CN111290144B - Photonic crystal digital optical switch - Google Patents

Photonic crystal digital optical switch Download PDF

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CN111290144B
CN111290144B CN201811486165.9A CN201811486165A CN111290144B CN 111290144 B CN111290144 B CN 111290144B CN 201811486165 A CN201811486165 A CN 201811486165A CN 111290144 B CN111290144 B CN 111290144B
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photonic crystal
heater
waveguide
optical switch
waveguides
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CN111290144A (en
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江伟
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Jiangsu Changshi Jiye Electric Technology Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009Materials therefor
    • G02F1/009Thermal properties
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention discloses a photonic crystal digital optical switch, which comprises a heater and a coating layer, wherein a porous layer is arranged in the coating layer, more than two photonic crystal waveguides are arranged on the porous layer, and the photonic crystal waveguides are intersected; the heater is used for heating a region around the intersection of the photonic crystal waveguides, one side surface of the heating region is positioned between the two crossed photonic crystal waveguides, and when the heater does not work, optical signals are transmitted and passed along the photonic crystal waveguides where the heaters are positioned; when the heater works, a refractive index interface is formed on the side surface of the heating area positioned between the photonic crystal waveguides, the optical signal transmitted in the photonic crystal waveguides is totally reflected when passing through the refractive index interface, and the optical signal after total emission is output from the other crossed photonic crystal waveguide. The extinction ratio and crosstalk of the optical switch are monotonously changed along with the control signal, and the performance of the device is high.

Description

Photonic crystal digital optical switch
Technical Field
The invention relates to an optical switch, in particular to a total reflection type photonic crystal digital optical switch.
Background
Generally, photonic crystal optical switches adopt structures such as directional couplers, Mach-Zehnder interferometers and the like. With the processing deviation and the control signal deviation, the extinction ratio, the crosstalk and the like can be changed in a periodic increasing-decreasing-increasing-decreasing mode, and are unfavorable in certain applications.
Chinese patent 201310603561.6 discloses an optical switch, which includes a silicon substrate for carrying the whole device structure, a silicon dioxide substrate for isolating the silicon substrate from the silicon slab, a silicon slab for forming a two-dimensional silicon photonic crystal waveguide, a multimode interference waveguide, and a splicing waveguide, a silicon dioxide isolation layer for isolating the two-dimensional photonic crystal waveguide from a titanium metal electrode and providing optical isolation and electrical insulation; the titanium metal flat plate electrode is positioned on the silicon dioxide isolation layer and used for heating the two-dimensional photonic crystal waveguide; and the aluminum metal flat plate electrode is positioned on the titanium metal flat plate and used as a contact electrode. The photonic crystal waveguide structure is designed to realize the array switch function of the optical signal with the specific wavelength in the optical communication waveband (the wavelength is 1-2 microns), so that the stability of the electrode under the regulation and control of the strong regulation and control power can be improved. However, the technology of the patent adopts light splitting realized by multi-mode interference under high power, and the specific light splitting effect is related to heating power and is continuously changed along with the increase of the heating power.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides a photonic crystal digital optical switch, the extinction ratio and crosstalk of the optical switch are monotonously changed along with a control signal, and meanwhile, the performance of the device is high.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
a photonic crystal digital optical switch comprises a heater and a coating layer, wherein a porous layer is arranged in the coating layer, and SiO is filled in the hole of the porous layer2More than two photonic crystal waveguides are arranged on the porous layer, and the photonic crystal waveguides are intersected; the heater is used for heating a region around the intersection of the photonic crystal waveguides, one side surface of the heating region is positioned between the two crossed photonic crystal waveguides, and when the heater does not work, optical signals are transmitted and passed along the photonic crystal waveguides where the heaters are positioned; when the heater works, a refractive index interface is formed on the side surface of the heating area positioned between the photonic crystal waveguides, the optical signal transmitted in the photonic crystal waveguides is totally reflected when passing through the refractive index interface, and the optical signal after total emission is output from the other crossed photonic crystal waveguide.
Preferably: one input port corresponds to two output ports, two input ports correspond to one output port, or a plurality of input ports correspond to a plurality of output ports.
Preferably, the following components: and the included angle between the refractive index interface and the photonic crystal waveguide is less than 5 degrees.
Preferably: and when the number of the photonic crystal waveguides is two, the included angle between the refractive index interface and the two photonic crystal waveguides is equal.
Preferably: the two photonic crystalsThe bulk waveguide is a photonic crystal waveguide I and a photonic crystal waveguide II respectively, and the index is [ kn ] along the crystal direction in the crystal lattice]、
Figure BDA0001894565470000021
Selecting the directions of the photonic crystal waveguide I and the photonic crystal waveguide II; or the order of the exchange of the orientation indices, by [ nk ]]、
Figure BDA0001894565470000022
The direction of the photonic crystal waveguide I and the direction of the photonic crystal waveguide II.
Preferably: the structure of the photonic crystal is a tetragonal lattice or a hexagonal lattice.
Preferably: each "atom" in the lattice structure of the photonic crystal is a circular hole or a rectangular hole, and the lattice structure of the photonic crystal is a plurality of connected hole-shaped structures or unconnected hole-shaped structures.
Preferably: the area which needs to be heated by the heater is distributed, and different heating powers are adopted for different heating areas.
Preferably: the heater is of a sectional type heater structure, a T-shaped heater structure and a Y-shaped heater structure.
Compared with the prior art, the invention has the following beneficial effects:
the optical switch is made by adopting the principle of total reflection after heating, and tends to be saturated and does not change when the heating power exceeds a threshold value, so that the extinction ratio and the crosstalk of the optical switch are monotonously changed along with a control signal (generally, the extinction ratio and the crosstalk are monotonously changed along with the increase of the control signal), and the problem that the extinction ratio, the crosstalk and the like of the optical switch can be periodically changed in an enhancing-weakening-enhancing-weakening mode along with the processing deviation and the control signal deviation can be solved. Meanwhile, the photonic crystal structure can generate slow light effect, and the performance of the device can be improved. Through accurate theoretical simulation and design, the reflectivity of the photonic crystal can be increased in a specific switching state by utilizing the reflection characteristic of the photonic crystal in a proper refractive index regulation and control interval, and the switching performance is improved or the switching power consumption is reduced. Segmented heater structures, or multiple sections, may also be employed for efficient use of the photonic crystal. A complex shaped heater. The heater structures take local differences of photonic crystal structures in different regions into consideration, and different heating powers can be adopted for different heater parts, so that the refractive index and the reflection characteristic can be better regulated and controlled.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a view showing the operation of the heater according to the present invention when it is not in operation;
FIG. 3 is a view showing the operation of the heater according to the present invention;
FIG. 4 is a graph showing the change of extinction ratio and crosstalk of optical switches using directional couplers, Mach-Zehnder interferometers, etc.;
FIG. 5 is a graph of extinction ratio and crosstalk for the optical switch of the present invention;
FIG. 6 is a schematic view of a segmented heater;
fig. 7 is a schematic view of an irregularly shaped heater.
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
A photonic crystal digital optical switch, as shown in FIG. 1, comprises a heater 50, a cladding layer 70 and a substrate 60, wherein the cladding layer 70 is arranged on the substrate 60, the heater 50 is used for heating the area around the intersection of the photonic crystal waveguides, the heater 50 is arranged above the cladding layer 70, in another embodiment of the invention, the heater 50 is arranged below the cladding layer 70, in yet another embodiment of the invention, the heater 50 is arranged in the cladding layer 70, as long as one side surface of the heating area is positioned between two crossed photonic crystal waveguides, a hole-shaped layer is arranged in the cladding layer 70, a hole-shaped structure forming the photonic crystal is formed on a silicon chip on an insulator, and the hole-shaped structure can be generated by etching. The pores of the porous layer are filled with a coating material (SiO)2Etc.), in some casesMay be the same as the 70 cladding material, or may be different in other cases. Substrate 60 may be silicon, silicon dioxide, or other material. More than two photonic crystal waveguides are arranged on the porous layer, the photonic crystal waveguides are intersected, and one side surface of the heater 50 is positioned above the intersection point of the photonic crystal waveguides; when the heater 50 does not work, the optical signals propagate through the photonic crystal waveguides where the optical signals are respectively located; when the heater 50 operates, a refractive index interface 100 is formed at a side surface of a heating region located between the photonic crystal waveguides, the optical signal propagating in the photonic crystal waveguide is totally reflected when passing through the refractive index interface 100, and the optical signal after the total emission is output from another photonic crystal waveguide which is intersected.
The optical switch of the invention has one input port corresponding to two output ports and two input ports corresponding to one output port. In some cases, multiple input ports may be used for one or more output ports, or one input port may be used for multiple output ports.
The angle between the refractive index interface 100 and the photonic crystal waveguide is less than 5 degrees. When there are two photonic crystal waveguides, the included angle between the refractive index interface 100 and the two photonic crystal waveguides is equal.
As shown in fig. 2, the heater is not operated and the signal is passed directly. The signal entering from the second photonic crystal waveguide inlet 32 is output from the second photonic crystal waveguide outlet 34.
As shown in fig. 3, the change in refractive index caused by heating of the heater results in a refractive index interface 100 being created. The light is totally reflected at this refractive index interface, causing the signal to switch output ports. The signal entering from the second photonic crystal waveguide inlet 32 is output from the first photonic crystal waveguide outlet 24.
Since the change of the refractive index generated by heating the heater is small, the total reflection can be realized only for the light with a small included angle with the refractive index interface (reflecting surface) 100. Therefore, the key to the operation of this device is that the angle 200 between the optical axis of the first photonic crystal waveguide 20 and the refractive index interface 100 must be small. Similarly, the angle between the optical axis of the second photonic crystal waveguide 30 and the refractive index interface 100 is small.
Generally, the orientation angle of the photonic crystal waveguide with respect to the main axis of the photonic crystal structure is a specific integer, such as 30 degrees, 60 degrees, 45 degrees, 90 degrees, etc. (the main axis corresponds to the crystal orientation index [ kn ]]Smaller integers such as k 1, n 0 or k 1, n 1, etc.). The difference between these angles is large and cannot meet the requirements of the device. This requires special design since the device requires the creation of two waveguide structures with very small included angles (typically less than 10 degrees) in a photonic crystal. For example, it may be exponential [ kn ] along the crystal direction in the crystal lattice]、
Figure BDA0001894565470000041
The directions of the first photonic crystal waveguide 20 and the second photonic crystal waveguide 30 are selected. In some cases, k may be taken as a larger integer and n as a smaller integer (e.g., k-35, n-1). In other cases, the case where k and n are rational numbers or irrational numbers is also considered. Considering that the two basis vector directions of the crystal lattice can be interchanged without loss of generality, the order of the crystal orientation indexes can also be interchanged, as is [ nk ]]、
Figure BDA0001894565470000042
The directions of the first photonic crystal waveguide 20 and the second photonic crystal waveguide 30 are selected. For any [ kn ] in photonic crystal]Directional waveguides are not necessarily available with conventional simulation methods such as FDTD. The following specific design methods may be employed: to and [ kn]The crystal orientation index vertical interface is given by [ W.Jiang, R.T.Chen, and X.Lu "," Theory of light interaction at the surface of a photonic crystal "," Physical Review B71, 2456115 (2005)]The Method herein solves The coupling coefficient of The correlation mode at The left and right interfaces of The waveguide, and then combines The coupling equations at The left and right interfaces, using The analogy [ A.A.Green, E.Istray, and E.H.Sargent "," effective design and optimization of The optical crystal waveguides and couplers: The Interface differential Method, "Optics Express,13,7304(2005)]The method herein solves for the waveguide mode field. Because the included angle between the waveguide and the main axis of the crystal is small angle, [ kn]Unusual values may be taken, as may the miller indices of the corresponding interfaces (e.g., (hj), h 19, j 2). Note that any miller indices (even packages) are given in the w.jiang 2005 paper aboveIncluding rational, irrational cases) of the coupling (transmission, reflection) coefficient of the photonic crystal interface.
The structure of the photonic crystal can be selected from a tetragonal lattice, a hexagonal lattice, or any other lattice. Each "atom" in the lattice structure may be a circular hole, a square hole or a hole of other shape, a plurality of connected hole-like structures, or a non-connected columnar structure. By selecting proper crystal lattices and atoms, the energy band of the photonic crystal can have larger energy gaps in two directions with small included angles, so that line defects can be introduced to form the photonic crystal waveguide.
Generally, photonic crystal optical switches adopt structures such as directional couplers, Mach-Zehnder interferometers and the like. With the process variation and the control signal variation, the extinction ratio, the crosstalk and the like may have a periodic increase-decrease-increase-decrease variation (as shown in fig. 4), which is disadvantageous in some applications. The proposed photonic crystal digital optical switch structure can overcome these problems, so that the extinction ratio and crosstalk change monotonically with the control signal (generally, monotonically with the increase of the control signal), as shown in fig. 5. Meanwhile, the photonic crystal structure can generate slow light effect, and the performance of the device can be improved. The effective reflectivity of the heater area accessory can be increased in a specific switching state by utilizing the reflection characteristic of the photonic crystal in a proper refractive index regulation and control interval through accurate theoretical simulation and design, so that the switching performance is improved or the switching power consumption is reduced.
To make efficient use of the photonic crystal, a segmented heater configuration (FIG. 6) or a multi-section, complex or irregular heater configuration, as shown in FIG. 7, consisting of a Y-shaped heater configuration and two trapezoidal heater configurations, or a T-shaped heater configuration and two rectangular heater configurations, may be used. The heater structures consider local differences of photonic crystal structures in different regions (effective duty ratios of photonic crystals in different regions are slightly different, so that local effective refractive indexes are slightly different), different heating powers can be adopted for different heater parts, and the refractive indexes and the reflection characteristics are better regulated and controlled. For example, heater one 52 in FIG. 6 covers an area having a photonic crystal pore structure closest to the central region where power may be locally reduced. The heating power can be locally increased at the second heater 51 and the third heater 53. In some cases, power may also be locally increased on heater one 52 due to the possible reversal characteristics of the effective index of refraction of the photonic crystal. The heating power can be locally reduced at the second heater 51 and the third heater 53. For example, the area covered by heater four 56 in fig. 7 has the photonic crystal pore structure closest to the central area, and the sensitivity of reflection control based on the photonic crystal is most obvious. The power can be locally reduced in this region. The heating power can be locally increased on the five heaters 55 and the six heaters 57. In some cases, power may also be locally increased on heater four 56 due to the possible reversal characteristics of the effective index of refraction of the photonic crystal. The heating power can be locally reduced on the fifth heater 55 and the sixth heater 57. Of course, in the specific design, the specific shape and number of the heaters can be specifically designed according to the structure of the photonic crystal.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (10)

1. A photonic crystal digital optical switch, comprising: comprises a heater (50) and a coating layer (70), wherein a porous layer is arranged in the coating layer (70), and SiO is filled in the hole of the porous layer2More than two photonic crystal waveguides are arranged on the porous layer, and the photonic crystal waveguides are intersected; the heater (50) is used for heating a region around the intersection of the photonic crystal waveguides, one side surface of the heating region is positioned between the two crossed photonic crystal waveguides, and when the heater (50) does not work, optical signals are transmitted and passed along the photonic crystal waveguides where the heaters are positioned; when the heater (50) works, a refractive index interface (100) is formed on the side surface of the heating area between the photonic crystal waveguides, the optical signal propagating in the photonic crystal waveguides is totally reflected when passing through the refractive index interface (100), and the optical signal after total reflection is carried outAnd the other crossed photonic crystal waveguide outputs.
2. The photonic crystal digital optical switch of claim 1, wherein: one input port corresponds to two output ports, two input ports correspond to one output port, or a plurality of input ports correspond to a plurality of output ports.
3. The photonic crystal digital optical switch of claim 1, wherein: the included angle between the refractive index interface (100) and the photonic crystal waveguide is less than 5 degrees.
4. The photonic crystal digital optical switch of claim 1, wherein: when the number of the photonic crystal waveguides is two, the included angle between the refractive index interface (100) and the two photonic crystal waveguides is equal.
5. The photonic crystal digital optical switch of claim 4, wherein: the two photonic crystal waveguides are a photonic crystal waveguide I (20) and a photonic crystal waveguide II (30) respectively, and the index is [ kn ] in the crystal lattice along the crystal direction]、
Figure FDA0001894565460000012
The directions of the photonic crystal waveguide I (20) and the photonic crystal waveguide II (30) are selected; or the order of the exchange of the orientation indices, by [ nk ]]、
Figure FDA0001894565460000011
Direction of photonic crystal waveguide one (20), photonic crystal waveguide two (30).
6. The photonic crystal digital optical switch of claim 5, wherein: the photonic crystal waveguide structure is designed as follows, firstly, the coupling coefficient of a relevant mode at the left interface and the right interface of the waveguide is solved, and then the coupling equations at the left interface and the right interface are combined to design the waveguide mode.
7. The photonic crystal digital optical switch of claim 1, wherein: the structure of the photonic crystal is a tetragonal lattice or a hexagonal lattice; each "atom" in the lattice structure of the photonic crystal is a circular hole or a rectangular hole, and the lattice structure of the photonic crystal is a plurality of connected hole-shaped structures or unconnected hole-shaped structures.
8. The photonic crystal digital optical switch of claim 1, wherein: the heater (50) is located above, below or within the cladding (70).
9. The photonic crystal digital optical switch of claim 1, wherein: the areas to be heated by the heaters (50) are distributed, and different heating powers are adopted for different heating areas.
10. The photonic crystal digital optical switch of claim 1, wherein: the heater (50) is a segmented heater structure, a T-shaped heater structure or a Y-shaped heater structure.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003062882A2 (en) * 2002-01-22 2003-07-31 University Of Delaware Electro-optical switching using coupled photonic crystal waveguides
CN1688590A (en) * 2002-08-09 2005-10-26 能源变换设备有限公司 Photonic crystals and devices having tunability and switchability
CN101571657A (en) * 2009-06-10 2009-11-04 南京邮电大学 Photonic crystal all-optical switch
CN103605216A (en) * 2013-11-25 2014-02-26 清华大学 Optical switch
JP2016004147A (en) * 2014-06-17 2016-01-12 日本電信電話株式会社 Optical circuit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001281714A (en) * 2000-01-24 2001-10-10 Minolta Co Ltd Optical functional device and optical integrated device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003062882A2 (en) * 2002-01-22 2003-07-31 University Of Delaware Electro-optical switching using coupled photonic crystal waveguides
CN1688590A (en) * 2002-08-09 2005-10-26 能源变换设备有限公司 Photonic crystals and devices having tunability and switchability
CN101571657A (en) * 2009-06-10 2009-11-04 南京邮电大学 Photonic crystal all-optical switch
CN103605216A (en) * 2013-11-25 2014-02-26 清华大学 Optical switch
JP2016004147A (en) * 2014-06-17 2016-01-12 日本電信電話株式会社 Optical circuit

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Thermooptically Tuned Photonic Crystal Waveguide Silicon-on-Insulator Mach–Zehnder Interferometers;Lanlan Gu等;《IEEE PHOTONICS TECHNOLOGY LETTERS》;20070301;第19卷(第5期);全文 *
Ultrashort Photonic Crystal Optical Switch Actuated by a Microheater;Daryl M.Beggs等;《IEEE PHOTONICS TECHNOLOGY LETTERS》;20090101;第21卷(第1期);全文 *
光在一维光子晶体中的全反射贯穿效应;刘启能;《光子学报》;20110228;第40卷(第2期);全文 *

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