CN111323054A - Triboelectric motion sensor and measuring method - Google Patents
Triboelectric motion sensor and measuring method Download PDFInfo
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- CN111323054A CN111323054A CN202010153020.8A CN202010153020A CN111323054A CN 111323054 A CN111323054 A CN 111323054A CN 202010153020 A CN202010153020 A CN 202010153020A CN 111323054 A CN111323054 A CN 111323054A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
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Abstract
A triboelectric motion sensor and a measuring method. The triboelectric motion sensor comprises: a groove-shaped guide rail (1); the stator structure (2) comprises a substrate (21) and a metal electrode layer (22) from bottom to top, the substrate (21) is arranged on the inner bottom surface of the groove-shaped guide rail (1), the metal electrode layer (22) comprises N groups of metal electrode pairs, each group of metal electrode pairs consists of two interdigital metal electrodes, the N groups of metal electrode pairs are arranged in a staggered mode along the arrangement direction of the metal electrode pairs, and N is more than or equal to 3; and the sliding block structure (3) comprises a convex film (31) and a sliding plate (32) for fixing the convex film (31), wherein the sliding plate (32) moves relative to the groove-shaped guide rail (1) so that the convex film (31) and the metal electrode layer (22) generate friction to generate an alternating current signal between two interdigital metal electrodes of each group of metal electrode pairs. By detecting the alternating current signals output by the multiple groups of metal electrode pairs, the displacement, speed, acceleration and other parameters of the sensor can be measured simultaneously, and the sensor has higher resolution.
Description
Technical Field
The disclosure relates to the technical field of motion sensors, in particular to a triboelectric motion sensor and a measuring method.
Background
With the development of electronic automation technology, more and more attention is paid to developing a motion sensor with a simple structure and a new principle. The traditional motion sensor has the disadvantages of complex manufacturing process and structural composition and high cost. The triboelectric sensor enlarges the range of material selection, simplifies the sensor structure and reduces the cost. In the related art, the triboelectric sensor adopts rigid contact, the abrasion loss is not easy to control, the service life is limited, and the resolution of the sensor is low.
Disclosure of Invention
Technical problem to be solved
The present disclosure provides a triboelectric motion sensor and a measurement method, which can measure parameters such as displacement, speed, and moving direction at the same time, and have higher resolution.
(II) technical scheme
The present disclosure provides a triboelectric motion sensor comprising: a groove-shaped guide rail 1; the stator structure 2 comprises a substrate 21 and a metal electrode layer 22 from bottom to top, the substrate 21 is arranged on the inner bottom surface of the groove-shaped guide rail 1, the metal electrode layer 22 comprises N groups of metal electrode pairs, each group of metal electrode pairs consists of two interdigital metal electrodes, the N groups of metal electrode pairs are arranged in a staggered mode along the arrangement direction of the metal electrode pairs, and N is more than or equal to 3; and the sliding block structure 3 comprises a convex film 31 and a sliding plate 32 for fixing the convex film 31, wherein the sliding plate 32 moves relative to the groove-shaped guide rail 1, so that the convex film 31 generates friction with the metal electrode layer 22 to generate an alternating current signal between two interdigital metal electrodes of each group of metal electrode pairs.
Optionally, the two adjacent groups of metal electrode pairs are staggered in the arrangement direction by a distance which is one nth pitch of the interdigitated metal electrodes.
Optionally, the convex film 31 includes first thin films 311 with a periodic convex distribution, and second thin films 312 connecting the first thin films 311, and a distance between two adjacent first thin films 311 is twice of a pitch of the interdigitated metal electrodes.
Optionally, the slide plate 32 is provided with periodically distributed grooves 321, and the first film 311 is embedded in the grooves 321.
Optionally, a slit 11 is provided in the groove-shaped guide rail 1, and an end surface of the sliding plate 32 forms a sliding pair with the slit 11.
Alternatively, the convex film 31 is composed of an electronegative material, the metal electrode layer 22 is composed of an electropositive material, and the substrate 21 is composed of an insulating material.
Optionally, an insulating layer is disposed on the metal electrode layer 22 for protecting the metal electrode layer 22.
Optionally, the material of the convex film 31 is a flexible material.
Alternatively, the movement of the slide plate 32 with respect to the groove-shaped guide rail 1 is a linear movement or a rotational movement.
The present disclosure also provides a method of measuring a triboelectric motion sensor as described above, comprising: collecting an alternating current signal generated between two interdigital metal electrodes of each group of metal electrode pairs, and amplifying the alternating current signal; judging the moving direction of a sliding block structure 3 in the triboelectric motion sensor according to the phase relation among N groups of amplified alternating current signals, wherein N is the number of metal electrode pairs in the triboelectric motion sensor; calculating the displacement of the sliding block structure 3 according to the size relationship between the N groups of amplified alternating current signals and a preset upper limit threshold value and a preset lower limit threshold value; the speed of movement of the slider structure 3 is calculated from the displacement of the slider structure 3 moving within the corresponding time.
(III) advantageous effects
The triboelectric motion sensor and the measurement method provided by the disclosure have the following beneficial effects:
(1) output signals of N groups of metal electrode pairs which are arranged in a staggered mode are staggered by N times of phase, alternating current signals output by the metal electrode pairs are detected, parameters such as displacement, speed and moving direction of the sensor can be measured simultaneously, and the resolution of the sensor is improved;
(2) the convex film is formed by using the flexible material to generate an alternating current signal, so that the friction between the convex film and the metal electrode layer is changed into flexible contact, the durability of the sensor is improved, and the service life of the sensor is prolonged;
(3) the sensor has wider material selection range, simple structure, convenient manufacture and low cost.
Drawings
Fig. 1 schematically illustrates a structural schematic diagram of a triboelectric motion sensor provided by an embodiment of the present disclosure;
FIG. 2 is a schematic diagram illustrating a structure of a metal electrode layer in a triboelectric motion sensor provided by an embodiment of the disclosure;
FIG. 3 schematically illustrates a schematic diagram of a triboelectric motion sensor provided by an embodiment of the disclosure as it moves;
FIG. 4 is a schematic diagram illustrating a shape of a convex membrane contact surface in a triboelectric motion sensor provided by an embodiment of the disclosure;
FIG. 5 is a schematic diagram illustrating a phase distribution of a three-way AC signal in a triboelectric motion sensor provided by an embodiment of the present disclosure;
fig. 6 schematically shows a spectrum of an ac signal output by a triboelectric motion sensor provided by an embodiment of the present disclosure at different moving speeds;
FIG. 7 schematically illustrates a fitted curve of moving speed versus output signal frequency for a triboelectric motion sensor provided by an embodiment of the present disclosure;
FIG. 8 schematically illustrates a measurement schematic diagram of a triboelectric motion sensor provided by an embodiment of the present disclosure;
FIG. 9 is a schematic diagram illustrating a structure of a metal electrode layer in a triboelectric motion sensor according to another embodiment of the disclosure;
FIG. 10A is a diagram schematically illustrating a measured trajectory obtained when a triboelectric motion sensor provided by an embodiment of the present disclosure moves forward in comparison with an actual trajectory;
FIG. 10B is a diagram schematically illustrating a measured trajectory obtained when the triboelectric motion sensor provided by the embodiment of the present disclosure moves backward in comparison with an actual trajectory;
fig. 11 is a graph schematically illustrating the results of a durability test performed on a triboelectric motion sensor provided by an embodiment of the present disclosure.
Description of reference numerals:
the motor stator comprises a 1-groove-shaped guide rail, 11-slits, a 2-stator structure, 21-a substrate, 22-metal electrode layers, 221-A phase metal electrode pairs, 222-B phase metal electrode pairs, 223-C phase metal electrode pairs, a first electrode of 2211-A phase metal electrode pairs, a second electrode of 2212-A phase metal electrode pairs, a first electrode of 2221-B phase metal electrode pairs, a second electrode of 2222-B phase metal electrode pairs, a first electrode of 2231-C phase metal electrode pairs, a second electrode of 2232-C phase metal electrode pairs, a 3-slider structure, a 31-convex film, a 32-sliding plate, 311-first film, 312-second film, 321-grooves, 41- α phase metal electrode pairs, 42- β phase metal electrode pairs, 43-gamma phase metal electrode pairs and 44-circular ring substrate.
Detailed Description
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
Fig. 1 schematically illustrates a structural schematic diagram of a triboelectric motion sensor provided in an embodiment of the present disclosure. Referring to fig. 1, the structure shown in fig. 1 will be described in detail with reference to fig. 2 to 10.
The triboelectric motion sensor (hereinafter referred to simply as a sensor) in the embodiment of the present disclosure includes a groove rail 1, a stator structure 2, and a slider structure 3.
The stator structure 2 comprises a substrate 21 and a metal electrode layer 22 from bottom to top, the substrate 21 being arranged on the inner bottom surface of the slot-shaped guide rail 1 such that the stator structure 2 is located within the slot-shaped guide rail 1. The base 21 is, for example, in close contact with the inner bottom surface of the groove-shaped guide rail 1 to ensure the reliability of the sensor.
The metal electrode layer 22 includes N sets of metal electrode pairs, each set of metal electrode pair is composed of two interdigitated metal electrodes, the N sets of metal electrode pairs are staggered along the arrangement direction, N is greater than or equal to 3, in this embodiment, the metal electrode layer 22 includes three sets of metal electrode pairs (i.e., N is 3) as an example to explain the structure and the working process of the sensor.
Referring to the linear motion sensor shown in fig. 2, in the present embodiment, the three sets of metal electrode pairs are respectively labeled as an a-phase metal electrode pair 221, a B-phase metal electrode pair 222, and a C-phase metal electrode pair 223, each set of metal electrode pairs is formed by two identical interdigitated metal electrodes arranged in opposite directions, and the three sets of metal electrode pairs are arranged side by side in the longitudinal direction and are staggered from each other along the arrangement direction (i.e., the direction in which the interdigitated metal electrodes extend). The two interdigital metal electrodes forming the phase a metal electrode pair 221 are respectively a first electrode 2211 of the phase a metal electrode pair and a second electrode 2212 of the phase a metal electrode pair; the two interdigitated metal electrodes forming the B-phase metal electrode pair 222 are respectively a first electrode 2221 of the B-phase metal electrode pair and a second electrode 2222 of the B-phase metal electrode pair; the two interdigitated metal electrodes forming the C-phase metal electrode pair 223 are a first electrode 2231 of the C-phase metal electrode pair and a second electrode 2232 of the C-phase metal electrode pair, respectively. Each interdigital metal electrode is formed by periodically arranging the same finger electrodes along the extension direction at a pitch of L length, wherein the width of each finger electrode is B, and the height of each finger electrode is H. In this embodiment, the length L of the finger electrode ranges from 6 to 15mm, the width B ranges from 2 to 6mm, the height H ranges from 2 to 10mm, and the gap between two interdigitated metal electrodes in each metal electrode pair ranges from 0.2 to 1.3 mm.
In the embodiment of the disclosure, the staggered distance of two adjacent groups of metal electrode pairs in the arrangement direction is N times of the pitch of the interdigitated metal electrodes, wherein the pitch is the length L of one finger electrode forming the interdigitated metal electrodes. Taking the sensor shown in fig. 2 with N being 3 as an example, the metal electrode pair 222 of the B phase is shifted to the right by one-third pitch and the metal electrode pair 223 of the C phase is shifted to the right by two-thirds pitch, compared to the metal electrode pair 221 of the a phase.
The slider structure 3 comprises a convex film 31 and a slide plate 32 for fixing the convex film 31, and when the slide plate 32 moves relative to the groove-shaped guide rail 1, the convex film 31 and the metal electrode layer 22 generate friction to generate an alternating current signal between two interdigital metal electrodes of each group of metal electrode pairs. The convex film 31 includes first films 311 with a periodic convex distribution, and a second film 312 connecting any two adjacent first films 311, wherein the distance between two adjacent first films 311 is the pitch L of the interdigitated metal electrodes. The slide plate 32 is provided with periodically distributed grooves 321, the first thin film 311 is embedded in the grooves 321, and the second thin film 322 is positioned on the slide plate 32 between two adjacent grooves 321. In this embodiment, the convex film 31 shown in fig. 1 is formed, for example, by embedding a rectangular film edge into the slide plate 32 along the groove 321 of the top surface of the slide plate 32.
The slot 11 is arranged in the groove-shaped guide rail 1, and the end surface of the slide plate 32 forms a sliding pair with the slot 11, so that the slide plate 32 can slide in a reciprocating manner relative to the groove-shaped guide rail 1, and the slide plate 32 can slide in a reciprocating manner relative to the stator structure 2. The convex film 31 is in close contact with the metal electrode layer 22, i.e. the perpendicular distance between the slide plate 32 and the metal electrode layer 22 of the stator structure 2 is smaller than the height of the convex film 31. In this embodiment, for example, a rectangular slit is formed in the middle of the groove-shaped rail 1 to place the sliding plate 32, the thickness of the convex film 31 is, for example, 0.1-1mm, and the thickness of the N sets of metal electrode pairs is, for example, 5-300 μm.
Referring to fig. 3, when the slider 32 moves along the slit 11 relative to the grooved rail 1, since the vertical distance between the slider 32 and the metal electrode layer 22 is smaller than the height of the convex film 31, and limited by the slit 11, the bottom surface of the convex film 31 is in a bending state under the action of a lateral force, and the bottom surface of the convex film 31 is in close contact with the metal electrode layer 22 and simultaneously generates one or more contact surfaces, the number of which is the same as that of the first thin films 311. In this embodiment, the larger the number of the contact surfaces is, the larger the value of the alternating current signal output by the sensor is, and the higher the measurement accuracy and precision are. Taking the example that the convex film 31 includes four convex first thin films 311, 4 contact surfaces exist between the convex film 31 and the metal electrode layer 22 at the same time, the shape of the contact surfaces is as shown in fig. 4, the distance between two adjacent contact surfaces is the distance 2L between two adjacent first thin films 311, and the width of each contact surface is the same as the width B of the finger electrode.
In the present embodiment, the protruding film 31 and the metal electrode layer 22 have different triboelectric properties, for example, the protruding film 31 is made of an electronegative material, the metal electrode layer 22 is made of an electropositive material, and the substrate 21 is made of an insulating material. It is understood that the convex film 31 may also be composed of an electropositive material and the metal electrode layer 22 may be composed of an electronegative material. The metal electrode layer 22 may further include an insulating layer for protecting the metal electrode layer 22, and the insulating layer has a triboelectric property different from that of the convex film 31. Furthermore, the convex film 31 is made of a flexible material, so that the contact between the convex film 31 and the metal electrode layer 22 is flexible, and the durability and the service life of the sensor are improved.
The material of the metal electrode pair in the metal electrode layer 22 is, for example, a material having electropositivity such as copper, aluminum, steel, or the like; the material of the convex film 31 is, for example, Polytetrafluoroethylene (PTFE), Polydimethylsiloxane (PDMS), Polyvinyl chloride (PVC), Fluorinated ethylene propylene copolymer (FEP), polyimide film material (Kapton), etc. which are flexible materials with strong electronegativity; the substrate 21 and the groove-shaped guide rail 1 are made of polymethyl methacrylate (PMMA), organic glass material, Polyethylene (PE), and other materials with strong insulation.
In the process that the convex film 31 slides back and forth relative to the metal electrode layer 22, negative friction charges are accumulated on the surface of the convex film 31, and equal and different positive friction charges are accumulated on the surface of the metal electrode layer 22 (including the phase a metal electrode pair 221, the phase B metal electrode pair 222 and the phase C metal electrode pair 223) according to the charge conservation principle. The surface area of the metal electrode layer 22 is much smaller than the surface area of the contact surface of the convex film 31, and therefore, the negative charge density of the contact surface of the convex film 31 is much smaller than the positive charge density of the surface of the metal electrode layer 22. Taking the a-phase metal electrode pair 221 as an example, in an initial state, the bottom surface of the convex film 31 is completely aligned with the first electrode 2211 of the a-phase metal electrode pair, the first electrode 2211 of the a-phase metal electrode pair is communicated with the second electrode 2212 of the a-phase metal electrode pair through a wire or a resistor, according to the principle of electrostatic induction, positive charges are concentrated on the surface of the first electrode 2211 of the a-phase metal electrode pair under the traction of negative charges on the contact surface of the convex film 31, and at this time, the first electrode 2211 of the a-phase metal electrode pair and the second electrode 2212 of the a-phase metal electrode pair respectively reach the maximum value and the minimum value of the potential; with the sliding of the convex film 31, the contact surface at the bottom of the convex film 31 gradually gets away from the first electrode 2211 of the a-phase metal electrode pair and gets close to the second electrode 2212 of the a-phase metal electrode pair, under the action of electrostatic induction, positive charges gradually flow to the second electrode 2212 of the a-phase metal electrode pair, the potential difference between the two electrodes is correspondingly reduced, when the convex film 31 moves to the middle position between the first electrode 2211 of the a-phase metal electrode pair and the second electrode 2212 of the a-phase metal electrode pair, the potentials of the two electrodes are the same, and the potential difference is 0; when the bottom contact surface of the convex film 31 is completely aligned with the second electrode 2212 of the phase a metal electrode pair, all positive charges are concentrated on the surface of the second electrode 2212 of the phase a metal electrode pair, and the reverse potential difference is maximized; because both the electrodes are periodically arranged, the potential difference between the two electrodes continuously repeats the above changing process in the continuous sliding process of the convex film 31, and an alternating current output is generated. The working principle of the B-phase metal electrode pair 222 and the C-phase metal electrode pair 223 is the same as that of the a-phase metal electrode pair 221, and since the two adjacent electrode pairs are staggered by one-third of the pitch, the phase difference between the two adjacent electric signals is one-third of the signal period, and the waveform of the ac voltage signal output by each phase A, B, C is as shown in fig. 5.
In this embodiment, the potential of each interdigital metal electrode is led out by using a lead. Taking the phase-a signal as an example, the potentials of the two interdigitated metal electrodes of the phase-a metal electrode pair 221 are input into an instrument amplifier for signal amplification, so that the output alternating current signals can be directly collected by a data acquisition card. The sliding speeds of the sliding plate 32 are respectively set to be 25mm/s, 50mm/s, 75mm/s, 100mm/s and 125mm/s, the phase a alternating voltage signal is collected as shown in fig. 6, the alternating voltage signal output at each sliding speed is subjected to fast fourier transform, the characteristic frequency of each alternating voltage signal is calculated, the sliding speed and the characteristic frequency are fitted to obtain a calibration fitting curve as shown in fig. 7, and it can be seen that good linearity exists between the characteristic frequency and the sliding speed.
In this embodiment, a data acquisition card is used to simultaneously acquire a.c. voltage signal, a.c. voltage signal and a.c. voltage signal of the sensor, such as the sinusoidal curves shown in fig. 8, and the two sets of sinusoidal signal sequences in fig. 8 are respectively the signal sequences acquired when the convex film 31 slides forward and backward. Referring to fig. 8, when the a phase current signal leads the B phase current signal or the C phase current signal lags the B phase current signal, it indicates that the convex film 31 slides forward; when the a-phase alternating signal lags the B-phase alternating signal or the C-phase alternating signal leads the B-phase alternating signal, indicating that the convex film 31 slides backward, the direction in which the convex film 31 slides is determined according to the phase relationship between the a-phase alternating signal, the B-phase alternating signal, and the C-phase alternating signal.
Further, in order to detect the displacement and the speed of the sliding of the convex film 31, in the present embodiment, two comparison thresholds are set according to the collected ac signal, which are an upper threshold and a lower threshold, respectively, as shown in fig. 8, when the ac signal reaches the two comparison thresholds, a jump of an edge is recorded, which is a rising edge and a falling edge, respectively. In this embodiment, the two comparison thresholds are converted to each other, the conversion rule is described by taking an a-phase alternating-current voltage signal as an example, under an initial condition, when the amplitude of the a-phase alternating-current voltage signal reaches an upper limit threshold, one edge jump is recorded, at this time, the comparison threshold is converted into a lower limit threshold, along with the sliding of the convex film 31, when the amplitude of the a-phase alternating-current voltage signal reaches the lower limit threshold, a second edge jump occurs, at this time, the comparison threshold is converted into the upper limit threshold, and the sliding distance of the convex film 31 is equal to one-half pitch (L/2) within the time of. In this embodiment, since three ac signals are collected simultaneously, when the convex film 31 slides by a pitch L, the number of edge jumps is three times that of the original one compared with the case of collecting a single ac signal, and the sliding distance of the convex film 31 in the time of two adjacent edge jumps is equal to L/6, thereby increasing the resolution of the sensor to three times that of the original one. In this embodiment, the displacement of the slide of the convex film 31 can be determined according to the number of times of generating the edge jump. Further, the speed at which the convex film 31 slides can be obtained by differentiating the displacement in time, thereby obtaining complete information (displacement, direction and speed) of the sliding of the convex film 31
It can be understood that, in the embodiment of the present disclosure, the resolution of the sensor can be further improved by increasing the number of the metal electrode pairs, where the number of the metal electrode pairs is n, n is greater than or equal to 3, the pitch of the metal electrode pairs is still L, and the distance between two adjacent groups of metal electrode pairs staggered along the arrangement direction is referred to as an interdigital L/n.
Referring to fig. 9, a metal electrode layer 22 includes three groups of metal electrodes, which are respectively labeled as α phase metal electrode pair 41, β phase metal electrode pair 42 and gamma phase metal electrode pair 43, each group of metal electrode pair has a circumferential pitch angle of 3 theta, two adjacent groups of metal electrode pairs are arranged in a staggered way of theta along the arrangement direction, and the α phase metal electrode pair 41, the β phase metal electrode pair 42 and the gamma phase metal electrode pair 43 are all arranged on a circular base 44.
In this embodiment, except that the shapes of the stator structure, the grooved rail 1 and the slider structure 3 are different from those of the sensor in the embodiment shown in fig. 1, other technical features refer to the sensor in the embodiment shown in fig. 1, and are not described herein again.
In the embodiment of the present disclosure, the slide plate 32 may be linearly moved with respect to the groove type guide rail 1, as in the triboelectric motion sensor shown in fig. 1, or the slide plate 32 may be rotationally moved with respect to the groove type guide rail 1, as in the triboelectric motion sensor shown in fig. 9.
Another embodiment of the present disclosure provides a method for measuring a triboelectric motion sensor as described above, including: collecting an alternating current signal generated between two interdigital metal electrodes of each group of metal electrode pairs, and amplifying the alternating current signal; judging the moving direction of a sliding block structure 3 in the triboelectric motion sensor according to the phase relation among N groups of amplified alternating current signals, wherein N is the number of metal electrode pairs in the triboelectric motion sensor; calculating the displacement of the sliding block structure 3 according to the magnitude relation between the N groups of amplified alternating current signals and the preset upper limit threshold value and the preset lower limit threshold value; the speed at which the slider structure 3 moves is calculated from the displacement at which the slider structure 3 moves.
In this embodiment, the preset upper threshold is the upper threshold in the embodiment shown in fig. 8, and the preset lower threshold is the lower threshold in the embodiment shown in fig. 8, and the specific operation of the measurement method is the same as the specific operation of measuring the displacement and the speed direction of the movement of the slider structure 3 in the above embodiment, and details are not repeated here.
In the embodiment of the present disclosure, the sensing performance of the triboelectric motion sensor capable of moving linearly shown in fig. 1 is tested, so that the sensor is driven by the outside to move in two different tracks, and LabVIEW test software is used to compile a corresponding test program to perform real-time acquisition and processing, and the comparison between the measured track and the actual track under different tracks is respectively shown in fig. 10A and 10B, referring to fig. 10A and 10B, it can be seen that the measured track and the actual track are substantially consistent, which indicates that the triboelectric motion sensor in the embodiment of the present disclosure has good sensing characteristics.
Further, in the embodiment of the present disclosure, the external driving slider 32 is reciprocally slid at a speed of 125mm/s, and the output signal is collected every four hours to test the durability of the sensor, and the collection result is shown in fig. 11. Referring to fig. 11, after 32 hours of continuous testing, the sliding plate 32 slides for 14.4 km, and the alternating voltage signal output by the sensor is not obviously attenuated and distorted, thereby showing that the sensor has stronger durability, excellent performance in long-term operation and long service life.
In summary, in the triboelectric motion sensor and the measurement method provided in the embodiments of the present disclosure, a plurality of sets of metal electrode pairs are disposed in the stator structure, and the plurality of sets of metal electrode pairs are staggered along the arrangement direction of the metal electrode pairs, and when the stator structure rubs with the slide plate structure, corresponding non-interfering periodic signals are generated on the plurality of sets of electrode pairs, and displacement, speed, and direction of movement of the slide plate structure are calculated according to the plurality of periodic signals, so that motion sensing of the slide plate is achieved, and the slide plate has a higher resolution.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A triboelectric motion sensor comprising:
a groove-shaped guide rail (1);
the stator structure (2) comprises a substrate (21) and a metal electrode layer (22) from bottom to top, the substrate (21) is arranged on the inner bottom surface of the groove-shaped guide rail (1), the metal electrode layer (22) comprises N groups of metal electrode pairs, each group of metal electrode pair consists of two interdigital metal electrodes, the N groups of metal electrode pairs are arranged in a staggered mode along the arrangement direction of the metal electrode pairs, and N is more than or equal to 3;
a slider structure (3) comprising a convex membrane (31) and a sliding plate (32) for fixing the convex membrane (31), wherein the sliding plate (32) moves relative to the groove-shaped guide rail (1) so that the convex membrane (31) and the metal electrode layer (22) generate friction to generate an alternating current signal between two interdigital metal electrodes of each group of the metal electrode pairs.
2. The triboelectric motion sensor of claim 1, wherein two adjacent sets of said metal electrode pairs are staggered in their direction of alignment by a distance that is a factor N of the pitch of said interdigitated metal electrodes.
3. The triboelectric motion sensor according to claim 1, wherein said convex film (31) comprises a first film (311) with a periodic convex distribution, and a second film (312) connecting said first films (311), the distance between two adjacent first films (311) being twice the pitch of said interdigitated metal electrodes.
4. Triboelectric motion sensor according to claim 3, wherein the sled (32) is provided with periodically distributed grooves (321), the first membrane (311) being embedded in the grooves (321).
5. Triboelectric motion sensor according to claim 1, wherein a slot (11) is provided in the slotted guide (1), the end face of the slide (32) forming a sliding pair with the slot (11).
6. The triboelectric motion sensor according to claim 1, wherein the convex membrane (31) consists of an electronegative material, the metal electrode layer (22) consists of an electropositive material, and the substrate (21) consists of an insulating material.
7. The triboelectric motion sensor according to claim 1, wherein an insulating layer is provided on the metal electrode layer (22) for protecting the metal electrode layer (22).
8. The triboelectric motion sensor according to claim 1, wherein the material of the membrane (31) is a flexible material.
9. Triboelectric motion sensor according to claim 1, wherein the movement of the sled (32) relative to the groove track (1) is a linear movement or a rotational movement.
10. A method of measuring a triboelectric motion sensor as claimed in any of claims 1-9, comprising:
collecting an alternating current signal generated between two interdigital metal electrodes of each group of metal electrode pairs, and amplifying the alternating current signal;
judging the moving direction of a sliding block structure (3) in the triboelectric motion sensor according to the phase relation among N groups of amplified alternating current signals, wherein N is the number of metal electrode pairs in the triboelectric motion sensor;
calculating the displacement of the sliding block structure (3) according to the size relation between the N groups of amplified alternating current signals and a preset upper limit threshold value and a preset lower limit threshold value;
and calculating the moving speed of the sliding block structure (3) according to the moving displacement of the sliding block structure (3).
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| CN113376398A (en) * | 2021-06-29 | 2021-09-10 | 东北林业大学 | Sliding type triboelectric annular motion sensor, annular motion positioning platform and testing method |
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