vacuum pump is designed to be a labyrinth seal correction section, grooves are arranged on the tooth top arc section of the end face profile by utilizing the characteristic that the end face profile of the screw vacuum pump sweeps along a spiral line, and then the labyrinth seal mode is realized on a leakage channel of the tooth top arc through the sweeping surface, so that the leakage flow of the tooth top leakage channel is obviously reduced. And because the tooth top leakage can reach more than 60 percent of the whole leakage of the screw vacuum pump, the whole leakage of the screw vacuum pump can be greatly reduced. Compared with other molded lines, the molded line of the rotor of the screw vacuum pump with the labyrinth seal has the advantages of high ultimate vacuum degree, low power consumption loss, high energy efficiency and the like.
The rotor provided by the invention can effectively reduce the whole leakage of the screw vacuum pump and improve the performance of the screw vacuum pump.
Drawings
FIG. 1 is a schematic overall view of a rotor profile of a screw vacuum pump according to the invention;
FIG. 2 is a schematic three-dimensional structure of a rotor of the present invention;
FIG. 3 is a schematic view of the labyrinth seal formed by the tooth tip leakage path of the rotor of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Referring to fig. 1, the screw vacuum pump rotor profile with labyrinth seal provided by the invention is a point meshing pendulum line segment A sequentially connected from the head to the tail1A2Arc segment A of tooth root2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1And (4) forming. Labyrinth seal correction segment A5A1The base line segment is an arc, a plurality of rectangular grooves with the width of a and the depth of h are equidistantly arranged on the base line segment along the circumferential direction according to an angle α, and the rectangular grooves form a plurality of spiral small channels after the end face molded lines are stretched, so that a labyrinth sealing segment is formed in the tooth top leakage channel.
Tooth root arc section A2A3Has a circular arc radius of R1Labyrinth seal correction segment A5A1Has a circular arc radius of R2；
Then, the center distance A between the male and female rotors is:
point-meshing cycloid segment A1A2The coordinate equation of (a) is:
wherein t is a point-meshing cycloid segment A1A2β0Is the angle corresponding to t at the end point of the point meshing cycloid segment.
The tooth root circular arc section A2A3The coordinate equation of (a) is:
wherein θ is an angle parameter selected from the line segments, β1Is the ending angle of the tooth root circular arc section.
Archimedes-like spiral segment A3A4The coordinate equation of (a) is:
where theta is the angle parameter selected by the line segment, f (theta) is the function of angle in the Archimedes spiral, a and b are respectively given constants β1Starting angle of Archimedes-like spiral segment, β2Is the termination angle of the archimedes-like spiral segment.
Conjugate envelope segment A of Archimedes-like spiral4A5The coordinate equation of (a) is:
wherein, theta is an angle parameter selected by the line segment,
as position parameter of the profile, β2Starting angle of conjugate envelope segment of Archimedes-like spiral, β3Is the conjugate envelope segment termination angle of the archimedean-like spiral.
Labyrinth seal correction segment A5A1The coordinate equation of the base line segment is:
wherein θ is an angle parameter selected from the line segments, β3The starting angle of the labyrinth seal correction segment.
On the basis of the coordinate equation, a plurality of rectangular grooves with the width of a and the depth of h are equidistantly arranged along the circumferential direction according to the angle α, and a plurality of spiral small channels are formed by the rectangular grooves after the end face molded lines are stretched to form a labyrinth seal section.
Due to the tooth root arc section A2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral1A5And labyrinth seal correction section A5A1The radian of the formed molded line is 2 pi, so that the angle parameter theta selected by each line segment is continuous, and the point-meshing pendulum line segment A1A2The angle parameter t is selected separately.
Referring to fig. 2 and 3, the screw vacuum pump is a non-contact vacuum pump, and the performance of the screw vacuum pump is seriously affected by leakage caused by the existence of a gap on a contact line. And because the addendum arc section exists in the end surface profile design of the screw vacuum pump, and the addendum arc section has a large occupied angle and the radius of the addendum arc, the addendum leakage accounts for a large part of the whole leakage of the screw vacuum pump. In the prior art, only a gap is required to be started for reducing the leakage of the vacuum pump, and the height of the leakage gap is reduced to achieve the purpose of reducing the leakage flow rate by improving the machining precision. The invention selects a new idea, utilizes the characteristic that the screw vacuum pump obtains the scanning surface of the end face molded line along the spiral line, arranges the groove on the tooth top arc section of the end face molded line, and then realizes the labyrinth seal form on the leakage channel of the tooth top arc through the scanning surface, thereby providing reference for future research.
Compared with other molded lines, the molded line of the rotor of the screw vacuum pump with the labyrinth seal has the advantages of high ultimate vacuum degree, low power consumption loss, high energy efficiency and the like, and the designed rotor can greatly reduce the whole leakage of the screw vacuum pump.
The above description is only a preferred embodiment of the present invention and is not intended to limit the technical solution of the present invention, and it should be understood by those skilled in the art that the technical solution can be modified and replaced by a plurality of simple modifications and replacements without departing from the spirit and principle of the present invention, and the modifications and replacements also fall within the protection scope defined by the appended claims.
Claims (9)
1. The utility model provides a screw vacuum pump rotor molded lines with labyrinth seal which characterized in that: point-meshing cycloid segments A sequentially connected from head to tail1A2Arc segment A of tooth root2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1Composition is carried out; the labyrinth seal correction section A5A1The base line segment is an arc, a plurality of rectangular grooves with the width of a and the depth of h are equidistantly arranged on the base line segment along the circumferential direction according to an angle α, and the rectangular grooves form a plurality of spiral small channels after the end face molded lines are stretched, so that a labyrinth sealing segment is formed in the tooth top leakage channel.
2. A screw vacuum pump rotor profile with labyrinth according to claim 1, characterised in that the tooth root circle segment A2A3Has a circular arc radius of R1Labyrinth seal correction segment A5A1Has a circular arc radius of R2The center distance A of the male and female rotors is as follows:
3. a screw vacuum pump rotor profile with labyrinth seal according to claim 2, characterized in that:
the point meshing cycloid segment A1A2The coordinate equation of (a) is:
wherein t is a point-meshing cycloid segment A1A2β0Is the angle corresponding to t at the end point of the point meshing cycloid segment.
4. A screw vacuum pump rotor profile with labyrinth seal according to claim 2, characterized in that:
the tooth root circular arc section A2A3The coordinate equation of (a) is:
wherein θ is an angle parameter selected from the line segments, β1Is the ending angle of the tooth root circular arc section.
5. A screw vacuum pump rotor profile with labyrinth seal according to claim 2, characterized in that:
the labyrinth seal correction section A5A1The coordinate equation of the base line segment is:
wherein θ is an angle parameter selected from the line segments, β3The starting angle of the labyrinth seal correction segment.
6. A screw vacuum pump rotor profile with labyrinth seal according to claim 1, characterized in that:
the Archimedes-like spiral segment A3A4The coordinate equation of (a) is:
where theta is the angle parameter selected by the line segment, f (theta) is the function of angle in the Archimedes spiral, a and b are respectively given constants β1Starting angle of Archimedes-like spiral segment, β2Is the termination angle of the archimedes-like spiral segment.
7. A screw vacuum pump rotor profile with labyrinth seal according to claim 1, characterized in that:
the conjugate envelope segment A of the Archimedes-like spiral4A5The coordinate equation of (a) is:
wherein, theta is an angle parameter selected by the line segment,
as position parameter of the profile, β2Starting angle of conjugate envelope segment of Archimedes-like spiral, β3Is the conjugate envelope segment termination angle of the archimedean-like spiral.
8. A screw vacuum pump rotor profile with labyrinth seal according to claim 1, characterized in that:
the tooth root arc section A2A3Archimedes-like spiral segment A3A4Conjugate envelope segment A of an Archimedes-like spiral4A5And labyrinth seal correction section A5A1The radian of the formed molded line is 2 pi, and the angle parameter theta selected by each line segment is continuous.
9. A rotor, characterized by: screw vacuum pump rotor profile with labyrinth seal according to any of the preceding claims 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010105218.9A CN111336107A (en) | 2020-02-20 | 2020-02-20 | Screw vacuum pump rotor molded lines and rotor with labyrinth seal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010105218.9A CN111336107A (en) | 2020-02-20 | 2020-02-20 | Screw vacuum pump rotor molded lines and rotor with labyrinth seal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111336107A true CN111336107A (en) | 2020-06-26 |
Family
ID=71181690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010105218.9A Pending CN111336107A (en) | 2020-02-20 | 2020-02-20 | Screw vacuum pump rotor molded lines and rotor with labyrinth seal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111336107A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114483585A (en) * | 2022-03-01 | 2022-05-13 | 德斯兰压缩机(上海)有限公司 | Screw rotor and air compressor using same |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1093851A1 (en) * | 1983-05-24 | 1984-05-23 | Предприятие П/Я А-1270 | Labyrinth screw seal |
| CN1811185A (en) * | 2006-02-21 | 2006-08-02 | 大连冷冻机股份有限公司 | Screw rotor tooth form for double screw compressor |
| CN202611771U (en) * | 2012-05-28 | 2012-12-19 | 上海齐耀膨胀机有限公司 | Double screw rod expander rotor mold line |
| CN102979731A (en) * | 2012-12-03 | 2013-03-20 | 西安交通大学 | Rotor profile of double-screw vacuum pump, and designing method of rotor profile |
| CN103603805A (en) * | 2013-11-21 | 2014-02-26 | 南京压缩机股份有限公司 | Rotor profile of double-screw compressor |
| CN105201827A (en) * | 2015-10-19 | 2015-12-30 | 西安交通大学 | Twin-screw vacuum pump rotor profile |
-
2020
- 2020-02-20 CN CN202010105218.9A patent/CN111336107A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1093851A1 (en) * | 1983-05-24 | 1984-05-23 | Предприятие П/Я А-1270 | Labyrinth screw seal |
| CN1811185A (en) * | 2006-02-21 | 2006-08-02 | 大连冷冻机股份有限公司 | Screw rotor tooth form for double screw compressor |
| CN202611771U (en) * | 2012-05-28 | 2012-12-19 | 上海齐耀膨胀机有限公司 | Double screw rod expander rotor mold line |
| CN102979731A (en) * | 2012-12-03 | 2013-03-20 | 西安交通大学 | Rotor profile of double-screw vacuum pump, and designing method of rotor profile |
| CN103603805A (en) * | 2013-11-21 | 2014-02-26 | 南京压缩机股份有限公司 | Rotor profile of double-screw compressor |
| CN105201827A (en) * | 2015-10-19 | 2015-12-30 | 西安交通大学 | Twin-screw vacuum pump rotor profile |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114483585A (en) * | 2022-03-01 | 2022-05-13 | 德斯兰压缩机(上海)有限公司 | Screw rotor and air compressor using same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2622787A (en) | Helical rotary engine | |
| CN108930650B (en) | Double-end claw type pump rotor and molded lines thereof | |
| CN205388015U (en) | Twin screw vacuum pump's complete glossy screw rotor and vacuum pump thereof | |
| CN112555154B (en) | Full-smooth self-meshing dry screw vacuum pump and rotor thereof | |
| CN105822548B (en) | A kind of complete smooth claw rotor | |
| CN105240277A (en) | Fully-smooth screw rotor of twin-screw vacuum pump | |
| CN108757452B (en) | Tooth type of high-pressure ratio double-screw compressor rotor | |
| CN104929942A (en) | Fully-meshed claw type rotor profile | |
| CN110762011B (en) | Claw type pump rotor and claw type pump | |
| CN106762654B (en) | Two-vane rotor assembly of roots vacuum pump | |
| CN111336107A (en) | Screw vacuum pump rotor molded lines and rotor with labyrinth seal | |
| CN110645172B (en) | Screw vacuum pump rotor and screw vacuum pump | |
| CN206487619U (en) | A kind of complete smooth straight pawl claw rotor | |
| CN110285055B (en) | Rotor profile of double-screw vacuum pump | |
| CN106948863B (en) | Full-smooth asymmetric double-claw rotor | |
| CN110878754A (en) | Two-blade rotor profile of Roots vacuum pump | |
| CN202611771U (en) | Double screw rod expander rotor mold line | |
| CN216691451U (en) | Tooth profile curve of pair of male and female rotors, male and female rotors and screw compressor | |
| CN110685906B (en) | Roots pump rotor and roots pump | |
| CN211874726U (en) | Floating side plate for counteracting partial radial force by trapped oil force | |
| CN102678181B (en) | Rotor molded line for double-screw expansion machine | |
| CN210218091U (en) | Gear rotor of gear pump | |
| CN203335398U (en) | High-efficiency screw compressor | |
| CN202187926U (en) | Composite line rotor of three-blade roots blower | |
| CN111271284A (en) | Three-blade rotor assembly of roots vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200626 |